CN106706601A - Laser-induced breakdown fluorescence spectrum analysis system based on optical fiber waveguide cyclic excitation - Google Patents
Laser-induced breakdown fluorescence spectrum analysis system based on optical fiber waveguide cyclic excitation Download PDFInfo
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Abstract
本发明公开了基于光纤波导循环激发的激光诱导击穿荧光光谱分析系统，包括激光发生模块、共振激发模块和采集模块，激光发生模块包括激光全反镜、聚焦透镜和Nd：YAG激光器，激光全反镜与Nd：YAG激光器位于同一水平光路，聚焦透镜位于激光全反镜正下方；共振激发模块包括OPO激光器、多芯光纤、光纤输出整形模块和两个光纤耦合器，多芯光纤两输入端与两个光纤耦合器相连，输出端与光纤输出整形模块相连；采集模块包括光纤采集头、增强型CCD和计算机，光纤采集头一端对准样品烧蚀点，另一端通过光栅光谱仪与增强型CCD相连，增强型CCD与计算机相连。本系统结构简单，可提高共振激发的增强效果，从而提高LIBS的检测极限。
The invention discloses a laser-induced breakdown fluorescence spectrum analysis system based on fiber waveguide cyclic excitation, which includes a laser generation module, a resonance excitation module and an acquisition module. The laser generation module includes a laser total reflection mirror, a focusing lens and an Nd:YAG laser. The mirror and the Nd:YAG laser are located in the same horizontal optical path, and the focusing lens is located directly below the laser mirror; the resonance excitation module includes an OPO laser, a multi-core fiber, a fiber output shaping module, two fiber couplers, and two input ports of the multi-core fiber It is connected with two fiber optic couplers, and the output end is connected with the optical fiber output shaping module; the acquisition module includes an optical fiber acquisition head, an enhanced CCD and a computer. Connected, the enhanced CCD is connected with the computer. The system has a simple structure and can improve the enhancement effect of resonance excitation, thereby improving the detection limit of LIBS.
Description
Technical field
The invention belongs to plasma physics and spectrum analysis field, excited more particularly, to based on fibre-optic waveguide circulation
Laser-induced breakdown spectrofluorimetry system.
Background technology
Laser microprobe technology, i.e. LIBS (Laser-Induced breakdown
Spectroscopy, abbreviation LIBS), it is a kind of fast component analytical technology of great prospect, its principle is close using high power
Degree pulse laser ablation sample to be analysed surface, moment produces degree high temperature up to ten thousand, forms plasma, and plasma is cooled
Outside radiation feature spectrum in journey, by gather its characteristic spectrum just can analyze obtain sample to be analysed in heterogeneity and its
Content.Because there are LIBS n.s to pre-process, multielement simultaneously detect and can on-line checking the features such as, in recent years, the skill
Art obtains the very big concern of academic and industrial circle.However, LIBS is about to the detectable limit of most elements at present
10ppm, causes it to be difficult to meet micro, particularly trace element detection requirement.Therefore, the further wide of the technology is hindered
General application, particularly in the popularization and application in the field such as environmental protection and food security.
To improve the sensitivity of laser microprobe, the method for current main flow is that Laser Plasma Emission Spectrum is increased
By force, space constraint enhancing, magnetic confinement enhancing, microwave enhancing, dipulse enhancing, dipulse resonant excitation Enhancement Method are mainly included
Deng.These methods can to a certain extent strengthen the intensity of emission spectra of plasma, and the detection for improving laser microprobe is sensitive
Degree, wherein again the most notable with dipulse resonant excitation enhancing method effect.Chinese patent CN101782517A discloses a kind of base
In the component analyzer for laser probe micro-area of resonant excitation double laser light source, patent utilization the first beam laser ablation sample is produced
Plasma, then resonant excitation is carried out by the particle of element to be measured in the second beam tunable wave length laser plasma, from
And component spectrum intensity to be measured is improved tens of to hundreds times.In current existing document, using the double arteries and veins of above-mentioned tunable laser
Rush excitation technique, can farthest enhanced spectrum intensity, while typically the detectable limit of detected element can be brought up to
1ppm magnitudes.
However, huge to the market of trace element analysis in world wide at present, the detectable limit of 1ppm can not meet
The safety standards such as soil, food.By taking China as an example, the content according to China for heavy metal in most of grains and biological products
Standard, its GB content is general in below 1ppm.Therefore, LIBS is used for fast qualitative and the accurate quantitative analysis inspection of trace element
Survey field, there is provided one kind can further enhance LIBS technology spectral intensities, so that the system for improving its detectable limit is essential.
The content of the invention
For the disadvantages described above or Improvement requirement of prior art, excited based on fibre-optic waveguide circulation the invention provides one kind
Laser-induced breakdown spectrofluorimetry system, it passes through to recycle the tunable wave length based on optical parametric oscillator and swashs
The resonance laser of light device (OPO lasers) output, to increase the pulsewidth of resonance laser, realizes the thorough of trace element ground state particle
Excite, improve traditional dipulse resonance excitation technique, while improving laser microprobe to the detectivity of trace element and determining
Amount analysis precision, it is adaptable to the detection to trace heavy metals in grain and biological sample.
To achieve the above object, the present invention proposes a kind of laser-induced breakdown fluorescence excited based on fibre-optic waveguide circulation
Spectroscopic analysis system, it includes that laser occurs module, resonant excitation module and acquisition module, wherein：
The laser occurs module to be included laser total reflective mirror, condenser lens and makes sample to be analyzed for emission pulse laser
The Nd of product ablated surface：YAG laser, the laser total reflective mirror and the Nd：The light-emitting window of YAG laser is located at same level light
Lu Zhong, the condenser lens is vertical with the horizontal optical path with the line of laser total reflective mirror, and the underface of the condenser lens is set
There is the electricity driving displacement platform for placing sample to be analysed；
The resonant excitation module include OPO lasers, double-width grinding Single-end output broadband multi-core fiber and with it is described
The light-emitting window of OPO lasers is located at the first fiber coupler being arranged in order, optical fiber output sizing die in same level light path
Block and the second fiber coupler, two inputs of the double-width grinding Single-end output broadband multi-core fiber respectively with first optical fiber
Coupler and the second fiber coupler are connected, and output end is connected with the optical fiber output Shaping Module；
The acquisition module includes collecting fiber head, grating spectrograph, enhanced CCD and computer, the collecting fiber
One end of head is directed at the ablation point in the sample to be analysed, and the other end is by gathering optical fiber, grating spectrograph with the enhancing
Type CCD is connected, and the enhanced CCD is connected with the computer.
For traditional at present pulse and the not good problem of resonant excitation laser microprobe sensitivity, the invention provides upper
Technical scheme is stated, by recycling the resonance laser that OPO lasers are exported, the pulse that on the one hand can increase resonance laser is wide
Degree；On the other hand can plasma carry out lasting resonant excitation, to realize element ground state particle to be measured in plasma
Thoroughly excite, improve tunable laser utilization ratio, so as to greatly improve the double laser light source based on resonant excitation swash
The detectable limit of light probe.
As it is further preferred that the Nd：YAG laser (2) positioned at the top of OPO lasers, pacify by the OPO lasers
On optical table.
As it is further preferred that the laser total reflective mirror is fixed with condenser lens by fixed support.
Used as it is further preferred that the analysis system also includes digital delay pulse generator, it is used to controlling described
OPO lasers and Nd：Time delay between the shoot laser of YAG laser, while for controlling the enhanced CCD collections spectrum
Time delay.
Used as it is further preferred that the output waveband of the OPO lasers is in 200-400nm, pulse width is 5-10ns
Magnitude, commonly uses ultraviolet band laser energy in 0.5-10mJ, and laser repetition rate is 1-20Hz.
As it is further preferred that the grating spectrograph and enhanced CCD are gathered since the OPO lasers light extraction
Spectrum, until plasma cools down stopping collection completely, acquisition time is 20-1000ns magnitudes.
As it is further preferred that the double-width grinding Single-end output broadband multi-core fiber be used for laser circulation excite, its
Service band is ultraviolet to visible light wave range for 200nm-400nm's, fibre core number 8 cores and more than.
As it is further preferred that the broadband multi-core fiber is staggered structure, its two input B1, B2By multicore
Optical fiber is constituted, and for collecting resonance laser, its output terminals A is by input B1, B2Collect and form, and the fibre core of output terminals A is pressed
B1B2B1B2It is this to be mingled with pattern every one and be staggered.
As it is further preferred that it is described collection optical fiber input be M × N rectangular arrangeds, output end be longitudinal direction 1 × (M
× N) word order.
In general, possess following compared with prior art, mainly by the contemplated above technical scheme of the present invention
Technological merit：
1. the present invention conducts resonance laser using the optical fiber of double-width grinding Single-end output structure by first input end, and
In output end output, then in the resonance laser unnecessary with second input " recovery " of output end same straight line, will pass through
The resonance laser of plasma is collected again, and by output end, imports resonant excitation light path again, the structure can make it is a branch of can
Tuning laser is lasting in time domain to carry out resonant excitation to specific atoms, to recycle resonance laser, so as to be lifted adjustable
The utilization rate of humorous laser, is obviously improved the detectable limit of system, compared to traditional laser-induced breakdown fluorescence spectroscopy technique
Speech, the fluorescence time of the invention, to μ s magnitudes, greatly improves from 10ns magnitudes (OPO laser device lasers pulsewidth) maximum extension
The utilization rate of OPO laser, so as to improve single Nd：The fluorescence intensity that resonant excitation is produced after YAG laser ablations.
2. light path system of the invention devises the broadband multi-core fiber of staggered structure to ensure output end laser
Uniformity, first band optical fiber by the resonance laser of different wave length, can increase the versatility of the system；Secondly because resonance
Laser can cause, this optic fibre input end B uneven by the light distribution after plasma by plasma absorption1And B2By many
Core fibre is constituted, and for collecting resonance laser, output terminals A is by input B1And B2Collect and form, and fibre core presses B1B2B1B2It is this
It is mingled with pattern every one to be staggered, this staggered structure can believe first input end and the laser of the second input input
Number it is evenly distributed in output end face, it is ensured that by the uniformity of the tunable laser of heating region, and make plasma
By resonance laser all standing.
3. the present invention is spatially had uneven using the collection optical fiber with spatial resolving power due to plasma
The characteristic of distribution, the collection optical fiber that the system is designed is M × N rectangular arrangeds (space as needed for of M, N value here for input
Resolution ratio determines that M, N value more large space resolution ratio are higher, and the smaller spatial resolution of M, N value is lower), output end is longitudinal direction 1
× (M × N) word orders so that plasma is longitudinally split in output end, so that can be reciprocity under conditions of single acquisition
Gas ions carry out spatial discrimination research, obtain plasma fluorescent space distribution situation, the energy state of particle point in plasma
Guidance is made in the research of cloth.
Brief description of the drawings
Fig. 1 is the laser-induced breakdown spectrofluorimetry excited based on fibre-optic waveguide circulation provided in an embodiment of the present invention
The structural representation of system；
Fig. 2 is the structural representation of double-width grinding Single-end output broadband multi-core fiber；
Fig. 3 is collection fiber end face schematic diagram；
Fig. 4 swashs for conventional laser induced breakdown spectroscopy, tunable laser dipulse spectral technique and single cycle
Photoinduction punctures the spectrum comparison diagram of fluorescence spectroscopy technique.
Specific embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as additionally, technical characteristic involved in invention described below each implementation method
Not constituting conflict each other can just be mutually combined.
As shown in figure 1, the laser-induced breakdown fluorescence light excited based on fibre-optic waveguide circulation provided in an embodiment of the present invention
Spectral analysis system, it includes that laser occurs module, resonant excitation module and acquisition module, and wherein laser occurs module is used to produce
Plasma simultaneously makes sample to be analysed ablation, and resonant excitation module carries out resonant excitation for plasma, improves characteristic light
Spectral intensity, acquisition module is used to gather the characteristic spectrum signal that transition is produced after resonant excitation.By the phase of above-mentioned modules
Mutually coordinate, be capable of achieving the thorough utilization ratio for exciting, improving tunable laser of element ground state particle to be measured in plasma,
So as to greatly improve the detectable limit of the laser microprobe of the double laser light source based on resonant excitation.The system simple structure, can be with
The utilization ratio of the raising tunable wave length laser of geometry multiple, so as to improve the enhancing effect of resonant excitation, final raising is swashed
The detectable limit of photoinduction breakdown spectral technology (LIBS) so that LIBS technologies can be detected in grain security, biological heavy metal-polluted
The trace analysis fields such as dye are applied.
Below more specific detail will be one by one carried out to modules.
As shown in figure 1, laser occurs module includes laser total reflective mirror 4, condenser lens 8 and Nd：YAG laser 2, Nd：YAG
The Main Function of laser 2 is emission pulse laser produces plasma on the surface of sample to be analysed 7, and the plasma makes to treat point
Analyse the ablated surface of sample 7, the laser total reflective mirror 4 and Nd：The light-emitting window of YAG laser 2 is located in same level light path, is used for
By Nd：YAG laser reflects to vertically downward direction, and condenser lens 8 is located at the underface of laser total reflective mirror 4, for focusing on Nd：
YAG laser, it is vertical with horizontal optical path with the line of laser total reflective mirror 4, and the underface of the condenser lens 8 is provided with electricity driving displacement
Platform 6, the electricity driving displacement platform 6 is used to place sample to be analysed 7.Specifically, laser total reflective mirror 4 and condenser lens 8 are all by solid
Fixed rack 23 is fixed.During analysis test, Nd：The laser of the transmitting of YAG laser 2 reflects through laser total reflective mirror 4 successively, condenser lens
8 focus on, and eventually arrive at the surface of sample to be analysed 7, produce plasma.
As shown in figure 1, resonant excitation module include OPO lasers 1, double-width grinding Single-end output broadband multi-core fiber 10,
First fiber coupler 3, the fiber coupler 9 of optical fiber output Shaping Module 5 and second, wherein, OPO lasers 1 are based on optics
The Wavelength tunable laser of parametric oscillator (Optical Parametric Oscillator, abbreviation OPO), its effect master
If to Nd：The plasma that YAG laser 2 is inspired carries out resonant excitation, improves characteristic spectrum intensity, specifically, OPO swashs
Light device 1 is located at Nd：The lower section of YAG laser 2, it is arranged on optical table 22.And double-width grinding Single-end output broadband multicore
Optical fiber 10 is used for laser circulation and excites, and it carries out pulsewidth and widens in time domain to the resonance laser that OPO lasers 1 send so that
Single ablation plasma can further improve characteristic spectrum in the range of the longer time by the humidification of resonant excitation light
Intensity.First fiber coupler 3, the fiber coupler 9 of optical fiber output Shaping Module 5 and second are arranged in order, and swash with OPO
The light-emitting window of light device 1 be located at same level light path on, during work whole horizontal optical path by sample to be analysed 7 surface, it is double
Two inputs of end input Single-end output broadband multi-core fiber 10 respectively with the first fiber coupler 3 and the second fiber coupler 9
It is connected, output terminals A is connected with optical fiber output Shaping Module 5.
Specifically, as shown in Fig. 2 being friendship for the double-width grinding Single-end output broadband multi-core fiber 10 that laser circulation is excited
Wrong arrangement architecture, two input B1And B2Constituted by multi-core fiber, for collecting OPO laser (resonate laser), fibre core
Number 8 cores and more than, its output terminals A is by input B1, B2Collect and form, and the fibre core of output terminals A presses B1Fibre core, B2Fibre core, B1
Fibre core, B2Fibre core is this to be mingled with pattern and is staggered every one, and the service band of broadband multi-core fiber 10 is the purple of 200nm-400nm
Outward to visible light wave range, compared to single-core fiber, a plurality of core diameter of double-width grinding Single-end output broadband multi-core fiber 10 can be most
The laser that the uniform output terminals A of limits is exported, improves overall stability.
Further, fiber coupler and the horizontal positioned of OPO lasers 1, the laser wherein the first fiber coupler 3 will resonate
The first input end coupling that (by controlling the OPO crystal angle tunable lasers wavelength in OPO lasers) passes through multi-core fiber 10
Close into multi-core fiber 10, resonance laser by after the multi-core fiber 10 for laser temporal broadening again by the port of its output end
Output, after then passing through heating region, the multi-core fiber 10 for laser temporal broadening is entered through the second fiber coupler 9
The second input port, and exported by output end port again, by heating region, so repeatedly, until laser
Energy attenuation is to minimum.
Further, in 200-400nm, pulse width is 5-10ns magnitudes, laser energy to the output waveband of OPO lasers 1
In 0.5-10mJ, laser repetition rate is 1-20Hz；Optical fiber output Shaping Module 5 focuses on microscope group by a face beam expanding lens and one side
Into its Main Function is control resonance laser beam divergence, it is ensured that resonance laser just covers heating region.
As shown in figure 1, acquisition module include collecting fiber first 11, grating spectrograph 12, enhanced CCD13 (as ICCD,
It adds image intensifier in CCD camera front end, so as to obtain the ability of SECO and signal enhancing) and computer 14,
One end of collecting fiber first 11 is directed at Nd：Ablation point of the laser that YAG laser 2 sends on sample 7, the other end is passed sequentially through
Collection optical fiber 21, grating spectrograph 12 are connected with enhanced CCD13, and the enhanced CCD13 is connected with computer 14, and it passes through the
One coaxial cable 16 is realized communicating with computer 14.Wherein, the effect of grating spectrograph 12 is the plasma spectrum that will be collected
Signal resolves into the characteristic spectrum of different elements by optical grating diffraction；The effect of enhanced CCD13 is the door of control collection spectrum
Width, and photon to collecting carries out quantity multiplication.Computer 14 has been internally integrated spectral analysis software, laser control software
With displacement platform control software, with spectrum analysis, the function such as data processing, it is coaxial by the 5th with electricity driving displacement platform 6
Cable 20 is connected.Specifically, grating spectrograph 12 and enhanced CCD13, gather spectrum since the light extraction of OPO lasers 1, until
Plasma cools down stopping collection completely, and acquisition time is 20-1000ns magnitudes.
Specifically, the service band of the collection optical fiber 21 for gathering plasma emission spectroscopy is 190nm-800nm, its
Input fibre core is M × N rectangular arrangeds, and output end is 1 × (M × N) word order of longitudinal direction, for example, input fibre core is 2 × 3
Arrangement, output end is 1 × 6 arrangement, and compared to single-core fiber, this optical fiber can realize plasma space resolving acquisition.
Additionally, analysis system also include digital delay pulse generator 15, its respectively with Nd：YAG laser, OPO laser
Device and enhanced CCD communication connections, for controlling OPO lasers 1 and Nd：Time delay between the shoot laser of YAG laser 2,
Enhanced CCD13 is controlled to gather the time delay of spectrum simultaneously.Specifically, enhanced CCD13, Nd：YAG laser 2 and OPO lasers
1 respectively by the second coaxial cable 17, the coaxial cable 19 of triaxial cable 18 and the 4th and digital delay pulse generator 15
It is connected.
Below to the above-mentioned laser-induced breakdown spectrofluorimetry system excited based on fibre-optic waveguide circulation of the invention
Specific operation process be described in detail, its concrete operations is as follows：
(1) it is analysed to sample 7 first and polishes be positioned on electricity driving displacement platform 6, the height of regulation electricity driving displacement platform 6,
So that the light extraction that sample surfaces highly reach OPO lasers 1 is highly located；
(2) Nd is opened:YAG laser 2, OPO lasers 1, while according to element species in sample to be analysed, adjusting OPO
The output wavelength of laser 1；
(3) electricity driving displacement platform 6 is opened, motor pattern is set, it is ensured that be independent of each other between each ablation point；
(4) time delay of digital delay impulse generator 15 is set, when between two lasers of control and enhanced CCD13
Order relation, digital delay impulse generator 15 sends three trigger signals, and Nd is opened in triggering respectively in chronological order:YAG laser
2 light extractions, the light extraction of OPO lasers 1 and enhanced CCD13 collection spectrum；Nd:The reflected mirror of ablative laser that YAG laser 2 sends
4, plus lens 8 focuses on sample surfaces and produces plasma；The resonance laser that OPO lasers 1 send is by the first fiber coupling
Device 3 is coupled into the B1 ports of double-width grinding Single-end output broadband multi-core fiber 10, and defeated by the shaping of optical fiber output Shaping Module 5
Go out, be radiated on generation plasma, element-specific atomic resonance is excited, the laser of transmission is by the coupling of the second fiber coupler 9
The B2 ports of the broadband multi-core fiber 10 for entering double-width grinding Single-end output are closed, and again by the shaping of optical fiber output Shaping Module 5
Output, is radiated on generation plasma, and element-specific atomic resonance is excited, and such iterative cycles are repeatedly to same plasma
Body carries out resonant excitation；
(5) the characteristic spectrum signal that transition is produced after resonant excitation is collected through collecting fiber first 11 and enters optical fiber 21, afterwards
It is conducted into grating spectrograph 12 by grating beam splitting；
(6) optical signal after wavelength dispersion is acquired on enhanced CCD13 by the time delay and gate-width of setting, complete afterwards
Into photoelectric conversion, the electric signal output comprising spectral information is formed, gained signal passes to computer 14 by control cable 16；
(7) computer 14 is analyzed by spectral analysis software to the spectrum for collecting, and the result that will be obtained is scheming
Piece is exported.
Fig. 4 is that collection spectrum is right with common LIBS and LIBS-LIF system acquisitions spectrum after the system single time domain is superimposed
Than figure, spectral intensity is obviously improved when being as can be seen from the figure analyzed test using system of the invention.
In general, the present invention passes through to improve the light path of resonance laser and action of plasma, using the thing of resonant excitation
Reason principle, line broadening is entered in time domain to resonance laser, recycles resonance laser so that same plasma can be longer
Excited by resonance laser resonant in time range, be obviously improved the detectable limit of system, improve the enhancing effect of resonant excitation；
And using broadband multi-core fiber so that the versatility of system becomes strong, and ensure that the stability of tunable laser output, enhances
The performance of equipment, the guarantee of stability and the raising of spectral intensity enable laser microprobe technology in grain and biological products with much money
Category detection field is applied, and has promoted the range of application of laser microprobe technology.
As it will be easily appreciated by one skilled in the art that the foregoing is only presently preferred embodiments of the present invention, it is not used to
The limitation present invention, all any modification, equivalent and improvement made within the spirit and principles in the present invention etc., all should include
Within protection scope of the present invention.
Claims (9)
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107764794A (en) * | 2017-11-21 | 2018-03-06 | 江西农业大学 | Utilize the device of tunable resonance LIBS detection pork heavy metal distribution |
| CN109444111A (en) * | 2018-12-10 | 2019-03-08 | 西安交通大学 | A kind of optical fiber LIBS detection system and method for optional double pulse modes |
| CN114235517A (en) * | 2021-11-16 | 2022-03-25 | 北京科技大学 | A method for automatic removal of oxide layer by nine-point surround of samples in front of LIBS furnace |
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| CN101067603A (en) * | 2007-06-05 | 2007-11-07 | 华南理工大学 | Dual-channel resonance-enhanced laser-induced breakdown spectroscopy trace element analyzer and method |
| CN103512868A (en) * | 2013-09-10 | 2014-01-15 | 华中科技大学 | Micro-domain laser probe component analyzer based on optical fiber waveguide |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101067603A (en) * | 2007-06-05 | 2007-11-07 | 华南理工大学 | Dual-channel resonance-enhanced laser-induced breakdown spectroscopy trace element analyzer and method |
| CN103512868A (en) * | 2013-09-10 | 2014-01-15 | 华中科技大学 | Micro-domain laser probe component analyzer based on optical fiber waveguide |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107764794A (en) * | 2017-11-21 | 2018-03-06 | 江西农业大学 | Utilize the device of tunable resonance LIBS detection pork heavy metal distribution |
| CN109444111A (en) * | 2018-12-10 | 2019-03-08 | 西安交通大学 | A kind of optical fiber LIBS detection system and method for optional double pulse modes |
| CN114235517A (en) * | 2021-11-16 | 2022-03-25 | 北京科技大学 | A method for automatic removal of oxide layer by nine-point surround of samples in front of LIBS furnace |
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