CN113218338A - Multi-point testing device and method based on autocollimator - Google Patents
Multi-point testing device and method based on autocollimator Download PDFInfo
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The invention provides a multi-point testing device and a testing method based on an autocollimator, wherein the multi-point testing device comprises: the device comprises an incident light module, a light path auxiliary lens and a light path control module, wherein the incident light module comprises a beam expanding collimation laser light source, a diaphragm, a space light switch and a light path auxiliary lens, the beam expanding collimation laser light source is used for generating a parallel laser beam irradiated on the diaphragm, the diaphragm is used for controlling the width of the parallel laser beam, the space light switch is arranged on the light path of light emitted by the diaphragm and used for controlling the on-off of the laser beam, and the light path auxiliary lens is used for changing the light path of the laser beam so as to irradiate the laser beam on a chip to be detected; and the light-receiving module comprises a light-focusing component and an image point receiving screen, and the light-focusing component is used for irradiating the laser beam reflected by the chip to be tested on the image point receiving screen. The multi-point position testing device based on the autocollimator provided by the invention can greatly improve the production testing efficiency and reduce the sealing testing cost.
Description
Technical Field
The invention relates to the field of production test of MEMS (micro-electromechanical systems) micro-mirrors, in particular to a multi-point test device and a multi-point test method based on an autocollimator.
Background
At present, MEMS-based chip devices are widely used in the field of optical communications. MEMS focuses on ultra-precision machining, and testing of MEMS devices is different from that of traditional IC chips, and requires a specially-customized testing device. Based on the requirement of reducing the packaging and testing cost of the MEMS chip, the improvement of the single-chip testing speed and the multi-chip composite testing quantity of the special testing device is the main development direction of the MEMS device testing device.
The micro-mirror product manufactured based on the MEMS technology integrates an optical micro-mirror and a micro-driver, is a core element in an optical MEMS device, the size of the mirror surface of the micro-mirror product is usually hundreds of micrometers to thousands of micrometers, and an autocollimator is mostly used for testing due to high precision. The autocollimator is a common technical test instrument which utilizes the principle of optical autocollimation and utilizes small angle measurement or can be converted into small angle measurement, and is widely used for angle measurement, straightness and parallelism measurement of guide rails, flatness measurement of table tops, precise positioning and the like. Because the self motion damping of the MEMS device is small, after the MEMS device is electrically driven, a long stabilization time needs to be waited, so that the traditional autocollimator has low testing efficiency, the testing speed of the chip is severely limited in large-batch production testing, and the production testing cost is increased.
Disclosure of Invention
In view of the above drawbacks of the prior art, an object of the present invention is to provide a multi-point testing apparatus and a testing method based on an autocollimator, which are used to solve the problems of low testing efficiency and high testing cost of an autocollimator for an MEMS micromirror chip in the prior art.
To achieve the above and other related objects, the present invention provides an autocollimator-based multi-site testing apparatus, comprising:
the device comprises an incident light module, a light path auxiliary lens and a light path control module, wherein the incident light module comprises a beam expanding collimation laser light source, a diaphragm, a space light switch and a light path auxiliary lens, the beam expanding collimation laser light source is used for generating a parallel laser beam irradiated on the diaphragm, the diaphragm is used for controlling the width of the parallel laser beam, the space light switch is arranged on the light path of light emitted by the diaphragm and used for controlling the on-off of the laser beam, and the light path auxiliary lens is used for changing the light path of the laser beam so as to irradiate the laser beam on a chip to be detected;
and the light-receiving module comprises a light-focusing component and an image point receiving screen, and the light-focusing component is used for irradiating the laser beam reflected by the chip to be tested on the image point receiving screen.
Optionally, the spatial light switch is selected from one of a liquid crystal type light switch, an electro-optical type light switch, an acousto-optical type light switch, and a mechanical type light switch.
Optionally, the spatial light switch comprises at least one light switch, and each spatial light switch is used for controlling the on and off of a single laser or multiple lasers.
Optionally, the space optical switch is connected with the measurement and control system through a control cable, so that time-sharing on-off of multiple laser beams is realized.
Optionally, the optical path auxiliary mirror includes a plane mirror, and forms a preset included angle with the incident light beam.
Optionally, the image point receiving screen employs an optical image sensor.
The invention also provides a multi-point testing method based on the autocollimator, which comprises the following steps:
the beam expanding collimation laser source generates parallel laser beams and irradiates the diaphragms;
after the width of the parallel laser beams is adjusted by the diaphragm, the parallel laser beams irradiate a space optical switch, and the space optical switch is used for controlling the on-off of the laser beams;
changing the light path of the laser beam by using the light path auxiliary lens so that the laser beam irradiates on the chip to be measured;
and irradiating the laser beam reflected on the chip to be detected on the image point receiving screen through the light-gathering component, and acquiring data of the image point receiving screen.
Optionally, the spatial light switch adopts a time-division multiplexing method, and multiple laser beams are blocked by the spatial light switch in a certain time sequence in different time periods.
Optionally, multiple laser beams respectively irradiate on the chips to be tested of different test sequences, and are sensed by the image point receiving screen one by one.
As described above, the multi-point testing apparatus and the testing method based on the autocollimator of the present invention have the following advantages:
the traditional autocollimation angle meter is matched with a space optical switch, so that the angle testing device controls the on-off of one or more laser beams pointing to a tested device according to a preset mode. Simultaneously, apply the electric drive for a plurality of chips, a plurality of chips share stabilization time, through using space photoswitch, the break-make of time sharing control single beam or multibeam laser for gather chip deflection angle data when like point receiving screen, not only prevent to produce in the test process of a plurality of chips and disturb, shorten whole test time moreover, realize improving whole production efficiency of software testing by a wide margin, reduce and seal the purpose of surveying the cost.
Drawings
Fig. 1 is a schematic structural diagram of an autocollimator-based multi-point testing apparatus according to the present invention.
Fig. 2 is a front view of a space optical switch module according to a first embodiment of the invention.
Fig. 3 is a front view of a space optical switch module according to a second embodiment of the present invention.
Fig. 4 is a front view of a space optical switch module according to a third embodiment of the present invention.
Fig. 5 is a side view of the optical switch assembly of fig. 4.
Fig. 6 is a front view of a space optical switch module according to a fourth embodiment of the present invention.
Description of the element reference numerals
1 beam expanding collimation laser light source
2 diaphragm
3 spatial light switching
31 first optical switch
32 second optical switch
33 third optical switch
34 fourth optical switch
4 optical path auxiliary lens
5 parallel laser beam
6 laser beam
61 first laser beam
62 second laser beam
63 third laser beam
64 fourth laser beam
7 objective table
8 wafer
9 chip to be tested
91 first chip to be tested
92 second chip to be tested
10 light-focusing member
11 image point receiving screen
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and although the drawings only show the components related to the present invention and are not drawn according to the number, shape and size of the components in actual implementation, the form, quantity, position relationship and proportion of the components in actual implementation can be changed freely on the premise of implementing the technical solution of the present invention, and the layout form of the components may be more complicated.
As shown in fig. 1, the present invention provides a multi-point testing apparatus based on autocollimator, the multi-point testing apparatus comprising: the device comprises an incident optical module and a light receiving module, wherein the incident optical module comprises a beam expanding collimation laser light source 1, a diaphragm 2, a space light opening lens 3 and an optical path auxiliary lens 4, the beam expanding collimation laser light source 1 is used for generating a parallel laser beam 5 irradiating on the diaphragm 2, the diaphragm 2 is used for controlling the width of the parallel laser beam 5, a space optical switch 3 is arranged on an optical path of emergent light passing through the diaphragm 2 and used for controlling the on-off of the laser beam, and the optical path auxiliary lens 4 is used for changing the optical path of the laser beam; the light receiving module comprises a light focusing component 10 and an image point receiving screen 11, wherein the light focusing component 10 is used for irradiating laser beams reflected by the chip 9 to be tested on the image point receiving screen 11.
The spatial light switch 3 (light valve) is a controllable spatial light switch, and is selected from one of a liquid crystal type light switch, an electro-optical type light switch, an acousto-optical type light switch, and a mechanical type light switch. Preferably, a ferroelectric liquid crystal light switch is selected, the ferroelectric liquid crystal light switch has microsecond-level switching speed, laser beam switching time can be greatly shortened, driving voltage is small, and safety is high.
As an example, the spatial light switch 3 may be composed of one light switch or a plurality of light switches, and each light switch may control on/off of one laser beam or may control on/off of a plurality of laser beams.
As an example, the space optical switch 3 is connected to a measurement and control system (not shown) through a control cable, and controls the on/off of the laser beams according to a predetermined manner, so as to implement the time-sharing on/off of multiple laser beams.
As an example, the optical path auxiliary mirror 4 may include two plane mirrors, the two plane mirrors are disposed opposite and parallel to each other, and the plane mirrors and the incident beam form a preset included angle, so as to change the optical path of the incident laser beam and irradiate the incident laser beam on the chip 9 to be measured. The chip 9 to be tested may be an MEMS chip on the wafer 8, and the MEMS chip includes a micromirror to be tested corresponding to a wafer-level micromirror test. The micro mirror is provided with a micro reflecting mirror surface, and all incident laser beams are converged at a local area of the micro reflecting mirror surface to form a complete incident light spot.
As an example, the number of the chips 9 to be tested may be multiple, the multiple chips share the stable time by applying electric drive to the multiple chips at the same time, and the device obtains the chip deflection angle data in a time-sharing manner by using the space optical switch 3, thereby shortening the overall test time.
As an example, the light condensing part 10 may be a convex lens.
The image receiving screen 11 uses, as an example, an optical image sensor, preferably a CMOS image sensor.
The multi-point position testing device based on the autocollimator, disclosed by the invention, combines the autocollimator and the space optical switch together, so that the angle testing device can turn off one or more laser beams pointing to a tested device according to a preset mode, and the autocollimator can simultaneously measure the deflection angles of a plurality of targets. As an example, an autocollimator-based multi-point bit test method includes the steps of:
s1, generating parallel laser beams by the beam expanding collimation laser source, and irradiating the parallel laser beams to the diaphragm;
s2, irradiating the parallel laser beams to a space optical switch after the width of the parallel laser beams is adjusted by the diaphragm, wherein the space optical switch is used for controlling the on-off of the laser beams;
s3, changing the light path of the laser beam by using the light path auxiliary lens to enable the laser beam to irradiate on the chip to be measured;
s4, the laser beam reflected on the chip to be measured irradiates on the image point receiving screen through the light-gathering component, and the image point receiving screen carries out data acquisition.
As an example, in step S2, the spatial light switch 3 adopts a time-division multiplexing method, and in different time periods, multiple laser beams are blocked by the spatial light switch 3 according to a certain time sequence, so that the multiple laser beams irradiate on the chip to be tested according to the certain time sequence, and the multiple chips to be tested are prevented from being tested at the same time and interfering with the process of acquiring data by the image point receiving screen.
As an example, during the same time period, a plurality of laser beams are simultaneously directed to the stage 7, and the chips 9 under test on the stage 7 are in different test sequences. So that the multiple laser beams respectively irradiate on the chips 9 to be tested of different test sequences in sequence and are sensed by the image point receiving screen 11 one by one.
The following describes the autocollimator-based multi-point testing apparatus of the present invention with reference to specific examples.
Example one
Referring to fig. 1 and fig. 2, the spatial light switch 3 in the autocollimator-based multi-point position testing apparatus provided in this embodiment is composed of only one light switch (the first light switch 31). The parallel laser beam 5 generated by the beam expanding collimated laser light source 1 passes through the diaphragm 2 to emit two laser beams, which are a first laser beam 61 and a second laser beam 62, respectively, and an optical switch is disposed on the optical path of any one of the laser beams, in this embodiment, one first optical switch 31 is disposed on the optical path of the first laser beam 61. In addition, the two chips to be tested are in different test sequences.
When the first optical switch 31 is turned off, the first laser beam 61 is blocked by the first optical switch 31, and the second laser beam 62 is not blocked by the optical switch, the second chip 92 to be tested, which is pointed by the second laser beam 62, is tested first. After the test is completed, the second chip 92 to be tested is switched to another test sequence, and the second laser beam 62 does not point to any chip. At the same time, the first optical switch 31 is turned on, and the first chip 91 to be tested, to which the first laser beam 61 is directed, is tested. After the test is completed, the first chip to be tested 91 is switched to another test sequence. The first optical switch 31 is turned off again, and at this time, another chip to be tested to which the second laser beam 62 is directed is tested. The chips to be tested in different test sequences are tested in sequence according to the method, so that no interference is generated between the tests of the two chips, and the test efficiency is improved.
Example two
Referring to fig. 1 and fig. 3, the spatial optical switch 3 in the autocollimator-based multi-point position testing apparatus provided in this embodiment is composed of two optical switches, which are a first optical switch 31 and a second optical switch 32. The parallel laser beam 5 generated by the beam expanding collimation laser light source 1 passes through the diaphragm 2 to emit two laser beams, namely a first laser beam 61 and a second laser beam 62, and the optical paths of the two laser beams are respectively provided with an optical switch, namely a first optical switch 31 and a second optical switch 32. In addition, the test sequences of the two chips to be tested are the same.
At a certain moment, the first optical switch 31 is turned on, and the second optical switch 32 is turned off, and the first chip 91 to be tested, to which the first laser beam 61 is directed, is tested; at the next moment, the first optical switch 31 is turned off, and the second optical switch 32 is turned on, so as to test the second chip 92 to be tested, which is pointed by the second laser beam 62. Therefore, the first optical switch 31 and the second optical switch 32 are present, so that the first laser beam 61 and the second laser beam 62 can be directed to different chips to be tested at different times, i.e. only one laser beam is directed to the chip to be tested at the same time. In this way, interference between tests of different chips can be prevented.
EXAMPLE III
Referring to fig. 1, 4 and 5, the spatial optical switch 3 in the autocollimator-based multi-point position testing apparatus provided in this embodiment is composed of four optical switches. The parallel laser beam 5 generated by the beam expanding collimated laser light source 1 passes through the diaphragm 2 to emit four laser beams, and an optical switch is respectively arranged on the optical path of each laser beam and is respectively referred to as a first optical switch 31, a second optical switch 32, a third optical switch 33 and a fourth optical switch 34. In addition, the four chips to be tested are in the same test sequence, and the four chips to be tested can be sequentially tested. The difference between this embodiment and the second embodiment is only the increase of the laser beam and the corresponding light switching number, and the testing methods are the same, and are not described herein again.
Example four
Referring to fig. 1 and fig. 6, the spatial light switch 3 in the autocollimator-based multi-point position testing apparatus provided in this embodiment is also composed of one light switch (the first light switch 31), but is different from the first embodiment in that: the parallel laser beam 5 generated by the expanded beam collimation laser light source 1 emits four laser beams through the diaphragm 2, which are a first laser beam 61, a second laser beam 62, a third laser beam 63 and a fourth laser beam 64, respectively, where the first laser beam 61 and the third laser beam 63 are in one group, the second laser beam 62 and the fourth laser beam 64 are in another group, and an optical switch is disposed on an optical path of any one of the groups of laser beams, in this embodiment, a first optical switch 31 is disposed on an optical path of the first laser beam 61 and the third laser beam 63, and the optical switch can simultaneously control on/off of the first laser beam 61 and the third laser beam 63. In addition, the four chips to be tested are located in different test sequences.
When the first optical switch 31 is turned off, the first laser beam 61 and the third laser beam 63 are blocked by the first optical switch 31, and the second laser beam 62 and the fourth laser beam 64 are not blocked by the first optical switch 31, the second to-be-tested chip 92 pointed by the second laser beam 62 may be tested first. After the test is completed, the second chip to be tested 92 is switched to another test sequence, at this time, the second laser beam 62 does not point to any chip, and then the fourth chip to be tested (not shown in the figure) pointed by the fourth laser beam 64 is tested. After the test is completed, the fourth chip to be tested is also switched to another test sequence, and at this time, the fourth laser beam 64 does not point to any chip. At the same time, the first optical switch 31 is turned on, and the first chip 91 to be tested, to which the first laser beam 61 is directed, may be tested first. After the test is completed, the first chip to be tested 91 is switched to another test sequence, at this time, the first laser beam 61 does not point to any chip, and then a third chip to be tested (not shown in the figure) to which the third laser beam 63 points is tested. And after the test is finished, the third chip to be tested is switched to another test sequence. The first optical switch 31 is turned off again, and at this time, another chip to be tested to which the second laser beam 62 is directed is tested. According to the method, more chips to be tested in different test sequences are tested in sequence, so that the test of the four chips is ensured not to generate any interference, and the test efficiency is improved.
EXAMPLE five
This implementation allows to use more photoswitches, and every photoswitch can allow a plurality of laser beams of simultaneous control simultaneously, and a plurality of chips under test can realize the test of more chip samples through the timesharing test of different test sequences and same test sequence, and the test efficiency of whole test process is more improved, has satisfied large batch production test demand.
In summary, the present invention provides a multi-point testing apparatus and a testing method based on an autocollimator, which combines a conventional autocollimator with a spatial light switch, so that the angle testing apparatus controls the on/off of one or more laser beams pointing to a device under test according to a predetermined manner. The multiple chips are electrically driven to share stable time, and the spatial light switch is used for controlling the on-off of the single or multiple beams of laser in a time-sharing manner, so that the deflection angle data of the chips are acquired in the time-sharing manner of the image point receiving screen, interference in the testing process of the multiple chips is prevented, the overall testing time is shortened, the multi-point testing device based on the autocollimator can efficiently test the multiple chips, and the sealing and testing cost is reduced.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (9)
1. A multi-point position testing device based on autocollimators, the multi-point position testing device comprising:
the device comprises an incident light module, a light path auxiliary lens and a light path control module, wherein the incident light module comprises a beam expanding collimation laser light source, a diaphragm, a space light switch and a light path auxiliary lens, the beam expanding collimation laser light source is used for generating a parallel laser beam irradiated on the diaphragm, the diaphragm is used for controlling the width of the parallel laser beam, the space light switch is arranged on the light path of light emitted by the diaphragm and used for controlling the on-off of the laser beam, and the light path auxiliary lens is used for changing the light path of the laser beam so as to irradiate the laser beam on a chip to be detected;
and the light-receiving module comprises a light-focusing component and an image point receiving screen, and the light-focusing component is used for irradiating the laser beam reflected by the chip to be tested on the image point receiving screen.
2. The autocollimator-based multi-point bit test apparatus of claim 1, wherein: the space optical switch is selected from one of a liquid crystal optical switch, an electro-optical switch, an acousto-optic optical switch and a mechanical optical switch.
3. The autocollimator-based multi-point bit test apparatus of claim 1, wherein: the space optical switch comprises at least one optical switch, and each optical switch is used for controlling the on-off of a single laser or a plurality of lasers.
4. The autocollimator-based multi-point bit test apparatus of claim 1, wherein: the space optical switch is connected with the measurement and control system through a control cable, and time-sharing on-off of multiple laser beams is achieved.
5. The autocollimator-based multi-point bit test apparatus of claim 1, wherein: the light path auxiliary lens comprises a plane reflector and forms a preset included angle with the incident light beam.
6. The autocollimator-based multi-point bit test apparatus of claim 1, wherein: the image point receiving screen adopts an optical image sensor.
7. A multi-point position testing method based on an autocollimator is characterized by comprising the following steps:
the beam expanding collimation laser source generates parallel laser beams and irradiates the diaphragms;
after the width of the parallel laser beams is adjusted by the diaphragm, the parallel laser beams irradiate a space optical switch, and the space optical switch is used for controlling the on-off of the laser beams;
changing the light path of the laser beam by using the light path auxiliary lens so that the laser beam irradiates on the chip to be measured;
and irradiating the laser beam reflected on the chip to be detected on the image point receiving screen through the light-gathering component, and acquiring data of the image point receiving screen.
8. The autocollimator-based multi-point bit test method of claim 7, wherein: the space optical switch adopts a time-sharing multiplexing method, and a plurality of laser beams are blocked by the space optical switch according to a certain time sequence in different time periods.
9. The autocollimator-based multi-point bit test method of claim 8, wherein: and a plurality of laser beams respectively irradiate on the chips to be tested of different test sequences and are sensed by the image point receiving screen one by one.
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