CN110618136A - Stripe detector for artificial optical quartz crystal material - Google Patents
Stripe detector for artificial optical quartz crystal material Download PDFInfo
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- CN110618136A CN110618136A CN201911018487.5A CN201911018487A CN110618136A CN 110618136 A CN110618136 A CN 110618136A CN 201911018487 A CN201911018487 A CN 201911018487A CN 110618136 A CN110618136 A CN 110618136A
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- vertical plate
- laser emitter
- industrial camera
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- 239000013078 crystal Substances 0.000 title claims abstract description 24
- 239000010453 quartz Substances 0.000 title claims abstract description 22
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 22
- 239000000463 material Substances 0.000 title claims abstract description 11
- 230000003287 optical effect Effects 0.000 title claims description 15
- 230000007246 mechanism Effects 0.000 claims abstract description 8
- 238000001514 detection method Methods 0.000 claims description 8
- 229910000838 Al alloy Inorganic materials 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 3
- 230000007547 defect Effects 0.000 abstract description 9
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 230000008859 change Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The utility model provides an artificial optics quartz crystal material stripe detector, is including pushing away frame and riser support, it includes the roof to push away the frame, the bottom plate and is located a plurality of landing legs between the two, be provided with the mounting hole that observes the hole and supply the riser support to pass through on this roof, riser support lower extreme and bottom plate rigid coupling, the mounting hole on the roof is passed to the upper end, this riser support adopts forked tail guide rail mechanism, above-mentioned slidable mounting has the gliding industry camera of riser support length direction that can follow that is located roof upper portion, the riser support from top to bottom slidable mounting in proper order has first lens, second lens and laser emitter in the roof lower part, laser emitter be located under the second lens and with place the laser power electric connection on the bottom plate. According to the invention, the quartz crystal image can be observed in the external display only by adjusting the heights of the first lens and the second lens, and whether the quartz crystal has the stripe defect can be effectively detected.
Description
Technical Field
The invention belongs to the field of artificial quartz crystal processing, and particularly relates to a stripe detector for an artificial optical quartz crystal material.
Background
The growth cycle of the artificial optical quartz crystal in the autoclave is more than 100 days, and the change of the fluidity of the solution is large due to the difference of the temperature and the pressure of each part at the upper part, the middle part and the lower part inside the autoclave body, and the influence of the change of the external environment temperature, the season, the heat preservation system and the like causes the influence of different stages and positions on the lattice arrangement during the crystal crystallization in the growth process, and then the non-uniformity of the light transmission is generated. The non-uniform defect portion is observed only after the crystal is processed into a polished wafer by using a professional inspection apparatus and is characterized by showing a certain streak-like defect. The traditional operation mode for detecting the stripe defects adopts imported professional equipment for inspection, and no people develop the stripe defects at home because of less optical quartz crystal processing enterprises, higher instrument development difficulty and small market consumption at home. Since the electronic industry in Japan is developed, only a few Japanese enterprises can produce the inspection instrument, but the price is high and the order period is long.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention aims to provide an artificial optical quartz crystal material stripe detector which is easy to operate and can quickly realize optical stripe defect detection.
The purpose of the invention is realized by adopting the following technical scheme. The stripe detector for the artificial optical quartz crystal material comprises a vertical plate support and a push frame, wherein the push frame comprises a top plate, a bottom plate and a plurality of support legs for supporting the top plate and the bottom plate; the industrial camera, the first lens and the second lens are connected with the vertical plate support in a sliding mode, and the laser transmitter is fixedly connected with the vertical plate support; the industrial camera is located top plate upper portion, and first lens, second lens, laser emitter are located between roof and the bottom plate and laser emitter locate the second lens under, this laser emitter still with laser power supply electric connection, the region between roof up end and the industrial camera lens lower extreme face is quartz crystal's detection area.
Furthermore, the vertical plate support is fixedly connected to the bottom plate, and the upper end of the vertical plate support penetrates through the mounting hole in the top plate.
Further, the vertical plate support and the pushing frame are made of aluminum alloy materials.
Furthermore, the vertical plate support is provided with a dovetail guide rail mechanism along the length direction of the vertical plate support, and the first mounting rack for mounting the first lens, the second mounting rack for mounting the second lens and the third mounting rack for mounting the industrial camera are connected with the dovetail guide rail mechanism in a sliding mode so that the first lens, the second lens and the industrial camera can all displace along the length direction of the vertical plate support.
Further, the optical axes of the laser emitter, the second lens, the first lens and the industrial camera are located on the same vertical line.
Furthermore, the bottom of the supporting leg is provided with a foot cup.
Further, the distance between the upper end face of the laser emitter and the upper end face of the second mounting frame for mounting the second lens is L1, the distance between the upper end face of the second mounting frame and the upper end face of the first mounting frame is L2, and L2 is greater than L1.
By means of the technical scheme, the vertical plate support, the pushing frame and the like of the stripe detector for the artificial optical quartz crystal material are made of the whole aluminum alloy, pollution caused by corrosion impurities is avoided, and the stripe detector for the artificial optical quartz crystal material is stable and reliable. The device adopts an industrial camera, and the acquisition and display system has good resolution, clear imaging and easy visual judgment; this riser support adopts aluminum alloy forked tail guide rail mechanism, and convenient location installation lens, industry camera, laser emitter, first lens and second lens can be followed riser support length direction and shifted from top to bottom and adjust L1, the distance of L2 and realize the adjustment of image size and display breadth. The invention has the advantages of simple operation, reliable detection, convenience and flexibility, strong practicability and ideal detection effect, and can ensure the effective detection of the quality defect of the online product.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical means of the present invention more clearly understood, the present invention may be implemented in accordance with the content of the description, and in order to make the above and other objects, features, and advantages of the present invention more clearly understandable, the following preferred embodiments are described in detail with reference to the accompanying drawings.
Drawings
FIG. 1 is a schematic perspective view of an embodiment of a fringe detector for an artificial optical quartz crystal material.
Fig. 2 is a front view of the embodiment shown in fig. 1.
[ reference numerals ]
1-vertical plate support 2-push frame 3-observation hole 4-top plate 5-bottom plate 6-first lens 7-second lens 8-industrial camera 9-laser emitter 10-laser power supply 11-foot cup 12-supporting leg 13-first mounting frame 14-display 15-second mounting frame 16-lens 17-third mounting frame 18-screw
Detailed Description
To further illustrate the technical means and effects of the present invention for achieving the predetermined objects, the following detailed description will be given to the specific implementation, structure, features and effects of the artificial optical quartz crystal material fringe detector provided by the present invention with reference to the accompanying drawings and the preferred embodiments.
In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are used only for convenience in describing the present invention and for simplification of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
Referring to fig. 1, the detector in this embodiment includes a vertical plate support 1, a pushing frame 2, a first lens 6, a second lens 7, an industrial camera 8, a laser emitter 9, a laser power source 10, and a display 14.
Riser support 1 and push away frame 2 etc. and all adopted whole aluminum alloy material, can avoid the pollution that corrosion impurity brought, push away roof 4 and bottom plate 5 that frame 2 set up including the level and be used for supporting roof 4 and bottom plate 5 and a plurality of landing legs 12 that the bottom was provided with goblet 11, be provided with the circular mounting hole that observes hole 3 and be located roof 4 one side confession riser support 1 and pass that is located its central point and puts on roof 4, this riser support 1 is vertical state, and the mounting hole on roof 4 is passed to its one end, and the other end is fixed in on the bottom plate 5.
The vertical plate support 1 is sequentially provided with an industrial camera 8, a first lens 6, a second lens 7 and a laser emitter 9 from top to bottom, wherein the industrial camera 8, the first lens 6, the second lens 7 and the vertical plate support 1 are in sliding connection, and the laser emitter 9 is fixedly connected with the vertical plate support 1. The first lens 6, the second lens 7 and the laser emitter 9 are located between the top plate 4 and the bottom plate 5, and the laser emitter 9 is arranged right below the second lens 7 and electrically connected with a laser power supply 10 arranged on the bottom plate 5. An industrial camera 8 is located above the ceiling 4.
The vertical plate support 1 is provided with a dovetail guide rail mechanism along the length direction of the vertical plate support, and a first mounting frame 13 for mounting the first lens 6, a second mounting frame 15 for mounting the second lens 7 and a third mounting frame 17 for mounting the industrial camera 8 are connected with the dovetail guide rail mechanism in a sliding mode so that the first lens 6, the second lens 7 and the industrial camera 8 can all displace along the length direction of the vertical plate support 1. The first 13, second 15 and third 17 mounting brackets are each flanked by screws 18 capable of fixing the first 13, second 15 and third 17 mounting brackets to the riser bracket 1.
Preferably, the first lens 6 is close to the viewing aperture 3, the second lens 7 is close to the laser emitter 9, and the optical axes of the laser emitter 9, the second lens 7, the first lens 6 and the industrial camera 8 are located on the same vertical line.
Referring to fig. 2, it is defined that a distance between an upper end surface of the laser emitter 9 and an upper end surface of the second mounting frame 15 is L1, a distance between an upper end surface of the second mounting frame 15 and an upper end surface of the first mounting frame 13 is L2, and a distance between an upper end surface of the first mounting frame 13 and a lower end surface of the industrial camera lens 16 is L3, and the screws on the first mounting frame 13, the second mounting frame 15, and the third mounting frame 17 are loosened, so that the first lens 6, the second lens 7, and the industrial camera 8 can respectively adjust distances of L1, L2, and L3 by vertical displacement of the respective mounting frames, thereby adjusting a current image size, a display breadth, and a definition displayed on the external display 14 in signal connection with the industrial camera 8. Preferably, L2 is much larger than L1 to achieve sharpness of image acquisition.
The working principle of the invention is as follows:
in use, the industrial camera 8 and the laser power supply 10 connected with the laser emitter 9 are turned on, laser emitted by the laser emitter 9 passes through the centers of the second lens 7 and the first lens 6 to reach the center of the lens 16 of the industrial camera, a quartz crystal to be detected is placed in a detection area between the upper end surface of the top plate 4 and the lower end surface of the lens 16 of the industrial camera, the center of the quartz crystal is opposite to the center of the observation hole 3, the industrial camera 8 receives and amplifies collected image signals and transmits the image signals to the external display 14 in signal connection with the industrial camera 8 for imaging, an operator observes the definition of an image formed by the display 14, the heights of the first lens 6 and the second lens 7 can be slowly adjusted by loosening the screws 18 on the side surfaces of the first mounting frame 13 and the second mounting frame 15, so that the distances of L1, L2 and L3 are adjusted until the clear image is observed on the display 14, and then screws 18 on the side surfaces of the first mounting frame 13 and the second mounting frame 15 are tightened to fix the first lens 6 and the second lens 7 on the vertical plate support 1, so that whether the detected quartz crystal has the streak defects or not can be clearly seen. The whole detection process is simple to operate, whether the quartz crystal is defective or not can be observed only by observing the display 14 and adjusting the positions of the first lens 6 and the second lens 7, and the working efficiency of inspectors can be effectively improved.
As a further improvement of the present invention, the vertical plate support 1 is an integral type, or can be designed as a split type with an upper part and a lower part, at this time, the top plate 4 is not provided with a mounting hole for the vertical plate support 1 to pass through, the bottom of the upper part of the vertical plate support 1 is fixedly connected with the top plate 4, and two ends of the lower part are fixedly connected with the top plate 4 and the bottom plate 5 respectively.
The above description is only a preferred embodiment of the present invention, and any person skilled in the art can make any simple modification, equivalent change and modification to the above embodiments according to the technical essence of the present invention without departing from the scope of the present invention, and still fall within the scope of the present invention.
Claims (7)
1. The utility model provides an artificial optics quartz crystal material stripe detector, includes riser support (1), pushes away frame (2) and includes roof (4), bottom plate (5) and is used for a plurality of landing legs (12) of supporting roof (4) and bottom plate (5), its characterized in that: an observation hole (3) and a mounting hole for the vertical plate support (1) to pass through are formed in the top plate (4), and an industrial camera (8), a first lens (6), a second lens (7) and a laser emitter (9) are sequentially mounted on the vertical plate support (1) from top to bottom; the industrial camera (8), the first lens (6) and the second lens (7) are in sliding connection with the vertical plate support (1), and the laser emitter (9) is fixedly connected with the vertical plate support (1); the industrial camera (8) is located on the upper portion of the top plate (4), the first lens (6), the second lens (7) and the laser emitter (9) are located between the top plate (4) and the bottom plate (5), the laser emitter (9) is arranged under the second lens (7), the laser emitter (9) is further connected with the laser power supply (10), and the region between the upper end face of the top plate (4) and the lower end face of the industrial camera lens (16) is a detection region of a quartz crystal.
2. The streak detector of claim 1, wherein: the vertical plate support (1) is fixedly connected to the bottom plate (5), and the upper end of the vertical plate support penetrates through the mounting hole in the top plate (4).
3. The streak detector according to claim 1 or 2, wherein: the vertical plate bracket (1) and the pushing frame (2) are made of aluminum alloy materials.
4. The streak detector of claim 1, wherein: the vertical plate support (1) is provided with a dovetail guide rail mechanism along the length direction of the vertical plate support, and a first mounting frame (13) used for mounting a first lens (6), a second mounting frame (15) used for mounting a second lens (7) and a third mounting frame (17) used for mounting an industrial camera (8) are connected with the dovetail guide rail mechanism in a sliding mode to enable the first lens (6), the second lens (7) and the industrial camera (8) to be capable of displacing along the length direction of the vertical plate support (1).
5. The streak detector of claim 1, wherein: the optical axes of the laser emitter (9), the second lens (7), the first lens (6) and the industrial camera (8) are positioned on the same vertical line.
6. The streak detector of claim 1, wherein: the bottoms of the supporting legs (12) are provided with foot cups (11).
7. The streak detector according to claim 4, wherein: the distance between the upper end face of the laser emitter (9) and the upper end face of a second mounting frame (15) used for mounting a second lens (7) is L1, the distance between the upper end face of the second mounting frame (15) and the upper end face of a first mounting frame (13) is L2, and L2 is larger than L1.
Priority Applications (1)
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CN201911018487.5A CN110618136A (en) | 2019-10-24 | 2019-10-24 | Stripe detector for artificial optical quartz crystal material |
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CN201911018487.5A CN110618136A (en) | 2019-10-24 | 2019-10-24 | Stripe detector for artificial optical quartz crystal material |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111579553A (en) * | 2020-05-26 | 2020-08-25 | 苏州京浜光电科技股份有限公司 | Simple pulse-based inspection tester |
CN116773522A (en) * | 2023-08-17 | 2023-09-19 | 辽宁拓邦鸿基半导体材料有限公司 | Quartz product visual detection equipment and detection method thereof |
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CN116773522B (en) * | 2023-08-17 | 2023-10-27 | 辽宁拓邦鸿基半导体材料有限公司 | Quartz product visual detection equipment and detection method thereof |
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