CN207020083U - A kind of MEMS Miniature Raman spectrometers - Google Patents
A kind of MEMS Miniature Raman spectrometers Download PDFInfo
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- CN207020083U CN207020083U CN201720271500.8U CN201720271500U CN207020083U CN 207020083 U CN207020083 U CN 207020083U CN 201720271500 U CN201720271500 U CN 201720271500U CN 207020083 U CN207020083 U CN 207020083U
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- 238000001069 Raman spectroscopy Methods 0.000 title claims abstract description 44
- 239000006185 dispersion Substances 0.000 claims abstract description 31
- 238000005070 sampling Methods 0.000 claims abstract description 20
- 230000004313 glare Effects 0.000 claims abstract description 15
- 238000005516 engineering process Methods 0.000 claims abstract description 10
- 239000000523 sample Substances 0.000 claims description 31
- 238000001237 Raman spectrum Methods 0.000 claims description 18
- TVZRAEYQIKYCPH-UHFFFAOYSA-N 3-(trimethylsilyl)propane-1-sulfonic acid Chemical compound C[Si](C)(C)CCCS(O)(=O)=O TVZRAEYQIKYCPH-UHFFFAOYSA-N 0.000 claims description 9
- 238000001914 filtration Methods 0.000 claims description 9
- 238000001228 spectrum Methods 0.000 claims description 6
- 230000009897 systematic effect Effects 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 239000004744 fabric Substances 0.000 claims 1
- 230000003595 spectral effect Effects 0.000 abstract description 9
- 238000005286 illumination Methods 0.000 abstract description 4
- 230000010354 integration Effects 0.000 abstract description 3
- 230000001629 suppression Effects 0.000 abstract description 3
- 230000003287 optical effect Effects 0.000 description 9
- 238000004458 analytical method Methods 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- KBPHJBAIARWVSC-RGZFRNHPSA-N lutein Chemical compound C([C@H](O)CC=1C)C(C)(C)C=1\C=C\C(\C)=C\C=C\C(\C)=C\C=C\C=C(/C)\C=C\C=C(/C)\C=C\[C@H]1C(C)=C[C@H](O)CC1(C)C KBPHJBAIARWVSC-RGZFRNHPSA-N 0.000 description 1
- 229960005375 lutein Drugs 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- KBPHJBAIARWVSC-XQIHNALSSA-N trans-lutein Natural products CC(=C/C=C/C=C(C)/C=C/C=C(C)/C=C/C1=C(C)CC(O)CC1(C)C)C=CC=C(/C)C=CC2C(=CC(O)CC2(C)C)C KBPHJBAIARWVSC-XQIHNALSSA-N 0.000 description 1
- FJHBOVDFOQMZRV-XQIHNALSSA-N xanthophyll Natural products CC(=C/C=C/C=C(C)/C=C/C=C(C)/C=C/C1=C(C)CC(O)CC1(C)C)C=CC=C(/C)C=CC2C=C(C)C(O)CC2(C)C FJHBOVDFOQMZRV-XQIHNALSSA-N 0.000 description 1
- 235000008210 xanthophylls Nutrition 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0262—Constructional arrangements for removing stray light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0264—Electrical interface; User interface
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0272—Handheld
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
- G01J3/1804—Plane gratings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/02—Mechanical
- G01N2201/022—Casings
- G01N2201/0221—Portable; cableless; compact; hand-held
Abstract
The utility model discloses a kind of MEMS Miniature Raman spectrometers, including sampling module, control display module, MEMS dispersion compensation modules, the degree of integration of modules of the present utility model is higher, easily reduce equipment volume, Handheld spectrometer can be made, and the utility model can veiling glare carries out strict suppression caused by light path altogether to the lens of laser illumination system and Raman diffused light, the utility model completes data processing function using embedded OS, it can realize that hand-held uses, completely disengage computer and work independently, the utility model uses the dispersion integrated using MEMS technology grating with movable F P chambers, it can ensure while wider Free Spectral Range, and can enough obtains narrower full width at half maximum (FWHM), obtain high spectral resolution.
Description
Technical field
A kind of optical detecting instrument field is the utility model is related to, more particularly to a kind of MEMS Miniature Raman spectrometers.
Background technology
Raman spectrum reflects the vibration performance of atom in molecular structure, is referred to as the Fingerprint of molecule.Raman detection
Technology has nondestructive measurement, detection speed is fast, sample preparation is simple, achievable as a kind of impayable, strong analysis means
The advantages that Site Detection, it is expected in the production and life applied to reality.But because the intensity of Raman scattering is very weak, its is strong
Degree is 10-6~10-3 times of Rayleigh scattering luminous intensity, and therefore, the structure of Raman spectrometer is typically complex, and price is held high
Expensive, million RMB easily, these hinder application of the Raman spectrum in actually detected, the miniaturization of Raman spectroscopy instrument and
It will be following developing direction to simplify.
And currently used for the Miniature Raman spectrometer of live Emergent detection, to ensure the compactedness of system, the laser of sample
The lens of illuminator and Raman diffused light are generally total to light path, more in light collecting lens so as to be inevitably generated illumination light
Secondary reflection, the veiling glare formed beyond Rayleigh scattering light, but the detection of Raman spectrum belongs to Testing of Feeble Signals, it is necessary to system
In veiling glare strictly suppress, existing Portable Raman spectrometer typically completes data processing using portable computer in addition
Function, computer autonomous working can not be departed from, and existing spectrometer is due to the intrinsic resolution ratio of grating dispersion technology and focal length
Between contradiction, can not ensure that and can enough obtains narrower full width at half maximum (FWHM) while wider Free Spectral Range.
Utility model content
To solve the above problems, the utility model provides a kind of MEMS Miniature Raman spectrometers, it is of the present utility model each
The degree of integration of module is higher, it is easier to reduces equipment volume, can make Handheld spectrometer, and the utility model can be with
To the lens of laser illumination system and Raman diffused light, veiling glare carries out strict suppression caused by light path altogether, and the utility model is adopted
Data processing function is completed with embedded OS, it is possible to achieve hand-held uses, and completely disengages computer and works independently, this
Utility model uses the dispersion integrated using MEMS technology grating with movable F-P cavity, it is ensured that in wider free spectrum model
While enclosing, and can enough obtains narrower full width at half maximum (FWHM), obtains high spectral resolution.
To achieve the above object, the utility model uses following technological means：
The utility model provides a kind of MEMS Miniature Raman spectrometers, including sampling module, control display module, MEMS colors
Dissipate module；
The sampling module includes laser, sampling camera lens/Raman probe system；
The control display module includes Database Unit, embedded OS/network connection unit, display module；
The MEMS dispersion compensation modules include dispersion compensation module, photodetector unit；
The light that the laser is sent is radiated on sample and excites Raman spectrum through over-sampling camera lens/Raman probe system,
Above-mentioned Raman spectrum is transported to dispersion compensation module after over-sampling camera lens/Raman probe systematic collection, filtering, then passes through dispersion compensation module
Photodetector unit is transferred to after dispersion, obtains new Raman spectrum, by by the data of new Raman spectrum and Database Unit
It is compared, the identity information of measured object is shown in display module；
System control and data exchange and processing to complete machine instrument, database list are realized by the control display module
Member externally carries out data exchange by USB interface.
Further, it is 785nm narrow band laser as lighting source that the laser, which uses wavelength, and it is with a width of
0.2nm, spot size 2mm × 2mm, light intensity, which follows, to be evenly distributed.
Further, the sampling camera lens/Raman probe system includes lens (O1), dichroscope (DSS), notch filtering light
Piece (NF), convergence yoke (O2), incident laser passes through lens (O again by dichroscope reflection (DSS)1) focus on sample, shine
Scattering light caused by sample is penetrated through lens (O1) collect, and filter out through dichroscope (DSS), notch filtering light piece (NF) therein auspicious
Beautiful scattering light, obtained Raman diffused light pass through convergence yoke (O again2), focus at slit.
Further, the slit width is 0.05mm, length 2mm.
Further, size and location, exit direction focused on according to veiling glare, reach energy size at slit, it is described to adopt
Stain plate is provided with sample camera lens/Raman probe system.
Further, the dispersion that the dispersion compensation module is integrated using MEMS technology grating and movable F-P cavity, the drawing at slit
Graceful scattering light by incident flat and grating after collimated, by F-P cavity filtered again by -1 order diffraction light after grating dispersion
Ripple, condenser lens is set after F-P cavity, wavelength is met that the light wave of condition forms spectrum striped in CCD.
The beneficial effects of the utility model：
The degree of integration of modules of the present utility model is higher, it is easier to reduces equipment volume, can make hand-held
Spectrometer, and the utility model can veiling glare caused by light path enters altogether to the lens of laser illumination system and Raman diffused light
The strict suppression of row, the utility model complete data processing function using embedded OS, it is possible to achieve and hand-held uses,
Completely disengage computer and work independently, the utility model uses the dispersion integrated using MEMS technology grating with movable F-P cavity, can
To ensure that and can enough obtains narrower full width at half maximum (FWHM) while wider Free Spectral Range, high spectral resolution is obtained.
Brief description of the drawings
Fig. 1 is the module frame chart schematic diagram of the utility model one embodiment；
Fig. 2 is the probe system schematic diagram of the utility model one embodiment；
Fig. 3 is the schematic diagram of laser multiple reflections on lens；
Fig. 4 is multiple reflections Reyleith scanttering light schematic diagram on transmission Rayleigh scattering light and lens；
Fig. 5 is the tracking situation of the actual light through dichroscope of one embodiment of the present utility model；
Fig. 6 is the analysis model of focusing light after whole probe system；
Fig. 7 is the structured flowchart of the embedded OS of the utility model one embodiment；
Fig. 8 is the spectrum light path schematic diagram for the optical modulator that grating and movable F-P are integrated.
Embodiment
Below in conjunction with the accompanying drawings and specific embodiment is described further to the utility model.
Embodiment 1：As shown in figure 1, the present embodiment provides a kind of MEMS Miniature Raman spectrometers, including sampling module, control
Display module processed, MEMS dispersion compensation modules；
The sampling module includes laser, sampling camera lens/Raman probe system；
The control display module includes Database Unit, embedded OS/network connection unit, display module；
The MEMS dispersion compensation modules include dispersion compensation module, photodetector unit；
The light that the laser is sent is radiated on sample and excites Raman spectrum through over-sampling camera lens/Raman probe system,
Above-mentioned Raman spectrum is transported to dispersion compensation module after over-sampling camera lens/Raman probe systematic collection, filtering, then passes through dispersion compensation module
Photodetector unit is transferred to after dispersion, obtains new Raman spectrum, by by the data of new Raman spectrum and Database Unit
It is compared, the identity information of measured object is shown in display module；
System control and data exchange and processing to complete machine instrument, database list are realized by the control display module
Member externally carries out data exchange by USB interface.
As shown in Fig. 2 the sampling camera lens/Raman probe system includes lens (O1), dichroscope (DSS), trap filter
Mating plate (NF), convergence yoke (O2), incident laser passes through lens (O again by dichroscope reflection (DSS)1) focus on sample,
Scattering light is through lens (O caused by irradiating sample1) collect, and filter out through dichroscope (DSS), notch filtering light piece (NF) therein
Rayleigh scattering light, obtained Raman diffused light pass through convergence yoke (O again2), focus at slit.
Size and location, exit direction are focused on according to veiling glare, reach energy size at slit, the sampling camera lens/drawing
Stain plate is provided with graceful probe system.
It is tracked Optical ray analysis, it is 785nm narrow band laser as lighting source, its bandwidth that laser, which uses wavelength,
For 0.2nm, spot size 2mm × 2mm, light intensity, which follows, to be evenly distributed, and can reduce the fluorescence background of Raman spectrum, slit width
For 0.05mm, length 2mm, the wavelength selection 785nm of notch filtering light piece, optical density 6.
Laser illuminator is illustrated in figure 3 in lens O1Upper multiple reflections produce the situation of veiling glare, and wherein m is incident light, b
It is laser through O1Primary event light after front surface reflection, c are triple reflection light, and d is five secondary reflection light, and e is seven secondary reflections
Light, p are laser through lens O1Primary event light after the reflection of surface afterwards.
It is illustrated in figure 4 transmission Rayleigh scattering light and its in lens O1The veiling glare that upper multiple reflections are formed, wherein k is scattered
Light is penetrated, f is transmission Rayleigh scattering light, and g is secondary reflection Reyleith scanttering light, and h is four secondary reflection Reyleith scanttering lights.
Using light path of light calculation formula in meridian plane to laser illuminator and transmission rayleigh scattering light and transmission rayleigh scattering
Light is in lens O1The veiling glare that upper multiple reflections are formed carries out ray tracing, and trace starting material is away from for l, angular aperture u, by saturating
Mirror O1Afterwards, emergent ray angular aperture is u0, emergent ray intercept is l0, by lens O1Afterwards, the preliminary energy balane knot of veiling glare
Fruit, obtain ImFor 0.98, IbFor 9.8x10-3,IcFor 9.8x10-7,IdFor 9.8x10-11,IeFor 9.8x10-15,IpFor 10-2,IfFor
9.6x10-4-9.6x10-6, IgFor 9.6x10-8-9.6x10-10,IhFor 9.6x10-12-9.6x10-14,I1For 9.6x10-7-
9.6x10-12, wherein I1Raman scattered light intensity, analysis contrast are understood, only need to analyze laser in laser reflection light in O1Afterwards
The primary event light on surface and through O1Primary event light, triple reflection light and the five secondary reflection light of front surface reflection, in scattering light
In only need analyze transmission rayleigh scattering light and it is secondary it is auspicious reflection Ruili light.
Tracking form of the actual light through dichroscope is illustrated in figure 5, according to the angular aperture of dichroscope emergent ray
u2With intercept l2Information, it can must limit light filter plate and convergence yoke O2Incident ray information, recycle meridian plane in light path of light
Calculation formula carries out ray tracing, finally gives by collecting system O2Angular aperture afterwards and intercept information, you can know whole
The angular aperture and intercept information of probe system.
In order to obtain accurate stain plate placement location, it is necessary to analyze the focusing position of any incident angle light in the optical path
Put, be illustrated in figure 6 the analysis model of focusing light after whole probe system, at disperse spot diameter minimum, i.e., focal position S is
The position of top edge light and lower edge light intersection point on optical axis, l00For intercept, rSFor the disc of confusion radius at focus S, S1
For top edge light and the intersection point of optical axis, corresponding angular aperture is u11, intercept l11, S2For the friendship of lower edge light and optical axis
Point, corresponding angular aperture are u22, intercept l22, D is the disc of confusion at slit, and z is offset distance, and its length is equal to rs, according to
Geometrical relationship, the intercept l at focus S can be obtained00With disc of confusion radius rSInformation, as long as shown in Figure 6 slit length y expire
Sufficient D-z<Y, you can think there is veiling glare to enter in slit, it is necessary to be suppressed.Pass through the energy balane to veiling glare at slit
It can obtain, only need to be to nothing left through lens O1The primary event light of front surface reflection and through O1The primary emission light on surface is done further afterwards
Spuious Xanthophyll cycle, by laser reflection veiling glare theory analysis, through lens O1The primary event light on preceding surface, away from O1
A ghost image is formed at the 3.5072mm of surface afterwards, stain plate can be set at its ghost image, and now a ghost image is in O1Afterwards
Ray diameter on surface is 0.055mm, through lens O1The primary event light on surface is from O afterwards1It is diverging after outgoing, if in O1
Surface blackens a plate afterwards, then the minimum 0.138mm of the diameter of stain plate.
The structured flowchart of the embedded OS of the utility model one embodiment is illustrated in figure 7, based on Android
The embedded Raman spectral signals processing system of operating system, realize quick spectroscopic acquisition processing, friendly man-machine friendship
The linewidth parameters technology of mutual interface and intelligence；Handheld Raman spectrometer by USB, Internet or can also be wirelessly transferred
Data exchange is carried out with computer, receives the order from computer, network, the Raman spectrum data collected is published to network
In, long-range, onlineization, unmanned work are realized, while the teleengineering support of Raman spectrum data can also be realized.
Embedded OS module mainly includes power management, CCD drivings and signal transacting, Laser Driven, insertion
The submodules such as formula processor platform, man-machine interface, software section include operating system, built-in application program etc., can be with complete
Into data processing function, it is possible to achieve hand-held uses, and completely disengages computer and works independently.
It is illustrated in figure 8 the spectrum light path schematic diagram for the optical modulator that grating and movable F-P are integrated, the dispersion mould
The dispersion that block is integrated using MEMS technology grating and movable F-P cavity, the Raman diffused light at slit pass through incident after collimated
It is flat and grating, -1 order diffraction light after grating dispersion are filtered by F-P cavity again, condenser lens is set after F-P cavity, makes ripple
The long light wave for meeting condition forms spectrum striped in CCD, it is ensured that while wider Free Spectral Range, and can enough obtains
Narrower full width at half maximum (FWHM) is obtained, obtains high spectral resolution.
Claims (6)
1. a kind of MEMS Miniature Raman spectrometers, it is characterised in that including sampling module, control display module, MEMS dispersion moulds
Block；
The sampling module includes laser, sampling camera lens/Raman probe system；
The control display module includes Database Unit, embedded OS/network connection unit, display module；
The MEMS dispersion compensation modules include dispersion compensation module, photodetector unit；
The light that the laser is sent is radiated on sample and excites Raman spectrum through over-sampling camera lens/Raman probe system, above-mentioned
Raman spectrum is transported to dispersion compensation module after over-sampling camera lens/Raman probe systematic collection, filtering, then passes through dispersion compensation module dispersion
After be transferred to photodetector unit, new Raman spectrum is obtained, by the way that the data of new Raman spectrum and Database Unit are carried out
Compare, the identity information of measured object is shown in display module；
Realized by the control display module and the system control of complete machine instrument and data exchange and processing, Database Unit are led to
Cross USB interface and externally carry out data exchange.
2. a kind of MEMS Miniature Raman spectrometers according to claim 1, it is characterised in that the laser uses wavelength
For 785nm narrow band laser as lighting source, it follows average mark with a width of 0.2nm, spot size 2mm × 2mm, light intensity
Cloth.
A kind of 3. MEMS Miniature Raman spectrometers according to claim 1, it is characterised in that the sampling camera lens/Raman
Probe system includes lens (O1), dichroscope (DSS), notch filtering light piece (NF), convergence yoke (O2), incident laser passes through two
Pass through lens (O again to Look mirror reflection (DSS)1) focus on sample, scattering light is through lens (O caused by irradiating sample1) collect,
And rayleigh scattering light therein is filtered out through dichroscope (DSS), notch filtering light piece (NF), obtained Raman diffused light passes through meeting again
Poly- system (O2), focus at slit.
4. a kind of MEMS Miniature Raman spectrometers according to claim 3, it is characterised in that the slit width is
0.05mm, length 2mm.
5. a kind of MEMS Miniature Raman spectrometers according to claim 1, it is characterised in that size is focused on according to veiling glare
Energy size, described sample in camera lens/Raman probe system at position, exit direction, arrival slit are provided with stain plate.
6. a kind of MEMS Miniature Raman spectrometers according to claim 1, it is characterised in that the dispersion compensation module uses
The dispersion that MEMS technology grating and movable F-P cavity integrate, the Raman diffused light at slit pass through incident flat and light after collimated
Grid, -1 order diffraction light after grating dispersion are filtered by F-P cavity, condenser lens are set after F-P cavity, meets wavelength again
The light wave of condition forms spectrum striped in CCD.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720271500.8U CN207020083U (en) | 2017-03-20 | 2017-03-20 | A kind of MEMS Miniature Raman spectrometers |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720271500.8U CN207020083U (en) | 2017-03-20 | 2017-03-20 | A kind of MEMS Miniature Raman spectrometers |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022261781A1 (en) * | 2021-06-18 | 2022-12-22 | Ember Katie | Methods and systems for interrogating a drop of saliva using raman spectroscopy |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022261781A1 (en) * | 2021-06-18 | 2022-12-22 | Ember Katie | Methods and systems for interrogating a drop of saliva using raman spectroscopy |
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