CN106595519A - Flexible 3D contour measurement method and device based on laser MEMS projection - Google Patents

Flexible 3D contour measurement method and device based on laser MEMS projection Download PDF

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Publication number
CN106595519A
CN106595519A CN201611115906.3A CN201611115906A CN106595519A CN 106595519 A CN106595519 A CN 106595519A CN 201611115906 A CN201611115906 A CN 201611115906A CN 106595519 A CN106595519 A CN 106595519A
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laser
video camera
projection
mems
camera
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CN106595519B (en
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郭家玉
刘涛
车玉彩
郭迪
姚东
明向业
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Xi'an Like Photoelectric Technology Co Ltd
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Xi'an Like Photoelectric Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2433Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting

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  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
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Abstract

The invention discloses a flexible 3D contour measurement method based on MEMS vibrating mirror projection. The measurement method combines the camera and laser micro-vibrating-mirror projector view field inter-calibration technology with the line structure light 3D measurement technology. At first, an object to be measured is shot, the ROI is primarily obtained by means of image 2D feature recognition technology; according to the displacement and zooming factors of the pixel coordinates of the camera and the pixel coordinates of the projector in the overlapped view filed calibrated by the camera and laser micro-vibrating-mirror projector view field inter-calibration technology, the projector projects the laser pattern to the ROI; and left and right cameras shoot the object to be shot to respectively extract the light knife or spot center of the laser patterns in the two images, and the space coordinates at the corresponding laser patterns on the object can be obtained by means of a binocular stereo vision method. The required points can be measured in a fixed-point or fixed-line manner, and prevent the data redundancy phenomenon caused by full-filed measurement.

Description

A kind of flexible 3 D contour measuring method projected based on laser MEMS and device
Technical field:
The invention belongs to field of optical detection, is related to a kind of optical detecting method of three-D profile, particularly one kind is based on The flexible 3 D contour measuring method of laser MEMS projections.
Background technology:
Optical three-dimensional measurement technology is developed rapidly, and because of its noncontact, high precision, fireballing advantage, is widely used in The numerous areas such as industrial detection, medical treatment & health, digital entertainment.It is main with dry at present particularly in industrial on-line checking field Relate to measurement method, stereo-visiuon measurement method, the class optical three-dimensional measuring method of structural light measurement method three, wherein:
1) interferometric method precision reaches micron level, too high to measuring environment stability requirement, but industrial on-line checking workshop shows Noise is difficult to avoid that, interferometry;
2) stereovision technique system structure is simple, low cost.But the bottleneck of " matching is difficult " is there is, and operand is huge Greatly, the shortcoming of poor robustness;
3) structural light measurement method is divided into structure light, line-structured light and the class of area-structure light three:Wherein structure light and knot Structure light need to be scanned to part pointwise or successively, inefficiency, it is impossible to be met at high speed and requirement of real-time;Area-structure light easily receives thing Body surface face reflection interference, stability is relatively low;Line-structured light measurement method, is to reappear thing with one or more light (finishing tool) image Body three-dimensional appearance, i.e., extract laser-knife center position, then using principle of triangulation to laser-knife center pointwise from Light knife image Solved to obtain shape face three-dimensional data.The technology with its untouchable, sensitivity it is high, real-time is good, capacity of resisting disturbance By force, the advantages of anti-surface contour for metal equally can measure, disadvantage thereof however is that scanning needs motion to match somebody with somebody Conjunction reduces measurement efficiency and precision.
Three kinds of above-mentioned measuring methods are measurement of full field.In industrial on-line checking, part detection sample carries out size During measurement (length, width, flatness etc.), it is only necessary to extract some line number values that click through of piece surface and compare, i.e., measurement of full field is obtained After object three-dimensional contour outline, only extract the several points of defined and carry out Size calculation and (get survey ready similar to three coordinate measuring machine Amount).In this case, measurement of full field causes data redundancy, and the later stage extracts the difficulty that specifying measurement point also increases algorithm Degree.
Further, since environment is complicated in industrial flow-line operation, by ambient light, conveyer belt color and the reflective spy of detection sample The impact of property, in measurement process, during background (the picture non-detection sample area captured by CCD) and wiping thoroughly can not produce yet Larger noise jamming,
The content of the invention:
It is an object of the invention to overcome the shortcoming of above-mentioned prior art, there is provided a kind of flexibility projected based on laser MEMS Method for three-dimensional measurement and device.The measuring method is by video camera and the mutual calibration technique in laser MEMS projection arrangements visual field and line structure Light three-dimensional measurement technology combines, and testee is shot first, and by two-dimensional image feature identification technique its ROI is tentatively obtained (region ofinterest survey the characteristic areas such as object edge profile, circular hole, step and are manually set region));According to taking the photograph Camera overlaps in visual field with what the mutual calibration technique in laser MEMS projection arrangements visual field was calibrated, camera pixel coordinate with projection The displacement of device pixel coordinate and zoom factor, projection device laser pattern (being made up of finishing tool and luminous point) to ROI;A left side is taken the photograph Camera forms Binocular Stereo Vision System with right video camera, shoots testee, and the light of laser pattern in two images is extracted respectively Knife or optical spot centre, the space coordinatess on object at corresponding laser pattern are obtained by binocular stereo vision method.
The advantage of the method is:" flexibility " measurement can be realized according to ROI Automatic adjusument measured zones.Such as electricity In sub- processing industry assembly line work, the size detection of electronic component only needs to detect that several affect the location point of assembling, can pass through This method is pinpointed or point required by layout survey, it is to avoid the data redundancy phenomenon that measurement of full field is caused.
This measuring system is capable of achieving " flexibility " measurement, is its hardware superiority:Using laser MEMS projection arrangements.The projection The programmable projection laser pattern of device, therefore can " flexibility " regulation measured zone.
The purpose of the present invention is solved by the following technical programs:
A kind of flexible 3 D measurement apparatus projected based on laser MEMS, it is characterized by:Left video camera is common with right video camera With composition Binocular Stereo Vision System;Wherein left video camera is positioned over same position positioned at measured object with laser MEMS projection arrangements Directly over body, optical axis straight down and is essentially coincided, and the system is capable of achieving left video camera and laser MEMS projection arrangement pixels Phase mutual feedback between coordinate, shoots ground testee contour feature, so as to guided laser MEMS projection arrangements by left video camera The corresponding laser pattern for covering testee contour feature of projection.
Based on apparatus above laser MEMS project flexible 3 D measuring method be:Video camera and laser MEMS are projected The mutual calibration technique in device visual field and line-structured light three-dimensional measurement technology combine, and testee is shot first, tentatively obtain tested The position of object and profile size;According to the shooting that video camera and the mutual calibration technique in laser MEMS projection arrangements visual field are calibrated Displacement and zoom factor between machine pixel coordinate and projection arrangement visual field pixel coordinate, projection device laser pattern to ROI; Left video camera forms Binocular Stereo Vision System with right video camera, shoots testee, and laser pattern in two images is extracted respectively Finishing tool or optical spot centre, the space coordinatess on object at corresponding laser pattern are obtained by binocular stereo vision method.
The system adopts laser MEMS projection arrangements.The light path principle of the projection arrangement is:Three identical quasiconductors swash Light device after fiber coupling, is inciding beam cementing prism, synthesizes beam of laser, anti-by reflecting mirror Jing after collimated It is mapped on MEMS scanning galvanometers;MEMS scanning galvanometers produce mutually perpendicular bimodulus under fast shaft current, the excitation of slow axis electric current State is vibrated so as to by laser beam projection to different positions, form two-dimensional scan;Laser instrument is in sinusoidal drive electric current and synchronous letter In the presence of number, coded modulation is carried out, ultimately form laser pattern.Compared to conventional digital projector, laser MEMS projection dresses The projection of laser beam scan-type is set to, the depth of field is much larger than conventional digital projector, and video camera projection arrangement mutually demarcates the depth of visual field Degree scope increases, so as to increase depth survey scope.
Described flexible 3 D measuring method, its step is:
The first step, demarcates and is located at same optical axis, and left video camera of the optical axis in vertical direction overlaps with projection arrangement and regard The X of field, Y-coordinate position relationship (translation, scaling relation between coordinate);
Second step, demarcate left video camera and right camera chain into Binocular Stereo Vision System inside and outside parameter (video camera Translation matrix and spin matrix between effective focal length, photocentre, image space-between, two camera coordinate systems);
3rd step, left video camera shot detection sample, and carried by two-dimensional image feature identification technique extraction testee Take ROI;
4th step, according to testee ROI in image, projection meets and covers swashing for claimed features point with contour of object Light pattern;
5th step, left video camera and right video camera shoot the laser image of projection to testee ROI;
6th step, image procossing extracts two laser-knife centers and optical spot centre, parallax is sought, so as to calculate thing at laser pattern Body space coordinatess.
The left video camera of demarcation that the first step is adopted overlap with projection arrangement visual field XY directions position relationship side Method is as follows:
Left video camera is located at sustained height and optical axis coincidence with laser MEMS projection arrangements, places in certain height and demarcates target Face, it is assumed that (u1, v1) for a certain pixel coordinate of projection arrangement institute projected image, (u2, v2) by left video camera gather it is right Answer image coordinate;Because left video camera and projection arrangement have, little height is poor and optical axis not exclusively overlaps, thus (u1, v1) with (u2, v2) has small translation and scaling relation:
The demarcation target surface of one fixed pixel coordinate of projection device, if the projected pixel of the N number of index point on target surface Coordinate is (u1n,v1n), n=1,2N, by the image coordinate (u2 of left camera acquisition corresponding pixel pointsn,v2n), n =1,2N, by above formula coordinate computation, so as to calculate transition matrix, that is, calibrate between left video camera and projection arrangement Position relationship.
The left video camera of demarcation employed in the second step and right camera interior and exterior parameter (video camera effective focal length, light Translation matrix and spin matrix between the heart, image space-between, two camera coordinate systems) method is as follows:
This is demarcated as dual camera system demarcation, it is understood that the internal reference of each video camera, while it will also be appreciated that two shootings Position relationship between machine coordinate system, the pose that this position relationship can be with second video camera between first video camera Represent it is also assumed that being coordinate of certain point in second camera coordinate system to corresponding in first camera coordinate system The Coordinate Conversion of point:
Pc1=RrPc2+Tr
Meanwhile, define the translation between two projection centresFor translation vector Tr, it is referred to as baseline;World coordinate system In a point PWThe P being projected as in first image1Put and the P in second image2Point;Temporarily assume that camera lens does not distort, PW、O1、O2、P1、P2At grade;During dual camera system is demarcated, with the figure that spatial point projects to two video cameras in left and right As the minimum optimization aim of true picture coordinate distance that upper projected pixel coordinate and video camera are photographed;MiRepresent scaling board A upper index point, regards the uncalibrated image that a video camera is photographed as first group, wherein index point MiIn image upper table It is shown as mi,j,1;Regard the uncalibrated image that two video cameras are photographed as second group, wherein index point MiIt is expressed as on image mi,j,2;In addition camera parameters also represent that its internal reference comprising two video cameras, l scaling board is imaged at second with vector c Relative pose between location parameter in machine, and two video cameras;When camera parameters vector c determines, biocular systems Imaging model, and rebuild triangle relation determine that, also determined that MiTo the first width and the mapping π of the second width image1 (Mi, c) and π2(Mi,c);Therefore the object function of Binocular Stereo Vision System demarcation is:
So as to obtain the c of optimal solution, that is, the calibration result of our needs, including the internal reference c=of two video cameras (f11,sx1,sy1,cx1,cy1,f22,sx2,sy2,cx2,cy2) and right camera coordinates tie up to the position in left camera coordinate system Appearance [Rr,Tr]。
The extracting method of the laser-knife center that the 6th step is adopted is as follows:
All finishing tool skeletons in view picture figure are extracted using threshold method, the normal side of each pixel on skeleton is then asked for To, specially carrying out curve fitting along the pixel on skeleton, the method for curve matching utilizes y=to take 10 picture elements ax2+ bx+c carries out second-order fit, if (x0, y0) for the coordinate of pixel, then (x0, y0) point slope be t=2ax0+ b, if t =0, then weighted average direction is y directions, if t ≠ 0, (x0, y0) point method line slope be n=-1/t, weighted average direction For normal direction;Calculate on the skeleton of image after the normal direction of each point, ask for finishing tool gray scale in the direction of its normal point Cloth;The position of centre of gravity of the finishing tool is finally obtained using grey scale centre of gravity method, as testee profile point position in this place, by this A little profile points couple together the contour line for being formed section.
The present invention has following three points beneficial effect:
1) projector according to object two-dimensional and the corresponding laser pattern of projecting characteristic points, survey by the alignment fixed point for realizing object Amount;
2) two dimensional size measurement increases the measurable index of single in combination with measuring three-dimensional profile, is easy to measurement to have The object and raising certainty of measurement of the curvature of space.
Description of the drawings:
Fig. 1 is the flexible 3 D contour measuring method schematic diagram of the present invention;
Wherein:1 is left video camera;2 is right video camera;3 is laser MEMS projection arrangements.
Specific embodiment:
The present invention is described in further detail below in conjunction with the accompanying drawings:
Such as Fig. 1, in testee left video camera and laser MEMS projection arrangements, left video camera and projection dress are arranged above Setting in same position and optical axis is coaxial, left video camera vertically gathers testee image, by two-dimensional image feature Technology of identification identifies ROI;By between the left camera field of view that calibrated and laser MEMS projection arrangements visual field pixel coordinate Displacement and zoom factor, guiding projection device projection laser pattern (being made up of finishing tool and luminous point) to ROI;Left video camera and the right side Video camera forms Binocular Stereo Vision System, shoots testee, and the finishing tool or luminous point of laser pattern in two images are extracted respectively Center, the space coordinatess on object at corresponding laser pattern are obtained by binocular stereo vision method.
Described flexible 3 D measuring method, its step is:
The first step, demarcates and is located at same optical axis, and left video camera of the optical axis in vertical direction overlaps with projection arrangement and regard The X of field, Y-coordinate position relationship (translation, scaling relation between coordinate);
Second step, demarcate left video camera and right camera chain into Binocular Stereo Vision System inside and outside parameter (video camera Translation matrix and spin matrix between effective focal length, photocentre, image space-between, two camera coordinate systems);
3rd step, left video camera shot detection sample, and carried by two-dimensional image feature identification technique extraction testee Take ROI;
4th step, according to testee ROI in image, projection meets and covers swashing for claimed features point with contour of object Light pattern;
5th step, left video camera and right video camera shoot the laser image of projection to testee ROI;
6th step, image procossing extracts two laser-knife centers and optical spot centre, parallax is sought, so as to calculate thing at laser pattern Body space coordinatess.
The left video camera of demarcation that the first step is adopted overlap with projection arrangement visual field XY directions position relationship side Method is as follows:
Left video camera is located at sustained height and optical axis coincidence with laser MEMS projection arrangements, places in certain height and demarcates target Face, it is assumed that (u1, v1) for a certain pixel coordinate of projection arrangement institute projected image, (u2, v2) by left video camera gather it is right Answer image coordinate;Because left video camera and projection arrangement have, little height is poor and optical axis not exclusively overlaps, thus (u1, v1) with (u2, v2) has small translation and scaling relation:
The demarcation target surface of one fixed pixel coordinate of projection device, if the projected pixel of the N number of index point on target surface Coordinate is (u1n,v1n), n=1,2N, by the image coordinate (u2 of left camera acquisition corresponding pixel pointsn,v2n), n =1,2N, by above formula coordinate computation, so as to calculate transition matrix, that is, calibrate between left video camera and projection arrangement Position relationship.
The left video camera of demarcation employed in the second step and right camera interior and exterior parameter (video camera effective focal length, light Translation matrix and spin matrix between the heart, image space-between, two camera coordinate systems) method is as follows:
This is demarcated as dual camera system demarcation, it is understood that the internal reference of each video camera, while it will also be appreciated that two shootings Position relationship between machine coordinate system, the pose that this position relationship can be with second video camera between first video camera Represent it is also assumed that being coordinate of certain point in second camera coordinate system to corresponding in first camera coordinate system The Coordinate Conversion of point:
Pc1=RrPc2+Tr
Meanwhile, define the translation between two projection centresFor translation vector Tr, it is referred to as baseline;World coordinate system In a point PWThe P being projected as in first image1Put and the P in second image2Point;Temporarily assume that camera lens does not distort, PW、O1、O2、P1、P2At grade;During dual camera system is demarcated, with the figure that spatial point projects to two video cameras in left and right As the minimum optimization aim of true picture coordinate distance that upper projected pixel coordinate and video camera are photographed;MiRepresent scaling board A upper index point, regards the uncalibrated image that a video camera is photographed as first group, wherein index point MiIn image upper table It is shown as mi,j,1;Regard the uncalibrated image that two video cameras are photographed as second group, wherein index point MiIt is expressed as on image mi,j,2;In addition camera parameters also represent that its internal reference comprising two video cameras, l scaling board is imaged at second with vector c Relative pose between location parameter in machine, and two video cameras;When camera parameters vector c determines, biocular systems Imaging model, and rebuild triangle relation determine that, also determined that MiTo the first width and the mapping π of the second width image1 (Mi, c) and π2(Mi,c);Therefore the object function of Binocular Stereo Vision System demarcation is:
So as to obtain the c of optimal solution, that is, the calibration result of our needs, including the internal reference c=of two video cameras (f11,sx1,sy1,cx1,cy1,f22,sx2,sy2,cx2,cy2) and right camera coordinates tie up to the position in left camera coordinate system Appearance [Rr,Tr]。
The extracting method of the laser-knife center that the 6th step is adopted is as follows:
All finishing tool skeletons in view picture figure are extracted using threshold method, the normal side of each pixel on skeleton is then asked for To, specially carrying out curve fitting along the pixel on skeleton, the method for curve matching utilizes y=to take 10 picture elements ax2+ bx+c carries out second-order fit, if (x0, y0) for the coordinate of pixel, then (x0, y0) point slope be t=2ax0+ b, if t =0, then weighted average direction is y directions, if t ≠ 0, (x0, y0) point method line slope be n=-1/t, weighted average direction For normal direction;Calculate on the skeleton of image after the normal direction of each point, ask for finishing tool gray scale in the direction of its normal point Cloth;The position of centre of gravity of the finishing tool is finally obtained using grey scale centre of gravity method, as testee profile point position in this place, by this A little profile points couple together the contour line for being formed section.
The above, is only presently preferred embodiments of the present invention, and any pro forma restriction is not made to the present invention, though So the present invention is disclosed above with preferred embodiment, but is not limited to the present invention, any to be familiar with this professional technology people Member, in the range of without departing from technical solution of the present invention, when using the method and technology contents of the disclosure above make it is a little more Move or be modified to the Equivalent embodiments of equivalent variations, as long as being the content without departing from technical solution of the present invention, according to the present invention's Any simple modification, equivalent variations and modification that technical spirit is made to above example, still fall within technical solution of the present invention In the range of.

Claims (4)

1. a kind of flexible 3 D measurement apparatus based on laser MEMS projection arrangements, it is characterised in that:Left video camera and right shooting Machine collectively forms Binocular Stereo Vision System;Wherein left video camera is positioned over same position positioned at quilt with laser MEMS projection arrangements Survey directly over object, optical axis straight down and overlaps, the system realizes that left video camera is sat with laser MEMS projection arrangements pixel Phase mutual feedback between mark, by left video camera ground testee contour feature is shot, so as to the throwing of guided laser MEMS projection arrangements Shade should cover the laser pattern of testee contour feature.
2. a kind of flexible 3 D measuring method based on laser MEMS projection arrangements, it is characterised in that:By binocular stereo vision system Left video camera in system is positioned over same position with laser MEMS projection arrangements, and optical axis straight down and is essentially coincided, and is led to Cross video camera and calibrate left video camera and projection arrangement pixel coordinate meta with the mutual calibration technique in laser MEMS projection arrangements visual field Move zooming parameter;Left video camera shoots testee and extracts testee ROI by two dimensional image feature extraction algorithm;Root According to the displacement zooming parameter demarcated, guiding projection device projects the laser pattern that is made up of finishing tool and luminous point to ROI;Left shooting Machine forms Binocular Stereo Vision System with right video camera, shoots testee, and the finishing tool of laser pattern in two images is extracted respectively Or optical spot centre, the space coordinatess on object at corresponding laser pattern are obtained by binocular stereo vision method.
3. flexible 3 D measuring method as claimed in claim 2, it is characterised in that employ laser MEMS projection arrangements, should The light path principle of projection arrangement is:Three identical semiconductor lasers incide beam cementing prism after fiber coupling, Synthesis beam of laser, Jing after collimated, is reflected by a reflector on MEMS scanning galvanometers;MEMS scanning galvanometers are in fast axle electricity Under stream, the excitation of slow axis electric current, mutually perpendicular bimodal vibration is produced so as to by laser beam projection to different positions, be formed Two-dimensional scan;Laser instrument carries out coded modulation in the presence of sinusoidal drive electric current and synchronizing signal, ultimately forms laser figure Case.
4. flexible 3 D measuring method as claimed in claim 2, it is characterised in that video camera is regarded with laser MEMS projection arrangements Mutual calibration technique, its step is:
Left video camera is located at sustained height and optical axis coincidence with laser MEMS projection arrangements, places in certain altitude and demarcates target surface, Assume (u1, v1) and for a certain pixel coordinate of laser MEMS projection arrangements institute projected image, (u2, v2) is gathered by left video camera Correspondence image coordinate;Because left video camera and laser MEMS projection arrangements have, little height is poor and optical axis not exclusively overlaps, Therefore (u1, v1) has small translation and scaling relation with (u2, v2):
u 1 v 1 1 = K 1 0 u 0 0 K 2 v 0 0 0 1 u 2 v 2 1
The demarcation target surface of one fixed pixel coordinate of laser MEMS projection devices, if the projection of the N number of index point on target surface Pixel coordinate is (u1n,v1n), n=1,2 ... N, by the image coordinate (u2 of left camera acquisition corresponding pixel pointsn,v2n), n =1,2 ... N, by above formula coordinate computation, so as to calculate transition matrix, that is, calibrate left video camera with laser MEMS projection dresses Position relationship between putting.
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