CN105547543A - Raman spectrometer for measuring tempered glass surface stress and measurement method of tempered glass surface stress - Google Patents
Raman spectrometer for measuring tempered glass surface stress and measurement method of tempered glass surface stress Download PDFInfo
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- 238000001069 Raman spectroscopy Methods 0.000 title claims abstract description 136
- 239000005341 toughened glass Substances 0.000 title claims abstract description 51
- 238000000691 measurement method Methods 0.000 title abstract 4
- 238000005259 measurement Methods 0.000 claims abstract description 33
- 238000006073 displacement reaction Methods 0.000 claims abstract description 26
- 239000013307 optical fiber Substances 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims abstract description 22
- 230000007246 mechanism Effects 0.000 claims abstract description 17
- 238000001237 Raman spectrum Methods 0.000 claims abstract description 16
- 238000003384 imaging method Methods 0.000 claims abstract description 16
- 238000004458 analytical method Methods 0.000 claims abstract description 13
- 230000003287 optical effect Effects 0.000 claims abstract description 13
- 238000010183 spectrum analysis Methods 0.000 claims abstract description 5
- 238000012360 testing method Methods 0.000 claims description 57
- 239000011521 glass Substances 0.000 claims description 28
- 238000007493 shaping process Methods 0.000 claims description 12
- 238000005496 tempering Methods 0.000 claims description 11
- 238000012545 processing Methods 0.000 claims description 10
- 230000008859 change Effects 0.000 claims description 7
- 239000000835 fiber Substances 0.000 claims description 7
- 230000001939 inductive effect Effects 0.000 claims description 6
- 241000792859 Enema Species 0.000 claims description 5
- 230000013872 defecation Effects 0.000 claims description 5
- 239000007920 enema Substances 0.000 claims description 5
- 229940095399 enema Drugs 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 239000000829 suppository Substances 0.000 claims description 5
- 241000931526 Acer campestre Species 0.000 claims description 4
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- 238000005516 engineering process Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 238000006748 scratching Methods 0.000 description 4
- 230000002393 scratching effect Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
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- 230000001808 coupling effect Effects 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
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- 238000002347 injection Methods 0.000 description 1
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- 239000005304 optical glass Substances 0.000 description 1
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- 239000002344 surface layer Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
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Abstract
The present invention relates to a Raman spectrometer for measuring a tempered glass surface stress and a measurement method of a tempered glass surface stress. The Raman spectrometer comprises a light source, a Raman signal collection device and a Raman spectrum analysis device. The Raman spectrum analysis device includes a half transparent and half reflecting mirror, a micro-lens array, a focusing lens, an imaging optical fiber bundle, a microscopic system and a displacement scanning control mechanism which are arranged in order along with an optical path; and a sample to be measured is located on the displacement scanning control mechanism at the back end of the microscopic system, and the microscopic system is configured to focus the light emitted by the light source on the sample to be measured to generate Raman signals. The Raman spectrum analysis device includes an imaging lens, an emission slit and a spectrometer which are arranged in order at the back end of the half transparent and half reflecting mirror, and the Raman signals scattered by the sample to be measured pass through the imaging lens and the emission slit to enter the spectrometer for performing spectral analysis after being reflected by the half transparent and half reflecting mirror. The measurement method of a tempered glass surface stress provided by the invention is simple in measurement process and high in measurement precision; and moreover, the Raman spectrometer for measuring a tempered glass surface stress and the measurement method of the tempered glass surface stress have wide application prospects.
Description
Technical field
The invention belongs to tempered glass stress mornitoring field, particularly relate to a kind of Raman spectrometer and the measuring method of measuring tempered glass surface stress.
Background technology
Tempered glass is also known as tempered glass, it is a kind of prestressed glass, the method of usual use chemistry or physics, compressive stress is formed at glass surface, first surface layer pressure is offset when glass bears external force, thus improve load-bearing capacity, thus tempered glass is widely used in the fields such as building doors and windows, glass curtain wall, electronic instrument.But can there is a large amount of micro-crack in tempered glass cutting back edge, cause strength of glass to reduce.Especially flourish along with touch-control industry, the specification requirement of touch-control product itself is also day by day strict, because contact panel applies pressure by outside go to carry out the function mode of inductive component thus reach result of use, therefore the mechanical resistance pressure of product is important specification and the index of all big enterprises.For optical glass, the existence of larger stress has also had a strong impact on optical clarity and image quality.Thus, for ensureing the usability of tempered glass article, the stress of tempered glass will control in specialized range, and this detects the surface stress of tempered glass with regard to requiring.
Current measurement tempered glass surface stress mainly adopts optical waveguide technique, namely utilizes refracting prisms, REFRACTIVE LIQUID, glass surface to be measured generation evanescent wave, in conjunction with photoelastic effect, carries out the measurement of tempered glass surface stress.As Chinese utility model patent ZL201420643584.X discloses a kind of new automatic glass surface stress ga(u)ge, comprise instrument body, eyepiece, light source and birefringent prism, described birefringent prism protrudes from instrument body upper surface and is positioned at the light injection direction of light source simultaneously, the front end of described eyepiece is positioned on the light refraction direction of birefringent prism, an industrial camera is installed in the rear bottom of eyepiece, be provided with a liquid-drop machine directly over described birefringent prism, described industrial camera, liquid-drop machine all connect computer processor by data line.When utilizing this stress ga(u)ge to measure tempered glass surface stress, first glass to be measured is placed on birefringent prism, then control liquid-drop machine by computer processor and drip a small amount of REFRACTIVE LIQUID to glass surface to be measured, because the glass through tempering process can produce stressor layers on its surface, the light that light source sends incides glass surface to be measured, birefringence is produced under the effect of Surface stress layer, form the two orthogonal and light beams that the direction of propagation is different in bundle polarization directions, this two light beams is by being converted into the bright fringes or dark fringe being convenient to identify after industrial camera, finally by calculating interference fringe information thus obtaining tempered glass surface stress value.Although utilize this new automatic glass surface stress ga(u)ge accurately and efficiently can calculate tempered glass surface stress, but, contact to be totally reflected owing to needing glass to be measured to be placed on birefringent prism surface when measuring with it, very easily scratching is caused to glass to be measured in contact process, have impact on aesthetic appearance and the usability of glass to be measured.In addition, for improving the measuring accuracy of stress ga(u)ge, need to drip REFRACTIVE LIQUID to glass surface to be measured in measuring process, need after measurement terminates to carry out wiping to glass surface to be measured, thus add the complicacy of whole measurement operation, waste time and energy, have impact on measurement efficiency.
Summary of the invention
The object of the invention is to solve above-mentioned the deficiencies in the prior art, a kind of Raman spectrometer and the measuring method of measuring tempered glass surface stress are provided, can avoid causing scratching to glass to be measured in measuring process, and it is simple to measure operation, measure efficiency high.
The present invention solves the technical scheme that above-mentioned the deficiencies in the prior art adopt:
A kind of Raman spectrometer measuring tempered glass surface stress, comprise light source, Raman signal harvester, Raman spectrum analysis device, it is characterized in that, described Raman signal harvester comprises the semi-transparent semi-reflecting lens, microlens array, condenser lens, imaging optical fiber bundle, microscopic system, the displacement scanning control mechanism that set gradually along light path, testing sample is positioned in the displacement scanning control mechanism of microscopic system rear end, and the light that light source is launched focuses on testing sample to produce Raman signal by microscopic system; Described Raman spectrum analysis device comprises imaging len, exit slit, the spectrometer that semi-transparent semi-reflecting lens rear end sets gradually, by testing sample scattering Raman signal through semi-transparent semi-reflecting lens reflect after, enter spectrometer by imaging len, exit slit and carry out spectral analysis.
Shaping lens, entrance slit, collimation lens is provided with successively between light source of the present invention and semi-transparent semi-reflecting lens, shaping lens and collimation lens are arranged with optical axis, and shaping lens and collimation lens to be all arranged on entrance slit be that focal plane, focus are on the center of entrance slit, the light that light source is launched forms pointolite after entrance slit, reduce the impact of parasitic light, improve the measuring accuracy of Raman spectrometer of the present invention.
Spectrometer of the present invention is multichannel light optical fiber spectrograph, thus the present invention can configure multiple Raman signal harvester simultaneously, can simultaneously parallel detecting multichannel Raman signal, make Raman spectrometer of the present invention can measure the stress information of multiple sample simultaneously, improve measurement efficiency of the present invention.
The light array spacing of multichannel light optical fiber spectrograph of the present invention is less than described Raman signal array pitch, and the Raman signal that the present invention is produced all is coupled to multichannel light optical fiber spectrograph, improves the measuring accuracy of Raman spectrometer of the present invention.
The response wave length bandwidth of spectrometer of the present invention is 50nm, has both improve the resolution of Raman spectrometer of the present invention, makes resolution of the present invention reach 0.02nm, turn improves sweep velocity of the present invention.
Spectrometer of the present invention is connected with data processing equipment, can carry out fast processing, complete the accurate measurement of tempered glass surface stress to Raman spectrum analysis device the data obtained.
Light source of the present invention is LASER Light Source, and the optical maser wavelength of launching is the one in 532nm, 514nm, 635nm, 785nm.
Present invention also offers a kind of method utilizing described Raman spectrometer to measure tempered glass surface stress, it is characterized in that, comprise the following steps:
1, arrange the test parameter of Raman spectrometer, make the laser power of light source be 2-10mw, the time shutter of Raman spectrometer is 2-10s.
2, light wave inducing defecation by enema and suppository is utilized to measure the stress distribution of testing sample.
3, testing sample be placed in the light spot focus of Raman signal harvester and perpendicular to detecting light beam place, start Raman spectrometer and scan, obtain Raman peak values now.
4, control testing sample upper and lower displacement by displacement scanning control mechanism and carry out Z axis scanning, change along with Z axis there will be different Raman peak values, obtain the Raman spectrum of different Z axis position, spectral manipulation software is utilized to obtain the wave number of Raman peaks, and Raman peak values when measuring unstressed with the glass of testing sample same material.
5, the stress distribution obtained in step 2 is utilized, and the difference of the Raman peak values of diverse location and the difference of stress value, calculated stress frequency-shifting operator σ, (F is tempered glass surface stress finally to utilize stress-frequency displacement formula F=σ Δ ω, σ is stress frequency-shifting operator, Δ ω is Raman frequency shift), calculate the surface stress of testing sample.
The method of measurement tempered glass surface stress of the present invention also comprises the step measured the tempering degree of depth of testing sample, the step of the described measurement tempering degree of depth is: in described step 4, when there is not new Raman peak values in the change of Z axis, Raman spectrometer stops scanning, and Z axis position is now the tempering degree of depth of testing sample.
The invention has the beneficial effects as follows, because the present invention adopts Raman spectroscopy to carry out tempered glass surface stress measurement, thus avoid the scratching in traditional light wave inducing defecation by enema and suppository measuring process, glass to be measured caused.Different from traditional Raman spectrometer, Raman spectrometer of the present invention comprises light source, Raman signal harvester, Raman spectrum analysis device, and described Raman signal harvester comprises the semi-transparent semi-reflecting lens, microlens array, condenser lens, imaging optical fiber bundle, microscopic system, the displacement scanning control mechanism that set gradually along light path, testing sample is positioned in the displacement scanning control mechanism of microscopic system rear end, and the light that light source is launched focuses on testing sample to produce Raman signal by microscopic system; Described Raman spectrum analysis device comprises imaging len, exit slit, the spectrometer that semi-transparent semi-reflecting lens rear end sets gradually, by testing sample scattering Raman signal through semi-transparent semi-reflecting lens reflect after, enter spectrometer by imaging len, exit slit and carry out spectral analysis, thus when utilizing Raman spectrometer of the present invention to measure tempered glass surface stress, Raman signal harvester can realize multi-point signal and gather simultaneously, reduce infrastructure cost, improve measurement efficiency.Meanwhile, Raman signal harvester receives Raman signal by adopting imaging optical fiber bundle, improves measurement sensistivity and the efficiency of light energy utilization of Raman spectrometer of the present invention, further increases measuring accuracy.Owing to being also provided with shaping lens, entrance slit, collimation lens successively between light source of the present invention and semi-transparent semi-reflecting lens, the light that can send light source carries out shaping, focusing, the light that light source is launched forms pointolite after entrance slit, decrease the impact of parasitic light, improve the measuring accuracy of Raman spectrometer of the present invention.Because spectrometer of the present invention is multichannel light optical fiber spectrograph, thus when utilizing the present invention to measure tempered glass surface stress, multiple Raman signal harvester can be configured simultaneously, parallel detecting multichannel Raman signal, make the present invention can measure the stress information of multiple testing sample simultaneously, improve the measurement efficiency of Raman spectrometer of the present invention.Meanwhile, present invention also offers a kind of method utilizing described Raman spectrometer to measure tempered glass surface stress, measure operation simple, measuring accuracy is high, and Raman spectrometer of the present invention and described measuring method are with a wide range of applications.
Accompanying drawing explanation
Fig. 1 is a kind of structural representation of Raman spectrometer of the present invention, is also a kind of preferred embodiment schematic diagram.
Embodiment
Below describe and realize the present invention for disclosing the present invention to enable those skilled in the art.Preferred embodiment in below describing only as an example, it may occur to persons skilled in the art that other apparent modification.The ultimate principle of the present invention defined in the following description can be applied to other embodiments, deformation program, improvement project, equivalent and not deviate from the other technologies scheme of the spirit and scope of the present invention.
Embodiment one
Fig. 1 shows a kind of example structure schematic diagram of Raman spectrometer of the present invention, is also a kind of preferred embodiment schematic diagram.As shown in Figure 1, the Raman spectrometer of the measurement tempered glass surface stress described in the present embodiment, comprise light source 10, Raman signal harvester, Raman spectrum analysis device, described Raman signal harvester comprises the semi-transparent semi-reflecting lens 21 set gradually along light path, microlens array 22, condenser lens 23, imaging optical fiber bundle 24, microscopic system 25, displacement scanning control mechanism 26, testing sample 40 is positioned in the displacement scanning control mechanism 26 of microscopic system 25 rear end, displacement scanning control mechanism 26 carries out displacement according to measuring process control testing sample, add operation ease, the light that light source 10 is launched focuses on testing sample 40 to produce Raman signal by microscopic system 25.Raman spectrum analysis device of the present invention comprises imaging len 31, exit slit 32, the spectrometer 33 that semi-transparent semi-reflecting lens 21 rear end sets gradually, by the Raman signal of testing sample 40 scattering after semi-transparent semi-reflecting lens 21 reflects, enter spectrometer 33 by imaging len 31, exit slit 32 and carry out spectral analysis.
Light source 10 of the present invention is LASER Light Source, and monochromaticity is good, and has very high collimation, and the optical maser wavelength that LASER Light Source is launched is the one in 532nm, 514nm, 635nm, 785nm.Preferably, the optical maser wavelength that the present embodiment LASER Light Source is launched is 532nm.As can be seen from Fig. 1, Raman signal harvester of the present invention also comprises the shaping lens 27, entrance slit 28, the collimation lens 29 that are set in turn between described light source 10 and semi-transparent semi-reflecting lens 21, and shaping lens and collimation lens to be all arranged on entrance slit be that focal plane, focus are on the center of entrance slit.The light that shaping lens 27 pairs of light sources 10 are launched carries out shaping focusing, and the light that light source is launched forms pointolite after entrance slit 28, decreases the impact of parasitic light, improves the measuring accuracy of Raman spectrometer of the present invention.It is the scattered light of radiation center that the light that light source 10 sends becomes with entrance slit after entrance slit 28, collimation lens 29 incides on semi-transparent semi-reflecting lens 21 after collimating through the scattered light of entrance slit outgoing, decrease optical energy loss, further increase measuring accuracy.
Spectrometer 33 described in the present embodiment is multichannel light optical fiber spectrograph, thus when utilizing Raman spectrometer of the present invention to measure tempered glass surface stress, multiple Raman signal harvester can be configured simultaneously, can simultaneously parallel detecting multichannel Raman signal, make Raman spectrometer of the present invention can measure the stress information of multiple testing sample simultaneously, improve measurement efficiency of the present invention.Because the Raman signal array of testing sample scattering exists the problems such as aberration after multiple optical instrument reflection, have impact on the coupling effect of the fiber array of Raman signal array and multichannel light optical fiber spectrograph receiving optical signals, thus have impact on measuring accuracy.Thus, the fiber array spacing of the multichannel light optical fiber spectrograph described in the present embodiment is less than Raman signal array pitch, enable very easy whole of the Raman signal of testing sample scattering in the present invention be coupled to multichannel light optical fiber spectrograph, improve the ease for operation of Raman spectrometer of the present invention.For obtaining best implementation result, the fiber array spacing of multichannel light optical fiber spectrograph is less than 1/2 or 1/3 Raman signal array pitch, and now not only coupling effect is good, and the running time is short, improves the measuring accuracy of Raman spectrometer of the present invention and measures efficiency.Simultaneously, in the present embodiment multichannel light optical fiber spectrograph receiving optical signals fiber array in optical fiber be all movable setting, any simple optical fiber can remove from fiber array, thus when Raman signal is all coupled to after in multichannel light optical fiber spectrograph, the optical fiber of the unnecessary Raman signal that is not coupled can remove by user from fiber array, thus structure of the present invention is simplified more.The response wave length bandwidth of the spectrometer 33 described in the present embodiment is 50nm, has both improve the resolution of Raman spectrometer of the present invention, makes resolution of the present invention reach 0.02nm, turn improves sweep velocity of the present invention.
Multichannel light optical fiber spectrograph described in the present embodiment can also connect data processing apparatus 50 as required, and data processing equipment 50 can carry out fast processing to Raman spectrum analysis device the data obtained, completes the accurate measurement of tempered glass surface stress.This data processing equipment 50 can be the multi-purpose computer with data processing software, or dedicated data processor.
Embodiment two
Present embodiments provide a kind of method utilizing the Raman spectrometer described in embodiment one to measure tempered glass surface stress, mainly comprise the following steps:
1, arrange the test parameter of Raman spectrometer, make the laser power of light source be 2-10mw, the time shutter of Raman spectrometer is 2-10s.
The time shutter of Raman spectrometer, namely Raman spectrometer gathers the time of Raman signal, if the time shutter is too short, then can affect the collection capacity of Raman signal, cause the Raman signal of testing sample scattering to be all coupled in Raman spectrometer, affect measuring accuracy; If the time shutter is long, then can cause measuring efficiency low.Thus, in the present embodiment, the time shutter of Raman spectrometer is set as 2-10s, both can have ensured that Raman spectrometer collects enough Raman signals, measurement efficiency can not have been affected again.
2, light wave inducing defecation by enema and suppository is utilized to measure the stress distribution of testing sample.
Take out any one in testing sample, utilize light wave inducing defecation by enema and suppository to measure the stress distribution of this testing sample.In the present embodiment, survey stress distribution instrument new automatic glass surface stress ga(u)ge disclosed in Chinese utility model patent ZL201420643584.X, first this testing sample taken out at random is placed on the birefringent prism of new automatic glass surface stress ga(u)ge, then control liquid-drop machine by computer processor and drip a small amount of REFRACTIVE LIQUID to testing sample surface, obtain the stress distribution of testing sample finally by computer processor.Can be observed by the stress envelope of the present embodiment gained, during Z=0um, stress F
1=800Mpa; During Z=2um, stress F
2=700Mpa.Here Z refers to the displacement height residing for testing sample, and as Z=0um, the light spot focus of Raman signal harvester should be positioned at the tempering layer any position of testing sample.
Due to the testing sample with a collection of processing technology, its stress distribution is consistent.Thus, this step only needs to measure its stress distribution to any one testing sample in the testing sample with a collection of processing technology, avoid tradition light waveguide method survey stress to need to measure respectively each testing sample, so both prevent the probability with light waveguide method survey glass strain, glass being caused to scratching, turn improve measurement efficiency.
3, testing sample be placed in the light spot focus of Raman signal harvester and perpendicular to detecting light beam place, start Raman spectrometer and scan, obtain Raman peak values now.
Preferably, by displacement scanning control mechanism, testing sample can be moved to the light spot focus place of Raman signal harvester in the present embodiment, realize Automated condtrol, improve the measuring accuracy of Raman spectrometer of the present invention and measure efficiency.
4, control testing sample upper and lower displacement by displacement scanning control mechanism and carry out Z axis scanning, change along with Z axis there will be different Raman peak values, obtain the Raman spectrum of different Z axis position, spectral manipulation software is utilized to obtain the wave number of Raman peaks, and Raman peak values when measuring unstressed with the glass of testing sample same material.
According to the difference of measuring accuracy, the different stepping stroke of displacement scanning control mechanism can be set, in the present embodiment, for obtaining high-precision measurement effect, displacement scanning control mechanism is preferably set and carries out Z axis scanning with the stepping stroke of 1um, can observe, the change along with Z axis there will be different Raman peak values.As Z=0um, obtain Raman peak values ω now
1=1090cm
-1; As Z=2um, obtain Raman peak values ω now
2=1088cm
-1, and Raman peak values ω when measuring unstressed with the glass of testing sample same material
0=1080cm
-1.
5, the stress distribution obtained in step 2 is utilized, and the difference of the Raman peak values of diverse location and the difference of stress value, calculate stress frequency-shifting operator σ, (F is tempered glass surface stress finally to utilize stress-frequency displacement formula F=σ Δ ω, σ is stress frequency-shifting operator, Δ ω is Raman frequency shift), calculate the surface stress of testing sample.
In the present embodiment, can know in the stress envelope recorded by step 2, during Z=0um, stress F
1=800Mpa; During Z=2um, stress F
2=700Mpa.Can be obtained by step 4, during Z=0um, Raman peak values ω
1=1090cm
-1; During Z=2um, Raman peak values ω
2=1088cm
-1, thus stress frequency-shifting operator
also namely, to this tempered glass with a collection of processing technology, stress-frequency displacement formula F=50 Δ ω.By measure in step 4 unstressed with the glass of testing sample same material time Raman peak values ω
0=1080cm
-1, thus can obtain stress F=σ × (ω-ω during the arbitrary Z axis position of testing sample
0)=50 × (ω-1080), Raman peak values when ω is arbitrary z-axis position
The method of the measurement tempered glass surface stress described in the present embodiment also comprises the step measured the tempering degree of depth of testing sample, the step of the described measurement tempering degree of depth is: in the step 4 described in the present embodiment, when there is not new Raman peak values in the change of Z axis, Raman spectrometer stops scanning, and Z axis position is now the tempering degree of depth of testing sample.
One skilled in the art will understand that the embodiments of the invention shown in foregoing description and accompanying drawing only limit the present invention as an example and not.Object of the present invention is complete and effectively realize.Function of the present invention and structural principle are shown in an embodiment and are illustrated, do not deviating under described principle, embodiments of the present invention can have any distortion or amendment.
Claims (10)
1. measure the Raman spectrometer of tempered glass surface stress for one kind, comprise light source, Raman signal harvester, Raman spectrum analysis device, it is characterized in that, described Raman signal harvester comprises the semi-transparent semi-reflecting lens, microlens array, condenser lens, imaging optical fiber bundle, microscopic system, the displacement scanning control mechanism that set gradually along light path, testing sample is positioned in the displacement scanning control mechanism of microscopic system rear end, and the light that light source is launched focuses on testing sample to produce Raman signal by microscopic system; Described Raman spectrum analysis device comprises imaging len, exit slit, the spectrometer that semi-transparent semi-reflecting lens rear end sets gradually, by testing sample scattering Raman signal through semi-transparent semi-reflecting lens reflect after, enter spectrometer by imaging len, exit slit and carry out spectral analysis.
2. the Raman spectrometer of measurement tempered glass surface stress according to claim 1, it is characterized in that, shaping lens, entrance slit, collimation lens is provided with successively between described light source and semi-transparent semi-reflecting lens, shaping lens and collimation lens are arranged with optical axis, and shaping lens and collimation lens to be all arranged on entrance slit be that focal plane, focus are on the center of entrance slit.
3. the Raman spectrometer of measurement tempered glass surface stress according to claim 1 and 2, is characterized in that, described spectrometer is multichannel light optical fiber spectrograph.
4. want the Raman spectrometer of the measurement tempered glass surface stress described in 3 according to right, it is characterized in that, the light array spacing of described multichannel light optical fiber spectrograph is less than described Raman signal array pitch.
5. the Raman spectrometer of measurement tempered glass surface stress according to claim 4, is characterized in that, the fiber array spacing of described multichannel light optical fiber spectrograph is less than 1/3 of described Raman signal array pitch.
6. the Raman spectrometer of measurement tempered glass surface stress according to claim 1 and 2, is characterized in that, the response wave length bandwidth of described spectrometer is 50nm.
7. the Raman spectrometer of measurement tempered glass surface stress according to claim 1 and 2, it is characterized in that, described spectrometer is connected with data processing equipment.
8. the Raman spectrometer of measurement tempered glass surface stress according to claim 1 and 2, is characterized in that, described light source is LASER Light Source, and the optical maser wavelength that LASER Light Source is launched is the one in 532nm, 514nm, 635nm, 785nm.
9. measure a method for tempered glass surface stress, it is characterized in that, comprise the following steps:
(1) arrange the test parameter of Raman spectrometer, make the laser power of light source be 2-10mw, the time shutter of Raman spectrometer is 2-10s;
(2) light wave inducing defecation by enema and suppository is utilized to measure the stress distribution of testing sample;
(3) testing sample be placed in the light spot focus of Raman signal harvester and perpendicular to detecting light beam place, start Raman spectrometer and scan, obtain Raman peak values now;
(4) control testing sample upper and lower displacement by displacement scanning control mechanism and carry out Z axis scanning, change along with Z axis there will be different Raman peak values, obtain the Raman spectrum of different Z axis position, spectral manipulation software is utilized to obtain the wave number of Raman peaks, and Raman peak values when measuring unstressed with the glass of testing sample same material;
(5) stress distribution obtained in step (2) is utilized, and the difference of the Raman peak values of diverse location and the difference of stress value, calculate stress frequency-shifting operator σ, (F is tempered glass surface stress finally to utilize stress-frequency displacement formula F=σ Δ ω, σ is stress frequency-shifting operator, Δ ω is Raman frequency shift), calculate the surface stress of testing sample.
10. the method for measurement tempered glass surface stress according to claim 9, it is characterized in that, the method of described measurement tempered glass surface stress also comprises the step measured the tempering degree of depth of testing sample, the step of the described measurement tempering degree of depth is: in described step (4), when there is not new Raman peak values in the change of Z axis, Raman spectrometer stops scanning, and Z axis position is now the tempering degree of depth of testing sample.
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| JP2020139940A (en) * | 2019-02-22 | 2020-09-03 | 国立大学法人東北大学 | Method for evaluating residual stress of chemically strengthened glass |
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| CN114353947B (en) * | 2022-01-05 | 2024-01-26 | 南开大学 | Microscopic Raman spectrometer based on light field imaging |
| WO2023185950A1 (en) * | 2022-03-30 | 2023-10-05 | 清华大学 | Nondestructive in-situ high-complexity structure testing device and method based on raman analysis |
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