CN103900998B - The LIBS elemental analyser of accurate target spot location and method thereof - Google Patents
The LIBS elemental analyser of accurate target spot location and method thereof Download PDFInfo
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Abstract
The present invention relates to elemental analyser, particularly to the elemental analyser of LIBS method.A kind of LIBS elemental analyser of accurate target spot location, it is mainly characterized by and includes on the analysis sample that laser beam is transmitted in sample room by transmission laser system by pulse laser, target spot Precise Position System is located on sample room, and target electromagnetic radiation spectrum is connected with spectrogrph by the Transmission Fibers being fixed on target spot Precise Position System.It is an advantage of the invention that a whole set of LIBS analyser is made up of independent laser system, light-conducting system, alignment system and sample room, both can use as an equipment, the lasing light emitter that can also change different parameters easily uses, or do not use sample room directly to original position sample analysis, extend the range of application of this analyser, promote practical, the commercialization of instrument.Target spot Precise Position System can realize three-dimensional micron dimension location, and the automatic correction of target spot, improves analytical tool and measures precision of analysis, promotes the sensitivity of Instrumental Analysis element.
Description
Technical field
The present invention relates to elemental analyser, particularly to the elemental analyser of LIBS method.
Background technology
Elementary analysis has in every field such as metallurgy, food safety, environmental monitoring, space explorations widely should
Use demand.Conventional elementary analysis means include x-ray fluorescence analyzer, inductively coupled plasma spectrometry
Instrument, icp ms, atomic absorption spectrophotometer, laser ablation inductive couple plasma
Body constitution spectrum etc..But traditional many needs of elementary analysis instrument are sampled, and sample is carried out ability after pretreatment
Can analyze, some analysis method all has bigger restriction to sample morphology, institute's analytical element kind etc..
LIBS (LIBS) technology is to utilize light laser to focus on sample surfaces to form plasma
Body, analyzes the analysis hands of elemental composition in sample by measuring the characteristic spectral line in plasma emission spectroscopy
Section.The qualitative and quantitative analysis application of the method trace element in the samples such as metal, liquid, gas
Research aspect has carried out extensive work.Compared with traditional analysis, still maximum in developing LIBS technology
Feature be with little need for preparation, little to sample broke, sensitivity high, and due to this analysis side
Method only has contacting of light beam and target target, thus can realize multielement, in-situ study.
Owing to LIBS technology is to be formed based on plasma by Laser ablation analysis sample, and laser plasma
After body parameter, intensity of emission spectra and laser ablation target material, the fractionating effect of its component etc. are all and laser power
Density is closely related.For specific lasing light emitter, its pulse width, optical maser wavelength are the most fixing, and present
Laser technology can realize the high stability (shake < 3%) of pulsed laser energy, therefore, gathers laser
The maximum factor of defocused power density impact is then accurately to control condenser lens to the distance of sample surfaces；For table
Face out-of-flatness or irregular sample, if lens can be revised in time to the distance of analysis site, then can be significantly
Improve LIBS skill element analysis precision, reduce the detection limit of element further.
At present, the leading firm of commercialization LIBS equipment can be provided in the world to have French IVEA, Britain
The companies such as Applied Photonics.Wherein on the product such as EasyLIBS of IVEA company, two bundles are have employed
Semiconductor laser carries out target spot location, and by camera collection hot spot, naked eyes judges the design of target spot.Right
For hand-held LIBS equipment is quickly analyzed, this design can meet quick analysis demand.
But the target spot for irregular sample is accurately positioned, improves in sample constituent content analysis precision and repeat to survey
Amounts etc., this device also has certain limitation.In many moneys LIBS product of Applied Photonics company,
Although having applied the design of some taper surface optical element layouts, but in its design, in pulse laser edge
Axis transmits, and so design decreases Laser Transmission structure, but also reduces the controllability of Laser Transmission, and
And the size for laser instrument Yu LIBS device proposes strict demand, it is unfavorable for changing the laser of different parameters
Source.Simply being distributed according to pyramidal structure at its optical element, be not fixed on the conical surface, steadiness weakens.
In this design, photographic head is not installed in axis, and is also provided without three beams of laser location, therefore, this design
For carry out the target spot of irregular sample be accurately positioned and Elemental redistribution measure still have limitation.And should
In LIBS equipment, there is not environmental gas nozzle to design yet, also limit it at basic research and special environment
The application of elementary analysis under gas.
Summary of the invention
It is an object of the invention to, for avoiding the deficiencies in the prior art, it is provided that one can accurately position, easily by target spot
In operation and popularization, there is the LIBS analytical equipment of relatively high analyte precision.The purpose of the present invention
It is that the technical equipment such as semiconductor laser location, ccd image analysis and automatically controlled accurate translation stage are combined,
Foundation can realize target spot pinpoint LIBS elementary analysis instrument.
For achieving the above object, the technical scheme that the present invention takes is: the induced with laser of a kind of accurate target spot location
Breakdown spectral elemental analyser, it is mainly characterized by and includes pulse laser by transmission laser system by sharp
On the analysis sample that light beam is transmitted in sample room, target spot Precise Position System is located on sample room, and target sample is sent out
Penetrate spectrum to be connected with spectrogrph by the Transmission Fibers being fixed on target spot Precise Position System.
The LIBS elemental analyser of described accurate target spot location, described transmission laser system
Include and be provided with the concavees lens in the first laser bundle-enlarging collimation battery of lens, purple on the passage of pulse laser beam transmission
Convex lens in outer quartz rectangular prism and the second laser bundle-enlarging collimation battery of lens, sets in condenser lens placing chamber
There is laser focusing ultraviolet quartz lens, outside condenser lens placing chamber, be additionally provided with characteristic wavelength completely reflecting mirror, pulse
Laser beam passes sequentially through the concavees lens in the first laser bundle-enlarging collimation battery of lens, ultraviolet quartz rectangular prism and second
Convex lens in laser bundle-enlarging collimation battery of lens and laser focusing ultraviolet quartz lens are by characteristic wavelength completely reflecting mirror
It is radiated at after reflection on analysis sample.
The LIBS elemental analyser of described accurate target spot location, described target spot is accurately positioned
It is cylindrical metab for taper, outside that system includes internal, is provided with shooting at the center of metab
Device CCD, and on the conical surface of metab, it is provided with the quasiconductor alignment laser of three band focusing, launch
Collimated laser beam focuses on analysis sample surfaces same point, and this is at the axle placing the positioning table analyzing sample
On line, and range pulse laser beam focusing lens distance is focal length；Plasma spectrometry collecting lens group is arranged on
In fiber coupler placing chamber, the lens centre of plasma spectrometry collecting lens group and quasiconductor alignment laser
Position on the conical surface is concentric, and focus point is on the surface analyzing sample；Plasma spectrometry collecting lens group is led to
Cross the optical fiber in optical fiber flange and connect spectrogrph；The conical surface of target spot Precise Position System is provided with for sample room
The LED illumination lamp of intraoral illumination；It is additionally provided with the environment for manufacturing particular kind of environmental gas for sample surfaces
Gas nozzle.
The LIBS elemental analyser of described accurate target spot location, its top, described sample room
Being connected with target spot Precise Position System, coupling part is with seal with elastometic washer, and sample room is provided with prevents with laser wavelength
Being used for sending of protecting lens takes sample window；It is provided with in its underpart and places the automatically controlled displacement platform of three-dimensional analyzing sample, with
Realize the three dimensions accurate scan of sample.
The using method of the LIBS elemental analyser of a kind of accurate target spot location, the steps include:
First when instrument is installed, initial setting up three collimation semiconductor laser collimated laser beam focuses on
Analyze sample surfaces same point, and this point is on target spot positioning base axis, and range pulse laser beam focus
Lens distance is the focal length of lens；The hot spot of technical grade camera head CCD collection analysis alignment laser, it is judged that
Whether three laser beams, in same point, if camera head CCD only observes a hot spot, are i.e. analyzed at sample
In pulse laser focal point, analysis can be measured, if camera head CCD observes three hot spots,
Then explanation sample is not at laser spot, i.e. stops measuring, and controls lifting platform and move until observing one
Till hot spot, the most i.e. determine that the coupling of laser spot, optical fiber is pointed to target spot and overlapped, LIBS spectrum survey can be carried out
Amount and analysis, and the spectral signal that can have obtained.
Owing to the design uses three beams quasiconductor collimated laser beam, therefore irregular sample target spot can be positioned, reduce
LIBS analyzes requirement to sample flatness, and, with the semiconductor laser of condenser lens through the most excellent
After change, its focal spot can reach micron dimension, and technical grade CCD after optical system imaging resolution up to micron
Magnitude, therefore, this system location has the highest precision.
Beneficial effects of the present invention:
1) a whole set of LIBS analyser is made up of independent laser system, light-conducting system, alignment system and sample room,
Both can use as an equipment, it is also possible to the lasing light emitter changing different parameters easily uses, or not
Use sample room directly to original position sample analysis, extend the range of application of this analyser, promote the reality of instrument
With change, commercialization.
2) combine the confocal location of three beams semiconductor laser, the LIBS target spot of ccd image acquisition analysis system is accurately determined
Position system can realize three-dimensional micron dimension location, and the automatic correction of target spot, improves analyser
Precision of analysis measured by device, promotes the sensitivity of Instrumental Analysis element.
3) integration optic path, be accurately positioned, laser focusing and the design of spectra collection system so that should
LIBS analytical tool is more firm, reliable, and reduces instrument operator operating experience, safeguards and adjust
The requirement of joint technology, makes instrument be prone to be widely popularized.
4) by CCD to the imaging of target material and hand drawing, target sample element spatial distribution can be realized and measure；
5) Binding experiment room achievement in research, adds the environmental gas nozzle coaxial with target center, can create various gas
Environment, enhanced spectrum signal, raising spectral line signal to noise ratio and removal the atmospheric background interference etc., section can be met
Learn Research Requirements and special industry application demand.
Accompanying drawing illustrates:
Fig. 1 typical case's LIBS device principle schematic；
The structural representation of Fig. 2 present invention；
The master of the target spot Precise Position System embodiment 1 of Fig. 3 present invention regards generalized section；
Target spot Precise Position System embodiment 1 elevational schematic view of Fig. 4 present invention；
The sample room of Fig. 5 present invention is main regarding generalized section；
The sample room schematic top plan view of Fig. 6 present invention；
The schematic front view of the target spot Precise Position System embodiment 3 of Fig. 7 present invention；
Target spot Precise Position System embodiment 3 elevational schematic view of Fig. 8 present invention；
The testing process schematic diagram of Fig. 9 present invention.
In figure: 1 pulse laser；2 transmission laser systems；3LIBS target spot Precise Position System；4 samples
Room；5 Transmission Fibers；6 spectrogrphs；7 ultraviolet quartz rectangular prisms；8 pulse laser beams；9 laser beam expandings
Collimation lens set；10 laser focusing ultraviolet quartz lenss；11 condenser lens placing chambers；12 characteristic wavelengths are complete
Reflecting mirror；13 spectral collection coupled lens groups；14 optical fiber flange；15 fiber coupler placing chambers；16 targets
Point location technical grade CCD；17 environmental gas nozzles；18 three-dimensional precise Electrocontrolled sample platforms；19 analyze sample
Product；20 plasma plumes；21 target spot location semiconductor lasers；22 LED light source for illuminating；23 bands swash
The sample window of optical band protective window；24 sample room main body frames；25 pulse valves.
Detailed description of the invention
It is described in further detail below in conjunction with the preferred example shown in accompanying drawing:
Embodiment 1: see Fig. 2, the LIBS elemental analyser that a kind of accurate target spot positions, its
It is mainly characterized by and includes pulse laser 1, by transmission laser system 2, laser beam is transmitted to sample room 4
On interior analysis sample 19, target spot Precise Position System 3 is located on sample room 4, target spot Precise Position System
3 are connected with spectrogrph 6 by Transmission Fibers 5.Spectrogrph uses commercial fiber spectrometer or is furnished with picture
The middle echelle spectrometer of intensified CCD detector.
The described pulse laser system 1 in LIBS analytical equipment generally uses Nd:YAG commercial lasers to produce
Product, output pulse width is nanosecond order, has fixed wave length and frequency-doubled wavelength output, according to different experiments need
Want, also can be selected for psec, fs-laser system etc..
Described transmission laser system 2 includes and is provided with the first laser expansion in the transmission channel of pulse laser beam 8
Bundle collimation lens set concavees lens 9-1, ultraviolet quartz rectangular prism 7 and the second laser bundle-enlarging collimation battery of lens convex lens
Mirror 9-2, is provided with laser focusing ultraviolet quartz lens 10 in condenser lens placing chamber 11, pacifies at condenser lens
Putting and be additionally provided with characteristic wavelength completely reflecting mirror 12 outside chamber 11, it is accurate that pulse laser beam 8 passes sequentially through the first laser beam expanding
In concavees lens 9-1, ultraviolet quartz rectangular prism 7 and the second laser bundle-enlarging collimation battery of lens in straight battery of lens
Convex lens 9-2 and laser focusing ultraviolet quartz lens 10 are radiated at after being reflected by characteristic wavelength completely reflecting mirror 12 point
On analysis sample 19.Pulse laser system 1 is provided with laser focusing purple owing to using in condenser lens placing chamber 11
Outer quartz lens 10 designs, thus can according to different experiments needs, be easily replaced psec, femtosecond swash
The other light sources systems such as light.
Seeing that Fig. 3 and Fig. 4, described target spot Precise Position System 3 include internal is cylinder for taper, outside
The metab 3-1 of shape, is provided with camera head CCD16 at the center of metab 3-1, and at metab
The conical surface of 3-1 is provided with the quasiconductor alignment laser 21 of three bands focusing, launches collimated laser beam and focuses on point
Analysis sample 19 surface same point, and this is on the axis placing analysis sample 19 positioning base 18, and
Range pulse laser beam focusing lens 10 is apart from for focal length；Plasma spectrometry collecting lens group 13 is arranged on light
In fine bonder placing chamber 15, the lens centre of plasma spectrometry collecting lens group 13 is swashed with quasiconductor collimation
The light device 21 position on the conical surface is concentric, and focus point is for analyzing sample 19 surface；Plasma spectrometry passes through
The optical fiber 5 that battery of lens 13 focuses in optical fiber flange 14 connects spectrogrph 6.Metab 3-1 is provided with ring
Border gas nozzle 17 points to target sample surfaces gaseous environment needed for creating；It is additionally provided with on metab 3-1
Lighting source LED.
See that Fig. 5 and Fig. 6, described its top, sample room 4 are provided with to match with alignment system base 3-1 size
Circular interface, can be connected with target spot Precise Position System 3, sample room is uncovered, and coupling part is with rubber ring
24-1 seals, and sample room 4 is provided with the window 23 with laser wavelength protection glass, is used for sending and takes sample；?
Its underpart is provided with places the automatically controlled displacement platform of three-dimensional 18 analyzing sample 19, and analyzed sample is placed on three-dimensional automatically controlled
On displacement platform 18, to realize the three dimensions accurate scan of sample.
Owing to the automatically controlled accurate translation stage precision of three-dimensional is up to nano level, and laser focal spot size is in micron dimension,
Obtained by CCD16 and analyze sample topography, and after manually drawing scanning track, unit can be realized in target sample
The analysis of element spatial distribution.
The LIBS elemental analyser of accurate target spot of the present invention location, it is accurately positioned survey
Amount principle is that three collimation semiconductor laser collimated laser beams focus on analysis sample surfaces same point,
And this point is on target spot positioning base axis, target spot range pulse laser beam focusing lens 10 distance with thoroughly
Mirror focal length mates；The hot spot of technical grade CCD16 collection analysis alignment laser 21, it is judged that three laser beams
Whether in same point, if CCD only observes a hot spot, analysis can be measured, if CCD sees
Measure three hot spots, then explanation sample is not at laser spot, i.e. controls three-dimensional electronic control translation stage correction sample
Position is till observing a hot spot；Owing to the design uses three beams quasiconductor collimated laser beam, therefore can determine
The irregular sample target spot in position, reduces LIBS and analyzes the requirement to sample flatness, and, with focusing on thoroughly
The semiconductor laser of mirror its focal spot after carefully optimizing can reach micron dimension, and technical grade CCD is through optics
After system imaging, resolution is up to micron dimension, and therefore, this system location has the highest precision.
The described transmission laser system 2 in LIBS analytical equipment, anti-including be made up of ultraviolet quartz prism
Penetrate mirror 7, there is the beam-expanding system 9 of Galilean telescope structure, two pieces of lens 9-1 of this telescopic system and
9-2 is distributed in the both sides of a quartz rectangular prism 7, can shorten the length requirement to two sections of light-conducting arms, make
Obtain device compacter.
During use, laser beam 8 enters Laser Transmission after light-conducting arm back warp battery of lens 9 expands from 3-1 lateral wall
Passage, and be focused through embedding the quartz lens 10 in condenser lens placing chamber 11, focusing lens positions profit
Regulate with screw thread snap ring；Laser beam after focusing irradiates after being reflected by the high reflective mirror 12 being arranged on bottom conical seat
On the surface analyzing sample 19, form plasma plume 20；Lens are to sample surfaces distance and the focal length of lens one
Cause；Cone bearing center mounting industrial level CCD16, is used for shooting laser target spot luminescence of plasma figure
Picture, semiconductor laser hot spot and sample topography etc.；See Fig. 4, be symmetrically installed the half of 3 band focusing at the conical surface
Conductor alignment laser 21, forms micron order hot spot and is irradiated in point after three alignment laser line focus optimizations
Analysis sample surfaces same position；Plasma spectrometry collecting lens group 13 is installed in fiber coupler placing chamber
In 15, lens centre is concentric with three beams semiconductor laser position on the conical surface, and is accurately directed to target spot, thoroughly
Mirror group by plasma spectrometry collect focus on after by the fiber-optic transfer being connected in optical fiber flange 14 to spectrogrph 6
Inside it is analyzed；Owing to plasma light spectrum signal has different Evolutions under varying environment gas, this
Being also provided with environmental gas nozzle 17 on the annulus of semiconductor laser position in system, its direction is also accurately directed to
Target spot；Additionally, in order to place, sample is convenient and CCD can clearly obtain sample topography photo, at this is
System is provided with LED illumination lamp 22.
In described LIBS analytical equipment, the sequential before laser instrument, spectrogrph and CCD is typically by maturation
Pulse delay signal device, such as DG535, DG645 of U.S. Stamford accurately controls, it is also possible to voluntarily
Design and Machining, its control accuracy was better than for 1 nanosecond.The business spectrogrph that LIBS equipment is conventional is also generally all furnished with
Laser instrument triggers signaling module, and utilizes software to carry out control time delay, accordingly it is also possible to soft by spectrogrph
Part realizes the timing synchronization between each hardware in delay.
The test process of the present invention, is passed through as ablative light sources, laser beam by compact Nd:YAG laser instrument 1
A pair ultraviolet quartz prism 9 transmits, and after being focused on by ultraviolet quartz lens 10, is radiated at analysis sample 19
Surface, sample is fixed on three-dimensional electronic control translation stage 18, and according to setting track mobile example.Three beams is by half
The laser beam irradiation of conductor laser 21 output hot spot on sample surfaces is gathered by CCD16, and judgement is
It is no that by controlling precise electric control lifting platform, to three beams of laser Shu Tongxin, i.e. target spot has positioned with one heart,
Now, pulse laser beam is concentric with three beams location laser at sample surfaces hot spot, i.e. starts to measure.Sample simultaneously
In motor process, CCD continues to monitor three beams semiconductor laser hot spot, and controls motor correction position.
The plasma spectrometry produced by pulse laser ablation sample surfaces is by coupled lens group 13 coupled into optical fibres 5 also
Input spectrum instrument 6 is analyzed.Time delay before spectrogrph and laser instrument and CCD is by pulse signal
SRS company of the delayer DG645(U.S.) accurately control.
Embodiment 2: a kind of accurate target spot location LIBS elemental analyser, be used in mineral,
The irregular sample analysis such as rock, structure is same as in Example 1, except for the difference that uses portable power source, does not uses
Sample room, is directly directed at laser beam foucing field target sample and measures and analyze element therein.
Generally LIBS spectrum analysis is very sensitive for laser power density, therefore, and the flatness of sample surfaces
Can LIBS analysis result have a great impact.For undressed ore sample etc., its surface is the most uneven
Whole, if optical fiber can not carefully be focused and optimize collect coupling, it is likely that any signal can not detected.But
Use the present invention with target spot pinpoint LIBS analyser, owing to 3 may determine that a plane,
And this three beams of laser has focus and collects coupled lens group conllinear with optical fiber, therefore for irregular ore sample
Deng, crossing as long as adjusting three beams location laser, getting final product fine coupling spectrum collection system and obtaining optimized light
Spectrum signal.
Embodiment 3: the LIBS elemental analyser of a kind of accurate target spot location, swashs under vacuum
Light mass spectrum or spectrum analysis.See that Fig. 7 and Fig. 8, described CCD camera system 16 are located at metab 3-1
The conical surface on, be tightly connected mode with vacuum and pulse valve 25 be located at the center of metab 3-1；Select simultaneously
With stainless steel material locating and machining base 31, and at its cylinder end face processing method orchid edge of a knife, true with being intended being connected
Cavities seals docks.The present invention accurate target spot alignment system i.e. can be used for the laser ablation mass spectrum under vacuum condition,
Spectrum analysis positions, and can realize outside vacuum chamber the function such as mass spectral analysis in sample ablation, vacuum chamber in situ.
Remaining structure is same as in Example 1.
The LIBS elemental analyser of 4 one kinds of accurate target spot location of embodiment, element spatial distribution is surveyed
Amount.Structure is same as in Example 1.Except for the difference that
On the automatically controlled displacement platform of three-dimensional of automatically controlled accurate lifting platform composition, accurately sweep realizing the three dimensions of sample
Retouch.Owing to the automatically controlled accurate translation stage precision of three-dimensional is up to nano level, and laser focal spot size is in micron dimension,
Obtained by CCD16 and analyze sample topography, and manually sweep according to CCD gathered image rendering electronic control translation stage
After retouching track, translation stage control program read (CP read) move after taking track data, spectral instrument collection analysis LIBS simultaneously
Spectral signal, can obtain the constituent content information of specific region by intensity analysis.Sweeping by zones of different
Retouching, this system can realize the analysis of element spatial distribution in target sample.
Embodiment 5: see Fig. 9, making of the LIBS elemental analyser of a kind of accurate target spot location
By method, it mainly comprises the following steps:
First when instrument is installed, initial setting up three collimation semiconductor laser collimated laser beam focuses on
Analyze sample surfaces same point, and this point is on target spot positioning base axis, and range pulse laser beam focus
Lens 10 are apart from for the focal length of lens；The hot spot of technical grade CCD16 collection analysis alignment laser 21, it is judged that
Whether three laser beams are in same point, if CCD only observes that a hot spot, i.e. analysis sample are in pulse and swash
At optical focus, can measure analysis, if CCD observes three hot spots, then explanation sample is not in
At laser spot, i.e. stop measuring, and control lifting platform and move till observing a hot spot.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all essences in the present invention
Within god and principle, any modification, equivalent substitution and improvement etc. made, should be included in the protection of the present invention
Within the scope of.
Claims (3)
1. the LIBS elemental analyser of an accurate target spot location, it is characterized in that including on the analysis sample that laser beam is transmitted in sample room by transmission laser system by pulse laser, target spot Precise Position System is located on sample room, and target electromagnetic radiation spectrum is connected with spectrogrph by the Transmission Fibers being fixed on target spot Precise Position System；Described transmission laser system includes and is provided with the concavees lens in the first laser bundle-enlarging collimation battery of lens on the passage of pulse laser beam transmission, convex lens in ultraviolet quartz rectangular prism and the second laser bundle-enlarging collimation battery of lens, laser focusing ultraviolet quartz lens it is provided with in condenser lens placing chamber, characteristic wavelength completely reflecting mirror it is additionally provided with outside condenser lens placing chamber, pulse laser beam passes sequentially through the concavees lens in the first laser bundle-enlarging collimation battery of lens, convex lens and laser focusing ultraviolet quartz lens in ultraviolet quartz rectangular prism and the second laser bundle-enlarging collimation battery of lens are radiated on analysis sample by after the reflection of characteristic wavelength completely reflecting mirror；Described target spot Precise Position System includes internal for taper, the outside metab for cylinder, it is provided with camera head CCD at the center of metab, and on the conical surface of metab, it is provided with the quasiconductor alignment laser of three band focusing, launch collimated laser beam and focus on analysis sample surfaces same point, and this is on the axis placing the positioning table analyzing sample, and range pulse laser beam focusing lens distance is focal length；Plasma spectrometry collecting lens group is arranged in fiber coupler placing chamber, and the lens centre of plasma spectrometry collecting lens group is concentric with quasiconductor alignment laser position on the conical surface, and focus point is on the surface analyzing sample；Plasma spectrometry collecting lens group connects spectrogrph by the optical fiber in optical fiber flange；The conical surface of target spot Precise Position System is provided with the LED illumination lamp for sample room intraoral illumination；It is additionally provided with the environmental gas nozzle for manufacturing particular kind of environmental gas for sample surfaces.
2. the LIBS elemental analyser of accurately target spot location as claimed in claim 1, it is characterized in that its top, described sample room is connected with target spot Precise Position System, coupling part is with seal with elastometic washer, and sample room is provided with and takes sample window with laser wavelength protection glass for sending；It is provided with in its underpart and places the automatically controlled displacement platform of three-dimensional analyzing sample, to realize the three dimensions accurate scan of sample.
The using method of the LIBS elemental analyser of a kind of accurate target spot the most as claimed in claim 1 or 2 location, the steps include:
First when instrument is installed, initial setting up three collimation semiconductor laser collimated laser beam focuses on analysis sample surfaces same point, and this point is on target spot positioning base axis, and range pulse laser beam focusing lens distance is the focal length of lens；The hot spot of technical grade camera head CCD collection analysis alignment laser, judge that whether three laser beams are in same point, if camera head CCD only observes a hot spot, i.e. analyze sample and be in pulse laser focal point, analysis can be measured, if camera head CCD observes three hot spots, then explanation sample is not at laser spot, i.e. stop measuring, and control lifting platform and move till observing a hot spot, now, i.e. determine laser spot, optical fiber coupling is pointed to target spot and is overlapped, LIBS spectral measurement and analysis can be carried out, and the spectral signal that can have obtained.
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| CN201410107046.3A CN103900998B (en) | 2014-03-21 | The LIBS elemental analyser of accurate target spot location and method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410107046.3A CN103900998B (en) | 2014-03-21 | The LIBS elemental analyser of accurate target spot location and method thereof |
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| CN103900998A CN103900998A (en) | 2014-07-02 |
| CN103900998B true CN103900998B (en) | 2016-11-30 |
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