CN118032302B - Detection system for polarization beam splitter prism and corresponding method - Google Patents
Detection system for polarization beam splitter prism and corresponding method Download PDFInfo
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Abstract
The detection system for the polarization beam splitter prism and a corresponding method thereof belong to the technical field of optical element detection and comprise an illumination module, a single-wavelength gate, a supporting piece, the polarization beam splitter prism, a first lens group and a photoelectric sensor; the illumination module is configured to emit a parallel light beam; the parallel light beam sequentially passes through a single-wavelength gate and a polarization beam splitter prism to form a first polarized light beam and a second polarized light beam which are orthogonal in polarization direction, and the first polarized light beam and the second polarized light beam are separated and emitted; the first lens group is configured to focus the first polarized light beam and the second polarized light beam on the photoelectric sensor respectively and form a first focus and a second focus, and the distance between the first focus and the second focus is used for calculating the separation angle of the polarization beam splitter prism; the distances among the polarization beam splitter prism, the first lens group and the photoelectric sensor are satisfied so that the principal ray of the first polarized light beam and the second polarized light beam when focused on the photoelectric sensor is perpendicular to the photoelectric sensor; the support member supports the polarization beam splitter prism to be rotatable in a horizontal plane. The measurement of the separation angle is achieved.
Description
Technical Field
The application relates to the technical field of optical element detection, in particular to a detection system for a polarization beam splitter prism and a corresponding method.
Background
A polarization splitting prism is a widely used optical element that separates an incident light beam into two o-light and e-light beams having orthogonal polarization directions by using a birefringence phenomenon of a crystal.
In the prior art, the theoretical separation angle (namely the included angle between the o light and the e light) of the o light and the e light is often obtained by means of variables such as an interface angle formed by combining two different crystal axis directions of a birefringent crystal of a polarization beam splitter prism, a prism refractive index, a minimum working distance and the like. However, in practice, due to the refractive index difference of the materials, the angular tolerance of the bonding interface, the thickness of the bonding layer, the refractive index of the bonding layer, and other factors, the actual separation angle of the polarization beam splitter prism has a certain deviation from the theoretical value. Along with the increasing requirement of the optical instrument on the precision, the influence of the deviation of the separation angle of the polarization beam splitter prism in the optical path on the precision of the subsequent instrument is more obvious. While there is no device for measuring the separation angle of the polarization beam splitter prism in the related art.
Accordingly, a need exists for a detection system for a polarizing beam splitting prism and corresponding method.
Disclosure of Invention
In order to solve the technical problem that a separation angle of a polarization beam splitter prism lacks a detection means in the prior art, the embodiment of the application provides the following technical scheme.
In a first aspect, embodiments of the present application provide a detection system for a polarization beam splitter prism, the detection system including an illumination module, a single wavelength gate, a support, a polarization beam splitter prism, a first mirror group, and a photosensor;
wherein the illumination module is configured to emit a parallel light beam; the parallel light beams sequentially pass through the single-wavelength gate and the polarization beam splitter prism to form a first polarized light beam and a second polarized light beam with orthogonal polarization directions, and the first polarized light beam and the second polarized light beam are separated and emitted;
The first lens group is configured to focus the first polarized light beam and the second polarized light beam on the photoelectric sensor respectively and form a first focus and a second focus correspondingly, and the distance between the first focus and the second focus is used for calculating the separation angle of the polarization splitting prism; and, the distances among the polarization splitting prism, the first mirror group and the photosensor are configured such that a principal ray of the first polarized light beam and the second polarized light beam when focused on the photosensor is perpendicular to a light sensing surface of the photosensor;
The support is configured to support the polarization splitting prism, and the support is configured to be rotatable in a horizontal plane.
Optionally, the illumination module sequentially comprises a light source, a second lens group, a small hole and a collimation device along an illumination light path;
The light beam emitted by the light source passes through the small hole after being coupled by the second lens group, and is modulated into a parallel light beam by the collimation device; and, the diameter of the small hole satisfies:
Dhole≤2.44λ*f1/D;
Wherein lambda is the transmission wavelength of the single-wavelength gate; f 1 is the focal length of the first lens group; d is the caliber of the parallel light beam.
Optionally, the first lens group is a transmission lens group.
Optionally, the first lens group is a reflective lens group.
Optionally, the detection system further comprises an achromat; the achromatic lens is disposed downstream of the first lens group.
Optionally, the detection system further comprises a rotating linear polarizer;
the rotary linear polarizer is disposed at an arbitrary position between the polarization splitting prism and the photosensor.
Optionally, the single wavelength gate comprises a filter, a color wheel, a planar grating, an AOTF acousto-optic modulator, or LOTF liquid crystal light modulator.
Optionally, the separation angle α of the first polarized light beam and the second polarized light beam further satisfies:
D≥2.44λ/α；
Wherein D is the caliber of the parallel light beam emitted from the single-wavelength gate; lambda is the wavelength of the parallel light beam exiting the single wavelength gate; alpha is the angle of separation of the first polarized light beam and the second polarized light beam.
In a second aspect, an embodiment of the present application further provides a detection method for a polarization beam splitter prism, which is applicable to the detection system provided in any one of the foregoing embodiments, where the detection method includes:
emitting parallel light beams through the lighting module;
Selecting a parallel light beam with a first wavelength by adopting a single-wavelength gating device, and enabling the parallel light beam to enter a polarization splitting prism at a first incident angle;
focusing a first polarized light beam and a second polarized light beam emitted by the polarized light splitting prism on a photoelectric sensor by adopting a first lens group respectively and correspondingly forming a first focus and a second focus;
a separation angle of the first polarized light beam and the second polarized light beam at a first wavelength and a first incident angle is calculated based on a distance of the first focus and the second focus.
The technical scheme of the application at least has the following beneficial effects:
The application provides a detection system for a polarization beam splitter prism, which comprises an illumination module, a single-wavelength gate, a supporting piece, the polarization beam splitter prism, a first lens group and a photoelectric sensor, wherein the first lens group is arranged on the first lens group; wherein, the lighting module emits parallel light beams; the single wavelength gating device realizes single wavelength incidence and wavelength selection, the polarization beam splitter prism divides an incident single wavelength parallel light beam into a first polarized light beam and a second polarized light beam, the first polarized light beam and the second polarized light beam are respectively converged on the photoelectric sensor by the first lens group to form a first focus and a second focus, the separation angle of the polarization beam splitter prism can be calculated through the distance between the first focus and the second focus, and the polarization beam splitter prism is supported by the supporting piece, so that the polarization beam splitter prism can rotate in a horizontal plane, the incident angle of the single wavelength parallel light is changed, and the measurement of the separation angle under different incident angles is realized.
Drawings
The accompanying drawings are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments of the application and, together with the description, serve to explain the principles of the application.
Fig. 1 shows an alternative configuration of a detection system for a polarization splitting prism according to an embodiment of the present application.
Fig. 2 shows yet another alternative configuration of a detection system for a polarization splitting prism according to an embodiment of the present application.
Fig. 3 shows yet another alternative configuration of a detection system for a polarization splitting prism according to an embodiment of the present application.
Fig. 4 shows yet another alternative configuration of a detection system for a polarization splitting prism according to an embodiment of the present application.
Fig. 5 shows yet another alternative configuration of a detection system for a polarization splitting prism according to an embodiment of the present application.
Reference numerals in the drawings denote:
1-a light source; 2-a second lens group; 3-small holes; 4-collimation device; 5-single wavelength gate; 6-a support; 7-a polarization beam splitter prism; 8-a first lens group; 9-rotating the linear polarizer; 10-photosensor.
Detailed Description
The present application now will be described more fully hereinafter with reference to the accompanying drawings, in which embodiments are shown. The application may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the application to those skilled in the art. Like numbers refer to like elements throughout. Also, in the drawings, the thickness, ratio, and size of the parts are exaggerated for clarity of illustration.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used herein, unless the context clearly indicates otherwise, "a," "an," "the," and "at least one" are not meant to limit the amount, but are intended to include both the singular and the plural. For example, unless the context clearly indicates otherwise, the meaning of "a component" is the same as "at least one component". The "at least one" should not be construed as limited to the number "one". "or" means "and/or". The term "and/or" includes any and all combinations of one or more of the associated listed items.
Unless otherwise defined, all terms used herein, including technical and scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms as defined in commonly used dictionaries should be interpreted as having the same meaning as the relevant art context and are not interpreted in an idealized or overly formal sense unless expressly so defined herein.
The meaning of "comprising" or "including" indicates a property, quantity, step, operation, component, element, or combination thereof, but does not preclude other properties, quantities, steps, operations, components, elements, or combinations thereof.
Embodiments are described herein with reference to cross-sectional illustrations that are idealized embodiments. Thus, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, embodiments described herein should not be construed as limited to the particular shapes of regions as illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. For example, a region shown or described as being flat may typically have rough and/or nonlinear features. Also, the acute angles shown may be rounded. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the precise shape of a region and are not intended to limit the scope of the claims.
Hereinafter, exemplary embodiments according to the present application will be described with reference to the accompanying drawings.
The embodiment of the application provides a detection system for a polarization beam splitter prism. Referring to fig. 1 to 5, the detection system includes an illumination module, a single wavelength gate 5, a support 6, a polarization splitting prism 7, a first mirror group 8, and a photosensor 10.
Specifically, the polarization beam splitter prism 7 is supported by the support 6. Along the outgoing light path of the illumination module, a single-wavelength gate 5, a polarization splitting prism 7, a first lens group 8 and a photoelectric sensor 10 are sequentially arranged at the downstream of the light path of the illumination module. Wherein the lighting module is configured to emit a parallel light beam. The parallel light beams are emitted in parallel at a first wavelength after entering the single-wavelength gate 5. The outgoing first-wavelength parallel light beam enters the polarization splitting prism 7 at a first incident angle. The first wavelength parallel beam is separated by the polarization beam splitter prism 7 to form a first polarized beam and a second polarized beam, one of the first polarized beam and the second polarized beam is o light (ordinarylight), and the other is e light (extraordinarylight). The included angle α between the first polarized light beam and the second polarized light beam is the separation angle of the polarization beam splitter prism 7. The first polarized light beam and the second polarized light beam are modulated by the first lens group 8 and then respectively converged on the photoelectric sensor 10 to form a first focus and a second focus. The separation angle of the polarization splitting prism 7 at the first wavelength and the first incident angle can be obtained based on the distance of the first focus and the second focus. The first incident angle is an angle between the first wavelength parallel light beam and a normal line of a splitting interface of the polarization splitting prism 7.
According to the embodiment of the present application, the signal of the first focus or the second focus acquired by the photosensor 10 is a diffuse point chart. Thus, according to the rayleigh Li Yanshe limit, the diameter d 1 of the first focus or the diameter d 2 of the second focus in an ideal case without aberration satisfies:
D 1=2.44λ*f1/D; (1) Or (b)
d2=2.44λ*f1/D；(2)
Where λ is the transmission wavelength of the single wavelength gate 5, i.e. the first wavelength; f 1 is the focal length of the first lens group; d is the caliber of the single-wavelength parallel light beam. According to an embodiment of the application, the aperture D o of the first polarized light beam and the aperture D e of the second polarized light beam are smaller than or equal to the aperture of the single wavelength parallel light beam.
The inventors have found that the small dispersion of a conventional parallel beam (e.g. a laser beam) reduces the accuracy of the measurement of the present application. More advantageously, the lighting module of the present application comprises a light source 1, a second lens 2, an aperture 3 (pinhole) and a collimation means 4.
Specifically, the light source 1 is configured to provide a broadband illumination beam. For example, the light source 1 includes any one of a halogen lamp, a Xenon lamp (Xenon), a mercury lamp (Hg), a mercury-Xenon lamp (hg—xe), and a laser excited plasma light source (LDLS). The second lens group 2 comprises at least one lens for converging and shaping the light emitted by the light source 1 to be focused on the back focal plane of the second lens group 2. An aperture 3 is provided in the back focal plane of the second lens group 2 for limiting the diameter of the light beam projected from the aperture. In order to improve the measurement accuracy of the detection system provided by the embodiment of the application, the diameters of the small holes 3 satisfy the following conditions: d hole≤2.44λ*f1/D; (3) Where λ is the transmission wavelength of the single wavelength gate 5; f 1 is the focal length of the first lens group; d is the caliber of the single-wavelength parallel light beam. I.e. the size of the aperture 3 is smaller than the diameter of the spot of the first focus or the second focus. In view of the size of the aperture 3, the divergence angle of the parallel light beam incident on the single wavelength gate 5 is reduced, thereby improving the measurement accuracy of the detection system. Further, the longer the focal length of the collimator 4, the smaller the divergence angle of the parallel light beam incident on the single-wavelength gate 5, and the higher the accuracy of the detection system.
According to an embodiment of the application, the collimating means 4 is reflective and comprises at least one mirror. According to further embodiments, the collimating means 4 is transmissive and comprises at least one lens. According to an embodiment of the present application, the collimator 4 employs reflection to facilitate suppression of chromatic aberration of the parallel light beam exiting from the collimator 4. If a transmissive collimation device is used, an achromatic lens group is optionally included.
According to an embodiment of the present application, the single wavelength gate 5 is configured to modulate incident light of a broad band into a single wavelength output. The single wavelength gate 5 comprises any one of a filter, a color wheel, a planar grating, an AOTF acousto-optic modulator, or LOTF liquid crystal light modulator. As shown in fig. 2, the irradiation position of the parallel light beams with different wavelengths is modulated by the plane grating, and the parallel light beams with different wavelengths are coupled into a subsequent light path by adjusting the position of the polarization beam splitter prism 7, so that the light beam entering the polarization beam splitter prism 7 is always in a single wavelength. As shown in fig. 2, the parallel light beams from the broad band are separated into parallel light beams with different wavelengths after being modulated by the plane grating, and the parallel light beams are emitted in different directions. In order to couple the light beams emitted by the plane grating into the subsequent light paths by wavelength, the polarization splitting prism 7, the first mirror group 8, the rotary photoelectric sensor 10 and the optionally arranged rotary linear polarizer 9 are rotated together around the center of the plane grating.
According to an embodiment of the application, the support 6 is configured to be rotatable in a horizontal plane, thereby rotating the polarizing beam splitter prism. For example, the support 6 comprises a turntable. And adjusting the included angle between the first polarized light beam and the second polarized light beam by adjusting the angle of incidence of the single-wavelength parallel light beam on the polarization splitting prism, so that the positions of the first focus and the second focus are changed. Generally, when the optical path is constructed for the first time, the parallel light beam vertically enters the surface of the polarization splitting prism, which faces the single-wavelength gate, so that the calibration of subsequent measurement is facilitated. It will be appreciated that by rotating the support 6, the separation angle of the polarizing beam splitter prism at different parallel light angles of incidence can be obtained, based on which a curve of the separation angle magnitude as a function of the parallel light beam angle of incidence can be obtained by interpolation fitting.
According to an embodiment of the present application, the polarization splitting prism 7 includes, but is not limited to, a rochon prism, a glan thompson prism, a wollaston prism, and a nomann base prism. The polarization splitting prism 7 separates incident light into o light and e light by using a crystal birefringence phenomenon and outputs the o light and e light with orthogonal polarization directions.
According to the embodiment of the present application, the first polarized light beam and the second polarized light beam emitted from the polarization splitting prism 7 are modulated by the first mirror group and then focused on the photosensitive surface of the photosensor 10, so as to form a first focus and a second focus. In some alternative embodiments, as shown in fig. 1-4, the first lens group 8 is transmissive and includes at least one lens. In other alternative embodiments, referring to fig. 5, the first lens group is a reflective lens, and includes at least one reflecting lens, and the surface shape of the reflecting surface is configured to make the incident first polarized light beam and the incident second polarized light beam converge on the photosensitive surface of the photoelectric sensor respectively. Note that the pitches of the polarization splitting prism 7, the first mirror group 8, and the photosensor 10 are configured such that, when the first polarized light beam and the second polarized light beam converge at the photosensor, the principal ray of the taper angle of the light is perpendicular to the light sensing surface of the photosensor 10. The first mirror group 8 is illustratively an off-axis dual anti-focus system or an off-axis tri-focus system.
According to the embodiment of the present application, in order to further improve the measurement accuracy of the detection system, the focal length f 1 of the first lens group 8 and the caliber D of the single-wavelength parallel beam entering the polarization splitting prism 7 also satisfy:
f1*tan(α)≈f1*α≥2.44λ*f1/D；（4）
thus, D is ≡ 2.44. Lambda./alpha; (5).
Where λ is the transmission wavelength of the single wavelength gate 5; f 1 is the focal length of the first lens group; d is the caliber of the parallel light beam.
In some alternative embodiments, assuming that the side length of the picture element of the photosensor 10 is d 10, the separation angle between the first polarized light beam and the second polarized light beam also satisfies:
f1*α≥N*d10；（6）
Where f 1 is the focal length of the first lens group 8, α is the separation angle, N is a positive integer, and N is the number of pixels (including the pixels where the first focus and the second focus are located) that are not going from the first focus to the second focus. In view of the above formulas (4) to (6), it is easy to understand that the larger f 1 is, the higher the measurement accuracy of the detection system provided by the embodiment of the present application is. However, in the case where the aperture D of the single-wavelength parallel light beam incident on the polarization splitting prism 7 is constant, the larger the f 1 is, the larger the spot diameters of the first focus and the second focus are, which reduces the measurement accuracy to some extent. Therefore, a suitable focal length range of the first lens group 8 or an aperture range of the incident light beam needs to be selected according to the pixel size.
In some examples, the distance of the first focus and the second focus is the distance of the spot center of the first focus to the spot center of the second focus. In still other embodiments, the distance of the first focus and the second focus is the distance of the coordinates corresponding to the energy peak of the first focus to the coordinates corresponding to the energy peak of the second focus.
According to an alternative embodiment of the application, the detection system further comprises a rotating linear polarizer 9, as indicated by the dashed lines in fig. 1 to 5. When the polarization direction of the rotating linear polarizer 9 coincides with the polarization direction of the first polarized light beam, only the first light beam forms a first focus on the photosensor 10; when the polarization direction of the rotated linear polarizer 9 coincides with the polarization direction of the second polarized light beam, only the second light beam forms a second focus on the photosensor 10.
According to the embodiment of the present application, the rotary linear polarizer 9 is disposed at any position between the polarization splitting prism 7 and the photosensor 10. That is, the rotating linear polarizer 9 may be upstream of the first lens group 8 or downstream of the first lens group 8. As shown in fig. 3, when the rotating linear polarizer 9 is located between the polarization splitting prism 7 and the first lens group 8, the rotating linear polarizer 9 and the first lens group 8 form an object side telecentric system, and since the first polarized light beam and the second polarized light beam emitted from the polarization splitting prism 7 have the characteristic of parallel principal rays, the displacement of the rotating linear polarizer 9 along the optical axis between the first lens group 8 and the polarization splitting prism 7 does not affect the modulation of the polarization state by the rotating polarizer 9. As shown in fig. 4, when the rotating linear polarizer 9 is located between the first mirror group 8 and the photosensor 10, in order to avoid the influence of the deviation of the angle of the light cone upon converging the first polarized light beam and the second polarized light beam on the polarization state modulation, it is necessary to make the principal ray upon converging the first polarized light beam and the second polarized light beam parallel to the optical axis, that is, to constitute an image-side telecentric system.
Illustratively, when the first focus and the second focus are spaced apart by less than the minimum resolution of the photosensor 10, e.g., the first focus and the second focus are spaced apart by less than the side length of a single pixel, a rotating linear polarizer 9 is introduced. The position of the first focus is obtained by setting the polarization direction of the rotating linear polarizer 9 to coincide with the polarization direction of the first polarized light beam, and then the rotating linear polarizer 9 is rotated by 90 ° to obtain the position of the second focus, whereby the distance between the first focus and the second focus is calculated from the position of the first focus obtained before and after the rotation.
According to a further alternative embodiment of the application, the size of the separation angle of the polarization splitting prism 7 at different wavelengths can be obtained by switching the single wavelength gate 5. The inventors of the present application have also found that when the wavelength of the parallel light beam incident on the polarization splitting prism 7 is changed, the accuracy of measurement is unexpectedly lowered. In this regard, the inventors of the present application have unexpectedly found that this phenomenon occurs because: although the separation angle corresponding to a single wavelength is obtained in a single measurement, the traversal from the first wavelength to the nth wavelength is still broadband in the time dimension. Therefore, the achromatic lens group is introduced into the first lens group 8, or the first lens group 8 of the embodiment of the application adopts the reflective lens group, thereby eliminating chromatic aberration caused by transmission wavelength switching of the single wavelength gate 5 and avoiding measurement accuracy reduction caused by single wavelength switching.
According to an embodiment of the present application, the photosensor 10 includes a charge coupled device (CCD, charge Coupled Device), a complementary metal oxide semiconductor (CMOS, complementary Metal Oxide Semiconductor), and a photodiode Array (PD Array, phot Diode Array).
In a second aspect, an embodiment of the present application further provides a detection method for a polarizing beam splitter prism, where the detection method is applicable to any one of the above embodiments, and the detection method at least includes the following steps:
emitting parallel light beams through the lighting module;
Selecting a parallel light beam with a first wavelength by adopting a single-wavelength gating device, and enabling the parallel light beam to enter a polarization splitting prism at a first incident angle;
Focusing a first polarized light beam and a second polarized light beam emitted by a polarized light splitting prism on a photoelectric sensor by adopting a first lens group respectively and correspondingly forming a first focus and a second focus;
The separation angle of the first polarized light beam and the second polarized light beam at the first wavelength and the first incident angle is calculated based on the distance of the first focus and the second focus.
According to an embodiment of the present application, the detection method further includes:
When the single-wavelength gate is a plane grating, measuring the separation angle of the polarization beam splitter prism corresponding to different angles of rotation of the supporting piece at a first position corresponding to the irradiation of the first wavelength parallel light beam;
And adjusting the positions of the polarization beam splitter prism, the first lens group and the photoelectric sensor to enable the parallel light beams with the second wavelength to be coupled as the polarization beam splitter prism, and measuring the size of the corresponding separation angle under different angles of rotation of the corresponding polarization beam splitter prism under the irradiation of the parallel light beams with the second wavelength.
According to an embodiment of the present application, the detection method further includes:
Rotating the rotary linear polarizer around a main optical axis of the detection system, so that the polarization direction of the rotary linear polarizer is the same as that of the first polarized light beam, only a first focus is formed on the photoelectric sensor, and the position of the first focus is acquired;
Rotating the rotary linear polarizer around the main optical axis of the detection system to enable the polarization direction of the rotary linear polarizer to be the same as that of the second polarized light beam, enabling the photoelectric sensor to be formed with only the second focus, and acquiring the position of the second focus;
obtaining a distance between the first focus and the second focus based on the positions of the first focus and the second focus;
the separation angle of the polarization splitting prism is calculated based on the distance between the first focus and the second focus.
In summary, the detection system and method for a polarization beam splitter prism provided by the embodiments of the present application implement imaging of the first focus and the second focus corresponding to a single wavelength single parallel light incident angle through the illumination module, the single wavelength gate, the polarization beam splitter prism, the first lens group and the photoelectric sensor basic architecture, thereby implementing measurement of a separation angle. Thus, measurement of the separation angle of the corresponding polarizing beam splitter prism at different wavelengths and different parallel beam incidence angles is achieved by the configuration of the single wavelength gate and the support. The detection method further improves the measurement accuracy by introducing the small hole, the second lens group and the collimating device. The detection system also overcomes the resolution limitations of the photosensors by introducing a rotating linear polarizer, and also overcomes the effect of single wavelength gate wavelength switching on measurement accuracy by introducing an achromatic measure at the first mirror set.
The foregoing is merely a specific implementation of the embodiment of the present application, but the protection scope of the embodiment of the present application is not limited thereto, and any person skilled in the art can easily think about changes or substitutions within the technical scope of the embodiment of the present application, and the changes or substitutions are covered by the protection scope of the embodiment of the present application. Therefore, the protection scope of the embodiments of the present application shall be subject to the protection scope of the claims.
Claims (9)
1. A detection system for a polarizing beam splitter prism, the detection system comprising an illumination module, a single wavelength gate, a support, a polarizing beam splitter prism, a first lens group, and a photosensor;
wherein the illumination module is configured to emit a parallel light beam; the parallel light beams sequentially pass through the single-wavelength gate and the polarization beam splitter prism to form a first polarized light beam and a second polarized light beam with orthogonal polarization directions, and the first polarized light beam and the second polarized light beam are separated and emitted;
The first lens group is configured to focus the first polarized light beam and the second polarized light beam on the photoelectric sensor respectively and form a first focus and a second focus correspondingly, and the distance between the first focus and the second focus is used for calculating the separation angle of the polarization splitting prism; and, the distances among the polarization splitting prism, the first mirror group and the photosensor are configured such that a principal ray of the first polarized light beam and the second polarized light beam when focused on the photosensor is perpendicular to a light sensing surface of the photosensor;
The support is configured to support the polarization splitting prism, and the support is configured to be rotatable in a horizontal plane.
2. The detection system of claim 1, wherein the illumination module comprises, in order along the illumination path, a light source, a second lens group, an aperture, and a collimation device;
The light beam emitted by the light source passes through the small hole after being coupled by the second lens group, and is modulated into a parallel light beam by the collimation device; and, the diameter D hole of the small hole satisfies:
Dhole≤2.44λ*f1/D;
Wherein lambda is the transmission wavelength of the single-wavelength gate; f 1 is the focal length of the first lens group; d is the caliber of the single-wavelength parallel light beam emitted from the single-wavelength gate.
3. The detection system according to claim 1 or 2, wherein the first lens group is a transmissive lens group.
4. The detection system according to claim 1 or 2, wherein the first set of mirrors is a reflective set of mirrors.
5. The detection system of claim 3, wherein the detection system further comprises an acromatic lens; the achromatic lens is disposed downstream of the first lens group.
6. The detection system of claim 1 or 2, wherein the detection system further comprises a rotating linear polarizer;
the rotary linear polarizer is disposed at an arbitrary position between the polarization splitting prism and the photosensor.
7. The detection system of claim 1, wherein the single wavelength gate comprises a filter, a color wheel, a planar grating, an AOTF acousto-optic modulator, or LOTF liquid crystal light modulator.
8. The detection system of claim 1, wherein the separation angle α of the first polarized light beam and the second polarized light beam further satisfies:
D≥2.44λ/α；
Wherein D is the caliber of the parallel light beam emitted from the single-wavelength gate; lambda is the transmission wavelength of the single wavelength gate; alpha is the angle of separation of the first polarized light beam and the second polarized light beam.
9. A detection method for a polarization splitting prism, adapted to the detection system according to any one of claims 1 to 8, characterized in that the detection method comprises:
emitting parallel light beams through the lighting module;
Selecting a parallel light beam with a first wavelength by adopting a single-wavelength gating device, and enabling the parallel light beam to enter a polarization splitting prism at a first incident angle;
focusing a first polarized light beam and a second polarized light beam emitted by the polarized light splitting prism on a photoelectric sensor by adopting a first lens group respectively and correspondingly forming a first focus and a second focus;
a separation angle of the first polarized light beam and the second polarized light beam at a first wavelength and a first incident angle is calculated based on a distance of the first focus and the second focus.
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| CN117008350A (en) * | 2022-04-28 | 2023-11-07 | 上海微电子装备（集团）股份有限公司 | Orthogonal polarized light regulation and control device, interferometer and grating displacement measurement system |
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