CN113310670B - Laser polarization beam combination measuring device - Google Patents
Laser polarization beam combination measuring device Download PDFInfo
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- CN113310670B CN113310670B CN202110621728.6A CN202110621728A CN113310670B CN 113310670 B CN113310670 B CN 113310670B CN 202110621728 A CN202110621728 A CN 202110621728A CN 113310670 B CN113310670 B CN 113310670B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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Abstract
The invention provides a laser polarization beam combination measuring device which comprises a first light source (LS 1), a second light source (LS 2), a first half wave plate (HW 1), a second half wave plate (HW 2), a first analyzer (P1), a second analyzer (P2), a first reflector (RM 1), a second reflector (RM 2), a third reflector (RM 3), a fourth reflector (RM 4), a fifth reflector (RM 5), a sixth reflector (RM 6), a first light beam adjusting module (LA 1), a second light beam adjusting module (LA 2), a polarization beam combination mirror (BC), a sampling mirror (SP), a first detector (PD 1) and a second detector (PD 2). The invention utilizes the light beam adjusting module to realize the consistency adjustment of the spot size and the divergence angle of the single laser beam before beam combination, and utilizes the mode of simultaneously monitoring the laser near-field and far-field spots after beam combination to ensure the high-precision beam combination effect.
Description
Technical Field
The invention relates to the technical field of semiconductor laser, in particular to a laser polarization beam combination measuring device.
Background
With the gradual expansion of the application range of the high-power laser in fiber laser pumping or industrial processing, the performance requirements of people on the high-power laser are higher and higher, and the high-power output is required to be obtained while the beam quality of the laser is also considered. Beam combining, the most common method for increasing the output power of lasers, has been widely used in high power semiconductors, optical fibers, and all-solid-state lasers.
Laser beam combining techniques are widely used and mainly include coherent combining and incoherent combining. The incoherent combined beam is widely applied, and means that all light beams are independently controlled to be gathered and point to a target, so that the fiber laser array can be used for performing simple light intensity superposition at the target, and the output power is improved. Incoherent combining beams can be further divided into polarization combining beams, spatial combining beams and wavelength combining beams. The polarization beam combination has high efficiency, is mainly used for single wavelength work, but has higher cost; the wavelength beam combination can combine multiple paths of laser in a wider wave band range, but the requirement on the beam combination mirror is higher; the efficiency of spatial beam combining is high, but the beam quality is poor.
Disclosure of Invention
In order to improve the beam combination quality and the beam combination efficiency, the invention provides a laser polarization beam combination measuring device.
One aspect of the present invention provides a laser polarization beam combination measuring apparatus, including: the light source device comprises a first light source LS1, a second light source LS2, a first half wave plate HW1, a second half wave plate HW2, a first analyzer P1, a second analyzer P2, a first reflector RM1, a second reflector RM2, a third reflector RM3, a fourth reflector RM4, a fifth reflector RM5, a sixth reflector RM6, a first light beam adjusting module LA1, a second light beam adjusting module LA2, a polarization beam combiner BC, a sampling mirror SP, a first detector PD1 and a second detector PD2, wherein: emergent laser of the first light source LS1 is guided to a polarization beam combiner BC after being reflected and deflected by light paths of a first analyzer P1, a fifth reflector RM5 and a sixth reflector RM6 in sequence; the emergent laser of the second light source LS2 is guided to the polarization beam combiner BC after being reflected and deflected by the optical paths of the first reflector RM1, the second reflector RM2, the third reflector RM3 and the fourth reflector RM4 in sequence; the first light beam adjusting module LA1 is disposed between the sixth reflector RM6 and the polarization beam combiner BC, and is configured to adjust a divergence angle and a spot size of a reflected light beam of the first light source LS 1; the second light beam adjusting module LA2 is disposed between the fourth reflector RM4 and the polarization beam combiner BC, and is configured to adjust a divergence angle and a spot size of a reflected light beam of the second light source LS 2; the first half-wave plate HW1 and the second half-wave plate HW2 are used for respectively converting emergent light beams of the first light source LS1 and the second light source LS2 into two orthogonal polarization state lasers, and the polarization beam combining mirror BC is used for combining the two orthogonal polarization state lasers and outputting combined laser; the sampling mirror SP is arranged on an emergent light path of the polarization beam combiner BC and used for splitting the combined laser into a reflection sub-beam and a transmission sub-beam, and the first detector PD1 and the second detector PD2 are used for detecting the coincidence degrees of the far field light spot and the near field light spot corresponding to the reflection sub-beam and the transmission sub-beam respectively.
In some embodiments, the light outlet directions of the first light source LS1 and the second light source LS2 are the same and are staggered, and both the first light source LS1 and the second light source LS2 emit linearly polarized laser light.
In some embodiments, the first half wave plate HW1 is disposed between the first light source LS1 and the first analyzer P1, and is configured to convert the emitted laser light of the first light source LS1 into P-polarized light; the second half-wave plate HW2 is disposed between the first mirror RM1 and the second mirror RM2, and is configured to convert the laser light emitted from the second light source LS2 into S-polarized light.
In some embodiments, the first analyzer P1 is configured to detect a polarization state of the laser light after the emitted laser light of the first light source LS1 is converted; the second analyzer P2 is disposed between the second half-wave plate HW2 and the second reflecting mirror RM2, and is configured to detect a polarization state of the laser light emitted from the second light source LS2 after being converted.
In some embodiments, the laser polarization beam combination measuring device further includes a first optical trap LT1 and a second optical trap LT2 respectively disposed on the reflective surfaces of the first analyzer P1 and the second analyzer P2, and the first optical trap LT1 and the second optical trap LT2 are respectively configured to absorb stray light caused by low linearity of the first light source LS1 and the second light source LS 2.
In some embodiments, the laser polarization beam combination measuring device further includes a laser power meter or a laser energy meter respectively disposed on the transmission surface of the first analyzer P1 and the reflection surface of the second analyzer P2, and the laser power meter or the laser energy meter is respectively configured to detect laser power or energy transmitted by the first analyzer P1 and reflected by the second analyzer P2.
In some embodiments, the first mirror RM1, the second mirror RM2, the third mirror RM3, the fourth mirror RM4, the fifth mirror RM5, and the sixth mirror RM6 are all 45 ° total mirrors, and the third mirror RM3, the fourth mirror RM4, the fifth mirror RM5, and the sixth mirror RM6 are mounted on an adjustable frame for adjusting the beam pointing direction.
In some embodiments, the first beam adjustment module LA1 and the second beam adjustment module LA2 are both adjustable low power beam expanders, and the adjustment of the divergence angle and the size of the light spot is realized by adjusting the lens pitch in the low power beam expander.
In some embodiments, the first detector PD1 and the second detector PD2 are both CCD charge coupled devices or PSD photo-potentiometric detectors.
In some embodiments, the laser polarization beam combination measuring device further comprises a first attenuation sheet AT1, a second attenuation sheet AT2, and a focusing lens FC, wherein:
the reflected sub-beams pass through the focusing lens FC and the first attenuation sheet AT1 in sequence and are introduced into the first detector PD1, and the transmitted sub-beams pass through the second attenuation sheet AT2 and are introduced into the second detector PD2;
the first detector PD1 is disposed at an imaging focal position of the focus lens FC.
In some embodiments, a double sampling mirror is further disposed between the second detector PD2 and the second attenuation sheet AT2, and the transmission sub-beam is reflected by the double sampling mirror and then passes through the second attenuation sheet AT2 to the second detector PD2.
Another aspect of the present invention provides a laser space beam combination measuring device, including: first light source LS1, second light source LS2, first mirror RM1, second mirror RM2, third mirror RM3, fourth mirror RM4, fifth mirror RM5, sixth mirror RM6, seventh mirror RM7, eighth mirror RM8, first beam adjustment module LA1, second beam adjustment module LA2, spatial beam combiner SC, sampling mirror SP, first detector PD1, and second detector PD2, wherein: the emergent laser of the first light source LS1 is guided to the spatial beam combiner SC after being deflected by the optical paths of the fifth reflector RM5, the sixth reflector RM6, the seventh reflector RM7 and the eighth reflector RM8 in sequence; the emergent laser of the second light source LS2 is guided to the spatial beam combiner SC after being deflected by the optical paths of the first reflector RM1, the second reflector RM2, the third reflector RM3 and the fourth reflector RM4 in sequence; the first light beam adjusting module LA1 is disposed between the seventh reflector RM7 and the eighth reflector RM8, and is configured to adjust a divergence angle and a spot size of a reflected light beam of the first light source LS 1; the second light beam adjusting module LA2 is disposed between the fourth reflector RM4 and the spatial beam combiner SC, and is configured to adjust a divergence angle and a light spot size of a reflected light beam of the second light source LS 2; the spatial beam combiner SC is configured to combine the reflected light beams of the first light source LS1 and the second light source LS2, and output combined laser light; the sampling mirror SP is arranged on an emergent light path of the spatial beam combiner SC and used for splitting the combined laser into a reflection sub-beam and a transmission sub-beam, and the first detector PD1 and the second detector PD2 are used for detecting the coincidence degree of a far field spot and a near field spot corresponding to the reflection sub-beam and the transmission sub-beam respectively.
In some embodiments, the spatial beam combiner SC comprises a first mirror surface and a second mirror surface that are parallel to each other; the two paths of laser beams emitted by the first light source LS1 and the second light source LS2 are guided to obliquely enter the first mirror surface of the spatial beam combiner SC, are reflected for multiple times in sequence by the first mirror surface and the second mirror surface, and are transmitted out on the second mirror surface to form beam combining laser emission.
In some embodiments, the laser polarization beam combination measuring device further comprises a first attenuation sheet AT1, a second attenuation sheet AT2, and a focusing lens FC, wherein: the reflected sub-beams pass through the focusing lens FC and the first attenuation sheet AT1 in sequence and are introduced into the first detector PD1, and the transmitted sub-beams pass through the second attenuation sheet AT2 and are introduced into the second detector PD2; the first detector PD1 is disposed at an imaging focal position of the focus lens FC.
Compared with the prior art, the invention at least has the following beneficial effects:
(1) The high-precision beam combination effect is ensured by utilizing a mode of simultaneously monitoring the near-field laser spot and the far-field laser spot after beam combination;
(2) The consistency adjustment of the spot size and the divergence angle of the single laser beam before beam combination is realized by using the light beam adjusting module;
(3) The measuring device provided by the invention can be suitable for lasers and measuring equipment with different parameters and can be applied to a multi-beam combination system;
(4) The near-field and far-field monitoring module can be developed into a special product for realizing high-precision laser beam combination.
Drawings
FIG. 1 shows a laser beam combining schematic according to an embodiment of the invention;
FIG. 2 shows a schematic laser divergence diagram in accordance with an embodiment of the present invention;
FIG. 3 is a schematic diagram of a laser polarization beam combination measuring device according to an embodiment of the present invention;
fig. 4 shows a schematic structural diagram of a laser spatial combined beam measuring device according to another embodiment of the present invention;
fig. 5 shows a schematic structural diagram of a spatial beam combiner according to another embodiment of the present invention.
[ description of reference ]
LS1 — first light source; LS 2-second light source;
HW 1-first half-wave plate; HW 2-second half-wave plate;
p1-a first analyzer; p2-a second analyzer;
LT1 — first optical trap; LT 2-second optical trap;
RM 1-first mirror; RM 2-second mirror;
RM 3-third mirror; RM 4-fourth mirror;
RM 5-a fifth mirror; RM 6-sixth mirror;
RM 7-seventh mirror; RM 8-eighth mirror;
LA1 — first beam conditioning module; LA2 — a second beam adjustment module;
BC-polarization beam combiner; SP-sampling mirror; FC-focusing lens; SC-space beam combiner;
AT 1-first attenuation sheet; AT 2-second attenuator;
PD1 — first detector; PD 2-second detector.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to specific embodiments and the accompanying drawings. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure. The terms "comprises," "comprising," and the like, as used herein, specify the presence of stated features, steps, operations, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, or components.
For convenience of understanding, before describing the laser polarization beam combination measuring device provided in the embodiment of the present invention, a theoretical derivation process of the laser beam combination effect related to the present invention is first described.
Fig. 1 shows a laser beam combining schematic according to an embodiment of the present invention.
As shown in fig. 1, the beam combination diagram shows the initial spot position of two lasers and the spot position after the transmission distance L under ideal conditions. Wherein R is 1 And R 2 Respectively the initial beam radius of any two beams of laser, let R 1 ≤R 2 ；R 1 ' and R 2 ' beam radii after transmission over a distance L, respectively; d is the axial distance between the two laser spatial beams; and S is the overlapping area of the two laser beams after the L distance is transmitted.
FIG. 2 shows a schematic laser divergence diagram in accordance with an embodiment of the present invention.
As shown in FIG. 2, after the two laser beams have traveled a distance L, let θ be 1 And theta 2 The divergence half angles of the two laser beams respectively are as follows:
according to the transmission principle, if there is an overlapping portion after the transmission distance L between the two laser beams, it is required that:
taking the axis of one of the laser beams as the origin of coordinates, the light spot boundary equation of the two laser beams is as follows:
the abscissa of the intersection point when the two laser beams are in critical overlapping is set as m, so that the following can be obtained:
therefore, the area S of the overlapping portion is:
continuing to solve S yields:
thus, for an ideal case, the beam combination effect η of two optical axis quasi-parallel laser beams is:
it will be appreciated that the laser beam combining is not only operated in the near field of 300-500 m, but is also applied in the far field of 20-30 km. From the above, when combining, the divergence angle, the spot diameter, and the beam axial distance of the laser beam have a significant influence on the combining effect. Introducing a relevant parameter-divergence angle of the laser beam θ 1 And theta 2 Spot diameter R 1 ' and R 2 ', and the beam axis spacing D, the combined beam effect of the incoherent far fields in different situations can be calculated.
Due to the fact that the existing beam combination technology only adopts a mode of adjusting the polarization state or additionally arranging an indicating light source, beam combination precision is improved, the system is complex, and precision is limited. Therefore, in order to improve the beam combination effect and ensure the focused laser power density, the invention provides the laser polarization beam combination measuring device, which comprehensively considers the conditions that the divergence angles of the laser used for beam combination are the same, the radiuses of light spots are kept consistent as much as possible and the beam axial spacing is smaller.
The present invention will be described in further detail below with reference to specific embodiments and with reference to the attached drawings.
Fig. 3 shows a schematic structural diagram of a laser polarization beam combination measuring device according to an embodiment of the present invention.
As shown in fig. 3, the laser polarization beam combination measuring apparatus may include: the light source device comprises a first light source LS1, a second light source LS2, a first half wave plate HW1, a second half wave plate HW2, a first analyzer P1, a second analyzer P2, a first reflector RMI, a second reflector RM2, a third reflector RM3, a fourth reflector RM4, a fifth reflector RM5, a sixth reflector RM6, a first light beam adjusting module LA1, a second light beam adjusting module LA2, a polarization beam combiner BC, a sampling mirror SP, a first detector PD1 and a second detector PD2.
The emergent laser of the first light source LS1 is guided to the polarization beam combiner BC after being reflected and deflected by the optical paths of the first analyzer P1, the fifth reflector RM5 and the sixth reflector RM6 in sequence; the emergent laser of the second light source LS2 is reflected and deflected by the optical paths of the first reflector RM1, the second reflector RM2, the third reflector RM3 and the fourth reflector RM4 in sequence and then guided to the polarization beam combiner BC.
The first light beam adjusting module LA1 is disposed between the sixth reflector RM6 and the polarization beam combiner BC, and is configured to adjust a divergence angle and a spot size of a reflected light beam of the first light source LS 1; the second light beam adjusting module LA2 is disposed between the fourth reflector RM4 and the polarization beam combiner BC, and is configured to adjust a divergence angle and a spot size of a reflected light beam of the second light source LS 2.
The first half-wave plate HW1 and the second half-wave plate HW2 are used for respectively converting emergent light beams of the first light source LS1 and the second light source LS2 into two orthogonal polarization state lasers, and the polarization beam combiner BC is used for combining the two orthogonal polarization state lasers to output combined laser.
The sampling mirror SP is arranged on an emergent light path of the polarization beam combiner BC and used for splitting the combined laser into a reflection sub-beam and a transmission sub-beam, and the first detector PD1 and the second detector PD2 are used for detecting the coincidence degrees of the far field light spot and the near field light spot corresponding to the reflection sub-beam and the transmission sub-beam respectively.
Therefore, the invention ensures the high-precision beam combination effect by using a mode of simultaneously monitoring the near-field laser spot and the far-field laser spot after beam combination.
In the embodiment of the present invention, the light exit directions of the first light source LS1 and the second light source LS2 are the same and are staggered, and both the first light source LS1 and the second light source LS2 emit linearly polarized laser light.
According to the embodiment of the invention, the light paths of the first light source and the second light source before passing through the polarization beam combiner are independent and do not influence each other, the polarization beam combiner BC is provided with two light incoming surfaces and a light outgoing surface, the two light incoming surfaces are respectively used for receiving two orthogonal polarization state lasers formed by converting linear polarization lasers emitted by the first light source and the second light source, the two orthogonal polarization state lasers are subjected to polarization beam combination through the polarization beam combiner to form one light beam to be emitted, and the light beam is also a combined beam laser.
In the embodiment of the present invention, the first half wave plate HW1 is disposed between the first light source LS1 and the first analyzer P1, and is configured to convert the emitted laser of the first light source LS1 into P-polarized light; the second half-wave plate HW2 is disposed between the first mirror RM1 and the second mirror RM2, and is configured to convert the laser light emitted from the second light source LS2 into S-polarized light. The polarization directions of the P-polarized light and the S-polarized light are perpendicular to each other, namely, the P-polarized light and the S-polarized light form laser in an orthogonal polarization state.
It will be appreciated that a beam is subjected to a half-wave plate which reverses its direction of vibration by 90 °, and that the half-wave plate may be used to change the polarisation state of the beam. According to the embodiment of the invention, the polarization states of the emergent light beams of the first light source and the second light source are changed through the half-wave plates arranged on the central lines of the emergent light paths of the first light source and the second light source, so that the P light power of the first light source is maximum, and the S light power of the second light source is maximum.
The first analyzer P1 is configured to detect a laser polarization state of the converted outgoing laser of the first light source LS 1; the second analyzer P2 is disposed between the second half-wave plate HW2 and the second reflecting mirror RM2, and is configured to detect a polarization state of the laser light emitted from the second light source LS2 after being converted.
Furthermore, the first light beam adjusting module LA1 and the second light beam adjusting module LA2 are both adjustable low-power beam expanders, and the adjustment of the divergence angle and the size of the light spot is realized by adjusting the lens spacing in the low-power beam expander.
In the embodiment of the present invention, the laser polarization beam combination measuring device further includes a first optical trap LT1 and a second optical trap LT2 respectively disposed on the reflective surfaces of the first analyzer P1 and the second analyzer P2, and the first optical trap LT1 and the second optical trap LT2 are respectively configured to absorb stray light caused by low linearity of the first light source LS1 and the second light source LS 2.
In the embodiment of the invention, each reflector is a high-damage-threshold and high-reflectivity film-coated lens. The first reflector RM1, the second reflector RM2, the third reflector RM3, the fourth reflector RM4, the fifth reflector RM5 and the sixth reflector RM6 are all 45-degree total reflectors, the third reflector RM3, the fourth reflector RM4, the fifth reflector RM5 and the sixth reflector RM6 are arranged on an adjustable mirror frame, and the adjustable mirror frame is used for adjusting the direction of a light beam.
In order to realize high-precision real-time adjustment, the adjustable mirror bracket can adopt a manual or electric control mode.
The first detector PD1 and the second detector PD2 are both charge coupled devices or photo-sensitive detectors.
It can be understood that the Charge Coupled Device (CCD) measures laser far-field light spots by a light spot imaging method, and the method has the advantages of non-contact measurement, simple structure, convenient operation and higher spatial resolution. A photoelectric Position Sensitive Detector (PSD) is an LED optical displacement measuring device with ultra-fast response speed and ultra-high resolution, and can remotely measure two-dimensional dynamic displacement of a target.
Since the CCD is very vulnerable to laser damage and if the light is too strong, it may result in oversaturation of the gray scale of the light spot on the gray scale pattern formed on the CCD, affecting the positioning of the center of the light spot. Therefore, the reflected and transmitted sub-beams passing through the sampling mirror need to be attenuated as necessary before entering the detector, which could cause damage to the CCD camera.
In the embodiment of the present invention, the laser polarization beam combination measuring apparatus further includes a first attenuator AT1, a second attenuator AT2, and a focusing lens FC. The reflected sub-beam passes through the focusing lens FC and the first attenuation sheet AT1 in sequence and then is introduced into the first detector PD1, and the transmitted sub-beam passes through the second attenuation sheet AT2 and then is introduced into the second detector PD2.
Preferably, the first detector PD1 is disposed at an imaging focal position of the focus lens FC.
In the embodiment of the present invention, the focusing lens is used for receiving the converged laser light and focusing the converged laser light, and the focusing lens 40 may be a spherical mirror, an aspherical mirror or a cylindrical mirror.
Thus, the reflected and transmitted sub-beams passing through the sampling mirror are attenuated to within the safe energy range of the first and second detectors PD1 and PD2 before being directed to the two detectors. Wherein the reflected sub-beam is typically a low power laser.
In some embodiments, if the laser power of the transmission sub-beam is larger, a double sampling mirror may be further disposed between the second detector PD2 and the second attenuation plate AT2, and the transmission sub-beam passes through the second attenuation plate AT2 and then passes into the second detector PD2 after being reflected by the double sampling mirror. Therefore, after the transmission sub-beam is subjected to secondary sampling, the laser power of the transmission sub-beam can be further reduced, and the monitoring of the low-power laser is realized. It should be noted that the double sampling mirror is disposed to be highly coincident with the optical axis of the light beam of the sampling mirror SP.
Alternatively, to reduce the test difficulty, the reflecting surfaces of all the mirrors and analyzers are parallel to each other, and all the elements are placed at the same level.
The above is merely an exemplary description, and the present embodiment is not limited thereto. For example, the first optical trap LT1 and the second optical trap LT2 may be replaced with a laser power meter or a laser power meter in order to ensure a linear polarization degree. That is, in some embodiments, the laser polarization beam combination measuring device further includes a laser power meter or a laser energy meter respectively disposed on the transmission surface of the first analyzer P1 and the reflection surface of the second analyzer P2, and the laser power meter or the laser energy meter is respectively configured to detect laser power or energy transmitted by the first analyzer P1 and reflected by the second analyzer P2.
For another example, the first light source and the second light source may be replaced by a first laser module and a second laser module, respectively, that is, the polarization beam combining process may be expanded to combine two semiconductor laser modules, and the number of laser beams in the laser modules may be set according to actual needs, which is not limited in the present invention.
Furthermore, the measuring device provided by the invention can be suitable for lasers and measuring equipment with different parameters and can be applied to a multi-beam combining system. In addition, the near-field and far-field light spot coincidence degree detector can be developed into a special product for realizing high-precision laser beam combination.
Based on the same general concept, the invention also provides a laser space beam combination measuring device.
For brevity, the same or similar features as those of the aforementioned embodiment of the laser spatial combined beam measuring apparatus are not repeated, and only the features different from the aforementioned embodiment are described below.
Fig. 4 shows a schematic structural diagram of a laser spatial beam combination measuring device according to another embodiment of the present invention.
As shown in fig. 4, in another embodiment of the present invention, the laser spatial beam combination measuring device may include a first light source LS1, a second light source LS2, a first mirror RM1, a second mirror RM2, a third mirror RM3, a fourth mirror RM4, a fifth mirror RM5, a sixth mirror RM6, a seventh mirror RM7, an eighth mirror RM8, a first beam adjustment module LA1, a second beam adjustment module LA2, a spatial beam combination mirror SC, a sampling mirror SP, a first detector PD1, and a second detector PD2.
The emergent laser of the first light source LS1 is guided to the spatial beam combiner SC after being deflected by the optical paths of the fifth reflector RM5, the sixth reflector RM6, the seventh reflector RM7 and the eighth reflector RM8 in sequence; the laser light emitted from the second light source LS2 is deflected by the optical paths of the first mirror RM1, the second mirror RM2, the third mirror RM3, and the fourth mirror RM4 in sequence and then guided to the spatial beam combiner SC.
The first light beam adjusting module LA1 is disposed between the seventh reflector RM7 and the eighth reflector RM8, and is configured to adjust a divergence angle and a spot size of a reflected light beam of the first light source LS 1; the second light beam adjusting module LA2 is disposed between the fourth reflector RM4 and the spatial beam combiner SC, and is configured to adjust a divergence angle and a spot size of a reflected light beam of the second light source LS 2.
The space beam combining mirror SC is used for combining the reflected beams of the first light source LS1 and the second light source LS2 and outputting combined laser, the sampling mirror SP is arranged on an emergent light path of the space beam combining mirror SC and used for splitting the combined laser into a reflected sub-beam and a transmitted sub-beam, and the first detector PD1 and the second detector PD2 are used for detecting far-field and near-field light spot coincidence degrees corresponding to the reflected sub-beam and the transmitted sub-beam respectively.
Fig. 5 shows a schematic structural diagram of a spatial beam combiner according to another embodiment of the present invention.
As shown in fig. 5, in another embodiment of the present invention, the spatial beam combiner SC includes a first mirror surface and a second mirror surface that are parallel to each other. The two paths of laser emitted by the first light source LS1 and the second light source LS2 are guided to obliquely enter the first mirror surface of the spatial beam combiner SC, and are transmitted out on the second mirror surface after being reflected for multiple times in sequence by the first mirror surface and the second mirror surface, so that combined laser emission is formed.
In another embodiment of the present invention, the laser spatial beam combination measuring device further includes a first attenuation sheet AT1, a second attenuation sheet AT2, and a focusing lens FC, wherein the reflected sub-beam passes through the focusing lens FC and the first attenuation sheet AT1 in sequence and then enters the first detector PD1, and the transmitted sub-beam passes through the second attenuation sheet AT2 and then enters the second detector PD2; the first detector PD1 is disposed at an imaging focal position of the focus lens FC.
It should also be noted that directional terms, such as "upper", "lower", "front", "rear", "left", "right", etc., mentioned in the embodiments are only directions referring to the drawings, and are not intended to limit the scope of the present disclosure. Throughout the drawings, like elements are represented by like or similar reference numerals. Conventional structures or constructions will be omitted when they may obscure the understanding of the present disclosure. And the shapes, sizes and positional relationships of the components in the drawings do not reflect the actual sizes, proportions and actual positional relationships.
Similarly, in the above description of exemplary embodiments of the disclosure, various features of the disclosure are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of one or more of the various disclosed aspects. Reference to the description of the terms "one embodiment," "some embodiments," "an example," "a specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the disclosure. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
The above-mentioned embodiments, objects, technical solutions and advantages of the present invention are further described in detail, it should be understood that the above-mentioned embodiments are only examples of the present invention, and should not be construed as limiting the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (12)
1. The utility model provides a laser polarization beam combination measuring device, its characterized in that includes first light source (LS 1), second light source (LS 2), first half wave plate (HW 1), second half wave plate (HW 2), first analyzer (P1), second analyzer (P2), first speculum (RM 1), second speculum (RM 2), third speculum (RM 3), fourth speculum (RM 4), fifth speculum (RM 5), sixth speculum (RM 6), first light beam regulation module (LA 1), second light beam regulation module (LA 2), polarization beam combination mirror (BC), sampling mirror (SP), first detector (PD 1) and second detector (PD 2), wherein:
the emergent laser of the first light source (LS 1) is guided to a polarization Beam Combiner (BC) after being reflected and deflected by the light paths of a first analyzer (P1), a fifth reflector (RM 5) and a sixth reflector (RM 6) in sequence;
the emergent laser of the second light source (LS 2) is guided to a polarization Beam Combiner (BC) after being reflected and deflected by the light paths of a first reflector (RM 1), a second reflector (RM 2), a third reflector (RM 3) and a fourth reflector (RM 4) in sequence;
the first light beam adjusting module (LA 1) is arranged between the sixth reflector (RM 6) and the polarization Beam Combiner (BC) and is used for adjusting the divergence angle and the spot size of the reflected light beam of the first light source (LS 1); the second light beam adjusting module (LA 2) is arranged between the fourth reflecting mirror (RM 4) and the polarization Beam Combiner (BC) and is used for adjusting the divergence angle and the light spot size of a reflected light beam of the second light source (LS 2), wherein the first light beam adjusting module (LA 1) and the second light beam adjusting module (LA 2) are both adjustable low-power beam expanders, and the consistency adjustment of the light spot size and the divergence angle of the single laser beam before beam combination is realized by adjusting the lens spacing in the low-power beam expanders;
the first half-wave plate (HW 1) and the second half-wave plate (HW 2) are used for respectively converting emergent light beams of the first light source (LS 1) and the second light source (LS 2) into two orthogonal polarization state lasers, and the polarization Beam Combiner (BC) is used for combining the two orthogonal polarization state lasers and outputting combined laser;
the sampling mirror (SP) is arranged on an emergent light path of the polarization Beam Combiner (BC) and is used for splitting the combined laser into a reflection sub-beam and a transmission sub-beam, and the first detector (PD 1) and the second detector (PD 2) are used for detecting the coincidence degree of a far field spot and a near field spot corresponding to the reflection sub-beam and the transmission sub-beam respectively;
the light outlet directions of the first light source (LS 1) and the second light source (LS 2) are consistent and staggered with each other, and the first light source (LS 1) and the second light source (LS 2) both emit linearly polarized laser.
2. The laser polarization beam combination measuring device according to claim 1, wherein the first half wave plate (HW 1) is disposed between the first light source (LS 1) and the first analyzer (P1) for converting the emitted laser light of the first light source (LS 1) into P-polarized light;
the second half-wave plate (HW 2) is arranged between the first reflecting mirror (RM 1) and the second reflecting mirror (RM 2) and is used for converting the emergent laser of the second light source (LS 2) into S-polarized light.
3. The laser polarization beam combination measuring device according to claim 1, wherein the first analyzer (P1) is configured to detect a polarization state of the laser light converted from the emitted laser light of the first light source (LS 1);
the second analyzer (P2) is arranged between the second half-wave plate (HW 2) and the second reflecting mirror (RM 2) and is used for detecting the polarization state of the laser converted from the emergent laser of the second light source (LS 2).
4. The apparatus according to claim 1, further comprising a first optical trap (LT 1) and a second optical trap (LT 2) respectively disposed on the reflective surfaces of the first analyzer (P1) and the second analyzer (P2), wherein the first optical trap (LT 1) and the second optical trap (LT 2) are respectively configured to absorb stray light caused by low linearity of the first light source (LS 1) and the second light source (LS 2).
5. The laser polarization beam combination measuring device according to claim 1, further comprising a laser power meter or a laser energy meter respectively disposed on the transmission surface of the first analyzer (P1) and the reflection surface of the second analyzer (P2), wherein the laser power meter or the laser energy meter is used for detecting the laser power or energy transmitted by the first analyzer (P1) and reflected by the second analyzer (P2).
6. The laser polarization beam combination measuring device according to claim 1, wherein the first mirror (RM 1), the second mirror (RM 2), the third mirror (RM 3), the fourth mirror (RM 4), the fifth mirror (RM 5) and the sixth mirror (RM 6) are all 45 ° total reflection mirrors, and the third mirror (RM 3), the fourth mirror (RM 4), the fifth mirror (RM 5) and the sixth mirror (RM 6) are mounted on an adjustable frame for adjusting the beam direction.
7. The laser polarization beam combination measuring device according to claim 1, wherein the first detector (PD 1) and the second detector (PD 2) are both CCD charge coupled devices or PSD photo-potential-sensitive detectors.
8. The laser polarization beam combination measuring device according to claim 1, further comprising a first attenuation sheet (AT 1), a second attenuation sheet (AT 2), and a focusing lens (FC), wherein:
the reflected sub-beams pass through a focusing lens (FC) and a first attenuation sheet (AT 1) in sequence and are introduced into the first detector (PD 1), and the transmitted sub-beams pass through a second attenuation sheet (AT 2) and are introduced into a second detector (PD 2);
the first detector (PD 1) is disposed at an imaging focal position of the focus lens (FC).
9. The laser polarization beam combination measuring device according to claim 8, wherein a double sampling mirror is further disposed between the second detector (PD 2) and the second attenuator (AT 2), and the transmission sub-beam passes through the second attenuator (AT 2) into the second detector (PD 2) after being reflected by the double sampling mirror.
10. The utility model provides a laser space closes beam measuring device, its characterized in that includes first light source (LS 1), second light source (LS 2), first speculum (RM 1), second reflector (RM 2), third speculum (RM 3), fourth speculum (RM 4), fifth speculum (RM 5), sixth speculum (RM 6), seventh speculum (RM 7), eighth speculum (RM 8), first light beam regulation module (LA 1), second light beam regulation module (LA 2), space closes beam mirror (SC), sampling mirror (SP), first detector (PD 1) and second detector (PD 2), wherein:
the emergent laser of the first light source (LS 1) is deflected through the optical paths of a fifth reflector (RM 5), a sixth reflector (RM 6), a seventh reflector (RM 7) and an eighth reflector (RM 8) in sequence and then is guided to a spatial beam combiner (SC);
the emergent laser of the second light source (LS 2) is guided to a spatial beam combiner (SC) after being deflected by the optical paths of a first reflector (RM 1), a second reflector (RM 2), a third reflector (RM 3) and a fourth reflector (RM 4) in sequence;
the first light beam adjusting module (LA 1) is arranged between the seventh reflector (RM 7) and the eighth reflector (RM 8) and is used for adjusting the divergence angle and the spot size of the reflected light beam of the first light source (LS 1); the second light beam adjusting module (LA 2) is arranged between the fourth reflector (RM 4) and the spatial beam combiner (SC) and is used for adjusting the divergence angle and the light spot size of the reflected light beam of the second light source (LS 2), wherein the first light beam adjusting module (LA 1) and the second light beam adjusting module (LA 2) are both adjustable low-power beam expanders, and the consistency adjustment of the light spot size and the divergence angle of the single laser beam before beam combination is realized by adjusting the lens space in the low-power beam expander;
the spatial beam combiner (SC) is used for combining the reflected beams of the first light source (LS 1) and the second light source (LS 2) and outputting combined laser;
the sampling mirror (SP) is arranged on an emergent light path of the spatial beam combiner (SC) and is used for splitting the combined laser into a reflection sub-beam and a transmission sub-beam, and the first detector (PD 1) and the second detector (PD 2) are used for detecting the coincidence degrees of the far-field light spot and the near-field light spot corresponding to the reflection sub-beam and the transmission sub-beam respectively;
the light outlet directions of the first light source (LS 1) and the second light source (LS 2) are consistent and staggered with each other, and the first light source (LS 1) and the second light source (LS 2) both emit linearly polarized laser.
11. The laser spatial combined beam measuring device according to claim 10, characterized in that the spatial combined beam mirror (SC) comprises a first mirror surface and a second mirror surface parallel to each other;
the two paths of laser emitted by the first light source (LS 1) and the second light source (LS 2) are guided to obliquely enter a first mirror surface of the spatial beam combiner (SC), and are transmitted out on a second mirror surface after being reflected for multiple times in sequence by the first mirror surface and the second mirror surface to form beam-combined laser emission.
12. The laser spatial combined beam measuring device according to claim 10, further comprising a first attenuation sheet (AT 1), a second attenuation sheet (AT 2) and a focusing lens (FC), wherein:
the reflected sub-beams pass through a focusing lens (FC) and a first attenuation sheet (AT 1) in sequence and are introduced into the first detector (PD 1), and the transmitted sub-beams pass through a second attenuation sheet (AT 2) and are introduced into a second detector (PD 2);
the first detector (PD 1) is disposed at an imaging focal position of the focus lens (FC).
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