CN103196889A - Portable raman spectrometer based on spectral analysis of micro electro mechanical system - Google Patents
Portable raman spectrometer based on spectral analysis of micro electro mechanical system Download PDFInfo
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Abstract
The invention provides a portable raman spectrometer based on spectral analysis of a micro electro mechanical system. On the basis of the micro electro mechanical system, the portable raman spectrometer comprises a laser light source, a raman probe head and a spectrum detection system of a spectrograph, wherein the laser light source comprises a semiconductor laser which is used for generating lasers, the power of the generated lasers is not less than 200 milliwatts, and the line width of the generated lasers is not greater than 0.2 nanometers; the raman probe head comprises a laser outputting optical path and a raman scattered light collecting optical path which does not comprise a light filter for filtering rayleigh scattered light; and the spectrograph comprises the spectrum detection system which sequentially consists of a focusing lens I, a digital micromirror device (DMD) module I, a collimating lens, a chromatic dispersion optical grid, a focusing lens II, a digital micromirror device (DMD) module II, a de-chromatic dispersion optical grid, a focusing lens III, a single-point detector and a signal processor. The portable raman spectrometer has the advantages of being capable of keeping the resolution ratio of spectrum detection and improving the sensitivity of spectrum detection, being suitable for detection on weak signals such as raman signals, and the like.
Description
Technical field
The invention belongs to the spectrometric instrument technical field, especially relate to a kind of Portable Raman optical spectrum instrument based on MEMS (micro electro mechanical system) (MEMS) spectral analysis.Portable Raman optical spectrum instrument based on spectral analysis technique.
Background technology
The Raman spectrum detection technique is to use laser to obtain the spectral information of material molecule aspect, by the composition of database comparative analysis test substance and the technology of concentration, has powerful ability at harmless Physical Property Analysis and discriminating.Because its accurate detection performance and need not specimen preparation, be suitable for on-the-spot the use, this technology has been widely used in fields such as food security, drug inspection, drugs detecting, judicial expertise, gemstone testing and environment measuring at present.In February, 2009, China Inst. of Quarantine Inspection Sciences announces that this institute adopts Raman spectroscopy, can quantitatively detect to be higher than the 0.5ppm melamine in the liquid milk, and rate of accuracy reached 100%, each sample detection only needs half a minute.Along with the raising of application demand, the Portable Raman optical spectrum instrument is more and more paid attention to for people.The Portable Raman optical spectrum instrument is pushed Raman technology to scene from the laboratory and is used on the spot.It need not specimen preparation, and the material that carries out in real time at the scene that can be easy and convenient is identified, has saved the detection cost greatly.External producer such as Thermo, Ocean Optics, B﹠amp; W TEK etc. has released many moneys Portable Raman optical spectrum product, is widely used in the aspects such as raw material detection in pharmaceutical factory.But the price of these products also is difficult to promote on the market generally more than 300,000 yuan at present at home.
Raman spectrometer is that the Raman diffused light that sample produces under the laser irradiation is detected, and the intensity of Raman signal is generally 10 of exciting light
-6About, belonging to feeble signal and survey, this just proposes very high requirement to the performance of spectrometer.It is general in the present Portable Raman optical spectrum instrument that what use is the CCD(charge-coupled image sensor of refrigeration profile battle array back-illuminated type) Raman diffused light that comes test sample to send, to obtain the Raman energy spectrum of high s/n ratio.But the cost of the ccd detector of this refrigeration mode planar array type is higher, account for whole Raman spectrometer cost 60%, this also is the reason that present Portable Raman optical spectrum instrument holds at high price.On the other hand, present Raman spectrometer has adopted entrance slit mostly.Raman diffused light is when entering the spectral detection system, and most of light is stopped to have only fraction luminous energy to enter the detection light path by slit by slit.The effective luminous flux that the existence of entrance slit reduces greatly is exactly that Detection of weak is particularly unfavorable to this of Raman diffused light, has increased the Raman signal detection difficulty.
MEMS (micro electro mechanical system) (Micro-Electro-MechanicalSystems, abbreviation MEMS) technology is the product that multiple Micrometer-Nanometer Processing Technology and modern information technologies combine, it is a field that is developed rapidly in recent years and use, its in enormous quantities, low-cost, small size, low-power consumption, high-sensitive characteristics make the MEMS technology by in the extensive multiple mancarried electronic aid, also are the developing direction of present spectrometer microminiaturization.Ying Te refreshing this people such as He Ye in Nanjing propose a kind of micro spectrometer based on the MEMS technology (patent publication No. CN101021437A), after light enters spectrometer by the joints of optical fibre, entrance slit, behind scanning micro-mirror reflection, grating beam splitting, enter in the detector by slit behind the light line focus focusing mirror of specific wavelength.People such as the Wen Zhiyu of University Of Chongqing propose the food safety detection instrument (patent publication No. CN101275908A) based on the MEMS technology, and the light that light source sends enters the detection light path by entrance slit behind sample cell.Light exposes to spatial light modulator able to programme by the dispersion element light splitting, and the light after the modulated device modulation enters the single-point detector through imaging len.Still use entrance slit in these detection light paths based on the spectrometer of MEMS technology, reduced luminous flux and sensitivity, be difficult to use in the such Detection of Weak Signals of Raman spectrum.
At these problems, we propose a kind of Portable Raman optical spectrum instrument based on the MEMS spectral analysis technique, used two DMD(digital micro-mirrors in its spectral detection system) the MEMS device: adopted DMD to substitute the entrance slit of conventional spectrometers in input path, when keeping the Raman spectrum detection resolution, improved detection sensitivity; Adopt DMD as wavelength selector spare at emitting light path, can use the single-point detector to replace the ccd detector of refrigeration mode planar array type, greatly reduce cost of products, have tangible technical advantage.
Summary of the invention
Technical matters to be solved by this invention provides a kind of Portable Raman optical spectrum instrument based on the MEMS (micro electro mechanical system) spectral analysis, by in the spectral detection system, using two digital micromirror elements (DMD), improve Raman detection sensitivity, and use the single-point detector, to reduce cost of products.
For solving the problems of the technologies described above, the invention provides following technical solution is: a kind of Portable Raman optical spectrum instrument based on the MEMS (micro electro mechanical system) spectral analysis, based on MEMS (micro electro mechanical system), comprise: a LASER Light Source, the spectral detection system of a Raman probe and a spectrometer, the laser beam of being sent by laser instrument is radiated on the sample by the Raman probe, inspires the Raman diffused light of sample, the Raman probe is collected the part Raman diffused light and is transferred to the spectral detection system, wherein:
Described LASER Light Source comprises a semiconductor laser, produces to be not less than the power of 200 milliwatts and the laser that live width is not more than the narrow linewidth of 0.2 nanometer;
Described Raman probe comprises the output laser optical path and collects these two light paths of Raman diffused light light path, and the light path of wherein collecting Raman diffused light does not comprise the optical filter that filters Rayleigh scattering light;
Described spectrometer comprises: in regular turn by condenser lens one, digital micromirror elements (DMD) module one, collimation lens, the chromatic dispersion grating, condenser lens two, digital micromirror elements (DMD) module two, colour killing astigmatism grid, condenser lens three, the spectral detection system that single-point detector and signal processor constitute, wherein: described digital micromirror elements (DMD) module comprises digital micro-mirror array device and micro mirror control circuit, described digital micro-mirror array device is made by MEMS (micro electro mechanical system) (MEMS) technology, and control the on off state of each micro mirror unit by the micro mirror control circuit, adopt Adama (Hadamard) mapping algorithm that the light that shines on the digital micro-mirror array is encoded; Described single-point detector is the highly sensitive single-point detector of photomultiplier; Described signal processor links to each other with the micro mirror control circuit, and the signal that the single-point detector is received carries out the decoding of Adama (Hadamard) mapping algorithm, obtains the Raman spectral information of sample.
On the such scheme basis, micro mirror unit in the described digital micro-mirror array device is connected with semi-girder by plane mirror, the micro mirror control circuit is by changing control electrode voltage or electric current, the adjusting semi-girder rotates, semi-girder drives the deflection that plane mirror produces certain angle, and the pivot angle amplitude of described micro mirror unit is
, when using the Hadamard mapping algorithm that light is encoded, deflection+10
oCorresponding " 1 ", optical channel is " opening ", the light of this passage of process can enter subsequent optical path; Deflection-10
oCorresponding " 0 ", optical channel is " pass ", the light of this passage of process can not enter subsequent optical path.
On the such scheme basis, described micro mirror control circuit, based on MEMS (micro electro mechanical system), comprise photodetector, digital micromirror elements (DMD) array, it is characterized in that: incident light is modulated spectrum from digital micromirror elements (DMD) array by the Adama coding, light modulated enters photodetector and converts electric signal to, carries out analog to digital conversion through pre-amplification circuit, analog to digital converter (ADC) modular converter, produces digital signal; This digital signal is read by field programmable gate array (FPGA) control module, after the built-in demodulating algorithm of field programmable gate array (FPGA) control module FPGA calculates in real time, by the modulation and demodulation of field programmable gate array (FPGA) control module by external trigger, by USB (universal serial bus) (USB) transport module, be sent to host computer, wherein, built-inly in described field programmable gate array (FPGA) control module coordinate the logic that each module is worked simultaneously, and the built-in module that is used for the Hadamard transform algorithm of modulation and demodulation spectrum.
The invention provides the using method at above-mentioned Portable Raman optical spectrum instrument based on the MEMS (micro electro mechanical system) spectral analysis, may further comprise the steps:
The first, the laser beam by laser instrument generation high power, narrow linewidth is radiated on the sample by the Raman probe, inspires the Raman diffused light of sample; The Raman probe is collected the part Raman diffused light and is transferred in the spectral detection system;
Second, Raman diffused light converges on digital micromirror elements (DMD) module one by condenser lens one, controlled the on off state of each micro mirror unit by the micro mirror control circuit, adopt N rank Adamas (Hadamard) mapping algorithm that the light that shines on digital micromirror elements (DMD) module one is encoded, shine on the chromatic dispersion grating behind the collimation lens collimation by the light behind digital micromirror elements (DMD) module one coding, the chromatic dispersion grating is decomposed into polychromatic light in the monochromatic light of different wave length, converge on the micro mirror unit of diverse location of DMD digital micromirror elements (DMD) module two through condenser lens two again, the control circuit of digital micromirror elements (DMD) module two further adopts Adama (Hadamard) mapping algorithm that light is carried out secondary coding, the micro mirror unit of closed Rayleigh scattering light focal position during coding is to remove the Rayleigh line in the signal; Behind the light process colour killing astigmatism grid and condenser lens three behind the coding, forming polychromatic light assembles to the single-point detector, the single-point detector transfers the light signal that receives electric signal to and transfers to signal processor, signal processor carries out the decoding of Adama (Hadamard) mapping algorithm to it, obtain the spectral information of different wavelengths of light, thereby obtain the original Raman spectrum of sample.
The present invention can reach following technique effect:
1. the Portable Raman optical spectrum instrument based on the MEMS spectral analysis technique adopts DMD to substitute entrance slit, and its resolution is determined by the size of micro mirror unit.The DMD micro mirror unit that we adopt is of a size of 54 microns, and the resolution of its spectral detection is equivalent to adopt the resolution of conventional spectrometers of 54 microns entrance slit; And its luminous flux reaches 50% of incident light.When adopting N rank Hadamard mapping algorithm that light is encoded, its luminous flux be adopt 54 microns entrance slits the conventional spectrometers luminous flux N/2 doubly.When keeping spectral detection resolution, the sensitivity that improves spectral detection greatly is highly suitable for this class Detection of weak of Raman like this;
2. owing to adopted DMD and Hadamard mapping algorithm that light signal is encoded, we can adopt the polychromatic light behind the single-point detector received code, and the decoding by signal processor obtains the different wave length spectral information again.We can use the single-point detector to replace the ccd detector of the refrigeration mode planar array type in traditional Raman spectrometer like this, greatly reduce cost of products, also avoided planar array type CCD simultaneously because the adverse effect that the CCD response unevenness that the manufacture craft restriction causes is brought spectral detection.Use the single-point detector of photo-multiplier tube type to realize opto-electronic conversion, the CCD device has higher detection sensitivity relatively, is applicable to this class Detection of weak of Raman;
Adopt N rank Hadamard mapping algorithm that light is carried out Code And Decode.The Hadamard mapping algorithm is the application of weighing design in optics in the statistics, and " 0 " of its coding, one state realize by the different deflection angles of DMD minute surface.N rank Hadamard mapping algorithm obtains N coded signal after light is encoded, and coded signal of the each measurement of single-point detector after N measurement, is decoded N coded signal by signal processor, reduces and obtains the different wave length spectral information.In conventional single channel was measured, detecting device only detected the signal intensity of a resolution element in each time interval, and Hadamard conversion multi-channel detection technology can detect the total intensity of composite signal in a plurality of resolution elements at one time simultaneously.Under identical experiment condition, after the Hadamard conversion of N rank, signal to noise ratio (S/N ratio) can improve
Doubly.The Hadamard mapping algorithm effectively constrains background and undesired signal by light is carried out Code And Decode, is specially adapted to the processing of Raman feeble signal;
3. in the multi channel signals processing procedure, by closing the micro mirror unit of Rayleigh scattering light converged position, Rayleigh scattering light is carried out physics stop, can remove the Rayleigh scattering light in the signal effectively.The tradition Raman spectrometer adopts optical filter filtering Rayleigh scattering light more, and this tends to reduce the frequency range of detectable Raman spectrum, can cause to a certain degree decay to Raman signal simultaneously.The MEMS spectral analysis technique that we adopt then can be avoided these shortcomings;
4. use DMD to realize the Hadamard mapping algorithm of light is encoded.DMD digital micro-mirror array is the MEMS device with the parallel reflective mirror that can rock around a stationary shaft (semi-girder), by changing the deflection angle of voltage or Current Control level crossing.Present German fraunhofer research institute utilizes the DMD minute surface of piezoelectric development to be of a size of
3mm about vibration frequency 200Hz, can realize
The pivot angle amplitude; Domestic University Of Chongqing develops electromagnetic drive type DMD in the micro-system center, and about vibration frequency 450Hz, minute surface is of a size of 5mm
6mm.These DMD have reached the practicability requirement.By the deflection angle of each micro mirror unit of DMD control circuit control DMD, realize shining the Hadamard mapping algorithm coding of DMD glazing.This class of DMD MEMS device cost is low, can produce in batches, and response speed is fast, the switch efficiency height, and volume is little, and is low in energy consumption, is convenient to integrated processing, is applicable to designing and developing of microminiaturized spectrometer.
Description of drawings
Fig. 1 is the structural representation of the Portable Raman optical spectrum instrument based on the MEMS spectral analysis technique provided by the invention;
Fig. 2 is the DMD micro-mirror structure synoptic diagram that uses among the present invention;
Fig. 3 is the one dimension Hadamard mapping algorithm coding templet synoptic diagram that adopts among the present invention;
Fig. 4 is the two-dimentional Hadamard mapping algorithm coding templet synoptic diagram that adopts among the present invention;
Fig. 5 micro mirror control circuit of the present invention theory diagram;
Description of reference numerals among the figure:
1---laser instrument; 2---the Raman probe; 3---sample;
4---the spectral detection system; 5---condenser lens one; 6---DMD module one;
7---collimation lens; 8---the chromatic dispersion grating; 9---condenser lens two;
10---DMD module two; 11---colour killing astigmatism grid; 12---condenser lens three;
13---the single-point detector; 14---signal processor; 15---the control circuit of DMD;
16---plane mirror; 17---semi-girder; 18---the DMD control electrode.
Embodiment
As shown in Figure 1, a kind of Portable Raman optical spectrum instrument based on the MEMS (micro electro mechanical system) spectral analysis, based on the MEMS spectral analysis technique, comprise: a LASER Light Source, the spectral detection system 4 of a Raman probe and a spectrometer, the laser beam of being sent by laser instrument 1 is radiated on the sample 3 by Raman probe 2, inspires the Raman diffused light of sample 3, Raman probe 2 is collected the part Raman diffused light and is transferred to spectral detection system 4, wherein:
Described LASER Light Source comprises a semiconductor laser 1, produces to be not less than the power of 200 milliwatts and the laser that live width is not more than the narrow linewidth of 0.2 nanometer;
Described Raman probe 2 comprises the output laser optical path and collects these two light paths of Raman diffused light light path, and the light path of wherein collecting Raman diffused light does not comprise the optical filter that filters Rayleigh scattering light;
Described spectral detection system 4 is in regular turn by condenser lens 1, DMD module 1, collimation lens 7, chromatic dispersion grating 8, condenser lens 29, DMD module 2 10, colour killing astigmatism grid 11, condenser lens 3 12, the spectral detection system 4 that single-point detector 13 and signal processor 14 constitute, wherein: described DMD module comprises digital micro-mirror array device and micro mirror control circuit, described digital micro-mirror array device is made by MEMS technology, and control the on off state of each micro mirror unit by the micro mirror control circuit, adopt Adama (Hadamard) mapping algorithm that the light that shines on the digital micro-mirror array is encoded; Described single-point detector is the highly sensitive single-point detector of photomultiplier; Described signal processor 14 links to each other with the micro mirror control circuit, and the signal that the single-point detector is received carries out the decoding of Adama (Hadamard) mapping algorithm, obtains the Raman spectral information of sample 3.
The present invention is based on the Portable Raman optical spectrum instrument of MEMS spectral analysis technique, be used for the raman scattering spectrum of measurement of species.A reference example of the present invention as shown in Figure 1.The high power that is sent by laser instrument 1, the laser beam of narrow linewidth are radiated on the sample 3 by Raman probe 2, inspire the Raman diffused light of sample 3.Raman probe 2 is collected the part Raman diffused light and is transferred to spectral detection system 4.The light path of the collection Raman diffused light of tradition Raman probe generally can have a long logical cutoff filter, to filter Rayleigh scattering light.But this optical filter also can cause to a certain degree decay to Raman diffused light, and can reduce the frequency range of detectable Raman spectrum.Do not use such optical filter in the Raman probe of the Portable Raman optical spectrum instrument that we propose, but in the DMD of subsequent optical path cataloged procedure, Rayleigh scattering light is carried out the physics obstruction, thereby avoided using the shortcoming of optical filter.
In spectral detection system 4, Raman diffused light is focused on the DMD 1 by condenser lens 5, the on off state of control circuit 15 each micro mirror unit of control DMD of DMD one adopts one dimension or two-dimentional Hadamard mapping algorithm (shown in Fig. 3,4) that the light that shines on the DMD one is encoded.Conventional spectrometers is owing to adopt entrance slit, and most of incident light is stopped to have only fraction luminous energy to enter subsequent optical path by slit by slit, and this reduces the service efficiency to light greatly, reduces detection sensitivity, and it is particularly unfavorable that this class low light level of Raman is detected.We carry out the coding of Hadamard mapping algorithm by the incident light of DMD, and its luminous flux can reach 50% of incident light, to the service efficiency of the light situation much larger than slit, have improved the sensitivity that Raman signal is surveyed.Spectral resolution is determined by DMD micro mirror unit size.We select the DMD device of 54 microns micro mirror unit, can reach and the spectrometer identical spectra resolution of using 54 microns slits.
Shine on the chromatic dispersion grating 8 behind collimation lens 7 collimations by the light behind DMD one coding.Chromatic dispersion grating 8 is decomposed into polychromatic light in the monochromatic light of different wave length.The monochromatic light of different wave length converges to through condenser lens 9 on the micro mirror unit of diverse location of DMD 2 10.The control circuit 15 of DMD two further adopts one dimension Hadamard mapping algorithm that light is carried out secondary coding.Note the micro mirror unit of closed Rayleigh scattering light focal position during coding, stop Rayleigh scattering light to enter subsequent optical path, thereby removed the Rayleigh line in the spectral signal effectively.
Behind the process of the light behind DMD secondary coding colour killing astigmatism grid 11 and condenser lens 12, the monochromatic light of different wave length is reassembled into polychromatic light, and assembles to single-point detector 13.Single-point detector 13 transfers the polychromatic light signal that receives electric signal to and transfers to signal processor 14.Signal processor 14 obtains twice coded message to light from DMD control circuit 15, carries out the decoding of Hadamard mapping algorithm to the received signal and handles, and obtains the spectral information of different wavelengths of light, thereby obtains the original Raman spectrum of sample.
The micro mirror unit basic structure of DMD micro mirror array as shown in Figure 2.Plane mirror 16 is connected with semi-girder 17, and the DMD control circuit is regulated semi-girder 17 and rotated by changing voltage or the electric current of control electrode 18, and semi-girder 17 drives the deflection that plane mirror produces certain angle.The DMD micro mirror unit that we adopt can produce
The pivot angle amplitude.When using the Hadamard mapping algorithm that light is encoded, deflection+10
oCorresponding " 1 ", namely this optical channel is " opening ", the light of this passage of process can enter subsequent optical path; Deflection-10
oCorresponding " 0 ", namely this optical channel is " pass ", the light of this passage of process can not enter subsequent optical path.The on off state of each micro mirror unit on the control circuit of the DMD control micro mirror array is encoded in the template of Hadamard mapping algorithm on the light that shines the DMD micro mirror array.
Fig. 3 illustrates one dimension Hadamard mapping algorithm coding templet synoptic diagram, and Fig. 4 illustrates two-dimentional Hadamard mapping algorithm coding templet synoptic diagram.Wherein black picture element is represented " 0 ", and white pixel is represented " 1 ".
Claims (4)
1. Portable Raman optical spectrum instrument based on the MEMS (micro electro mechanical system) spectral analysis, based on MEMS (micro electro mechanical system), comprise: a LASER Light Source, the spectral detection system (4) of a Raman probe and a spectrometer, the laser beam of being sent by laser instrument (1) is radiated on the sample (3) by Raman probe (2), inspire the Raman diffused light of sample (3), Raman probe (2) is collected the part Raman diffused light and is transferred to spectral detection system (4), it is characterized in that:
Described LASER Light Source comprises a semiconductor laser (1), produces to be not less than the power of 200 milliwatts and the laser that live width is not more than the narrow linewidth of 0.2 nanometer;
Described Raman probe (2) comprises the output laser optical path and collects these two light paths of Raman diffused light light path, and the light path of wherein collecting Raman diffused light does not comprise the optical filter that filters Rayleigh scattering light;
Described spectrometer comprises: in regular turn by condenser lens one (5), digital micromirror elements (DMD) module one (6), collimation lens (7), chromatic dispersion grating (8), condenser lens two (9), digital micromirror elements (DMD) module two (10), colour killing astigmatism grid (11), condenser lens three (12), the spectral detection system (4) that single-point detector (13) and signal processor (14) constitute, wherein: described digital micromirror elements (DMD) module comprises digital micro-mirror array device and micro mirror control circuit, described digital micro-mirror array device is made by MEMS (micro electro mechanical system) (MEMS) technology, and control the on off state of each micro mirror unit by the micro mirror control circuit, adopt Adama (Hadamard) mapping algorithm that the light that shines on the digital micro-mirror array is encoded; Described single-point detector is the highly sensitive single-point detector of photomultiplier; Described signal processor (14) links to each other with the micro mirror control circuit, and the signal that the single-point detector is received carries out the decoding of Adama (Hadamard) mapping algorithm, obtains the Raman spectral information of sample (3).
2. the Portable Raman optical spectrum instrument based on the MEMS (micro electro mechanical system) spectral analysis according to claim 1, it is characterized in that: the micro mirror unit in the described digital micro-mirror array device is connected with semi-girder (17) by plane mirror (16), the micro mirror control circuit is by changing voltage or the electric current of control electrode (18), regulating semi-girder (17) rotates, semi-girder (17) drives the deflection that plane mirror produces certain angle, and the pivot angle amplitude of described micro mirror unit is
, when using the Hadamard mapping algorithm that light is encoded, deflection+10
oCorresponding " 1 ", optical channel is " opening ", the light of this passage of process can enter subsequent optical path; Deflection-10
oCorresponding " 0 ", optical channel is " pass ", the light of this passage of process can not enter subsequent optical path.
3. the Portable Raman optical spectrum instrument based on the MEMS (micro electro mechanical system) spectral analysis according to claim 1, it is characterized in that: described micro mirror control circuit, based on MEMS (micro electro mechanical system), comprise photodetector, digital micromirror elements (DMD) array, it is characterized in that: incident light is modulated spectrum from digital micromirror elements (DMD) array by the Adama coding, light modulated enters photodetector and converts electric signal to, carry out analog to digital conversion through pre-amplification circuit, analog to digital converter (ADC) modular converter, produce digital signal; This digital signal is read by field programmable gate array (FPGA) control module, after the built-in demodulating algorithm of field programmable gate array (FPGA) control module FPGA calculates in real time, by the modulation and demodulation of field programmable gate array (FPGA) control module by external trigger, by USB (universal serial bus) (USB) transport module, be sent to host computer, wherein, built-inly in described field programmable gate array (FPGA) control module coordinate the logic that each module is worked simultaneously, and the built-in module that is used for the Hadamard transform algorithm of modulation and demodulation spectrum.
4. according to the using method of the described Portable Raman optical spectrum instrument based on the MEMS (micro electro mechanical system) spectral analysis of one of claim 1 to 3, may further comprise the steps:
The first, the laser beam by laser instrument (1) generation high power, narrow linewidth is radiated on the sample (3) by Raman probe (2), inspires the Raman diffused light of sample (3); Raman probe (2) is collected the part Raman diffused light and is transferred in the spectral detection system (4);
Second, Raman diffused light converges on digital micromirror elements (DMD) module one (6) by condenser lens one (5), controlled the on off state of each micro mirror unit by the micro mirror control circuit, adopt N rank Adamas (Hadamard) mapping algorithm that the light that shines on digital micromirror elements (DMD) module one (6) is encoded, shine on the chromatic dispersion grating (8) behind collimation lens (7) collimation by the light behind digital micromirror elements (DMD) module one (6) coding, chromatic dispersion grating (8) is decomposed into polychromatic light in the monochromatic light of different wave length, passing through condenser lens two (9) again converges on the micro mirror unit of diverse location of DMD digital micromirror elements (DMD) module two (10), the control circuit of digital micromirror elements (DMD) module two further adopts Adama (Hadamard) mapping algorithm that light is carried out secondary coding, the micro mirror unit of closed Rayleigh scattering light focal position during coding is to remove the Rayleigh line in the signal; Behind the light process colour killing astigmatism grid (11) and condenser lens three (12) behind the coding, forming polychromatic light assembles to single-point detector (13), single-point detector (13) transfers the light signal that receives to electric signal and transfers to signal processor (14), signal processor (14) carries out the decoding of Adama (Hadamard) mapping algorithm to it, obtain the spectral information of different wavelengths of light, thereby obtain the original Raman spectrum of sample.
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