CN109580581A - A kind of laser Raman spectrometer based on composite grating - Google Patents

A kind of laser Raman spectrometer based on composite grating Download PDF

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Publication number
CN109580581A
CN109580581A CN201811514972.7A CN201811514972A CN109580581A CN 109580581 A CN109580581 A CN 109580581A CN 201811514972 A CN201811514972 A CN 201811514972A CN 109580581 A CN109580581 A CN 109580581A
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China
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laser
chamber
composite grating
grating
raman spectrometer
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CN201811514972.7A
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任秀云
田兆硕
张延超
王玲
付石友
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Harbin Institute of Technology Weihai
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Harbin Institute of Technology Weihai
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65Raman scattering

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  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

The invention discloses a kind of laser Raman spectrometers based on composite grating, including shell, laser beam-generating section, composite grating dispersion system, area array CCD and data processing system, enclosure interior includes first chamber and second chamber, laser beam-generating section is arranged in first chamber, composite grating dispersion system and area array CCD are arranged in second chamber, in the laser irradiation to product to be measured of laser beam-generating section transmitting, scattering light on product to be measured is injected into composite grating dispersion system, then it is irradiated on area array CCD again, data processing system is for handling data.The present invention makes it possible to guarantee two difraction spectrum central wavelengths with fixed angle difference using incidence angle and the angle of diffraction to mutually stagger and immobilize by composite grating dispersion system.And photoelectric conversion is carried out using the space division multiplexing of area array CCD and multi-channel parallel treatment characteristic, splicing generates one-dimensional Raman spectrum after data processing, realizes the rapid survey of the big work high-resolution laser Raman spectroscopy of spectrum width.

Description

A kind of laser Raman spectrometer based on composite grating
Technical field
The present invention relates to laser Raman spectroscopy measuring instrument correlative technology field, especially a kind of swashing based on composite grating Light Raman spectrometer.
Background technique
Raman scattering is medium molecule to the inelastically scattered one kind of incident photon, and Raman spectrum can characterize medium molecule Vibration or rotational energy level information can be used for the effective means of identification as " molecular fingerprint ", are widely used in material, change The fields such as work, petroleum, macromolecule, biology, environmental protection, geology.High-precision of the laser Raman spectrometer for the Raman spectrum of substance Measurement, is the basis of Raman spectrum analysis technology.Typical laser Raman spectrometer construction includes laser, and entrance slit is quasi- Straight lens, dispersion system, focusing system, exit slit, photodetector and signal processing system composition.Since general Raman is believed It is number very weak, need the Optical devices of accurate complexity to measure.Current existing laser Raman spectrometer mostly use greatly grating or Prism is divided, and photomultiplier tube or single photon counter are measured as photodetector by prolonged length scanning Complete Raman spectrum figure.This kind of laser Raman spectrometer wavelength resolutions are higher, but draw Raman spectrogram need compared with For a long time, it is not able to satisfy the demand handled real-time, quickly.It there are also a kind of laser Raman spectrometer will be owned with grating or prism The wavelength expansion of dispersion simultaneously, is received the optical power of all wavelengths simultaneously with a linear array optical detector, draws spectrogram.This kind of drawing The spectrum analysis speed of graceful spectrometer is fast, can satisfy the demand of real-time quick spectrum analysis, but its general work spectrum width is relatively narrow, Wavelength resolution is lower.Because its wavelength resolution is limited by entrance slit width, and with Raman spectrometer work spectrum width at anti- Than.In order to improve wavelength resolution, entrance slit as narrow as possible can be generally used, but the light that can reduce system in this way is logical Amount, influences the sensitivity of Raman spectrometer.In the case where entrance slit width is certain, to improve the wavelength of Raman spectrometer Resolution ratio must just sacrifice its work spectrum width.
Summary of the invention
In view of this, an object of the present invention is to provide, a kind of structure is simple, operates conveniently, and can be realized faint drawing The laser Raman spectrometer based on composite grating of graceful spectral signal quickly detected.
The present invention provides a kind of laser Raman spectrometer based on composite grating, including shell, laser beam-generating section, complex light Grid dispersion system, area array CCD and data processing system, the enclosure interior include first chamber and second chamber, the laser Generating unit is arranged in the first chamber, and the composite grating dispersion system and area array CCD are arranged in the second chamber, The data processing system is connected with the laser beam-generating section and the area array CCD,
In the laser irradiation to product to be measured of the laser beam-generating section transmitting, the scattering light on the product to be measured is injected into The composite grating dispersion system, is then irradiated on the area array CCD again, and the data processing system is used to carry out data Processing, display and/or storage.
Preferably, the composite grating dispersion system include slit, collimating cylindrical mirror, composite grating, assemble cylindrical mirror and Plane mirror,
The optical signal scattered on the product to be measured is then parallel by collimating cylindrical mirror collimation by the slit The composite grating dispersion system is injected after light beam, then through being irradiated to the plane reflection after the convergence focus of cylindrical mirror On mirror, it is radiated on the area array CCD after plane mirror reflection.
Preferably, the composite grating includes upper grating and lower grating, has angle between the upper grating and lower grating α, the angle α are 8-12 °, preferably 10 °.
Preferably, the upper grating is identical as the size of the lower grating and resolution ratio.
Preferably, long wave pass filter is provided on the shell, scattering light is logical through the long wave on the product to be measured The composite grating dispersion system is injected after optical filter, the long wave pass filter is 458nm long wave pass filter piece.
Preferably, partition is provided in the shell, the enclosure interior space is separated into the first chamber by the partition Room and second chamber, the first chamber and second chamber are configured to elongated chamber.
Preferably, the rear end of the first chamber is provided with the first connecting pin, and first connecting pin is used to swash with described Light generating unit is connected with the data processing system;
The front end of the first chamber is provided with light hole, and the laser of the laser beam-generating section transmitting is penetrated through the light hole Out.
Preferably, the hull outside is provided with catoptric arrangement, and the catoptric arrangement issues the laser beam-generating section On laser reflection to the product to be measured.
Preferably, the laser beam-generating section includes laser and laser controller, and the laser controller control is described to swash Light device emits laser.
Preferably, the laser emission wavelength is 450nm, and power is the laser of 1800-2500mW.
Laser Raman spectrometer provided by the invention based on composite grating, is made it possible to by composite grating dispersion system Guarantee two difraction spectrum central wavelengths with fixed angle difference using incidence angle and the angle of diffraction to mutually stagger and immobilize.And Photoelectric conversion is carried out using the space division multiplexing of area array CCD and multi-channel parallel treatment characteristic, splicing generates one-dimensional after data processing Raman spectrum realizes the rapid survey of the big work high-resolution laser Raman spectroscopy of spectrum width.
Detailed description of the invention
By referring to the drawings to the description of the embodiment of the present invention, the above and other purposes of the present invention, feature and Advantage will be apparent from, in the accompanying drawings:
Fig. 1 shows the structural schematic diagram of the laser Raman spectrometer provided by the invention based on composite grating;
Fig. 2 shows the overlooking structure diagrams of composite grating dispersion system;
Fig. 3 shows Raman spectral wavelength ranges schematic diagram on area array CCD.
Specific embodiment
Below based on embodiment, present invention is described, but the present invention is not restricted to these embodiments.Ability Domain it is to be appreciated by one skilled in the art that provided herein attached drawing be provided to explanation purpose, and attached drawing be not necessarily by than What example was drawn.
Unless the context clearly requires otherwise, "include", "comprise" otherwise throughout the specification and claims etc. are similar Word should be construed as the meaning for including rather than exclusive or exhaustive meaning;That is, be " including but not limited to " contains Justice.
In the description of the present invention, it is to be understood that, term " first ", " second " etc. are used for description purposes only, without It can be interpreted as indication or suggestion relative importance.In addition, in the description of the present invention, unless otherwise indicated, the meaning of " multiple " It is two or more.
As shown in Figure 1, the laser Raman spectrometer provided by the invention based on composite grating includes shell 1, laser generation Portion, composite grating dispersion system 4, area array CCD (Charge Coupled Device, charge-coupled device) 5 and data processing system System 6, the shell 1 is internally provided with partition 13, and the housing cavity is separated into first chamber 11 and second by the partition 13 Chamber 12, the first chamber 11 and the second chamber 12 are preferably two elongated chambers arranged in parallel, described Laser beam-generating section is arranged in the first chamber 11, and the composite grating dispersion system 4 and the setting of area array CCD 5 are described the In two chambers 12.The data processing system 6 is connected with the laser beam-generating section and the area array CCD 5.
The laser beam-generating section includes laser 2 and laser controller 3, and the laser 2 is located at the laser controller 3 Front side, the laser controller 3 is connected with the laser 2, and controls the laser 2 by the laser controller 3 and send out Penetrate laser, it is preferable that 2 launch wavelength of laser is 450nm, and power is the laser of 1800-2500mW.Further, institute Stating laser 2 can have continuous and two kinds of working methods of pulse.It is located at the side of 11 rear end of first chamber on the shell 1 The first connecting pin 111 is provided on wall, first connecting pin 111 is connected with the laser controller 3, first connecting pin 111 are also used to be connected with the data processing system 6, control when going out light of the laser 2 by the data processing system 6 Between.Preferably, first connecting pin 111 is USB interface.As shown in Figure 1, being located at the first chamber 11 on the shell 1 Light hole 112 is provided on the side wall of front end, the laser that the laser 2 issues injects to described by the light hole 112 The outside of shell 1, catoptric arrangement 7 is provided on the shell 1, and the laser that the light hole 112 projects can be tied by the reflection Structure reflection.The catoptric arrangement includes the bracket 71 being arranged on the shell 1 and the reflection rib that is arranged on the bracket 71 Mirror 72, it is preferable that the reflecting prism 72 is right-angle reflecting prism, and laser is irradiated to be measured after the reflecting prism 72 reflection On product.
The composite grating dispersion system 4 is arranged in the front side of the area array CCD 5, and described the is located on the shell 1 Second connection end 121 is provided on the side wall of two chambers, 12 rear end, the second connection end 121 is connected with the area array CCD 5, The second connection end 121 is also used to be connected with the data processing system 6, it is preferable that the second connection end 121 is USB Interface.Long wave pass filter 8, the production to be measured are provided on the side wall of 12 front end of second chamber on the shell 1 Scattered light signal on product can be injected into the second chamber 12 by the long wave pass filter 8.The logical filter of the long wave Mating plate 8 can filter out some scattered light, for example, the long wave pass filter 8 can filter out the Mie scattering and Rayleigh scattering of 450nm Light, it is preferable that the long wave pass filter 8 is 458nm long wave pass filter piece.Light emission across the long wave pass filter 8 enters The composite grating dispersion system 4 is handled in the composite grating dispersion system 4 through superrefraction, diffraction, focusing, reflection etc. After be mapped on the area array CCD 5, then transfer data in the data processing system 6, carry out processing analysis.
As shown in Fig. 2, the composite grating dispersion system 4 includes slit 41, collimating cylindrical mirror 42, composite grating 43, meeting Poly- cylindrical mirror 44 and plane mirror 45, the light for injecting the second chamber 12 through the long wave pass filter 8 enter described narrow Seam 41, then by the collimating cylindrical mirror 42 collimation to inject 43 dispersion of composite grating after collimated light beam, then through described It assembles after cylindrical mirror 44 focuses and is irradiated on the plane mirror 45, be radiated at the face after the plane mirror 45 reflection On battle array CCD 5.
As shown in Figure 2, it is preferable that the composite grating 43 includes upper grating 431 and lower grating 432, it is preferable that on described Grating 431 and the size of lower grating 432 are identical with resolution ratio, it is preferable that having a size of 25 × 12.5 × 6mm, resolution ratio is 1800line/mm.There is angle α, the angle α is preferably 8-12 °, optimal folder between the upper grating 431 and lower grating 432 Angle α is 10 °, and the collimated light beam formed through the collimating cylindrical mirror 42 collimation is injected on described with different incident angles respectively On grating 431 and lower grating 432, since there are angles between the upper grating 431 and the lower grating 432, so that each light The dispersed light beam of grid face outgoing is sequentially increased corresponding different refractive direction according to wavelength in the horizontal direction, then injects institute again It states and assembles cylindrical mirror 44.The upper and lower part of 5 photosurface of area array CCD is finally made to form the Raman spectrum being arranged successively Image, the Raman spectral image of upper and lower part correspond to different central wavelength and wave-length coverage, as shown in Figure 3, it is preferable that institute Stating 5 pixel number of area array CCD is 1920 × 1024,4.5 μm of 4.5 μ m of Pixel Dimensions, the 5 top corresponding wavelength of area array CCD Model [λ 1, λ 2], lower part corresponding wavelength range [λ 3, λ 4].
The area array CCD 5 records the Raman spectral image.Then by data processing system 6 extracts respectively upper part with The Raman spectrogram of lower part draws the Raman spectrogram of sub-band, is then spliced into the Raman spectrogram of entire service band.It is excellent Selection of land, the data processing system 6 can be the computer or mobile phone for being mounted with exclusive data processing software, be used for Raman spectrum Processing, display and storage.
Laser Raman spectrometer provided by the invention based on composite grating, using 450nm laser as lasing fluorescence Source, it is small in size, it is high-efficient.Composite grating is set, and using its incidence angle and the angle of diffraction there is fixed angle difference to guarantee that two spread out It penetrates spectral centroid wavelength to mutually stagger and the characteristic that immobilizes, the space division multiplexing and multi-channel parallel processing in conjunction with area array CCD are special Property carry out photoelectric conversion, splicing generates one-dimensional Raman spectrum after data processing, realizes the big work high-resolution laser of spectrum width The rapid survey of Raman spectrum.And the laser Raman spectrometer provided by the invention based on composite grating has structure simple, Adjustment easy to process, at low cost, integration is good, and detectivity is high, and measuring speed is fast, and spectral resolution is high and work spectrum width is big The advantages of.
Those skilled in the art will readily recognize that above-mentioned each preferred embodiment can be free under the premise of not conflicting Ground combination, superposition.
It should be appreciated that above-mentioned embodiment is merely exemplary, and not restrictive, without departing from of the invention basic In the case where principle, those skilled in the art can be directed to the various apparent or equivalent modification or replace that above-mentioned details is made It changes, is all included in scope of the presently claimed invention.

Claims (10)

1. a kind of laser Raman spectrometer based on composite grating, which is characterized in that including shell, laser beam-generating section, complex light Grid dispersion system, area array CCD and data processing system, the enclosure interior include first chamber and second chamber, the laser Generating unit is arranged in the first chamber, and the composite grating dispersion system and area array CCD are arranged in the second chamber, The data processing system is connected with the laser beam-generating section and the area array CCD,
In the laser irradiation to product to be measured of the laser beam-generating section transmitting, the scattering light on the product to be measured is injected into described Then composite grating dispersion system is irradiated on the area array CCD again, the data processing system is used for data Reason, display and/or storage.
2. laser Raman spectrometer according to claim 1, which is characterized in that the composite grating dispersion system includes narrow Seam, assembles cylindrical mirror and plane mirror at collimating cylindrical mirror, composite grating,
The optical signal scattered on the product to be measured is then collimated light beam by collimating cylindrical mirror collimation by the slit After inject the composite grating dispersion system, then through being irradiated to the plane mirror after the convergence focus of cylindrical mirror On, it is radiated on the area array CCD after plane mirror reflection.
3. laser Raman spectrometer according to claim 2, which is characterized in that the composite grating includes upper grating under Grating, has angle α between the upper grating and lower grating, the angle α is 8-12 °, preferably 10 °.
4. laser Raman spectrometer according to claim 3, which is characterized in that the ruler of the upper grating and the lower grating It is very little identical with resolution ratio.
5. laser Raman spectrometer according to claim 1, which is characterized in that be provided with the logical optical filtering of long wave on the shell Piece, scattering light injects the composite grating dispersion system, the long wave after the long wave pass filter on the product to be measured Pass filter is 458nm long wave pass filter piece.
6. laser Raman spectrometer according to claim 1, which is characterized in that partition is provided in the shell, it is described The enclosure interior space is separated into first chamber and second chamber by partition, and the first chamber and second chamber are configured to Elongated chamber.
7. laser Raman spectrometer according to claim 6, which is characterized in that the rear end of the first chamber is provided with One connecting pin, first connecting pin with the laser beam-generating section and the data processing system for connecting;
The front end of the first chamber is provided with light hole, and the laser of the laser beam-generating section transmitting is projected through the light hole.
8. laser Raman spectrometer according to claim 7, which is characterized in that the hull outside is provided with reflection knot Structure, on the laser reflection that the catoptric arrangement issues the laser beam-generating section to the product to be measured.
9. laser Raman spectrometer according to claim 1, which is characterized in that the laser beam-generating section include laser and Laser controller, the laser controller control the laser and emit laser.
10. laser Raman spectrometer according to claim 9, which is characterized in that the laser emission wavelength is 450nm, power are the laser of 1800-2500mW.
CN201811514972.7A 2018-12-12 2018-12-12 A kind of laser Raman spectrometer based on composite grating Pending CN109580581A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111272732A (en) * 2020-03-03 2020-06-12 长春长光辰英生物科学仪器有限公司 Raman spectrometer and Raman spectrum splicing method
CN113485020A (en) * 2021-05-31 2021-10-08 上海悠睿光学有限公司 Light splitter based on transmission grating

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EP0498644B1 (en) * 1991-02-07 1995-12-13 Research Development Corporation Of Japan High sensitive multi-wavelength spectral analyzer
CN2591593Y (en) * 2002-10-17 2003-12-10 复旦大学 spectral imaging instrument utilizing multi-grating
WO2006107967A1 (en) * 2005-04-05 2006-10-12 Corning Incorporated Optical interrogation system and method for 2-d sensor arrays
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CN101915755A (en) * 2010-07-16 2010-12-15 中国海洋大学 Underwater Raman-fluorescence spectrum combined detection device
CN102147368A (en) * 2010-12-22 2011-08-10 北京理工大学 Raman optical spectrum detecting system
CN104964964A (en) * 2015-07-27 2015-10-07 哈尔滨工业大学(威海) Portable laser raman spectrometer based on prismatic decomposition
CN105675576A (en) * 2016-04-13 2016-06-15 武汉大学 Laser radar system for measuring Raman spectra of atmospheric water and fluorescence spectra of aerosols
CN106872442A (en) * 2017-03-20 2017-06-20 江苏师范大学 A kind of MEMS Miniature Raman spectrometers

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Publication number Priority date Publication date Assignee Title
EP0498644B1 (en) * 1991-02-07 1995-12-13 Research Development Corporation Of Japan High sensitive multi-wavelength spectral analyzer
CN2591593Y (en) * 2002-10-17 2003-12-10 复旦大学 spectral imaging instrument utilizing multi-grating
WO2006107967A1 (en) * 2005-04-05 2006-10-12 Corning Incorporated Optical interrogation system and method for 2-d sensor arrays
CN201464039U (en) * 2009-03-24 2010-05-12 上海谱纳光电仪器有限公司 Miniature cylindrical mirror multi-grating spectrum analysis instrument
CN101819151A (en) * 2010-04-22 2010-09-01 复旦大学 Active fast acquisition system for atmospheric optical spectrum
CN101915755A (en) * 2010-07-16 2010-12-15 中国海洋大学 Underwater Raman-fluorescence spectrum combined detection device
CN102147368A (en) * 2010-12-22 2011-08-10 北京理工大学 Raman optical spectrum detecting system
CN104964964A (en) * 2015-07-27 2015-10-07 哈尔滨工业大学(威海) Portable laser raman spectrometer based on prismatic decomposition
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111272732A (en) * 2020-03-03 2020-06-12 长春长光辰英生物科学仪器有限公司 Raman spectrometer and Raman spectrum splicing method
CN113485020A (en) * 2021-05-31 2021-10-08 上海悠睿光学有限公司 Light splitter based on transmission grating

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