CN203824908U - Laser-induced breakdown spectroscopy elemental analyzer capable of positioning target spots accurately - Google Patents
Laser-induced breakdown spectroscopy elemental analyzer capable of positioning target spots accurately Download PDFInfo
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
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Abstract
The utility model relates to an elemental analyzer, and particularly relates to a laser-induced breakdown spectroscopy elemental analyzer. A laser-induced breakdown spectroscopy elemental analyzer capable of positioning target spots accurately is mainly characterized by comprising a pulsed laser, a laser transmitting system, a sample chamber, an analysis sample, a target spot accurate positioning system, a transmission optical fiber and a spectrograph, wherein the pulsed laser conducts a laser beam on the analysis sample in the sample chamber by the laser transmitting system; the target spot accurate positioning system is arranged on the sample chamber; and target sample transmitting spectrum is connected with the spectrograph by the transmission optical fiber fixed on the target spot accurate positioning system. The whole set of LIBS (laser-induced breakdown spectroscopy) analyzer consisting of a laser system, a light guide system, a positioning system and a sample chamber individually can be used as one set of equipment, laser sources with different parameters of the analyzer can be replaced conveniently, or in-situ samples can be analyzed by the analyzer directly without using the sample chamber; therefore, the application range of the analyzer is expanded and the functionalization and commercialization of the analyzer are promoted; and the target spot accurate positioning system can realize micron dimension positioning of a three-dimensional space and the automatic correction of the target spot, improves the accuracy of measured and analyzed results of the analyzer, and improves the flexibility of the analysis element of the analyzer.
Description
Technical field
The utility model relates to elemental analyser, particularly the elemental analyser of Laser-induced Breakdown Spectroscopy method.
Background technology
Ultimate analysis has a wide range of applications demand in every field such as metallurgy, food security, environmental monitoring, space explorations.Conventional ultimate analysis means comprise x-ray fluorescence analyzer, inductively-coupled plasma spectrometer, icp ms, atomic absorption spectrophotometer (AAS), laser ablation inductively coupled plasma mass spectrometry etc.But traditional ultimate analysis instrument needs to sample more, and sample is carried out just can analyzing after pre-service, some analytical approach all has larger restriction to sample form, institute's analytical element kind etc.
Laser-induced Breakdown Spectroscopy (LIBS) technology is to utilize light laser to focus on sample surfaces to form plasma, carrys out the analysis means of elemental composition in analytic sample by the characteristic spectral line in measurement plasma emission spectroscopy.Aspect the qualitative and quantitative analysis applied research of the trace element in the samples such as metal, liquid, gas of the method, carried out extensive work.Compare with traditional analysis, still the feature in developing LIBS technology maximum is to need hardly preparation, little to sample destruction, the features such as sensitivity height, and because this analytical approach only has contacting of light beam and target target, thereby can realize multielement, original position analysis.
Because LIBS technology is to take laser ablation analytic sample to form plasma be basis, and after laser plasma parameters, intensity of emission spectra and laser ablation target material, the fractionating effect of its component etc. is all closely related with laser power density.For specific lasing light emitter, its pulse width, optical maser wavelength are all fixing, and present laser technology can realize the high stability (shake <3%) of pulsed laser energy, therefore the factor, power density after Laser Focusing being had the greatest impact is accurately to control condenser lens to the distance of sample surfaces; For surface irregularity or irregular sample, if can revise in time lens to the distance of analysis site, can increase substantially LIBS skill element analysis precision, further reduce the detectability of element.
At present, can provide in the world the leading firm of commercialization LIBS equipment to have the companies such as French IVEA, Britain Applied Photonics.Wherein on the products such as EasyLIBS of IVEA company, adopted two bundle semiconductor lasers to carry out target spot location, and by camera collection hot spot, by the design of naked eyes judgement target spot.For hand-held LIBS equipment carries out express-analysis, this design can meet express-analysis demand.But the target spot for irregular sample is accurately located, improve constituent content analysis precision and duplicate measurements etc. in sample, this device also has certain limitation.In many moneys LIBS of Applied Photonics company product, although applied the design of some taper surface optical element layouts, but in its design, pulse laser transmits along axis, design has reduced Laser Transmission structure like this, but also reduce the controllability of Laser Transmission, and proposed strict demand for the size of laser instrument and LIBS device, be unfavorable for changing the lasing light emitter of different parameters.At its optical element, just according to pyramidal structure, distribute, be not fixed on the conical surface, steadiness weakens.In this design, camera is not installed in axis, and does not also adopt three beams of laser location, and therefore, this design is accurately located for the target spot of carrying out irregular sample and element distribution measuring still has limitation.And in this LIBS equipment, there is not environmental gas designs of nozzles yet, limited the application of its ultimate analysis under fundamental research and particular surroundings gas yet.
Summary of the invention
The purpose of this utility model is, for avoiding the deficiencies in the prior art, provides a kind of accurately target spot location, and easy operating and popularization, have the Laser-induced Breakdown Spectroscopy analytical equipment compared with high analyte precision.The purpose of this utility model is that the technical equipment such as semiconductor laser location, ccd image analysis and automatically controlled accurate translation stage are combined, and foundation can realize the pinpoint Laser-induced Breakdown Spectroscopy ultimate analysis of target spot instrument.
For achieving the above object, the technical scheme that the utility model is taked is: the Laser-induced Breakdown Spectroscopy elemental analyser of a kind of accurate target spot location, its principal feature is to include pulsed laser and by transmission laser system, laser beam is transmitted on the analytic sample in sample chamber, target spot Precise Position System is located on sample chamber, and target sample emission spectrum is connected with spectrometer by being fixed on the Transmission Fibers of target spot Precise Position System.
The Laser-induced Breakdown Spectroscopy elemental analyser of described accurate target spot location, described transmission laser system includes on the passage of pulse laser beam transmission and is provided with the concavees lens in the first laser bundle-enlarging collimation lens combination, convex lens in ultraviolet quartz rectangular prism and the second laser bundle-enlarging collimation lens combination, in condenser lens placing chamber, be provided with Laser Focusing ultraviolet quartz lens, at condenser lens placing chamber, be also provided with characteristic wavelength completely reflecting mirror outward, pulse laser beam is successively by the concavees lens in the first laser bundle-enlarging collimation lens combination, convex lens in ultraviolet quartz rectangular prism and the second laser bundle-enlarging collimation lens combination and Laser Focusing ultraviolet quartz lens are radiated on analytic sample after being reflected by characteristic wavelength completely reflecting mirror.
The Laser-induced Breakdown Spectroscopy elemental analyser of described accurate target spot location, it is that taper, outside are columniform metab that described target spot Precise Position System includes inner, at the center of metab, be provided with camera head CCD, and on the conical surface of metab, be provided with the semiconductor collimation laser devices of three band focusing, transmitting collimated laser beam focuses on analytic sample surface same point, and this is on the axis of positioning table of placing analytic sample, and range pulse laser beam condenser lens distance is focal length; Plasma spectrometry collecting lens group is arranged in fiber coupler placing chamber, and the lens center of plasma spectrometry collecting lens group is concentric with the position of semiconductor collimation laser device on the conical surface, and focus point is on the surface of analytic sample; Plasma spectrometry collecting lens group connects spectrometer by the optical fiber on optical fiber flange; On the conical surface of target spot Precise Position System, be provided with the LED illuminating lamp for sample chamber intraoral illumination; Also be provided with the environmental gas nozzle that is used to sample surfaces to manufacture the environmental gas of particular types.
The Laser-induced Breakdown Spectroscopy elemental analyser of described accurate target spot location, its top, described sample chamber is connected with target spot Precise Position System, coupling part is with seal with elastometic washer, sample chamber be provided with laser wavelength protection glass for sending sample thief window; In its underpart, be provided with the automatically controlled displacement platform of three-dimensional of placing analytic sample, to realize the three dimensions of sample, accurately scan.
Because the design adopts three beams semiconductor collimated laser beam, therefore can locate irregular sample target spot, reduce LIBS and analyzed the requirement to sample flatness, and, semiconductor laser its focal spot after carefully optimizing with condenser lens can reach micron dimension, and technical grade CCD resolution micron dimension after optical system imaging, therefore, this system location has very high precision.
The beneficial effects of the utility model:
1) a whole set of LIBS analyser is by independently laser system, light-conducting system, positioning system and sample chamber form, both having can be used as an equipment uses, also the lasing light emitter that can change easily different parameters is used, or do not use sample chamber directly to original position sample analysis, expand the range of application of this analyser, promote practical, the commercialization of instrument.
2) in conjunction with the LIBS target spot Precise Position System of the confocal location of three beams semiconductor laser, ccd image acquisition analysis system, can realize three-dimensional micron dimension location, and the automatic correction of target spot, improve the accuracy of analytical instrument Measurement and analysis result, promote the sensitivity of instrumental analysis element.
3) integrated optic path, the accurately design of location, Laser Focusing and spectra collection system, make this LIBS analytical instrument more firm, reliable, and reduced instrumentation personnel operating experiences, safeguarded the requirement of regulation technology, made instrument be easy to extensive popularization.
4) by CCD to the imaging of target material and hand drawing, can realize target sample element space distribution measuring;
5) in conjunction with laboratory study achievement, increased the environmental gas nozzle coaxial with target center, can create various gaseous environments, enhanced spectrum signal, raising spectral line signal to noise ratio (S/N ratio) and the interference of removal the atmospheric background etc., can meet scientific research demand and special industry application demand.
Accompanying drawing explanation:
Fig. 1 typical case LIBS principle of device schematic diagram;
Fig. 2 structural representation of the present utility model;
The master of Fig. 3 target spot Precise Position System of the present utility model embodiment 1 looks diagrammatic cross-section;
Fig. 4 target spot Precise Position System of the present utility model embodiment 1 elevational schematic view;
The main diagrammatic cross-section of looking in Fig. 5 sample chamber of the present utility model;
Fig. 6 sample chamber of the present utility model schematic top plan view;
The master of Fig. 7 target spot Precise Position System of the present utility model embodiment 3 looks schematic diagram;
Fig. 8 target spot Precise Position System of the present utility model embodiment 3 elevational schematic view;
Fig. 9 testing process schematic diagram of the present utility model.
In figure: 1 pulsed laser; 2 transmission laser systems; 3LIBS target spot Precise Position System; 4 sample chambers; 5 Transmission Fibers; 6 spectrometers; 7 ultraviolet quartz rectangular prisms; 8 pulse laser beams; 9 laser bundle-enlarging collimation lens combination; 10 Laser Focusing ultraviolet quartz lenss; 11 condenser lens placing chambers; 12 characteristic wavelength completely reflecting mirrors; 13 spectrum are collected coupled lens group; 14 optical fiber flanges; 15 fiber coupler placing chambers; 16 target spot location technical grade CCD; 17 environmental gas nozzles; 18 three-dimensional accurate Electrocontrolled sample platforms; 19 analytic samples; 20 plasma plumes; 21 target spot location semiconductor lasers; 22 LED light source for illuminating; 23 sample windows with laser wavelength protective window; 24 sample chamber main body frames; 25 pulse valves.
Embodiment
Below in conjunction with the preferred example shown in accompanying drawing, be described in further detail:
Embodiment 1: see Fig. 2, the Laser-induced Breakdown Spectroscopy elemental analyser of a kind of accurate target spot location, its principal feature is to include pulsed laser 1 and by transmission laser system 2, laser beam is transmitted on the analytic sample 19 in sample chamber 4, target spot Precise Position System 3 is located on sample chamber 4, and target spot Precise Position System 3 is connected with spectrometer 6 by Transmission Fibers 5.Spectrometer adopts commercial fiber spectrometer or is furnished with the middle echelle spectrometer of intensifier CCD detector.
Pulse laser system 1 in described LIBS analytical equipment adopts Nd:YAG commercial lasers device product conventionally, output pulse width is nanosecond order, there is fixed wave length and the output of frequency multiplication wavelength, according to different experiments needs, also can select psec, fs-laser system etc.
Described transmission laser system 2 includes and in the transmission channel of pulse laser beam 8, is provided with the first laser bundle-enlarging collimation lens combination concavees lens 9-1, ultraviolet quartz rectangular prism 7 and the second laser bundle-enlarging collimation lens combination convex lens 9-2, in condenser lens placing chamber 11, be provided with Laser Focusing ultraviolet quartz lens 10, outside condenser lens placing chamber 11, be also provided with characteristic wavelength completely reflecting mirror 12, pulse laser beam 8 is successively by the concavees lens 9-1 in the first laser bundle-enlarging collimation lens combination, convex lens 9-2 in ultraviolet quartz rectangular prism 7 and the second laser bundle-enlarging collimation lens combination and Laser Focusing ultraviolet quartz lens 10 are radiated on analytic sample 19 after being reflected by characteristic wavelength completely reflecting mirror 12.Pulse laser system 1 is provided with 10 designs of Laser Focusing ultraviolet quartz lens owing to adopting in condenser lens placing chamber 11, thereby can, according to different experiments needs, easily replace with the other light sources systems such as psec, femtosecond laser.
See Fig. 3 and Fig. 4, it is taper, the outside columniform metab 3-1 of being that described target spot Precise Position System 3 includes inner, at metab 3-1 center, be provided with camera head CCD16, and on the conical surface of metab 3-1, be provided with the semiconductor collimation laser devices 21 of three band focusing, transmitting collimated laser beam focuses on the surperficial same point of analytic sample 19, and this is being placed on the axis of analytic sample 19 positioning bases 18, and range pulse laser beam condenser lens 10 distances are focal length; Plasma spectrometry collecting lens group 13 is arranged in fiber coupler placing chamber 15, and the lens center of plasma spectrometry collecting lens group 13 is concentric with the position of semiconductor collimation laser device 21 on the conical surface, and focus point is analytic sample 19 surfaces; The optical fiber 5 that plasma spectrometry scioptics group 13 focuses on optical fiber flange 14 connects spectrometer 6.Metab 3-1 is provided with environmental gas nozzle 17 and points to target sample surfaces to create required gaseous environment; On metab 3-1, be also provided with lighting source LED.
See Fig. 5 and Fig. 6, described 4 its tops, sample chamber are provided with the circular interface matching with positioning system base 3-1 size, can be connected with target spot Precise Position System 3, sample chamber is uncovered, coupling part seals with rubber ring 24-1, sample chamber 4 is provided with the window 23 with laser wavelength protection glass, for sending sample thief; In its underpart, be provided with the automatically controlled displacement platform 18 of three-dimensional of placing analytic sample 19, analyzed sample is placed on three-dimensional automatically controlled displacement platform 18, to realize the three dimensions of sample, accurately scans.
Because the automatically controlled accurate translation stage precision of three-dimensional can reach nano levelly, and laser focal spot size is in micron dimension, by CCD16, obtains analytic sample pattern, and manually draws after track while scan, can realize target sample in the analysis that distributes of element space.
The Laser-induced Breakdown Spectroscopy elemental analyser of accurate target spot described in the utility model location, its accurate location survey principle is that three collimation semiconductor laser transmitting collimated laser beams focus on analytic sample surface same point, and this point is on target spot positioning base axis, and target spot range pulse laser beam condenser lens 10 distances are mated with the focal length of lens; The hot spot of technical grade CCD16 collection analysis collimation laser device 21, judge that whether three laser beam are in same point, if CCD only observes a hot spot, can carry out Measurement and analysis, if CCD observes three hot spots, interpret sample, not in laser spot place, is controlled three-dimensional electronic control translation stage correction sample position until observe a hot spot; Because the design adopts three beams semiconductor collimated laser beam, therefore can locate irregular sample target spot, reduce LIBS and analyzed the requirement to sample flatness, and, semiconductor laser its focal spot after carefully optimizing with condenser lens can reach micron dimension, and technical grade CCD resolution micron dimension after optical system imaging, therefore, this system location has very high precision.
Transmission laser system 2 in described LIBS analytical equipment, comprise the catoptron 7 being formed by ultraviolet quartz prism, the beam-expanding system 9 with Galileo telescope structure, two lens 9-1 of this telescopic system and 9-2 are distributed in the both sides of a quartz rectangular prism 7, can shorten the length requirement to two sections of light-conducting arms, make device compacter.
During use, laser beam 8 enters Laser Transmission passage from 3-1 lateral wall after light-conducting arm back warp lens combination 9 expands, and the quartz lens 10 in embedding condenser lens placing chamber 11 focuses on, and condenser lens position utilizes screw thread snap ring to regulate; Laser beam after focusing is radiated at the surface of analytic sample 19 after being reflected by the high reflective mirror 12 that is arranged on conical seat bottom, form plasma plume 20; Lens are consistent with the focal length of lens to sample surfaces distance; Cone bearing center mounting industrial level CCD16, for taking laser target spot luminescence of plasma image, semiconductor laser hot spot and sample topography etc.; See Fig. 4, after 21, three collimation laser device line focus optimizations of semiconductor collimation laser device of 3 band focusing of the symmetrical installation of the conical surface, form micron order hot spot and irradiate in analytic sample surface same position; Plasma spectrometry collecting lens group 13 is installed in fiber coupler placing chamber 15, lens center is concentric with the position of three beams semiconductor laser on the conical surface, and accurately point to target spot, lens combination is analyzed to spectrometer 6 by the Optical Fiber Transmission being connected on optical fiber flange 14 after plasma spectrometry is collected to focusing; Because plasma light spectrum signal has different Evolutions under varying environment gas, in native system, on the annulus of semiconductor laser position, be also provided with environmental gas nozzle 17, its direction is also accurately pointed to target spot; In addition, in order to place the convenient and CCD of sample, can know and obtain sample topography photo, in this system, also configure LED illuminating lamp 22.
In described LIBS analytical equipment, the sequential before laser instrument, spectrometer and CCD is generally by ripe pulse delay signal device, and for example the DG535 of U.S. Stamford, DG645 accurately control, and also can process by designed, designed, and its control accuracy was better than for 1 nanosecond.The business spectrometer that LIBS equipment is conventional is generally also all furnished with laser instrument trigger pip module, and utilizes software to carry out control time delay, therefore, also can realize timing synchronization between each hardware in delay by spectrometer software.
Test process of the present utility model, by compact Nd:YAG laser instrument 1 as ablative light sources, laser beam is through a pair of ultraviolet quartz prism 9 transmission, and after being focused on by ultraviolet quartz lens 10, be radiated at analytic sample 19 surfaces, sample is fixed on three-dimensional electronic control translation stage 18, and according to setting track mobile example.The hot spot of the laser beam irradiation that three beams is exported by semiconductor laser 21 on sample surfaces gathered by CCD16, and judge whether with one heart, by controlling accurate electrical-controlled lifting platform, till three beams of laser Shu Tongxin, be that target spot has been located, now, pulse laser beam is concentric with three beams locating laser at sample surfaces hot spot, starts to measure.In sample motion process, CCD continues to monitor three beams semiconductor laser hot spot, and control step motor correction position simultaneously.The plasma spectrometry being produced by pulse laser ablation sample surfaces is analyzed by coupled lens group 13 coupled into optical fibres 5 input spectrum instrument 6.Time delay before spectrometer and laser instrument and CCD is by pulse delay signal device DG645(U.S. SRS company) accurately control.
Embodiment 2: the Laser-induced Breakdown Spectroscopy elemental analyser of a kind of accurate target spot location, be used in the irregular sample analysis such as mineral, rock, structure is identical with embodiment 1, different is to use portable power source, do not use sample chamber, directly laser beam foucing is aimed to field target sample measures and analyzes element wherein.
Conventionally LIBS spectral analysis is very responsive for laser power density, and therefore, the flatness of sample surfaces can have a great impact by LIBS analysis result.For undressed ore sample etc., the very out-of-flatness of its surface, collects coupling if can not carefully focus and optimize optical fiber, does not detect possibly any signal.But adopt of the present utility model with the pinpoint LIBS analyser of target spot, can determine a plane due to 3, and the total focus of this three beams of laser and optical fiber are collected coupled lens group conllinear, therefore for irregular ore sample etc., as long as adjust three beams locating laser, cross, get final product fine coupling spectrum collection system and obtain optimized spectral signal.
Embodiment 3: the Laser-induced Breakdown Spectroscopy elemental analyser of a kind of accurate target spot location, laser mass spectrometry or spectral analysis under vacuum condition.See Fig. 7 and Fig. 8, described CCD camera system 16 is located on the conical surface of metab 3-1, with vacuum seal connected mode, pulse valve 25 is located to metab 3-1 center; Select stainless steel material processing positioning base 3 ?1 simultaneously, and at the blue edge of a knife of its cylinder end face processing method, with intend being connected vacuum chamber sealing docking.The accurate target spot positioning system of the utility model can be used for laser ablation mass spectrum, the spectral analysis location under vacuum condition, and can realize the functions such as the outer original position sample ablation of vacuum chamber, the interior mass spectrophotometry of vacuum chamber.All the other structures are identical with embodiment 1.
The Laser-induced Breakdown Spectroscopy elemental analyser of 4 one kinds of accurate target spot location of embodiment, element space distribution measuring.Structure is identical with embodiment 1.Different is on the automatically controlled displacement platform of three-dimensional of automatically controlled accurate lifting table composition, to realize the three dimensions of sample, accurately scans.Because the automatically controlled accurate translation stage precision of three-dimensional can reach nano level, and laser focal spot size is in micron dimension, by CCD16, obtain analytic sample pattern, and manually according to CCD, gather after Image Rendering electronic control translation stage track while scan, after reading track data by translation stage control program, move, spectral instrument collection analysis LIBS spectral signal simultaneously, can obtain the constituent content information of specific region by intensive analysis.By the scanning of zones of different, this system can realize target sample in the analysis that distributes of element space.
Embodiment 5: see Fig. 9, and the using method of the Laser-induced Breakdown Spectroscopy elemental analyser of a kind of accurate target spot location, its key step is:
First when apparatus installation, three collimation semiconductor lasers of initial setting up transmitting collimated laser beams focus on analytic sample surface same point, and this point is on target spot positioning base axis, and range pulse laser beam condenser lens 10 is apart from being the focal length of lens; The hot spot of technical grade CCD16 collection analysis collimation laser device 21, judge that whether three laser beam are in same point, if CCD only observes a hot spot, be that analytic sample is in pulse laser focus place, can carry out Measurement and analysis, if CCD observes three hot spots, interpret sample is not in laser spot place, stop measuring, and control lifting table and move until observe a hot spot.
The foregoing is only preferred embodiment of the present utility model, not in order to limit the utility model, all within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection domain of the present utility model.
Claims (4)
1. the Laser-induced Breakdown Spectroscopy elemental analyser of an accurate target spot location, it is characterized in that including pulsed laser is transmitted to laser beam on the analytic sample in sample chamber by transmission laser system, target spot Precise Position System is located on sample chamber, and target sample emission spectrum is connected with spectrometer by being fixed on the Transmission Fibers of target spot Precise Position System.
2. the Laser-induced Breakdown Spectroscopy elemental analyser that accurate target spot as claimed in claim 1 is located, transmission laser system described in it is characterized in that includes on the passage of pulse laser beam transmission and is provided with the concavees lens in the first laser bundle-enlarging collimation lens combination, convex lens in ultraviolet quartz rectangular prism and the second laser bundle-enlarging collimation lens combination, in condenser lens placing chamber, be provided with Laser Focusing ultraviolet quartz lens, at condenser lens placing chamber, be also provided with characteristic wavelength completely reflecting mirror outward, pulse laser beam is successively by the concavees lens in the first laser bundle-enlarging collimation lens combination, convex lens in ultraviolet quartz rectangular prism and the second laser bundle-enlarging collimation lens combination and Laser Focusing ultraviolet quartz lens are radiated on analytic sample after being reflected by characteristic wavelength completely reflecting mirror.
3. the Laser-induced Breakdown Spectroscopy elemental analyser that accurate target spot as claimed in claim 1 is located, it is characterized in that it is that taper, outside are columniform metab that described target spot Precise Position System includes inner, at the center of metab, be provided with camera head CCD, and on the conical surface of metab, be provided with the semiconductor collimation laser devices of three band focusing, transmitting collimated laser beam focuses on analytic sample surface same point, and this is on the axis of positioning table of placing analytic sample, and range pulse laser beam condenser lens distance is focal length; Plasma spectrometry collecting lens group is arranged in fiber coupler placing chamber, and the lens center of plasma spectrometry collecting lens group is concentric with the position of semiconductor collimation laser device on the conical surface, and focus point is on the surface of analytic sample; Plasma spectrometry collecting lens group connects spectrometer by the optical fiber on optical fiber flange; On the conical surface of target spot Precise Position System, be provided with the LED illuminating lamp for sample chamber intraoral illumination; Also be provided with the environmental gas nozzle that is used to sample surfaces to manufacture the environmental gas of particular types.
4. the Laser-induced Breakdown Spectroscopy elemental analyser that accurate target spot as claimed in claim 1 is located, it is characterized in that described its top, sample chamber is connected with target spot Precise Position System, coupling part is with seal with elastometic washer, sample chamber be provided with laser wavelength protection glass for sending sample thief window; In its underpart, be provided with the automatically controlled displacement platform of three-dimensional of placing analytic sample, to realize the three dimensions of sample, accurately scan.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420129663.9U CN203824908U (en) | 2014-03-21 | 2014-03-21 | Laser-induced breakdown spectroscopy elemental analyzer capable of positioning target spots accurately |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103900998A (en) * | 2014-03-21 | 2014-07-02 | 中国科学院近代物理研究所 | Accurate target point positioning laser-induced breakdown spectroscopy (LIBS) elemental analyzer and method thereof |
| CN104458665A (en) * | 2014-12-28 | 2015-03-25 | 冶金自动化研究设计院 | Measuring device and method for spectral spatial distribution in LIBS (Laser-Induced Breakdown Spectroscopy) component analysis |
| CN103900998B (en) * | 2014-03-21 | 2016-11-30 | 中国科学院近代物理研究所 | The LIBS elemental analyser of accurate target spot location and method thereof |
| CN108072635A (en) * | 2016-11-15 | 2018-05-25 | 中国科学院光电研究院 | A kind of method of ingredient in analytical equipment real-time online measuring Improving Glass Manufacturing Processes using Laser induced plasma spectroscopy |
| CN109884032A (en) * | 2019-02-19 | 2019-06-14 | 中国科学院合肥物质科学研究院 | The pinpoint laser induced breakdown spectroscopy detection system of ablation point and method |
-
2014
- 2014-03-21 CN CN201420129663.9U patent/CN203824908U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103900998A (en) * | 2014-03-21 | 2014-07-02 | 中国科学院近代物理研究所 | Accurate target point positioning laser-induced breakdown spectroscopy (LIBS) elemental analyzer and method thereof |
| CN103900998B (en) * | 2014-03-21 | 2016-11-30 | 中国科学院近代物理研究所 | The LIBS elemental analyser of accurate target spot location and method thereof |
| CN104458665A (en) * | 2014-12-28 | 2015-03-25 | 冶金自动化研究设计院 | Measuring device and method for spectral spatial distribution in LIBS (Laser-Induced Breakdown Spectroscopy) component analysis |
| CN108072635A (en) * | 2016-11-15 | 2018-05-25 | 中国科学院光电研究院 | A kind of method of ingredient in analytical equipment real-time online measuring Improving Glass Manufacturing Processes using Laser induced plasma spectroscopy |
| CN109884032A (en) * | 2019-02-19 | 2019-06-14 | 中国科学院合肥物质科学研究院 | The pinpoint laser induced breakdown spectroscopy detection system of ablation point and method |
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