CN202869779U - Device for measuring divergence angle and light spot pattern of laser - Google Patents
Device for measuring divergence angle and light spot pattern of laser Download PDFInfo
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- CN202869779U CN202869779U CN 201220465469 CN201220465469U CN202869779U CN 202869779 U CN202869779 U CN 202869779U CN 201220465469 CN201220465469 CN 201220465469 CN 201220465469 U CN201220465469 U CN 201220465469U CN 202869779 U CN202869779 U CN 202869779U
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Abstract
The utility model provides a device for measuring a divergence angle and a light spot pattern of a laser. According the device, an optical path is formed by a plurality of 45-degree total reflective mirrors in a two-dimensional direction, so that the straight-line distance between two ends of the optical path in the measuring device is reduced, the measuring device is compact, and the measuring data is accurate; besides, any parameters of the laser can be simultaneously measured by the plurality of 45-degree total reflective mirrors, providing instantaneity and greatly saving the test time.
Description
Technical field
The utility model belongs to the laser technique field, is specifically related to a kind of parameter measuring apparatus of laser system, particularly laser divergence angle and light spot shape measurement mechanism, and it is specially adapted to excimer laser.
Background technology
In the research and development and use procedure of laser instrument, all need the various parameters (output energy, output energy stability, centre wavelength, pulsewidth, live width, the angle of divergence, optical quality etc.) to laser instrument to measure, thereby determine duty and the performance of laser instrument.
Traditional measuring method generally all is once only to measure for a parameter, can not measure simultaneously laser instrument at a time numerical value and the mutual relationship of several parameters.And for some parameter (such as the angle of divergence), its optical path distance is long, comparatively complicated, has increased measurement difficulty and measuring error, has also caused waste of time simultaneously.For traditional measuring method, the utility model proposes all parameter measurement light paths are integrated in the device, the light path that the reasonably optimizing parameters is measured makes measurement module compacter, and measurement data is more accurate.Utilize this parameter measuring apparatus, can measure simultaneously the arbitrary parameter of laser instrument, and the data of surveying have higher accuracy, real-time, can save the test duration in a large number simultaneously.
The utility model content
The technical matters that (one) will solve
Traditional measuring method can not be measured laser instrument at a time numerical value and the mutual relationship of several parameters simultaneously, and for some parameter (such as the angle of divergence), its optical path distance is long, comparatively complicated, has increased measurement difficulty and measuring error, has also caused waste of time simultaneously.
(2) technical scheme
The above-mentioned technical matters that exists for solving traditional measurement method, use a plurality of 45 ° of total reflective mirrors to launch light path at two-dimensional directional in the technical scheme that the utility model proposes, shorten the air line distance between the light path two ends in the measurement mechanism, make measurement mechanism compacter, measurement data is more accurate, and by using a plurality of 45 ° of total reflective mirrors can measure simultaneously the arbitrary parameter of laser instrument, have real-time, can save the test duration in a large number simultaneously.
A kind of laser divergence angle and light spot shape measurement mechanism, comprise: laser instrument 1, the first attenuator 2, condenser lens 3, the second attenuator 9 and beam quality analysis instrument 4, it is characterized in that, this device also comprises 6 45 ° of total reflective mirrors 5, by using described 6 45 ° of total reflective mirrors 5 that light path is launched at two-dimensional directional, so that laser is the focal length of condenser lens 3 through the propagation distance that condenser lens 3 arrives beam quality analysis instrument 4.
Simultaneously, the utility model also proposes laser measuring device parameter, comprise: laser instrument 1, condenser lens 3, beam quality analysis instrument 4, it is characterized in that, this measurement mechanism also comprises: the first spectroscope 6, power meter 7,4 45 ° of total reflective mirrors 5, the second spectroscope 10, the 3rd spectroscope 11, wavemeter 12 and photodetectors 8, by using described 4 45 ° of total reflective mirrors 5 that light path is launched at two-dimensional directional, so that laser is the focal length of condenser lens 3 through the propagation distance that condenser lens 3 arrives beam quality analysis instrument 4.
(3) beneficial effect
Compare with traditional measuring technique, the parameter measuring apparatus that is used for laser system that the utility model provides can be measured all parameters of laser instrument in real time, save Measuring Time, increase accuracy and the contrast property of parameter measurement data, and the measurement mechanism compact conformation has reduced the space constraint of some parameter measurement.
Description of drawings
Fig. 1 is the conventional laser angle of divergence and light spot shape measurement mechanism index path.
Fig. 2 is the utility model laser divergence angle and light spot shape measurement mechanism index path.
Fig. 3 is the utility model laser measuring device parameter index path.
Fig. 4 is the utility model laser measuring device parameter stereographic map.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the utility model is described in further detail.
Traditional laser divergence angle and the employed device of light spot shape measuring method and light path are as shown in Figure 1.Described traditional laser divergence angle and light spot shape measurement mechanism comprise: laser instrument 1, the first attenuator 2, condenser lens 3, the second attenuator 9 and beam quality analysis instrument 4.Its principle is to enter in the beam quality analysis instrument 4 of placing at the focus place of condenser lens 3 through the second attenuator 9 after laser instrument 1 output light focuses on through condenser lens 3 after through the first attenuator 2 more again.The angle of divergence and the light spot shape parameter of using the beam quality analysis instrument to obtain light are the known technologies of this area, do not do at this and give unnecessary details.Be the focal length of condenser lens 3 shown in Fig. 1 apart from f.In light path, place attenuator and be in order to prevent that laser energy is too high and damage condenser lens and beam quality analysis instrument.Described traditional laser divergence angle and light spot shape measuring method require the focal length of condenser lens greater than 50 centimetres, and preferred focal length is 1 meter condenser lens.So just, cause light path shown in Figure 1 long, thereby limited its scope of application.
For solving the long technical matters of above-mentioned light path, the utility model improves traditional measurement light path shown in Figure 1, as shown in Figure 2.Except laser instrument 1, the first attenuator 2, condenser lens 3, the second attenuator 9 and beam quality analysis instrument 4, also comprise 6 45 ° of total reflective mirrors 5 in the laser divergence angle that the utility model provides and the light spot shape measurement mechanism.First 45 ° of total reflective mirrors are arranged between laser instrument 1 and the first attenuator 2, preferably, the light angle at 45 ° that the minute surface of first 45 ° of total reflective mirrors and laser instrument 1 penetrate, and reflected light and incident light through first 45 ° of total reflective mirrors meet at right angles, and vertically inject the first attenuator 2 from the light that first 45 ° of total reflective mirrors reflect.The light that sees through the first attenuator 2 is injected second 45 ° of total reflective mirror through behind the condenser lens 3, and between second 45 ° of total reflective mirror, the 3rd 45 ° of total reflective mirrors, the 4th 45 ° of total reflective mirrors, the 5th 45 ° of total reflective mirrors, the 6th 45 ° of total reflective mirrors, reflect successively, vertically inject second attenuator 9 from the light that the 6th 45 ° of total reflective mirror penetrates, the light that sees through second attenuator 9 is injected beam quality analysis instrument 4.As shown in Figure 2, the light path among Fig. 1 is launched at two-dimensional directional, so that laser still is the focal length of condenser lens 3 through the propagation distance that arrives beam quality analysis instrument 4 behind the condenser lens 3, preferably 1 meter, thus make optical path more compact.
For so that laser still is the focal length of condenser lens 3 through the propagation distance that arrives beam quality analysis instrument 4 behind the condenser lens 3, follow-up 5 45 ° of total reflective mirrors (i.e. second 45 ° of total reflective mirror, the 3rd 45 ° of total reflective mirrors, the 4th 45 ° of total reflective mirrors, the 5th 45 ° of total reflective mirrors, the 6th 45 ° of total reflective mirrors) angle and position relationship each other can have many kinds of set-up modes, as long as guarantee that the propagation distance of light between condenser lens 3 and beam quality analysis instrument 4 through above-mentioned 5 45 ° of total reflective mirrors is the focal length of condenser lens 3.Fig. 2 shows an embodiment in the described multiple set-up mode.Arrangement with reference to described five 45 ° of total reflective mirrors of Fig. 2 is specially: the planar cross-sectional angle at 45 ° of the minute surface of second 45 ° of total reflective mirror and condenser lens 3, see through described second 45 ° of total reflective mirror of light directive of described condenser lens 3, and meet at right angles through reflected light and the incident light of second 45 ° of total reflective mirror; The minute surface of the 3rd 45 ° of total reflective mirrors is parallel relative with the minute surface of described second 45 ° of total reflective mirror, so that the light that reflects from described second 45 ° of total reflective mirror is injected described the 3rd 45 ° of total reflective mirrors, and meet at right angles through reflected light and the incident light of the 3rd 45 ° of total reflective mirrors; The minute surface of the minute surface of the 4th 45 ° of total reflective mirrors and described the 3rd 45 ° of total reflective mirrors meets at right angles, so that the light that reflects from described the 3rd 45 ° of total reflective mirrors is injected described the 4th 45 ° of total reflective mirrors, and meet at right angles through reflected light and the incident light of the 4th 45 ° of total reflective mirrors; The minute surface of the 5th 45 ° of total reflective mirrors is parallel relative with the minute surface of described the 4th 45 ° of total reflective mirrors, so that the light that reflects from described the 4th 45 ° of total reflective mirrors is injected described the 5th 45 ° of total reflective mirrors, and meet at right angles through reflected light and the incident light of the 5th 45 ° of total reflective mirrors; The minute surface of the minute surface of the 6th 45 ° of total reflective mirrors and described the 5th 45 ° of total reflective mirrors meets at right angles, so that the light that reflects from described the 5th 45 ° of total reflective mirrors is injected described the 6th 45 ° of total reflective mirrors, and meet at right angles through reflected light and the incident light of the 6th 45 ° of total reflective mirrors; The in-plane angle at 45 ° of the minute surface of the 6th 45 ° of total reflective mirrors and the second attenuator 9 is so that vertically inject the second attenuator 9 from the light of the 6th 45 ° of total reflective mirrors ejaculation.
Laser measuring device parameter index path of the present utility model as shown in Figure 3.Except laser instrument 1, condenser lens 3, beam quality analysis instrument 4, described laser measuring device parameter also comprises: the first spectroscope 6, power meter 7,4 45 ° of total reflective mirrors 5, the second spectroscope 10, the 3rd spectroscope 11, wavemeter 12 and photodetectors 8.Its principle is: the output light of laser instrument 1 through the first spectroscope 6 after most of transmission and inciding on the probe of power meter 7, thereby can obtain output energy and two parameters of energy stability of laser; The first spectroscope 6 directly enters condenser lens 3 with the reflection of sub-fraction light, so because need not to increase attenuator before the very low lens of catoptrical energy, reflected light carries out light splitting through propagating on the second spectroscope 10 along light path shown in Figure 3 behind the condenser lens 3, the transmitted light that transmission is come then shines directly on the photodetector 8, the output signal of photodetector 8 can be exported to oscillograph, and (oscillograph is the known technology of this area, Fig. 3 is not shown) thus the pulsewidth parameter of acquisition laser, and the illumination that reflects on the second spectroscope 10 is mapped to and carries out light splitting on the 3rd spectroscope 11, the light that reflects from the 3rd spectroscope 11 directly advances the wavemeter 12 by coupling fiber, from wavemeter 12, can obtain the parameters such as the live width of laser and centre wavelength, the light that transmits from the 3rd spectroscope 11 is lower owing to energy, directly can shine on the probe of beam quality analysis instrument 4, need not to increase attenuator, from beam quality analysis instrument 4, can directly measure the angle of divergence of laser, light spot shape, the parameters such as beam quality.As shown in Figure 3, also be that the light path among Fig. 1 is launched at two-dimensional directional, so that laser still is the focal length of condenser lens 3 through the propagation distance that arrives beam quality analysis instrument 4 behind the condenser lens 3, preferably 1 meter, thus make optical path more compact.
For so that laser still is the focal length of condenser lens 3 through the propagation distance that arrives beam quality analysis instrument 4 behind the condenser lens 3, described 4 45 ° of total reflective mirrors angle and position relationship each other can have many kinds of set-up modes, as long as guarantee that the propagation distance of light between condenser lens 3 and beam quality analysis instrument 4 through above-mentioned 4 45 ° of total reflective mirrors is the focal length of condenser lens 3.Fig. 3 shows an embodiment in the described multiple set-up mode.With reference to shown in Figure 3, the arrangement of 4 45 ° of total reflective mirrors is specially in the laser measuring device parameter: the planar cross-sectional angle at 45 ° of the minute surface of first 45 ° of total reflective mirrors and condenser lens 3, see through described first 45 ° of total reflective mirrors of light directive of described condenser lens 3, and meet at right angles through reflected light and the incident light of first 45 ° of total reflective mirrors; The minute surface of second 45 ° of total reflective mirror is parallel relative with the minute surface of described first 45 ° of total reflective mirrors, so that the light that reflects from described first 45 ° of total reflective mirrors is injected described second 45 ° of total reflective mirror, and meet at right angles through reflected light and the incident light of second 45 ° of total reflective mirror; The minute surface of the minute surface of the 3rd 45 ° of total reflective mirrors and described second 45 ° of total reflective mirror meets at right angles, so that the light that reflects from described second 45 ° of total reflective mirror is injected described the 3rd 45 ° of total reflective mirrors, and meet at right angles through reflected light and the incident light of the 3rd 45 ° of total reflective mirrors; The minute surface of the 4th 45 ° of total reflective mirrors is parallel relative with the minute surface of described the 3rd 45 ° of total reflective mirrors, so that the light that reflects from described the 3rd 45 ° of total reflective mirrors is injected described the 4th 45 ° of total reflective mirrors, and meet at right angles through reflected light and the incident light of the 4th 45 ° of total reflective mirrors; The minute surface of the 4th 45 ° of total reflective mirrors and the in-plane of the second spectroscope 10 meet at right angles, so that the light that penetrates from the 4th 45 ° of total reflective mirror is injected the second spectroscope 10, and so that meet at right angles through incident light and the reflected light of the second spectroscope 10 and the 3rd spectroscope 11.
In sum, utilize laser measuring device parameter shown in Figure 3, can measure simultaneously output energy, output energy stability, the angle of divergence, light spot shape, beam quality, pulsewidth, live width, centre wavelength and the centre wavelength stability of laser instrument.Because all parameters are simultaneously and measure, so increased the contrast property of the data of surveying.
Laser measuring device parameter stereographic map of the present utility model as shown in Figure 4.Described laser measuring device parameter is that three spectroscopes 6,10,11 shown in Figure 3, condenser lens 3,4 45 ° of total reflective mirrors 5 are formed in the metal box by the light path ordered set, this metal box is of a size of: 60 centimeter length, 25 centimetres wide, 10 centimetres high, structure is compact.
Above-described specific embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; be understood that; the above only is specific embodiment of the utility model; be not limited to the utility model; all within spirit of the present utility model and principle, any modification of making, be equal to replacement, improvement etc., all should be included within the protection domain of the present utility model.
Claims (10)
1. a laser divergence angle and light spot shape measurement mechanism, comprise: laser instrument (1), the first attenuator (2), condenser lens (3), the second attenuator (9) and beam quality analysis instrument (4), it is characterized in that, this device also comprises 6 45 ° total reflective mirrors (5), by using described 6 45 ° total reflective mirrors (5) that light path is launched at two-dimensional directional, so that laser is the focal length of condenser lens (3) through the propagation distance that condenser lens (3) arrives beam quality analysis instrument (4).
2. laser divergence angle as claimed in claim 1 and light spot shape measurement mechanism are further characterized in that, in described 6 the 45 ° total reflective mirrors (5), first 45 ° of total reflective mirrors are arranged between laser instrument (1) and the first attenuator (2); Inject second 45 ° of total reflective mirror behind the light process condenser lens (3) through the first attenuator (2), and between second 45 ° of total reflective mirror, the 3rd 45 ° of total reflective mirrors, the 4th 45 ° of total reflective mirrors, the 5th 45 ° of total reflective mirrors, the 6th 45 ° of total reflective mirrors, reflect successively, inject second attenuator (9) from the light that the 6th 45 ° of total reflective mirror penetrates, the light that sees through second attenuator (9) is injected beam quality analysis instrument (4).
3. laser divergence angle as claimed in claim 2 and light spot shape measurement mechanism, be further characterized in that, in described 6 the 45 ° total reflective mirrors (5), second 45 ° of total reflective mirror, the 3rd 45 ° of total reflective mirrors, the 4th 45 ° of total reflective mirrors, the 5th 45 ° of total reflective mirrors, the 6th 45 ° of total reflective mirrors angle and position relationship each other is: the planar cross-sectional angle at 45 ° of the minute surface of second 45 ° of total reflective mirror and condenser lens (3), see through described second 45 ° of total reflective mirror of light directive of described condenser lens (3), and meet at right angles through reflected light and the incident light of second 45 ° of total reflective mirror; The minute surface of the 3rd 45 ° of total reflective mirrors is parallel relative with the minute surface of described second 45 ° of total reflective mirror, so that the light that reflects from described second 45 ° of total reflective mirror is injected described the 3rd 45 ° of total reflective mirrors, and meet at right angles through reflected light and the incident light of the 3rd 45 ° of total reflective mirrors; The minute surface of the minute surface of the 4th 45 ° of total reflective mirrors and described the 3rd 45 ° of total reflective mirrors meets at right angles, so that the light that reflects from described the 3rd 45 ° of total reflective mirrors is injected described the 4th 45 ° of total reflective mirrors, and meet at right angles through reflected light and the incident light of the 4th 45 ° of total reflective mirrors; The minute surface of the 5th 45 ° of total reflective mirrors is parallel relative with the minute surface of described the 4th 45 ° of total reflective mirrors, so that the light that reflects from described the 4th 45 ° of total reflective mirrors is injected described the 5th 45 ° of total reflective mirrors, and meet at right angles through reflected light and the incident light of the 5th 45 ° of total reflective mirrors; The minute surface of the minute surface of the 6th 45 ° of total reflective mirrors and described the 5th 45 ° of total reflective mirrors meets at right angles, so that the light that reflects from described the 5th 45 ° of total reflective mirrors is injected described the 6th 45 ° of total reflective mirrors, and meet at right angles through reflected light and the incident light of the 6th 45 ° of total reflective mirrors; The in-plane angle at 45 ° of the minute surface of the 6th 45 ° of total reflective mirrors and the second attenuator (9) is so that inject the second attenuator (9) from the light of the 6th 45 ° of total reflective mirrors ejaculation.
4. laser divergence angle as claimed in claim 1 and light spot shape measurement mechanism are further characterized in that, the focal length of described condenser lens (3) is 1 meter.
5. laser measuring device parameter, comprise: laser instrument (1), condenser lens (3), beam quality analysis instrument (4), it is characterized in that, this measurement mechanism also comprises: the first spectroscope (6), power meter (7), 4 45 ° total reflective mirrors (5), the second spectroscope (10), the 3rd spectroscope (11), wavemeter (12) and photodetector (8), by using described 4 45 ° total reflective mirrors (5) that light path is launched at two-dimensional directional, so that laser is the focal length of condenser lens (3) through the propagation distance that condenser lens (3) arrives beam quality analysis instrument (4).
6. measurement mechanism as claimed in claim 5 is further characterized in that,
The output light of laser instrument (1) is through most of transmission behind the first spectroscope (6) and incide on the probe of power meter (7);
The first spectroscope (6) directly enters condenser lens (3) with the reflection of sub-fraction light, propagate on the second spectroscope (10) behind the reflected light process condenser lens (3) and carry out light splitting, the light of the upper reflection of the second spectroscope (10) shines directly on the 3rd spectroscope (11) and carries out light splitting, the light of the upper reflection of the 3rd spectroscope (11) directly arrives in the wavemeter (12) by coupling fiber, and the light of the upper transmission of the 3rd spectroscope (11) shines directly on the probe of beam quality analysis instrument (4);
The transmitted light of coming from the upper transmission of described the second spectroscope (10) then shines directly on the photodetector (8), and the output signal of photodetector (8) can be exported to oscillograph.
7. measurement mechanism as claimed in claim 6 is further characterized in that, obtains output energy and the energy stability parameter of laser by power meter (7); Obtain the angle of divergence, light spot shape, the Beam quality parameter of laser by beam quality analysis instrument (4); Obtain the pulsewidth parameter by photodetector (8) and oscillograph; Obtain live width and the centre wavelength parameter of laser by wavemeter (12).
8. measurement mechanism as claimed in claim 5, be further characterized in that, described 4 45 ° total reflective mirrors (5) angle and position relationship each other is: the planar cross-sectional angle at 45 ° of the minute surface of first 45 ° of total reflective mirrors and condenser lens 3, see through described first 45 ° of total reflective mirrors of light directive of described condenser lens (3), and meet at right angles through reflected light and the incident light of first 45 ° of total reflective mirrors; The minute surface of second 45 ° of total reflective mirror is parallel relative with the minute surface of described first 45 ° of total reflective mirrors, so that the light that reflects from described first 45 ° of total reflective mirrors is injected described second 45 ° of total reflective mirror, and meet at right angles through reflected light and the incident light of second 45 ° of total reflective mirror; The minute surface of the minute surface of the 3rd 45 ° of total reflective mirrors and described second 45 ° of total reflective mirror meets at right angles, so that the light that reflects from described second 45 ° of total reflective mirror is injected described the 3rd 45 ° of total reflective mirrors, and meet at right angles through reflected light and the incident light of the 3rd 45 ° of total reflective mirrors; The minute surface of the 4th 45 ° of total reflective mirrors is parallel relative with the minute surface of described the 3rd 45 ° of total reflective mirrors, so that the light that reflects from described the 3rd 45 ° of total reflective mirrors is injected described the 4th 45 ° of total reflective mirrors, and meet at right angles through reflected light and the incident light of the 4th 45 ° of total reflective mirrors; The in-plane of the minute surface of the 4th 45 ° of total reflective mirrors and the second spectroscope (10) meets at right angles, so that the light that penetrates from the 4th 45 ° of total reflective mirror is injected the second spectroscope (10), and so that meet at right angles through incident light and the reflected light of the second spectroscope (10) and the 3rd spectroscope (11).
9. measurement mechanism as claimed in claim 5 is further characterized in that, the focal length of described condenser lens (3) is 1 meter.
10. measurement mechanism as claimed in claim 5 is further characterized in that, described measurement mechanism is integrated in the metal box by light path.
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| CN 201220465469 CN202869779U (en) | 2012-09-13 | 2012-09-13 | Device for measuring divergence angle and light spot pattern of laser |
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| CN105092216A (en) * | 2015-08-29 | 2015-11-25 | 中国科学院光电研究院 | Laser diode area array pumped uniformity detection apparatus |
| CN105928689A (en) * | 2016-06-24 | 2016-09-07 | 中国科学院云南天文台 | Laser far field divergence angle measurement method and device in satellite laser ranging |
| CN107356407A (en) * | 2016-05-10 | 2017-11-17 | 南京理工大学 | The device of synchro measure high-capacity optical fiber laser power, spectrum and beam quality |
| CN107991062A (en) * | 2017-11-15 | 2018-05-04 | 中国科学院长春光学精密机械与物理研究所 | Spot detection method and system based on fiber coupling |
| CN108548481A (en) * | 2018-02-24 | 2018-09-18 | 厦门盈趣科技股份有限公司 | A kind of measuring system and method for laser spot size |
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- 2012-09-13 CN CN 201220465469 patent/CN202869779U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105092216A (en) * | 2015-08-29 | 2015-11-25 | 中国科学院光电研究院 | Laser diode area array pumped uniformity detection apparatus |
| CN105092216B (en) * | 2015-08-29 | 2020-08-07 | 中国科学院光电研究院 | Laser diode area array pumping uniformity detection device |
| CN107356407A (en) * | 2016-05-10 | 2017-11-17 | 南京理工大学 | The device of synchro measure high-capacity optical fiber laser power, spectrum and beam quality |
| CN107356407B (en) * | 2016-05-10 | 2020-04-10 | 南京理工大学 | Device for synchronously measuring power, spectrum and beam quality of high-power fiber laser |
| CN105928689A (en) * | 2016-06-24 | 2016-09-07 | 中国科学院云南天文台 | Laser far field divergence angle measurement method and device in satellite laser ranging |
| CN105928689B (en) * | 2016-06-24 | 2018-02-27 | 中国科学院云南天文台 | Laser far field divergence measuring method and device in a kind of satellite laser ranging (SLR) |
| CN107991062A (en) * | 2017-11-15 | 2018-05-04 | 中国科学院长春光学精密机械与物理研究所 | Spot detection method and system based on fiber coupling |
| CN108548481A (en) * | 2018-02-24 | 2018-09-18 | 厦门盈趣科技股份有限公司 | A kind of measuring system and method for laser spot size |
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Effective date of registration: 20200910 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Research Institute of aerospace information innovation, Chinese Academy of Sciences Address before: 9 Dengzhuang South Road, Haidian District, Beijing 100094 Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences Effective date of registration: 20200910 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics, Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Research Institute of aerospace information innovation, Chinese Academy of Sciences |
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Granted publication date: 20130410 |