CN115014721A - Phase measurement deflection surgery wavefront measurement device and method based on vortex focusing lens - Google Patents
Phase measurement deflection surgery wavefront measurement device and method based on vortex focusing lens Download PDFInfo
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Abstract
A wave front measuring device and method of phase measurement deflection surgery based on vortex focusing lens, including display screen, vortex focusing lens, rotating mirror holder, filtering aperture, focusing lens, object to be measured, first three-dimensional translation stage, image acquisition module, second three-dimensional translation stage and computer, the invention obtains the incident vortex stripe light beam with different phase shifts by rotating the vortex focusing lens, utilize the object image relation of object to be measured and detecting system target surface, and then utilize the image acquisition module to record the intensity information before and after the incident vortex stripe light beam passes the wave to be measured, thus combine multi-step phase shift algorithm, area wave front reconstruction algorithm, etc. to realize the accurate reconstruction of the wave front to be measured; the invention has compact structure, low cost, simple operation and high detection precision, can avoid using expensive laser light source, can expand the application range of the wavefront measuring device, and can provide a new technical scheme for the civilized and commercialized path of the phase measurement deflection technology.
Description
Technical Field
The invention belongs to phase measurement deflection technology, and particularly relates to a phase measurement deflection technology wavefront measuring device and method based on a vortex focusing lens.
Background
The phase measurement deflection technology projects stripes onto the surface of an object to be measured by using a screen, and then according to the captured stripe information, the shape information of the surface of the object to be measured is obtained through calculation; the technology has great attention to potential application values in the fields of astronomical observation, modern industrial detection, microscopic measurement and the like. In astronomical observation, the university of arizona in the united states proposes an optical detection model based on phase measurement deflection, the model can be used for measuring the surface shapes of a secondary mirror of a large patrol telescope with the diameter of 5m, a primary mirror of a barley philosophy telescope with the diameter of 8.4m, a precise X-ray reflector and an Inouye solar telescope, and the detection precision of the model can be comparable to that of an interferometer; in modern industrial detection, a detection system based on a phase measurement deflection technology can be used for the paint spraying condition of an automobile body, can be used for ultra-precise turning to obtain a high-precision free curved surface, can be used for defect detection of an intraocular lens and the like; in the microscopic measurement, Hausler et al measured the mirror surface shape of nanometer size based on the principle of phase measurement deflection, and further applied the method to the microscopic measurement of transparent objects. The application of the phase measurement deflection technique is increasing in various fields, and the research on the detection device and the detection method based on the phase measurement deflection technique is also becoming important.
Knauer et al propose phase measurement deflection, and the technique has the advantages of non-contact, low cost, high detection precision, easy operation, no need of complex devices, wide dynamic range, strong anti-interference capability, fast detection speed, full view and the like. Wangwei and the like generate phase-shifted sine stripe structured light as a light source in CN111537203A through a computer, the structured light passes through a lens to be measured to form deformed stripe structured light, and then the wavefront distribution of the optical lens is obtained by adopting a phase measurement deflection technology. The method has a simple structure, but the intensity information detected by the detection system in the optical device is usually the intensity information after the light beam emitted from the object to be detected is transmitted for a certain distance, and the phase error introduced in the diffraction transmission process can reduce the imaging and detection precision of the device.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a phase measurement deflection wavefront measuring device and method based on a vortex focusing lens, which are used for realizing high-precision reconstruction of a wavefront to be measured; the method comprises the steps of obtaining incident vortex stripe light beams with different phase shifts by rotating a vortex focusing lens phase shifter, and recording intensity information graphs before and after the incident vortex stripe light beams pass through a wave to be detected by using an image acquisition module, so that accurate reconstruction of a transmission type wave front to be detected is realized by combining a multi-step phase shift algorithm, a regional wave front reconstruction algorithm and the like. The detection device is simple in operation, simple in structure, low in cost, high in detection precision and high in robustness, can realize wavefront reproduction of the wavefront to be detected, can avoid using an expensive laser light source, and provides a new technical scheme for civilization and commercialization of phase measurement deflection.
Technical solution of the invention
A phase measurement deflection surgery wavefront measuring device based on a vortex focusing lens is characterized by comprising a display screen, the vortex focusing lens, a rotating mirror bracket for placing the vortex focusing lens, a filtering small hole, the focusing lens, a first three-dimensional translation stage for placing an object to be measured, an image acquisition module, a second three-dimensional translation stage for placing the image acquisition module and a computer, wherein the output ends of the display screen and the image acquisition module are respectively connected with the input end of the computer;
the vortex focusing lens, the filtering aperture and the focusing lens form a 4f system, and the filtering aperture is positioned on the frequency spectrum surface of the 4f system;
the display screen is used for displaying vortex stripe light beams generated by the computer, the vortex stripe light beams serve as light sources and sequentially pass through the vortex focusing lens and the filtering small hole to reach the focusing lens, the light beams collimated by the focusing lens serve as incident vortex stripe light beams, and the vortex focusing lens is driven by rotating the rotating mirror frame so as to obtain the incident vortex stripe light beams with different phase shifts;
the incident vortex stripe light beam is collected by the image collection module after being refracted by the object to be detected, and the image collection module is enabled to appear a refraction intensity map of the object to be detected by moving the first three-dimensional translation stage and the second three-dimensional translation stage and transmit the refraction intensity map to the computer.
The vortex focusing lens is a circular vortex focusing lens or an elliptical vortex focusing lens with required topological charge or other vortex beams capable of generating different topological charge and eccentricity.
The object to be measured is a single lens, a combined lens or other phase type objects.
And the computer controls the first three-dimensional translation stage and the second three-dimensional translation stage to move respectively.
The method for measuring the wavefront of the phase measurement deflection surgery by using any one of the measuring devices is characterized by comprising the following steps of:
1) starting a display screen, and enabling vortex stripe light beams emitted by the display screen to be incident to a vortex focusing lens;
rotating the rotary spectacle frame by the rotation angles
The positive integer N is the rotation times of the rotating mirror frame, N is more than or equal to 3, N is 1,2,3.. N, and L is the topological charge number of the vortex focusing lens, so that the phase shift is obtained by the emergence of the focusing lens and is a vortex stripe light beam incident each time;
the incident vortex stripe light beam is refracted by an object to be detected and then emitted at a certain deflection angle to obtain a deformed vortex stripe light beam;
moving the first three-dimensional translation stage and the second three-dimensional translation stage to drive the object to be detected and the image acquisition module, so that the image acquisition module has a refraction intensity chart I of the object to be detected n (x,y,θ n ) Wherein, (x, y) is the spatial coordinate distribution of the recording surface;
the image acquisition module respectively records the refraction intensity chart I of incident vortex stripe beams with different phase shifts passing through the object to be detected n (x,y,θ n ) And transmitting the acquired intensity data to the computer;
2) according to a plurality of recorded refraction intensity maps I n (x,y,θ n ) Calculating the phase distribution of the object to be measured on the recording surface
The formula is as follows:
3) obtaining the real phase distribution of the object to be measured through unwrapping operation
And then, obtaining the wave front slope distribution of the object to be detected by using an optical inverse tracking method, wherein the formula is as follows:
wherein p is the fringe period, d is the distance from the object to be measured to the image acquisition module,
for a pixel point, the amount of phase change, θ, caused by the object to be measured x And theta y The light deflection angle components of the incident vortex stripe light beam in the x direction and the y direction are respectively;
wavefront slope W of wavefront to be measured and light deflection angle component theta x And theta y The relationship is as follows:
and combining the relationship, and performing numerical integration on the wavefront slope by using a regional wavefront reconstruction algorithm to obtain the wavefront distribution of the object to be detected.
Compared with the prior art, the invention has the technical effects that:
1) the invention combines with Kepler telescope system, and improves the imaging precision of the imaging device by using the object image relationship between the measured object and the target surface of the detection system.
2) The invention obtains the incident vortex stripe light beams with different phase shifts by rotating the vortex focusing lens, and then records the intensity information graphs of the incident vortex stripe light beams before and after passing through the wave to be detected by using the image acquisition module, thereby realizing the accurate reconstruction of the wave front to be detected by combining a multi-step phase shift algorithm, a regional wave front reconstruction algorithm and the like.
3) The invention can avoid using expensive laser light source, expand the application range of the wavefront measuring device, and provide a new technical scheme for the way of civilization and commercialization of the phase measurement deflection technique.
Drawings
FIG. 1 is a schematic structural diagram of a phase measurement deflection surgery wavefront measuring device based on a vortex focusing lens according to the present invention.
Detailed Description
The present invention will be further described with reference to the following examples and drawings, but the scope of the present invention should not be limited thereto.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a phase measurement deflection surgery wavefront measuring device based on a vortex focusing lens, and the device includes a display screen 1, a vortex focusing lens 2, a rotating frame 3 for placing the vortex focusing lens 2, a filtering aperture 4, a focusing lens 5, a first three-dimensional translation stage 7 for placing an object to be measured 6, an image acquisition module 8, a second three-dimensional translation stage 9 for placing the image acquisition module 8, and a computer 10, wherein output ends of the display screen 1 and the image acquisition module 8 are respectively connected with an input end of the computer 10;
the vortex focusing lens 2, the filtering aperture 4 and the focusing lens 5 form a 4f system, and the filtering aperture 4 is positioned on the frequency spectrum surface of the 4f system;
the display screen 1 is used for displaying vortex stripe light beams generated by the computer 10, the vortex stripe light beams serve as light sources and sequentially pass through the vortex focusing lens 2 and the filtering small hole 4 to reach the focusing lens 5, the light beams collimated by the focusing lens 5 serve as incident vortex stripe light beams, and the vortex focusing lens 2 is driven by rotating the rotating mirror bracket 3, so that the incident vortex stripe light beams with different phase shifts are obtained;
after the incident vortex stripe light beam is refracted by the object to be detected 6, the incident vortex stripe light beam is collected by the image collection module 8, and by moving the first three-dimensional translation stage 7 and the second three-dimensional translation stage 9, a refraction intensity map of the object to be detected 6 appears on the image collection module 8 and is transmitted to the computer 10;
the vortex focusing lens 2 is a circular vortex focusing lens or an elliptical vortex focusing lens with required topological charge or other vortex beams capable of generating different topological charges and eccentricities;
the object 6 to be measured is a single lens, a combined lens or other phase type objects;
the computer 10 controls the first three-dimensional translation stage 7 and the second three-dimensional translation stage 9 to move respectively;
the method for measuring the wavefront of the phase measurement deflection surgery by using the measuring device is characterized by comprising the following steps:
1) starting a display screen 1, and enabling vortex stripe light beams emitted by the display screen 1 to be incident to a vortex focusing lens 2;
rotating the lens holder 3 by a rotation angle θ 1 ＝0°、
And
wherein L is the topological charge number of the vortex focusing lens 2, so that the outgoing light of the focusing lens 5 obtains a phase shift of 0,
π、
Incident vortex fringe beam of (a);
the incident vortex stripe light beam is refracted by the object to be measured 6 and then emitted at a certain deflection angle to obtain a deformed vortex stripe light beam;
the first three-dimensional translation stage 7 and the second three-dimensional translation stage 9 are moved to drive the object 6 to be detected and the image acquisition module 8, so that the image acquisition module 8 generates a refraction intensity chart I of the object 6 to be detected n (x,y,θ n ) Wherein, (x, y) is the spatial coordinate distribution of the recording surface;
the image acquisition module 8 respectively records the refraction intensity chart I of incident vortex stripe beams with different phase shifts passing through the object 6 to be detected n (x,y,θ n ) And transmits the collected intensity data to the computer 10;
2) according to a plurality of recorded refraction intensity maps I n (x,y,θ n ) Calculating the phase distribution of the object 6 to be measured on the recording surface according to a multi-step phase shift formula
The specific formula is as follows:
the three-step phase shift formula:
four-step phase shift formula:
3) obtaining the real phase distribution of the object 6 to be measured through the unwrapping operation
And then, obtaining the wave front slope distribution of the object 6 to be detected by using an optical inverse tracking method, wherein the formula is as follows:
wherein p is the fringe period, d is the distance from the object 6 to be measured to the image acquisition module 8,
for a pixel point the amount of phase change, θ, caused by the object 6 to be measured x And theta y The ray deflection angle components of the incident vortex stripe beam in the x-direction and y-direction, respectively.
Wavefront slope W of wavefront to be measured and light deflection angle component theta x And theta y The following relationships exist:
and (3) combining the relationship, and performing numerical integration on the wavefront slope by using a regional wavefront reconstruction algorithm to obtain the wavefront distribution of the object 6 to be detected.
Experiments show that the invention has simple and compact structure, low cost, simple operation, high detection precision and high robustness, can obtain incident vortex fringe beams with different phase shifts by rotating the vortex focusing lens, can realize the accurate reconstruction of the wavefront to be detected by combining a multi-step phase shift algorithm, a regional wavefront reconstruction algorithm and the like, can avoid using an expensive laser light source, can expand the application range of the wavefront measuring device, and can provide a new technical scheme for the civilization and commercialization of the phase measurement deflection technology.
The above-mentioned embodiments further explain the objects, technical solutions and advantages of the present invention in detail. It should be understood that the above description is only exemplary of the present invention and is not intended to limit the present invention. Any modification, equivalent replacement or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (5)
1. The phase measurement deflection surgery wavefront measuring device based on the vortex focusing lens is characterized by comprising a display screen (1), the vortex focusing lens (2), a rotating mirror frame (3) for placing the vortex focusing lens (2), a filtering small hole (4), a focusing lens (5), a first three-dimensional translation table (7) for placing an object to be measured (6), an image acquisition module (8), a second three-dimensional translation table (9) for placing the image acquisition module (8) and a computer (10), wherein the output ends of the display screen (1) and the image acquisition module (8) are respectively connected with the input end of the computer (10);
the vortex focusing lens (2), the filtering small hole (4) and the focusing lens (5) form a 4f system, and the filtering small hole (4) is positioned on the frequency spectrum surface of the 4f system;
the display screen (1) is used for displaying vortex stripe light beams generated by the computer (10), the vortex stripe light beams serve as light sources and sequentially pass through the vortex focusing lens (2) and the filtering small hole (4) to reach the focusing lens (5), the light beams collimated by the focusing lens (5) serve as incident vortex stripe light beams, and the vortex focusing lens (2) is driven by rotating the rotating mirror frame (3) so as to obtain incident vortex stripe light beams with different phase shifts;
incident vortex stripe light beam pass through to await measuring object (6) refraction after, by image acquisition module (8) gather, through removing first three-dimensional translation platform (7) and second three-dimensional translation platform (9), make image acquisition module (8) on appear the refraction intensity map of awaiting measuring object (6), and transmit to computer (10).
2. The phase measurement deflection wavefront measuring device based on a vortex focus lens according to claim 1, wherein the vortex focus lens (2) is a circular vortex focus lens or an elliptical vortex focus lens with a desired topological charge or other vortex beams capable of generating different topological charges and eccentricities.
3. A vortex focusing lens based phase measurement deflection wavefront measuring device according to claim 1, wherein the object (6) to be measured is a single lens, a combined lens or other phase type object.
4. A vortex focusing lens based phase measuring deflection wavefront measuring device according to claim 1, wherein said computer (10) controls the movement of said first (7) and second (9) three-dimensional translation stages, respectively.
5. A method for phase measurement deflection wavefront measurement using the measurement device of any one of claims 1-4, comprising the steps of:
1) starting a display screen (1), and enabling vortex stripe light beams emitted by the display screen (1) to be incident to a vortex focusing lens (2);
a rotating frame (3) with a rotation angle of
The positive integer N is the rotation times of the rotating mirror frame, N is more than or equal to 3, N is 1,2,3.. N, and L is the topological charge of the vortex focusing lens (2), and the vortex fringe light beam is emitted through the focusing lens (5) to obtain a phase shift of each incident vortex fringe light beam;
the incident vortex stripe light beam is refracted by an object (6) to be detected and then emitted at a certain deflection angle to obtain a deformed vortex stripe light beam;
the first three-dimensional translation table (7) and the second three-dimensional translation table (9) are moved to further drive the object to be detected (6) and the image acquisition module (8), so that the image acquisition module (8) is enabled to appear a refraction intensity graph I of the object to be detected (6) n (x,y,θ n ) Wherein, (x, y) is the spatial coordinate distribution of the recording surface;
the image acquisition module (8) respectively records a refraction intensity chart I of incident vortex stripe beams with different phase shifts passing through the object to be detected (6) n (x,y,θ n ) And transmitting the acquired intensity data to said computer (10);
2) according to the recorded multiple refraction intensity maps I n (x,y,θ n ) Calculating the phase distribution of the object (6) to be measured on the recording surface
The formula is as follows:
3) obtaining the true phase distribution of the object (6) to be measured by unwrapping
And then, obtaining the wave front slope distribution of the object (6) to be detected by using an optical inverse tracking method, wherein the formula is as follows:
wherein p is the fringe period, d is the distance from the object (6) to be measured to the image acquisition module (8),
for a pixel point the amount of phase change, theta, caused by said object (6) to be measured x And theta y The light deflection angle components of the incident vortex stripe light beam in the x direction and the y direction are respectively;
wavefront slope W of wavefront to be measured and light deflection angle component theta x And theta y The relationship is as follows:
and (3) combining the relationship, and performing numerical integration on the wavefront slope by using a regional wavefront reconstruction algorithm to obtain the wavefront distribution of the object (6) to be detected.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115541602A (en) * | 2022-12-01 | 2022-12-30 | 常州微亿智造科技有限公司 | Product defect detection method |
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