CN106595519B - A kind of flexible 3 D contour measuring method and device based on laser MEMS projection - Google Patents
A kind of flexible 3 D contour measuring method and device based on laser MEMS projection Download PDFInfo
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- CN106595519B CN106595519B CN201611115906.3A CN201611115906A CN106595519B CN 106595519 B CN106595519 B CN 106595519B CN 201611115906 A CN201611115906 A CN 201611115906A CN 106595519 B CN106595519 B CN 106595519B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2433—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting
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Abstract
The invention discloses a kind of flexible 3 D measurement method measurement methods based on the projection of MEMS galvanometer to combine video camera with the mutual calibration technique of the micro- galvanometer projection arrangement visual field of laser and line-structured light three-dimensional measurement technology, testee is shot first, its ROI is tentatively obtained by two-dimensional image feature identification technique；It is overlapped in visual field according to video camera with what the micro- mutual calibration technique of galvanometer projection arrangement visual field of laser was calibrated, the displacement of camera pixel coordinate and projection arrangement pixel coordinate and zoom factor, projection device laser pattern to ROI；Left and right cameras shoots testee, extracts the light-knife of laser pattern or optical spot centre in two images respectively, finds out the space coordinate on object at corresponding laser pattern by binocular stereo vision method.Data redundancy phenomenon caused by measurement of full field can be avoided by point required by this method fixed point or layout survey.
Description
Technical field:
The invention belongs to field of optical detection, are related to a kind of optical detecting method of three-D profile, and especially one kind is based on
The flexible 3 D contour measuring method of laser MEMS projection.
Background technique:
The rapid development of optical three-dimensional measurement technology, because its is non-contact, precision is high, fireballing advantage, is widely used in
The numerous areas such as industrial detection, medical treatment & health, digital entertainment.It is main with dry at present especially in industrial on-line checking field
Relate to mensuration, stereo-visiuon measurement method, structural light measurement method three classes optical three-dimensional measuring method, in which:
1) interferometry precision reaches micron level, excessively high to measurement environmental stability requirement, but industrial on-line checking workshop is existing
Noise is difficult to avoid that, interference measurement；
2) stereovision technique system structure is simple, at low cost.But there is the bottlenecks of " matching is difficult ", and operand is huge
Greatly, the shortcomings that poor robustness；
3) structural light measurement method is divided into structure light, line-structured light and area-structure light three classes: wherein structure light and knot
Structure light need to be point-by-point to part or be successively scanned, and inefficiency is not able to satisfy high speed and requirement of real-time；Area-structure light is vulnerable to object
Body surface face reflection interference, stability are lower；Line-structured light mensuration is to reappear object with one or more light (light-knife) image
Body three-dimensional appearance extracts laser-knife center position that is, from Light knife image, then point-by-point to laser-knife center using principle of triangulation
It is solved, to obtain shape face three-dimensional data.The technology is untouchable with its, high sensitivity, real-time are good, anti-interference ability
By force, the advantages that anti-surface contour for metal can equally measure, disadvantage thereof however is that scanning needs movement mechanism to match
Conjunction reduces measurement efficiency and precision.
Three kinds of above-mentioned measurement methods are measurement of full field.In industrial on-line checking, part test sample carries out size
When measuring (length, width, flatness etc.), it is only necessary to extract several click-through line number values of piece surface and compare, i.e., measurement of full field obtains
After object three-dimensional contour outline, the several points for only extracting defined carry out size calculating and (get survey ready similar to three coordinate measuring machine
Amount).In this case, measurement of full field causes data redundancy, and the later period extracts specifying measurement point and also increases the difficulty of algorithm
Degree.
Further, since environment is complicated in industrial flow-line operation, by environment light, conveyer belt color and the reflective spy of test sample
The influence of property, in measurement process, when background (picture non-detection sample area captured by CCD) and wiping to be not thorough can also be generated
Larger noise jamming,
Summary of the invention:
It is an object of the invention to overcome the above-mentioned prior art, a kind of flexibility based on laser MEMS projection is provided
Method for three-dimensional measurement and device.The measurement method is by video camera and the mutual calibration technique of laser MEMS projection arrangement visual field and cable architecture
Light three-dimensional measurement technology combines, first shooting testee, tentatively obtains its ROI by two-dimensional image feature identification technique
(region ofinterest surveys the characteristic areas such as object edge profile, circular hole, step and region is manually set))；According to taking the photograph
Camera is overlapped in visual field with what the mutual calibration technique of laser MEMS projection arrangement visual field was calibrated, camera pixel coordinate and projection
The displacement of device pixel coordinate and zoom factor, projection device laser pattern (being made of light-knife and luminous point) to ROI；A left side is taken the photograph
Camera and right video camera form Binocular Stereo Vision System, shoot testee, extract the light of laser pattern in two images respectively
Knife or optical spot centre find out the space coordinate on object at corresponding laser pattern by binocular stereo vision method.
The advantage of this method is that: it can be according to ROI automatic adjusument measured zone, i.e. realization " flexibility " measurement.Such as electricity
In sub- processing industry pipelining, the size detection of electronic component only needs to detect several location points for influencing to assemble, and can pass through
Point required by this method fixed point or layout survey, avoids data redundancy phenomenon caused by measurement of full field.
This measuring system can realize that " flexibility " measures, and be its hardware superiority: using laser MEMS projection arrangement.The projection
Device may be programmed projection laser pattern, therefore can " flexibility " adjusting measured zone.
The purpose of the present invention solves by the following technical programs:
A kind of flexible 3 D measuring device based on laser MEMS projection, it is characterized in that: left video camera and right video camera are total
Isomorphism is at Binocular Stereo Vision System；Wherein left video camera and laser MEMS projection arrangement are placed in same position and are located at measured object
Right above body, optical axis straight down and is essentially coincided, which can realize left video camera and laser MEMS projection arrangement pixel
Phase mutual feedback between coordinate shoots ground testee contour feature by left video camera, to guide laser MEMS projection arrangement
The laser pattern of the corresponding covering testee contour feature of projection.
The flexible 3 D measurement method of laser MEMS projection based on apparatus above are as follows: project video camera and laser MEMS
The mutual calibration technique of device visual field and line-structured light three-dimensional measurement technology combine, first shooting testee, are tentatively tested
The position of object and profile size；The camera shooting calibrated according to video camera and the mutual calibration technique of laser MEMS projection arrangement visual field
Displacement and zoom factor between machine pixel coordinate and projection arrangement visual field pixel coordinate, projection device laser pattern to ROI；
Left video camera and right video camera form Binocular Stereo Vision System, shoot testee, extract laser pattern in two images respectively
Light-knife or optical spot centre, the space coordinate on object at corresponding laser pattern found out by binocular stereo vision method.
The system uses laser MEMS projection arrangement.The light path principle of the projection arrangement are as follows: three identical semiconductors swash
Light device after fiber coupling, is being incident on beam cementing prism, synthesizes beam of laser, anti-by reflecting mirror after collimated
It is mapped on MEMS scanning galvanometer；MEMS scanning galvanometer fast shaft current, slow axis electric current excitation under, generate mutually perpendicular bimodulus
State vibration is to form two-dimensional scanning for laser beam projection to different positions；Laser is in sinusoidal drive electric current and synchronous letter
Under the action of number, coded modulation is carried out, laser pattern is ultimately formed.Compared to conventional digital projector, laser MEMS projection dress
It is set to the projection of laser beam scan-type, the depth of field is much larger than conventional digital projector, and video camera projection arrangement mutually demarcates the depth of visual field
It spends range to increase, to increase depth measurement range.
The flexible 3 D measurement method, step are:
The first step, calibration is located at same optical axis, and optical axis is in the left video camera of vertical direction and is overlapped view with projection arrangement
The X, Y coordinates positional relationship (translation, scaling relationship between coordinate) of field；
Second step, demarcate left video camera and right camera chain at Binocular Stereo Vision System inside and outside parameter (video camera
Translation matrix and spin matrix between effective focal length, optical center, pixel spacing, two camera coordinate systems)；
Third step, left video camera shot detection sample, and testee is extracted by two-dimensional image feature identification technique and is mentioned
Take ROI；
4th step, according to testee ROI in image, projection meets with contour of object and covers swashing for claimed features point
Light pattern；
5th step, left video camera and the shooting of right video camera are projected to the laser image of testee ROI；
6th step, image procossing extract two laser-knife centers and optical spot centre, parallax are sought, to calculate object at laser pattern
Body space coordinate.
The left video camera of calibration used by the first step is overlapped the side of the direction the XY positional relationship of visual field with projection arrangement
Method is as follows:
Left video camera and laser MEMS projection arrangement are located at sustained height and optical axis coincidence, place calibration target in certain height
Face, it is assumed that (u1, v1) and for a certain pixel coordinate of projection arrangement institute projected image, (u2, v2) is that left video camera is collected right
Answer image coordinate；Since left video camera and projection arrangement have little height difference and optical axis is not exclusively overlapped, thus (u1, v1) with
(u2, v2) has small translation and scaling relationship:
The calibration target surface of one fixed pixel coordinate of projection device, if the projected pixel of N number of index point on target surface
Coordinate is (u1n,v1n), n=1,2N acquire the image coordinate (u2 of corresponding pixel points by left video cameran,v2n), n
=1,2N to calculate transition matrix, that is, are calibrated between left video camera and projection arrangement by above formula coordinate computation
Positional relationship.
The left video camera of calibration employed in the second step and right camera interior and exterior parameter (video camera effective focal length, light
Translation matrix and spin matrix between the heart, pixel spacing, two camera coordinate systems) method is as follows:
This is demarcated as dual camera system calibration, it is understood that the internal reference of each video camera, while will also be appreciated that two camera shootings
Positional relationship between machine coordinate system, this positional relationship can use pose of second video camera between first video camera
Indicate it is also assumed that be in second camera coordinate system certain point coordinate it is corresponding into first camera coordinate system
The coordinate conversion of point:
Pc1=RrPc2+Tr
Meanwhile defining the translation between two projection centresFor translation vector Tr, it is referred to as baseline；World coordinate system
In a point PWThe P being projected as in first image1Point and the P in second image2Point；Temporarily assume that camera lens does not distort,
PW、O1、O2、P1、P2In the same plane；In dual camera system calibration, the figure of two video cameras in left and right is projected to spatial point
The minimum optimization aim of true picture coordinate distance taken as upper projected pixel coordinate and video camera；MiIndicate scaling board
A upper index point, regards the uncalibrated image that a video camera takes as first group, wherein index point MiTable on the image
It is shown as mi,j,1；Regard the uncalibrated image that two video cameras take as second group, wherein index point MiIt is expressed as on the image
mi,j,2；In addition camera parameters are also indicated with vector c, it includes the internal reference of two video cameras, and l scaling board is imaged at second
The relative pose between location parameter and two video cameras in machine；When camera parameters vector c is determined, biocular systems
Imaging model, and rebuild triangle relation determine that, also determined that MiTo the mapping π of the first width and the second width image1
(Mi, c) and π2(Mi,c)；Therefore the objective function of Binocular Stereo Vision System calibration is:
So as to find out the c of optimal solution, that is, the calibration result of our needs, the internal reference c=including two video cameras
(f1,κ1,sx1,sy1,cx1,cy1,f2,κ2,sx2,sy2,cx2,cy2) and right camera coordinates tie up to the position in left camera coordinate system
Appearance [Rr,Tr]。
The extracting method of laser-knife center used by 6th step is as follows:
All light-knife skeletons in whole picture figure are extracted using threshold method, then seek the normal side of each pixel on skeleton
To specially carrying out curve fitting along the pixel on skeleton, the method for curve matching is that 10 picture elements is taken to utilize y=
ax2+ bx+c carries out second-order fit, if (x0, y0) be pixel coordinate, then (x0, y0) point slope be t=2ax0+ b, if t
=0, then being weighted and averaged direction is the direction y, if t ≠ 0, (x0, y0) point method line slope be n=-1/t, be weighted and averaged direction
For normal direction；It calculates and after the normal direction of each point, seeks the gray scale of light-knife in the direction of its normal point on the skeleton of image
Cloth；The position of centre of gravity of the light-knife, as profile point position of the testee at this are finally found out using grey scale centre of gravity method, by this
A little profile points connect the contour line for being formed section.
The present invention have following three points the utility model has the advantages that
1) projector realizes that the alignment fixed point of object is surveyed according to object two-dimensional and the corresponding laser pattern of projecting characteristic points
Amount；
2) two dimensional size measurement is combined with measuring three-dimensional profile, so that single is can measure index and is increased, has convenient for measurement
The object and raising measurement accuracy of the curvature of space.
Detailed description of the invention:
Fig. 1 is flexible 3 D contour measuring method schematic diagram of the invention；
Wherein: 1 is left video camera；2 be right video camera；3 be laser MEMS projection arrangement.
Specific embodiment:
The invention will be described in further detail with reference to the accompanying drawing:
Such as Fig. 1, left video camera and laser MEMS projection arrangement are set right above testee, left video camera and projection fill
Setting in same position and optical axis it is coaxial, left video camera acquires testee image along the vertical direction, passes through two-dimensional image feature
Identification technology identifies ROI；By between the left camera field of view calibrated and laser MEMS projection arrangement visual field pixel coordinate
Displacement and zoom factor, guiding projection device projection laser pattern (being made of light-knife and luminous point) to ROI；Left video camera and the right side
Video camera forms Binocular Stereo Vision System, shoots testee, extracts the light-knife or luminous point of laser pattern in two images respectively
Center finds out the space coordinate on object at corresponding laser pattern by binocular stereo vision method.
The flexible 3 D measurement method, step are:
The first step, calibration is located at same optical axis, and optical axis is in the left video camera of vertical direction and is overlapped view with projection arrangement
The X, Y coordinates positional relationship (translation, scaling relationship between coordinate) of field；
Second step, demarcate left video camera and right camera chain at Binocular Stereo Vision System inside and outside parameter (video camera
Translation matrix and spin matrix between effective focal length, optical center, pixel spacing, two camera coordinate systems)；
Third step, left video camera shot detection sample, and testee is extracted by two-dimensional image feature identification technique and is mentioned
Take ROI；
4th step, according to testee ROI in image, projection meets with contour of object and covers swashing for claimed features point
Light pattern；
5th step, left video camera and the shooting of right video camera are projected to the laser image of testee ROI；
6th step, image procossing extract two laser-knife centers and optical spot centre, parallax are sought, to calculate object at laser pattern
Body space coordinate.
The left video camera of calibration used by the first step is overlapped the side of the direction the XY positional relationship of visual field with projection arrangement
Method is as follows:
Left video camera and laser MEMS projection arrangement are located at sustained height and optical axis coincidence, place calibration target in certain height
Face, it is assumed that (u1, v1) and for a certain pixel coordinate of projection arrangement institute projected image, (u2, v2) is that left video camera is collected right
Answer image coordinate；Since left video camera and projection arrangement have little height difference and optical axis is not exclusively overlapped, thus (u1, v1) with
(u2, v2) has small translation and scaling relationship:
The calibration target surface of one fixed pixel coordinate of projection device, if the projected pixel of N number of index point on target surface
Coordinate is (u1n,v1n), n=1,2N acquire the image coordinate (u2 of corresponding pixel points by left video cameran,v2n), n
=1,2N to calculate transition matrix, that is, are calibrated between left video camera and projection arrangement by above formula coordinate computation
Positional relationship.
The left video camera of calibration employed in the second step and right camera interior and exterior parameter (video camera effective focal length, light
Translation matrix and spin matrix between the heart, pixel spacing, two camera coordinate systems) method is as follows:
This is demarcated as dual camera system calibration, it is understood that the internal reference of each video camera, while will also be appreciated that two camera shootings
Positional relationship between machine coordinate system, this positional relationship can use pose of second video camera between first video camera
Indicate it is also assumed that be in second camera coordinate system certain point coordinate it is corresponding into first camera coordinate system
The coordinate conversion of point:
Pc1=RrPc2+Tr
Meanwhile defining the translation between two projection centresFor translation vector Tr, it is referred to as baseline；World coordinate system
In a point PWThe P being projected as in first image1Point and the P in second image2Point；Temporarily assume that camera lens does not distort,
PW、O1、O2、P1、P2In the same plane；In dual camera system calibration, the figure of two video cameras in left and right is projected to spatial point
The minimum optimization aim of true picture coordinate distance taken as upper projected pixel coordinate and video camera；MiIndicate scaling board
A upper index point, regards the uncalibrated image that a video camera takes as first group, wherein index point MiTable on the image
It is shown as mi,j,1；Regard the uncalibrated image that two video cameras take as second group, wherein index point MiIt is expressed as on the image
mi,j,2；In addition camera parameters are also indicated with vector c, it includes the internal reference of two video cameras, and l scaling board is imaged at second
The relative pose between location parameter and two video cameras in machine；When camera parameters vector c is determined, biocular systems
Imaging model, and rebuild triangle relation determine that, also determined that MiTo the mapping π of the first width and the second width image1
(Mi, c) and π2(Mi,c)；Therefore the objective function of Binocular Stereo Vision System calibration is:
So as to find out the c of optimal solution, that is, the calibration result of our needs, the internal reference c=including two video cameras
(f1,κ1,sx1,sy1,cx1,cy1,f2,κ2,sx2,sy2,cx2,cy2) and right camera coordinates tie up to the position in left camera coordinate system
Appearance [Rr,Tr]。
The extracting method of laser-knife center used by 6th step is as follows:
All light-knife skeletons in whole picture figure are extracted using threshold method, then seek the normal side of each pixel on skeleton
To specially carrying out curve fitting along the pixel on skeleton, the method for curve matching is that 10 picture elements is taken to utilize y=
ax2+ bx+c carries out second-order fit, if (x0, y0) be pixel coordinate, then (x0, y0) point slope be t=2ax0+ b, if t
=0, then being weighted and averaged direction is the direction y, if t ≠ 0, (x0, y0) point method line slope be n=-1/t, be weighted and averaged direction
For normal direction；It calculates and after the normal direction of each point, seeks the gray scale of light-knife in the direction of its normal point on the skeleton of image
Cloth；The position of centre of gravity of the light-knife, as profile point position of the testee at this are finally found out using grey scale centre of gravity method, by this
A little profile points connect the contour line for being formed section.
The above described is only a preferred embodiment of the present invention, be not intended to limit the present invention in any form, though
So the present invention has been disclosed as a preferred embodiment, and however, it is not intended to limit the invention, any technology people for being familiar with this profession
Member, without departing from the scope of the present invention, when the method and technique content using the disclosure above make it is a little more
Equivalent embodiment that is dynamic or being modified to equivalent variations, but anything that does not depart from the technical scheme of the invention content, according to the present invention
Technical spirit any simple modification, equivalent change and modification to the above embodiments, still fall within technical solution of the present invention
In range.
Claims (2)
1. a kind of flexible 3 D measurement method based on laser MEMS projection arrangement, it is characterised in that: by binocular stereo vision system
Left video camera and laser MEMS projection arrangement in system are placed in same position, and optical axis straight down and is overlapped, and by taking the photograph
Camera and the mutual calibration technique of laser MEMS projection arrangement visual field, which calibrate, is displaced contracting between left video camera and projection arrangement pixel coordinate
Put parameter；Left video camera shoots testee and extracts testee ROI by two dimensional image feature extraction algorithm；According to institute
The displacement zooming parameter of calibration, the laser pattern that the projection of guiding projection device is made of light-knife and luminous point to ROI；Left video camera with
Right video camera forms Binocular Stereo Vision System, shoots testee, extracts the light-knife or light of laser pattern in two images respectively
Dot center finds out the space coordinate on object at corresponding laser pattern by binocular stereo vision method.
2. the flexible 3 D measurement method as described in claim 1 based on laser MEMS projection arrangement, which is characterized in that use
Laser MEMS projection arrangement, the light path principle of the projection arrangement are as follows: three identical semiconductor lasers are passing through optical fiber coupling
After conjunction, it is incident on beam cementing prism, synthesis beam of laser is reflected by a reflector MEMS scanning galvanometer after collimated
On；MEMS scanning galvanometer fast shaft current, slow axis electric current excitation under, generate the vibration of mutually perpendicular bimodal to by laser
Beam projects to different positions, forms two-dimensional scanning；Laser is compiled under the action of sinusoidal drive electric current and synchronization signal
Code modulation, ultimately forms laser pattern.
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