CN112284531A - Calibration optical path and calibration method for improving detection precision of beam combination parameters - Google Patents
Calibration optical path and calibration method for improving detection precision of beam combination parameters Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
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Abstract
The invention discloses a calibration light path and a calibration method for improving detection precision of beam combination parameters, wherein the calibration light path comprises a beam combination device and a main light guide mirror, a monitoring spectroscope is arranged on a light leakage light path of the main light guide mirror, and a detection spectroscope and a beam combination observation device are respectively arranged on two emission light paths of the monitoring spectroscope; a pointing detection device and a position detection device are respectively arranged on a light emitting path of the detection spectroscope; the calibration method comprises (I) precise beam combination of laser beams; (II) adjusting parameters of the reference laser beam; (III) collecting information of the reference laser beam; (IV) adjusting parameters of the rest laser beams; (V) updating data; and (VI) restarting the control system and the like. The calibration light path can be used for analyzing and researching beam combination parameter detection influence factors, so that mutual verification of theoretical research and test results is realized, the light path is convenient to adjust, and the operability is strong; the calibration method is simple and direct, and can greatly improve the precision and accuracy of beam combination parameter detection.
Description
Technical Field
The invention relates to the field of beam combination parameter detection, in particular to a calibration optical path and a calibration method for improving beam combination parameter detection precision.
Background
In the field of laser countermeasure and spectrum application, multiband multiple lasers are required to be coaxially combined and then transmitted for a long distance, and in order to guarantee the test effect, besides multiband lasers are accurately delivered to a target, the beam combining precision of the lasers needs to be guaranteed to meet certain requirements within a certain transmission distance.
The beam combination detection device used in the existing system is divided into far field pointing and near field position detection, namely, the optical focusing principle of a long-focus optical lens is utilized to assist a high-resolution CCD camera in imaging acquisition and a high-precision light spot extraction algorithm, and the automatic monitoring of the far field pointing of a light beam is carried out; and (3) utilizing the optical zooming principle of the optical lens with high beam-shrinking magnification to assist the imaging acquisition of the high-resolution CCD camera and the high-precision light spot extraction algorithm to automatically monitor the near-field position of the light beam. From the analysis of the detection principle, the attenuation coefficient and gain of a camera, errors in CCD measurement and data processing errors, the light beam quality of a laser, a light spot extraction algorithm and the like all influence the precision and accuracy of beam combination detection. Many researches on methods for improving the beam combination detection precision and accuracy are focused, and most of the researches are focused on optimization of a light spot extraction algorithm and analysis and research on beam combination precision, for example, summer bud and the like are published in laser wavelength beam combination precision research of No. 5 of China optics volume 7, and a link of experimental verification is lacked, so that theoretical research and experimental results cannot be verified mutually.
Disclosure of Invention
The invention aims to overcome the defect that the conventional method for improving the beam combination detection precision and accuracy lacks a link of test verification, and provides a calibration optical path and a calibration method for improving the beam combination parameter detection precision.
The invention is realized by the following technical scheme:
a calibration optical path for improving detection precision of beam combination parameters comprises a beam combination device for completing beam combination of multiple paths of lasers, a main light guide mirror for reflecting the combined beam to a main laser system, a monitoring spectroscope arranged on a light leakage optical path of the main light guide mirror, and a detection spectroscope and a beam combination observation device respectively arranged on two emission optical paths of the monitoring spectroscope; and a pointing detection device and a position detection device are respectively arranged on the light emitting path of the detection spectroscope.
In the above technical solution, the beam combination observation device is a long-distance transmission device.
In the above technical solution, the long-distance transmission device includes a plurality of sets of mirrors, and a back-and-forth reflection transmission mode is adopted between the mirrors.
In the above technical solution, the monitoring spectroscope and the detecting spectroscope are both 50% spectroscopes, and the wedge angle of the spectroscope is less than 0.05 degrees.
In the technical scheme, the pointing detection device comprises a beam shrinking light pipe and a wavelength gating and attenuating unit, and the beam shrinking light pipe and the wavelength gating and attenuating unit are matched to realize sequential monitoring of the positions of the multiband laser.
In the technical scheme, the position detection device comprises a collimator and a wavelength gating and attenuating unit which are matched to realize sequential monitoring of multi-band laser pointing.
A calibration method for calibrating a light path to improve the detection precision of beam combination parameters comprises the following steps:
(I) precision combination of laser beams
Adjusting a reflector in the beam combining device, and confirming through the beam combining observation device to finish the accurate beam combining of a plurality of laser beams;
(II) parameter adjustment of reference laser beam
Selecting a reference laser beam to pass through a calibration light path, adjusting the integration time and gain of a CCD camera until the light spot profile of the reference laser beam is complete, the shape is clear, the position is stable and no saturation phenomenon exists, and recording the integration time and gain of the CCD camera;
(III) information acquisition of reference laser beams
The acquisition of the pointing and position information of the reference laser beam is completed through the pointing detection device and the position detection device;
(IV) parameter adjustment of the remaining laser beams
Selecting the rest laser beams to sequentially pass through the calibration light path, adjusting the integration time and gain of the CCD camera until the spot miss amount of the laser beams meets the standard, and recording the integration time and gain of the CCD camera;
(V) data update
Changing the original parameter value in the control system to the parameter value which is not collected in the previous step, and storing the parameter value;
(VI) restart control System
And restarting the control system, re-gating the plurality of laser beams, and updating the integration time and the gain of the CCD camera into the marking value, namely completing the application calibration of the combined beam laser parameter monitoring device.
In the above technical solution, the light spots of the reference laser beam in the step (ii) include two light spots pointing to the detection device and the position detection device.
In the above technical solution, the laser beam spot miss amount standard in step (iv) is: the directional miss distance is less than 5, and the position miss distance is less than 10. And (4) the miss distance is the deviation of the light spots of the rest laser beams and the reference laser beam adjusted in the step (II) in the X direction and the Y direction.
In the above technical solution, the calibration objects of the calibration method are laser with power less than 5W and full power laser.
The invention has the beneficial effects that:
the invention provides a calibration optical path and a calibration method for improving the detection precision of beam combination parameters, the calibration optical path can be used for analyzing and researching beam combination parameter detection influence factors, mutual verification of theoretical research and test results is realized, the optical path is convenient to adjust, and the operability is strong; the calibration method is simple and direct, and can greatly improve the precision and accuracy of beam combination parameter detection.
Drawings
FIG. 1 is a schematic diagram of a calibration optical path for improving the detection accuracy of beam combination parameters according to the present invention.
Wherein:
1 beam combining device 2 main laser system
3 main light guide mirror 4 monitoring spectroscope
5 detection spectroscope 6 long distance transmission device
7 pointing to the detecting means 8 position detecting means.
For a person skilled in the art, other relevant figures can be obtained from the above figures without inventive effort.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the following further describes the technical solution of the calibration optical path and the calibration method for improving the detection accuracy of the beam combination parameter by the specific implementation way with reference to the drawings of the specification.
Example 1
As shown in fig. 1, a calibration optical path for improving detection precision of beam combination parameters includes a beam combination device 1 for combining multiple laser beams, a main light guide mirror 3 for reflecting the combined beam to a main laser system 2, a monitoring spectroscope 4 disposed on a light leakage optical path of the main light guide mirror 3, and a detection spectroscope 5 and a long-distance transmission device 6 disposed on two emission optical paths of the monitoring spectroscope 4 respectively; and a pointing detection device 7 and a position detection device 8 are respectively arranged on an emission light path of the detection spectroscope 5.
The monitoring spectroscope 4 and the detection spectroscope 5 are both 50% spectroscopes, and the wedge angle of the spectroscope is smaller than 0.05 degree.
The pointing detection device 7 comprises a beam shrinking light pipe and a wavelength gating and attenuating unit which are matched to realize sequential monitoring of the position of the multiband laser.
The position detection device 8 comprises a parallel light pipe and a wavelength gating and attenuating unit which are matched to realize sequential monitoring of multi-band laser pointing.
The wavelength gating and attenuating unit is an existing device and mainly comprises a base, a gating target wheel, an upper cover and a wavelength gating controller. The core gating target wheel is provided with 4 wavelength gating stations, and each station can be provided with an optical filter and an energy attenuation sheet with phi 55mm, so that the sequential gating and attenuation of 4 paths of laser with different wavelengths are realized. The mechanism is provided with an angle measuring element, and accurate switching of each station can be realized through servo closed-loop control.
The long-distance transmission device 6 comprises a plurality of groups of reflectors, and a reciprocating reflection transmission mode is adopted among the reflectors. The specific structure of the long-distance transmission device 6 is the same as that of patent 202021548106.2.
The long-distance transmission device 6 is arranged on a transmission light path of the monitoring spectroscope 4; the detection spectroscope 5 is arranged on a reflected light path of the monitoring spectroscope 4; the position detection device 8 is arranged on a transmission light path of the detection spectroscope 5; the pointing detection device 7 is arranged on a reflection light path of the detection spectroscope 5.
The working principle of the calibration light path of the invention is as follows:
after the sequential combination of the multiple paths of laser beams is finished, the position and the direction of the laser beams with various wavelengths are sequentially monitored by using the light leakage of the combined light beam through the main light guide mirror as a monitoring light beam. Firstly, the monitoring spectroscope is divided into two parts, and one part of monitoring light is divided into two parts by the detection spectroscope and is respectively used for monitoring and measuring the position and the direction of multi-path laser; the other beam of monitoring light enters a self-built long-distance transmission device which is composed of a plurality of groups of reflectors and adopts a reciprocating reflection transmission mode to carry out the combined beam observation of a plurality of beams of light.
Example 2
Based on embodiment 1, a calibration method for improving detection accuracy of beam combination parameters includes the following steps: (taking a four-way laser beam as an example)
(I) precision combination of laser beams
The long-distance transmission device is used as a beam combination observation reference, and the accurate beam combination of the four laser beams is completed by manually adjusting a near-field reflector and a far-field reflector in the corresponding beam combination device;
(II) parameter adjustment of reference laser beam
Selecting a reference light beam (such as wavelength 1) to pass through, adjusting the 'integration time' and 'gain' of a CCD camera through control software of a beam combination laser parameter monitoring device until light spots (including two light spots of pointing direction and position) of the reference light beam are complete in outline, clear in shape and stable in position and have no saturation phenomenon, and recording the 'integration time' and 'gain' at the moment;
(III) information acquisition of reference laser beams
Respectively clicking 'target pointing acquisition' and 'target position acquisition' in control software of the beam combination laser parameter monitoring device to finish pointing and position information acquisition of a reference beam;
(IV) parameter adjustment of the remaining laser beams
Sequentially selecting other light beams (such as wavelength 2, wavelength 3 and wavelength 4) to pass through (including two paths of pointing and position), adjusting the integral time and gain of a CCD camera through control software of a beam combination laser parameter monitoring device until the pointing miss amount (X deviation and Y deviation) of the corresponding light beam light spot is less than 5, the position miss amount (X deviation and Y deviation) is less than 10, and recording the integral time and gain;
(V) data update
Finding an 'integration time gain parameter-low power-ini' or an 'integration time gain parameter-high power-ini' file according to the path, opening the file, changing the existing 'integration time' and 'gain' numerical values in the file into the latest calibrated corresponding numerical values obtained in the previous step, and storing the latest calibrated corresponding numerical values;
(VI) restart control System
And restarting the control software, and clicking the gating wavelength (the wavelength 1, the wavelength 2, the wavelength 3 and the wavelength 4) again, wherein the 'integration time' and the 'gain' of the corresponding camera become the latest calibration value, namely the application calibration of the combined beam laser parameter monitoring device is completed.
The principle of the calibration method of the invention is as follows:
since the pointing and position of the monitoring beam (i.e., the monitored laser) varies with its power, there is a slight deviation in the offset information of the extracted spot even for the same power level of the laser, different attenuation magnification or different camera "integration time" and "gain". Therefore, after the initial adjustment of the beam combination laser parameter monitoring device is completed, aiming at the position and direction monitoring of two gears of low-power laser (less than 5W) and high-power laser (full power), under the premise that the laser attenuation mode is determined, by taking the overlap ratio of long-distance transmission device or outfield long-distance observation light spot as an evaluation standard, the attenuation light spot representing the accurate direction and position information of the laser is searched by adjusting the method of the integral time and gain of the camera, the calibration of the integral time and the gain of the camera corresponding to the laser with different power and different wavelength is realized, and the monitoring precision of the beam combination laser parameter monitoring device is improved.
The invention provides a calibration optical path and a calibration method for improving the detection precision of beam combination parameters, the calibration optical path can be used for analyzing and researching beam combination parameter detection influence factors, mutual verification of theoretical research and test results is realized, the optical path is convenient to adjust, and the operability is strong; the calibration method is simple and direct, and can greatly improve the precision and accuracy of beam combination parameter detection.
The applicant declares that the above description is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and it should be understood by those skilled in the art that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are within the scope and disclosure of the present invention.
Claims (10)
1. The utility model provides an improve mark school light path of closing beam parameter detection precision which characterized in that: the device comprises a beam combining device (1) for combining multiple paths of lasers, a main light guide mirror (3) for reflecting the combined beams to a main laser system (2), a monitoring spectroscope (4) arranged on a light leakage light path of the main light guide mirror (3), and a detection spectroscope (5) and a beam combining observation device respectively arranged on two paths of emission light paths of the monitoring spectroscope (4); and a pointing detection device (7) and a position detection device (8) are respectively arranged on an emission light path of the detection spectroscope (5).
2. The calibration optical path for improving the detection accuracy of the beam combination parameters according to claim 1, wherein: the beam combination observation device is a long-distance transmission device (6).
3. The calibration optical path for improving the detection accuracy of the beam combination parameters according to claim 2, wherein: the long-distance transmission device (6) comprises a plurality of groups of reflectors, and a reciprocating reflection transmission mode is adopted among the reflectors.
4. The calibration optical path for improving the detection accuracy of the beam combination parameters according to claim 1, wherein: the monitoring spectroscope (4) and the detection spectroscope (5) are both 50% spectroscopes, and the wedge angle of the spectroscope is smaller than 0.05 degree.
5. The calibration optical path for improving the detection accuracy of the beam combination parameters according to claim 1, wherein: the pointing detection device (7) comprises a beam shrinking light pipe and a wavelength gating and attenuating unit, and the beam shrinking light pipe and the wavelength gating and attenuating unit are matched to realize sequential monitoring of the positions of the multiband laser.
6. The calibration optical path for improving the detection accuracy of the beam combination parameters according to claim 1, wherein: the position detection device (8) comprises a parallel light pipe and a wavelength gating and attenuating unit, and the parallel light pipe and the wavelength gating and attenuating unit are matched to realize sequential monitoring of multi-band laser pointing.
7. The calibration method for calibrating the optical path for improving the detection precision of the beam combination parameters, which is described in any one of claims 1 to 6, is characterized in that: the method comprises the following steps:
(I) precision combination of laser beams
Adjusting a reflector in the beam combining device, and confirming through the beam combining observation device to finish the accurate beam combining of a plurality of laser beams;
(II) parameter adjustment of reference laser beam
Selecting a reference laser beam to pass through a calibration light path, adjusting the integration time and gain of a CCD camera until the light spot profile of the reference laser beam is complete, the shape is clear, the position is stable and no saturation phenomenon exists, and recording the integration time and gain of the CCD camera;
(III) information acquisition of reference laser beams
The acquisition of the pointing and position information of the reference laser beam is completed through the pointing detection device and the position detection device;
(IV) parameter adjustment of the remaining laser beams
Selecting the rest laser beams to sequentially pass through the calibration light path, adjusting the integration time and gain of the CCD camera until the spot miss amount of the laser beams meets the standard, and recording the integration time and gain of the CCD camera;
(V) data update
Changing the original parameter value in the control system to the parameter value which is not collected in the previous step, and storing the parameter value;
(VI) restart control System
And restarting the control system, re-gating the plurality of laser beams, and updating the integration time and the gain of the CCD camera into the marking value, namely completing the application calibration of the combined beam laser parameter monitoring device.
8. The calibration method for improving the detection accuracy of beam combination parameters according to claim 7, wherein: the light spots of the reference laser beam in the step (II) comprise two light spots of the pointing detection device and the position detection device.
9. The calibration method for improving the detection accuracy of beam combination parameters according to claim 7, wherein: the laser beam spot miss amount standard in the step (IV) is as follows: the directional miss distance is less than 5, and the position miss distance is less than 10.
10. The calibration method for improving the detection accuracy of beam combination parameters according to claim 7, wherein: the calibration objects of the calibration method are laser with the power less than 5W and full-power laser.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113310670A (en) * | 2021-06-03 | 2021-08-27 | 中国科学院空天信息创新研究院 | Laser polarization beam combination measuring device |
| CN115096177A (en) * | 2022-01-06 | 2022-09-23 | 同济大学 | Device and method for monitoring laser beam combination system beam by using sub-beam position |
| CN115283208A (en) * | 2022-07-05 | 2022-11-04 | 无锡奥普特自动化技术有限公司 | Light guide device for focusing mirror coupling system |
-
2020
- 2020-12-14 CN CN202011467030.5A patent/CN112284531A/en active Pending
Non-Patent Citations (1)
| Title |
|---|
| 陈昌博: "多波长激光合束系统中光束监测装置的设计", 《中国优秀硕士学位论文全文数据库 基础科学辑》 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113310670A (en) * | 2021-06-03 | 2021-08-27 | 中国科学院空天信息创新研究院 | Laser polarization beam combination measuring device |
| CN115096177A (en) * | 2022-01-06 | 2022-09-23 | 同济大学 | Device and method for monitoring laser beam combination system beam by using sub-beam position |
| CN115096177B (en) * | 2022-01-06 | 2023-08-04 | 同济大学 | Device and method for monitoring laser beam combining system beam by sub-beam position |
| CN115283208A (en) * | 2022-07-05 | 2022-11-04 | 无锡奥普特自动化技术有限公司 | Light guide device for focusing mirror coupling system |
| CN115283208B (en) * | 2022-07-05 | 2023-03-28 | 无锡奥普特自动化技术有限公司 | Light guide device for focusing mirror coupling system |
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Application publication date: 20210129 |