CN108051182B - A kind of laser subsystem comprehensive test equipment - Google Patents

Abstract

The invention discloses a comprehensive test equipment for a laser subsystem, comprising a control cabinet, an operation display platform, a power measurement device and an optical platform. The control cabinet, the operation display platform and the power measurement device are all arranged on the upper surface of the optical platform. The power measurement device and the operation display platform are arranged in parallel on one side of the control cabinet, and inside the control cabinet are sequentially provided with a large-diameter off-axis parabolic reflection collimator, an analog range-measuring device and an optical axis accuracy measurement device. The beam output parallelism of the light pipe is less than or equal to 5″, and the effective optical aperture is Φ300mm. The laser subsystem comprehensive test equipment provided by the present invention can simulate the range measurement and measure the optical axis accuracy, and solve the problem of low detection accuracy of the current laser test equipment with a single function , greatly improving the test control efficiency of the laser subsystem.

Description

A kind of laser subsystem comprehensive test equipment

technical field

The invention relates to the technical field of optical testing, in particular to a comprehensive testing device for a laser subsystem.

Background technique

In the production of laser components such as laser irradiation aiming, the relevant performance parameters of the components are required, including the performance characteristics of the laser beam itself, such as the beam divergence angle energy and pulse width, etc. The coaxiality of the laser optical axis and the optical axis of the transmitting antenna, and The deviation of the installation reference, the coaxiality of the transmitting optical axis and the receiving optical axis are tested, which is convenient for the auxiliary assembly of the laser components. At the same time, the overall performance of the components needs to be tested offline, and the existing laser parameter detector is based on each parameter. Independent measurement, there is no comprehensive laser parameter function test platform, not only the measurement accuracy and efficiency are low, but also the measurement parameters are not complete, these factors have become the bottleneck restricting the performance improvement of laser aiming system in the development of laser products, so it is necessary to develop high-precision technology A comprehensive testing system for indicators and requirements.

SUMMARY OF THE INVENTION

In order to overcome the above-mentioned problems in the prior art, the present invention provides a welding auxiliary locator based on photoelectric measurement.

The specific technical solutions are as follows:

A laser subsystem comprehensive test equipment, including a control cabinet, an operation display platform, a power measurement device and an optical platform, the control cabinet, the operation display platform, and the power measurement device are all arranged on the upper surface of the optical platform, and the power measurement device and The operation display platform is arranged in parallel on one side of the control cabinet, and inside the control cabinet are sequentially provided with a large-diameter off-axis parabolic reflection type collimator, an analog range-measuring device and an optical axis accuracy measuring device. The beam of the large-diameter collimator The output parallelism is less than or equal to 5", and the effective optical aperture is Φ300mm.

Preferably, the large-diameter off-axis parabolic reflective collimator is a full-band collimator, including an off-axis parabolic mirror, a refractive mirror and a target that are arranged in sequence.

Preferably, it also includes a target switching guide rail, the target switching guide rail is connected to the target target, and the target switching guide rail includes a two-dimensional servo guide rail and an image-seeking indicator laser, a 1064nm analog laser point light source, Illuminated visible self-collimating reticle and laser target.

Preferably, the external dimension of the off-axis parabolic mirror is Φ320mmX45mm (equal thickness), the focal length of the parent paraboloid is 2500mm±5%, the surface shape error is RMS≤1/20λλ=0.6328μm), and the surface coating reflectivity is ≥90 % (operating band).

Preferably, the analog odometry device includes an optical trap, a photodetector, a high-speed trigger, a precision delay, a 1064 nm analog laser light source and a collimator, the optical trap is used to collect the laser light emitted from the product, and the The detector is arranged in the optical trap, and the high-speed trigger, the precise delay device and the 1064 nm analog laser light source are connected in sequence.

Preferably, the power measurement device includes a focusing optical lens, a diaphragm, a mirror group, a power meter, a casing and a moving guide rail, the casing is arranged on the moving guide rail, an opening is provided on one side of the casing, and the focusing The optical lens is arranged at the opening, the diaphragm is arranged outside the focusing optical lens, and the mirror combined power meter is arranged relatively inside the casing.

Compared with the prior art, the present invention has the following beneficial effects:

The invention provides a comprehensive testing equipment for a laser sub-system, including a control cabinet, an operation display platform, a power measurement device and an optical platform. Inside the control cabinet, a large-diameter off-axis parabolic reflection type collimator, an analog range-measuring device and a light beam are arranged in sequence. For the shaft accuracy measuring device, the invention solves the problems of single function and low detection accuracy of laser testing equipment, optimizes the testing optical path, reduces the quantity and cost of testing equipment, and improves cost performance.

Description of drawings

Fig. 1 is the system block diagram of a kind of laser subsystem comprehensive test equipment of the present invention;

Fig. 2 is the front view of a kind of laser subsystem comprehensive testing equipment of the present invention;

Fig. 3 is a side view of a laser subsystem comprehensive test equipment of the present invention;

4 is a schematic structural diagram of a large-diameter off-axis parabolic reflective collimator in a laser subsystem comprehensive test equipment according to the present invention;

5 is a schematic structural diagram of a target switching guide rail in a laser sub-system comprehensive testing equipment of the present invention;

Fig. 6 is the working principle diagram of the range measurement simulation device in a kind of laser subsystem comprehensive test equipment of the present invention;

7 is a schematic structural diagram of a range measurement simulation device in a laser sub-system comprehensive test equipment of the present invention;

FIG. 8 is a block diagram of the composition of a simulated laser light source in a laser subsystem comprehensive test equipment of the present invention;

Fig. 9 is the principle block diagram of the precision delay device in a kind of laser subsystem comprehensive test equipment of the present invention;

10 is a working principle diagram of an optical axis correction device in a laser subsystem comprehensive test equipment of the present invention;

Fig. 11 is a working principle diagram of an optical axis accuracy measuring device in a laser subsystem comprehensive test equipment according to the present invention;

12 is a schematic structural diagram of a power detection device in a laser subsystem comprehensive test equipment of the present invention;

FIG. 13 is a block diagram of a control system in a laser subsystem comprehensive test equipment of the present invention.

In the figure, 1-large-diameter off-axis parabolic reflective collimator, 2-analog range measurement device, 3-optical axis accuracy measurement device, 4-reference, 5-operation display platform, 6-power measurement device, 7-control Cabinet, 8-optical platform, 9-photodetector, 10-optical axis deviation image acquisition sensor, 11-off-axis parabolic mirror, 12-switching guide rail, 13-target target, 14-trigger, 15-delayer , 16-simulated light source, 17-target surface image acquisition optical axis parallelism measurement system, 18-optical trap, 19-refractive mirror, 20-reticle, 21-laser target, 22-two-dimensional servo guide, 23- 1064nm point light source, 24-finder laser, 25-target image acquisition device, 26-correction mirror, 27-visible light source, 28-laser attenuation device, 29-focusing optical lens, 30-diaphragm, 31-reflection Mirror group, 32-power meter, 33-housing, 34-moving rail

Detailed ways

The specific embodiments of the present invention will be further described below with reference to the accompanying drawings. It should be noted here that the descriptions of these embodiments are used to help the understanding of the present invention, but do not constitute a limitation of the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

The present invention discloses a comprehensive testing equipment for laser sub-system, as shown in Figs. , The power measuring device 6 is arranged on the upper surface of the optical platform 8, the power measuring device 6 and the operation display platform 5 are arranged in parallel on one side of the control cabinet 7, and the inside of the control cabinet 7 is sequentially provided with a large-diameter off-axis parabolic reflection type collimator. 1. Analog range measuring device 2 and optical axis accuracy measuring device 3.

As shown in FIG. 4 , the large-diameter off-axis parabolic reflective collimator 1 is a full-band collimator, including an off-axis parabolic mirror 11 , a refractive mirror 19 and a target 13 arranged in sequence. The large-diameter off-axis parabolic reflective collimator 1 is a common component of the analog range measuring device 2 and the optical axis accuracy measuring device 3. It consists of an off-axis parabolic mirror 11, a refractive mirror 19, a target target 13, etc. Band collimator, large-diameter off-axis parabolic reflective collimator 1 In addition to ensuring the machining accuracy of the off-axis parabolic mirror 11, it must be precisely calibrated during installation to ensure the aberration of the outgoing beam, beam divergence angle, etc. Technical index requirements. The target board switching guide rail 12 precisely switches the target target 13 under the control of the servo motor. The refractive mirror 19 is used to fold the optical path and reduce the volume of the entire test equipment. It also includes a target switching guide rail 12, the target switching guide rail 12 is connected with the target target 13, and the target switching guide rail 12 includes a two-dimensional servo guide rail 22 and an image-seeking indicator laser 24 and a 1064 nm analog laser point light source 23 that are sequentially arranged above the two-dimensional servo guide rail 22. , The self-collimating reticle 20 and the laser target 21 can be seen with illumination. The target switching guide rail 12 is provided with an illuminated visible self-collimating reticle 20, a laser target 21, a 1064nm analog laser point light source 23, and an image-finding indicating laser 24, which are precisely switched under the drive of a servo motor. Among them, the beam output parallelism of the large-diameter collimator is ≤5″, the effective optical diameter is Φ300mm, the external dimension of the off-axis parabolic mirror 11 is Φ320mmX45mm (equal thickness), the focal length of the parent paraboloid is 2500mm±5%, and the surface shape error It is RMS≤1/20λ (λ=0.6328μm), and the surface coating reflectivity is ≥90% (working band).

As shown in Figures 6 and 7, the analog ranging device 2 includes an optical trap 18, a photodetector 9, a high-speed trigger 14, a precision delay 15, a 1064 nm analog laser light source 16 and a collimator, and the optical trap 18 is used for collecting For the laser emitted from the product, the detector is set in the optical trap 18, and the high-speed trigger 14, the precision delay device 15 and the 1064 nm analog laser light source 16 are connected in sequence. The analog range measuring device 2 is composed of an optical trap 18, a high-sensitivity photodetector 9, a high-speed trigger 14, a precise delay device 15, a 1064 nm analog laser light source 16, a collimator, and the like. The optical trap 18 collects the laser light emitted from the product, and the high-sensitivity detector is placed in the optical trap 18. After detecting that the product under test emits laser light, the high-speed trigger 14 triggers the precision delayer 15, and the delay time is the set analog measurement distance. After the delay time expires, the 1064nm analog laser light source 16 is triggered, and the laser light source emits an echo laser signal with the same pulse width, frequency and energy corresponding to the distance, and the ranging machine receives the signal for analog ranging. The 1064nm analog laser light source 16 is used to simulate the laser ranging echo laser signal, and it is necessary to simulate the laser wavelength, frequency, pulse width, and laser energy at different distances. Beamer, optical power meter 32, visible laser, etc. As shown in Figure 8, the wavelength of 1064nm laser is coupled to the fiber, the output laser power is controlled by the fiber program-controlled attenuator, and the optical beam splitter separates a certain proportion of the light into the fiber. Optical power meter 32, which performs real-time measurement and feeds back to the control system to monitor the current optical power, especially when performing maximum range verification, the laser light source must simulate the echo laser power at the maximum distance, and be able to accurately measure the power Measurement is used to evaluate the maximum range of the product under test. The visible laser is coupled to the same optical fiber to accurately correct the light spot to the focal plane of the off-axis parabolic mirror 11 in the visible band. The main technical indicators of the analog laser light source 16 are as follows: center wavelength: 1064nm±3nm; laser power instability ≤5%; radiation power: adjustable; pulse width: adjustable from 10ns to 100ns; trigger mode: external trigger, internal trigger (500 ) KHz; repetition frequency: 1Hz-20KHz.

As shown in Figure 9, according to the relationship between the speed of light, time and distance, when the analog measuring range is 300M-100KM, the time setting range of the precision delayer 15 is about 2μs-1ms, and when the ranging accuracy is 2M, the delay accuracy Must be less than 6ns. The precision delay device 15 sends out a millisecond-level pulse signal from the source signal generator, which is input to the coarse adjustment delay device through the signal adjustment circuit and gating, and then the fine adjustment delay device performs fine adjustment delay, and the delay time can be adjusted. Realized by controlling the serial communication of the computer, the principle block diagram of the precision delayer 15 is shown in Figure 9. The main technical indicators of the program-controlled precision delayer 15: the delay setting range is 2μs-1ms; the delay accuracy is less than or equal to 4ns.

As shown in FIG. 12 , the power measuring device 6 includes a focusing optical lens 29 , a diaphragm 30 , a mirror group 31 , a power meter 32 , a casing 33 and a moving guide rail 34 , the casing 33 is arranged on the moving guide rail 34 , and one side of the casing 33 An opening is provided, the focusing optical lens 29 is disposed at the opening, the diaphragm 30 is disposed outside the focusing optical lens 29 , and the mirror group 31 and the power meter 32 are relatively disposed inside the casing 33 . The power detection device is installed on the platform at the exit of the parallel light pipe, and moves to the light outlet when it needs to be detected. The center of the optical axis is positioned by the guide rail. The 19 groups of refractive mirrors reduce the overall size of the device, and the diaphragm 30 can be adjusted according to the The effective diameter of the measured product shall be replaced, and it shall be kept consistent with the effective diameter of the product. Main technical indicators of the optical system of the power detection device: Optical diameter: Φ200mm;

As shown in Figure 13, the controller is composed of industrial control computer, motion control card, image card, driver, laser light source control system and other electrical appliances. Its functions are target switching control, laser light source (power, frequency, pulse width) control, program control Precision delayer 15 time setting, image acquisition, etc. The industrial computer is used as the host computer, and the PCI interface, RS232 interface, etc. are used for communication between the modules and the host computer to realize parameter setting and action command control. Data information. The operation display table is composed of an operation panel, a touch display, an angle adjustment structure, etc. It is a man-machine operation interface for inputting and displaying information. The operating display table is designed with an inclination angle of 30° and can be rotated by 300°, making the commissioning operation easier and more comfortable. The dedicated control software has a friendly human-machine interface, through which operating parameters, display data, and images can be input, and each module can be controlled to operate in coordination. Synchronous switching, the software design includes functions such as auxiliary detection, intelligent action, and information prompts. At the same time, it has functions such as error correction protection and fault diagnosis, and strives for a friendly human-machine interface. The test bench software has the following functions: Parameter setting function: input the required parameters through the interface, and modify the parameters of related modules, such as: laser The power, frequency, module, attenuation magnification of the light source, etc., image display function: display the target image data display function of the observation imaging device: display test results, equipment status information, etc. Data storage function: store test results, test status and other data to the computer.

Optical axis accuracy measurement principle

①Establish the reference plane

As shown in Figure 10, this scheme adopts the self-alignment method for calibration, and the calibration mirror 26 is closely attached to the reference surface 4 of the fixture, and the calibration optical path is shown in Figure 10. During the test, the image-seeking indicator light is first moved into the optical path. Indicate the position of the optical axis of the collimator, initially adjust the reference 4 surfaces of the product fixture, return the indicator light principle, and then move the self-collimation reticle 20 with a light source into the optical path, and the self-collimation can be observed in the target surface image acquisition device 25. The scribe plate 20 and the self-collimated image reflected by the mirror, if the two images do not coincide, accurately correct the reference surface to make it coincide, and the position of the reference surface and the optical axis is established until the accuracy requirements are met.

②Establish the laser emission optical axis

As shown in Figure 11, the laser target 21 is moved into the optical path, the product emits laser light, and the laser light is attenuated to an appropriate degree through the attenuation device (prepared separately), and a visible light spot is formed on the laser target 21. The position of the laser spot in the collimator light pipe represents the product The optical axis of the laser is emitted, and the spot position is recorded by the target surface image acquisition device 25 .

③Solution of optical axis deviation

Through image calculation, the height and azimuth deviation between the light spot and the reference can be solved, that is, the deviation between the emission optical axis of the tested product and the reference 4 .

The main technical parameters of the optical axis measurement device: the focal length of the imaging lens is 600mm, the optical aperture is Φ4, the CCD pixel is 5 million, and the optical axis measurement error is ≤2.8″.

The embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. For those skilled in the art, without departing from the principle and spirit of the present invention, various changes, modifications, substitutions and alterations to these embodiments still fall within the protection scope of the present invention.

Claims (5)

1. a laser subsystem comprehensive test equipment, is characterized in that: comprise control cabinet, operation display platform, power measuring device and optical platform, described control cabinet, operation display platform, power measuring device are all arranged on the upper surface of optical platform, The power measuring device and the operation display platform are arranged in parallel on one side of the control cabinet, and the inside of the control cabinet is sequentially provided with a large-diameter off-axis parabolic reflective collimator, an analog range-measuring device and an optical axis accuracy measuring device. The beam output parallelism of the off-axis parabolic reflection collimator with aperture is ≤5", and the effective optical aperture is Φ300mm. The power measurement device includes a focusing optical lens, a diaphragm, a mirror group, a power meter, a casing and a moving guide rail. The casing is arranged on the moving guide rail, an opening is arranged on one side of the casing, the focusing optical lens is arranged at the opening, the diaphragm is arranged outside the focusing optical lens, and the mirror group and the power meter are arranged opposite to each other. inside the shell. 2. A kind of comprehensive testing equipment of laser subsystem according to claim 1, it is characterized in that: described large-diameter off-axis parabolic reflection type collimator is a full-band collimator, comprising off-axis parabolic mirrors arranged in sequence , refractive mirrors and targets. 3. A kind of laser subsystem comprehensive testing equipment according to claim 2, is characterized in that: also comprises target switching guide rail, described target switching guide rail is connected with target target, and described target switching guide rail comprises two-dimensional servo guide rail and sequentially The image-seeking indicator laser, 1064nm analog laser point light source, visible self-collimating reticle with illumination and laser target set above the two-dimensional servo guide rail. 4. A kind of laser subsystem comprehensive testing equipment according to claim 2, it is characterized in that: the external dimension of described off-axis parabolic mirror is Φ320mmX45mm, parent paraboloid focal length is 2500mm±5%, and surface shape error is RMS≤ 1/20λ, λ=0.6328μm, surface coating reflectivity ≥90%. 5. A kind of laser subsystem comprehensive testing equipment according to claim 1, it is characterized in that: described simulation range measuring device comprises optical trap, photodetector, high-speed trigger, precision delay device, 1064nm simulation laser light source and Large-diameter off-axis parabolic reflective collimator, the optical trap is used to collect the laser light emitted from the product, the photodetector is set in the optical trap, the high-speed trigger, the precision delayer and the 1064nm analog laser light source connected in sequence.

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