CN106872442A - A kind of MEMS Miniature Raman spectrometers - Google Patents
A kind of MEMS Miniature Raman spectrometers Download PDFInfo
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- CN106872442A CN106872442A CN201710166631.4A CN201710166631A CN106872442A CN 106872442 A CN106872442 A CN 106872442A CN 201710166631 A CN201710166631 A CN 201710166631A CN 106872442 A CN106872442 A CN 106872442A
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- 238000001069 Raman spectroscopy Methods 0.000 title claims abstract description 44
- 239000006185 dispersion Substances 0.000 claims abstract description 32
- 238000005070 sampling Methods 0.000 claims abstract description 21
- 230000004313 glare Effects 0.000 claims abstract description 15
- 238000005516 engineering process Methods 0.000 claims abstract description 10
- 239000000523 sample Substances 0.000 claims description 30
- 238000001237 Raman spectrum Methods 0.000 claims description 18
- TVZRAEYQIKYCPH-UHFFFAOYSA-N 3-(trimethylsilyl)propane-1-sulfonic acid Chemical compound C[Si](C)(C)CCCS(O)(=O)=O TVZRAEYQIKYCPH-UHFFFAOYSA-N 0.000 claims description 9
- 238000001914 filtration Methods 0.000 claims description 9
- 238000001228 spectrum Methods 0.000 claims description 6
- 230000009897 systematic effect Effects 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 239000004744 fabric Substances 0.000 claims 1
- 230000003595 spectral effect Effects 0.000 abstract description 10
- 238000005286 illumination Methods 0.000 abstract description 3
- 230000010354 integration Effects 0.000 abstract description 2
- 230000001629 suppression Effects 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 description 9
- 238000004458 analytical method Methods 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- KBPHJBAIARWVSC-RGZFRNHPSA-N lutein Chemical compound C([C@H](O)CC=1C)C(C)(C)C=1\C=C\C(\C)=C\C=C\C(\C)=C\C=C\C=C(/C)\C=C\C=C(/C)\C=C\[C@H]1C(C)=C[C@H](O)CC1(C)C KBPHJBAIARWVSC-RGZFRNHPSA-N 0.000 description 1
- 229960005375 lutein Drugs 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- KBPHJBAIARWVSC-XQIHNALSSA-N trans-lutein Natural products CC(=C/C=C/C=C(C)/C=C/C=C(C)/C=C/C1=C(C)CC(O)CC1(C)C)C=CC=C(/C)C=CC2C(=CC(O)CC2(C)C)C KBPHJBAIARWVSC-XQIHNALSSA-N 0.000 description 1
- FJHBOVDFOQMZRV-XQIHNALSSA-N xanthophyll Natural products CC(=C/C=C/C=C(C)/C=C/C=C(C)/C=C/C1=C(C)CC(O)CC1(C)C)C=CC=C(/C)C=CC2C=C(C)C(O)CC2(C)C FJHBOVDFOQMZRV-XQIHNALSSA-N 0.000 description 1
- 235000008210 xanthophylls Nutrition 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
Abstract
The invention discloses a kind of MEMS Miniature Raman spectrometers, including sampling module, control display module, MEMS dispersion compensation modules, the degree of integration of modules of the invention is higher, easily reduce equipment volume, Handheld spectrometer can be made, and the present invention can carry out strict suppression to the lens of the laser illumination system and Raman diffused light veiling glare that light path is produced altogether, the present invention completes data processing function using embedded OS, can realize that hand-held is used, completely disengage from computer and work independently, the present invention is using using the dispersion integrated with movable F P chambers of MEMS technology grating, can ensure while Free Spectral Range wider, narrower full width at half maximum (FWHM) is obtained in that again, obtain spectral resolution high.
Description
Technical field
The present invention relates to a kind of optical detecting instrument field, more particularly to a kind of MEMS Miniature Raman spectrometers.
Background technology
Raman spectrum reflects the vibration performance of atom in molecular structure, is referred to as the Fingerprint of molecule.Raman detection
, used as a kind of impayable, strong analysis means, with nondestructive measurement, detection speed is fast, sample preparation is simple, achievable for technology
The advantages of Site Detection, it is expected to be applied in the production and life of reality.But, because the intensity of Raman scattering is very weak, its is strong
Degree is 10-6~10-3 times of Rayleigh scattering luminous intensity, therefore, the structure of Raman spectrometer is typically complex, and price is high
It is expensive, million RMB easily, these hinder application of the Raman spectrum in actually detected, the miniaturization of Raman spectroscopy instrument and
Simplification will be following developing direction.
And currently used for the Miniature Raman spectrometer of live Emergent detection, to ensure the compactedness of system, the laser of sample
Illuminator is generally total to light path with the lens of Raman diffused light, many in light collecting lens so as to be inevitably generated illumination light
Secondary reflection, forms the veiling glare beyond Rayleigh scattering light, but the detection of Raman spectrum belongs to Testing of Feeble Signals, it is necessary to system
In veiling glare strictly suppress, existing Portable Raman spectrometer typically completes data processing using portable computer in addition
Function, it is impossible to depart from computer autonomous working, and existing spectrometer is due to the intrinsic resolution ratio of grating dispersion technology and focal length
Between contradiction, it is impossible to ensure while Free Spectral Range wider, narrower full width at half maximum (FWHM) to be obtained in that again.
The content of the invention
To solve the above problems, the present invention provides a kind of MEMS Miniature Raman spectrometers, the collection of modules of the invention
It is higher into degree, it is easier to reduce equipment volume, Handheld spectrometer can be made, and also the present invention can be to laser lighting system
System carries out strict suppression with the lens veiling glare that light path is produced altogether of Raman diffused light, and the present invention uses embedded OS
Complete data processing function, it is possible to achieve hand-held is used, and is completely disengaged from computer and is worked independently, the present invention uses MEMS
The technology grating dispersion integrated with movable F-P cavity, it is ensured that while Free Spectral Range wider, be obtained in that again compared with
Narrow full width at half maximum (FWHM), obtains spectral resolution high.
To achieve the above object, the present invention uses following technological means：
The present invention provides a kind of MEMS Miniature Raman spectrometers, including sampling module, control display module, MEMS dispersion moulds
Block；
The sampling module includes laser, sampling camera lens/Raman probe system；
The control display module includes Database Unit, embedded OS/network connection unit, display module；
The MEMS dispersion compensation modules include dispersion compensation module, photodetector unit；
The light that the laser sends is radiated at and Raman spectrum is excited on sample through over-sampling camera lens/Raman probe system,
Above-mentioned Raman spectrum is transported to dispersion compensation module after over-sampling camera lens/Raman probe systematic collection, filtering, then by dispersion compensation module
Photodetector unit is transferred to after dispersion, new Raman spectrum is obtained, by by the data of new Raman spectrum and Database Unit
Compare, the identity information of measured object is shown in display module；
Realize controlling and data exchange and treatment the system of whole machine instrument by the control display module, database list
Unit externally carries out data exchange by USB interface.
Further, it is the narrow band laser of 785nm as lighting source that the laser uses wavelength, and it is with a width of
0.2nm, spot size 2mm × 2mm, light intensity is followed and is evenly distributed.
Further, the sampling camera lens/Raman probe system includes lens (O1), dichroscope (DSS), notch filtering light
Piece (NF), convergence yoke (O2), incident laser is by dichroscope reflection (DSS) again by lens (O1) focus on sample, shine
The scattering light of sample generation is penetrated through lens (O1) collect, and filtered through dichroscope (DSS), notch filtering light piece (NF) therein auspicious
Beautiful scattering light, the Raman diffused light for obtaining is again by convergence yoke (O2), focus at slit.
Further, the slit width is 0.05mm, and length is 2mm.
Further, size and location, exit direction focused on according to veiling glare, reach energy size at slit, it is described to adopt
Stain plate is provided with sample camera lens/Raman probe system.
Further, the dispersion compensation module is using the dispersion integrated with movable F-P cavity of MEMS technology grating, the drawing at slit
Graceful scattering light is put down and grating by incidence after collimated, is filtered by F-P cavity again through -1 order diffraction light after grating dispersion
Ripple, sets condenser lens after F-P cavity, the light wave for making wavelength meet condition forms spectrum striped in CCD.
Beneficial effects of the present invention：
The degree of integration of modules of the invention is higher, it is easier to reduce equipment volume, can make hand-held spectrum
Instrument, and the present invention lens of the laser illumination system and Raman diffused light veiling glare that light path is produced altogether can be carried out it is strict
Suppress, the present invention completes data processing function using embedded OS, it is possible to achieve hand-held is used, and completely disengages from computer
And work independently, the present invention is using using the dispersion integrated with movable F-P cavity of MEMS technology grating, it is ensured that it is wider from
While by spectral region, narrower full width at half maximum (FWHM) is obtained in that again, obtain spectral resolution high.
Brief description of the drawings
Fig. 1 is the module frame chart schematic diagram of one embodiment of the invention；
Fig. 2 is the probe system schematic diagram of one embodiment of the invention；
Fig. 3 is the schematic diagram of laser multiple reflections on lens；
Fig. 4 is multiple reflections Reyleith scanttering light schematic diagram on transmission Rayleigh scattering light and lens；
Fig. 5 is the actual light of one embodiment of the present of invention through the tracking situation of dichroscope；
Fig. 6 is the analysis model of focusing light after whole probe system；
Fig. 7 is the structured flowchart of the embedded OS of one embodiment of the invention；
Fig. 8 is the spectrum light path schematic diagram of grating and the integrated optical modulators of movable F-P.
Specific embodiment
Below in conjunction with the accompanying drawings and specific embodiment the present invention will be further described.
Embodiment 1：As shown in figure 1, the present embodiment provides a kind of MEMS Miniature Raman spectrometers, including sampling module, control
Display module processed, MEMS dispersion compensation modules；
The sampling module includes laser, sampling camera lens/Raman probe system；
The control display module includes Database Unit, embedded OS/network connection unit, display module；
The MEMS dispersion compensation modules include dispersion compensation module, photodetector unit；
The light that the laser sends is radiated at and Raman spectrum is excited on sample through over-sampling camera lens/Raman probe system,
Above-mentioned Raman spectrum is transported to dispersion compensation module after over-sampling camera lens/Raman probe systematic collection, filtering, then by dispersion compensation module
Photodetector unit is transferred to after dispersion, new Raman spectrum is obtained, by by the data of new Raman spectrum and Database Unit
Compare, the identity information of measured object is shown in display module；
Realize controlling and data exchange and treatment the system of whole machine instrument by the control display module, database list
Unit externally carries out data exchange by USB interface.
As shown in Fig. 2 the sampling camera lens/Raman probe system includes lens (O1), dichroscope (DSS), trap filter
Mating plate (NF), convergence yoke (O2), incident laser is by dichroscope reflection (DSS) again by lens (O1) focus on sample,
The scattering light that irradiating sample is produced is through lens (O1) collect, and filtered through dichroscope (DSS), notch filtering light piece (NF) therein
Rayleigh scattering light, the Raman diffused light for obtaining is again by convergence yoke (O2), focus at slit.
Size and location, exit direction are focused on according to veiling glare, energy size, the sampling camera lens/drawing at slit is reached
Stain plate is provided with graceful probe system.
It is tracked Optical ray analysis, it is the narrow band laser of 785nm as lighting source that laser uses wavelength, its bandwidth
It is 0.2nm, spot size 2mm × 2mm, light intensity is followed and is evenly distributed, and can reduce the fluorescence background of Raman spectrum, slit width
It is 0.05mm, length is 2mm, the wavelength selection 785nm of notch filtering light piece, and optical density is 6.
Laser illuminator is illustrated in figure 3 in lens O1Upper multiple reflections produce the situation of veiling glare, and wherein m is incident light, b
It is laser through O1Primary event light after front surface reflection, c is triple reflection light, and d is five secondary reflection light, and e is seven secondary reflections
Light, p is laser through lens O1Primary event light after surface is reflected afterwards.
It is illustrated in figure 4 transmission Rayleigh scattering light and its in lens O1The veiling glare that upper multiple reflections are formed, wherein k is scattered
Light is penetrated, f is transmission Rayleigh scattering light, and g is secondary reflection Reyleith scanttering light, and h is four secondary reflection Reyleith scanttering lights.
Using light path of light computing formula in meridian plane to laser illuminator and transmission rayleigh scattering light and transmission rayleigh scattering
Light is in lens O1The veiling glare that upper multiple reflections are formed carries out ray tracing, and away from being l, angular aperture is u to trace starting material, by saturating
Mirror O1Afterwards, emergent ray angular aperture is u0, emergent ray intercept is l0, by lens O1Afterwards, the preliminary energy balane knot of veiling glare
Really, I is obtainedmIt is 0.98, IbIt is 9.8x10-3,IcIt is 9.8x10-7,IdIt is 9.8x10-11,IeIt is 9.8x10-15,IpIt is 10-2,IfFor
9.6x10-4-9.6x10-6, IgIt is 9.6x10-8-9.6x10-10,IhIt is 9.6x10-12-9.6x10-14,I1It is 9.6x10-7-
9.6x10-12, wherein I1Raman scattered light intensity, analysis is contrasted and understood, analysis laser is only needed in laser reflection light in O1Afterwards
The primary event light on surface and through O1The primary event light of front surface reflection, triple reflection light and five secondary reflection light, in scattering light
In only need to analysis transmission rayleigh scattering light and secondary auspicious reflection Ruili light.
Tracking form of the actual light through dichroscope is illustrated in figure 5, according to the angular aperture of dichroscope emergent ray
u2With intercept l2Information, can limit light filter plate and convergence yoke O2Incident ray information, recycle meridian plane in light path of light
Computing formula carries out ray tracing, finally gives by collecting system O2Angular aperture afterwards and intercept information, you can know whole
The angular aperture and intercept information of probe system.
In order to obtain accurate stain plate placement location, it is necessary to analyze any incident angle light focusing position in the optical path
Put, be illustrated in figure 6 the analysis model of focusing light after whole probe system, at disperse spot diameter minimum, i.e., focal position S is
The position of top edge light and lower edge light intersection point on optical axis, l00It is intercept, rSIt is the disc of confusion radius at focus S, S1
It is top edge light and the intersection point of optical axis, corresponding angular aperture is u11, intercept be l11, S2It is the friendship of lower edge light and optical axis
Point, corresponding angular aperture is u22, intercept be l22, D is the disc of confusion at slit, and z is offset distance, and its length is equal to rs, according to
Geometrical relationship, can obtain the intercept l at focus S00With disc of confusion radius rSInformation, as long as slit length y expires as shown in Figure 6
Sufficient D-z<Y, you can think to have veiling glare into slit, it is necessary to be suppressed.By the energy balane to veiling glare at slit
Can obtain, only need to be to nothing left through lens O1The primary event light of front surface reflection and through O1The primary emission light on surface does further afterwards
Spuious Xanthophyll cycle, by laser reflection veiling glare theory analysis, through lens O1The primary event light on preceding surface, away from O1
A ghost image is formed at the 3.5072mm of surface afterwards, stain plate can be set at its ghost image, now a ghost image is in O1Afterwards
Ray diameter on surface is 0.055mm, through lens O1The primary event light on surface is from O afterwards1It is diverging after outgoing, if in O1
Surface blackens a plate afterwards, then the minimum 0.138mm of the diameter of stain plate.
The structured flowchart of the embedded OS of one embodiment of the invention is illustrated in figure 7, based on Android operations
The embedded Raman spectral signals processing system of system, realizes that quick spectroscopic acquisition treatment, friendly man-machine interaction connect
The linewidth parameters technology of mouth and intelligence；Handheld Raman spectrometer by USB, Internet or can also be wirelessly transferred and electricity
Brain carries out data exchange, receives the order from computer, network, and the Raman spectrum data for collecting is published in network, real
Existing long-range, onlineization, unmanned work, while the teleengineering support of Raman spectrum data can also be realized.
Embedded OS module mainly includes power management, CCD and drives and signal transacting, Laser Driven, insertion
The submodules such as formula processor platform, man-machine interface, software section includes operating system, built-in application program etc., can be with complete
Into data processing function, it is possible to achieve hand-held is used, completely disengage from computer and work independently.
It is illustrated in figure 8 the spectrum light path schematic diagram of grating and the integrated optical modulators of movable F-P, the dispersion mould
, using the dispersion integrated with movable F-P cavity of MEMS technology grating, the Raman diffused light at slit is by incident after collimated for block
Put down and grating, be filtered by F-P cavity again through -1 order diffraction light after grating dispersion, condenser lens is set after F-P cavity, make ripple
The light wave that length meets condition forms spectrum striped in CCD, it is ensured that while Free Spectral Range wider, can obtain again
Narrower full width at half maximum (FWHM) is obtained, spectral resolution high is obtained.
Claims (6)
1. a kind of MEMS Miniature Raman spectrometers, it is characterised in that including sampling module, control display module, MEMS dispersion moulds
Block；
The sampling module includes laser, sampling camera lens/Raman probe system；
The control display module includes Database Unit, embedded OS/network connection unit, display module；
The MEMS dispersion compensation modules include dispersion compensation module, photodetector unit；
The light that the laser sends is radiated at and Raman spectrum is excited on sample through over-sampling camera lens/Raman probe system, above-mentioned
Raman spectrum is transported to dispersion compensation module after over-sampling camera lens/Raman probe systematic collection, filtering, then by dispersion compensation module dispersion
After be transferred to photodetector unit, obtain new Raman spectrum, carried out with the data of Database Unit by by new Raman spectrum
Compare, the identity information of measured object is shown in display module；
Realize controlling and data exchange and treatment the system of whole machine instrument by the control display module, Database Unit leads to
Crossing USB interface externally carries out data exchange.
2. a kind of MEMS Miniature Raman spectrometers according to claim 1, it is characterised in that the laser uses wavelength
It is the narrow band laser of 785nm as lighting source, it follows average mark with a width of 0.2nm, spot size 2mm × 2mm, light intensity
Cloth.
3. a kind of MEMS Miniature Raman spectrometers according to claim 1, it is characterised in that the sampling camera lens/Raman
Probe system includes lens (O1), dichroscope (DSS), notch filtering light piece (NF), convergence yoke (O2), incident laser is by two
To Look mirror reflection (DSS) again by lens (O1) focus on sample, the scattering light that irradiating sample is produced is through lens (O1) collect,
And rayleigh scattering light therein is filtered through dichroscope (DSS), notch filtering light piece (NF), the Raman diffused light for obtaining passes through meeting again
Poly- system (O2), focus at slit.
4. a kind of MEMS Miniature Raman spectrometers according to claim 3, it is characterised in that the slit width is
0.05mm, length is 2mm.
5. a kind of MEMS Miniature Raman spectrometers according to claim 1, it is characterised in that size is focused on according to veiling glare
With energy size at position, exit direction, arrival slit, stain plate is provided with the sampling camera lens/Raman probe system.
6. a kind of MEMS Miniature Raman spectrometers according to claim 1, it is characterised in that the dispersion compensation module is used
The MEMS technology grating dispersion integrated with movable F-P cavity, the Raman diffused light at slit is put down and light by incidence after collimated
Grid, are filtered by F-P cavity again through -1 order diffraction light after grating dispersion, and condenser lens is set after F-P cavity, meet wavelength
The light wave of condition forms spectrum striped in CCD.
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| CN201710166631.4A CN106872442A (en) | 2017-03-20 | 2017-03-20 | A kind of MEMS Miniature Raman spectrometers |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107238570A (en) * | 2017-07-17 | 2017-10-10 | 中国科学院上海高等研究院 | Micro spectrometer, gas sensor and spectral method of detection based on the micro- galvanometers of MEMS |
| CN108133203A (en) * | 2018-01-18 | 2018-06-08 | 江苏师范大学 | A kind of Raman spectral characteristics extracting method based on rarefaction representation |
| CN109580581A (en) * | 2018-12-12 | 2019-04-05 | 哈尔滨工业大学（威海） | A kind of laser Raman spectrometer based on composite grating |
| CN109799221A (en) * | 2019-01-07 | 2019-05-24 | 北京青木子科技发展有限公司 | A kind of removable teaching Raman spectroscopy system and its control method |
| CN109975210A (en) * | 2019-04-28 | 2019-07-05 | 重庆冠雁科技有限公司 | A kind of bare engine module of handheld Raman spectrometer |
| CN111965165A (en) * | 2020-08-25 | 2020-11-20 | 南京艾龙信息科技有限公司 | Miniature Raman spectrum rice detection device and method |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107238570A (en) * | 2017-07-17 | 2017-10-10 | 中国科学院上海高等研究院 | Micro spectrometer, gas sensor and spectral method of detection based on the micro- galvanometers of MEMS |
| CN107238570B (en) * | 2017-07-17 | 2023-07-11 | 中国科学院上海高等研究院 | Micro spectrometer based on MEMS micro vibrating mirror, gas sensor and spectrum detection method |
| CN108133203A (en) * | 2018-01-18 | 2018-06-08 | 江苏师范大学 | A kind of Raman spectral characteristics extracting method based on rarefaction representation |
| CN108133203B (en) * | 2018-01-18 | 2021-09-03 | 江苏师范大学 | Raman spectrum feature extraction method based on sparse representation |
| CN109580581A (en) * | 2018-12-12 | 2019-04-05 | 哈尔滨工业大学（威海） | A kind of laser Raman spectrometer based on composite grating |
| CN109799221A (en) * | 2019-01-07 | 2019-05-24 | 北京青木子科技发展有限公司 | A kind of removable teaching Raman spectroscopy system and its control method |
| CN109975210A (en) * | 2019-04-28 | 2019-07-05 | 重庆冠雁科技有限公司 | A kind of bare engine module of handheld Raman spectrometer |
| CN111965165A (en) * | 2020-08-25 | 2020-11-20 | 南京艾龙信息科技有限公司 | Miniature Raman spectrum rice detection device and method |
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Application publication date: 20170620 |