CN104374695A - Telescoping focusing collection system and method for LIBS remote detection - Google Patents

Telescoping focusing collection system and method for LIBS remote detection Download PDF

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Publication number
CN104374695A
CN104374695A CN201310354583.3A CN201310354583A CN104374695A CN 104374695 A CN104374695 A CN 104374695A CN 201310354583 A CN201310354583 A CN 201310354583A CN 104374695 A CN104374695 A CN 104374695A
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China
Prior art keywords
laser
focusing
mirror
libs
plasma
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Pending
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CN201310354583.3A
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Chinese (zh)
Inventor
孙兰香
辛勇
丛智博
齐立峰
李洋
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Shenyang Institute of Automation of CAS
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Shenyang Institute of Automation of CAS
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Priority to CN201310354583.3A priority Critical patent/CN104374695A/en
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Pending legal-status Critical Current

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Abstract

The present invention relates to a telescoping focusing collection system and a method for LIBS remote detection. According to the telescoping focusing collection system, a laser primary beam expanding system is coaxially arranged in the emitting direction of a laser generation device, a reflection system is arranged in the emitting direction of the laser primary beam expanding system, a telescoping system is coaxially arranged on one side in the laser emitting direction of the reflection system, an optical fiber coupling system is arranged on the other side of the reflection system, the optical fiber coupling system and the telescoping system are arranged coaxially, and optical fibers are arranged on the convergence focus point position of the optical fiber coupling system. With the system and the method, the laser can focus at different distances, the focused light spot is less than 1 mm, it can be ensured that the high temperature and high density plasma can be excited on the surface of the detected object, it can be ensured that the focusing light path and the collecting light path are coaxially arranged, the optimization of the focusing and the collecting at different distances is controlled with the minimum adjustment amount, and it is ensured that the wide wave band spectrum signals can be coupled into the optical fiber core diameter at different distances.

Description

A kind of focusing collector system and method for looking in the distance for LIBS remote probe
Technical field
The present invention relates to optical design arts, particularly a kind of focusing collector system and method for looking in the distance for LIBS remote probe.
Background technology
LIBS, be called for short LIBS technology, its ultimate principle is that a branch of high-octane laser produces high temperature, highdensity plasma after lens focus, the component concentration of sample is detected by the characteristic spectral line analyzed in plasma spectrometry, because it has without the need to sample preparation, can measure multiple element, can survey the advantages such as solid, liquid, gas and contactless, Quick Measurement simultaneously, be very suitable for online, real-time, contactless analysis, be now widely used in all trades and professions such as metallurgy, environment, archaeology, deep-sea, space.
The development of current LIBS technology develops into remote measurement gradually by close-in measurement, just need to utilize LIBS technology to carry out telemeasurement as under the environment that cannot arrive the people such as hazardous environment, overhanging cliff, space deep-sea of high temperature, high radiation, and along with the change of measured object, measuring distance also changes accordingly, current LIBS system or simultaneously at different distance focusing collector, can not can not meet the analysis to measure under different distance; Or focusing system is separated with collection system, such optical system is compact not, is not easy to regulate, thus current LIBS system be not suitable for LIBS be applied to unknown remote under analysis to measure.
Summary of the invention
For the deficiencies in the prior art, the invention provides a kind of laser that can make to focus under different distances, and make focal beam spot be less than 1mm, ensure that it inspires high temperature, highdensity plasma in the surface energy of measured object, ensure focused light passages simultaneously and collect light path coaxial, control the optimization of focusing under different distance and collection with minimum adjustment amount, also need the focusing collector system and method for looking in the distance ensureing broadband spectral signal to be focused under different distances in optical fiber core diameter.
The technical scheme that the present invention is adopted for achieving the above object is: a kind of focusing collector system of looking in the distance for LIBS remote probe, and the elementary beam-expanding system 2 of laser is coaxially arranged at the exit direction of generating device of laser 1, for expanding laser; Reflecting system is arranged at the laser emitting direction of the elementary beam-expanding system 2 of laser, for being imported in telescopic system by laser, and plasma 7 is imported fiber coupling system 8; Telescopic system is coaxially arranged at the side, laser emitting direction of reflecting system, for expanding focusing to laser, and collects the plasma 7 of Laser Focusing to the generation of measured object surface; Fiber coupling system 8, at the opposite side of reflecting system, is coaxially arranged with telescopic system, and arranges optical fiber 9 at the focused spot place of fiber coupling system 8.
The elementary beam-expanding system 2 of described laser comprises coaxial the first double-concave negative lens 10, first meniscus lens 11 and the first biconvex positive lens 12 arranged successively, and the shoot laser of described first biconvex positive lens 12 is parallel with optical axis.
The catoptron 3 that the optical axis that described reflecting system comprises beam-expanding system 2 elementary with laser becomes miter angle to arrange and dichroic mirror 4;
The center of described catoptron 3 and dichroic mirror 4 respectively with laser elementary beam-expanding system 2 and telescopic system coaxial, and the line of centres is perpendicular to the optical axis of elementary beam-expanding system 2.
The primary mirror 5 that the laser emitting direction that described telescopic system is included in dichroic mirror 4 is coaxially arranged successively and secondary mirror 6.
Described primary mirror 5 is concave spherical mirror, and center drilling; Described secondary mirror 6 is can at the convex aspheric surface mirror of optical axis direction movement.
Described fiber coupling system is included in the second biconvex positive lens 13, second double-concave negative lens 14, the 3rd biconvex positive lens 15 and the second meniscus lens 16 that are coaxially arranged successively by the exit direction of the plasma 7 of dichroic mirror 4.
A kind of focusing collector method of looking in the distance for LIBS remote probe, generating device of laser 1 sends laser beam, the elementary beam-expanding system 2 of laser receives and is carried out by laser beam after first time expands, and through the reflection of catoptron 3 and dichroic mirror 4, and is irradiated to secondary mirror 6 by the center pit of primary mirror 5; Laser beam to expand on back reflection to primary mirror 5 secondary reflection again through secondary mirror 6, the laser beam focusing reflected by primary mirror 5, produces plasma 7; Plasma 7, after primary mirror 5 is collected, reflexes to secondary mirror 6 secondary reflection again, and by being transferred to fiber coupling system 8 after dichroic mirror 4; Plasma 7 is by being coupled in optical fiber 9 after fiber coupling system 8, plasma 7 is transferred in spectrometer and carries out a point photodetection by optical fiber 9, obtains the spectrogram containing measured object component concentration information.
The present invention has following beneficial effect and advantage:
1. can focus on laser under different distance, and focal beam spot is less than 1mm, ensure that and inspire high temperature, highdensity plasma in measured object surface energy;
2. focused light passages and collect light path be coaxial configuration, make system compacter, be more prone to regulate;
3. telescopic system is namely as a part for laser focusing system, again as a part for spectral signal collection system, ensure that only needing mobile secondary mirror to realize under Laser Focusing and spectral signal are collected in different distance can optimize simultaneously, substantially reduces the optimization time;
4. broadband flashlight all can be coupled in optical fiber core diameter under different distance.
Accompanying drawing explanation
Fig. 1 is general structure schematic diagram of the present invention;
Fig. 2 is the optical texture schematic diagram of the elementary beam-expanding system of laser of the present invention;
Fig. 3 is the optical texture schematic diagram of collection system of the present invention;
Fig. 4 is the geometry disc of confusion schematic diagram that laser focuses at 5m place after native system;
Fig. 5 is that the spectral signal outside 5m collects the geometry disc of confusion schematic diagram focused on through native system;
Wherein, 1 is generating device of laser, and 2 is the elementary beam-expanding system of laser, 3 is catoptron, and 4 is dichroic mirror, and 5 is primary mirror, 6 is secondary mirror, and 7 is plasma, and 8 is fiber coupling system, 9 is optical fiber, and 10 is the first double-concave negative lens, and 11 is the first meniscus lens, 12 is the first biconvex positive lens, and 13 is the second biconvex positive lens, and 14 is the second double-concave negative lens, 15 is the 3rd biconvex positive lens, and 16 is the second meniscus lens.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in further detail.
Be illustrated in figure 1 general structure schematic diagram of the present invention, the invention provides a kind of focusing collector system of looking in the distance for LIBS remote probe, wherein: generating device of laser 1 sends laser beam, the elementary beam-expanding system 2 of laser receives and is carried out by laser beam after first time expands, through the reflection of catoptron 3 and dichroic mirror 4, and be irradiated to secondary mirror 6 by the center pit of primary mirror 5;
Laser beam to expand on loose back reflection to primary mirror 5 secondary reflection again through secondary mirror 6, the laser beam focusing reflected by primary mirror 5, produces plasma 7;
Plasma 7 is transferred to after primary mirror 5 is collected, and reflexes to secondary mirror 6 secondary reflection again, and collects fiber coupling system 8 by being transferred to after dichroic mirror 4;
Plasma 7 is coupled in optical fiber 9 by collecting rear focusing of fiber coupling system 8, and plasma 7 is transferred to by carrying out light-splitting processing analysis detection in spectrometer by optical fiber 9, finally obtains the spectrogram containing measured object component concentration information.
Not only telescopic system, as a part for laser focusing system but also the part as plasma spectrometry signal collection system, adds that the cooperation of dichroic mirror 4 ensure that Laser Focusing light path and plasma spectrometry signal collection light path are coaxial configuration.Ensure that and only need mobile secondary mirror 6 can realize Laser Focusing and plasma spectrometry signal collection can be optimized under different distance simultaneously.
Fiber coupling system 8 can reduce spherical aberration in its system and aberration, and ensureing can by broadband plasma spectrometry signal coupling in optical fiber core diameter under different distances.
Be illustrated in figure 2 the structural representation of the elementary beam-expanding system of laser of the present invention, comprise and the first double-concave negative lens 10, first meniscus lens 11 and the first biconvex positive lens 12 is coaxially set successively, make the shoot laser of the first biconvex positive lens 2 parallel with optical axis.
Laser after lens 10 spread, then collimates through lens 11 and 12, and eyeglass all plates anti-reflection film, notes the putting position of eyeglass, prevents ghost point from breaking eyeglass.
Be illustrated in figure 3 the structural representation of fiber coupling system of the present invention, the second biconvex positive lens 13, second double-concave negative lens 14 that the plasma light spectrum signal exit direction being included in dichroic mirror is coaxially arranged successively, the 3rd biconvex positive lens 15 and the second meniscus lens 16.
Broadband plasma light spectrum signal can produce various aberration through lens focus, as spherical aberration, aberration etc., adopts many arrangements of mirrors sheet and adopt different materials to cut down various aberration in design.
Be example at 5m place focusing collector with laser (1064nm, spot diameter 8mm) after focusing collector optical system of looking in the distance, its embodiment is as follows:
First after laser is irradiated to the elementary beam-expanding system of laser, after outgoing, hot spot becomes 27mm, through catoptron 3, laser is folded on dichroic mirror 4, dichroic mirror 4 reflects the laser light on the secondary mirror 6 in telescopic system, and laser expands through secondary mirror 6 and reflexes on primary mirror 5, and now laser facula becomes 120mm, when the spacing of primary mirror 5 and secondary mirror 6 is 112.03mm, primary mirror 5 is by the position of Laser Focusing to 5m distant place, and now Laser Focusing produces plasma 7, and focal beam spot is 324um.
Focus on the plasma light spectrum signal 7 produced to collect through telescopic system primary mirror 5, then secondary mirror 6 is reflexed to, the flashlight of less parallel light is reflected through secondary mirror 6, then through dichroic mirror 4, spectral signal is transferred in fiber coupling system 8, through fiber coupling system 8, spectral signal is coupled in optical fiber, now broadband spectral signal focal beam spot is 312um, and most energy can be coupled to optical fiber 9(core diameter 600um) in.
It is as follows by optical design software analog imaging quality:
Be illustrated in figure 4 the geometry disc of confusion schematic diagram that laser focuses at 5m place after native system, the geometry disc of confusion that focusing collector optical system of looking in the distance focuses at 5m place laser (1064nm), its RMS radius is 324um, meet the requirement that Laser Focusing hot spot is less than 1mm, thus ensure that laser goes out high temperature, highdensity plasma at the measured object surface excitation that 5m is far away.
The spectral signal be illustrated in figure 5 outside 5m collects the geometry disc of confusion schematic diagram focused on through native system, focusing collector optical system of looking in the distance collects the geometry disc of confusion focused at 5m place spectral signal (250nm-900nm), its RMS radius is 312um, ensure that most energy can be coupled to optical fiber 9(core diameter 600um) in
Focusing collector optical system of looking in the distance of the present invention is very suitable for the demand of LIBS remote probe, utilize this focusing collector optical system of looking in the distance, good focusing effect can be obtained, drastically increase the energy density at laser spot place, ensure that focus place can inspire high temperature, highdensity plasma, and can regulate due to this spacing of looking in the distance between primary mirror in focusing collector optical system and secondary mirror, so laser focus position can be changed neatly as required, this focusing collector optical system of looking in the distance ensure that focused light passages and collects light path is simultaneously coaxial configuration, only need change the position of secondary mirror, can be optimized focusing and collection under different distance simultaneously, substantially reduce the optimization time, and can under different distance, broadband spectral signal be all coupled in optical fiber core diameter, so this invention be suitable for very much LIBS be applied to unknown remote under analysis to measure.

Claims (7)

1., for a focusing collector system of looking in the distance for LIBS remote probe, it is characterized in that:
The elementary beam-expanding system of laser (2) is coaxially arranged at the exit direction of generating device of laser (1), for expanding laser;
Reflecting system is arranged at the laser emitting direction of the elementary beam-expanding system of laser (2), for being imported in telescopic system by laser, and plasma (7) is imported fiber coupling system (8);
Telescopic system is coaxially arranged at the side, laser emitting direction of reflecting system, for expanding focusing to laser, and collects the plasma (7) of Laser Focusing to the generation of measured object surface;
Fiber coupling system (8), at the opposite side of reflecting system, is coaxially arranged with telescopic system, and arranges optical fiber (9) at the focused spot place of fiber coupling system (8).
2. the focusing collector system of looking in the distance for LIBS remote probe according to claim 1, it is characterized in that: the elementary beam-expanding system of described laser (2) comprises coaxial the first double-concave negative lens (10), the first meniscus lens (11) and the first biconvex positive lens (12) arranged successively, and the shoot laser of described first biconvex positive lens (12) is parallel with optical axis.
3. the focusing collector system of looking in the distance for LIBS remote probe according to claim 1, is characterized in that: the catoptron (3) that the optical axis that described reflecting system comprises beam-expanding system (2) elementary with laser becomes miter angle to arrange and dichroic mirror (4);
The center of described catoptron (3) and dichroic mirror (4) respectively with laser elementary beam-expanding system (2) and telescopic system coaxial, and the line of centres is perpendicular to the optical axis of elementary beam-expanding system (2).
4. the focusing collector system of looking in the distance for LIBS remote probe according to claim 1 or 3, is characterized in that: the primary mirror (5) that the laser emitting direction that described telescopic system is included in dichroic mirror (4) is coaxially arranged successively and secondary mirror (6).
5. the focusing collector system of looking in the distance for LIBS remote probe according to claim 4, is characterized in that: described primary mirror (5) is concave spherical mirror, and center drilling; Described secondary mirror (6) is can at the convex aspheric surface mirror of optical axis direction movement.
6. the focusing collector system of looking in the distance for LIBS remote probe according to claim 1, is characterized in that: described fiber coupling system is included in the second biconvex positive lens (13), the second double-concave negative lens (14), the 3rd biconvex positive lens (15) and the second meniscus lens (16) that are coaxially arranged successively by the exit direction of the plasma (7) of dichroic mirror (4).
7., for a focusing collector method of looking in the distance for LIBS remote probe, it is characterized in that:
Generating device of laser (1) sends laser beam, the elementary beam-expanding system of laser (2) receives and is carried out by laser beam after first time expands, through the reflection of catoptron (3) and dichroic mirror (4), and be irradiated to secondary mirror (6) by the center pit of primary mirror (5);
Laser beam to expand on back reflection to primary mirror (5) secondary reflection again through secondary mirror (6), the laser beam focusing reflected by primary mirror (5), produces plasma (7);
Plasma (7), after primary mirror (5) is collected, reflexes to secondary mirror (6) secondary reflection again, and is transferred to fiber coupling system (8) by after dichroic mirror (4);
Plasma (7) is by being coupled in optical fiber (9) after fiber coupling system (8), plasma (7) is transferred in spectrometer and carries out a point photodetection by optical fiber (9), obtains the spectrogram containing measured object component concentration information.
CN201310354583.3A 2013-08-14 2013-08-14 Telescoping focusing collection system and method for LIBS remote detection Pending CN104374695A (en)

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Cited By (12)

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Publication number Priority date Publication date Assignee Title
CN105823771A (en) * 2016-06-06 2016-08-03 中国科学技术大学 LIBS contact type probe of high temperature resisting melt
CN106066323A (en) * 2016-06-06 2016-11-02 中国科学技术大学 A kind of no color differnece immersion molten metals detecting system
CN106124483A (en) * 2016-06-16 2016-11-16 中国科学院光电研究院 A kind of compact LIBS measures system
CN106706600A (en) * 2016-12-05 2017-05-24 华中科技大学 Remote LIBS (Laser-induced Breakdown Spectroscopy) test system with multi-probe optical signal collection unit
CN108114909A (en) * 2016-11-29 2018-06-05 中国科学院沈阳自动化研究所 A kind of old metal intelligence storting apparatus and method based on Libs systems
CN109196378A (en) * 2016-06-29 2019-01-11 苹果公司 Optical system for remote sensing receiver
CN109738420A (en) * 2019-01-29 2019-05-10 合肥金星机电科技发展有限公司 Laser detection system
CN110233446A (en) * 2019-07-12 2019-09-13 南京波长光电科技股份有限公司 A kind of high-resolution laser far-distance block removing system
CN110954527A (en) * 2019-12-11 2020-04-03 南京信息工程大学 Novel automatic detection system for floating atmospheric particulates
CN111399122A (en) * 2020-06-03 2020-07-10 北京中创为南京量子通信技术有限公司 Free space light beam receiving and transmitting telescopic system
CN111432544A (en) * 2020-04-01 2020-07-17 中国航空制造技术研究院 Combined laser plasma back-conduction system and method
CN112903801A (en) * 2021-01-27 2021-06-04 南开大学 Ion photodissociation method and device

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Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106066323A (en) * 2016-06-06 2016-11-02 中国科学技术大学 A kind of no color differnece immersion molten metals detecting system
CN105823771A (en) * 2016-06-06 2016-08-03 中国科学技术大学 LIBS contact type probe of high temperature resisting melt
CN105823771B (en) * 2016-06-06 2019-01-04 中国科学技术大学 A kind of LIBS contact probe of high temperature resistant melt
CN106124483B (en) * 2016-06-16 2019-06-18 中国科学院光电研究院 A kind of compact laser induced breakdown spectroscopy measuring system
CN106124483A (en) * 2016-06-16 2016-11-16 中国科学院光电研究院 A kind of compact LIBS measures system
CN109196378B (en) * 2016-06-29 2022-12-06 苹果公司 Optical system for remote sensing receiver
CN109196378A (en) * 2016-06-29 2019-01-11 苹果公司 Optical system for remote sensing receiver
CN108114909A (en) * 2016-11-29 2018-06-05 中国科学院沈阳自动化研究所 A kind of old metal intelligence storting apparatus and method based on Libs systems
CN108114909B (en) * 2016-11-29 2019-10-11 中国科学院沈阳自动化研究所 A kind of old metal intelligence storting apparatus and method based on Libs system
CN106706600B (en) * 2016-12-05 2019-07-09 华中科技大学 A kind of long-range LIBS test macro having Multi probe optical signal collector unit
CN106706600A (en) * 2016-12-05 2017-05-24 华中科技大学 Remote LIBS (Laser-induced Breakdown Spectroscopy) test system with multi-probe optical signal collection unit
CN109738420A (en) * 2019-01-29 2019-05-10 合肥金星机电科技发展有限公司 Laser detection system
CN110233446A (en) * 2019-07-12 2019-09-13 南京波长光电科技股份有限公司 A kind of high-resolution laser far-distance block removing system
CN110954527A (en) * 2019-12-11 2020-04-03 南京信息工程大学 Novel automatic detection system for floating atmospheric particulates
CN111432544A (en) * 2020-04-01 2020-07-17 中国航空制造技术研究院 Combined laser plasma back-conduction system and method
CN111399122A (en) * 2020-06-03 2020-07-10 北京中创为南京量子通信技术有限公司 Free space light beam receiving and transmitting telescopic system
CN111399122B (en) * 2020-06-03 2020-10-27 北京中创为南京量子通信技术有限公司 Free space light beam receiving and transmitting telescopic system
CN112903801A (en) * 2021-01-27 2021-06-04 南开大学 Ion photodissociation method and device

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Application publication date: 20150225