CN108051182B - Laser subsystem comprehensive test equipment - Google Patents

Laser subsystem comprehensive test equipment Download PDF

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Publication number
CN108051182B
CN108051182B CN201711086757.7A CN201711086757A CN108051182B CN 108051182 B CN108051182 B CN 108051182B CN 201711086757 A CN201711086757 A CN 201711086757A CN 108051182 B CN108051182 B CN 108051182B
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laser
guide rail
target
test equipment
optical
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CN108051182A (en
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吴李宗
张德祥
王锦华
陈轩
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Yangzhou Kelai Photoelectric Technology Co., Ltd
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Yangzhou Kelai Photoelectric Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties

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  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
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Abstract

The invention discloses a laser subsystem comprehensive test device which comprises a control cabinet, an operation display platform, a power measuring device and an optical platform, wherein the control cabinet, the operation display platform and the power measuring device are all arranged on the upper surface of the optical platform, the power measuring device and the operation display platform are arranged on one side of the control cabinet in parallel, a large-caliber off-axis paraboloid reflection type collimator, a simulation measuring range device and an optical axis precision measuring device are sequentially arranged in the control cabinet, the beam emitting parallelism of the large-caliber collimator is less than or equal to 5', and the effective optical caliber is phi 300 mm. The laser subsystem comprehensive test equipment provided by the invention can simulate measuring distance and measure optical axis precision, solves the problem of single function and low detection precision of the existing laser test equipment, and greatly improves the test regulation efficiency of the laser subsystem.

Description

Laser subsystem comprehensive test equipment
Technical Field
The invention relates to the technical field of optical testing, in particular to a laser subsystem comprehensive testing device.
Background
In the production of laser components such as laser irradiation aiming and the like, related performance parameters of the components, including performance characteristics of laser beams, such as the coaxiality of laser optical axes such as divergence angle energy and pulse width of the beams and an optical axis of a transmitting antenna, deviation of an installation reference, the coaxiality of the transmitting optical axis and a receiving optical axis and the like, need to be tested, the auxiliary assembly of the laser components is facilitated, and the overall performance of the components needs to be tested off line.
Disclosure of Invention
In order to overcome the problems in the prior art, the invention provides a welding auxiliary positioning instrument based on photoelectric measurement.
The specific technical scheme is as follows:
the control cabinet, the operation display platform and the power measuring device are all arranged on the upper surface of the optical platform, the power measuring device and the operation display platform are arranged on one side of the control cabinet in parallel, a large-caliber off-axis paraboloid reflection type collimator, a simulation range measuring device and an optical axis precision measuring device are sequentially arranged inside the control cabinet, the beam emergent parallelism of the large-caliber collimator is less than or equal to 5', and the effective optical caliber is phi 300 mm.
Preferably, the large-caliber off-axis parabolic reflective collimator is a full-wave-band collimator and comprises an off-axis parabolic reflector, a folding reflector and a target which are sequentially arranged.
Preferably, the device also comprises a target switching guide rail, wherein the target switching guide rail is connected with a target, and comprises a two-dimensional servo guide rail, an image seeking indication laser, a 1064nm simulation laser point light source, a visible auto-collimation reticle with illumination and a laser target, which are sequentially arranged above the two-dimensional servo guide rail.
Preferably, the external dimension of the off-axis parabolic reflector is phi 320mmX45mm (equal thickness), the focal length of the mother parabolic reflector is 2500mm +/-5%, the surface shape error is RMS (root mean square) less than or equal to 1/20 lambda (0.6328 mu m), and the surface coating reflectivity is greater than or equal to 90% (working waveband).
Preferably, the simulated measuring range device comprises an optical trap, a photoelectric detector, a high-speed trigger, a precision delayer, a 1064nm simulated laser light source and a collimator, wherein the optical trap is used for collecting laser emitted from a product, the detector is arranged in the optical trap, and the high-speed trigger, the precision delayer and the 1064nm simulated laser light source are sequentially connected.
Preferably, the power measuring device includes focusing optical lens, diaphragm, speculum group, dynamometer, shell and removal guide rail, the shell sets up on removing the guide rail, one side of shell is provided with the opening, focusing optical lens sets up at the opening part, the diaphragm sets up at focusing optical lens outsidely, the speculum makes up the dynamometer and sets up inside the shell relatively.
Compared with the prior art, the invention has the following beneficial effects:
the invention provides a laser subsystem comprehensive test device which comprises a control cabinet, an operation display platform, a power measuring device and an optical platform, wherein a large-caliber off-axis paraboloid reflection type collimator, a simulation measuring range device and an optical axis precision measuring device are sequentially arranged in the control cabinet.
Drawings
FIG. 1 is a system diagram of a laser subsystem integrated test apparatus according to the present invention;
FIG. 2 is a front view of a laser subsystem integrated test apparatus of the present invention;
FIG. 3 is a side view of a laser subsystem integrated test apparatus of the present invention;
FIG. 4 is a schematic structural diagram of a large-aperture off-axis parabolic reflective collimator of a laser subsystem integrated test apparatus according to the present invention;
FIG. 5 is a schematic structural diagram of a target switching guide rail of the integrated test equipment for a laser subsystem according to the present invention;
FIG. 6 is a schematic diagram of a measuring range simulation apparatus in the integrated testing device of a laser subsystem according to the present invention;
FIG. 7 is a schematic structural diagram of a ranging simulation apparatus in a laser subsystem integrated test device according to the present invention;
FIG. 8 is a block diagram of a simulated laser light source in the integrated test equipment for a laser subsystem according to the present invention;
FIG. 9 is a schematic block diagram of a precision delay unit in the integrated test equipment of a laser subsystem according to the present invention;
FIG. 10 is a schematic diagram of an optical axis calibration device in a laser subsystem integrated test apparatus according to the present invention;
FIG. 11 is a schematic diagram of an optical axis precision measuring device in a laser subsystem integrated test apparatus according to the present invention;
FIG. 12 is a schematic structural diagram of a power detection apparatus in a laser subsystem integrated test device according to the present invention;
FIG. 13 is a block diagram of a control system in the integrated test equipment for laser subsystems according to the present invention.
In the figure, 1-a large-caliber off-axis paraboloid reflection type collimator, 2-a simulation range measuring device, 3-an optical axis precision measuring device, 4-a benchmark, 5-an operation display platform, 6-a power measuring device, 7-a control cabinet, 8-an optical platform, 9-a photoelectric detector, 10-an optical axis deviation image collecting sensor, 11-an off-axis paraboloid reflector, 12-a switching guide rail, 13-a target, 14-a trigger, 15-a time delay, 16-a simulation light source, 17-a target surface image collecting optical axis parallelism measuring system, 18-an optical trap, 19-a refraction reflector, 20-a reticle, 21-a laser target, 22-a two-dimensional servo guide rail, 23-a 1064nm point light source and 24-an image searching indicating laser, 25-target surface image acquisition device, 26-correction reflector, 27-visible light source, 28-laser attenuation device, 29-focusing optical lens, 30-diaphragm, 31-reflector group, 32-power meter, 33-shell and 34-movable guide rail
Detailed Description
The following further describes embodiments of the present invention with reference to the drawings. It should be noted that the description of the embodiments is provided to help understanding of the present invention, but the present invention is not limited thereto. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
The invention discloses a laser subsystem comprehensive test device which comprises a control cabinet 7, an operation display platform 5, a power measuring device 6 and an optical platform 8, wherein the control cabinet 7, the operation display platform 5 and the power measuring device 6 are all arranged on the upper surface of the optical platform 8, the power measuring device 6 and the operation display platform 5 are arranged on one side of the control cabinet 7 in parallel, and a large-caliber off-axis paraboloid reflection type collimator 1, a simulation range measuring device 2 and an optical axis precision measuring device 3 are sequentially arranged in the control cabinet 7.
As shown in fig. 4, the large-caliber off-axis parabolic reflective collimator 1 is a full-waveband collimator, and includes an off-axis parabolic reflector 11, a folding reflector 19 and a target 13, which are sequentially disposed. The large-caliber off-axis parabolic reflective collimator 1 is a shared component of a simulation range measuring device 2 and an optical axis precision measuring device 3, and is a full-wave-band collimator composed of an off-axis parabolic reflector 11, a folding reflector 19, a target 13 and the like and structural parts and the like, and the large-caliber off-axis parabolic reflective collimator 1 can ensure technical index requirements such as aberration of an emergent light beam, a beam divergence angle and the like only by precision correction during installation except for ensuring the surface processing precision of the off-axis parabolic reflector 11. The target plate switching guide rail 12 precisely switches the target 13 under the control of the servo motor. The folding mirror 19 is used to fold the light path and reduce the volume of the whole testing device. The target switching guide rail 12 is connected with a target 13, and the target switching guide rail 12 comprises a two-dimensional servo guide rail 22, an image seeking indication laser 24, a 1064nm simulation laser point light source 23, a visible auto-collimation reticle 20 with illumination and a laser target 21 which are sequentially arranged above the two-dimensional servo guide rail 22. The target switching guide rail 12 is provided with a visible auto-collimation reticle 20 with illumination, a laser target 21, a 1064nm simulation laser point light source 23 and a view finding indication laser 24, and is driven by a servo motor to perform accurate switching. The beam emergent parallelism of the large-aperture collimator is less than or equal to 5', the effective optical aperture is phi 300mm, the external dimension of the off-axis parabolic reflector 11 is phi 320mmX45mm (equal thickness), the focal length of the mother paraboloid is 2500mm +/-5%, the surface shape error is RMS (RMS) less than or equal to 1/20 lambda (lambda is 0.6328 mu m), and the surface coating reflectivity is more than or equal to 90% (working waveband).
As shown in fig. 6 and 7, the simulated measuring distance device 2 includes an optical trap 18, a photodetector 9, a high-speed trigger 14, a precision delayer 15, a 1064nm simulated laser light source 16 and a collimator, the optical trap 18 is used for collecting laser emitted from a product, the detector is arranged in the optical trap 18, and the high-speed trigger 14, the precision delayer 15 and the 1064nm simulated laser light source 16 are connected in sequence. The analog range finding device 2 is composed of an optical trap 18, a high-sensitivity photoelectric detector 9, a high-speed trigger 14, a precision delayer 15, a 1064nm analog laser light source 16, a collimator and the like. The optical trap 18 collects laser emitted from a product, the high-sensitivity detector is placed in the optical trap 18, after the fact that the detected product emits the laser is detected, the high-speed trigger 14 triggers the precision time delay device 15, the time delay time is set to simulate the measuring distance, the 1064nm simulated laser light source 16 is triggered after the time delay time is up, the laser light source emits echo laser signals with the same pulse width, frequency and energy corresponding to the distance, and the distance measuring machine receives the echo laser signals to conduct simulated distance measurement. The 1064nm simulated laser light source 16 is used for simulating laser ranging echo laser signals, and needs to simulate laser wavelength, frequency, pulse width, and laser energy at different distances, the simulated laser light source 16 is composed of a laser, an optical fiber program-controlled attenuator, an optical switch, an optical beam splitter, an optical power meter 32, a visible laser, and the like, as shown in fig. 8, laser with a wavelength of 1064nm is coupled into an optical fiber, the output laser power is controlled by the optical fiber programmable attenuator, the light beam splitter divides a certain proportion of light to enter the optical power meter 32 for real-time measurement and feedback to the control system to monitor the current optical power, especially, when maximum range verification is carried out, the laser light source must simulate the echo laser power at the maximum distance, and can accurately measure the power to check the maximum measuring range of the measured product, the visible laser is coupled to the same optical fiber, for accurate correction of the spot in the visible band onto the focal plane of the off-axis parabolic mirror 11. The main technical indexes of the simulated laser light source 16 are as follows: center wavelength: 1064nm and 3 nm; the laser power instability is less than or equal to 5 percent; radiation power: the adjustment is carried out; pulse width: the length of 10 ns-100 ns is adjustable; the triggering mode is as follows: external triggering, internal triggering (500) KHz; repetition frequency: 1Hz-20 KHz.
As shown in fig. 9, according to the relationship between the speed of light, the time and the distance, when the simulated measurement range is 300M-100KM, the time setting range of the precision time delay 15 is about 2 μ s-1ms, and when the measurement precision is 2M, the delay precision must be less than 6 ns. The precision delayer 15 sends a millisecond pulse signal from a source signal generator, the millisecond pulse signal is input into a coarse delay device after being gated by a signal regulating circuit, and then fine delay is carried out by a fine delay device, the delay time can be realized by controlling the serial communication of a computer, the functional block diagram of the precision delayer 15 is shown in fig. 9, and the program-controlled precision delayer 15 has the main technical indexes: the delay setting range is 2 mus-1 ms; the delay precision is less than or equal to 4 ns.
As shown in fig. 12, the power measuring device 6 includes a focusing optical lens 29, a diaphragm 30, a mirror group 31, a power meter 32, a housing 33 and a moving guide rail 34, the housing 33 is disposed on the moving guide rail 34, an opening is disposed on one side of the housing 33, the focusing optical lens 29 is disposed at the opening, the diaphragm 30 is disposed outside the focusing optical lens 29, and the mirror group 31 and the power meter 32 are oppositely disposed inside the housing 33. The power detection device is arranged on a platform at the outlet of the collimator and moves to the outlet of the collimator when detection is needed, the center position of the optical axis of the power detection device is positioned by the guide rail, the overall dimension of the device is reduced by the folding and reflecting mirror 19, and the diaphragm 30 can be replaced according to the effective caliber of a detected product and keeps consistent with the effective caliber of the product. The main technical indexes of the optical system of the power detection device are as follows: optical caliber: phi is 200 mm; focal length: micropower meter 32 of 600mm power detection device has main technical indexes: wavelength range: 0.8 to 1.7 μm; measurement range: 10pW to lmw.
As shown in fig. 13, the controller is composed of an industrial control computer, a motion control card, an image card, a driver, a laser light source control system, and other electrical appliances, and functions as target switching control, laser light source (power, frequency, pulse width) control, program-controlled precise time delay 15 time setting, image acquisition, and the like. The industrial personal computer is used as a host, each module is communicated with the host through a PCI interface, an RS232 interface and the like to realize parameter setting and action instruction control, each module adopts a single chip microcomputer to form a relatively independent system, is controlled by the single chip microcomputer, and exchanges data information with the host through the interface. The operation display platform consists of an operation panel, a touch display, an angle adjusting structure and the like, and is used for inputting and displaying information for a human-computer operation interface. The operating display table is designed to have an inclination angle of 30 degrees and can rotate by 300 degrees, so that the adjusting and measuring operation is easier and more comfortable. The special control software has a friendly man-machine interface, operating parameters, display data and images can be input through the interface, the modules are controlled to run coordinately, and the control software enables the test board to be intelligent, such as: when the optical channel is switched, the synchronous switching of the target and the light source is automatically realized, and the software design comprises the functions of auxiliary detection, intelligent action, information prompt and the like. Meanwhile, the test board has the functions of error correction protection, fault diagnosis and the like, and strives for friendly human-computer interface, and the test board software has the following functions: a parameter setting function: inputting the needed parameters through an interface, and modifying the parameters of the relevant modules, such as: power, frequency, module, attenuation ratio, etc. of the laser light source, and image display function: the target surface image data display function of the display observation imaging device: and displaying the test result, equipment state information and the like. Data storage function: and storing the data of the test result, the test state and the like into the computer.
Principle of optical axis precision measurement
① establishing a datum plane
As shown in figure 10, the scheme adopts self-calibration method for calibration, a calibration reflector 26 is tightly attached to the reference 4 surface of a clamp, a calibration light path is shown in figure 10, during testing, firstly, image-seeking indicating light is moved into the light path firstly, the position of the optical axis of a collimator is indicated, the reference 4 surface of a product clamp is adjusted preliminarily, the principle of the indicating light is returned, then, a self-calibration reticle 20 with a light source is moved into the light path, the self-calibration reticle 20 and a self-calibration image reflected by a reflector can be observed in a target surface image acquisition device 25, if the two images are not overlapped, the reference 4 surface is calibrated accurately to be overlapped, and the positions of the reference 4 surface and the optical axis are determined until the precision requirement is met.
② creating a laser emission axis
As shown in fig. 11, the laser target 21 is moved into the light path, the product emits laser, the laser is attenuated to a suitable degree by the attenuation device (which is prepared separately), a visible light spot is formed on the laser target 21, the position of the laser light spot in the collimator represents the laser emission optical axis of the product, and the position of the light spot is recorded by the target surface image acquisition device 25.
③ resolving optical axis deviation
And resolving the height and azimuth deviation between the light spot and the reference through image resolving, namely the deviation between the emission optical axis of the measured product and the reference 4.
The optical axis measuring device has the main technical parameters: the focal length of the imaging lens is 600mm, the optical caliber is phi 4, the number of CCD pixels is 500 ten thousand, and the optical axis measurement error is less than or equal to 2.8'.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. It will be apparent to those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, and the scope of protection is still within the scope of the invention.

Claims (5)

1. The utility model provides a laser subsystem integrated test equipment which characterized in that: the power measurement device comprises a focusing optical lens, a diaphragm, a reflector group, a power meter, a shell and a movable guide rail, wherein the shell is arranged on the movable guide rail, one side of the shell is provided with an opening, the focusing optical lens is arranged at the opening, and the diaphragm is arranged outside the focusing optical lens, the reflector group and the power meter are oppositely arranged in the shell.
2. The integrated test equipment for laser subsystem as claimed in claim 1, wherein: the large-caliber off-axis parabolic reflective collimator is a full-wave-band collimator and comprises an off-axis parabolic reflector, a refraction reflector and a target which are sequentially arranged.
3. The integrated test equipment for laser subsystem as claimed in claim 2, wherein: still switch the guide rail including the target, the target switches the guide rail and links to each other with the target, the target switches the guide rail and includes two-dimensional servo guide rail and set gradually look for like pointing out laser, 1064nm simulation laser pointolite, take the illumination visible auto-collimation graticule and laser target above two-dimensional servo guide rail.
4. The integrated test equipment for laser subsystem as claimed in claim 2, wherein: the off-axis parabolic reflector has the external dimension phi of 320mmX45mm, the focal length of the mother parabolic mirror is 2500mm +/-5%, the surface shape error is that RMS is not more than 1/20 lambda, the lambda is 0.6328 mu m, and the surface coating reflectivity is not less than 90%.
5. The integrated test equipment for laser subsystem as claimed in claim 1, wherein: the simulated measuring range device comprises an optical trap, a photoelectric detector, a high-speed trigger, a precise delayer, a 1064nm simulated laser light source and a large-caliber off-axis paraboloid reflection type collimator, wherein the optical trap is used for collecting laser emitted by a product, the photoelectric detector is arranged in the optical trap, and the high-speed trigger, the precise delayer and the 1064nm simulated laser light source are sequentially connected.
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CN110095192B (en) * 2019-04-26 2020-10-20 南京理工大学 Thermal infrared imager comprehensive performance parameter testing system and method thereof
CN111707449B (en) * 2020-05-21 2021-05-14 中国科学院西安光学精密机械研究所 Multi-spectral optical axis parallelism testing device and testing method
CN113162690B (en) * 2021-06-01 2023-10-27 中国科学院微小卫星创新研究院 Space laser communication detection device and method

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