CN102553837A - Quartz wafer appearance sorting device - Google Patents

Quartz wafer appearance sorting device Download PDF

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Publication number
CN102553837A
CN102553837A CN2012100054498A CN201210005449A CN102553837A CN 102553837 A CN102553837 A CN 102553837A CN 2012100054498 A CN2012100054498 A CN 2012100054498A CN 201210005449 A CN201210005449 A CN 201210005449A CN 102553837 A CN102553837 A CN 102553837A
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CN
China
Prior art keywords
assembly
slide block
industrial camera
wafer
light source
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Pending
Application number
CN2012100054498A
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Chinese (zh)
Inventor
吴伟业
张铁
应灿
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MEIZHOU YUTONG TECHNOLOGY Co Ltd
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MEIZHOU YUTONG TECHNOLOGY Co Ltd
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Priority to CN2012100054498A priority Critical patent/CN102553837A/en
Publication of CN102553837A publication Critical patent/CN102553837A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a quartz wafer appearance sorting device and relates to the technical field of an appearance detection and sorting devices for quartz wafers. The quartz wafer appearance sorting device comprises a vision system assembly, a vibrating discharge assembly, a fine-tuned guide rail assembly and a wafer receiving assembly. The vibrating discharge assembly is arranged on one side of the vision system assembly; the fine-tuned guide rail assembly is arranged below the vision system assembly; and the wafer receiving assembly is arranged below one end of the fine-tuned guide rail assembly. The quartz wafer appearance sorting device has a reasonable design and a novel structure; a manual appearance sorting mode is changed into a mode of automatically carrying out appearance sorting by the machine vision; the sorting efficiency is greatly improved; the quartz wafers are sorted by the machine vision according to the unified standard; and the stability of the quality of the wafers is ensured.

Description

A kind of quartz wafer outward appearance sorting unit
Technical field
The outward appearance that the present invention relates to quartz wafer detects and the sorting unit technical field, is specifically related to quartz wafer outward appearance sorting unit.
Background technology
Quartz crystal is a kind of of silica (Si02), is the maximum crystal of present consumption in the world.Utilize the physical characteristic electronic component manufactured of quartz crystal itself, have very high frequency stability, be widely used in fields such as digital circuit, computer, communication.Its effect is exactly as frequency source or frequency reference in electronic circuit.Along with communication, development of electronic technology, to the also corresponding significantly rising of demand of quartz wafer.Natural and made quartz crystal all is a hexagonal pyramid, has anisotropic physical characteristic.Various wafers in the crystal oscillator are exactly to press and each different angles, cut into the thin slice of square, rectangle, circle, and the wafer property of different cut types is different.
Quartz crystal processing industry need be prepared into the quartz crystal semi-finished product to large quantities of quartz crystal material choice, orientation, cutting and grinding and polishings etc.; Then semi-finished product are carried out strict sorting by its frequency; Multiple top electrode carries out the frequency adjustment, carries out the finished product encapsulation of different size at last.All be strict through operations such as orientation, line, cutting, angle measurement, grinding and polishing, corrosion cleanings from original material; And also must be very accurate to the half-finished sorting of quartz wafer; Wafers poor like vigor, that clutter is many promptly are that waste product will sort out separately, could drop into further processing so need carry out strict sorting by its each electrical quantity to quartz wafer.
At present, domestic many producers still continue to use each item electrical characteristic (like frequency, impedance etc.) that manual method detects quartz crystal, cause sharpness of separation very low, and speed is slow, falsely drops the rate height, and labour intensity is big, and efficient is poor, causes the waste of human and material resources and financial resources.
Along with the continuous increase of crystal yield and the raising of frequency measurement scope, manual measurement more and more can not satisfy the demand of production, and its reason one is that manual detection efficiency is low, and is prone to artificial error in reading; The 2nd, for the high frequency quartz wafer, manual work is affectedly bashful and is prone to make its fragmentation.Therefore, for enhancing productivity and accuracy of measurement, developing homemade automatic detection system has become inevitable.
Abroad, the U.S. and Japan are global quartz crystal device research, Development and Production power, and they are going on along in the prostatitis in the world aspect the exploitation wafer measurement separation system.It is exactly the achievement of using for reference external advanced theoretical autonomous innovation research and development that the most of wafer that occurs on the China market is at present measured separation system.
Summary of the invention
The purpose of this invention is to provide quartz wafer outward appearance sorting unit; It is to the production of quartz crystal in enormous quantities; Correlation technique in conjunction with existing machine vision; Design a kind of outward appearance automation sorting unit of quartz wafer, efficient and reliability that it not only can improve the sorting of quartz wafer outward appearance greatly reduce the production cost of quartz wafer simultaneously.
In order to solve the existing problem of background technology; The present invention adopts following technical scheme: it comprises vision system assembly, vibration discharging assembly, fine-tuning guide assembly and wafer receiving unit; One side of vision system assembly is provided with vibration discharging assembly; The below of vision system assembly is provided with fine-tuning guide assembly, and an end of fine-tuning guide assembly below is provided with the wafer receiving unit.
Described vision system assembly comprise industrial camera, first fixedly industrial camera with sleeve slide block, second fixedly industrial camera with sleeve slide block, industrial lens, fixed light source with sleeve slide block, light source, rocking bar and rocking bar base; The upper end of rocking bar through screw be fixed with successively first fixedly industrial camera with sleeve slide block and second fixedly industrial camera use the sleeve slide block; First fixedly industrial camera be fixedly connected with industrial camera with the sleeve slide block; The below of industrial camera is provided with industrial lens; Second fixedly industrial camera be fixedly connected with light source with the sleeve slide block; Light source is provided with fixed light source and uses the sleeve slide block, and fixed light source all is located at the below of industrial lens with sleeve slide block and light source, and the bottom of rocking bar is provided with the rocking bar base.
Described vibration discharging assembly comprises circular vibrator and straight-line oscillation device, and circular vibrator is connected with the straight-line oscillation device.
Described fine-tuning guide assembly comprises spacing metal derby, Fibre Optical Sensor, colourless transparent glass, Fibre Optical Sensor support, fixed muffle, a sheet, high pillar, guide rail, short pillar and base; The front end of guide rail is provided with spacing metal derby; Be provided with colourless transparent glass in the guide rail of spacing metal derby rear side; The below of spacing metal derby is connected with Fibre Optical Sensor; And Fibre Optical Sensor is fixed through Fibre Optical Sensor support and guide rail, and the below of guide rail is welded with two sheets, and the lower end of two sheets is connected with the slot of high pillar and the slot of short pillar respectively; And high pillar and short pillar are all fixed with two sheets respectively through the fixed muffle of band screw, the bottom of high pillar and the bottom of short pillar all with base on slotted hole be connected.
Described wafer receiving unit comprises plastics magazine, magazine seat and pneumatic slide unit, and the below of two plastics magazines is provided with the magazine seat, and the below of magazine seat is provided with pneumatic slide unit.
Described vision system assembly is used for judging the quality of the quartz wafer that flows through from the visual field, and its inclination angle is in-90 degree to+90 degree scopes of perpendicular.
Described vibration discharging assembly is used to make wafer in vibrating bunker, to flow out in order.
Described fine-tuning guide assembly is used to finely tune speed speed and the position that quartz wafer flows through the visual field.
Described wafer receiving unit is used for qualified wafer is received with two different boxes respectively with defective wafer.
The present invention is reasonable in design, and novel structure becomes artificial outward appearance letter sorting through the automatic outward appearance letter sorting of machine vision, has improved the efficient of letter sorting greatly; And machine vision removes to sort quartz wafer according to unified standard, and the wafer quality of stability is guaranteed.
Description of drawings:
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the sketch map of vision system assembly among the present invention;
Fig. 3 is the sketch map of guide assembly fine-tuning among the present invention;
Fig. 4 is the sketch map of wafer receiving unit among the present invention;
Fig. 5 is a program flow diagram of the present invention.
The specific embodiment:
With reference to Fig. 1-Fig. 5; This specific embodiment adopts following technical scheme: it comprises vision system assembly 1, vibration discharging assembly 2, fine-tuning guide assembly 3 and wafer receiving unit 4; One side of vision system assembly 1 is provided with vibration discharging assembly 2; The below of vision system assembly 1 is provided with fine-tuning guide assembly 3, and an end of fine-tuning guide assembly 3 below is provided with wafer receiving unit 4.
Described vision system assembly 1 comprise industrial camera 15, first fixedly industrial camera with sleeve slide block 16a, second fixedly industrial camera with sleeve slide block 16b, industrial lens 17, fixed light source with sleeve slide block 18, light source 19, rocking bar 20 and rocking bar base 21; The upper end of rocking bar 20 through screw be fixed with successively first fixedly industrial camera with sleeve slide block 16a and second fixedly industrial camera with sleeve slide block 16b; First fixedly industrial camera be fixedly connected with industrial camera 15 with sleeve slide block 16a; The below of industrial camera 15 is provided with industrial lens 17; Second fixedly industrial camera be fixedly connected with light source 19 with sleeve slide block 16b; Light source 19 is provided with fixed light source with sleeve slide block 18; Fixed light source all is located at the below of industrial lens 17 with sleeve slide block 18 and light source 19, and the bottom of rocking bar 20 is provided with rocking bar base 21.
Described vibration discharging assembly 2 comprises circular vibrator and straight-line oscillation device, and circular vibrator is connected with the straight-line oscillation device.
Described fine-tuning guide assembly 3 comprises spacing metal derby 5, Fibre Optical Sensor 6, colourless transparent glass 7, Fibre Optical Sensor support 8, fixed muffle 9, a sheet 10, high pillar 11, guide rail 12, short pillar 13 and base 14; The front end of guide rail 12 is provided with spacing metal derby 5; Be provided with colourless transparent glass 7 in the guide rail 12 of spacing metal derby 5 rear sides; The below of spacing metal derby 5 is connected with Fibre Optical Sensor 6; And Fibre Optical Sensor 6 is fixing with guide rail 12 through Fibre Optical Sensor support 8, and the lower end that the below of guide rail 12 is welded with 10, two sheets 10 of two sheets is connected with the slot of high pillar 11 and the slot of short pillar 13 respectively; And high pillar 11 is all fixed with two sheets 10 respectively through the fixed muffle 9 of band screw with short pillar 13, the bottom of the bottom of high pillar 11 and short pillar 13 all with base 14 on slotted hole be connected.
The below that described wafer receiving unit 4 comprises plastics magazine 22, magazine seat 23 and 24, two plastics magazines 22 of pneumatic slide unit is provided with magazine seat 23, and the below of magazine seat 23 is provided with pneumatic slide unit 24.
Described vision system assembly 1 is used for judging the quality of the quartz wafer that flows through from the visual field, and its inclination angle is in-90 degree to+90 degree scopes of perpendicular.
Described vibration discharging assembly 2 is used to make wafer in vibrating bunker, to flow out in order.
Described fine-tuning guide assembly 3 is used to finely tune speed speed and the position that quartz wafer flows through the visual field.
Described wafer receiving unit 4 is used for qualified wafer is received with two different boxes respectively with defective wafer.
Circular vibrator in this specific embodiment and straight-line oscillation device not failure of oscillation are moving; Quartz wafer spiral in order rises; Flow into the after-acceleration of straight-line oscillation device from circular vibrator, flow to the guide rail 12 that certain angle of inclination is arranged, wafer beveled edge on the spacing metal derby 5 in the guide rail 12 is slided.Before flowing into the camera visual field, quartz wafer can trigger institute's optical fiber sensor installed 6 on track, triggering signal input industrial computer.After the industrial computer time-delay trace time, treat that wafer flows into to control industrial camera 15 after the camera visual field and get phase, and judge the wafer quality, export a data signal through vision algorithm.If wafer is qualified, then pneumatic slide unit 24 is to the motion of operator position direction, and wafer falls into the plastics magazine 22 of adorning qualified wafer; If wafer is defective, then pneumatic slide unit 24 is to the opposite direction motion of operator position, and wafer falls into the plastics magazine 22 of adorning defective wafer.
Electromagnetic valve switch on Fibre Optical Sensor 6 in this specific embodiment, industrial camera 15, the pneumatic slide unit 24 links to each other with industrial computer through controller; Realize after Fibre Optical Sensor 6 is sensed quartz wafer; Industrial computer control industrial camera 15 is taken pictures, and then the electromagnetic valve switch of controlling pneumatic slide unit 24 make magazine receive quartz wafer.
Whole guide rail 12 leans on operator position direction that certain inclination is arranged in this specific embodiment, makes quartz wafer when guide rail 12 falls, can lean on operator's direction to slide; The obstruction of spacing metal derby 5 beveled edge can make quartz wafer slide along this edge, and Fibre Optical Sensor 6 is housed on this edge route, and quartz wafer must slip over and trigger this sensor.
Described spacing metal derby 5 also has the effect of guiding except spacing function, the top in guiding quartz wafer to the camera visual field makes its free-falling again, falls in the camera visual field.After Fibre Optical Sensor 6 is triggered, finely tuned the certain delay time, can photograph the photo of quartz wafer, be convenient to do image and handle through the visual field.
The whole assorting room of quartz wafer nearly all occurs in wafer in the middle of the process of guide rail 12 landings in this specific embodiment; Trigger Fibre Optical Sensor 6; Get phase after a small amount of time-delay and carry out the image processing; Obtain judged result, control pneumatic slide unit 24 again and move to correct position, thereby guarantee that each quartz wafer can both fall into correct magazine.
The method of this specific embodiment applied for machines vision; Obtain the image of quartz wafer through industrial camera; Carrying out a series of images handles; Rely on captured image and the vision software inner formword image of industrial camera to compare, thereby judge that whether qualified this quartz wafer is, and build the outward appearance sorting unit of quartz wafer as core.
This specific embodiment is reasonable in design, and novel structure becomes artificial outward appearance letter sorting through the automatic outward appearance letter sorting of machine vision, has improved the efficient of letter sorting greatly; And machine vision removes to sort quartz wafer according to unified standard, and the wafer quality of stability is guaranteed.
The above is merely preferred embodiment of the present invention, is not the present invention is done any pro forma restriction; But the those of ordinary skill of all industry is embodiment of the present invention with the above and swimmingly shown in the by specification accompanying drawing all; But all professional and technical personnel of being familiar with the above technology contents that is disclosed capable of using and a little change of making, modify the equivalent variations with differentiation in not breaking away from technical scheme scope of the present invention, be equivalent embodiment of the present invention; Simultaneously, all foundations essence technology of the present invention all still belongs within the protection domain of technical scheme of the present invention change, modification and the differentiation etc. of any equivalent variations that above embodiment did.

Claims (5)

1. quartz wafer outward appearance sorting unit; It is characterized in that it comprises vision system assembly (1), vibration discharging assembly (2), fine-tuning guide assembly (3) and wafer receiving unit (4); One side of vision system assembly (1) is provided with vibration discharging assembly (2); The below of vision system assembly (1) is provided with fine-tuning guide assembly (3), and an end of fine-tuning guide assembly (3) below is provided with wafer receiving unit (4).
2. quartz wafer outward appearance sorting unit according to claim 1; It is characterized in that described vision system assembly (1) comprise industrial camera (15), first fixedly industrial camera with sleeve slide block (16a), second fixedly industrial camera with sleeve slide block (16b), industrial lens (17), fixed light source with sleeve slide block (18), light source (19), rocking bar (20) and rocking bar base (21); The upper end of rocking bar (20) through screw be fixed with successively first fixedly industrial camera with sleeve slide block (16a) and second fixedly industrial camera with sleeve slide block (16b); First fixedly industrial camera be fixedly connected with industrial camera (15) with sleeve slide block (16a); The below of industrial camera (15) is provided with industrial lens (17); Second fixedly industrial camera be fixedly connected with light source (19) with sleeve slide block (16b); Light source (19) is provided with fixed light source with sleeve slide block (18); Fixed light source all is located at the below of industrial lens (17) with sleeve slide block (18) and light source (19), and the bottom of rocking bar (20) is provided with rocking bar base (21).
3. quartz wafer outward appearance sorting unit according to claim 1; It is characterized in that described fine-tuning guide assembly (3) comprises spacing metal derby (5), Fibre Optical Sensor (6), colourless transparent glass (7), Fibre Optical Sensor support (8), fixed muffle (9), a sheet (10), high pillar (11), guide rail (12), short pillar (13) and base (14); The front end of guide rail (12) is provided with spacing metal derby (5); Be provided with colourless transparent glass (7) in the guide rail (12) of spacing metal derby (5) rear side; The below of spacing metal derby (5) is connected with Fibre Optical Sensor (6); And Fibre Optical Sensor (6) is fixing through Fibre Optical Sensor support (8) and guide rail (12); The below of guide rail (12) is welded with two sheets (10); The lower ends of two sheets (10) are connected with the slot of high pillar (11) and the slot of short pillar (13) respectively, and high pillar (11) and short pillar (13) all the fixed muffle (9) through being with screw prop up sheets (10) and fix with two respectively, the bottom of the bottom of high pillar (11) and short pillar (13) all with base (14) on slotted hole be connected.
4. quartz wafer outward appearance sorting unit according to claim 1; It is characterized in that described wafer receiving unit (4) comprises plastics magazine (22), magazine seat (23) and pneumatic slide unit (24); The below of two plastics magazines (22) is provided with magazine seat (23), and the below of magazine seat (23) is provided with pneumatic slide unit (24).
5. quartz wafer outward appearance sorting unit according to claim 1, the inclination angle that it is characterized in that described vision system assembly (1) is in-90 degree to+90 degree scopes of perpendicular.
CN2012100054498A 2012-01-10 2012-01-10 Quartz wafer appearance sorting device Pending CN102553837A (en)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102873032A (en) * 2012-09-14 2013-01-16 天津必利优科技发展有限公司 Automatic material separating component
CN103531506A (en) * 2013-10-24 2014-01-22 随州润晶电子科技有限公司 Screening, sorting and positioning jig for surface-mounted crystals
CN105457907A (en) * 2015-09-23 2016-04-06 浙江工业大学义乌科学技术研究院有限公司 Image collecting and sorting device for tea bags
CN105797978A (en) * 2016-04-15 2016-07-27 安庆市晶科电子有限公司 Performance detecting device for transistor machining
CN106345703A (en) * 2016-08-29 2017-01-25 芜湖辉灿电子科技有限公司 Sorting device for sound systems of mobile phones
CN107097148A (en) * 2017-06-13 2017-08-29 江苏吉星新材料有限公司 A kind of sorting technique after sapphire substrate sheet section
CN110618136A (en) * 2019-10-24 2019-12-27 北京石晶光电科技股份有限公司 Stripe detector for artificial optical quartz crystal material
CN111141754A (en) * 2019-12-30 2020-05-12 上海感图网络科技有限公司 Device and method for wafer detection based on AI vision
CN112893183A (en) * 2021-03-02 2021-06-04 深圳鹏瑞智能科技有限公司 Online continuous wafer flaw measurement method with abnormal data reminding function

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Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102873032A (en) * 2012-09-14 2013-01-16 天津必利优科技发展有限公司 Automatic material separating component
CN102873032B (en) * 2012-09-14 2014-04-09 天津必利优科技发展有限公司 Automatic material separating component
CN103531506A (en) * 2013-10-24 2014-01-22 随州润晶电子科技有限公司 Screening, sorting and positioning jig for surface-mounted crystals
CN105457907A (en) * 2015-09-23 2016-04-06 浙江工业大学义乌科学技术研究院有限公司 Image collecting and sorting device for tea bags
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CN105797978A (en) * 2016-04-15 2016-07-27 安庆市晶科电子有限公司 Performance detecting device for transistor machining
CN106345703A (en) * 2016-08-29 2017-01-25 芜湖辉灿电子科技有限公司 Sorting device for sound systems of mobile phones
CN107097148A (en) * 2017-06-13 2017-08-29 江苏吉星新材料有限公司 A kind of sorting technique after sapphire substrate sheet section
CN107097148B (en) * 2017-06-13 2019-03-15 江苏吉星新材料有限公司 A kind of classification method after sapphire substrate sheet slice
CN110618136A (en) * 2019-10-24 2019-12-27 北京石晶光电科技股份有限公司 Stripe detector for artificial optical quartz crystal material
CN111141754A (en) * 2019-12-30 2020-05-12 上海感图网络科技有限公司 Device and method for wafer detection based on AI vision
CN112893183A (en) * 2021-03-02 2021-06-04 深圳鹏瑞智能科技有限公司 Online continuous wafer flaw measurement method with abnormal data reminding function

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Application publication date: 20120711