CN108195300A - A kind of method of fibre-optical F-P sensor measuring strain - Google Patents
A kind of method of fibre-optical F-P sensor measuring strain Download PDFInfo
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- CN108195300A CN108195300A CN201711431760.8A CN201711431760A CN108195300A CN 108195300 A CN108195300 A CN 108195300A CN 201711431760 A CN201711431760 A CN 201711431760A CN 108195300 A CN108195300 A CN 108195300A
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- optical fiber
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/18—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge using photoelastic elements
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention provides a kind of method of optical fiber F P sensor measuring strains and includes：Optical fiber F P sensors are made, fiber clamp is fixed on high-precision three-dimensional motion platform, 1060 optical fiber of HI for removing removing coating is fixed on fiber clamp；Femtosecond laser sequentially passes through the half-wave plate, polarizer, attenuator and window, and 1060 optical fiber of HI is focused to after high reflective mirror reflects, and crosses and inscribes to 1060 optical fiber of HI；Charge coupling device is arranged right over high reflective mirror, observe laser focal position and laser to the processing pattern of 1060 optical fiber of HI on fixture；Strain measurement system is built, strain examining system includes wideband light source, circulator, optical fiber F P sensors, mobile stretching platform and spectroanalysis instrument；Optical fiber F P sensors are fixed on the mobile stretching platform, optical fiber F P sensors is made to generate strain；Spectroanalysis instrument is observed and records the reflectance spectrum of the optical fiber F P sensors in real time.The optical fiber F P sensors that the present invention makes have higher even sensitivity to strain measurement.
Description
Technical field
The present invention relates to fiber optic sensor technology field, more particularly to a kind of method of fibre-optical F-P sensor measuring strain.
Background technology
In recent years, fibre optical sensor is due to light weight, small, anticorrosive, electromagnetism interference and sensitivity height etc.
Advantage has been widely used for physics, chemistry and bio-sensing field.Fiber F-P interference sensor belongs to phase modulation-type biography
Sensor, therefore with advantages such as simple in structure and sensitivity height.Fiber F-P interference sensor is divided into Intrinsical and extrinsic type F-
P interference sensors.Extrinsic type fiber F-P interference sensor leads to light and optical fiber in F-P cavity since intracavitary medium is air
Generate larger coupling loss.At present, the production method of Intrinsical fiber F-P interference sensor has end face coating, chemical attack
And the methods of welding, but above-mentioned production method is complex.Femtosecond laser has ultrashort as a kind of emerging manufacturing process
The advantages that pulse, superpower peak power and high focusing power, can realize hyperfine three-dimensional micro Process, therefore in various optical fiber
Femtosecond laser can be as the ideal tools for making Intrinsical fiber F-P interference sensor.There are following several classes in the prior art：
The method directly exposed by femto-second laser pulse, it is long and slender in the single-mode optics of a diameter of 125 μm and 14.39 μm respectively
Two Fresnel reflecting mirrors are made in core, form Intrinsical F-P sensors.
The Intrinsical fiber F-P for being made a length of 200 μm and 400 μm of chamber respectively using the method that femtosecond laser directly exposes is done
Sensor is related to, and the temperature of a length of 400 μm of F-P sensors and refractive index sensing characteristic are analyzed to chamber.
But above-mentioned Intrinsical fibre-optical F-P sensor be using femtosecond laser in a manner that fiber core directly exposes system
It forms, the intetference-fit strengthening of reflectance spectrum is difficult in strain measurement to reach higher sensitive less than 10dB
Degree.
Therefore, to solve the above-mentioned problems, need one kind that femtosecond laser can be utilized to make intetference-fit strengthening opposite
Higher Intrinsical F-P sensors, realize fibre-optical F-P sensor have improved strain sensitivity based on 800nm femtosecond lasers
The method that device makes fibre-optical F-P sensor.
Invention content
The present invention be a kind of method of fibre-optical F-P sensor measuring strain is provided, the method includes：
Fibre-optical F-P sensor is made, including：
Fiber clamp is fixed on high-precision three-dimensional motion platform, the HI-1060 optical fiber for removing removing coating is fixed on described
On fiber clamp；
High reflective mirror is arranged right over the fiber clamp, and 800nm femtosecond lasers are sequentially arranged in the high reflective mirror front end
Device, half-wave plate, polarizer, attenuator and the window passed through for laser, the 800nm femto-second lasers are sent out in a manner of crossing
Femtosecond laser is penetrated, the femtosecond laser sequentially passes through the half-wave plate, polarizer, attenuator and window, anti-through the high reflective mirror
The HI-1060 optical fiber on the fiber clamp is focused to by 100 times of microcobjective after penetrating, is crossed to the HI-1060 optical fiber
It inscribes；
Arrange charge coupling device right over the high reflective mirror, the focal position of the charge-coupled device observation laser and
Laser is to the processing pattern of HI-1060 optical fiber on the fixture；
Strain measurement system is built, the strain examining system includes wideband light source, circulator, fibre-optical F-P sensor, movement
Stretch platform and spectroanalysis instrument；
The fibre-optical F-P sensor is fixed on the mobile stretching platform, moves left and right the mobile stretching platform,
The fibre-optical F-P sensor is made to generate strain；
The spectroanalysis instrument is observed and records the reflectance spectrum of the fibre-optical F-P sensor in real time.
Preferably, the HI-1060 optical fiber is between testing broad-band light source and test spectral analyzer, the HI-
1060 optical fiber one end connect the testing broad-band light source, and the other end connects the test spectral analyzer, the test spectral point
Analyzer observes the reflectance spectrum of the testing laser of the testing broad-band light source transmitting in real time.
Preferably, the wave-length coverage of the testing laser of the testing broad-band light source transmitting is 1530nm~1600nm.
Preferably, the operating wavelength range of the test spectral analyzer be 1200nm~2400nm, minimum resolving accuracy
For 0.05nm.
Preferably, in the HI-1060 optical fiber scribing process, control the high-precision three-dimensional motion platform movement and
Closure/unlatching of the window makes the fibre-optical F-P sensor of different cavity length.
Preferably, the amplification factor of the microcobjective is 100 times, numerical aperture 0.70.
Preferably, LED illumination device is installed respectively above and below the fiber clamp.
Preferably, the single pulse energy of the femtosecond laser of the 800nm femto-second lasers transmitting is 5 μ J, and process velocity is
80um/s, it is 40 μm to inscribe length.
A kind of method of fibre-optical F-P sensor measuring strain of the present invention makes fiber F-P using 800nm femto-second lasers
Sensor carries out strain measurement, since the intetference-fit strengthening that the present invention makes fibre-optical F-P sensor is relatively high, has more
Large strain sensitivity makes the precision higher of strain measurement result.
It should be appreciated that aforementioned description substantially and follow-up description in detail are exemplary illustration and explanation, it should not
As the limitation to the claimed content of the present invention.
Description of the drawings
With reference to the attached drawing of accompanying, the more purposes of the present invention, function and advantage will pass through the as follows of embodiment of the present invention
Description is illustrated, wherein：
Fig. 1 diagrammatically illustrates the schematic diagram that the present invention makes F-P sensors；
Fig. 2 shows the microstructure schematic diagrames of the fibre-optical F-P sensor of the different cavity length of the invention made；
Fig. 3 shows that the present invention uses the schematic diagram of fibre-optical F-P sensor strain measurement；
Fig. 4 shows the reflectance spectrum schematic diagram of the fibre-optical F-P sensor of different cavity length that the present invention makes；
Fig. 5 shows the emergent property curve of fibre-optical F-P sensor trough corresponding wavelength of the present invention.
Specific embodiment
By reference to exemplary embodiment, the purpose of the present invention and function and the side for being used to implement these purposes and function
Method will be illustrated.However, the present invention is not limited to exemplary embodiment as disclosed below；Can by different form come
It is realized.The essence of specification is only to aid in the detail of the various equivalent modifications Integrated Understanding present invention.
Hereinafter, the embodiment of the present invention will be described with reference to the drawings, relevant technical terms should be people in the art
Known to member.In the accompanying drawings, identical reference numeral represents same or similar component or same or like step,
Unless otherwise indicated.Present disclosure is illustrated below by specific embodiment, the present invention makes F- as shown in Figure 1
The schematic diagram of P sensor, according to an embodiment of the invention, a kind of method of fibre-optical F-P sensor measuring strain include：
Step S1, fibre-optical F-P sensor is made, including：
Fiber clamp (not shown) is fixed on high-precision three-dimensional motion platform 101, the HI-1060 of removing coating will be removed
Optical fiber 102 is fixed on fiber clamp.
Right over fiber clamp arrange high reflective mirror 104, be sequentially arranged in high reflective mirror front end 800nm femto-second lasers 105,
Half-wave plate 106, polarizer 107, attenuator 108 and the window 109 passed through for laser, 800nm femto-second lasers 105 are with scribing line
Mode emit femtosecond laser, femtosecond laser sequentially passes through half-wave plate 106, polarizer 107, attenuator 108 and window 109, warp
High reflective mirror 104 is focused to the HI-1060 optical fiber 102 on fiber clamp by 100 times of microcobjective 103 after reflecting, to HI-1060
The scribing line of optical fiber 102 is inscribed.Preferably, 102 core diameter of HI-1060 optical fiber used in embodiment is 6.2um, and cladding diameter is
125um。
The arrangement charge coupling device 110 right over high reflective mirror 104, charge-coupled device 110 observe the focal position of laser
With laser to the processing pattern of HI-1060 optical fiber 102 on fixture.LED illumination is installed respectively above and below fiber clamp
Equipment, to ensure that charge coupling device accurately observes focal position and light of the femtosecond laser hot spot in HI-1060 optical fiber 102
Fine processing pattern.
According to an embodiment of the invention, preferably 800nm femto-second lasers 105 select laser center wavelength 800nm, arteries and veins
The titanium sapphire femto-second laser of width 35fs, repetition rate 1kHz are rushed, the single pulse energy of the femtosecond laser of transmitting is 5 μ J,
Process velocity is 80um/s, and it is 40 μm to inscribe length.
HI-1060 optical fiber 102 is between testing broad-band light source 111 and test spectral analyzer 112, HI-1060 optical fiber
102 one end connecting test wideband light sources 111, other end connecting test spectroanalysis instrument 112, test spectral analyzer is observed in real time
The reflectance spectrum of the testing laser of testing broad-band light source transmitting.
It should be appreciated that during above-mentioned making optical fiber cable F-P sensors, testing broad-band light source 111 emits, and test swashs
Light, test spectral analyzer 112 observe the reflectance spectrum of testing laser in real time, while control high-precision three-dimensional motion platform 101
Movement and window 109 closure/unlatching, make the fibre-optical F-P sensor of different cavity length.According to an embodiment of the invention, it surveys
The wave-length coverage for trying the testing laser that wideband light source 111 emits is 1530nm~1600nm.The operating wave of test spectral analyzer
Long ranging from 1200nm~2400nm, minimum resolving accuracy are 0.05nm.The amplification factor of microcobjective is 100 times, numerical aperture
Diameter is 0.70.
The microstructure schematic diagram of the fibre-optical F-P sensor of different cavity length that the present invention as shown in Figure 2 makes, present invention system
For the fibre-optical F-P sensor tool of work there are two cone tank, two cone tanks constitute two reflection end faces of F-P, two cone tanks
Reflected light can be coupled in fibre core.The phase difference of two beam reflected lights generates different interference light intensities, corresponding reflected light
The different peak values of spectrum form interference spectrum.A length of 50 μm of chamber (figure a), 100 μm of (figure b), 200 μm of (figures are made in embodiment respectively
And four kinds of fibre-optical F-P sensors of 400 μm (figure d) c).
Step S2, strain measurement system is built, as shown in Figure 3 the present invention showing using fibre-optical F-P sensor strain measurement
It is intended to, strain measurement system includes wideband light source 302, circulator 304, fibre-optical F-P sensor 201,301 and of mobile stretching platform
Spectroanalysis instrument 303.
Step S3, fibre-optical F-P sensor 201 is fixed on mobile stretching platform 301, moves left and right the mobile stretching
Platform 301 under the mobile drive for stretching platform 301, makes fibre-optical F-P sensor generate strain；
Step S4, the reflectance spectrum of fibre-optical F-P sensor 201 is observed and recorded in real time to spectroanalysis instrument 303, according to arrive
Reflectance spectrum obtains corresponding strain value.
The reflectance spectrum schematic diagram of the fibre-optical F-P sensor of different cavity length that the present invention as shown in Figure 4 makes, can from figure
10dB is all higher than with the intetference-fit strengthening for seeing fibre-optical F-P sensor, spectral region be 1520nm~1610nm, interference light
The trough quantity occurred in spectrum is respectively 5,11,20 and 42.
The theory analysis of strain lateral deviation is carried out using the fibre-optical F-P sensor that strain measurement method of the present invention obtains below,
When strain extraneous suffered by fibre-optical F-P sensor changes, due to strain effect and photoelastic effect, the chamber of fibre-optical F-P sensor is long
It can change with refractive index, light path is caused to change：
Δ (nL)=nL (k+ ρ) Δ ε
In formula, k and ρ are the coefficient of strain and strain optical coefficient of fiber optic materials respectively.Pass through detection fiber F-P strain transducers
The wavelength shift of trough is completed to strain measurement.
From the fiber F-P sensing of 50 μm of chamber length of making, 100 μm of chamber length, 200 μm of chambers length and 400 μm of chambers length in embodiment
The fibre-optical F-P sensor that 100 μm of chamber length are chosen in device carries out strain measurement, and analyze the knot of strain measurement according to above-mentioned steps
Fruit.
The emergent property curve of fibre-optical F-P sensor trough corresponding wavelength of the present invention as shown in Figure 5, in 100 μ ε -500 μ
In the range of ε, the Intrinsical optic fiber F-Pstrain sensor centre wavelength of a length of 100um of chamber be respectively 1539.48nm,
The strain sensitivity of the interference trough of 1554.12nm, 1569.89nm and 1585.87nm is respectively 1.38pm/ μ ε, 1.42pm/ μ
ε, 1.41pm/ μ ε and 1.51pm/ μ ε.Wherein their linearity is respectively 0.9935,0.9978,0.9998 and 0.9956.
In some embodiments, fiber F-P interference sensor is fixed on the beam of uniform strength, optical fiber is adjusted by differential head
Dependent variable on F-P interference sensors acquires dependent variable to interfere when 100 μ ε, 200 μ ε, 300 μ ε, 400 μ ε and 500 μ ε respectively
The wavelength shift of trough, so as to obtain strain value.
By above-described embodiment, a kind of method of fibre-optical F-P sensor measuring strain provided by the invention, cardiac wave in utilization
HI-1060 optical fiber is inscribed in the femtosecond laser scribing line of a length of 800nm, and the chamber of making is 50 μm a length of, 100 μm, 200um and 400um
The intetference-fit strengthening of fibre-optical F-P sensor is all higher than 10dB.In the range of 100~500 μ ε, a length of 100um's of chamber is intrinsic
Respectively up to 1.51pm/ μ ε, linear fit is respectively the wavelength sensitivity of type fiber F-P interference sensor interference trough
0.9956, trough wavelength shift has good linear relationship with strain, and fibre-optical F-P sensor provided by the invention measures should
The method of change can accurate measuring strain value, provide the precision of strain measurement.
A kind of method of fibre-optical F-P sensor measuring strain of the present invention makes fiber F-P using 800nm femto-second lasers
Sensor carries out strain measurement, since the intetference-fit strengthening that the present invention makes fibre-optical F-P sensor is relatively high, has more
Large strain sensitivity makes the precision higher of strain measurement result.
Explanation and practice with reference to the present invention disclosed here, the other embodiment of the present invention is for those skilled in the art
It all will be readily apparent and understand.Illustrate and embodiment is regarded only as being exemplary, true scope of the invention and purport are equal
It is defined in the claims.
Claims (8)
- A kind of 1. method of fibre-optical F-P sensor measuring strain, which is characterized in that the method includes：Fibre-optical F-P sensor is made, including：Fiber clamp is fixed on high-precision three-dimensional motion platform, the HI-1060 optical fiber for removing removing coating is fixed on the optical fiber On fixture；High reflective mirror is arranged right over the fiber clamp, and 800nm femto-second lasers, half are sequentially arranged in the high reflective mirror front end Wave plate, polarizer, attenuator and the window passed through for laser, the 800nm femto-second lasers are emitted winged in a manner of crossing Second laser, the femtosecond laser sequentially pass through the half-wave plate, polarizer, attenuator and window, after high reflective mirror reflection The HI-1060 optical fiber on the fiber clamp is focused to by 100 times of microcobjective, crosses and inscribes to the HI-1060 optical fiber；Charge coupling device, the focal position and laser of the charge-coupled device observation laser are arranged right over the high reflective mirror To the processing pattern of HI-1060 optical fiber on the fixture；Strain measurement system is built, the strain examining system includes wideband light source, circulator, fibre-optical F-P sensor, mobile stretching Platform and spectroanalysis instrument；The fibre-optical F-P sensor is fixed on the mobile stretching platform, the mobile stretching platform is moved left and right, makes institute It states fibre-optical F-P sensor and generates strain；The spectroanalysis instrument is observed and records the reflectance spectrum of the fibre-optical F-P sensor in real time.
- 2. according to the method described in claim 1, it is characterized in that, the HI-1060 optical fiber is between testing broad-band light source and survey Between trying spectroanalysis instrument, described HI-1060 optical fiber one end connects the testing broad-band light source, and the other end connects the test light Spectrum analysis instrument, the test spectral analyzer observe the reflectance spectrum of the testing laser of the testing broad-band light source transmitting in real time.
- 3. the according to the method described in claim 2, it is characterized in that, wavelength of the testing laser of testing broad-band light source transmitting Ranging from 1530nm~1600nm.
- 4. according to the method described in claim 2, it is characterized in that, the operating wavelength range of the test spectral analyzer is 1200nm~2400nm, minimum resolving accuracy are 0.05nm.
- 5. according to the method described in claim 1, it is characterized in that, in the HI-1060 optical fiber scribing process, described in control The movement of high-precision three-dimensional motion platform and closure/unlatching of the window make the fibre-optical F-P sensor of different cavity length.
- 6. according to the method described in claim 1, it is characterized in that, the amplification factor of the microcobjective be 100 times, numerical aperture Diameter is 0.70.
- 7. it according to the method described in claim 1, it is characterized in that, is installed respectively above and below the fiber clamp LED illumination device.
- 8. the according to the method described in claim 1, it is characterized in that, femtosecond laser of 800nm femto-second lasers transmitting Single pulse energy is 5 μ J, process velocity 80um/s, and it is 40 μm to inscribe length.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110823121A (en) * | 2019-12-13 | 2020-02-21 | 大连理工大学 | F-P cavity type high-temperature large-strain optical fiber sensor |
| CN112710246A (en) * | 2020-12-03 | 2021-04-27 | 北京信息科技大学 | Preparation method of coreless fiber F-P strain sensor structure |
| CN112710248A (en) * | 2020-12-08 | 2021-04-27 | 北京信息科技大学 | Reflective birefringence interference strain sensor based on fully polarization-maintaining optical fiber |
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| US5724371A (en) * | 1995-02-21 | 1998-03-03 | Commissariat A L'energie Atomique | Photoinscribed bragg grating sensor with a good signal-to-noise ratio |
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| CN110823121A (en) * | 2019-12-13 | 2020-02-21 | 大连理工大学 | F-P cavity type high-temperature large-strain optical fiber sensor |
| CN112710246A (en) * | 2020-12-03 | 2021-04-27 | 北京信息科技大学 | Preparation method of coreless fiber F-P strain sensor structure |
| CN112710248A (en) * | 2020-12-08 | 2021-04-27 | 北京信息科技大学 | Reflective birefringence interference strain sensor based on fully polarization-maintaining optical fiber |
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