1292471 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種光學量測裝置及其量測方法，特 別是指一種應用於面外位移之光學量測裝置及其量測方法 【先前技術】 通常，欲量測-物體的變形量，都會先依照該物體所 屬&的環境或受外力之型式及大小，才決定所要使用的量測 設備及其方法。以！微米（μιη)至數個μπι之變形量的物體而 言，通常是使用探針式量測設備或是其他接觸式儀器來進 行量測，但此類之量測設備是直接接觸物體而會經常刮傷 物體的表面，難以適用於對表面精度或是表面要求較高的 產品。料有此需要之產品，則會改採攝影機等非接觸型 的設備拍攝產品的表面，並藉由分析其影像之幾何外形， 進而求出其變形量。 然而，以上量測設備都是針對產品靜態幾何形狀的量 f，並且是非全場（即為單點或線）區域’更何況對於其變形 量亦無法給予即時測量’特別是面外的位移或是變形的動 態量測。 如圖1所示，是顯示出圖曼-格林干涉儀（Twyman_Green Interfer〇meter)的原理示意圖，其經常作為非接觸型之表面 分析設備，主要包含有-光源u、一設置在該光源u前的 針孔板12、一與該針孔板12相間隔的第一準直透鏡、 一與該第一準直透鏡13相對的平面鏡14、一位於該第一準 1292471 直透鏡13與平面鏡14之間的分光透鏡15、位於該分光透 鏡15兩相反側的一第二準直透鏡ι6與一第三準直透鏡17 ，及一與該第三準直透鏡17相對且遠離該分光透鏡15的 觀察孔板18。該分光透鏡15可使光線部分透射與反射，並 具有與該平面鏡14之平面界定出45。夾角的分光面151。 操作時，是先將一物體2與該第二準直透鏡16相對， 啟動該光源11，透過該針孔板12，使該光源u的光線呈現 點光源。經由該第一準直透鏡13可將點光源調整為平行光 並照射至該分光透鏡15，一部分的平行光會被該分光面 151反射至該物體2的表面，並再被該物體2反射，依序經 過該第二準直透鏡16、分光透鏡15、第三準直透鏡17，及 觀察孔板18，而呈現一物面光。 另一部分的平行光，則會自該分光透鏡15透射至該平 面鏡14 ’並再經過該分光透鏡15、第三準直透鏡17,及觀 察孔板18，而呈為-參考光。利用該物面光與參考光重叠 而形成一干涉影像20。藉 ，再對攝取的干涉影像20 ’但仍為靜態之分析應用， 由目視觀察或用照相機拍攝下來 進行分析。雖然可達到全場觀測 而且需要有多個準直透鏡13、1292471 IX. Description of the Invention: [Technical Field] The present invention relates to an optical measuring device and a measuring method thereof, and more particularly to an optical measuring device applied to an out-of-plane displacement and a measuring method thereof Technology Generally, in order to measure the amount of deformation of an object, the measuring device and its method are determined according to the environment to which the object belongs and the type and size of the external force. Take! For objects with micrometers (μιη) to several μπι deformations, probe type measuring equipment or other contact instruments are usually used for measurement, but such measuring equipment is directly in contact with objects and often Scratching the surface of an object is difficult to apply to products with high surface accuracy or surface requirements. If the product is required, the surface of the product will be taken by a non-contact type such as a camera, and the geometric shape of the image will be analyzed to determine the amount of deformation. However, the above measuring devices are all aimed at the amount of static geometry of the product, f, and are non-full-field (ie single-point or line) regions', not to mention the instantaneous measurement of the amount of deformation, especially the out-of-plane displacement or It is the dynamic measurement of deformation. As shown in FIG. 1 , it is a schematic diagram showing the principle of a Twyman_Green Interfer〇meter, which is often used as a non-contact type surface analysis device, mainly including a light source u and a front light source u. a pinhole plate 12, a first collimating lens spaced apart from the pinhole plate 12, a plane mirror 14 opposite the first collimating lens 13, and a first collimator 1292247 straight lens 13 and a plane mirror 14 A splitting lens 15 , a second collimating lens ι 6 on opposite sides of the beam splitting lens 15 and a third collimating lens 17 , and an observation opposite to the third collimating lens 17 and away from the beam splitting lens 15 Orifice plate 18. The beam splitting lens 15 allows partial transmission and reflection of light and has a 45 defined by the plane of the plane mirror 14. The splitting surface 151 of the angle. In operation, an object 2 is first opposed to the second collimating lens 16, and the light source 11 is activated to pass through the pinhole plate 12, so that the light of the light source u appears as a point light source. The point light source can be adjusted to parallel light and irradiated to the beam splitting lens 15 via the first collimating lens 13, and a part of the parallel light is reflected by the light splitting surface 151 to the surface of the object 2, and is further reflected by the object 2. The second collimating lens 16, the beam splitting lens 15, the third collimating lens 17, and the viewing aperture plate 18 are sequentially passed through to present a surface light. Another portion of the parallel light is transmitted from the spectroscopic lens 15 to the plane mirror 14' and passes through the beam splitting lens 15, the third collimating lens 17, and the viewing aperture plate 18, and is rendered as a reference light. An interference image 20 is formed by overlapping the object light with the reference light. By borrowing, the interference image 20' taken but still static is applied, and it is visually observed or photographed by a camera for analysis. Although full field observation is possible and multiple collimating lenses are required,
、17等光學元件，忐太私A 成本較向且無法滿足動態之需要。 如圖2所示，_習左 ^知之光學量測裝置3，是為圖曼-格 林干涉儀之應用，該φ風曰 九予$測裝置3包含一可發射雷射光 線的雷射發射器31、一盥啻ιv t 興雷射發射器31相對的第一分光透 見32 $ +面鏡33、~第二平面鏡34、-第二分光透 兄35與°亥第—分光透鏡35相對的影像擷取器36，及 1292471 一與该影像擷取器36電連接的影像處理器37。該第一、二 分光透鏡32、35分別具有一第一、二分光面321、351。 該第一平面鏡33是用於將該第一分光透鏡32透射出 的光線反射至該第二平面鏡34，該第二平面鏡34則再將光 線再反射至該第二分光透鏡35，該第二分光透鏡35可使入 射的光線反射與透射至該影像擷取器36。 進行量測時，是先令該物體2位於該第一、二分光透 鏡32、35之間，使得來自於該第一分光透鏡32的光線， 經該物體2表面的反射而照射至第二分光透鏡％。接著， 控制該雷射發射器31發射光線，在光線通過該第一分光透 鏡32時，會被分成透射出該第一分光面321的第一光線 311與被$亥第一分光面321反射的第二光線312。 该第一光線311依序經由該第一平面鏡33、第二平面 鏡34與該第二分光透鏡35之第二分光面351的反射，而 可於該影像擷取器36上形成一參考光，該參考光的平坦度 是同時以該第-、二平面鏡33、34的平坦度和為基準。 該第二光線312則是經由該物體2的反射而透射出該 第二分光透鏡35，而於該影像擷取器36上形成一物面光。 該物面光是會呈現出該物體2的表面型態。該物面光與參 考光會於該影像擷取器36上重疊而形成一干涉影像2〇，經 過該影像處理器3 7以轉換計算其變形量。 然而，習知之光學量測裝置3在裝配上會佔用較大的 空間，體積大而不便於攜帶。而且其所使用光學元件數量 較多，如需要使用兩個分光透鏡32、35，以兩個平面鏡％ 1292471 、34。更重要的是，為了要確保待測物體的尺寸精度，最 好能在線上直接量測，而不是將待測物體搬移至該光學量 測裝置3。因此，對於體積較大的光學量測裝置3，可利用 空間變得較小，其安裝作業變得相當困難，並也大大地限 制可應用的場合。 【發明内容】 因此，本發明之目的，即在提供一種應用於面外位移 之光學量測裝置及其量測方法，可提供全場之面外位移量 測，並減少元件的使用數量，有效縮小體積，方便攜帶與 容易架設，可進一步直接作線上動態量測。 於是，本發明應用於面外位移之光學量測裝置，包含 一形成有一透光窗的殼體、一設置在該殼體上並與該透光 囪相對的擷取單元、一處理單元，以及依序間隔排列在該 殼體内的一光線發射器、一擴散透鏡、一分光透鏡與一平 面鏡，該擷取單元並具有一可擷取影像的影像擷取器，及 一可使光線聚焦成像於該影像擷取器的光學鏡頭，該處理 單元是與該擷取單元之影像擷取器電連接，用以處理影像 ，該光線發射器可發射單一波長的光線，該擴散透鏡可使 該光線發射器之光線擴散並照射至該分光透鏡上，該分光 透鏡是介於該透光窗與擷取單元之間，並具有一與該平面 鏡之平面界定出一銳角的分光面，使得入射至該分光透鏡 的光線會有一部分被該分光面反射，另一部分的光線會透 射出該分光透鏡，該平面鏡是用於反射光線。 曰 本發明應用於面外位移之光學量測方法，包含一準備 8 1292471 步驟、一安裝步驟、一擷取步驟，以及一計算步驟。 該準備步驟是準備一光學量測裝置，該光學量測裝置 具有一形成有一透光窗的殼體、一設置在該殼體上並與該 透光窗相對的擷取單元、一處理單元，以及依序間隔排列 在該殼體内的一光線發射器、一擴散透鏡、一分光透鏡與 一平面鏡，該物體是與該殼體之透光窗相對，該擷取單元 具有一可擷取影像的影像擷取器，及一可使光線聚焦成像 於該影像擷取器的光學鏡頭，該處理單元是與該影像擷取 器電連接並用以處理影像，該光線發射器可發射單一波長 的光線’該擴散透鏡可使該光線發射器之光線擴散並照射 至該分光透鏡上，該分光透鏡是介於該透光窗與擷取單元 之間，並具有一可與該平面鏡之平面界定出一銳角的分光 面，該平面鏡是用於反射光線。 該安裝步驟是安裝該光學量測裝置，使該殼體之透光 窗與該物體的表面相對應。 該擷取步驟是當啟動該光線發射器，光線經過該擴散 透鏡的擴散並入射至該分光透鏡時，會分為第一光線與第 一光線，該第一光線是自該分光面反射至該物體表面，經 該物體表面的反射，並再透射出該分光透鏡，而照射至該 光學鏡頭’並於该影像棟取上形成一物面光，該第二光 線則是自該分光透鏡透射至該平面鏡，經該平面鏡的反射 ’並再被該分光面反射而照射至該光學鏡頭，並於該影像 擷取器上形成一參考光，該物面光與參考光重疊並形成一 干涉影像，藉由該影像擷取器擷取該干涉影像，並傳送至 1292471 該處理單元。 該計算步驟是利用該處理單元計算該干涉影像所形成 的干涉條紋數，以求出該物體之面外位移。 本發明之功效在於應用擴散透鏡使光線擴散，並配合 該光學鏡頭的使用’使得光線可聚焦成像於該影像擷取器 上’以提供全場之面外位移量測，並且可減少元件的使用 數里’縮小整體的體積’不但方便攜帶也容易架設，更可 進一步直接作線上動態量測。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之一個較佳實施例的詳細說明中，將可 清楚的呈現。 如圖3所示，本發明應用於面外位移之光學量測裝置 的較佳實施例，包含一殼體5、一擷取單元6、一處理單元 7 ’以及依序間隔地排列在該殼體5内的一光線發射器82、 一擴散透鏡84、一分光透鏡86與一平面鏡88。該殼體5 上形成有一透光窗51。 該操取單元6是設置在該殼體5上並與該殼體5之透 光窗51相對。該擷取單元6具有一可擷取影像的影像擷取 器61 ’及一可使光線聚焦成像於該影像擷取器61的光學鏡 頭62。在該較佳實施例中，該影像擷取器61是電荷耦合裝 置（CCD) ’設置有感光元件，用以感應影像並將之轉換為訊 號。該光學鏡頭62是為數片不同的光學鏡片間隔排列設置 ’可使形成於該影像擷取器61的影像清晰明顯，以減少色 10 1292471 暈、色偏的產生，以便於後續處理。此部分為熟習該項技 藝人士所習知，在此不予詳述。在本實施例中，該光學鏡 頭62是固定在該殼體5上，但是也可以將整個擷取單元6 容設於該殼體5内，不應以此為限。 該處理單元7是與該擷取單元6之影像擷取器61電連 接，用以處理該影像擷取器61所擷取之影像。在該較佳實 施例中，該處理單元7具有一與該影像擷取器61電連接的 主機71，及一可顯示該影像操取器61所擷取之影像的顯示 器72。實際操作上，是該主機71内設置影像處理卡，並搭 配相關的影像處理軟體，以進行影像的處理，當然也可以 是利用專業的影像處理設備，不應以此侷限本發明之申請 專利範圍。 該光線發射器82是為可發射單一波長的光線。在該較 佳實施例中，該光線發射器82是發射雷射光，例如是以氦一 氖（He-Ne)為振盪物質的氣體雷射。此類型雷射光的波長約 I 為 0·6μηι。 該擴散透鏡84可使該光線發射器82的光線擴散並照 射至该分光透鏡86上。該分光透鏡86是介於該殼體5之 透光窗51與擷取單元6之光學鏡頭62間，並具有一分光 面861 ’該分光面861與該平面鏡88之平面可界定出一銳 角Θ，使得入射至該分光透鏡86的光線會有一部分被該分 光面861反射，而另一部分的光線則會透射出該分光透鏡 86。該平面鏡88是用於反射光線。 在w亥車父佳實施例中，該分光面861之銳角0是呈45。， 11 1292471 當然，也可以是其他的銳角角度，而該擷取單元6與該透 光窗51在該殼體5上的位置也要隨之改變，即須符合自該 平面鏡88反射至該分光透鏡86的光線，再被該分光面86ι 反射時，能進入該擷取單元6的限制。 如圖4所示，並配合圖3，本發明應用於面外位移之光 學量測方法，適用於量測一物體4的表面，在該較佳實施 例中’是以量測電子元件於受熱過程中，其表面的熱翹曲 量及其變化為例子，也可以應用於其他型式的外力而造成 面外位移。 該應用於面外位移之光學量測方法包含一準備步驟91 、一安裝步驟92、一擷取步驟93，及一計算步驟94。 該準備步驟91是準備一光學量測裝置，關於該光學量 測裝置之相關構成組件與其相對位置，是與前文說明相同 ，在此不再贅述。 該安裝步驟92是安裝該光學量測裝置，使該殼體5之 透光窗51與該物體4的表面相對應，主要是讓自該透光窗 51照射出至該物體4的光線，可以再被該物體4反射回該 透光窗51。 該擷取步驟93是當啟動該光線發射器82，光線經過該 擴散透鏡84的擴散並入射至該分光透鏡86時，會分為第 一光線821與第二光線822。該第一光線821是自該分光面 861反射至該物體4表面，經該物體4表面的反射，並再透 射出該分光透鏡86，而會照射至該光學鏡頭62，並於該影 像操取器61上形成一物面光，以反映出該物體4表面之狀 12 1292471 況。 而該第二光線822則是自該分光透鏡86透射至該平面 鏡88，經该平面鏡88的反射，並再被該分光面g61反射而 照射至該光學鏡頭62，並於該影像擷取器61上形成一參考 光。該物面光與參考光重疊並形成一干涉影像4〇，藉由該 影像擷取器61擷取該干涉影像40，並將之數位化，再傳送 至该處理單元7之主機71進行影像處理，而於該顯示器72 上呈現結果。 該計算步驟94是利用該處理單元7進行影像處理，例 如影像校正、影像二值化，或是去除雜訊……等，使干涉 條紋清晰可辨，以方便計算該干涉影像4〇所形成的干涉條 紋數，求出該物體4之面外位移。 在該較佳實施例中，是使用波長為〇.6μιη的雷射光， ϊ測精度可達〇.15μιη (即1/4波長），已可滿足絕大多數的 量測需求。處理上，還可以導入相位移法（phase Shifting)， 可使量測精度提昇1〇倍。關於如何應用相位移法，為熟習 該項技藝人士所習知，在此不予詳述。 在该較佳實施例中，更可在該擷取步驟93，先取得該 物體4發生面外位移前的影像，以作為基準影像，再將發 生面外位移後，每隔一段預定時間進行該干涉影像4〇的擷 取作業，並再與該基準影像相比對，或者是將前、後兩干 涉影像40並加以比對，經過該計算步驟94的處理與計算 ，可進一步獲得面外位移的變化狀況，並以即時動態方式 顯示，達到線上量測。 13 1292471, 17 and other optical components, 忐 too private A cost is relatively high and can not meet the needs of dynamic. As shown in FIG. 2, the left optical optical measuring device 3 is used for the application of the Tuman-Green interferometer, and the φ wind 曰 予 、 、 、 、 、 includes a laser emitter capable of emitting laser light. 31. The first split light reflection of the ιV t Xing laser emitter 31 is opposite to the 32 $ + mirror 33, the second plane mirror 34, the second split light brother 35 and the ° Haidi-splitting lens 35. The image capture device 36, and the 1292247, an image processor 37 electrically connected to the image capture device 36. The first and second dichroic lenses 32, 35 have a first and second dichroic surfaces 321, 351, respectively. The first plane mirror 33 is configured to reflect the light transmitted by the first beam splitting lens 32 to the second plane mirror 34, and the second plane mirror 34 then reflects the light to the second beam splitting lens 35, the second beam splitting light. Lens 35 reflects and transmits incident light to the image picker 36. When the measurement is performed, the object 2 is first placed between the first and second splitting lenses 32, 35, so that the light from the first beam splitting lens 32 is irradiated to the second splitting light through the reflection of the surface of the object 2. lens%. Then, the laser emitter 31 is controlled to emit light, and when the light passes through the first beam splitting lens 32, it is divided into a first light ray 311 that is transmitted through the first light splitting surface 321 and is reflected by the first light splitting surface 321 Second ray 312. The first light ray 311 is sequentially reflected by the first planar mirror 33, the second planar mirror 34, and the second splitting surface 351 of the second splitting lens 35, and a reference light is formed on the image capturing device 36. The flatness of the reference light is based on the flatness of the first and second plane mirrors 33, 34 at the same time. The second light ray 312 is transmitted through the object 2 to be transmitted through the second beam splitting lens 35, and a surface light is formed on the image picker 36. The object surface light will exhibit the surface type of the object 2. The object surface light and the reference light are superimposed on the image extractor 36 to form an interference image 2, and the image processor 37 is converted to calculate the amount of deformation. However, the conventional optical measuring device 3 occupies a large space in assembly, and is bulky and difficult to carry. Moreover, the number of optical components used is large, as is required to use two beam splitting lenses 32, 35, with two plane mirrors % 1292471, 34. More importantly, in order to ensure the dimensional accuracy of the object to be tested, it is preferable to measure directly on the line instead of moving the object to be measured to the optical measuring device 3. Therefore, for the optical measuring device 3 having a large volume, the available space becomes small, the mounting work becomes quite difficult, and the applicable occasion is greatly restricted. SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide an optical measuring device for measuring an out-of-plane displacement and a measuring method thereof, which can provide an off-plane displacement measurement of a whole field and reduce the number of components used, and is effective. Reduced size, easy to carry and easy to set up, can be directly used for online dynamic measurement. Thus, the present invention is applied to an optical measurement device for out-of-plane displacement, comprising a housing formed with a light transmission window, a capturing unit disposed on the housing opposite to the light transmissive housing, a processing unit, and a light emitter, a diffusing lens, a beam splitting lens and a plane mirror arranged in the housing at intervals, the capturing unit has an image capturing device capable of capturing images, and a focusing image capable of focusing light In the optical lens of the image capturing device, the processing unit is electrically connected to the image capturing device of the capturing unit for processing an image, and the light emitting device can emit light of a single wavelength, and the diffusing lens can make the light The light of the emitter is diffused and irradiated onto the beam splitting lens, and the beam splitting lens is interposed between the light transmitting window and the capturing unit, and has a light splitting surface defining an acute angle with a plane of the plane mirror, so that the light is incident on the light splitting surface A part of the light of the spectroscopic lens is reflected by the spectroscopic surface, and another part of the light is transmitted through the spectroscopic lens, and the plane mirror is for reflecting light.曰 The present invention is applied to an optical measurement method for out-of-plane displacement, comprising a preparation 8 1292471 step, an installation step, a extraction step, and a calculation step. The preparation step is to prepare an optical measuring device, the optical measuring device has a housing formed with a light transmission window, a capturing unit disposed on the housing and opposite to the light transmission window, and a processing unit. And a light emitter, a diffusion lens, a beam splitting lens and a plane mirror arranged in the housing at intervals, the object is opposite to the light transmission window of the housing, and the capturing unit has a captureable image An image capture device and an optical lens for focusing light onto the image capture device, the processing unit being electrically connected to the image capture device for processing an image, the light emitter emitting a single wavelength of light The diffusing lens diffuses and illuminates the light of the light emitter onto the beam splitter lens, the splitting lens being interposed between the light transmitting window and the capturing unit, and having a plane defined by the plane mirror An angled surface of an acute angle that is used to reflect light. The mounting step is to mount the optical measuring device such that the light transmissive window of the housing corresponds to the surface of the object. The step of extracting is to activate the light emitter, and the light is diffused by the diffusing lens and incident on the beam splitting lens, and is divided into a first light and a first light, and the first light is reflected from the light splitting surface to the The surface of the object is reflected by the surface of the object, and then transmitted through the spectroscopic lens, and irradiated to the optical lens 'and forms an object surface light on the image frame, and the second light is transmitted from the spectroscopic lens to The plane mirror is reflected by the plane mirror and is reflected by the spectroscopic surface to be irradiated to the optical lens, and a reference light is formed on the image extractor, and the object surface light overlaps with the reference light to form an interference image. The interference image is captured by the image capture device and transmitted to the processing unit 1292247. The calculating step is to calculate the number of interference fringes formed by the interference image by using the processing unit to obtain an out-of-plane displacement of the object. The effect of the invention is to use a diffusing lens to diffuse the light, and cooperate with the use of the optical lens to enable the light to be focused on the image picker to provide full-field out-of-plane displacement measurement and reduce component usage. In a few miles, 'reducing the overall volume' is not only easy to carry but also easy to set up, and can be further directly used for online dynamic measurement. The above and other technical contents, features, and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments. As shown in FIG. 3, the preferred embodiment of the present invention is applied to an optical measuring device for out-of-plane displacement, comprising a housing 5, a capturing unit 6, a processing unit 7', and sequentially arranged in the housing. A light emitter 82, a diffusing lens 84, a beam splitting lens 86 and a plane mirror 88 in the body 5. A light transmission window 51 is formed on the casing 5. The operation unit 6 is disposed on the housing 5 and opposed to the light transmission window 51 of the housing 5. The capturing unit 6 has an image capturing device 61' for capturing images and an optical lens 62 for focusing light onto the image capturing device 61. In the preferred embodiment, the image capture device 61 is a charge coupled device (CCD)' provided with a photosensitive element for sensing the image and converting it into a signal. The optical lens 62 is arranged to arrange a plurality of different optical lenses to make the image formed on the image picker 61 clear and clear, so as to reduce the generation of color and color shift of the color 10 1292471 for subsequent processing. This section is well known to those skilled in the art and will not be described in detail herein. In this embodiment, the optical lens unit 62 is fixed to the housing 5, but the entire capturing unit 6 may be accommodated in the housing 5, and should not be limited thereto. The processing unit 7 is electrically connected to the image capturing device 61 of the capturing unit 6 for processing the image captured by the image capturing device 61. In the preferred embodiment, the processing unit 7 has a host 71 electrically coupled to the image capture unit 61, and a display 72 for displaying images captured by the image capture unit 61. In actual operation, the image processing card is set in the host 71, and the related image processing software is used for image processing, and of course, a professional image processing device may be used, and the patent application scope of the present invention should not be limited thereto. . The light emitter 82 is light that emits a single wavelength. In the preferred embodiment, the light emitter 82 is a laser beam that emits laser light, such as a helium-helium (He-Ne) oscillating material. The wavelength of this type of laser light is about I·6μηι. The diffusing lens 84 diffuses and illuminates the light from the light emitter 82 onto the beam splitting lens 86. The beam splitting lens 86 is interposed between the light transmitting window 51 of the casing 5 and the optical lens 62 of the capturing unit 6, and has a light splitting surface 861'. The light splitting surface 861 and the plane of the plane mirror 88 can define an acute angle. The light incident on the spectroscopic lens 86 is partially reflected by the spectroscopic surface 861, and the other portion of the light is transmitted through the spectroscopic lens 86. The plane mirror 88 is for reflecting light. In the embodiment of the vehicle, the acute angle 0 of the beam splitting surface 861 is 45. 11 1292471 Of course, other acute angles may be used, and the position of the capturing unit 6 and the light transmission window 51 on the housing 5 also changes, that is, the reflection from the plane mirror 88 to the beam splitting. When the light of the lens 86 is reflected by the light splitting surface 86, it can enter the limitation of the capturing unit 6. As shown in FIG. 4, and in conjunction with FIG. 3, the present invention is applied to an optical measurement method for out-of-plane displacement, which is suitable for measuring the surface of an object 4. In the preferred embodiment, the electronic component is measured for heating. In the process, the amount of thermal warpage on the surface and its variation are examples, and can also be applied to other types of external forces to cause out-of-plane displacement. The optical metrology method for out-of-plane displacement includes a preparation step 91, a mounting step 92, a capture step 93, and a calculation step 94. The preparation step 91 is to prepare an optical measuring device. The relative components of the optical measuring device and the relative positions thereof are the same as those described above, and are not described herein again. The mounting step 92 is to install the optical measuring device, so that the light transmission window 51 of the housing 5 corresponds to the surface of the object 4, mainly for illuminating the light from the light transmission window 51 to the object 4. It is reflected by the object 4 back to the light transmission window 51. The capturing step 93 is performed when the light emitter 82 is activated and the light is diffused by the diffusing lens 84 and incident on the beam splitting lens 86, and is divided into a first light 821 and a second light 822. The first light ray 821 is reflected from the light splitting surface 861 to the surface of the object 4, reflected by the surface of the object 4, and then transmitted through the beam splitting lens 86, and is irradiated to the optical lens 62, and is processed in the image. A surface light is formed on the object 61 to reflect the shape of the surface of the object 4 12 1292471. The second light ray 822 is transmitted from the spectroscopic lens 86 to the plane mirror 88, reflected by the plane mirror 88, and reflected by the spectroscopic surface g61 to be irradiated to the optical lens 62, and the image picker 61 is used. A reference light is formed on the surface. The object surface light overlaps with the reference light to form an interference image 4, and the image capturing device 40 captures the interference image 40, digitizes it, and transmits it to the host 71 of the processing unit 7 for image processing. The result is presented on the display 72. The calculating step 94 is performed by the processing unit 7 for image processing, such as image correction, image binarization, or noise removal, etc., so that the interference fringes are clearly distinguishable, so as to facilitate calculation of the interference image. The number of interference fringes is obtained, and the out-of-plane displacement of the object 4 is obtained. In the preferred embodiment, laser light having a wavelength of 〇.6 μιη is used, and the measurement accuracy is up to 1515 μιη (i.e., 1/4 wavelength), which satisfies most measurement requirements. In terms of processing, phase shifting can also be introduced to increase the measurement accuracy by a factor of 1. How to apply the phase shift method is well known to those skilled in the art and will not be described in detail herein. In the preferred embodiment, the image of the object 4 before the out-of-plane displacement is taken as the reference image, and then the off-plane displacement occurs, and the predetermined time is performed. The interference operation of the interference image 4〇 is compared with the reference image, or the front and back interference images 40 are compared and compared, and the processing and calculation of the calculation step 94 can further obtain the out-of-plane displacement. The status of change, and display in an instant dynamic manner, to achieve online measurement. 13 1292471
如圖5所示，是顯示出封裝後電子元件（如1C)在65°C 幵溫至66°C之熱翹曲量的實際干涉影像。由於熱變形對此 類型的產品性能有明顯的影響，經由本發明之光學量測裝 置測得其變形’可確實求得於受熱下之位移狀況。 回到圖3、4所示，由上述說明可知本發明在實際操作 上有下列幾項優點： 一、可得全場之面外位移：利用該擴散透鏡84可使光As shown in FIG. 5, it is an actual interference image showing the amount of thermal warpage of the packaged electronic component (such as 1C) at 65 ° C to 66 ° C. Since the thermal deformation has a significant influence on the performance of this type of product, the deformation measured by the optical measuring device of the present invention can be surely obtained from the displacement under heat. Referring back to Figures 3 and 4, it can be seen from the above description that the present invention has the following advantages in practical operation: 1. Out-of-plane displacement of the entire field is available: light can be made by the diffusion lens 84.
線擴散，並配合該擷取單元6之光學鏡頭62的使用，使得 光線可全面照射於該物體4的表面，並聚焦成像於該影像 擷取器61上，以獲取全場之面外位移。而且也可以更換用 不同倍率的光學鏡頭62，以適用於各種幾何外型與尺寸的 物體4。 乂二、體積縮小，便於攜帶且容易架設：由於僅需一組 刀光透鏡86與平面鏡88，而且不需要設置準直透鏡，能有 效減少元件的使用數量，使得整體的體積可以縮小，不但 方便攜帶，而且容易架設，即使在可利用空間較小的環境 下，亦為容易安裝，可擴大其應用的場合。 -可進行線上即時動態量測：經由該影像擷取器Μ 取得該物體4發生面外位移前與發生位移後的干涉影像4〇 進行比對H將前、後兩干涉影像4()進行比對，經過 該處理單元7的影像處理與料，除了謂取㈣體4的 面外位移，還可進-步直接作線上即時動態量測，，方便操 可供測試人員攜 四、可提高作業效率：由於體積小， 14 1292471 π至現場進行線上量測，無須將待測產品從原有設備上拆 卸下來，可節省拆裝時間，保持產品的完整性，大幅提昇 前置作業的效率，同時，也對於量測之準確性、便利性有 很大的幫助。 五、非接觸式的量測設備，不會傷及表面：由於是利 用光學方法，只要該物體4的表面是可反射光線，均可使 用，為非接觸式的量測設備，不會傷及表面。 、篁測精度可達次微米以下：由於是計算光斑的干 涉條紋，其精度可達光線波長的1/4，如再應用相位移法， 則可使S測精度可達到次微米以下之尺度。 歸納上述，本發明應用於面外位移之光學量測裝置及 其里測方法，是利用擴散透鏡84使光線擴散，並配合該光 學鏡頭62的使用，使得光線可聚焦成像於該影像擷取器61 ’除了可提供全場之面外位移量測，還能有效減少光學元 件的使用數量，以縮小整體的體積，方便攜帶並容易架設 丨’還可進一步直接進行線上即時動態量測，故確實能達到 本發明之目的。 惟以上所述者，僅為本發明之較佳實施例而已，當不 能以此限定本發明實施之範圍，即大凡依本發明申請專利 範圍及發明說明内容所作之簡單的等效變化與修飾，皆仍 屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是一曼格林干涉儀的原理示意圖； 圖2是一習知之光學量測裝置的示意圖； 15 1292471 圖3是一示意圖，說明本發明應用於面外位移之光學 量測裝置的較佳實施例； 圖4是一流程圖，說明本發明應用於面外位移之光學 量測方法的較佳實施例；及 圖5是一實際擷取之干涉影像圖。 1292471 【主要元件符號說明】 4…… …·物體 821… —第一光線 40.•… •…干涉影像 822… •…第二光線 C ...... Ο Λ..... ____撼私；悉接 3 〇4 51•…· •…透光窗 86·.··. —分光透鏡 6…… .....擷取單元 861… •…分光面 61…" •…影像擷取器 88····· —平面鏡 62••… •…光學鏡頭 91 ••… •…準備步驟 7…… •…處理單元 92••… •…安裝步驟 71…·. •…主機 93···· •…擷取步驟 72•…. .....顯示器 94••… …·計算步驟 82···♦. •…光線發射器 Θ…… •…銳角The line is diffused and cooperates with the use of the optical lens 62 of the capture unit 6 so that the light can be totally illuminated onto the surface of the object 4 and focused onto the image picker 61 to obtain an out-of-plane displacement of the full field. It is also possible to replace the optical lens 62 with different magnifications for the object 4 of various geometric shapes and sizes.体积 Second, the volume is reduced, easy to carry and easy to erect: since only one set of knife lens 86 and plane mirror 88 is needed, and there is no need to provide a collimating lens, the number of components can be effectively reduced, so that the overall volume can be reduced, which is convenient. It is easy to carry and easy to install, even in an environment where space is small, and it is easy to install and expand its application. - On-line real-time dynamic measurement can be performed: the image capturing device 取得 obtains the interference image of the object 4 before the out-of-plane displacement is performed, and compares the front and rear interference images 4 () Yes, after the image processing and material processing of the processing unit 7, in addition to the out-of-plane displacement of the (four) body 4, the online dynamic measurement can be directly performed on the line, which is convenient for the tester to carry the fourth, and can improve the operation. Efficiency: Due to its small size, 14 1292471 π to on-site measurement, it is not necessary to remove the product to be tested from the original equipment, which can save disassembly time, maintain product integrity, and greatly improve the efficiency of front-loading operation. It is also very helpful for the accuracy and convenience of measurement. 5. Non-contact measuring equipment will not damage the surface: since it is optical, as long as the surface of the object 4 is reflective, it can be used. It is a non-contact measuring device and will not hurt. surface. The accuracy of the measurement can be less than sub-micron: because it is the interference fringe of the calculation spot, its precision can reach 1/4 of the wavelength of the light. If the phase shift method is applied, the accuracy of the S measurement can reach the sub-micron level. In summary, the present invention is applied to an optical measurement device for out-of-plane displacement and a method for measuring the same, which utilizes a diffusion lens 84 to diffuse light, and cooperates with the use of the optical lens 62 so that light can be focused and imaged on the image capture device. 61 'In addition to providing full-field out-of-plane displacement measurement, it can also effectively reduce the number of optical components used, to reduce the overall volume, easy to carry and easy to set up 还可' and further direct online real-time dynamic measurement, so it is true The object of the invention can be achieved. The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram of a Manninger interferometer; FIG. 2 is a schematic diagram of a conventional optical measuring device; 15 1292471 FIG. 3 is a schematic view showing the optical quantity of the present invention applied to out-of-plane displacement DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT FIG. 4 is a flow chart illustrating a preferred embodiment of the optical metrology method for applying the out-of-plane displacement of the present invention; and FIG. 5 is an actual captured interference image. 1292471 [Description of main component symbols] 4... ...object 821... - first ray 40.•... •...interference image 822... •...second ray C ...... Ο Λ..... ____ Smuggling; access to 3 〇 4 51•...· •...transparent window 86····.—splitting lens 6............take unit 861... •...split surface 61..." Picker 88·····—Flat mirror 62••... •...optical lens 91 ••... •...preparation step 7... •...processing unit 92••... •...installation step 71...·.... host 93 ···· •...Capturing step 72•.... ..... Display 94••... ...· Calculation step 82···♦. •...Light emitter Θ... •... acute angle
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