CN111504612B - Testing arrangement of many light sources laser damage threshold value - Google Patents
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- CN111504612B CN111504612B CN202010363545.4A CN202010363545A CN111504612B CN 111504612 B CN111504612 B CN 111504612B CN 202010363545 A CN202010363545 A CN 202010363545A CN 111504612 B CN111504612 B CN 111504612B
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- G—PHYSICS
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract
The invention discloses a device for testing a multi-light-source laser damage threshold, which comprises a laser, a polarizing film, an isolator, a lambda/2 wave plate, a polarizing film, a 45-degree total reflection mirror, a laser, a polarizing film, an isolator, a lambda/2 wave plate, a polarizing film, a semi-transparent semi-reflection mirror, a laser shutter, a 45-degree total reflection mirror, a semi-transparent semi-reflection mirror, a focusing system, a beam splitter, a beam analyzer, a power/energy meter, a photoelectric detector, a spectrum analyzer, a monochromatic signal light source, a collimation system, a semi-transparent semi-reflection mirror, a 45-degree total reflection mirror, a semi-transparent semi-reflection mirror, an amplification system, a high-speed camera, an indicating laser, a 45-degree total reflection mirror and a control terminal. The device has the advantages of high response speed, low misjudgment rate and the like, can realize multi-wavelength laser damage threshold test, and realizes integration and automation of a test system.
Description
Technical Field
The invention relates to the technical field of optical components, in particular to a device for testing a multi-light-source laser damage threshold value.
Background
In recent years, with the continuous development of laser technology, a high-energy ultrafast laser is widely applied in the fields of laser processing, laser ranging, biomedical detection, military and national defense and the like, the laser damage resistance of an optical element in the laser becomes a main factor restricting the development of the high-energy laser at present, the laser damage resistance comprises an optical element plated with a multispectral film, the optical film is a core component of the optical element and directly determines the laser damage resistance of the optical element, and a laser damage threshold value is an important technical index for measuring the laser damage resistance of the optical film.
In the prior art, the laser damage threshold is mainly established for a single light source, and a multi-source coaxial damage threshold testing system is difficult to realize full automation, has a complex structure and low measurement precision, so that the multi-source high-efficiency measuring system is an important technical problem to be solved urgently, and the testing accuracy needs to be further researched.
Disclosure of Invention
The invention aims to provide a multi-light-source laser damage threshold testing device which has the advantages of high response speed, low misjudgment rate and the like, can realize multi-wavelength laser damage threshold testing, and realizes integration and automation of a testing system.
The purpose of the invention is realized by the following technical scheme:
a device for testing a multi-light-source laser damage threshold value comprises a first laser 1, a first polaroid 2, a first isolator 3, a first lambda/2 wave plate 4, a second polaroid 5, a first 45-degree total reflection mirror 6, a second laser 7, a third polaroid 8, a second isolator 9, a second lambda/2 wave plate 10, a fourth polaroid 11, a first half-transmission half-mirror 12, a laser shutter 13, a second 45-degree total reflection mirror 14, a second half-transmission half-mirror 15, a focusing system 16, a first beam splitter 17, a second beam splitter 18, a beam analyzer 20, a power/energy meter 21, a photoelectric detector 22, a spectrum analyzer 23, a monochromatic signal light source 24, a collimation system 25, a third half-transmission half-mirror 26, a third 45-degree total reflection mirror 27, a fourth half-transmission half-mirror 28, an amplification system 29, a high-speed camera 30, an indicating laser 31, a first light source, a second light source, a third half-transmission half-reflection mirror 26, a second half-reflection mirror 27, a second half-transmission half-reflection mirror 28, a high-speed camera 30, a high-speed camera, a high-speed optical system, a high-, A fourth 45 ° holomirror 32 and a control terminal 33, wherein:
laser emitted by the first laser 1 is reflected by the first polaroid 2, the first isolator 3, the first lambda/2 wave plate 4, the second polaroid 5 and the first 45-degree total reflector 6 and then enters the first half-transmission half-reflection mirror 12 for transmission; laser light emitted by the second laser 7 passes through a third polaroid 8, a second isolator 9, a second lambda/2 wave plate 10 and a fourth polaroid 11 and then enters a first half-transmitting and half-reflecting mirror 12 for transmission; the two laser beams are coupled and coaxial after being transmitted by the first half-transmission half-reflection mirror 12;
the coaxial laser enters a second semi-transparent and semi-reflective mirror 15 after being reflected by a laser shutter 13 and a second 45-degree total-reflective mirror 14; the laser shutter 13 is used for controlling pulse repetition frequency to realize 1-on-1 or S-on-1;
the laser emitted by the indicating laser 31 enters the second half-transparent and half-reflective mirror 15 after being reflected by the fourth 45-degree full-reflective mirror 32, and is coaxial with the laser output to the second half-transparent and half-reflective mirror 15 by the first laser 1 and the second laser 7;
the laser after coaxial passes through the focusing system 16, the first beam splitter 17 and the second beam splitter 18 and acts on the surface of the sample 19, wherein:
the laser reflected by the first beam splitter 17 is received by a power/energy meter 21, the power/energy of the laser acting on the surface of the sample 19 is monitored in real time, and the spectrum of the laser is tested by a spectrum analyzer 23; the laser reflected by the second beam splitter 18 is received by a beam analyzer 20, the size of a light spot acting on the surface of the sample 19 is monitored in real time, and the pulse width and the repetition frequency of the laser are tested by a photoelectric detector 22;
laser output by the monochromatic signal light source 24 is collimated by a collimating system 25 and then is divided into two beams by a third half-transparent half-reflecting mirror 26, one beam reaches a fourth half-transparent half-reflecting mirror 28 after being reflected by the surface of a sample 19, the other beam reaches the fourth half-transparent half-reflecting mirror 28 after being reflected by a third 45-degree full-reflecting mirror 27, the two beams coaxially pass through the fourth half-transparent half-reflecting mirror 28 and then enter a high-speed camera 30 after being processed by an amplifying system 29;
the high-speed camera 30 is arranged on a focal plane of the amplifying system 29 and is used for acquiring instant photos of the interference fringes and transmitting the photos to the control terminal 33 for storage;
the first laser 1, the second laser 7, the laser shutter 13, the beam analyzer 20, the power/energy meter 21, the photodetector 22, the spectrum analyzer 23, the monochromatic signal light source 24, the indicating laser 31 and the high-speed camera 30 are all controlled by the control terminal 33 in a unified way, and the test data and results are displayed, recorded and stored on the control terminal 33 in real time.
According to the technical scheme provided by the invention, the device has the advantages of high response speed, low false judgment rate and the like, can realize multi-wavelength laser damage threshold value test, realizes integration and automation of a test system, and can quickly and accurately judge damage of a film layer of an optical component on line in real time, automatically draw a damage probability graph and issue a detection report.
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In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on the drawings without creative efforts.
Fig. 1 is a schematic view of an overall structure of a device for testing a multiple-light-source laser damage threshold according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
The following will describe an embodiment of the present invention in further detail with reference to the accompanying drawings, and as shown in fig. 1, is a schematic diagram of an overall structure of a device for testing a multiple light source laser damage threshold provided by the embodiment of the present invention, the device mainly includes a laser 1, a polarizer 2, an isolator 3, a λ/2 wave plate 4, a polarizer 5, a 45 ° half mirror 6, a laser 7, a polarizer 8, an isolator 9, a λ/2 wave plate 10, a polarizer 11, a half mirror 12, a laser shutter 13, a 45 ° half mirror 14, a half mirror 15, a focusing system 16, a beam splitter 17, a beam splitter 18, a beam analyzer 20, a power/energy meter 21, a photodetector 22, a spectrum analyzer 23, a monochromatic signal light source 24, a collimating system 25, a half mirror 26, a 45 ° half mirror 27, a half mirror 28, an amplifying system 29, a high-speed camera 30, An indicator laser 31, a 45 ° total reflection mirror 32 and a control terminal 33, wherein:
laser emitted by the laser 1 is reflected by the polaroid 2, the isolator 3, the lambda/2 wave plate 4, the polaroid 5 and the 45-degree total reflector 6 and then enters the semi-permeable and semi-reflective mirror 12 for transmission; laser emitted by the laser 7 enters the semi-transparent half-reflecting mirror 12 for transmission after passing through the polaroid 8, the isolator 9, the lambda/2 wave plate 10 and the polaroid 11; the two laser beams are coupled and coaxial after being transmitted by the semi-transparent and semi-reflective mirror 12;
the coaxial laser enters a semi-transparent semi-reflecting mirror 15 after being reflected by a laser shutter 13 and a 45-degree total reflecting mirror 14; the laser shutter 13 is used for controlling pulse repetition frequency to realize 1-on-1 or S-on-1; here, 1-on-1 is a 1-to-1 test in which only one laser irradiation damage threshold test process is performed on each test point on the surface of a test sample; s-on-1 is a damage threshold test process of irradiating each test point on the surface of a test sample by adopting a pulse string with the same energy density for the test of S pair 1;
the laser emitted by the indicating laser 31 enters the semi-transparent and semi-reflective mirror 15 after being reflected by the 45-degree total reflection mirror 32, and is coaxial with the laser 1 and the laser 7 which are output to the semi-transparent and semi-reflective mirror 15; before testing, the indication laser 31 is turned on to conveniently adjust the action area of the laser on the sample 19;
the laser after coaxial passes through the focusing system 16, the beam splitter 17 and the beam splitter 18 and acts on the surface of the sample 19, wherein:
the laser reflected by the beam splitter 17 is received by a power/energy meter 21, the power/energy of the laser acting on the surface of the sample 19 is monitored in real time, and the spectrum of the laser is tested by a spectrum analyzer 23; the laser reflected by the beam splitter 18 is received by a beam analyzer 20, the size of a light spot acting on the surface of the sample 19 is monitored in real time, and the pulse width and the repetition frequency of the laser are tested by a photoelectric detector 22;
laser output by a monochromatic signal light source 24 is collimated by a collimating system 25 and then is divided into two beams by a semi-transparent and semi-reflective mirror 26, one beam reaches the semi-transparent and semi-reflective mirror 28 after being reflected by the surface of a sample 19, the other beam reaches the semi-transparent and semi-reflective mirror 28 after being reflected by a 45-degree total reflective mirror 27, the two beams coaxially pass through the semi-transparent and semi-reflective mirror 28 and then enter a high-speed camera 30 after being processed by an amplifying system 29;
the high-speed camera 30 is arranged on a focal plane of the amplifying system 29 and is used for acquiring instant photos of the interference fringes and transmitting the photos to the control terminal 33 for storage;
the laser 1, the laser 7, the laser shutter 13, the beam analyzer 20, the power/energy meter 21, the photoelectric detector 22, the spectrum analyzer 23, the monochromatic signal light source 24, the indicating laser 31 and the high-speed camera 30 are all controlled by the control terminal 33 in a unified way, and the test data and results are displayed, recorded and stored on the control terminal 33 in real time.
In the specific implementation, the laser action energy density or power density is obtained by acquiring data such as laser energy and spot size irradiated on the surface of a sample, action laser wavelength, pulse width, repetition frequency and the like in real time; and acquiring and recording signal light source interference images in real time by adopting a high-speed camera, recording the number of deformed interference patterns, calculating the laser damage probability under different energy density conditions, and drawing a damage probability map so as to obtain the laser damage threshold of the optical component.
In the structure of the device, the polaroid 2 and the isolator 3 form a laser protection unit to prevent return light of a light path from entering the laser 1 to damage the laser; the polaroid 8 and the isolator 9 form a laser protection unit, and light returning from a light path is prevented from entering the laser 7 to damage the laser.
The lambda/2 wave plate 4 and the polaroid 5 form an energy adjusting unit, and the energy output by the laser 1 in the optical path is adjusted by rotating the lambda/2 wave plate 4; the lambda/2 wave plate 10 and the polaroid 11 form an energy adjusting unit, and the energy output by the laser 7 in the optical path is adjusted by rotating the lambda/2 wave plate 10.
In addition, the four reflection surfaces of the sample 19, the half mirror 26, the 45 ° half mirror 27, and the half mirror 28 were kept parallel when they were mounted.
The sample 19 is arranged on the clamping frame and fixed on the electric three-dimensional translation table, and the walking route of the electric three-dimensional translation table is arranged on the control terminal 33 according to the shape and size of the sample 19, so that the single energy density laser acts on at least 10 test points, the light field intensity of each focus point is uniformly distributed, and the laser damage threshold of the optical film can be quickly and accurately measured.
The electric three-dimensional translation stage can move the position of the sample 19 within a certain range, so that the focal length difference of the focusing lens to the laser with different wavelengths is compensated; and the motorized three-dimensional translation stage maintains the front surface of the sample 19 in the same plane throughout operation.
In addition, the sample 19 and the 45-degree total reflection mirror 27 are respectively installed by adopting an adjustable fixing frame, and the front surfaces of the sample and the 45-degree total reflection mirror are both limited, so that the sample and the 45-degree total reflection mirror are convenient to assemble and disassemble and ensure equal optical distances.
It is noted that those skilled in the art will recognize that embodiments of the present invention are not described in detail herein. For example, the polarizing plates can be replaced by the polarizing beam splitter prism, but the damage threshold of the polarizing beam splitter prism is low, so that the polarizing beam splitter prism is suitable for testing under low-power or low-energy conditions.
In summary, the testing device provided by the embodiment of the invention measures the damage threshold of the optical element thin film by using the mach-zehnder interferometry, has the advantages of high response speed, low false judgment rate and the like, can realize multi-wavelength laser damage threshold testing, realizes integration and automation of a testing system, can quickly and accurately judge damage of the optical element thin film on line in real time, automatically draws a damage probability map, and provides a detection report.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (7)
1. The device is characterized by comprising a first laser (1), a first polaroid (2), a first isolator (3), a first lambda/2 wave plate (4), a second polaroid (5), a first 45-degree total reflection mirror (6), a second laser (7), a third polaroid (8), a second isolator (9), a second lambda/2 wave plate (10), a fourth polaroid (11), a first half-lens half-reflection mirror (12), a laser shutter (13), a second 45-degree total reflection mirror (14), a second half-lens half-reflection mirror (15), a focusing system (16), a first beam splitter (17), a second beam splitter (18), a beam analyzer (20), a power/energy meter (21), a photoelectric detector (22), a spectrum analyzer (23), a monochromatic signal light source (24), Collimation system (25), third half mirror (26), third 45 full reflection mirror (27), fourth half mirror (28), magnification system (29), high-speed camera (30), instruction laser (31), fourth 45 full reflection mirror (32) and control terminal (33), wherein:
laser emitted by a first laser (1) enters a first half-transmission half-reflection mirror (12) to be transmitted after being reflected by a first polaroid (2), a first isolator (3), a first lambda/2 wave plate (4), a second polaroid (5) and a first 45-degree full-reflection mirror (6); laser emitted by the second laser (7) enters the first half-transmission half-reflection mirror (12) for transmission after passing through the third polaroid (8), the second isolator (9), the second lambda/2 wave plate (10) and the fourth polaroid (11); the two beams of laser are coupled and coaxial after being transmitted by the first half-transmission half-reflection mirror (12);
the coaxial laser enters a second semi-transparent and semi-reflective mirror (15) after being reflected by a laser shutter (13) and a second 45-degree total reflection mirror (14); the laser shutter (13) is used for controlling pulse repetition frequency to realize 1-on-1 or S-on-1;
laser emitted by the indicating laser (31) enters the second semi-transparent semi-reflecting mirror (15) after being reflected by the fourth 45-degree total reflecting mirror (32), and is coaxial with the laser output to the second semi-transparent semi-reflecting mirror (15) by the first laser (1) and the second laser (7);
the laser after coaxial passes through a focusing system (16), a first beam splitter (17) and a second beam splitter (18) and then acts on the surface of a sample (19), wherein:
the laser reflected by the first beam splitter (17) is received by a power/energy meter (21), the power/energy of the laser acting on the surface of the sample (19) is monitored in real time, and a spectrum of the laser is tested by a spectrum analyzer (23); the laser reflected by the second beam splitter (18) is received by a beam analyzer (20), the size of a light spot acting on the surface of the sample (19) is monitored in real time, and the pulse width and the repetition frequency of the laser are tested by a photoelectric detector (22);
laser output by a monochromatic signal light source (24) is collimated by a collimating system (25), and then is divided into two beams by a third half-transparent half-reflecting mirror (26), one beam reaches a fourth half-transparent half-reflecting mirror (28) after being reflected by the surface of a sample (19), the other beam reaches the fourth half-transparent half-reflecting mirror (28) after being reflected by a third 45-degree full-reflecting mirror (27), and the two beams coaxially pass through the fourth half-reflecting mirror (28) and then enter a high-speed camera (30) after being processed by an amplifying system (29);
the high-speed camera (30) is arranged on a focal plane of the magnifying system (29) and is used for acquiring a momentary photo of the interference fringes and transmitting the photo to the control terminal (33) for storage;
the device comprises a first laser (1), a second laser (7), a laser shutter (13), a beam analyzer (20), a power/energy meter (21), a photoelectric detector (22), a spectrum analyzer (23), a monochromatic signal light source (24), an indicating laser (31) and a high-speed camera (30), which are all controlled by a control terminal (33) in a unified manner, and test data and results are displayed, recorded and stored on the control terminal (33) in real time.
2. The multi-light-source laser damage threshold test apparatus according to claim 1,
the first polaroid (2) and the first isolator (3) form a laser protection unit, and light path return light is prevented from entering the first laser (1) to damage the laser;
and the third polaroid (8) and the second isolator (9) form a laser protection unit, so that light returning from a light path is prevented from entering the second laser (7) to damage the laser.
3. The multi-light-source laser damage threshold test apparatus according to claim 1,
the first lambda/2 wave plate (4) and the second polaroid (5) form an energy adjusting unit, and the energy output by the first laser (1) in the optical path is adjusted by rotating the first lambda/2 wave plate (4);
the second lambda/2 wave plate (10) and the fourth polaroid (11) form an energy adjusting unit, and the energy output by the second laser (7) in the optical path is adjusted by rotating the second lambda/2 wave plate (10).
4. The multi-light-source laser damage threshold test apparatus according to claim 1,
and four reflecting surfaces of the sample (19), the third half-transparent and half-reflective mirror (26), the third 45-degree full-reflective mirror (27) and the fourth half-transparent and half-reflective mirror (28) are kept parallel when being installed.
5. The multi-light-source laser damage threshold test apparatus according to claim 1,
the sample (19) is arranged on the clamping frame and fixed on the electric three-dimensional translation table, and the walking route of the electric three-dimensional translation table is arranged on the control terminal (33) according to the shape and size of the sample (19), so that the single energy density laser action is not less than 10 test points.
6. The multi-light-source laser damage threshold test apparatus according to claim 5,
the electric three-dimensional translation stage can move the position of the sample (19) within a certain range, so that the focal length difference of the focusing lens to the laser with different wavelengths is compensated;
and the electric three-dimensional translation stage keeps the front surface of the sample (19) in the same plane all the time during operation.
7. The multi-light-source laser damage threshold test apparatus according to claim 1,
the sample (19) and the third 45-degree total reflection mirror (27) are respectively installed by adopting an adjustable fixing frame, the front surfaces of the sample and the third 45-degree total reflection mirror are limited, and the sample and the third 45-degree total reflection mirror are convenient to assemble and disassemble and ensure aplanatism.
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| CN112730262A (en) * | 2020-12-18 | 2021-04-30 | 中国科学院上海光学精密机械研究所 | Device and method for improving femtosecond laser induced damage threshold of KDP (Potassium dihydrogen phosphate) crystal |
| CN112362313B (en) * | 2021-01-11 | 2021-04-23 | 深圳市星汉激光科技股份有限公司 | Light path testing system and method for return light resistance of laser chip |
| CN113465884B (en) * | 2021-06-03 | 2023-06-06 | 中国科学院空天信息创新研究院 | Continuous laser damage threshold testing device |
| CN113310670B (en) * | 2021-06-03 | 2022-10-11 | 中国科学院空天信息创新研究院 | Laser polarization beam combination measuring device |
| CN114486813B (en) * | 2021-12-31 | 2023-08-04 | 中国科学院空天信息创新研究院 | Device and method for testing laser damage threshold values of different polarization states |
| CN116379974B (en) * | 2023-02-28 | 2023-09-29 | 浙江大学 | Device and method for detecting surface characteristics of optical element by using multi-wavelength light source |
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