CN105973170A - Polarization beam combining auto-collimation optical path system based on birefringence element - Google Patents
Polarization beam combining auto-collimation optical path system based on birefringence element Download PDFInfo
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- CN105973170A CN105973170A CN201610429058.7A CN201610429058A CN105973170A CN 105973170 A CN105973170 A CN 105973170A CN 201610429058 A CN201610429058 A CN 201610429058A CN 105973170 A CN105973170 A CN 105973170A
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- birefringence element
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention belongs to the field of precise photoelectric measurement technology, and particularly relates to a polarization beam combining auto-collimation optical path system based on a birefringence element. Light which is generated by a light source in the polarization beam combining auto-collimation optical path system based on the birefringence element successively penetrates through a pinhole diaphragm, a second colliminating lens, a second cross-line graticule and a polarizing beam splitting prism, and then enters a birefringence crystal, thereby generating refraction and emergence. The emergent light is transmitted to a measured object through a one-quarter waveplate and is then reflected. The reflected light successively penetrates through the one-quarter waveplate, the birefringence crystal, a first cross-line graticule and a first colliminating lens and then enters a light receiving system. The polarization beam combining auto-collimination optical path system can realize isolation between a detected optical path and the optical path of the light source, weakening or even eliminating a noise signal which is generated by stray light in a photoelectric receiving system and improving signal-to-noise ratio and measurement precision.
Description
Technical field
Patent of the present invention belongs to accurate technical field of electro-optical measurement, particularly relates to a kind of polarization based on birefringence element
Close bundle auto-collimation light path system.
Background technology
Photoelectric auto-collimator is a kind of instrument utilizing optical autocollimating principle to measure minute angle change, can be divided into
Auto-collimation light path system, photoelectric receiving system and signal processing system three parts.Wherein, auto-collimation light path system
System is used for sending and receiving collimated light, and photoelectric receiving system is for realizing the conversion of photosignal, signal processing system
System has been used for the pretreatment of signal, target location and the calculating of deflection angle.
The General Principle of optical autocollimating angle measurement is: the light that single color point light source sends is flat after collimating optical system
Row penetrates in primary optical axis, and emergent light returns optical system the light at photoelectric receiving system after testee reflects
Quick upper imaging.If the reflecting surface of testee is perpendicular to the primary optical axis of collimating optical system, Ze Guanganyuan returns on road
Return, now return light imaging dot center on the photosurface of photoelectric receiving system and be demarcated as system zero-bit；When
When the reflecting surface normal direction of testee and the primary optical axis of optical system have an angle, then reflection light image dot center
There is certain deviation amount with system zero-bit, can be calculated by this side-play amount according to the ultimate principle of geometric optics
Go out the angle between the reflecting surface normal direction of testee and optical system primary optical axis.
Owing to, in Auto-collimation angular measurement light path, the collimated light of outgoing is general by backtracking after testee reflects
Optical system imaging on the photosurface of photoelectric receiving system, emitting light path (i.e. light source optical path) and return light
Road (i.e. detecting light path) is substantially overlapping, thus can make the veiling glare produced on light source itself and light source optical path
Photoelectric receiving system will be entered, produce bigger back end noise, thus reduce signal to noise ratio, even can time serious
Detectable signal is submerged in noise signal, it is impossible to measure.
Summary of the invention
The technical problem to be solved is to provide a kind of polarization coupling auto-collimation based on birefringence element
Light path system, it is achieved detection light path and the isolation of light source optical path, weakens and even eliminates the veiling glare in light source optical path
The noise signal produced in photoelectric receiving system, improves signal to noise ratio and certainty of measurement.
For solving above-mentioned technical problem, the technical solution adopted in the present invention is: provide a kind of based on birefringence unit
The polarization coupling auto-collimation light path system of part, it is characterized in that described a kind of based on birefringence element inclined
Shake close bundle auto-collimation light path system in light source produce light sequentially pass through aperture, the second collimating lens, second
Cross-graduation plate and polarization splitting prism, enter birefringece crystal and produce outgoing after refraction, arrive through quarter wave plate
Testee back reflection, then sequentially pass through described quarter wave plate, birefringece crystal, the first cross-graduation plate,
Optical receiver system is entered after collimating lens.
Described birefringece crystal is Iceland spar or Yttrium Orthovanadate.
Described optical receiver system is charge coupled device CCD or Position-Sensitive Detector PSD.
Described light source is monochromater.
Described monochromater is the laser that semiconductor laser produces.
The invention has the beneficial effects as follows: the isolation detecting light path with light source optical path can be realized, weaken and even eliminate
The noise signal that veiling glare in light source optical path produces in photoelectric receiving system, improves signal to noise ratio and measures essence
Degree.
Accompanying drawing explanation
Fig. 1 is light path schematic diagram of the present invention；
In figure, 1-testee, 2-1/4 wave plate, 3-birefringece crystal, 4-the first cross-graduation plate, 5-
Collimating lens, 6-optical receiver system, 7-polarization splitting prism, 8-the second cross-graduation plate, 9-second collimates
Lens, 10-aperture, 11-light source.
Detailed description of the invention
Illustrate the present invention is described in detail below in conjunction with specific embodiments and the drawings.
A kind of high accuracy of photoelectric auto-collimator, high s/n ratio is can be used for as it is shown in figure 1, the invention provides
Auto-collimation light path system.This auto-collimation light path system is included in detection light path and sets gradually testee 1,1/4
Wave plate 2, birefringece crystal the 3, first cross-graduation plate the 4, first collimating lens 5 and optical receiver system 6, with
And polarization splitting prism the 7, second collimating lens the 8, the second cross-graduation plate 9, little arranged on light source optical path
Hole diaphragm 10 and light source 11.
Above-mentioned optical receiver system 6 is positioned in detection light path, and is located on the focal plane of the first collimating lens 4.
Above-mentioned light source 11 is positioned in light source optical path through the point source of aperture 10 outgoing, and is located at the second collimation
On the focal plane of lens 8.
Above-mentioned birefringece crystal 3 is the crystal such as Iceland spar (CaCO3), Yttrium Orthovanadate (YVO4).
Above-mentioned optical receiver system 6 is charge coupled device CCD or Position-Sensitive Detector PSD.
The laser that above-mentioned light source 11 produces for semiconductor laser.
During measurement, light source 11 sends light and forms point source after aperture 10, by the second collimating lens 9
Collimation, for irradiating the second cross-graduation plate 8 after collimated light beam, then becomes inclined after polarization splitting prism 7 transmission
Shake the line polarized light (corresponding to the e light of birefringece crystal outgoing) that direction is level；Horizontal linear polarization light is (i.e.
E light) incide on birefringece crystal 3 after reflect, the horizontal linear polarization light (i.e. e light) of outgoing after refraction
After quarter wave plate 2, become elliptically polarized light or circularly polarized light is irradiated on testee 1；It is irradiated to tested
Elliptically polarized light or circularly polarized light on object 1 again pass by quarter wave plate 2 after testee reflects, and become
Polarization direction is vertical line polarized light (corresponding to the o light of birefringece crystal outgoing), and perpendicular linear polarization light is (i.e.
O light) incide directly transmission after on birefringece crystal 3, accurate by first after being irradiated to the first cross-graduation plate 4
Straight lens 5 converge on the photosurface of optical receiver system 6；Two ten received by measurement optical receiver system
Side-play amount between the picture of word graticle, can calculate the deflection angle of testee.
Claims (5)
1. a polarization coupling auto-collimation light path system based on birefringence element, it is characterised in that: described one
Plant the light that in polarization coupling auto-collimation light path system based on birefringence element, light source produces and sequentially pass through aperture light
Door screen, the second collimating lens, the second cross-graduation plate and polarization splitting prism, enter birefringece crystal and produce refraction
Rear outgoing, through quarter wave plate to testee back reflection, then sequentially passes through described quarter wave plate, birefringence crystalline substance
Optical receiver system is entered after body, the first cross-graduation plate, the first collimating lens.
A kind of polarization coupling of based on birefringence element the most according to claim 1 auto-collimation light path system
System, it is characterised in that: described birefringece crystal is Iceland spar or Yttrium Orthovanadate.
A kind of polarization coupling of based on birefringence element the most according to claim 1 auto-collimation light path system
System, it is characterised in that: described optical receiver system is charge coupled device CCD or Position-Sensitive Detector PSD.
A kind of polarization coupling of based on birefringence element the most according to claim 1 auto-collimation light path system
System, it is characterised in that: described light source is monochromater.
A kind of polarization coupling of based on birefringence element the most according to claim 4 auto-collimation light path system
System, it is characterised in that: described monochromater is the laser that semiconductor laser produces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610429058.7A CN105973170A (en) | 2016-06-16 | 2016-06-16 | Polarization beam combining auto-collimation optical path system based on birefringence element |
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| CN201610429058.7A CN105973170A (en) | 2016-06-16 | 2016-06-16 | Polarization beam combining auto-collimation optical path system based on birefringence element |
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| CN105973170A true CN105973170A (en) | 2016-09-28 |
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| CN201610429058.7A Pending CN105973170A (en) | 2016-06-16 | 2016-06-16 | Polarization beam combining auto-collimation optical path system based on birefringence element |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107643055A (en) * | 2017-09-29 | 2018-01-30 | 中国科学院西安光学精密机械研究所 | Self-reference collimated light path system and calculating tested angle method based on light beam |
| CN108196379A (en) * | 2017-12-14 | 2018-06-22 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of optical system through axle light pipe and wear axis method |
| CN109443219A (en) * | 2018-11-05 | 2019-03-08 | 北方民族大学 | New Displacement Transducer and its measurement method with refracting telescope |
| CN111504344A (en) * | 2020-05-15 | 2020-08-07 | 天津时空经纬测控技术有限公司 | Calibration system and method for calibrating non-contact attitude measurement equipment |
| CN113218338A (en) * | 2021-05-18 | 2021-08-06 | 安徽中科米微电子技术有限公司 | Multi-point testing device and method based on autocollimator |
| CN113624644A (en) * | 2020-05-08 | 2021-11-09 | 深圳迈瑞生物医疗电子股份有限公司 | Optical detection system and blood cell analyzer |
| CN113687379A (en) * | 2021-07-20 | 2021-11-23 | 国网内蒙古东部电力有限公司 | System for reducing stray light interference of background of receiving light path and interference reduction method thereof |
| CN113624644B (en) * | 2020-05-08 | 2024-06-07 | 深圳迈瑞生物医疗电子股份有限公司 | Optical detection system and blood cell analyzer |
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| CN205898079U (en) * | 2016-06-16 | 2017-01-18 | 中国科学院西安光学精密机械研究所 | Polarization closes restraints auto -collimation optic system based on two refracting element |
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| JP2001221622A (en) * | 2000-02-03 | 2001-08-17 | Nikon Corp | Dark-field-type autocollimator |
| CN102175184A (en) * | 2011-01-10 | 2011-09-07 | 中国科学院光电技术研究所 | Polarized grating auto-reference auto-collimation two-dimensional angle measurement device |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107643055A (en) * | 2017-09-29 | 2018-01-30 | 中国科学院西安光学精密机械研究所 | Self-reference collimated light path system and calculating tested angle method based on light beam |
| CN108196379A (en) * | 2017-12-14 | 2018-06-22 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of optical system through axle light pipe and wear axis method |
| CN109443219A (en) * | 2018-11-05 | 2019-03-08 | 北方民族大学 | New Displacement Transducer and its measurement method with refracting telescope |
| CN113624644A (en) * | 2020-05-08 | 2021-11-09 | 深圳迈瑞生物医疗电子股份有限公司 | Optical detection system and blood cell analyzer |
| CN113624644B (en) * | 2020-05-08 | 2024-06-07 | 深圳迈瑞生物医疗电子股份有限公司 | Optical detection system and blood cell analyzer |
| CN111504344A (en) * | 2020-05-15 | 2020-08-07 | 天津时空经纬测控技术有限公司 | Calibration system and method for calibrating non-contact attitude measurement equipment |
| CN111504344B (en) * | 2020-05-15 | 2022-03-11 | 天津时空经纬测控技术有限公司 | Calibration system and method for calibrating non-contact attitude measurement equipment |
| CN113218338A (en) * | 2021-05-18 | 2021-08-06 | 安徽中科米微电子技术有限公司 | Multi-point testing device and method based on autocollimator |
| CN113687379A (en) * | 2021-07-20 | 2021-11-23 | 国网内蒙古东部电力有限公司 | System for reducing stray light interference of background of receiving light path and interference reduction method thereof |
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Application publication date: 20160928 |