CN111504612A - Testing arrangement of many light sources laser damage threshold value - Google Patents
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract
The invention discloses a device for testing a multi-light-source laser damage threshold, which comprises a laser, a polarizing film, an isolator, a lambda/2 wave plate, a polarizing film, a 45-degree total reflection mirror, a laser, a polarizing film, an isolator, a lambda/2 wave plate, a polarizing film, a semi-transparent semi-reflection mirror, a laser shutter, a 45-degree total reflection mirror, a semi-transparent semi-reflection mirror, a focusing system, a beam splitter, a beam analyzer, a power/energy meter, a photoelectric detector, a spectrum analyzer, a monochromatic signal light source, a collimation system, a semi-transparent semi-reflection mirror, a 45-degree total reflection mirror, a semi-transparent semi-reflection mirror, an amplification system, a high-speed camera, an indicating laser, a 45-degree total. The device has the advantages of high response speed, low misjudgment rate and the like, can realize multi-wavelength laser damage threshold test, and realizes integration and automation of a test system.
Description
Technical Field
The invention relates to the technical field of optical components, in particular to a device for testing a multi-light-source laser damage threshold value.
Background
In recent years, with the continuous development of laser technology, a high-energy ultrafast laser is widely applied in the fields of laser processing, laser ranging, biomedical detection, military and national defense and the like, the laser damage resistance of an optical element in the laser becomes a main factor restricting the development of the high-energy laser at present, the laser damage resistance comprises an optical element plated with a multispectral film, the optical film is a core component of the optical element and directly determines the laser damage resistance of the optical element, and a laser damage threshold value is an important technical index for measuring the laser damage resistance of the optical film.
In the prior art, the laser damage threshold is mainly established for a single light source, and a multi-source coaxial damage threshold testing system is difficult to realize full automation, has a complex structure and low measurement precision, so that the multi-source high-efficiency measuring system is an important technical problem to be solved urgently, and the testing accuracy needs to be further researched.
Disclosure of Invention
The invention aims to provide a multi-light-source laser damage threshold testing device which has the advantages of high response speed, low misjudgment rate and the like, can realize multi-wavelength laser damage threshold testing, and realizes integration and automation of a testing system.
The purpose of the invention is realized by the following technical scheme:
the device comprises a laser (1), a polarizing plate (2), an isolator (3), a lambda/2 wave plate (4), a polarizing plate (5), a 45-degree total reflection mirror (6), a laser (7), a polarizing plate (8), an isolator (9), a lambda/2 wave plate (10), a polarizing plate (11), a semi-permeable semi-reflecting mirror (12), a laser shutter (13), a 45-degree total reflection mirror (14), a semi-permeable semi-reflecting mirror (15), a focusing system (16), a beam splitter (17), a beam splitter (18), a beam analyzer (20), a power/energy meter (21), a photoelectric detector (22), an optical spectrum analyzer (23), a monochromatic signal light source (24), a collimating system (25), a semi-permeable semi-reflecting mirror (26), a 45-degree total reflection mirror (27), a semi-permeable semi-reflecting mirror (28), an amplifying system (29), High-speed camera (30), instruction laser (31), 45 ° holo-mirror (32) and control terminal (33), wherein:
laser emitted by the laser (1) is reflected by the polaroid (2), the isolator (3), the lambda/2 wave plate (4), the polaroid (5) and the 45-degree total reflector (6) and then enters the semi-transparent semi-reflecting mirror (12) for transmission; laser emitted by the laser (7) enters the semi-transparent half-reflecting mirror (12) for transmission after passing through the polaroid (8), the isolator (9), the lambda/2 wave plate (10) and the polaroid (11); the two beams of laser are coupled and coaxial after being transmitted by the semi-transparent semi-reflecting mirror (12);
the coaxial laser enters a semi-transparent semi-reflecting mirror (15) after being reflected by a laser shutter (13) and a 45-degree total reflecting mirror (14); the laser shutter (13) is used for controlling pulse repetition frequency to realize 1-on-1 or S-on-1;
laser emitted by the indicating laser (31) enters the semi-transparent and semi-reflective mirror (15) after being reflected by the 45-degree total reflection mirror (32), and is coaxial with the laser (1) and the laser (7) output to the semi-transparent and semi-reflective mirror (15);
the laser after coaxial passes through a focusing system (16), a beam splitter (17) and a beam splitter (18) and then acts on the surface of a sample (19), wherein:
the laser reflected by the beam splitter (17) is received by a power/energy meter (21), the power/energy of the laser acting on the surface of the sample (19) is monitored in real time, and a spectrum analyzer (23) is used for testing the spectrum of the laser; the laser reflected by the beam splitter (18) is received by a beam analyzer (20), the size of a light spot acting on the surface of the sample (19) is monitored in real time, and the pulse width and the repetition frequency of the laser are tested by a photoelectric detector (22);
laser output by a monochromatic signal light source (24) is collimated by a collimating system (25) and then is divided into two beams by a semi-transparent semi-reflecting mirror (26), one beam reaches the semi-transparent semi-reflecting mirror (28) after being reflected by the surface of a sample (19), the other beam reaches the semi-transparent semi-reflecting mirror (28) after being reflected by a 45-degree total reflecting mirror (27), the two beams are coaxial after passing through the semi-transparent semi-reflecting mirror (28), and then enter a high-speed camera (30) after being processed by an amplifying system (29);
the high-speed camera (30) is arranged on a focal plane of the magnifying system (29) and is used for acquiring a momentary photo of the interference fringes and transmitting the photo to the control terminal (33) for storage;
the laser (1), the laser (7), the laser shutter (13), the beam analyzer (20), the power/energy meter (21), the photoelectric detector (22), the spectrum analyzer (23), the monochromatic signal light source (24), the indicating laser (31) and the high-speed camera (30) are all controlled by the control terminal (33) in a unified mode, and test data and results are displayed, recorded and stored on the control terminal (33) in real time.
According to the technical scheme provided by the invention, the device has the advantages of high response speed, low false judgment rate and the like, can realize multi-wavelength laser damage threshold value test, realizes integration and automation of a test system, and can quickly and accurately judge damage of a film layer of an optical component on line in real time, automatically draw a damage probability graph and issue a detection report.
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In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on the drawings without creative efforts.
Fig. 1 is a schematic view of an overall structure of a device for testing a multiple-light-source laser damage threshold according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
The following will describe an embodiment of the present invention in further detail with reference to the accompanying drawings, and as shown in fig. 1, the overall structural schematic diagram of the device for testing a multiple light source laser damage threshold provided by the embodiment of the present invention is shown, where the device mainly includes a laser (1), a polarizer (2), an isolator (3), a λ/2 wave plate (4), a polarizer (5), a 45 ° half mirror (6), a laser (7), a polarizer (8), an isolator (9), a λ/2 wave plate (10), a polarizer (11), a half-transparent half mirror (12), a laser shutter (13), a 45 ° half mirror (14), a half-transparent half mirror (15), a focusing system (16), a beam splitter (17), a beam splitter (18), a beam analyzer (20), a power/energy meter (21), a photodetector (22), a spectrum analyzer (23), a monochromatic signal light source (24), and a focusing system (16), Collimation system (25), semi-transparent half-mirror (26), 45 full reflection mirror (27), semi-transparent half-mirror (28), magnification system (29), high-speed camera (30), instruction laser (31), 45 full reflection mirror (32) and control terminal (33), wherein:
laser emitted by the laser (1) is reflected by the polaroid (2), the isolator (3), the lambda/2 wave plate (4), the polaroid (5) and the 45-degree total reflector (6) and then enters the semi-transparent semi-reflecting mirror (12) for transmission; laser emitted by the laser (7) enters the semi-transparent half-reflecting mirror (12) for transmission after passing through the polaroid (8), the isolator (9), the lambda/2 wave plate (10) and the polaroid (11); the two beams of laser are coupled and coaxial after being transmitted by the semi-transparent semi-reflecting mirror (12);
the coaxial laser enters a semi-transparent semi-reflecting mirror (15) after being reflected by a laser shutter (13) and a 45-degree total reflecting mirror (14); the laser shutter (13) is used for controlling pulse repetition frequency to realize 1-on-1 or S-on-1; here, 1-on-1 is a 1-to-1 test in which only one laser irradiation damage threshold test process is performed on each test point on the surface of a test sample; s-on-1 is a damage threshold test process of irradiating each test point on the surface of a test sample by adopting a pulse string with the same energy density for the test of S pair 1;
laser emitted by the indicating laser (31) enters the semi-transparent and semi-reflective mirror (15) after being reflected by the 45-degree total reflection mirror (32), and is coaxial with the laser (1) and the laser (7) output to the semi-transparent and semi-reflective mirror (15); before testing, the indication laser (31) is turned on to conveniently adjust the action area of the laser on the sample (19);
the laser after coaxial passes through a focusing system (16), a beam splitter (17) and a beam splitter (18) and then acts on the surface of a sample (19), wherein:
the laser reflected by the beam splitter (17) is received by a power/energy meter (21), the power/energy of the laser acting on the surface of the sample (19) is monitored in real time, and a spectrum analyzer (23) is used for testing the spectrum of the laser; the laser reflected by the beam splitter (18) is received by a beam analyzer (20), the size of a light spot acting on the surface of the sample (19) is monitored in real time, and the pulse width and the repetition frequency of the laser are tested by a photoelectric detector (22);
laser output by a monochromatic signal light source (24) is collimated by a collimating system (25) and then is divided into two beams by a semi-transparent semi-reflecting mirror (26), one beam reaches the semi-transparent semi-reflecting mirror (28) after being reflected by the surface of a sample (19), the other beam reaches the semi-transparent semi-reflecting mirror (28) after being reflected by a 45-degree total reflecting mirror (27), the two beams are coaxial after passing through the semi-transparent semi-reflecting mirror (28), and then enter a high-speed camera (30) after being processed by an amplifying system (29);
the high-speed camera (30) is arranged on a focal plane of the magnifying system (29) and is used for acquiring a momentary photo of the interference fringes and transmitting the photo to the control terminal (33) for storage;
the laser (1), the laser (7), the laser shutter (13), the beam analyzer (20), the power/energy meter (21), the photoelectric detector (22), the spectrum analyzer (23), the monochromatic signal light source (24), the indicating laser (31) and the high-speed camera (30) are all controlled by the control terminal (33) in a unified mode, and test data and results are displayed, recorded and stored on the control terminal (33) in real time.
In the specific implementation, the laser action energy density or power density is obtained by acquiring data such as laser energy and spot size irradiated on the surface of a sample, action laser wavelength, pulse width, repetition frequency and the like in real time; and acquiring and recording signal light source interference images in real time by adopting a high-speed camera, recording the number of deformed interference patterns, calculating the laser damage probability under different energy density conditions, and drawing a damage probability map so as to obtain the laser damage threshold of the optical component.
In the structure of the device, the polaroid (2) and the isolator (3) form a laser protection unit to prevent return light of a light path from entering the laser (1) to damage the laser; the polaroid (8) and the isolator (9) form a laser protection unit, and light path return light is prevented from entering the laser (7) to damage the laser.
The lambda/2 wave plate (4) and the polaroid (5) form an energy adjusting unit, and the energy output by the laser (1) in the optical path is adjusted by rotating the lambda/2 wave plate (4); the lambda/2 wave plate (10) and the polaroid (11) form an energy adjusting unit, and the energy output by the laser (7) in the optical path is adjusted by rotating the lambda/2 wave plate (10).
In addition, the four reflecting surfaces of the sample (19), the semi-transparent and semi-reflective mirror (26), the 45-degree total reflection mirror (27) and the semi-transparent and semi-reflective mirror (28) are kept parallel when being installed.
The sample (19) is installed on the clamping frame and fixed on the electric three-dimensional translation table, a walking route of the electric three-dimensional translation table is arranged on the control terminal (33) according to the shape and size of the sample (19), so that the single energy density laser acts on at least 10 test points, the light field intensity of each focus point is uniformly distributed, and the laser damage threshold of the optical film can be quickly and accurately measured.
The electric three-dimensional translation stage can move the position of the sample (19) within a certain range, so that the focal length difference of the focusing lens to the laser with different wavelengths is compensated; and the electric three-dimensional translation stage keeps the front surface of the sample (19) in the same plane all the time during operation.
In addition, the sample (19) and the 45-degree total reflection mirror (27) are respectively installed by adopting an adjustable fixing frame, and the front surfaces of the sample and the 45-degree total reflection mirror are limited, so that the sample and the 45-degree total reflection mirror are convenient to assemble and disassemble and ensure aplanatism.
It is noted that those skilled in the art will recognize that embodiments of the present invention are not described in detail herein. For example, the polarizing plates can be replaced by the polarizing beam splitter prism, but the damage threshold of the polarizing beam splitter prism is low, so that the polarizing beam splitter prism is suitable for testing under low-power or low-energy conditions.
In summary, the testing device provided by the embodiment of the invention measures the damage threshold of the optical element thin film by using the mach-zehnder interferometry, has the advantages of high response speed, low false judgment rate and the like, can realize multi-wavelength laser damage threshold testing, realizes integration and automation of a testing system, can quickly and accurately judge damage of the optical element thin film on line in real time, automatically draws a damage probability map, and provides a detection report.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (7)
1. The device is characterized by comprising a laser (1), a polarizing plate (2), an isolator (3), a lambda/2 wave plate (4), a polarizing plate (5), a 45-degree total reflection mirror (6), a laser (7), a polarizing plate (8), an isolator (9), a lambda/2 wave plate (10), a polarizing plate (11), a semi-transparent semi-reflecting mirror (12), a laser shutter (13), a 45-degree total reflection mirror (14), a semi-transparent semi-reflecting mirror (15), a focusing system (16), a beam splitter (17), a beam splitter (18), a beam analyzer (20), a power/energy meter (21), a photoelectric detector (22), a spectrum analyzer (23), a monochromatic signal light source (24), a collimating system (25), a semi-transparent semi-reflecting mirror (26), a 45-degree total reflection mirror (27), a semi-transparent semi-reflecting mirror (28), -a magnification system (29), -a high-speed camera (30), -an indicator laser (31), -a 45 ° total reflection mirror (32) and-a control terminal (33), wherein:
laser emitted by the laser (1) is reflected by the polaroid (2), the isolator (3), the lambda/2 wave plate (4), the polaroid (5) and the 45-degree total reflector (6) and then enters the semi-transparent semi-reflecting mirror (12) for transmission; laser emitted by the laser (7) enters the semi-transparent half-reflecting mirror (12) for transmission after passing through the polaroid (8), the isolator (9), the lambda/2 wave plate (10) and the polaroid (11); the two beams of laser are coupled and coaxial after being transmitted by the semi-transparent semi-reflecting mirror (12);
the coaxial laser enters a semi-transparent semi-reflecting mirror (15) after being reflected by a laser shutter (13) and a 45-degree total reflecting mirror (14); the laser shutter (13) is used for controlling pulse repetition frequency to realize 1-on-1 or S-on-1;
laser emitted by the indicating laser (31) enters the semi-transparent and semi-reflective mirror (15) after being reflected by the 45-degree total reflection mirror (32), and is coaxial with the laser (1) and the laser (7) output to the semi-transparent and semi-reflective mirror (15);
the laser after coaxial passes through a focusing system (16), a beam splitter (17) and a beam splitter (18) and then acts on the surface of a sample (19), wherein:
the laser reflected by the beam splitter (17) is received by a power/energy meter (21), the power/energy of the laser acting on the surface of the sample (19) is monitored in real time, and a spectrum analyzer (23) is used for testing the spectrum of the laser; the laser reflected by the beam splitter (18) is received by a beam analyzer (20), the size of a light spot acting on the surface of the sample (19) is monitored in real time, and the pulse width and the repetition frequency of the laser are tested by a photoelectric detector (22);
laser output by a monochromatic signal light source (24) is collimated by a collimating system (25) and then is divided into two beams by a semi-transparent semi-reflecting mirror (26), one beam reaches the semi-transparent semi-reflecting mirror (28) after being reflected by the surface of a sample (19), the other beam reaches the semi-transparent semi-reflecting mirror (28) after being reflected by a 45-degree total reflecting mirror (27), the two beams are coaxial after passing through the semi-transparent semi-reflecting mirror (28), and then enter a high-speed camera (30) after being processed by an amplifying system (29);
the high-speed camera (30) is arranged on a focal plane of the magnifying system (29) and is used for acquiring a momentary photo of the interference fringes and transmitting the photo to the control terminal (33) for storage;
the laser (1), the laser (7), the laser shutter (13), the beam analyzer (20), the power/energy meter (21), the photoelectric detector (22), the spectrum analyzer (23), the monochromatic signal light source (24), the indicating laser (31) and the high-speed camera (30) are all controlled by the control terminal (33) in a unified mode, and test data and results are displayed, recorded and stored on the control terminal (33) in real time.
2. The multi-light-source laser damage threshold test apparatus according to claim 1,
the polaroid (2) and the isolator (3) form a laser protection unit, so that light returning from a light path is prevented from entering the laser (1) to damage the laser;
the polaroid (8) and the isolator (9) form a laser protection unit, and light path return light is prevented from entering the laser (7) to damage the laser.
3. The multi-light-source laser damage threshold test apparatus according to claim 1,
the lambda/2 wave plate (4) and the polaroid (5) form an energy adjusting unit, and the energy output by the laser (1) in the optical path is adjusted by rotating the lambda/2 wave plate (4);
the lambda/2 wave plate (10) and the polaroid (11) form an energy adjusting unit, and the energy output by the laser (7) in the optical path is adjusted by rotating the lambda/2 wave plate (10).
4. The multi-light-source laser damage threshold test apparatus according to claim 1,
the four reflecting surfaces of the sample (19), the semi-transparent and semi-reflective mirror (26), the 45-degree total reflection mirror (27) and the semi-transparent and semi-reflective mirror (28) are kept parallel when being installed.
5. The multi-light-source laser damage threshold test apparatus according to claim 1,
the sample (19) is arranged on the clamping frame and fixed on the electric three-dimensional translation table, and the walking route of the electric three-dimensional translation table is arranged on the control terminal (33) according to the shape and size of the sample (19), so that the single energy density laser action is not less than 10 test points.
6. The multi-light-source laser damage threshold test apparatus according to claim 5,
the electric three-dimensional translation stage can move the position of the sample (19) within a certain range, so that the focal length difference of the focusing lens to the laser with different wavelengths is compensated;
and the electric three-dimensional translation stage keeps the front surface of the sample (19) in the same plane all the time during operation.
7. The multi-light-source laser damage threshold test apparatus according to claim 1,
the sample (19) and the 45-degree total reflection mirror (27) are respectively installed by adopting an adjustable fixing frame, and the front surfaces of the sample and the 45-degree total reflection mirror are both limited, so that the sample and the 45-degree total reflection mirror are convenient to assemble and disassemble and ensure aplanatism.
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| CN113310670A (en) * | 2021-06-03 | 2021-08-27 | 中国科学院空天信息创新研究院 | Laser polarization beam combination measuring device |
| CN113465884A (en) * | 2021-06-03 | 2021-10-01 | 中国科学院空天信息创新研究院 | Continuous laser damage threshold testing device |
| CN114486813A (en) * | 2021-12-31 | 2022-05-13 | 中国科学院空天信息创新研究院 | Device and method for testing laser damage threshold values in different polarization states |
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| CN112730262A (en) * | 2020-12-18 | 2021-04-30 | 中国科学院上海光学精密机械研究所 | Device and method for improving femtosecond laser induced damage threshold of KDP (Potassium dihydrogen phosphate) crystal |
| CN112362313A (en) * | 2021-01-11 | 2021-02-12 | 深圳市星汉激光科技股份有限公司 | Light path testing system and method for return light resistance of laser chip |
| CN112362313B (en) * | 2021-01-11 | 2021-04-23 | 深圳市星汉激光科技股份有限公司 | Light path testing system and method for return light resistance of laser chip |
| CN113310670A (en) * | 2021-06-03 | 2021-08-27 | 中国科学院空天信息创新研究院 | Laser polarization beam combination measuring device |
| CN113465884A (en) * | 2021-06-03 | 2021-10-01 | 中国科学院空天信息创新研究院 | Continuous laser damage threshold testing device |
| CN113465884B (en) * | 2021-06-03 | 2023-06-06 | 中国科学院空天信息创新研究院 | Continuous laser damage threshold testing device |
| CN114486813A (en) * | 2021-12-31 | 2022-05-13 | 中国科学院空天信息创新研究院 | Device and method for testing laser damage threshold values in different polarization states |
| CN114486813B (en) * | 2021-12-31 | 2023-08-04 | 中国科学院空天信息创新研究院 | Device and method for testing laser damage threshold values of different polarization states |
| CN116379974A (en) * | 2023-02-28 | 2023-07-04 | 浙江大学 | Device and method for detecting surface characteristics of optical element by using multi-wavelength light source |
| CN116379974B (en) * | 2023-02-28 | 2023-09-29 | 浙江大学 | Device and method for detecting surface characteristics of optical element by using multi-wavelength light source |
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