CN111121664A - Method for detecting surface type of interference-like mirror - Google Patents
Method for detecting surface type of interference-like mirror Download PDFInfo
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- CN111121664A CN111121664A CN201911312955.XA CN201911312955A CN111121664A CN 111121664 A CN111121664 A CN 111121664A CN 201911312955 A CN201911312955 A CN 201911312955A CN 111121664 A CN111121664 A CN 111121664A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
- G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2504—Calibration devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
Abstract
The invention discloses a surface type detection method of a kind of interference mirror surface, which comprises the steps of arranging a camera and a display above an objective table, enabling an image of the display to be projected onto the objective table and the camera to shoot the projected image, and obtaining the space positions of the camera and the display by an angular point detection and plane calibration method; placing a mirror to be measured on an objective table, projecting a periodic fringe pattern in the orthogonal direction by a display, shooting a deformed fringe pattern in the mirror to be measured by a camera, and resolving global phase distribution by a four-step phase-shifting algorithm and a frequency-doubling global phase solving algorithm; and obtaining gradient data according to the global phase distribution, processing the gradient data by using a Fourier transform integration method to obtain a reconstructed surface type, and optimizing the reconstructed surface type to obtain a final measured surface type. The invention solves the rise uncertainty without predicting the surface shape and ensures the surface shape measurement precision.
Description
Technical Field
The invention belongs to an optical precision detection technology, and particularly relates to a surface type detection method of a similar interference mirror.
Background
The application of the optical reflector in modern optical systems is increasingly wide, and the surface type precision of the reflector directly influences the performance index of the system, so that high standard and strict requirements are provided for the processing and detection technology of the reflector. The fringe reflection detection technology is widely applied to the fields of polishing of automobile metal surfaces, processing and detection of large-diameter optical reflectors, machine vision and the like in industrial production as a non-contact optical surface shape detection method with flexibility, high precision and high efficiency, and attracts a large number of domestic and foreign experts and scholars to develop corresponding research on the technology. In the fringe reflection detection technology, the light direction can be determined by moving a camera or a display to perform gradient solution, so that corresponding requirements are provided for motion control of equipment, and the measurement complexity is increased; or the rise of the mirror surface is provided to determine the light direction, for example, in the measurement process of a Software adjustable Optical Test System (SCOTS) with a pre-known surface shape, a pre-known surface shape of the mirror to be measured needs to be provided for calculation, but the prior information of the mirror to be measured is often unknown. In addition, in the relative measurement of the gradient, the phase difference of the reference mirror and the mirror to be measured which are placed at the same position needs to be calculated, and if the reference mirror and the mirror to be measured cannot be completely overlapped, a measurement error is introduced, so that the measurement uncertainty is increased.
Disclosure of Invention
The invention aims to provide a surface type detection method of a similar interference mirror surface.
The technical solution for realizing the purpose of the invention is as follows: a kind of interference mirror surface type detection method, the concrete step is:
step 1, arranging a camera and a display above an objective table, so that an image of the display can be projected onto the objective table and the camera can shoot the projected image, and acquiring the spatial positions of the camera and the display by an angular point detection and plane calibration method;
and 3, obtaining gradient data according to the global phase distribution, processing the gradient data by using a Fourier transform integration method to obtain a reconstructed surface type, and optimizing the reconstructed surface type to obtain a final measured surface type.
Preferably, the specific method for acquiring the spatial positions of the camera and the display by the corner detection and the plane calibration method includes:
placing the chessboard frame calibration plate on an object stage, adjusting the angle of a camera to enable the calibration plate to be positioned at the central position of an image, controlling the focal length and the aperture of a lens to enable the camera 1 to shoot the picture of the calibration plate, and fixing the positions of the camera and the focal length; changing the position, height and inclination angle of the chessboard calibration board, acquiring a plurality of calibration board images, finding corresponding angular points and pixel coordinates through a Harris angular point detection algorithm, and obtaining camera spatial position information by using a plane calibration method;
the method comprises the steps of placing a plane reflector on an objective table, projecting patterns of a chessboard grid calibration plate by a display, reflecting the patterns to a camera through the plane reflector for receiving, changing the position, height and inclination angle of the display, shooting a plurality of images, finding corresponding angular points and pixel coordinates through a Harris angular point detection algorithm, and obtaining display space position information by using a plane calibration method.
Preferably, the specific method for resolving the global phase distribution by the four-step phase-shifting algorithm and the frequency-doubling global phase solving algorithm comprises the following steps:
respectively displaying 1-cycle, 4-cycle, 16-cycle, 64-cycle and 128-cycle horizontal and vertical phase-shifting fringe patterns through a display, and acquiring corresponding fringe patterns by using a camera;
traversing each pixel of the fringe image, and respectively calculating the phase value of each pixel point by utilizing a four-step phase shifting algorithm;
the mean value of the phase values of each period is calculated as a global phase distribution.
Preferably, the specific formula for calculating the phase value of each pixel point by using the four-step phase-shifting algorithm is as follows:
wherein, InAnd n is 1,2,3,4, and is the light intensity of a sinusoidal fringe pattern of 0, pi/2, pi, 3 pi/2.
Preferably, the specific steps of obtaining gradient data according to the global phase distribution, processing the gradient data by using a fourier transform integration method to obtain a reconstructed surface type, and optimizing the reconstructed surface type to obtain a final measured surface type include:
step 3-1, obtaining the corresponding relation of pixel points between the camera target surface and the display according to the same phase value;
step 3-2, setting an initial iteration surface shape, and solving an intersection point, namely a reflection point, between a connecting line of effective pixel points on a camera target surface and a lens optical center and the initial surface shape; combining the phase corresponding relation of pixel points between the camera and the display to obtain the spatial position coordinates of the display pixels corresponding to each light path;
step 3-3, determining the normal direction of the reflection point according to the geometric relation
Comprises the following steps:
in the formula (I), the compound is shown in the specification,
is the direction vector of the reflected light ray,
is the direction vector of the incident ray;
step 3-4, according to the normal direction
Obtaining gradient data by the following specific formula:
in the formula (I), the compound is shown in the specification,
in the direction of the normal line,
and
gradients in the x and y directions, respectively;
and 3-5, processing the gradient data by using a Fourier transform integration method to reconstruct a three-dimensional surface type, wherein the specific formula is as follows:
wherein F (x, y) is the calculated reconstructed three-dimensional surface type, F and F-1Respectively representing fourier transform and inverse fourier transform, F (x, y) and F (u, v) representing the corresponding fourier transform pair, and (u, v) being the corresponding frequency domain coordinates of (x, y);
and
respectively gradient data;
and 3-6, replacing the initial surface shape with the reconstructed three-dimensional surface shape, returning to the step 3-2 until the surface shape converges to a stable value, and taking the last surface shape as the detection surface shape of the lens to be detected.
Compared with the prior art, the invention has the following remarkable advantages: the invention only needs one camera, avoids the repeated calibration process of a plurality of cameras, has relatively simple and convenient calibration process, simple operation of the surface type detection process and relatively short detection time; the invention solves the rise uncertainty without predicting the surface shape and ensures the surface shape measurement precision.
The present invention is described in further detail below with reference to the attached drawings.
Drawings
Fig. 1 is a schematic diagram of a camera calibration method using a checkerboard calibration board according to the present invention.
Fig. 2 is 21 calibration plate images acquired by the camera during the calibration process of the camera.
FIG. 3 is a schematic diagram of a method for calibrating a display using a flat mirror according to the present invention.
Fig. 4 is 10 calibration plate images acquired by the camera during the display calibration process.
FIG. 5 is a diagram of the orthogonal direction periodic stripes projected by the display during surface profile measurement.
Fig. 6 is a deformed stripe pattern acquired by the camera during surface shape measurement, where fig. 6(a) is a horizontal stripe pattern and fig. 6(b) is a vertical stripe pattern.
Fig. 7 is a schematic diagram of the global phase distribution calculated in the surface profile measurement, fig. 7(a) is a schematic diagram of the x-direction phase distribution, and fig. 7(b) is a schematic diagram of the y-direction phase distribution.
Fig. 8 is a schematic view of gradient distribution in surface measurement, fig. 8(a) is a schematic view of gradient distribution in the x direction, and fig. 8(b) is a schematic view of gradient distribution in the y direction.
Fig. 9 shows the set initial profile.
Fig. 10 is a schematic diagram of the first reconstructed surface shape and the deviation from the original surface shape, fig. 10(a) is a reconstructed surface shape, and fig. 10(b) is a deviation diagram.
Fig. 11 is a schematic diagram of the final reconstructed surface shape and the deviation from the original surface shape, fig. 11(a) is a reconstructed surface shape, and fig. 11(b) is a deviation diagram.
Fig. 12 is a schematic structural diagram of a device for implementing the invention.
FIG. 13 is a schematic diagram of a method for reconstructing a surface pattern according to the present invention.
Detailed Description
The invention realizes the surface type detection of the similar interference mirror by utilizing a camera 1, a display 2, an objective table 4, a mirror to be detected 3, a computer 5, a preset plane surface type, a chessboard pattern calibration plate 7 and a plane reflector 8. The preset plane type is virtual plane type data, and the thickness of the chessboard pattern calibration plate 7 and the thickness of the plane reflector 8 are the same.
The display 2 projects periodic stripe patterns in the orthogonal direction, after the periodic stripe patterns are reflected by the to-be-detected mirror 3 placed on the objective table 4, the deformed stripe patterns are received by the camera 1, and the detection surface type of the to-be-detected mirror 3 is reconstructed through the computer 5. The chessboard pattern calibration plate 7 and the plane reflector 8 are used for calibrating the camera and the display; the preset plane profile 6 is initial virtual profile data in the process of reconstructing the profile of the lens 3 to be measured by the computer 5.
According to the invention, on the basis of the SCOTS model with the predicted surface shape, the plane is used for replacing the predicted surface shape in the SCOTS model to carry out iterative calculation, so that the problem that the prior information of the lens to be measured is unknown is solved.
A kind of interference mirror surface type detection method, the concrete step is:
step 1, arranging a camera and a display above an objective table, so that an image of the display can be projected onto the objective table and the camera can shoot the projected image, and acquiring the spatial positions of the camera and the display by an angular point detection and plane calibration method; the specific method comprises the following steps:
placing the chessboard frame calibration plate on an object stage, adjusting the angle of a camera to enable the calibration plate to be positioned at the central position of an image, controlling the focal length and the aperture of a lens to enable the camera 1 to shoot the picture of the calibration plate, and fixing the positions of the camera and the focal length; changing the position, height and inclination angle of the chessboard calibration board, acquiring a plurality of calibration board images, finding corresponding angular points and pixel coordinates through a Harris angular point detection algorithm, and obtaining camera spatial position information by using a plane calibration method;
the method comprises the steps of placing a plane reflector on an objective table, projecting patterns of a chessboard grid calibration plate by a display, reflecting the patterns to a camera through the plane reflector for receiving, changing the position, height and inclination angle of the display, shooting a plurality of images, finding corresponding angular points and pixel coordinates through a Harris angular point detection algorithm, and obtaining display space position information by using a plane calibration method.
respectively displaying 1-cycle, 4-cycle, 16-cycle, 64-cycle and 128-cycle horizontal and vertical phase-shifting fringe patterns through a display, and acquiring corresponding fringe patterns by using a camera;
traversing each pixel of the fringe pattern, and respectively calculating the phase value of each pixel by utilizing a four-step phase-shifting algorithm, wherein the specific formula is as follows:
wherein, InAnd n is 1,2,3,4, and is the light intensity of a sinusoidal fringe pattern of 0, pi/2, pi, 3 pi/2.
The mean value of the phase values of each period is calculated as a global phase distribution.
step 3-1, obtaining the corresponding relation of pixel points between the camera target surface and the display according to the same phase value;
step 3-2, setting an initial iteration surface shape, and solving an intersection point, namely a reflection point, between a connecting line of effective pixel points on a camera target surface and a lens optical center and the initial surface shape; combining the phase corresponding relation of pixel points between the camera and the display to obtain the spatial position coordinates of the display pixels corresponding to each light path;
step 3-3, determining the normal direction of the reflection point according to the geometric relation
Comprises the following steps:
in the formula (I), the compound is shown in the specification,
is the direction vector of the reflected light ray,
is the direction vector of the incident ray;
step 3-4, according to the normal direction
Obtaining gradient data by the following specific formula:
in the formula (I), the compound is shown in the specification,
in the direction of the normal line,
and
gradients in the x and y directions, respectively;
and 3-5, processing the gradient data by using a Fourier transform integration method to reconstruct a three-dimensional surface type, wherein the specific formula is as follows:
wherein F (x, y) is the calculated reconstructed three-dimensional surface type, F and F-1Respectively representing fourier transform and inverse fourier transform, F (x, y) and F (u, v) representing the corresponding fourier transform pair, and (u, v) being the corresponding frequency domain coordinates of (x, y);
and
respectively gradient data;
and 3-6, replacing the initial surface shape with the reconstructed three-dimensional surface shape, returning to the step 4-2 until the surface shape converges to a stable value, and taking the last surface shape as the detection surface shape of the lens to be detected.
Examples
A kind of interference mirror surface type detection method, the concrete step is:
step 1, as shown in fig. 1, a checkerboard calibration plate 7 is placed on an object stage 4, the angle of a camera is adjusted to enable the calibration plate 7 to be located at the center position of an image, the focal length and aperture of the lens are controlled to enable the camera 1 to shoot a clear and bright picture, and the positions of the camera and the focal length are fixed. In order to ensure the calibration accuracy, the position, height and inclination angle of the checkerboard calibration plate 7 are changed within the camera view range to cover the camera imaging target surface as much as possible, and the camera 1 acquires 21 calibration plate images as shown in fig. 2. And finding out the corresponding corner points and pixel coordinates by using a Harris corner point detection algorithm, and then obtaining the spatial position information of the camera by using a plane calibration method.
According to the plane calibration method, the spatial position of the camera can be uniquely determined by the internal parameter, the external parameter and the distortion parameter of the camera. External reference medium rotation torque array R of camera 11And translation matrix T1Respectively as follows:
camera 1 internal reference K1Comprises the following steps:
distortion coefficient k of camera 11＝-0.1002，k2＝-1.2890。
As shown in fig. 3, a plane mirror 8 is placed on the object stage 4, the display 2 projects the pattern of the checkerboard calibration plate 7, the pattern is reflected to the camera 1 through the plane mirror 8 and received, the position, height and inclination angle of the display 2 are changed, the camera imaging target is covered as much as possible, the camera 1 collects 10 calibration plate images, as shown in fig. 4, the corresponding angular point and pixel coordinate are found through the Harris angular point detection algorithm, and then the display space position information is obtained through a plane calibration method.
According to the planar calibration method, the spatial position of the display can be uniquely determined by the external reference rotation matrix and the translation matrix. External reference rotation matrix R of display 2sAnd translation matrix TsComprises the following steps:
The global phase distribution is solved through a four-step phase-shifting algorithm and a frequency-doubling global phase solving algorithm, phase values are encoded in the x direction and the y direction of the area where the display is located according to a certain rule, each pixel on the target surface of the camera is traversed, and the phase value in the x direction and the y direction of each pixel point on the display corresponding to the pixel can be obtained, as shown in fig. 7.
The four-step phase-shifting algorithm calculates the phase by four sine fringe patterns with the phase-shifting quantities of 0, pi/2, pi and 3 pi/2 respectively:
wherein the content of the first and second substances,
is the light intensity of four sinusoidal fringe patterns.
The frequency multiplication coding global phase solving technology simultaneously multiplies the fringe pattern of the period to ensure the solving precision. In the actual measurement process, the horizontal and vertical phase-shifting fringe patterns of 1 cycle, 4 cycles, 16 cycles, 64 cycles and 128 cycles are respectively displayed by a display to complete the calculation of the global phase distribution in the x and y directions.
The average value of the phase distribution corresponding to each period is calculated and taken as the global phase distribution.
step 3-1, obtaining the corresponding relation of pixel points between the camera target surface and the display according to the same phase value;
step 3-2, as shown in fig. 9, setting the SCOTS model as an initial iterative surface shape, solving an intersection point between a connecting line of an effective pixel point and a lens optical center on a camera target surface and the initial surface shape, namely a spatial position coordinate of a mirror reflection point, and solving a spatial position coordinate of a display pixel corresponding to each optical path by combining a phase correspondence relationship of the pixel points between the camera and the display, as shown in fig. 13;
step 3-3, according to the geometric relationship, determining that the angular bisector (normal direction) of the incident ray and the reflected ray is vertical to the tangent plane passing through the reflection point on the to-be-measured mirror, and the normal direction of the reflection point
Comprises the following steps:
in the formula (I), the compound is shown in the specification,
is the direction vector of the reflected light ray,
is the direction vector of the incident ray.
Step 3-4, as shown in FIG. 8, according to the normal direction
Determining gradient dataThe concrete formula is as follows:
in the formula (I), the compound is shown in the specification,
in the direction of the normal line,
and
the gradients in the x and y directions, respectively.
And 3-5, processing the gradient data by using a Fourier transform integration method to reconstruct a three-dimensional surface type, wherein the specific formula is as follows:
wherein F (x, y) is the calculated reconstructed three-dimensional surface type, F and F-1Respectively representing fourier transform and inverse fourier transform, F (x, y) and F (u, v) representing the corresponding fourier transform pair, and (u, v) being the corresponding frequency domain coordinates of (x, y);
and
respectively gradient data.
And 3-6, replacing the initial surface type with the reconstructed three-dimensional surface type, iterating, returning to the step 4-2, and calculating the next three-dimensional surface type data. And after repeated iterative calculation, the surface shape is taken as the detection surface shape of the lens 3 to be detected for the last time until the surface shape converges to a stable value. The iterative solution process shows the first reconstructed surface shape and its deviation from the original surface shape and the final reconstructed surface shape and its deviation from the original surface shape as shown in fig. 10 and 11.
Claims (5)
1. A kind of interference mirror surface type detection method is characterized by comprising the following specific steps:
step 1, arranging a camera and a display above an objective table, so that an image of the display can be projected onto the objective table and the camera can shoot the projected image, and acquiring the spatial positions of the camera and the display by an angular point detection and plane calibration method;
step 2, placing the mirror to be measured on an objective table, projecting a periodic fringe pattern in the orthogonal direction by a display, shooting a deformed fringe pattern in the mirror to be measured by a camera, and resolving global phase distribution by a four-step phase-shifting algorithm and a frequency-doubling global phase solving algorithm;
and 3, obtaining gradient data according to the global phase distribution, processing the gradient data by using a Fourier transform integration method to obtain a reconstructed surface type, and optimizing the reconstructed surface type to obtain a final measured surface type.
2. The method for detecting the surface shape of the interference-like mirror surface according to claim 1, wherein the specific method for obtaining the spatial positions of the camera and the display by the corner detection and the plane calibration method comprises the following steps:
placing the chessboard frame calibration plate on an object stage, adjusting the angle of a camera to enable the calibration plate to be positioned at the central position of an image, controlling the focal length and the aperture of a lens to enable the camera 1 to shoot the picture of the calibration plate, and fixing the positions of the camera and the focal length; changing the position, height and inclination angle of the chessboard calibration board, acquiring a plurality of calibration board images, finding corresponding angular points and pixel coordinates through a Harris angular point detection algorithm, and obtaining camera spatial position information by using a plane calibration method;
the method comprises the steps of placing a plane reflector on an objective table, projecting patterns of a chessboard grid calibration plate by a display, reflecting the patterns to a camera through the plane reflector for receiving, changing the position, height and inclination angle of the display, shooting a plurality of images, finding corresponding angular points and pixel coordinates through a Harris angular point detection algorithm, and obtaining display space position information by using a plane calibration method.
3. The method for detecting the surface shape of the quasi-interference mirror according to claim 1, wherein the specific method for solving the global phase distribution by the four-step phase-shifting algorithm and the frequency-doubling global phase solving algorithm comprises the following steps:
respectively displaying 1-cycle, 4-cycle, 16-cycle, 64-cycle and 128-cycle horizontal and vertical phase-shifting fringe patterns through a display, and acquiring corresponding fringe patterns by using a camera;
traversing each pixel of the fringe image, and respectively calculating the phase value of each pixel point by utilizing a four-step phase shifting algorithm;
the mean value of the phase values of each period is calculated as a global phase distribution.
4. The method for detecting the surface shape of a mirror surface similar to an interference mirror surface of claim 3, wherein the specific formula for calculating the phase value of each pixel point by using the four-step phase-shifting algorithm is as follows:
wherein, InAnd n is 1,2,3,4, and is the light intensity of a sinusoidal fringe pattern of 0, pi/2, pi, 3 pi/2.
5. The method for detecting the surface shape of the interference-like mirror surface according to claim 1, wherein the specific steps of obtaining gradient data according to the global phase distribution, processing the gradient data by using a Fourier transform integration method to obtain a reconstructed surface shape, and optimizing the reconstructed surface shape to obtain a final measured surface shape are as follows:
step 3-1, obtaining the corresponding relation of pixel points between the camera target surface and the display according to the same phase value;
step 3-2, setting an initial iteration surface shape, and solving an intersection point, namely a reflection point, between a connecting line of effective pixel points on a camera target surface and a lens optical center and the initial surface shape; combining the phase corresponding relation of pixel points between the camera and the display to obtain the spatial position coordinates of the display pixels corresponding to each light path;
step 3-3, determining the normal direction of the reflection point according to the geometric relation
Comprises the following steps:
in the formula (I), the compound is shown in the specification,
is the direction vector of the reflected light ray,
is the direction vector of the incident ray;
step 3-4, according to the normal direction
Obtaining gradient data by the following specific formula:
in the formula (I), the compound is shown in the specification,
in the direction of the normal line,
and
gradients in the x and y directions, respectively;
and 3-5, processing the gradient data by using a Fourier transform integration method to reconstruct a three-dimensional surface type, wherein the specific formula is as follows:
wherein F (x, y) is the calculated reconstructed three-dimensional surface type, F and F-1Respectively representing Fourier transformsQuantizing and inverse fourier transforming, F (x, y) and F (u, v) representing respective pairs of fourier transforms, with (u, v) being the corresponding frequency domain coordinates of (x, y);
and
respectively gradient data;
and 3-6, replacing the initial surface shape with the reconstructed three-dimensional surface shape, returning to the step 4-2 until the surface shape converges to a stable value, and taking the last surface shape as the detection surface shape of the lens to be detected.
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| CN113240636A (en) * | 2021-05-08 | 2021-08-10 | 苏州天准科技股份有限公司 | Surface navigation intelligent detection method, system, storage medium and terminal equipment |
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