CN107144240A - A kind of system and method for detecting glass panel surface defect - Google Patents

A kind of system and method for detecting glass panel surface defect Download PDF

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Publication number
CN107144240A
CN107144240A CN201710335639.9A CN201710335639A CN107144240A CN 107144240 A CN107144240 A CN 107144240A CN 201710335639 A CN201710335639 A CN 201710335639A CN 107144240 A CN107144240 A CN 107144240A
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glass panel
panel surface
structure light
measured
directions
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岳慧敏
李绒
潘志鹏
陈红丽
刘永
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University of Electronic Science and Technology of China
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University of Electronic Science and Technology of China
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Priority to CN201710335639.9A priority Critical patent/CN107144240A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • G01N2021/0112—Apparatus in one mechanical, optical or electronic block
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8809—Adjustment for highlighting flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8829—Shadow projection or structured background, e.g. for deflectometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/102—Video camera

Abstract

The present invention provides a kind of detection glass panel surface defect system and method, the present invention is by simple lens, telecentric beam path is combined with phase measurement deviation art, by setting coding area-structure light display device, beam splitter, glass panel surface to be measured and image collecting device are allowed to meet reflection law in the position in space, lens are set between coding area-structure light display device and beam splitter, and coding area-structure light display device is located in the object space focal plane of lens, orthogonal standard N is produced by computer control and walks phase shift area-structure light to glass panel surface to be measured, the modulation degree for obtaining deforming area-structure light is handled after collection image through back-end image processing equipment to be distributed, optimal gradient distribution is distributed with optimum height.The present invention solve the legacy system based on phase measurement deviation art in defects detection due to phase caused by system ambiguity and elevation information it is inaccurate the problem of, and then improve glass panel surface defects detection precision and the degree of accuracy.

Description

A kind of system and method for detecting glass panel surface defect
Technical field
Present invention relates particularly to one kind detection glass panel surface defect system and method.
Background technology
As information technology is developed rapidly in recent years, glass panel is with its high intensity, high rigidity, resistance to compression, and impact resistant etc. is excellent Point, is widely used in the fields such as LCD liquid crystal display screen, Mobile phone screen, tablet personal computer, household electrical appliance, to its quality requirement also with It is more harsh.
Glass panel production process includes：Sawing sheet, CNC, grinding, polishing, ion exchange, ultrasonic wave cleaning, silk-screen, baking It is roasting, plated film etc., links are likely to produce defect in production process.Therefore, the defects detection of glass panel is most important. Traditional detection method is based on reflected light or transmitted light light-intensity test principle, main to include artificial detection and Machine Vision Detection two The method of kind.Artificial detection relies primarily on the vision and experience of testing staff, it is easy to malfunctions and takes.At present, domestic glass The detection of glass panel defect still relies primarily on artificial detection, and workload is heavy, and has human eye compared with major injury.Machine vision is examined Survey and human eye instead of using CCD camera, by setting suitable light source so that defect is protruded, this method stability is high, measurement speed Degree is fast, but light source design is complicated, is only only possible to observe defect, and the reflectivity caused by defect under specific angle When change is smaller, it more difficult to detect defect.In addition, this method belongs to two-dimensional measurement, it is impossible to detect the 3 d shape of glass panel Defect.Therefore use optical three-dimensional measurement technology turn into detection glass panel so that obtain its surface topography information important means it One.Measuring three-dimensional morphology technology based on phase measurement deviation art is the principle based on gradiometry, because low-angle can cause Larger phase place change, it is adaptable to high-precision, the highly sensitive three-dimensional measurement of minute surface and class mirror article, and this method profit Common incoherent light source is used, but with the measurement accuracy close to interferometer, and without accurate mechanical scanner, reliability Higher with durability, cost is lower, insensitive to variation of ambient temperature and vibration.However, actual use phase measurement deviation art Measurement gained phase is not only modulated by the gradient of object under test, but also by the high modulation of object under test, is being demodulated To phase data in cannot distinguish between gradient and height, i.e., so-called system ambiguity, and system ambiguity can cause phase to be surveyed There is error in amount.So, system ambiguity how is eliminated, and then accuracy of detection and the degree of accuracy are improved, as people in the art Member's technical problem urgently to be resolved hurrily.
The content of the invention
In order to overcome the deficiencies in the prior art, the present invention provides a kind of by simple lens, telecentric beam path and phase deviation art phase With reference to so solve system ambiguity problem detecting system and detection method, can obtain to be measured by detecting system of the present invention The information transfer system on surface, gradient information and elevation information, to improve the precision and accuracy of glass panel defects detection, and System architecture is optimized by beam splitter, is conducive to detecting system to be miniaturized.
To achieve the above object, the present invention provides following technical scheme：
Technical scheme one：
A kind of system for detecting glass panel surface defect, including：Coding area-structure light display device, lens, beam splitter, Image collecting device and image processing equipment；
Image collector is arranged in directly over glass panel surface to be measured, coding area-structure light display device and IMAQ Device is each perpendicular to glass panel surface to be measured and placed, and 45 ° of beam splitter inclination is arranged at image collecting device and treated with glass panel Survey between surface so that coding area-structure light display device produces incidence side of the light through beam splitter to glass panel surface to be measured It is parallel to the radiation direction with reflexing to image collecting device through glass panel surface to be measured, wherein：Coding area-structure light is shown Lens are provided between equipment and beam splitter, and the object space focal plane image that coding area-structure light display device is located at lens is adopted Provided with object space telecentric lens formation telecentric beam path in acquisition means；Coding area-structure light display device exports orthogonal mark respectively Quasi- N is walked to turn back by beam splitter again after phase shift area-structure light, rays pass through lens and is imaged in glass panel surface to be measured, through glass The deformation area-structure light obtained after panel surface modulation to be measured enters the light receiving surface of image collecting device, image collecting device point Do not gather the distressed structure light image obtained in the two directions after each phase shift, and by back-end image processing equipment at Reason.
According to embodiments of the present invention, the area-structure light pattern that coding area-structure light display device is produced in the present invention is sine Striped.
Technical scheme two：
A kind of detection method of glass panel surface defect, comprises the following steps：
Step A：Build following detecting system：
Image collector is arranged in directly over glass panel surface to be measured, coding area-structure light display device and image are adopted Acquisition means are each perpendicular to glass panel surface to be measured and placed, and beam splitter tilts 45 ° and is arranged at image collecting device and glass panel Between surface to be measured, it is allowed to meet reflection law, wherein：Provided with object space telecentric lens formation telecentricity light in image collecting device Road, is provided with lens, and coding area-structure light display device is placed between coding area-structure light display device and beam splitter At the object space focal plane of mirror；
Step B：The detecting system built based on step A, control coding area-structure light display device is produced respectively mutually to hang down Straight standard N walks phase shift area-structure light and projected by beam splitter to glass panel surface to be measured, through glass panel surface to be measured The deformation area-structure light obtained after modulation enters light receiving surface in image collecting device, and image collecting device gathers two sides respectively N frame deformation plance structure light images obtained by upwards, the span of the N is N≤3, and by the view data collected Obtain deforming modulation degree distribution map, gradient distribution map and the height distribution map of area-structure light by image processing device processes.
Further, when area-structure light pattern is sine streak, technical scheme is as follows：
A kind of detection method of glass panel surface defect, comprises the following steps：
Step A：Build following detecting system：
Image collector is arranged in directly over glass panel surface to be measured, coding area-structure light display device and image are adopted Acquisition means are each perpendicular to glass panel surface to be measured and placed, and beam splitter tilts 45 ° and is arranged at image collecting device and glass panel Between surface to be measured, it is allowed to meet reflection law, wherein：Provided with object space telecentric lens formation telecentricity light in image collecting device Road, is provided with lens, and coding area-structure light display device is placed between coding area-structure light display device and beam splitter At the object space focal plane of mirror；
Step B：Detect surface defect information to be measured；
B1：The detecting system built based on step A, coding area-structure light display device projects orthogonal standard respectively N walks phase shift area-structure light to glass panel surface to be measured, the deformation area-structure light obtained after glass panel surface modulation to be measured The light receiving surface into image collecting device, image collecting device is gathered respectively obtains N frame deforming stripe images in both direction, The span of the N is N≤3, it is assumed that orthogonal both direction is respectively x directions and y directions, then：CCD camera is gathered The light intensity of the horizontal direction deforming stripe image of n-th phase shift can be expressed as follows：
In formula：A (x, y) is background light intensity,For x directions fringe contrast, δnFor phase shift size, It is the additive phase introduced by x directions striped after glass panel surface modulation to be measured；
The light intensity of the vertical direction deforming stripe image of CCD camera collection n-th phase shift can be expressed as follows：
In formula：A (x, y) is background light intensity,For y directions fringe contrast, δnFor phase shift size, It is the additive phase introduced by y directions striped after glass panel surface modulation to be measured；
X Direction distortions stripe pattern or y Direction distortion stripe patterns are selected, equation below is used by image processing equipment Calculate the modulation degree distribution for obtaining deforming stripe：
In formula：In(x, y) is gained deforming stripe figure after x Direction distortions striped or y Direction distortion striped n-th phase shifts The light intensity value of picture, δnFor phase shift size；
B2：By N frames x Direction distortions stripe image data obtained by step B1 and N frame y Direction distortions stripe image data difference The phase for obtaining deforming stripe using least square method calculating by image processing equipment can use following expression：
In formula：The span of phase is (- π, π)；
B3：X, y both direction for obtaining glass panel surface to be measured are calculated by below equation by image processing equipment Gradient distribution：
In formula：gx、gyThe gradient in x directions and y directions is represented respectively,The phase in x directions and y directions is represented respectively Potential difference, PxOr PyFor the cycle of sine streak on coding area-structure light display device, LyFor coding area-structure light display device to glass The distance on glass panel surface to be measured；
B4：The gradient in x directions and y directions is carried out respectively using Southwell integral models by image processing equipment Integration, the height for obtaining glass panel surface to be measured is distributed as：
H=∫ gxdx+gydy。
The principle of the invention is as follows：
The present invention is the area-structure light for generating horizontally and vertically direction respectively on the display device, passes through image collecting device The virtual image that area-structure light is deformed after surface modulation to be measured is gathered successively, is calculated phase deviation information, is passed through measurement model Gradient information can be obtained, and then the three-dimensional shaped of tested high reflection object can be recovered by gradient information by integral operation Looks；
When considering the ambiguity problem for the phase place change that height is brought, deforming stripe is obtained through surface modulation to be measured PhaseCompared to the phase that gained striped is modulated through the plane of referenceDifference be expressed as follows：
In formula：H represents height change, LyDisplay screen is represented the distance between to the plane of reference, α represents display screen and phase owner The angle of light after reflection, β represents the angle of camera chief ray and plane to be measured, and θ represents gradient；
It can be seen that from above formula：When α=90 ° in formula, during β=90 °, previous item is equal to 0 in bracket, and now height becomes Phase error is minimum caused by changing, i.e. the influence of system ambiguity is minimum.
Thus, detecting system of the present invention on the basis of design telecentric beam path, image collecting device and surface to be measured it Between increase beam splitter, and by the position that beam splitter is placed in plane included angle to be measured is 45 °, image collecting device and display device It is each perpendicular to plane to be measured to place so that coding area-structure light display device produces light through beam splitter to glass panel table to be measured The incident direction in face is parallel with the radiation direction that image collecting device is reflexed to through glass panel surface to be measured, forms same meeting Under conditions of axial light path so that detecting system structure is more compact；Now, forming the situation of telecentric beam path and meeting coaxial Under conditions of light path system, angle and camera chief ray and the folder of to be measured plane of the display screen with camera chief ray after reflection Angle is satisfied by 90 °, and now phase error caused by height change is minimum.Further, the present invention is in display device and beam splitter Between simple lens is set, display device is located at the object space focal plane of simple lens, and then by glass panel apparent height to be measured Caused phase place change images in same area by simple lens, to reach the purpose for more thoroughly eliminating system ambiguity.
Compared with prior art, the invention has the advantages that：
Detecting system reasonable in design of the present invention, by the way that lens, telecentric beam path are combined with phase measurement deviation art Coaxial optical path system is formed, the system that phase measurement deviation art is carried out present in measuring three-dimensional morphology in the prior art is solved many Adopted sex chromosome mosaicism.The present invention reduces display device generation light by setting telecentric lens and adopted after surface modulation to be measured in image On acquisition means imaging plane into image distortion, that is, overcome image collecting device due to caused by focusing is inaccurate measurement miss Difference, reduces the so-called near big and far smaller distortion caused；In the case where forming telecentric beam path, the present invention is acted on by beam splitter and realized Camera chief ray is parallel with display device chief ray, forms coaxial optical path system, and then cause system ambiguity minimum；Enter one Step ground, the present invention sets simple lens between display device and beam splitter, display device is located at the object space focal plane of simple lens Place, and then more thoroughly eliminate system ambiguity；Because detecting system of the present invention eliminates system ambiguity and overcomes image to adopt Measurement error caused by acquisition means focusing is inaccurate, therefore detecting system of the present invention can accurately obtain elevation information in phase unwrapping And gradient information, improve precision and the degree of accuracy of glass panel surface defects detection.In addition, passing through beam splitting in present invention design Mirror light path of turning back can reduce detecting system volume so that detecting system structure is more compact.
Brief description of the drawings
Fig. 1 is the schematic diagram of glass panel defect detecting system；1 is coding area-structure light display device in figure, and 2 are Mirror, 3 be beam splitter, and 4 be telecentric lens, and 5 be image collecting device, and 6 be glass panel surface to be measured；
Fig. 2 is the flow chart of glass panel defect detecting system.
Embodiment
The principle of the invention is described in detail below in conjunction with the specific embodiment of the invention and Figure of description：
Embodiment：
It is as shown in Figure 1 the system of present invention detection glass panel surface defect, including：Encode area-structure light display device 1, lens 2, telecentric lens 4, beam splitter 3, image collecting device 5 and image processing equipment；
Area-structure light display device 1, beam splitter 3, glass panel surface 6 to be measured are encoded with image collecting device 5 in space Position relationship meet reflection law, wherein：Image collecting device 5 is located at provided with the glass panel surface of surface 6 to be measured, image Provided with object space telecentric lens formation telecentric beam path in harvester 5, beam splitter 3 tilt 45 degree be arranged at image collecting device 5 and Between glass panel surface 6 to be measured so that system ambiguity is minimum, set between coding area-structure light display device 1 and beam splitter 3 There are lens 2, and cause coding area-structure light display device 1 to be located at the object space focal plane of lens 2, thoroughly to eliminate system ambiguity Sex chromosome mosaicism；Coding area-structure light display device 1 exports orthogonal standard N steps phase shift area-structure light respectively, and light passes through saturating Turned back and be imaged in glass panel surface 6 to be measured by beam splitter 3 again after mirror 2, obtained after being modulated through glass panel surface 6 to be measured The light receiving surface (i.e. photosurface in figure) that area-structure light enters in image collecting device 5 is deformed, image collecting device 5 is gathered respectively The distressed structure light image obtained in the two directions after each phase shift, and handled by back-end image processing equipment；
To overcome image collecting device due to the inaccurate caused measurement error of focusing, the present invention is in image collecting device Using object space telecentric lens, the object space telecentric lens are to be placed on aperture diaphragm in the image space focal plane of optical system to be formed Telecentric beam path.Even if it is inaccurate to be focused using above-mentioned telecentric beam path, into picture deviate scale, what is obtained in scale plane seems The projection image being made up of disc of confusion.But because the chief ray that same point is sent on object is not moved with the position of object and become (, in infinity, chief ray is all the time parallel to optical axis, and chief ray is by all meeting at emergent pupil center, i.e. aperture light after object lens for entrance pupil for change Late center), therefore the key light line position at two disc of confusion centers for passing through the projection image two ends on scale plane is constant, two Disc of confusion centre distance (i.e. object height) is constant all the time.It therefore, it can overcome object under test due to the inaccurate caused survey of focusing Error is measured, that is, reduces the so-called near big and far smaller distortion caused.
Further, to solve ambiguity problem of the high modulation in phase place change caused by phase demodulating, the present invention exists In the case of considering height factor, the phase of deforming stripe will be obtained through surface modulation to be measuredModulated compared to through the plane of reference The phase of gained stripedDifference be expressed as follows：
In formula：H represents height change, LyDisplay screen is represented the distance between to the plane of reference, α represents display screen and phase owner The angle of light after reflection, β represents the angle of camera chief ray and plane to be measured, and θ represents gradient；
When α=90 ° in formula, during β=90 °, previous item is equal to 0, and now phase error caused by height change in bracket The influence of minimum, i.e. system ambiguity is minimum.
The present invention increases beam splitter in the optical path, and beam splitter is placed in is 45 ° of position with plane included angle to be measured, and makes Obtain CCD camera and display screen is each perpendicular to plane to be measured and placed so that coding area-structure light display device produces light through beam splitting Mirror to glass panel surface to be measured incident direction and the light side of image collecting device is reflexed to through glass panel surface to be measured To parallel, in addition, under conditions of satisfaction forms coaxial optical path so that detecting system structure is more compact.
The present invention is under conditions of forming the situation of telecentric beam path and meeting coaxial optical path system, display screen and phase owner Light angle after reflection and camera chief ray and the angle of plane to be measured are satisfied by 90 °, now caused by height change Phase error is minimum.Further, the present invention sets simple lens between display device and beam splitter, is located at display device single At the object space focal plane of lens, so by the phase place change caused by glass panel surface defect height to be measured by simple lens into As in same area, to reach the purpose for more thoroughly eliminating system ambiguity.601 be reference planes in Fig. 1, from coded faces knot A on structure light display device 11The incident ray a that point is sent1Reference planes are met in O1Point, the present embodiment image collecting device 5 leads to Frequently with CCD camera, corresponding reflection light r1B is imaged in by the photocentre o of CCD camera1Point；For the phase under camera coordinates system Same B1Point, then reflection light r1Constant, using ray tracing technology, incident ray is changed into a2, show and set in coding area-structure light Corresponding point is A on standby 12.Incident ray r2Meet at glass panel surface O to be measured2Point, it is assumed that in point O2The tangent plane at place be 602 with The angle of reference planes is γ, according to reflection law then incident ray r2Relative to r12 γ angle is turned over.
As shown in Fig. 2 the present invention provides a kind of method for detecting glass panel surface defect：
Step A：Build measuring system；
It is preferably LCD display that area-structure light display device 1 is encoded in the present embodiment；
Image collecting device 5 generally uses CCD camera in the present embodiment, and specifically, CCD camera model is in the present embodiment GT1660/C, and camera lens are focal length 55mm telecentric lens (Computar TEC-M55)；
The focal length of lens 2 is 300mm in the present embodiment；
The splitting ratio of beam splitter 3 is 50R/50T in the present embodiment；
LCD display, beam splitter 3, the glass panel surface 6 to be measured of setting computer code and CCD camera are in space Position causes above-mentioned four to meet reflection law, wherein：Lens 2 are provided between LCD display and beam splitter 3, and LCD is shown Display screen is located at the object space focal plane of lens 2, and image collector is arranged in provided with directly over glass panel surface to be measured, and image is adopted Provided with object space telecentric lens formation telecentric beam path in acquisition means, 45 ° of the inclination of beam splitter 3 is arranged at CCD camera and treated with glass panel Survey between surface 6, for the light of the LCD display generation located at the glass panel side of surface 6 to be measured to be turned back in glass surface Plate surface 6 to be measured is imaged；
Step B：Detect surface defect information to be measured；
B1：The detecting system built based on step A, because the area-structure light of LCD display generation is by computer code, Therefore direction and the cycle of area-structure light can be conveniently adjusted, the area-structure light pattern that the present embodiment is used is fixed for sine streak Horizontal direction sine streak is x directions in adopted the present embodiment, and vertical direction sine streak is y directions；Contrasted with reference planes, root According to the face shape feature on glass panel surface to be measured, when passing through surface to be measured corresponding deviation, and x and y directions can occur for light Deviation differ, the phase offset of the sine streak of corresponding both direction is also different；
In no particular order, the present embodiment LCD shows for the generation of above-mentioned two direction standard N step phase shifted sinusoidal stripeds and IMAQ Display screen first produces horizontal direction sine streak, and is turned back and be imaged in glass panel surface 6 to be measured by beam splitter 3 after lens 2, Then the deforming stripe after being modulated through glass panel surface 6 to be measured reflexes to the receiving plane (i.e. photosurface in figure) of CCD camera, The first frame image data is collected, LCD display controls to produce the horizontal direction with fixed phase drift size by computer Stripe pattern, gathers deforming stripe image obtained by each phase shift, one is obtained N frame horizontal direction deforming stripe picture numbers respectively According to；
Then LCD display produces vertical direction sine streak again, and is turned back after lens 2 by beam splitter 3 in glass Panel surface 6 to be measured is imaged, and the deforming stripe after then being modulated through glass panel surface 6 to be measured reflexes to the reception of CCD camera Plane (i.e. photosurface in figure), collects the first frame image data, and LCD display is produced to have and fixed by computer control The vertical direction stripe pattern of phase difference, gathers deforming stripe image obtained by each phase shift, one is obtained N frame vertical directions respectively Deforming stripe view data；
Therefore, the light intensity of the horizontal direction deforming stripe image of CCD camera collection n-th phase shift can be expressed as follows：
In formula：A (x, y) is background light intensity,For horizontal direction fringe contrast, δnFor phase shift size, It is the additive phase introduced by horizontal direction striped after glass panel surface modulation to be measured；
The light intensity of the vertical direction deforming stripe image of CCD camera collection n-th phase shift can be expressed as follows：
In formula：A (x, y) is background light intensity,For vertical direction fringe contrast, δnFor phase shift size, It is the additive phase introduced by vertical direction striped after glass panel surface modulation to be measured；
Vertical direction deforming stripe image or horizontal direction deforming stripe image are selected, by image processing equipment using such as Lower formula calculates the modulation degree distribution for obtaining deforming stripe：
In formula：In(x, y) is gained deformation after vertical direction deforming stripe or horizontal direction deforming stripe n-th phase shift The light intensity value of stripe pattern, δnFor phase shift size；
B2：By N frames horizontal direction deforming stripe view data obtained by step B1 and N frame vertical direction deforming stripe picture numbers The phase for obtaining deforming stripe according to being calculated respectively by image processing equipment using least square method can use following expression：
Pass through anti-triangulo operation because phase shift method extracts deforming stripe information, obtained phase is blocked, be wrapped in [- π, π] between, therefore phase unwrapping first should be carried out using phase-unwrapping algorithm, because being treated using optical system of the present invention to glass panel Survey surface and detected the ambiguity problem for having overcome high modulation in phase place change caused by phase demodulating, therefore can directly pass through Equation below calculates the optimal gradient distribution of x, y both direction on glass panel surface to be measured：
In formula：gx、gyThe gradient in x directions and y directions is represented respectively,The phase in x directions and y directions is represented respectively Potential difference, PxOr PyThe cycle of sine streak, L are produced for LCD displayyFor LCD display to glass panel surface to be measured away from From；
B4：The optimal gradient in x directions and y directions is carried out using Southwell integral models by image processing equipment Integration, the optimum height for obtaining glass panel surface to be measured is distributed as：
H=∫ gxdx+gydy。
Embodiments of the invention are set forth above in association with accompanying drawing, but the invention is not limited in above-mentioned specific Embodiment, above-mentioned embodiment is only schematical, rather than restricted, and one of ordinary skill in the art exists Under the enlightenment of the present invention, in the case of present inventive concept and scope of the claimed protection is not departed from, many shapes can be also made Formula, these are belonged within the protection of the present invention.

Claims (9)

1. a kind of system for detecting glass panel surface defect, it is characterised in that including：Area-structure light display device (1) is encoded, Lens (2), beam splitter (3), image collecting device (5) and image processing equipment；
Image collecting device (5) is directly over glass panel surface to be measured (6), coding area-structure light display device (1) and figure Placed as harvester (5) is each perpendicular to glass panel surface to be measured (6), beam splitter (3) tilts 45 ° and is arranged at image collector Put between (5) and glass panel surface to be measured (6) so that coding area-structure light display device (1) produces light through beam splitter (3) Incident direction to glass panel surface to be measured (6) through glass panel surface to be measured (6) with reflexing to image collecting device (5) Radiation direction is parallel, wherein：Encode and lens (2) are provided between area-structure light display device (1) and beam splitter (3), and to compile Code area-structure light display device (1), which is located in the object space focal plane image collecting device (5) of lens (2), is provided with object space telecentric lens (4) telecentric beam path is formed；Coding area-structure light display device (1) exports orthogonal standard N steps phase shift area-structure light respectively, Turned back and be imaged in glass panel surface to be measured (6) by beam splitter (3) again after rays pass through lens (2), it is to be measured through glass panel The deformation area-structure light obtained after the modulation of surface (6) enters the light receiving surface of image collecting device (5), image collecting device (5) Gather the distressed structure light image obtained in the two directions after each phase shift respectively, and by back-end image processing equipment at Reason.
2. a kind of system for detecting glass panel surface defect according to claim 1, it is characterised in that the face structure Optical mode is sine streak.
3. a kind of detection method of glass panel surface defect, it is characterised in that comprise the following steps：
Step A：Build detecting system；
By image collecting device (5) directly over the glass panel surface to be measured (6), coding area-structure light display device (1) and Image collecting device (5) is each perpendicular to glass panel surface to be measured (6) placement, and beam splitter (3) tilts 45 ° and is arranged at IMAQ Between device (5) and glass panel surface to be measured (6), it is allowed to meet reflection law, wherein：It is provided with image collecting device (5) Object space telecentric lens formation telecentric beam path, is provided with lens (2) between coding area-structure light display device (1) and beam splitter (3), and So that coding area-structure light display device (1) is placed at the object space focal plane of lens (2)；
Step B：The detecting system built based on step A, control coding area-structure light display device projects orthogonal respectively Standard N walks phase shift area-structure light to glass panel surface to be measured, the deformation plance knot obtained after glass panel surface modulation to be measured Structure light enters light receiving surface in image collecting device, and image collecting device collects N frame deformation plance structure light images, institute respectively The span for stating N is N≤3, obtains deforming area-structure light by the processing of N frame deformation plances structure light image by image processing equipment Modulation degree distribution map, gradient distribution map and height distribution map.
4. a kind of detection method of glass panel surface defect according to claim 3, it is characterised in that the face structure Optical mode is sine streak.
5. the detection method of a kind of glass panel surface defect according to claim 4, it is characterised in that assuming that mutually hanging down Straight both direction is respectively x directions and y directions,
Then the sine streak n-th phase shift of x directions obtains the light intensity of deforming stripe image and can be expressed as follows in step B：
In formula：A (x, y) is background light intensity,For x directions fringe contrast, δnFor phase shift size, It is the additive phase introduced by x directions striped after glass panel surface modulation to be measured；
Then the sine streak n-th phase shift of y directions obtains the light intensity of deforming stripe image and can be expressed as follows in step B：
In formula：A (x, y) is background light intensity,For y directions fringe contrast, δnFor phase shift size, It is the additive phase introduced by y directions striped after glass panel surface modulation to be measured.
6. the detection method of a kind of glass panel surface defect according to claim 5, it is characterised in that by N number of y directions The light intensity value of phase shift deforming stripe image or N number of x directions phase shift deforming stripe image is obtained by image processing device processes The modulation degree distribution of deforming stripe is shown below：
<mrow> <mi>M</mi> <mrow> <mo>(</mo> <mi>x</mi> <mo>,</mo> <mi>y</mi> <mo>)</mo> </mrow> <mo>=</mo> <msqrt> <mrow> <msup> <mrow> <mo>(</mo> <munderover> <mo>&amp;Sigma;</mo> <mrow> <mi>n</mi> <mo>=</mo> <mn>1</mn> </mrow> <mi>N</mi> </munderover> <msub> <mi>I</mi> <mi>n</mi> </msub> <mo>(</mo> <mi>x</mi> <mo>,</mo> <mi>y</mi> <mo>)</mo> <mo>&amp;CenterDot;</mo> <msub> <mi>cos&amp;delta;</mi> <mi>n</mi> </msub> <mo>)</mo> </mrow> <mn>2</mn> </msup> <mo>+</mo> <msup> <mrow> <mo>(</mo> <munderover> <mo>&amp;Sigma;</mo> <mrow> <mi>n</mi> <mo>=</mo> <mn>1</mn> </mrow> <mi>N</mi> </munderover> <msub> <mi>I</mi> <mi>n</mi> </msub> <mo>(</mo> <mi>x</mi> <mo>,</mo> <mi>y</mi> <mo>)</mo> <mo>&amp;CenterDot;</mo> <msub> <mi>sin&amp;delta;</mi> <mi>n</mi> </msub> <mo>)</mo> </mrow> <mn>2</mn> </msup> </mrow> </msqrt> </mrow>
In formula：In(x, y) is gained deforming stripe image after x Direction distortions striped or y Direction distortion striped n-th phase shifts Light intensity value, δnFor phase shift size.
7. the detection method of a kind of glass panel surface defect according to claim 5, it is characterised in that obtain step B To N frame x Direction distortion area-structure light images and N frame y Direction distortion area-structure light images adopted respectively by image processing equipment The phase expression formula difference for obtaining deforming stripe in both direction with least square method calculating is as follows：
Wherein：The span of phase is (- π, π).
8. the detection method of a kind of glass panel surface defect according to claim 7, it is characterised in that assuming that mutually hanging down Straight both direction is respectively x directions and y directions, and obtaining glass panel according to below equation calculating by image processing equipment treats The gradient distribution for surveying x, y both direction on surface is as follows：
Wherein gx、gyThe gradient in x directions and y directions is represented respectively,The phase difference in x directions and y directions is represented respectively, PxOr PyFor the cycle of sine streak on coding area-structure light display device, LyFor coding area-structure light display device to glass surface The distance on plate surface to be measured.
9. the detection method of a kind of glass panel surface defect according to claim 8, it is characterised in that use Southwell integral models are integrated respectively to the gradient in x directions and y directions, obtain the height on glass panel surface to be measured It is distributed as：
H=∫ gxdx+gydy。
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