CN114812889A - Large-caliber optical element stress detection device and detection method thereof - Google Patents
Large-caliber optical element stress detection device and detection method thereof Download PDFInfo
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- CN114812889A CN114812889A CN202210485232.5A CN202210485232A CN114812889A CN 114812889 A CN114812889 A CN 114812889A CN 202210485232 A CN202210485232 A CN 202210485232A CN 114812889 A CN114812889 A CN 114812889A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 48
- 238000001514 detection method Methods 0.000 title claims abstract description 34
- 230000010287 polarization Effects 0.000 claims abstract description 48
- 238000000034 method Methods 0.000 claims abstract description 6
- 238000012360 testing method Methods 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 2
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- 238000012545 processing Methods 0.000 abstract description 4
- 238000011897 real-time detection Methods 0.000 abstract description 2
- 238000012800 visualization Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 239000005304 optical glass Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/0047—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes measuring forces due to residual stresses
Abstract
The invention provides a large-aperture optical stress detection device and a detection method thereof.A detection light path uses linear polarized laser as input detection light, after the detection light path is expanded by a convergent lens, the detection light path enters a large-aperture element to be detected through a beam splitter prism and a large-aperture collimating objective lens in a collimating way, then the detection light path is reflected by a standard reflector, passes through the element to be detected again, is collimated by a collimating mirror after being converged by the collimating mirror and reflected by the beam splitter prism, finally acquires light intensity information by a polarization camera, and realizes the visualization of the stress in a large-aperture sample through the data processing of the rear end; compared with the traditional detection light path, the light path does not need a wave plate, can realize the real-time detection of the large-caliber stress birefringence without rotating or moving any part, and avoids errors introduced by the wave plate and a motion platform. The method can simultaneously obtain the stress distribution of the whole large-caliber sample without a splicing algorithm, and is easy to integrate with the existing large-caliber interference optical path.
Description
Technical Field
The invention belongs to the field of optical detection, and particularly relates to a large-caliber optical stress detection device and a detection method thereof.
Background
The magnitude of residual stress is an important index for evaluating the performance of optical elements, and especially for large-caliber elements, when large internal stress exists, the optical glass can be automatically broken due to heating, pressing or quenching in the process of processing. Even if the internal stress is not too large, the surface of the processed optical part is slowly deformed with time due to the internal stress, and the imaging quality is seriously affected. In addition, due to the existence of internal stress, the original isotropic property of the optical glass is damaged; the nonuniformity of the internal stress distribution can also cause the quality reduction of the optical uniformity, so that the refractive index distribution is inconsistent, and the wave surface passing through the optical glass is deformed, so that the image quality is deteriorated.
The birefringence detection of the large-aperture optical material has important application in the growth and processing of high-power laser materials, and the influence of stress is difficult to avoid in the processing and manufacturing process. In many important application engineering and scientific research tests in China, such as high-power large-scale laser tests, large-aperture optical elements are required, and the quality of the optical elements is an important factor for ensuring the success of the whole test, so that the accurate determination of stress birefringence and the spatial distribution thereof are extremely important in the manufacture of large-aperture optical materials and elements.
The existing stress detection device has the defect that the larger the measurement caliber is, the zero-order wave plate with the same caliber needs to be equipped, which is difficult to overcome, and the existing measurement means is usually based on the interferometric measurement technology, the sample to be measured needs to be moved during the measurement, and the movement of the sample with the large caliber inevitably generates larger measurement error, so that the domestic technology at present is difficult to realize the stress detection with the caliber of 1m or more.
Disclosure of Invention
The invention aims to provide a large-caliber optical stress detection device and a detection method thereof, which improve the structure of a traditional Fixel type optical path, introduce a polarization camera at a receiving end, and can simultaneously obtain the stress distribution of a whole large-caliber sample without a splicing algorithm.
The technical solution for realizing the invention is as follows: the utility model provides a large-diameter optical stress detection device, utilizes Fixel type light path, including the linear polarized light source, convergent lens, beam splitter prism, first collimating lens, standard speculum, second collimating lens, polarization camera, totally first optical axis sets gradually the linear polarized light source, convergent lens, beam splitter prism, first collimating lens, the component that awaits measuring, standard speculum, totally second optical axis sets gradually second collimating lens, polarization camera, first optical axis is located beam splitter prism's transmission light path, the second optical axis is located beam splitter prism's reflection light path.
The linearly polarized light source emits laser, the laser is converged by the converging lens, then is transmitted by the beam splitting prism, is expanded and collimated by the collimating lens, the expanded light passes through the element to be measured, generates phase delay, the light carrying the stress information of the element to be measured is reflected by the standard reflecting mirror along the original light path to the beam splitting prism, is reflected by the beam splitting prism, is received by the polarization camera after passing through the second collimating lens, the light totally passes through the element to be measured twice, and the finally solved stress birefringence is twice of the actual value.
The detection method of the large-caliber optical stress detection device comprises the following steps:
And 2, placing the beam expanding and collimating lens at the second optical axis, so that the light reflected by the standard reflector is subjected to beam expanding and collimating and then received by the target surface of the polarization camera.
And 3, rotating the polarization camera to enable the emergent direction of the linearly polarized light to be parallel to the 90-degree unit of the polarization camera. And setting the amplitude of the initial linearly polarized light along the y-axis direction to be 2a, the complex amplitude E of the linearly polarized light emitted by the linearly polarized light source is as follows:
E＝2a cos ωt
where ω represents angular frequency and t represents time.
complex amplitude P received by 0 degree, 45 degree, 90 degree and 135 degree units of polarization camera 0 、P 45 、P 90 、P 135 Respectively as follows:
obtaining the light intensity information I collected by the four polarization units 0 、I 45 、I 90 、I 135 Respectively as follows:
therefore, the amplitude 2a, the included angle alpha between the fast axis direction of the element to be measured and the incident linearly polarized light and the phase difference are obtained from the light intensity information of three polarization units
Compared with the prior art, the invention has the remarkable advantages that:
(1) compared with the traditional detection light path, the light path does not need to consider the adjustment of the polarization angles of the polarizer and the analyzer, does not need to add additional phase delay wave plates (half wave plates and quarter wave plates) in the light path, does not need to rotate or move any part, can realize the real-time detection of large-caliber stress birefringence, and avoids errors introduced by the wave plates and the motion platform.
(2) The method is based on the acquisition of four-point equal-interval polarized light intensity, does not need to use a splicing algorithm, can simultaneously obtain the stress distribution of a whole-surface large-aperture sample, and is easy to integrate with the existing large-aperture interference optical path.
(3) The stress magnitude can be calculated by calculating the phase difference only by obtaining the light intensity information, and the method can theoretically measure the stress magnitude of elements with any calibers, particularly optical elements with calibers of 1m or more.
Drawings
Fig. 1 is a schematic structural diagram of the entire detection device.
Fig. 2 is a diagram of a collimated beam expanding light path.
FIG. 3 is a schematic view of a target surface structure of a polarization camera.
And (3) identifying the figure number: 1. a linearly polarized light source; 2. a converging lens; 3. a beam splitter prism; 4. a beam expanding collimating lens; 5. a device under test; 6. a standard reflector; 7. a beam expanding collimating lens; 8. a polarization camera.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without inventive step, are within the scope of the present invention.
It should be noted that all the directional indicators (such as up, down, left, right, front, and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the movement situation, etc. in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indicator is changed accordingly.
In addition, the descriptions related to "first", "second", etc. in the present invention are only for descriptive purposes and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless explicitly specifically defined otherwise.
In addition, the technical solutions in the embodiments of the present invention may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination of technical solutions should not be considered to exist, and is not within the scope of the claimed invention.
With reference to fig. 1 to 3, the large-aperture optical stress detection device of the present invention includes a linearly polarized light source 1, a converging lens 2, a beam splitter prism 3, a first collimating lens 4, a standard reflector 6, a second collimating lens 7, and a polarization camera 8, wherein the linearly polarized light source 1, the converging lens 2, the beam splitter prism 3, the first collimating lens 4, an element to be measured 5, and the standard reflector 6 are sequentially disposed on a first optical axis, and the second collimating lens 7 and the polarization camera 8 are sequentially disposed on a second optical axis.
In this embodiment, a linearly polarized light source 1 emits laser, after converging by a converging lens 2, the laser is transmitted by a beam splitting prism 3, expanded light is expanded and collimated by a collimating lens 4, after the expanded light passes through an element to be measured 5, phase delay is generated, the light carrying stress information of the element to be measured 5 is reflected by a standard reflector 6, reflected to the beam splitting prism 3 along an original light path, reflected by the beam splitting prism 3, received by a polarization camera 8 after passing through a second collimating lens 7, passes through the element to be measured 5 twice in total, and the finally solved stress birefringence is twice of an actual value.
The linearly polarized light source 1 generates linearly polarized laser including o light and e light, and no zero-order wave plate is required to be additionally added in the optical path to change the phase.
Every four polarization units on the target surface of the polarization camera 8 are integrated, and the four polarization units are respectively 0 degrees, 45 degrees, 90 degrees and 135 degrees, so that an additional optical filter or an analyzer is not required to be added in front of the polarization camera 8 when light is collected, the structure of the whole system is simplified, the whole system does not need to manually rotate a certain device, and the problem that materials need to be rotated when the traditional quarter-wave plate method is used for detecting material stress is solved.
The light o and the light e are superposed on the target surface of the polarization camera, the light intensity information is received by each polarization unit (0 degree, 45 degrees, 90 degrees and 135 degrees) of the polarization camera, the measurement of the stress of the element to be measured is converted into the measurement of the light intensity received by each polarization unit, and the stress of the large-caliber optical element is intuitively reflected through the light intensity information.
The detection method of the large-caliber optical stress detection device comprises the following steps:
And 2, placing the beam expanding and collimating lens 7 at the second optical axis, so that the light reflected by the standard reflector 6 is received by the target surface of the polarization camera after being subjected to beam expanding and collimating.
E＝2a cos ωt
where ω represents angular frequency and t represents time.
complex amplitude P received by 0 °, 45 °, 90 °, 135 ° units of the polarization camera 8 0 、P 45 、P 90 、P 135 Respectively as follows:
according to formula derivation, the light intensity information I respectively collected from four polarization directions can be obtained 0 、I 45 、I 90 、I 135 Respectively as follows:
therefore, the amplitude 2a, the included angle alpha between the fast axis direction of the element 5 to be measured and the incident linearly polarized light and the phase difference are obtained from the light intensity information of three units
It should be noted that: the test light in the light path passes through the element to be tested twice, so the obtained stress is twice of the real stress.
Claims (5)
1. A large-diameter optical stress detecting device utilizing a FixedX-type optical path, characterized in that: the device comprises a linearly polarized light source (1), a convergent lens (2), a beam splitter prism (3), a first collimating lens (4), a standard reflector (6), a second collimating lens (7) and a polarization camera (8), wherein the linearly polarized light source (1), the convergent lens (2), the beam splitter prism (3), the first collimating lens (4), a component to be detected (5) and the standard reflector (6) are sequentially arranged on a first optical axis, the second collimating lens (7) and the polarization camera (8) are sequentially arranged on a second optical axis, the first optical axis is positioned on a transmission light path of the beam splitter prism (3), and the second optical axis is positioned on a reflection light path of the beam splitter prism (3);
the linearly polarized light source (1) emits laser, after being converged by the converging lens (2), the laser is transmitted by the beam splitting prism (3), expanded beams are expanded and collimated by the collimating lens (4), after passing through the element to be measured (5), the expanded beams generate phase delay, the beams carrying stress information of the element to be measured (5) are reflected to the beam splitting prism (3) along an original optical path by the standard reflector (6), reflected by the beam splitting prism (3), received by the polarization camera (8) after passing through the second collimating lens (7), pass through the element to be measured (5) for two times totally, and the finally solved stress birefringence is twice of an actual value.
2. The large-caliber optical stress detection device according to claim 1, wherein: the linearly polarized light source (1) generates linearly polarized laser light including o light and e light.
3. The large-caliber optical stress detection device according to claim 1, wherein: every four polarization units of the target surface of the polarization camera (8) are integrated, and the four polarization units are respectively 0 degrees, 45 degrees, 90 degrees and 135 degrees.
4. The detection method of the large-caliber optical stress detection device according to any one of claims 1 to 3, characterized by comprising the following steps:
step 1, firstly, a first optical axis light path is built, and a linearly polarized light source (1), a convergent lens (2), a beam splitter prism (3), a first collimating lens (4) and a standard reflector (6) are adjusted to be in a coaxial state under the condition that an element to be measured is not added;
step 2, placing the beam expanding and collimating lens (7) at a second optical axis, so that the light reflected by the standard reflector (6) is subjected to beam expanding and collimating and then received by a target surface of a polarization camera (8);
step 3, rotating the polarization camera (8) to enable the emergent direction of the linearly polarized light to be parallel to a 90-degree unit of the polarization camera (8); and if the initial linearly polarized light has the amplitude of 2a along the y-axis direction, the complex amplitude E of the linearly polarized light emitted by the linearly polarized light source (1) is as follows:
E＝2a cosωt
where ω represents angular frequency and t represents time;
step 4, placing the element to be measured (5) between the first collimating lens (4) and the standard reflecting mirror (6), and generating o light and e light due to existence of crystal birefringence effect after linearly polarized light passes through the element to be measured (5)
Phase difference of (3), setting the device under test (5) fastThe included angle between the axial direction and the incident linearly polarized light is alpha, and the phase difference of the linearly polarized light passing through the birefringence is
After the element (5) to be measured, complex amplitude E in the x direction x Complex amplitude in y-direction E y Respectively as follows:
complex amplitude P received by 0 degree, 45 degree, 90 degree and 135 degree units of the polarization camera (8) 0 、P 45 、P 90 、P 135 Respectively as follows:
obtaining the light intensity information I collected by the four polarization units 0 、I 45 、I 90 、I 135 Respectively as follows:
step 5, the light passes through the element to be measured (5) twice and finally irradiates the target surface of the polarization camera (8), and the four polarization units respectively acquire light intensity information I 0 、I 45 、I 90 、I 135 The above formula is simplified to obtain:
therefore, the amplitude 2a, the included angle alpha between the fast axis direction of the element to be measured (5) and the incident linearly polarized light and the phase difference are obtained from the light intensity information of three polarization units
5. The detection method of the large-caliber optical stress detection device according to claim 4, wherein: the method is particularly suitable for detecting optical elements with the caliber of 1m or more.
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Cited By (2)
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| CN116007908A (en) * | 2023-03-27 | 2023-04-25 | 中国工程物理研究院激光聚变研究中心 | Device and method for measuring high-transmittance and high-reflectance and non-uniformity of large-caliber flat plate element |
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