CN107643055A - Self-reference collimated light path system and calculating tested angle method based on light beam - Google Patents
Self-reference collimated light path system and calculating tested angle method based on light beam Download PDFInfo
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Abstract
A kind of method the present invention relates to self-reference collimated light path system based on light beam and using the system-computed tested angle.The light collimation that light source is sent is irradiation cross differentiation plate after collimated light beam；Light beam after irradiating cross differentiation plate is divided into the two orthogonal linearly polarized lights of beam polarization state by polarization splitting prism, polarization direction is that horizontal linearly polarized light is reflected into receiving light path system imaging through referring to reflective surface after quarter wave plate, plane mirror along backtracking to polarization splitting prism, then by polarization splitting prism；Polarization direction is that vertical linearly polarized light passes through quarter wave plate, window glass and tested reflecting surface, the backtracking polarization splitting prism after tested reflective surface, then is transmitted into receiving light path system imaging by polarization splitting prism.Tested angle is calculated using the alternate position spike of tested surface catoptric imaging and plane of reference catoptric imaging, effectively inhibits laser beam to point to influence of the change to measurement result.
Description
Technical field
The invention belongs to accurate technical field of electro-optical measurement, more particularly to a kind of self-reference collimated light based on light beam
Road system and the method using the system-computed tested angle.
Background technology
Photoelectric auto-collimator is a kind of instrument using the measurement minute angle change of optical autocollimating principle, can be divided into autocollimatic
Straight light path system, photoelectric receiving system and signal processing system three parts.Wherein, auto-collimation light path system is used to send and receive
Collimated light, photoelectric receiving system are used for the conversion for realizing photosignal, and signal processing system is used for pretreatment, the mesh for completing signal
Demarcate the calculating of position and deflection angle.
The general principle of optical autocollimating angle measurement is：The light that monochromatic spot light is sent after collimating optical system parallel to
Primary optical axis projects, and emergent light returns to optical system after testee reflects, and is imaged on the photosurface of photoelectric receiving system.
If the reflecting surface of testee presses backtracking perpendicular to the primary optical axis of collimating optical system, light, now return light is in photoelectricity
Formed image patch center is demarcated as system zero-bit on sensor；As the reflecting surface normal direction of testee and the master of optical system
When optical axis has an angle, then with system zero-bit there is certain deviation amount in reflected light image patch center, according to the substantially former of geometric optics
Reason can calculate the angle between the reflecting surface normal direction of testee and optical system primary optical axis by this offset.
Because semiconductor laser has, monochromaticjty is good, energy is strong, is easily obtained high resolution, the optics of telemeasurement
The advantages that system, therefore, monochromatic source typically uses semiconductor laser in high-precision auto-collimation system.But at present using half
Conductor laser is difficult to further improve as the angle measurement accuracy of the optical autocollimating system of light source, indeterminacy phenomenon occurs.
The major reason for causing this phenomenon is exactly that semiconductor laser beam sensing has jitter, and this sensing jitter is by half
The luminescence mechanism of conductor laser causes.Light beam points to shake and directly results in collimation image space shake, is that auto-collimation system is surveyed
The major obstacle that accuracy of measurement further improves.Therefore, how to reduce this light beam and point to jitter to auto-collimation systematic survey essence
The influence of degree, it is the further key for improving the auto-collimation systematic function based on semiconductor laser.
In addition, in auto-collimation system reflected face and distance etc. factor influence, the luminous energy that photoelectric sensor receives
Amount excursion is larger, and the dynamic range that photoelectric sensor is improved for this is the key for solving this problem.
The content of the invention
It is an object of the invention to provide a kind of auto-collimation light path system with self-reference function based on light beam and
Using the system-computed tested angle method, it can effectively suppress semiconductor laser beam and point to shake to auto-collimation optical system
The influence of system, improve the angle measurement accuracy of auto-collimation system.
The technical solution of the present invention is to provide a kind of self-reference collimated light path system based on light beam, and its is special
Part is：Including light source 9, the first collimating optical system, cross-graduation plate 11, polarization splitting prism 12, tested light path system,
Reference path system and receiving light path system；
The light collimation that above-mentioned first collimating optical system is used to send light source 9 is irradiation cross-graduation plate after collimated light beam
11；
Above-mentioned polarization splitting prism 12 mutually hangs down for the light beam after irradiation cross-graduation plate 11 to be divided into two beam polarization states
Straight linearly polarized light, wherein a branch of linearly polarized light is horizontal linear polarization transmitted through polarization direction is changed into after polarization splitting prism 12
Light, as the directional light of the second collimating optical system in receiving light path system, another bunch polarised light is through polarization splitting prism 12
It is changed into vertical linearly polarized light after reflection；
Above-mentioned reference path system is located in the emitting light path that polarization direction is horizontal linearly polarized light, above-mentioned tested light path
System is located in the emitting light path that polarization direction is vertical linearly polarized light；
Above-mentioned reference path system includes quarter wave plate 4, the plane mirror 3 and with reference to reflecting surface set gradually along light path
2, polarization direction is that horizontal linearly polarized light returns after quarter wave plate 4, plane mirror 3 through being reflected with reference to reflecting surface 2 along former road
Be back to polarization splitting prism 12, between due to passing through quarter wave plate 4 twice, so polarization state change 90 degree, eventually pass through polarization divide
Light prism 12 is reflected into receiving light path system imaging；
Above-mentioned tested light path system includes quarter wave plate 4, window glass 7 and the tested reflecting surface 1 set gradually along light path,
Polarization direction is that vertical linearly polarized light passes through quarter wave plate 4, window glass 7 and tested reflecting surface 1, is reflected through tested reflecting surface 1
Backtracking polarization splitting prism 12 afterwards, between also due to pass through quarter wave plate 4 twice, so polarization state changes 90 degree, finally
Receiving light path system imaging is transmitted into by polarization splitting prism 12.
What is utilized in two-way optical system is same graticle, and after two-way optical system, final graticle exists
Two images can be obtained in photo electric imaging system, the alternate position spike of two images is calculated using image procossing and Image segmentation scheduling algorithm
Not, and using the difference tested angle is calculated.
Preferably, above-mentioned receiving light path system includes the second collimating optic lens 5 set gradually along light path and photoelectricity turns
Parallel operation part 6, the above-mentioned photosurface of electrooptical device 6 are located on the focal plane of the second collimating optic lens 5, electrooptical device 6
Photosurface is centrally located on optical axis perpendicular to optical axis, photosurface.
Preferably, because the collimating optical system being related in the present invention is two-dimentional system, opto-electronic conversion of the present invention
Device 6 uses highly sensitive face array photoelectric sensor, such as：EMCCD or SCMOS, meanwhile, utilize highly sensitive face array photoelectric sensor
The dynamic range of measurement can be improved, higher measurement accuracy can be remained in that when reflective light intensity is weaker.
Preferably, the system also includes aperture 10, and above-mentioned aperture 10 is located at the collimating optics system of light source 9 and first
Between system.
Preferably, the first collimating optical system includes the first collimating optic lens, and light source 9 is located at the first collimating optic lens
Focal plane on.
Preferably, light source 9 is monochromatic source 9.
The present invention, which also provides, a kind of utilizes a kind of above-mentioned self-reference collimated light path system-computed quilt based on light beam
The method of measuring angle, comprises the following steps：
Step 1：Adjustment makes reference image be located at the centre bit of receiving light path system photosurface with reference to the direction of reflecting surface 2
Put；
Step 2：Cross-graduation plate 11 is irradiated after the emergent light of light source 9 is collimated；
Step 3：Using polarization splitting prism 12, by the light beam after irradiating cross-graduation plate 11, to be divided into two beam polarization states mutual
Vertical linearly polarized light, wherein a branch of linearly polarized light is reflected by polarization splitting prism 12, another bunch polarised light is by polarization spectro
Prism 12 transmits；
Step 4：Adjustment is irradiated quilt after the polarization state for the linearly polarized light that polarization splitting prism 12 reflects through window glass 7
Reflecting surface 1 is surveyed, backtracking is to polarization splitting prism 12 after being reflected by tested reflecting surface 1, after being transmitted by polarization splitting prism 12,
It is collimated to be imaged in photoelectric sensor；
Its irradiation is set to refer to reflecting surface 2 after adjusting the polarization state of the linearly polarized light transmitted by polarization splitting prism 12, by joining
It is collimated in photoelectricity after being reflected by polarization splitting prism 12 to polarization splitting prism 12 to examine backtracking after reflecting surface 2 reflects
Sensor is imaged；
Step 5：Utilize the alternate position spike of two images obtained in image procossing and Image segmentation algorithm calculation procedure four
Not, and using the difference tested angle is calculated.
In measurement process, if the difference in brightness of tested picture and reference image is larger, highly sensitive face battle array photoelectric sensing is utilized
The tested picture of high gain mode collection of device, reference image is gathered using its low gain mode.
The present invention also provides a kind of photoelectric auto-collimator, and it is characterized in that：Including above-mentioned based on light beam
Self-reference collimated light path system.
, can be parallel with being arrived with reference to reflecting surface regulation by tested reflecting surface before measurement angle, specific method is adjustment ginseng
Reflecting surface is examined, until through being overlapped with reference to reflecting surface and tested reflecting surface imaging.If fail before measurement by with reference to reflecting surface
With the regulation of tested reflecting surface to parallel, then the position through referring to reflecting surface and tested reflecting surface imaging is recorded before measurement first
Difference, both alternate position spikes are recorded after measurement again, it is final to calculate measurement angle using alternate position spike twice.
The beneficial effects of the invention are as follows：
1st, the present invention calculates tested angle, laser light using the alternate position spike of tested surface catoptric imaging and plane of reference catoptric imaging
When Shu Zhixiang changes, tested surface catoptric imaging and plane of reference catoptric imaging are simultaneously mobile, and moving direction is identical, and this just has
Effect inhibits laser beam to point to influence of the change to measurement result；
2nd, the present invention improves the signal to noise ratio of reception system by the use of highly sensitive face array photoelectric sensor part 6 as device is received,
The dynamic range of detection is improved, the final use range for improving measuring system, when reflective light intensity is weaker, is remained in that higher
Measurement accuracy.
Brief description of the drawings
Fig. 1 is the light path schematic diagram of the present invention；
Reference is in figure：1- is tested reflecting surface, and 2- refers to reflecting surface, 3- plane mirrors, 4-1/4 wave plates, 5-
Two collimating optic lens, 6- electrooptical devices, 7- window glass, the collimating optic lens of 8- first, 9- light sources, 10- aperture light
Door screen, 11- cross-graduation plates, 12- polarization splitting prisms.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be further described with specific embodiment.
It will be seen from figure 1 that the present invention has the high accuracy of self-reference function, the auto-collimation light path system of high s/n ratio,
Including light source 9, aperture 10, the first collimating optic lens 8, cross-graduation plate 11, polarization splitting prism 12, tested light path system
System, reference path system and receiving light path system；This light path system can be used for photoelectric auto-collimator.
Receiving light path system includes the second collimating optic lens 5 and electrooptical device 6 set gradually along light path, photoelectricity
The photosurface of switching device 6 is on the focal plane of the second collimating optic lens 5, and the photosurface of electrooptical device 6 is perpendicular to light
The optical axis of system, photosurface are centrally located on optical axis.Wherein electrooptical device 6 uses highly sensitive face array photoelectric sensor,
Such as EMCCD or SCMOS.
Tested light path system includes quarter wave plate 4, window glass 7 and the tested reflecting surface 1 set gradually along light path；With reference to
Light path system includes the quarter wave plate 4, plane mirror 3 and reference reflecting surface 2 set gradually along light path.
Light source 9 is monochromatic source, refers to laser caused by semiconductor laser etc., the spot light 9 being emitted through aperture 10
In light source optical path, and on the focal plane of the first collimating optic lens 8.
The system includes the two-way collimation imaging system based on same light source 9, and the wherein first via is used to measure tested reflection
Face 1 is collimated into picture, and its light path process is as follows：Spot light 9- apertures 10- the first collimating optic lens 8- cross-graduation plates
11- polarization splitting prism 12-1/4 wave plate 4- window glass 7- is tested reflecting surface 1- window glass 7-1/4 wave plate 4- polarization spectros
Prism 12- the second collimating optic lens 5- photoelectric receiving systems；Second tunnel is used to be collimated into picture with reference to reflecting surface 2, its light path mistake
Journey is as follows：Spot light 9- apertures 10- the first collimating optic lens 8- cross-graduation plate 11- polarization splitting prism 12-1/4 ripples
Piece 4- plane mirrors 3- refers to reflecting surface 2- plane mirror 3-1/4 wave plate 4- polarization splitting prisms the second collimating optics of 12-
Lens 5- photoelectric receiving systems.
Measurement process is as follows：Light source 9 sends light and forms spot light after aperture 10, by the first collimating optic lens 8
Collimate as collimated light beam, irradiate cross-graduation plate 11 afterwards, then after polarization splitting prism 12, collimated light beam is divided into two
Bunch polarised light, wherein be changed into polarization direction after a branch of transmission (corresponds to the e of birefringece crystal outgoing for horizontal linearly polarized light
Light).Another beam is to be reflected the linearly polarized light (the o light for corresponding to birefringece crystal outgoing) for becoming vertical.
Wherein, quarter wave plate 4 is passed through by the horizontal linear polarization light (i.e. e light) of the transmissive of polarization splitting prism 12, then by putting down
Backtracking after face speculum 3 and reference reflecting surface 2 reflect, again passes by quarter wave plate 4 and becomes vertical linearly polarized light afterwards
(the o light for corresponding to birefringece crystal outgoing), perpendicular linear polarization light (i.e. o light) are reflected into the second standard by polarization splitting prism 12
Directional light is imaged on the optical-electrical converter photosurface of optical receiver system (ginseng by straight optical lens 5, the second collimating optic lens 5
Examine picture)；Another way, the perpendicular linear polarization light reflected by polarization splitting prism 12 (i.e. o light), after quarter wave plate 4, pass through
Device window glass 7, returned afterwards by tested reflecting surface 1, again pass by window glass 7 and quarter wave plate 4, become e light, transmitted
By being imaged on after polarization splitting prism 12 by the second collimating optic lens 5 on photoelectric sensor photosurface (tested picture).
Before measurement, adjustment makes reference image be located at the center of photosurface with reference to the direction of reflecting surface 2.Measurement process
In, if the difference in brightness of tested picture and reference image is larger, adopted using the high gain mode of highly sensitive face array photoelectric sensor
The tested picture of collection, reference image is gathered using its low gain mode.Pass through tested alternate position spike and light between picture and reference image during measurement
Systematic parameter is learned, tested angle is calculated.
Claims (10)
- A kind of 1. self-reference collimated light path system based on light beam, it is characterised in that：Including light source (9), the first collimated light System, cross-graduation plate (11), polarization splitting prism (12), tested light path system, reference path system and receiving light path system System；The light collimation that first collimating optical system is used to send light source (9) is irradiation cross-graduation plate after collimated light beam (11)；The polarization splitting prism (12) is mutually hung down for the light beam after irradiation cross-graduation plate (11) to be divided into two beam polarization states Straight linearly polarized light, wherein a branch of linearly polarized light is inclined for horizontal line transmitted through polarization direction is changed into after polarization splitting prism (12) Shake light, and another bunch polarised light is changed into vertical linearly polarized light after polarization splitting prism (12) reflection；The reference path system is located in the emitting light path that polarization direction is horizontal linearly polarized light, the tested light path system Positioned at polarization direction in the emitting light path of vertical linearly polarized light；The reference path system includes quarter wave plate (4), the plane mirror (3) and with reference to reflecting surface set gradually along light path (2), polarization direction is that horizontal linearly polarized light reflects by quarter wave plate (4), plane mirror (3) by with reference to reflecting surface (2) Along backtracking to polarization splitting prism (12), then by polarization splitting prism (12) it is reflected into receiving light path system imaging；The tested light path system includes quarter wave plate (4), window glass (7) and the tested reflecting surface set gradually along light path (1), polarization direction is that vertical linearly polarized light passes through quarter wave plate (4), window glass (7) and tested reflecting surface (1), through tested Backtracking polarization splitting prism (12) after reflecting surface (1) reflection, then it is transmitted into reception light by polarization splitting prism (12) Road system imaging.
- A kind of 2. self-reference collimated light path system based on light beam according to claim 1, it is characterised in that：It is described Receiving light path system includes the second collimating optic lens (5) and electrooptical device (6) set gradually along light path, the photoelectricity Switching device (6) photosurface is located on the focal plane of the second collimating optic lens (5), and the photosurface of electrooptical device (6) is vertical In optical axis, photosurface is centrally located on optical axis.
- A kind of 3. self-reference collimated light path system based on light beam according to claim 2, it is characterised in that：Photoelectricity Switching device (6) uses highly sensitive face array photoelectric sensor.
- A kind of 4. self-reference collimated light path system based on light beam according to claim 3, it is characterised in that：It is described Highly sensitive face array photoelectric sensor is EMCCD or SCMOS.
- A kind of 5. self-reference collimated light path system based on light beam according to claim 4, it is characterised in that：Also wrap Aperture (10) is included, the aperture (10) is located between light source (9) and the first collimating optical system.
- A kind of 6. self-reference collimated light path system based on light beam according to claim 5, it is characterised in that：First Collimating optical system includes the first collimating optic lens (8), and light source (9) is located on the focal plane of the first collimating optic lens (8).
- 7. according to a kind of any described self-reference collimated light path systems based on light beam of claim 1-6, its feature exists In：Light source (9) is monochromatic source.
- 8. a kind of utilize a kind of any described self-reference collimated light path system-computed quilts based on light beam of claim 1-7 The method of measuring angle, it is characterised in that comprise the following steps：Step 1：Adjustment makes reference image be located at the center of receiving light path system photosurface with reference to the direction of reflecting surface；Step 2：Cross-graduation plate is irradiated after light source emergent light is collimated；Step 3：The light beam after irradiating cross-graduation plate is divided into the two orthogonal lines of beam polarization state using polarization splitting prism Polarised light, wherein a branch of linearly polarized light is reflected by polarization splitting prism, another bunch polarised light is transmitted by polarization splitting prism；Step 4：Adjustment is irradiated tested reflection after the polarization state of the linearly polarized light of polarization splitting prism reflection through window glass Face, it is collimated in light after being transmitted by polarization splitting prism by backtracking after tested reflective surface to polarization splitting prism Electric transducer is imaged；Adjustment is made its irradiation refer to reflecting surface after the polarization state of the linearly polarized light of polarization splitting prism transmission, by with reference to reflecting surface Backtracking is collimated to be imaged in photoelectric sensor after being reflected by polarization splitting prism to polarization splitting prism after reflection；Step 5：Using the position difference of two images obtained in image procossing and Image segmentation algorithm calculation procedure four, and Tested angle is calculated using the difference.
- 9. it is according to claim 8 it is a kind of utilize claim 1-7 it is any it is described it is a kind of based on light beam from joining The method for examining collimated light path system-computed tested angle, it is characterised in that：In measurement process, if tested picture and reference image is bright When degree difference is larger, tested picture is gathered using the high gain mode of highly sensitive face array photoelectric sensor, utilizes its low gain mode Gather reference image.
- A kind of 10. photoelectric auto-collimator, it is characterised in that：Including claim 1-7 it is any it is described based on light beam from With reference to collimated light path system.
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| CN110579339A (en) * | 2019-08-30 | 2019-12-17 | 歌尔股份有限公司 | polarization angle calibration method, device, equipment, optical system and storage medium |
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| CN112964635A (en) * | 2020-10-13 | 2021-06-15 | 重庆康佳光电技术研究院有限公司 | Chip detection method and system |
| CN113218338A (en) * | 2021-05-18 | 2021-08-06 | 安徽中科米微电子技术有限公司 | Multi-point testing device and method based on autocollimator |
| CN115290006A (en) * | 2022-08-08 | 2022-11-04 | 清华大学深圳国际研究生院 | System and method for alignment of optical axis and detection of surface curvature of reflection light path |
| CN116300055A (en) * | 2023-05-17 | 2023-06-23 | 北京极光星通科技有限公司 | Limiting system and limiting method thereof |
| CN118032302A (en) * | 2024-04-11 | 2024-05-14 | 深圳市壹倍科技有限公司 | Detection system for polarization beam splitter prism and corresponding method |
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