CN105783775B - A kind of minute surface and class minute surface object surface appearance measuring device and method - Google Patents
A kind of minute surface and class minute surface object surface appearance measuring device and method Download PDFInfo
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Abstract
A kind of minute surface and class minute surface method for measuring object surface shape and device, minute surface and class mirror shape are measured using phase measurement deviation art, using the combination of liquid crystal display and plane mirror as scaling board, wherein liquid crystal display is fixed, plane mirror moves freely 4 times, the image reflected by ccd detector shooting by plane mirror, linear solution and bundle adjustment is recycled to complete the calibration of intrinsic parameters of the camera, the calibration for completing both liquid crystal display and video camera relativeness is assessed using global pose, the three-dimensional appearance of minute surface to be measured is obtained finally by the gradient integral and calculating of phase measurement deviation art；The present invention overcomes scaling board is needed in conventional method calibration process and the shortcomings that being accurately positioned control point is being pasted on plane mirror, measurement cost is low, measuring speed is fast, at the same time, the constraintss such as the spin matrix orthogonality during introducing perspective imaging and fourier transform method carry out homotopy mapping, overcome strong noise, the influence that multi-frame processing recovers to bring to three-dimensional appearance.
Description
Technical field
The invention belongs to object surface appearance field of measuring technique, more particularly to a kind of minute surface and class mirror article surface shape
Looks measuring device and method.
Background technology
As the application range of high reflection object in the industrial production expands day by day, such as the flexible mirror in optical element
Face, automobile metal vehicle body, solar energy reflection mirror etc., accurate measurement and the 3 d shape of evaluation minute surface and class minute surface, it has also become carry
The quality of high finished surface and the important research content of performance.However, since high reflection body surface is in mirror-reflection
Characteristic, therefore traditional object three-dimensional profile measuring technology based on computer vision is difficult to realize the surface topography of mirror article
Measurement.
Existing high reflection object three-dimensional profile measuring method can be divided into two major classes：Contact and contactless profile measurement
Method.The precision of contact type measurement technology is very high, but measuring speed is slow, body surface easy to wear, to environmental requirement height etc., these are not
Foot limits its application in three-dimensional measurement field.Non-cpntact measurement mainly includes interferometric method and deflectometry.Interferometric method measures
Precision is high, but needs extra compensating element, this has resulted in its measurement cost height, meanwhile, have to species type to be measured and size
It is required that the topography measurement of all minute surfaces and class mirror article is not suitable for it.Deflectometry is with its measuring device is simple, measurement accuracy
High, the advantages that being measured suitable for industry spot and be widely studied and apply, but its there are system geometric calibration and same place
The technological difficulties such as matching.
Traditional deviation art scaling method is first with the inner parameter of scaling board calibrating camera, then takes and sticks control
High precision plane speculum or the laser tracker for making point are assessed to complete the pose between liquid crystal display and video camera, finally
Optimize calibration parameter using bundle adjustment, since the coordinate at control point on plane mirror needs to utilize photogrammetric or other methods
To be accurately positioned, laser tracker involves great expense, bundle adjustment process belongs to Local Optimization Algorithm, it is clear that currently used
Scaling method can increase measurement cost, can not ensure the convergence of optimization.Homotopy mapping is generally by the phase shift based on bar graph
Algorithm is completed, since the shooting of video camera defocus has no effect on the phase extraction process of sinusoidal coding figure, using bar graph into
Row phase matched has the advantages that matching precision is high, spatial resolution is high, but phase shift algorithm needs multiple phase shift, repeats to clap
Take the photograph, it is clear that this multi-frame processing process is unfavorable for measuring real-time.
The content of the invention
The shortcomings that in order to overcome the above-mentioned prior art, it is an object of the invention to provide a kind of minute surface and class minute surface object table
Face topography measurement apparatus and method, for the recovery of the minute surface and class minute surface object dimensional pattern of strong noise background, using complete
On the basis of office's pose assessment, by the way of four secondary flat mirrors are moved freely calibration of the realization to system components at the same time and
Whole geometry is demarcated, and can be greatly simplified calibration process and be reduced measurement cost, while using two-dimensional Fourier transform to carrying
The phase for having mirror gradient information to be measured carries out simple, quickly extraction, improves measuring speed.
To achieve these goals, the technical solution adopted by the present invention is：
A kind of minute surface and class minute surface object surface appearance measuring device, including：
For chessboard table images 7-1 to be projected on 5 minute surface of plane mirror and two-dimentional sine streak 7-2 is projected in mirror to be measured
Liquid crystal display 1 on 6 minute surfaces, wherein, chessboard table images 7-1 and two dimension sine streak 7-2 is by computer 3 respectively calibrated
Encode and produce in journey and measurement process；
The objective table moved freely for control plane mirror 5 or mirror to be measured 6；
For shooting the ccd detector 2 of 1 epigraph of liquid crystal display reflected through plane mirror 5 or mirror to be measured 6；
And
For the computer 3 for being analyzed and processed to gathered image and being recovered to 6 minute surface three-dimensional appearance of mirror to be measured.
The liquid crystal display 1 shows down, the minute surface of face plane mirror 5 or mirror to be measured 6.
The objective table is by translation stage 4-1, the angular displacement platform 4-2 on translation stage 4-1 and on angular displacement platform 4-2
Turntable 4-3 be composed, plane mirror 5 or mirror to be measured 6 are arranged on turntable 4-3, and minute surface is aobvious towards liquid crystal display 1
Show face.
The plane mirror 5 is used to demarcate, and is moved freely four times by objective table control, and shift position meets the chess through reflection
Disk table images 7-1 at least four characteristic points (X-comers) enter the shooting visual field of ccd detector 2.
The mirror to be measured 6 corresponding four positions when the position on objective table four characteristic points should occur with plane mirror 5
One of it is consistent, ensure that objective table is fixed in measurement process.
The spy that can be identified by ccd detector 2 is both provided with the chessboard table images 7-1 and two-dimentional sine streak 7-2
Sign point.
The characteristic point is designed as Filamentous spider, triangular shape or trapezoidal shape.
Present invention also offers the measuring method using the minute surface and class minute surface object surface appearance measuring device, including
Calibration process and measurement process：
Plane mirror 5, the coding generation chessboard table images 7-1 of computer 3, in liquid crystal are placed in calibration process, objective table
Show and show and project on device 1 to the minute surface of plane mirror 5, received after reflection by ccd detector 2, moved freely through objective table flat
Face mirror 5 four times, then ccd detector 2 can shoot the four width images reflected by plane mirror 5, shooting result carries out image by computer 3
Analysis and processing, utilize the inner parameter A of plane template method calibration ccd detector 2, including focal length of camera f, principal point coordinate
(u0,v0), single order, the second order coefficient of radial distortion k of obliquity factor s and imaging lens1、k2With tangential distortion coefficient p1、p2；Profit
With the global pose assessment calibration liquid crystal display 1 and ccd detector 2 reflected based on plane mirror, spin matrix R is peaceful between the two
Vector t is moved, the object function for assessing optimization isIt is constrained to RRT=I, whereinFor the characteristic point M on liquid crystal display 1ijOn the mirror image coordinate of plane mirror 5, niWith
diDistance for the unit normal vector of i-th of position of plane mirror and with 2 optical center of ccd detector, n for gridiron pattern amount of images (n >=
4), mjRepresent the control point number that each image obtains, vijImage planes are being normalized into for the picture point captured by ccd detector 2
Coordinate；
In measurement process, the plane mirror 5 on objective table is changed into mirror 6 to be measured, the two-dimentional sine streak of the coding generation of computer 3
7-2, shows on liquid crystal display 1 and projects to the minute surface of mirror 6 to be measured, received after reflection by ccd detector 2, shooting knot
Fruit carries out computer assisted image processing by computer 3, carries out homotopy mapping using two-dimensional Fourier transform method, utilizes calibration process
Position orientation relation between obtained liquid crystal display 1 and ccd detector 2 unifies same place under reference frame, reference coordinate
System is using objective table center as origin, plane where objective table is X/Y plane, the normal direction of objective table is Z axis, then utilizes phase
Gradient in the deviation art of position ask for equations determinand every along x and the gradient g in y-axis directionxAnd gy, last gradient integration
It can recover face shape z=∫ gxdx+gydy。
Specifically, 2 parameter of ccd detector is demarcated using linear solution and bundle adjustment, with image space error2 parameter of ccd detector is optimized as object function, wherein, mijRepresent i-th
Actual control point coordinates, M in width imagejRepresent the control point coordinates on liquid crystal display,It is point Mj
Projection on the i-th width image, utilizes LM methods optimization Intrinsic Matrix A, distortion factor matrix kc=[k1,k2,p1,p2], the i-th width
The outer parameter matrix R of imageiWith Ti；
Shot using on two-dimensional Fourier transform, filtering, inverse Fourier transform tracking liquid crystal display 1 with ccd detector 2
The identical point of image absolute phase, carries out homotopy mapping, with the 2 corresponding liquid crystal display of image coordinate (u, v) of ccd detector
Pixel coordinate on device 1 isWherein Φu、ΦvFor the absolute phase on u, v direction, px、pyRespectively two
Tie up the cycle on sine streak x and y directions.
By obtained nominal data and same place, the pixel coordinate on the liquid crystal display 1 under reference frame is asked for
(xs,ys,zs), the region (x of pixel illumination mirror to be measuredm,ym,z(xm,ym)), the corresponding points (x captured by ccd detector 2c,
yc,zc), substitute into following expression formula：
In formula
Amount z (x to be askedm,ym) replaced by the nominal shape of mirror 6 to be measured, finally by gradient integration z=∫ gxdx+gyDy is recovered really
Minute surface three-dimensional appearance to be measured.
Compared with prior art, the beneficial effects of the invention are as follows：
1. moving freely while realize ccd detector inner parameter and liquid crystal display and CCD spy using plane mirror
The assessment of position orientation relation between survey device, avoiding traditional video camera, individually calibration and system geometric calibration process use labeling will
The high complexity that the plane mirror or laser tracker of point are brought, and high cost.
2. using the specific global pose assessment algorithm for introducing spin matrix orthogonality constraint, can not only ensure to calculate knot
The authenticity of fruit, while robustness of the system to noise is significantly improved, can also be fast especially for less accurate initial value
Speed convergence, has itself unique advantage compared with bundle adjustment.
3. absolute phase is calculated using two-dimentional sine streak and fourier transform method, to liquid crystal display and ccd detector
Captured bar graph carries out phase point matching of the same name, and traditional phase algorithm, which is greatly saved, needs the time of multiframe phase shifted images
Cost.
Brief description of the drawings
Fig. 1 is operation principle structure diagram of the present invention.
Embodiment
The embodiment that the present invention will be described in detail with reference to the accompanying drawings and examples.
The present invention moves freely the system calibrating that phase deviation art is realized on the basis of plane mirror four times being only used only,
And the absolute phase obtained with reference to fourier transform method completes homotopy mapping, mirror is obtained with gradient integral and calculating
The three-dimensional appearance of body；System calibrating process is dramatically simplified, realizes real-time, quick three-dimensional values；Ensure at the same time
The authenticity and noise resisting ability of measurement result.
As shown in Figure 1, a kind of minute surface and class minute surface object surface appearance measuring device, including：For projecting chessboard trrellis diagram
As 7-1 and the liquid crystal display 1 of two-dimentional sine streak 7-2, for shooting the ccd detector 2 of reflected image, for system calibrating
Plane mirror 5, for automatic plane mirror 5 or mirror to be measured 6 combined by translation stage 4-1, angular displacement platform 4-2 and turntable 4-3 and
Into objective table and for image coding and algorithm process computer 3.
Calibration process be phase deviation measurement a technological difficulties, the present invention traditional calibration process is optimized and
Improve.Chessboard table images 7-1 specially is produced using the coding of computer 3, liquid crystal display 1 is sent into and calibration plane mirror 5 is thrown
Shadow, keeps liquid crystal display 1 and ccd detector 2 fixed, utilizes objective table random movement plane mirror 5 four times, CCD detection
Device 2 shoots the chessboard table images 7-1 that the plane mirror 5 in four diverse locations is reflected respectively, using computer 3 to shooting
Four width images are analyzed and processed, so as to carry out pose assessment, and ccd detector 2 to liquid crystal display 1 and ccd detector 2
Carry out parameter calibration.Measurement process uses the Fourier transform analysis of stripe pattern, and object plane gradient to be measured is asked point by point
Take.Specially change plane mirror 5 into mirror 6 to be measured, encoded using computer 3 and produce two-dimentional sine streak 7-2, be sent into liquid crystal display
Device 1 projects mirror 6 to be measured, and the deforming stripe image reflected by mirror to be measured is shot using ccd detector 2, using computer 3 to clapping
The bar graph taken the photograph is analyzed and processed, and with reference to calibration result, calculates discrete gradient value, integration recovers mirror surface-shaped to be measured.
Algorithm process is the core of measuring system, can be divided into the algorithm process of calibration process and measurement process.Counting first
With the pose assessment in following algorithm completion calibration process on calculation machine：
1) the characteristic point m of four width chessboard table images is extracted using Harris Robust Algorithm of Image Corner Extractionij=[uij,vij]T；
2) inner parameter A and the outside of the perspective projection imaging model linear solution ccd detector 2 of video camera are utilized
Parameter [R | t] initial value, introduce the distortion of ccd detector 2 and ask for distortion factor kc=[k1,k2,p1,p2] initial value；
3) 2 parameter of ccd detector is optimized using bundle adjustment, Optimal Parameters take image space error function：
N is gridiron pattern amount of images (n=4) in formula, mjRepresent the control point number that each image obtains, MjRepresent liquid crystal
Pixel coordinate on display,It is point MjProjection on the i-th width image.Pass through LM nonlinear optimizations
Algorithm asks for the inner parameter A and distortion factor k of ccd detectorc；
4) virtual camera concept is introduced, and considers the orthogonality of spin matrix, using object space error as object function, is carried out
Global pose assessment：
In formulaFor the characteristic point M on liquid crystal displayijMirror image on plane mirror
Coordinate, niFor the unit normal vector of i-th of position of plane mirror, diFor i-th of position of plane mirror when to 2 optical center of ccd detector away from
From vij=[uij,vij,1]TThe coordinate of image planes is being normalized into for the picture point captured by ccd detector.Pass through non-convex polynomial
Convex loose global optimum's solution and optimal closed solution calculate relative position relation between liquid crystal display 1 and ccd detector 2
R and T.
Algorithm in measurement process is mainly homotopy mapping, passes through Fourier transformation, filtering and inverse Fourier transform
Journey is the absolute phase of extractable deforming stripe figure, is then contrasted with the bar graph phase on liquid crystal display 1, you can complete
It is as follows into Feature Points Matching, specific algorithm：
1) the two-dimentional sine streak intensity function set on liquid crystal display is represented by：
I (x, y)=a+b1 cos[2πx/px+φx0(x,y)]+b2 cos[2πy/py+φy0(x,y)] (3)
(x, y) represents the pixel coordinate on liquid crystal display 1, a, b in formula1、b2The respectively direct current base of two-dimension grating
Wave component, x and y directions amplitude, px、pyRespectively striped x and y directions cycle, φx0(x,y)、φy0(x, y) is corresponding initial
Phase.The raster image intensity distribution then gathered by ccd detector 2 is：
I (u, v)=a (u, v)+b1(u,v)cos[φu(u,v)]+b2(u,v)cos[φv(u,v)] (4)
(u, v) is the pixel coordinate on 2 image of ccd detector in formula；
2) two-dimensional Fourier transform is carried out to the intensity function of 2 image of ccd detector, respectively obtains the frequency spectrum in u, v direction
Distribution：
G (ξ, η)=G0(ξ,η)+Gu(ξ-fu,η)+Gu(ξ+fu,η)+Gv(ξ,η-fv)+Gv(ξ,η+fv)+…(5)
3) respectively to the fundamental frequency G in u, v directionu(ξ-fu, η) and Gv(ξ,η-fv) be filtered and inverse Fourier transform, extraction
U, phase is blocked in v directions；
4) spatial domain phase unwrapping is carried out to blocking phase diagram, obtains the absolute phase Φ in u and v directionsuAnd Φv；
5) same place is followed the trail of using absolute phase, then the pixel coordinate with (u, v) on corresponding liquid crystal displayComplete Feature Points Matching.
Using calibration and homotopy mapping as a result, by the pixel coordinate (x on liquid crystal display 1s,ys,zs), the pixel shine
Region (the x of bright mirror to be measuredm,ym,z(xm,ym)), the corresponding points (x captured by ccd detector 2c,yc,zc) unify to arrive reference coordinate
Under system, the gradient information of each pixel corresponding points of tested surface is asked for using gradient formula：
In formula
Amount z (x to be askedm,ym) replaced by the nominal shape of mirror to be measured.Gradient integration can be recovered into real face shape
z(xm,ym)=∫ gxdx+gydy (7)
Global pose assessment Measurement Algorithm used by the present embodiment, by the way of plane mirror moves freely four times at the same time
Realize video camera and system geometric calibration：Due to only only used the plane mirror moved freely, avoid traditional in plane
The index point of accurate control position or the high complexity using system caused by laser tracker measurement absolute distance are pasted on mirror
With high cost.System homotopy mapping is completed by two-dimentional sinusoidal coding and fourier transform method, can conveniently be realized
Each parameter for calculating gradient is asked for.At the same time by introducing object space error function and rotation in the assessment of system geometry pose
The orthogonality constraint of matrix, it is possible to achieve the recovery of the mirror three-dimensional appearance to be measured under strong noise background, rapidly converges to true value.
The various embodiments described above are merely to illustrate the present invention, wherein calibration and measurement coded image, each component structure, be
Building mode of system etc. can be all varied from, every equivalents carried out on the basis of technical solution of the present invention and
Improve, should not exclude outside protection scope of the present invention.
Claims (1)
1. the measuring method of minute surface and class minute surface object surface appearance measuring device is utilized, including calibration process and measurement process,
Wherein, the minute surface and class minute surface object surface appearance measuring device include：
For chessboard table images (7-1) to be projected on plane mirror (5) minute surface and are projected in two-dimentional sine streak (7-2) to be measured
Liquid crystal display (1) on mirror (6) minute surface, wherein, chessboard table images (7-1) and two-dimentional sine streak (7-2) are by computer (3)
Encode and produce in calibration process and measurement process respectively；
The objective table moved freely for control plane mirror (5) or mirror to be measured (6)；
For shooting the ccd detector (2) of liquid crystal display (1) epigraph reflected through plane mirror (5) or mirror to be measured (6)；
And
For the computer (3) for being analyzed and processed to gathered image and being recovered to mirror to be measured (6) minute surface three-dimensional appearance；
It is characterized in that,
Plane mirror (5), computer (3) coding generation chessboard table images (7-1), in liquid crystal are placed in calibration process, objective table
Show and projected to the minute surface of plane mirror (5) on display (1), received after reflection by ccd detector (2), through objective table certainly
By movable plane mirror (5) four times, then ccd detector (2) can shoot the four width images reflected by plane mirror (5), shooting result by
Computer (3) carries out computer assisted image processing, and parameter calibration is carried out to ccd detector (2), and to liquid crystal display (1) and CCD
The relativeness of detector (2) carries out pose assessment；
In measurement process, the plane mirror (5) on objective table is changed into mirror to be measured (6), the sinusoidal bar of computer (3) coding generation two dimension
Line (7-2), shows on liquid crystal display (1) and projects to the minute surface of mirror to be measured (6), connect after reflection by ccd detector (2)
Receive, shooting result carries out computer assisted image processing by computer (3), and the minute surface gradient of mirror to be measured (6) is asked for point by point, product
Divide and recover mirror surface-shaped to be measured；
Wherein：
Computer (3) ccd detector (2) is shot by plane mirror (5) reflection image carry out analysis with handle including：
Utilize the inner parameter A of plane template method calibration ccd detector (2), including focal length of camera f, principal point coordinate (u0,v0)、
The single order of obliquity factor s and imaging lens, second order coefficient of radial distortion k1、k2With tangential distortion coefficient p1、p2；Using based on
The global pose assessment calibration liquid crystal display (1) of plane mirror reflection and ccd detector (2) spin matrix R and translation between the two
Vector t, the object function for assessing optimization areIt is constrained to RRT=I, wherein
For the characteristic point M on liquid crystal display (1)ijMirror image on plane mirror (5) is sat
Mark, niAnd diDistance for the unit normal vector of i-th of position of plane mirror and with ccd detector (2) optical center, n are chessboard table images
Quantity, mjRepresent the control point number that each image obtains, vijPicture is being normalized into for the picture point captured by ccd detector (2)
The coordinate in face；
Computer (3) ccd detector (2) is shot by mirror to be measured (6) reflection image carry out analysis with handle including：
Homotopy mapping is carried out using two-dimensional Fourier transform method, the liquid crystal display obtained using calibration process (1) and CCD are visited
The position orientation relation between device (2) is surveyed by under same place unification to reference frame, reference frame is using objective table center as origin, load
Plane where thing platform is X/Y plane, the normal direction of objective table is Z axis, then asks for formula using the gradient in phase deviation art
Solve determinand every along x and the gradient g in y-axis directionxAnd gy, last gradient, which integrates, can recover face shape z=∫ gxdx+
gydy；
Using linear solution and bundle adjustment calibration ccd detector (2) parameter, with image space error
Ccd detector (2) parameter is optimized as object function, wherein, mijRepresent that control point actual in the i-th width image is sat
Mark, MjRepresent the control point coordinates on liquid crystal display,It is point MjProjection on the i-th width image, profit
With LM methods optimization Intrinsic Matrix A, distortion factor matrix kc=[k1,k2,p1,p2], the outer parameter matrix R of the i-th width imageiWith
Ti；
Shot using on two-dimensional Fourier transform, filtering, inverse Fourier transform tracking liquid crystal display (1) with ccd detector (2)
The identical point of image absolute phase, carries out homotopy mapping, with the corresponding liquid crystal of ccd detector (2) image coordinate (u, v)
Show that the pixel coordinate on device (1) isWherein Φu、ΦvFor the absolute phase on u, v direction, px、pyRespectively
For the cycle on two-dimentional sine streak x and y directions；
By obtained nominal data and same place, the pixel coordinate (x on the liquid crystal display (1) under reference frame is asked fors,
ys,zs), the region (x of pixel illumination mirror to be measuredm,ym,z(xm,ym)), the corresponding points (x captured by ccd detector (2)c,yc,
zc), substitute into following expression formula：
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In formula
Amount z (x to be askedm,ym) by the nominal shape generation of mirror to be measured (6)
Replace, finally by gradient integration z=∫ gxdx+gyDy recovers real minute surface three-dimensional appearance to be measured.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102183214A (en) * | 2011-03-03 | 2011-09-14 | 中国科学院光电技术研究所 | Light detection method for large-aperture aspherical mirror structure |
| CN102944188A (en) * | 2012-10-18 | 2013-02-27 | 北京航空航天大学 | Calibration method of spot scanning three-dimensional topography measuring system |
| CN103487441A (en) * | 2013-09-24 | 2014-01-01 | 电子科技大学 | Method for defect detection and surface measurement of silicon wafer |
| CN103727895A (en) * | 2014-01-16 | 2014-04-16 | 电子科技大学 | Single-frame color composite grating stripe reflection mirror surface three-dimensional surface shape measuring method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014020919A (en) * | 2012-07-18 | 2014-02-03 | Toshiba Corp | Calibration device and calibration method of three-dimensional measurement device |
-
2016
- 2016-04-21 CN CN201610255808.3A patent/CN105783775B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102183214A (en) * | 2011-03-03 | 2011-09-14 | 中国科学院光电技术研究所 | Light detection method for large-aperture aspherical mirror structure |
| CN102944188A (en) * | 2012-10-18 | 2013-02-27 | 北京航空航天大学 | Calibration method of spot scanning three-dimensional topography measuring system |
| CN103487441A (en) * | 2013-09-24 | 2014-01-01 | 电子科技大学 | Method for defect detection and surface measurement of silicon wafer |
| CN103727895A (en) * | 2014-01-16 | 2014-04-16 | 电子科技大学 | Single-frame color composite grating stripe reflection mirror surface three-dimensional surface shape measuring method |
Non-Patent Citations (1)
| Title |
|---|
| 基于光栅相位偏折的高反射曲面三维形貌测量;李绍辉等;《计算机工程》;20130630;正文301页倒数第3-5段，图4 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110189381A (en) * | 2019-05-30 | 2019-08-30 | 北京眸视科技有限公司 | External parameters calibration system, method, terminal and readable storage medium storing program for executing |
| CN110189381B (en) * | 2019-05-30 | 2021-12-03 | 北京眸视科技有限公司 | External parameter calibration system, method, terminal and readable storage medium |
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