CN115541602B - Product defect detection method - Google Patents
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- CN115541602B CN115541602B CN202211523764.XA CN202211523764A CN115541602B CN 115541602 B CN115541602 B CN 115541602B CN 202211523764 A CN202211523764 A CN 202211523764A CN 115541602 B CN115541602 B CN 115541602B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
- G01B11/2522—Projection by scanning of the object the position of the object changing and being recorded
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
- G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N2021/4173—Phase distribution
- G01N2021/418—Frequency/phase diagrams
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Abstract
The invention provides a product defect detection method, which relates to the technical field of defect detection and comprises the following steps: a data acquisition step: acquiring defect data through a detection device, and transmitting the defect data to an upper computer; and (3) data processing: analyzing and processing the defect data through an upper computer; and a result presentation step: and transmitting the processing data obtained in the data processing step to a user display platform, and presenting a final analysis result. The invention can improve the accuracy of defect detection.
Description
Technical Field
The invention relates to the technical field of defect detection in a measurement and test technology, in particular to a product defect detection method, and particularly relates to a product defect detection method applied to industrial detection.
Background
The phase measurement deflection technology is an optical detection technology based on a fringe reflection method, and the technology generates a fringe structure light illuminating beam by computer coding, displays the light illuminating beam by using a display screen, projects the light illuminating beam to a measured object, modulates and deforms the fringe reflected by the measured object, captures a modulated fringe intensity image by using a CCD camera, obtains gradient data by combining with calibration parameters of a system and obtains the shape information of the measured object by using a computer. In the microscopic measurement, a measuring device based on the phase measurement deflection technique can be used for the microscopic measurement of the transparent object; in industrial detection, a detection system based on phase measurement deflection can be used for ultra-precise turning to obtain a high-precision free-form surface; in astronomical observation, an optical detection model based on phase measurement deflection can be used for measuring the surface shape of a precise X-ray reflector and the surface shape of an Inouye solar telescope. As the application of phase measurement deflection technology in various fields is increasing, the research on the wavefront detection method based on the phase measurement deflection technology is becoming more and more important.
The phase measurement deflection technology has the advantages of non-contact, low cost, high detection precision, easy operation, no need of complex devices, wide dynamic range, strong anti-interference capability, high detection speed, full field of view and the like. Based on the inspiration of phase measurement deflection, the invention provides a novel phase measurement deflection wavefront detection method, namely a vortex fringe-based phase measurement deflection wavefront detection device and method, which are used for optical detection of wavefront to be detected. The wavefront detection device has the advantages of strong anti-interference capability, low environmental requirement, wide detection range, high robustness, simple operation, simple structure and low cost, can realize wavefront reproduction of the wavefront to be detected, can avoid using an expensive laser light source, and can expand the application range of the wavefront detection technology.
In industrial detection, quality inspection equipment plays a key role in ensuring the quality of products. In order to realize high standard requirements on product inspection, monitor, traceable, quantifiable and early-warning in the process of inspecting products, and scientifically plan and manage to improve the yield of products and reduce the damage, a defect detection method with low cost, high detection precision, easy operation, no need of complex devices, wide dynamic range and strong anti-interference capability is needed.
The traditional product defect detection method is used for detecting according to a preset program, is low in detection precision, complex in device and high in cost, and cannot meet more and more detection requirements of enterprises.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a product defect detection method.
According to the product defect detection method provided by the invention, the scheme is as follows:
a data acquisition step: acquiring defect data through a detection device, and transmitting the defect data to an upper computer;
a data processing step: analyzing and processing the defect data through an upper computer;
and a result presentation step: and transmitting the processing data obtained in the data processing step to a user display platform, and presenting a final analysis result.
Preferably, the detection device comprises: the device comprises a display screen, a collimating lens, a beam splitting sheet, a reference plane mirror, a first rotating mirror bracket for placing the reference plane mirror, a measured object, a second rotating mirror bracket for placing the measured object, a CCD camera, a three-dimensional translation table for placing the CCD camera and a computer;
the output ends of the display screen and the CCD camera are connected with the input end of the computer;
the display screen is used for displaying vortex stripe light beams generated by the computer codes, the vortex stripe light beams collimated by the collimating lens are used as light sources, and the light sources reach the beam splitting sheet; the transmission beam is used as a reference beam, and the reflection beam is used as an object beam;
after the reference light beam reaches and is fixed on the reference plane mirror, the reference light beam returns and passes through the beam splitting sheet again, the beam splitting sheet reflects part of the reference light beam to enter the CDD camera, a reference intensity image of the reference plane mirror appears on the CCD camera by moving the three-dimensional translation table, and the reference intensity image is transmitted to the computer;
the object beam is fixed on the measured object, reflected by the measured object, penetrates through the beam splitting sheet and then reaches the CCD camera, the signal intensity graph of the measured object appears on the CCD camera by moving the three-dimensional translation table, and the signal intensity graph is transmitted to the computer.
Preferably, the detection device further comprises: an optical isolator;
the reference plane mirror is used for collecting an initial background signal, and after the initial background signal is collected, the optical isolator needs to be fixed in the reference light beam to prevent a reflected light beam of the reference light beam from entering the CCD camera.
Preferably, the distance between the display screen and the reference plane mirror is equal to the distance between the display screen and the object to be measured, and the distance between the CCD camera and the reference plane mirror is equal to the distance between the CCD camera and the object to be measured.
Preferably, the vortex stripe structure light beam displayed by the display screen is a composite stripe light beam formed by a standard horizontal vortex stripe light beam and a vertical vortex stripe light beam, the first rotating mirror frame and the second rotating mirror frame are rotated to enable the reference plane mirror and the object to be measured to obtain vortex composite stripe light beams with different phase shift amounts, and the recorded reference intensity image and the recorded signal intensity image are utilized to realize the wavefront reconstruction of the object to be measured through a related algorithm including a multi-step phase shift algorithm and a Fourier integration algorithm.
Preferably, the object to be measured comprises a reflection-type object to be measured and a combination of a transmission-type object to be measured and a standard plane mirror.
Preferably, the use method of the detection device comprises the following steps:
step S1: setting a detection device, adjusting the detection device to enable the CCD camera to observe the display screen through the reference plane mirror and the object to be detected, enabling the distance between the display screen and the reference plane mirror to be equal to the distance between the display screen and the object to be detected, and enabling the distance between the CCD camera and the reference plane mirror to be equal to the distance between the CCD camera and the object to be detected;
step S2: starting the display screen to display vortex stripe light beams generated by the computer codes;
and step S3: observing the fringe pattern by using the CCD camera, and calibrating the central positions of the reference plane mirror and the measured object by combining the observation range of the measured object;
and step S4: rotating the reference plane mirror, wherein the reference light beam passes through the reference plane mirror and is reflected inside the reference plane mirror so as to form a deformed reference vortex stripe light beam, and recording a reference vortex stripe light beam intensity image by using the CCD camera;
step S5: rotating the object to be measured, allowing the object beam to pass through the object to be measured and reflect inside the object to form a deformed signal vortex stripe beam, and recording a signal vortex stripe beam intensity image by using the CCD camera;
step S6: transmitting the reference vortex stripe light beam intensity image and the signal vortex stripe light beam intensity image which are respectively recorded by the CCD camera to the computer, and separating the recorded intensity images by using the computer to obtain a horizontal and vertical reference vortex stripe light beam intensity image and a signal vortex stripe light beam intensity image;
step S7: calculating the phase distribution of the measured object on the recording surface according to the recorded multiple intensity maps and a multi-step phase shift formula;
step S8: and obtaining the wavefront slope distribution of the measured object through the phase distribution of the measured object, and performing numerical integration on the wavefront slope by using a regional wavefront reconstruction algorithm to obtain the wavefront distribution of the measured object.
Preferably, the rotating reference plane mirror and the object to be measured have the rotating times of N, N is more than or equal to 3, and the rotating angle is
90 °, where L is the topological charge of the vortex-fringe beam, N =0, 1.
Preferably, the horizontal and vertical reference vortex fringe beam intensity images are:
(ii) a The horizontal and vertical signal swirl fringe beam intensity images are:
；
the phase distribution of the measured object on the recording surface has the following specific formula:
preferably, the step S8 specifically includes: obtaining the real phase distribution of the measured object in the x direction and the y direction on the recording surface by the unwrapping algorithm
(ii) a Calculating the equivalent wavelength of the light source by using an averaging method, and obtaining the real phase distribution of the measured object in the x direction and the y direction on the plane by combining an angular spectrum diffraction propagation inverse algorithm
(ii) a And then, obtaining the wave front slope distribution of the measured object by using an optical inverse tracking method:
wherein p is the fringe period, d is the distance between the measured object and the CCD camera,
the light deflection angle components of the incident vortex stripe light beam in the x direction and the y direction are respectively; wavefront slope W and light deflection angle component of wavefront to be measured
And
the following relationships exist:
and (4) carrying out numerical integration on the wavefront slope by using a regional wavefront reconstruction algorithm in combination with the relationship to obtain the wavefront distribution of the measured object.
Compared with the prior art, the invention has the following beneficial effects:
the defect detection method provided by the invention has the advantages of strong anti-interference capability, simple operation, low cost, high accuracy, convenience for more accurately knowing the product quality and improvement of the yield.
Other advantages of the present invention will be described in the detailed description, and those skilled in the art will understand the technical features and technical solutions presented in the description.
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Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic view of the detecting device of the present invention;
FIG. 2 is a flow chart illustrating a method of using the detecting device of the present invention.
Reference numerals: 1. a display screen; 2. a collimating lens; 3. splitting a beam; 4. a reference plane mirror; 5. a first rotatable frame; 6. an optical isolator; 7. an object to be measured; 8. a second rotatable frame; 9. a CCD camera; 10. a three-dimensional translation stage; 11. and (4) a computer.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that it would be obvious to those skilled in the art that various changes and modifications can be made without departing from the spirit of the invention. All falling within the scope of the invention.
The embodiment of the invention provides a product defect detection method, which comprises the following steps:
a data acquisition step: acquiring defect data through a detection device, and transmitting the defect data to an upper computer;
and (3) data processing: analyzing and processing the defect data through an upper computer;
and a result presentation step: and transmitting the processing data obtained in the data processing step to a user display platform, and presenting a final analysis result.
Referring to fig. 1 and 2, the detection apparatus specifically includes: the device comprises a display screen 1, a collimating lens 2, a beam splitting sheet 3, a reference plane mirror 4, a first rotating mirror frame 5 for placing the reference plane mirror 4, an optical isolator 6, a measured object 7, a second rotating mirror frame 8 for placing the measured object 7, a CCD camera 9, a three-dimensional translation table 10 for placing the CCD camera 9 and a computer 11.
The output ends of the display screen 1 and the CCD camera 9 are connected with the input end of the computer 11.
The display screen 1 is used for displaying vortex stripe beams generated by the computer 11, incident vortex stripe beams after the vortex stripe beams are collimated by the collimating lens 2 are used as light sources, and the light sources reach the beam splitting sheet 3, wherein the transmitted beams are used as reference beams, and the reflected beams are used as object beams.
After the reference beam reaches the reference plane mirror 4 fixed on the first rotating frame 5, it returns and passes through the beam splitting sheet 3 again, the beam splitting sheet 3 reflects part of the reference beam into the CDD camera 9, and by moving the three-dimensional translation stage 10, a reference intensity pattern of the reference plane mirror 4 appears on the CCD camera 9, and the reference intensity pattern is transmitted to the computer 11.
The object beam passes through the measured object 7 fixed on the second rotating mirror bracket 8, is reflected by the measured object 7, then passes through the beam splitting sheet 3, and reaches the CCD camera 9, and by moving the three-dimensional translation stage 10, a signal intensity diagram of the measured object 7 appears on the CCD camera 9, and is transmitted to the computer 11.
The distance between the display screen 1 and the reference plane mirror 4 is equal to the distance between the display screen 1 and the measured object 7, and the distance between the CCD camera 9 and the reference plane mirror 4 is equal to the distance between the CCD camera 9 and the measured object 7.
And the reference plane mirror 4 is used for collecting an initial background signal, and after the initial background signal is collected, an optical isolator 6 needs to be fixed in the reference light beam for blocking a reflected light beam of the reference light beam from entering the CCD camera 9. The vortex stripe structure light beam displayed by the display screen 1 is a composite stripe light beam formed by a standard horizontal vortex stripe light beam and a vertical vortex stripe light beam, the reference plane mirror 4 and the measured object 7 obtain vortex composite stripe light beams with different phase shift amounts by rotating the first rotating mirror frame 5 and the second rotating mirror frame 8, and the wavefront reconstruction of the measured object 7 can be realized by utilizing the recorded reference intensity image and the signal intensity image and through a multi-step phase shift algorithm, an integration algorithm and the like.
The object to be measured 7 includes a reflection type object to be measured and a combination object of a transmission type object to be measured and a standard plane mirror.
The using method of the detection device specifically comprises the following steps:
step 1: setting a detection device: the detection device comprises a display screen 1, a collimating lens 2, a beam splitting sheet 3, a reference plane mirror 4, a first rotating mirror frame 5, an optical isolator 6, a measured object 7, a second rotating mirror frame 8, a CCD camera 9, a three-dimensional translation table 10 and a computer 11, wherein the detection device is adjusted to enable the CCD camera 9 to observe the display screen through the reference plane mirror 4 and the measured object 7, the distance between the display screen 1 and the reference plane mirror 4 is equal to the distance between the display screen 1 and the measured object 7, and the distance between the CCD camera 9 and the reference plane mirror 4 is equal to the distance between the CCD camera 9 and the measured object 7.
Step 2: and starting the display screen 1 to enable the display screen 1 to display the vortex stripe structure light beam generated by the computer 11 coding, wherein the light beam of the vortex stripe structure light beam after being collimated by the collimating lens 2 is used as an incident vortex stripe light beam, and the incident vortex stripe light beam is a composite stripe light beam formed by a standard horizontal vortex stripe light beam and a vertical vortex stripe light beam.
And step 3: and observing the fringe pattern by using the CCD camera 9, and calibrating the central positions of the reference plane mirror 4 and the measured object 7 by combining the observation range of the measured object.
And 4, step 4: a reference plane mirror 4 rotatably arranged on the first rotary mirror frame 5, the number of rotation is N (N is more than or equal to 3), and the rotation angle is
90 DEG, wherein L isThe topological charge of the vortex fringe beam, N =0, 1.., N-1, the reference beam passes through the reference plane mirror 4 and is reflected therein to form a deformed reference vortex fringe, and the reference vortex fringe beam intensity map is recorded by the CCD camera 9.
And 5: the measured object 7 is rotatably arranged on the second rotary lens frame 8, the rotation frequency is N (N is more than or equal to 3), and the rotation angle is
90 °, where L is the topological charge of the vortex fringe beam, N =0, 1.,. N-1, the object beam passes through the object under test 7 and is reflected inside it, forming a distorted signal vortex fringe, and the signal vortex fringe beam intensity map is recorded using the CCD camera 9.
Step 6: the CCD camera 9 respectively records a reference vortex stripe light beam intensity image and a signal vortex stripe light beam intensity image with different phase shift values, transmits the acquired intensity data to the computer 11, and separates the recorded intensity images by using the computer 11 to obtain a horizontal reference vortex stripe image and a vertical reference vortex stripe image
Sum signal vortex fringe beam intensity image
；
And 7: and calculating the phase distribution of the measured object 7 on the recording surface according to the recorded multiple intensity maps and a multi-step phase shift formula, wherein the specific formula is as follows:
and step 8: obtaining the real phase distribution of the measured object 7 in the x direction and the y direction on the recording surface by the unwrapping algorithm
Calculating the equivalent wavelength of the light source by using an averaging method, and combiningThe true phase distribution of the measured object 7 in the x direction and the y direction on the plane is obtained by the angular spectrum diffraction propagation inverse algorithm
Then, the wavefront slope distribution of the measured object 7 is obtained by using an optical back tracking method:
wherein p is the fringe period, d is the distance between the object to be measured 7 and the CCD camera 9,
the ray deflection angle components of the incident vortex fringe beam in the x-direction and the y-direction, respectively. Wavefront slope W and light deflection angle component of wavefront to be measured
And
the following relationships exist:
and combining the relationship, and performing numerical integration on the wavefront slope by using a regional wavefront reconstruction algorithm to obtain the wavefront distribution of the measured object 7.
Experiments show that the product defect detection method provided by the embodiment of the invention has the advantages of strong anti-interference capability, low environmental requirement, wide detection range, high robustness, simple operation, simple structure and low cost; the Michelson interference device is utilized to realize the spatial separation of the plane where the measured object is located and the plane where the reference plane mirror is located, so that the mechanical movement is reduced, and the robustness of the detection device is improved;
the detection device obtains different incident vortex stripe light beams with different phase shifts by moving a detected object or a CCD camera, and then records intensity information graphs of the incident vortex stripe light beams before and after passing through the wavefront to be detected by using the CCD camera, so that the accurate reconstruction of the wavefront to be detected is realized by combining a multi-step phase shift algorithm, a regional wavefront reconstruction algorithm and the like; the wavefront reappearance of the wavefront to be detected can be realized, the use of expensive laser light sources can be avoided, and the application range of the wavefront detection technology can be expanded.
Those skilled in the art will appreciate that, in addition to implementing the system and its various devices, modules, units provided by the present invention as pure computer readable program code, the system and its various devices, modules, units provided by the present invention can be fully implemented by logically programming method steps in the form of logic gates, switches, application specific integrated circuits, programmable logic controllers, embedded microcontrollers and the like. Therefore, the system and various devices, modules and units thereof provided by the invention can be regarded as a hardware component, and the devices, modules and units included in the system for realizing various functions can also be regarded as structures in the hardware component; means, modules, units for performing the various functions may also be regarded as structures within both software modules and hardware components for performing the method.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes or modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The embodiments and features of the embodiments of the present application may be combined with each other arbitrarily without conflict.
Claims (8)
1. A method for detecting product defects, comprising:
a data acquisition step: acquiring defect data through a detection device, and transmitting the defect data to an upper computer;
and (3) data processing: analyzing and processing the defect data through an upper computer;
and a result presentation step: transmitting the processing data obtained in the data processing step to a user display platform, and presenting a final analysis result;
the detection device includes: the device comprises a display screen (1), a collimating lens (2), a beam splitting sheet (3), a reference plane mirror (4), a first rotary mirror frame (5) for placing the reference plane mirror, a measured object (7), a second rotary mirror frame (8) for placing the measured object, a CCD camera (9), a three-dimensional translation table (10) for placing the CCD camera and a computer (11);
the output ends of the display screen (1) and the CCD camera (9) are connected with the input end of the computer (11);
the display screen (1) is used for displaying vortex stripe light beams generated by the computer (11) in an encoding mode, the vortex stripe light beams collimated by the collimating lens (2) serve as light sources, and the light sources reach the beam splitting sheet (3); wherein, the transmitted beam is used as a reference beam, and the reflected beam is used as an object beam;
after the reference light beam reaches the reference plane mirror (4) fixed on the first rotating mirror frame (5), the reference light beam returns to and passes through the beam splitting sheet (3) again, the beam splitting sheet (3) reflects part of the reference light beam into the CCD camera (9), a reference intensity image of the reference plane mirror (4) appears on the CCD camera (9) by moving the three-dimensional translation stage (10), and the reference intensity image is transmitted to the computer (11);
the object beam passes through a measured object (7) fixed on a second rotating mirror bracket (8), is reflected by the measured object (7), then penetrates through the beam splitting sheet (3) and reaches the CCD camera (9), and a signal intensity diagram of the measured object (7) appears on the CCD camera (9) by moving the three-dimensional translation table (10), and is transmitted to the computer (11);
vortex stripe structure light beam that display screen (1) show is the compound stripe light beam of standard horizontal vortex stripe light beam and perpendicular vortex stripe light beam formation, through rotatory first rotatory mirror holder (5) and second rotatory mirror holder (8), make reference plane mirror (4) and testee (7) obtain the compound stripe light beam of vortex of different phase shift volume, utilize the reference intensity picture and the signal intensity picture of record, realize through the correlation algorithm including multistep phase shift algorithm, fourier integral algorithm the wavefront reconstruction of testee (7).
2. The product defect detection method of claim 1, wherein the detection device further comprises: an optical isolator (6);
the reference plane mirror (4) is used for collecting an initial background signal, and after the initial background signal is collected, the optical isolator (6) needs to be fixed in the reference light beam to block a reflected light beam of the reference light beam from entering the CCD camera (9).
3. The product defect detection method according to claim 1, characterized in that the distance between the display screen (1) and the reference plane mirror (4) is equal to the distance between the display screen (1) and the object to be measured (7), and the distance between the CCD camera (9) and the reference plane mirror (4) is equal to the distance between the CCD camera (9) and the object to be measured (7).
4. The method for detecting defects in a product according to claim 1, wherein the object to be measured (7) includes a combination of a reflection type object to be measured and a transmission type object to be measured and a standard flat mirror.
5. The product defect detection method of claim 2, wherein the using method of the detection device comprises the following steps:
step S1: setting a detection device, adjusting the detection device to enable the CCD camera (9) to observe the display screen (1) through the reference plane mirror (4) and the object to be detected (7), enabling the distance between the display screen (1) and the reference plane mirror (4) to be equal to the distance between the display screen (1) and the object to be detected (7), and enabling the distance between the CCD camera (9) and the reference plane mirror (4) to be equal to the distance between the CCD camera (9) and the object to be detected (7);
step S2: starting the display screen (1) to enable the display screen (1) to display vortex stripe light beams generated by the computer (11) in a coding mode;
and step S3: observing the fringe pattern by using the CCD camera (9), and calibrating the central positions of the reference plane mirror (4) and the measured object (7) by combining the observation range of the measured object;
and step S4: rotating the reference plane mirror (4), wherein the reference beam passes through the reference plane mirror (4) and is reflected inside the reference plane mirror (4) so as to form a deformed reference vortex stripe beam, and recording a reference vortex stripe beam intensity image by using the CCD camera (9);
step S5: rotating the object to be measured (7), wherein the object beam passes through the object to be measured (7) and is reflected inside the object to be measured (7), so that a deformed signal vortex stripe beam is formed, and a signal vortex stripe beam intensity image is recorded by using the CCD camera (9);
step S6: transmitting the reference vortex stripe light beam intensity image and the signal vortex stripe light beam intensity image which are respectively recorded by the CCD camera (9) to the computer (11), and separating the recorded intensity images by using the computer (11) to obtain horizontal and vertical reference vortex stripe light beam intensity images and signal vortex stripe light beam intensity images;
step S7: calculating the phase distribution of the measured object (7) on the recording surface according to the recorded multiple intensity maps and a multi-step phase shift formula;
step S8: and obtaining the wavefront slope distribution of the measured object (7) through the phase distribution of the measured object (7), and performing numerical integration on the wavefront slope by using a regional wavefront reconstruction algorithm to obtain the wavefront distribution of the measured object (7).
6. The product defect detection method of claim 5, wherein the rotating reference plane mirror (4) and the object to be detected (7) rotate for N times, N is not less than 3, and the rotating angle is
90 °, where L is the topological charge of the vortex-fringe beam, N =0, 1.
7. The product defect detection method of claim 6, wherein the horizontal and vertical reference moire beam intensity images are:
(ii) a The horizontal and vertical signal vortex fringe beam intensity images are:
；
the phase distribution of the measured object (7) on the recording surface is specifically represented by the following formula:
8. the product defect detecting method according to claim 7, wherein the step S8 specifically comprises: obtaining the real phase distribution of the measured object (7) in the x direction and the y direction on the recording surface by a unwrapping algorithm
；
Or calculating the equivalent wavelength of the light source by using an averaging method, and obtaining the real phase distribution of the measured object (7) in the x direction and the y direction on the plane by combining an angular spectrum diffraction propagation inversion algorithm
(ii) a Then, the wavefront slope distribution of the measured object (7) is obtained by using an optical inverse tracing method:
wherein p is the fringe period, d is the measured objectThe distance between the body (7) and the CCD camera (9),
the light deflection angle components of the incident vortex stripe light beam in the x direction and the y direction are respectively; wavefront slope W and light deflection angle component of wavefront to be measured
And
the following relationships exist:
and (3) carrying out numerical integration on the wavefront slope by using a regional wavefront reconstruction algorithm in combination with the relationship to obtain the wavefront distribution of the measured object (7).
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| CN202211523764.XA CN115541602B (en) | 2022-12-01 | 2022-12-01 | Product defect detection method |
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