CN109358435B - Device and method for adjusting perpendicularity of double telecentric lenses - Google Patents
Device and method for adjusting perpendicularity of double telecentric lenses Download PDFInfo
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- CN109358435B CN109358435B CN201811547488.4A CN201811547488A CN109358435B CN 109358435 B CN109358435 B CN 109358435B CN 201811547488 A CN201811547488 A CN 201811547488A CN 109358435 B CN109358435 B CN 109358435B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
Abstract
The adjusting device comprises a parallel light source, a first spectroscope, a fourth spectroscope, a first reflecting mirror component, a second spectroscope, a third spectroscope, an objective lens and a camera which are sequentially arranged along a main shaft light path, wherein the camera is positioned on a focus of the objective lens; the first spectroscope, the second spectroscope and the fourth spectroscope are sequentially arranged along an incident light path of the parallel light source, and the incident light path is perpendicular to the main shaft light path; the first reflecting mirror component is positioned on the light splitting path of the first spectroscope, the first reflecting mirror component reflects the light rays split by the first spectroscope to the third spectroscope, and the third spectroscope reflects the light rays reflected by the first reflecting mirror component to the objective lens along the direction parallel to the light path of the main shaft; the second reflecting mirror component is positioned on the light splitting path of the fourth spectroscope. The invention is convenient for confirming whether the optical axis of the double telecentric lens is vertical to the carrying platform.
Description
Technical Field
The invention relates to the technical field of visual detection and image measurement, in particular to a device and a method for adjusting perpendicularity of a double telecentric lens.
Background
The telecentric lens is designed mainly for correcting parallax of the traditional industrial lens, can ensure that the obtained image magnification is not changed within a certain object distance range, is very important to the situation that the measured object is not on the same object plane, and is widely applied to various visual image detection devices.
In the detection using the double telecentric lens, in order to ensure the measurement accuracy, a certain known geometric relationship between the lens and the object stage is required to be strictly satisfied, and the geometric relationship mostly requires that the optical axis of the double telecentric lens be perpendicular to the object carrying platform.
In the prior art, the mode of ensuring that the optical axis of the double telecentric lens is perpendicular to the carrying platform is by mechanical positioning, the carrying platform is vertically arranged on a lifting mechanism, and the double telecentric lens is vertically downwards arranged on a lens support frame, however, the mechanical positioning mode cannot determine whether the optical axis of the double telecentric lens is perpendicular to the carrying platform.
Disclosure of Invention
The invention provides a device and a method for adjusting perpendicularity of a double telecentric lens, which are convenient for confirming whether an optical axis of the double telecentric lens is perpendicular to an object carrying platform.
According to a first aspect of the present invention, the present invention provides a device for adjusting perpendicularity of a double telecentric lens, including a parallel light source, a first spectroscope, a fourth spectroscope, a first reflecting mirror assembly, a second reflecting mirror assembly, and a second spectroscope, a third spectroscope, an objective lens and a camera sequentially arranged along a main axis light path, wherein the camera is located at a focal point of the objective lens; the first spectroscope, the second spectroscope and the fourth spectroscope are sequentially arranged along an incident light path of the parallel light source, and the incident light path is perpendicular to the main shaft light path; the first reflecting mirror component is positioned on a light splitting path of the first spectroscope, the first reflecting mirror component is used for reflecting the light rays split and reflected by the first spectroscope to the third spectroscope, and the third spectroscope is used for reflecting the light rays reflected by the first reflecting mirror component to the objective lens along the direction parallel to the light path of the main shaft; the second reflecting mirror component is positioned on the light splitting path of the fourth spectroscope, the second reflecting mirror component is used for reflecting the light rays split and reflected by the fourth spectroscope to the fourth spectroscope, the fourth spectroscope is used for reflecting the light rays reflected by the second reflecting mirror component to the second spectroscope, and the second spectroscope is used for reflecting the light rays reflected by the fourth spectroscope to pass through the third spectroscope and irradiate the objective lens along the direction parallel to the light path of the main shaft.
Preferably, the first beam splitter, the second beam splitter, the third beam splitter and the fourth beam splitter are all cube beam splitter prisms.
Preferably, the first mirror assembly is a pentaprism, a right angle prism, or a planar mirror.
Preferably, the second mirror assembly is a corner cube or a planar mirror.
Preferably, the parallel light source comprises a point light source, a cross reticle and a collimating objective lens which are sequentially arranged along an incident light path, wherein the cross reticle is placed close to the point light source and is positioned on a focus of the collimating objective lens.
Preferably, the parallel light source includes a point laser and an attenuation sheet sequentially arranged along an incident light path.
According to a second aspect of the present invention, the present invention provides a device for adjusting perpendicularity of a double telecentric lens, including a parallel light source, a first spectroscope, a first reflecting mirror assembly, a reflecting surface, a second spectroscope, a third spectroscope, an objective lens and a camera sequentially arranged along a main axis light path, wherein the camera is located at a focal point of the objective lens; the first spectroscope and the second spectroscope are sequentially arranged along an incident light path of the parallel light source, and the incident light path is perpendicular to the main shaft light path; the first reflecting mirror component is positioned on a light splitting path of the first spectroscope, the first reflecting mirror component is used for reflecting the light rays split and reflected by the first spectroscope to the third spectroscope, and the third spectroscope is used for reflecting the light rays reflected by the first reflecting mirror component to the objective lens along the direction parallel to the light path of the main shaft; the reflecting surface is positioned on the beam splitting optical path of the second beam splitter and is used for reflecting the light rays split and reflected by the second beam splitter to the second beam splitter, and the light rays reflected by the reflecting surface sequentially penetrate through the second beam splitter and the third beam splitter along the direction parallel to the main shaft optical path and are emitted to the objective lens.
Preferably, the first beam splitter, the second beam splitter and the third beam splitter are all cube beam splitter prisms.
Preferably, a side surface of the second beam splitter, which is positioned on the beam splitting path of the second beam splitter, is plated with a reflecting film, and the reflecting film is the reflecting surface; or the reflecting surface is a plane reflecting mirror; alternatively, the reflecting surface is a corner cube.
According to a third aspect of the present invention, the present invention provides a method for adjusting perpendicularity of a double telecentric lens, comprising the steps of:
(1) By using the adjusting device for the perpendicularity of the double telecentric lens, a parallel light source emits parallel light to a first spectroscope, imaging in a camera is observed, and when two misaligned light spots exist in the imaging, the adjusting device is adjusted until the two light spots in the imaging are overlapped, so that self calibration of the adjusting device is completed;
(2) Arranging the object carrying platform on an incident light path of the adjusting device with self calibration completed, enabling the parallel light transmitted through the adjusting device to irradiate the object carrying platform, observing imaging in a camera, and adjusting the object carrying platform until two light spots in the imaging coincide when two light spots which are not coincident exist in the imaging, so as to complete calibration of the object carrying platform;
(3) And setting the double telecentric lens between the adjusting device which completes the calibration of the carrying platform and the carrying platform, enabling parallel light to sequentially penetrate through the adjusting device and the double telecentric lens and irradiate the carrying platform, observing imaging in the camera, and adjusting the double telecentric lens when two misaligned light spots exist in the imaging until the two light spots in the imaging are overlapped, thus completing the adjustment of the perpendicularity of the double telecentric lens.
The adjusting device for the perpendicularity of the double telecentric lens can be used for adjusting the perpendicularity of the optical axis of the double telecentric lens with the object carrying platform, and based on the optical auto-collimation principle, whether the optical axis of the double telecentric lens is perpendicular to the object carrying platform can be judged by observing imaging in a camera, and the judging mode is more visual and simpler.
According to the method for adjusting the perpendicularity of the double telecentric lens, the self-calibration is firstly carried out on the device for adjusting the perpendicularity of the double telecentric lens so as to reduce the influence of air disturbance, and then the object carrying platform and the double telecentric lens are respectively adjusted until the adjustment is completed. The adjustment mode can greatly improve the adjustment accuracy.
Drawings
FIG. 1 is a schematic diagram of the optical path characteristics of a dual telecentric lens according to an embodiment;
FIG. 2 is a schematic diagram of the optical auto-collimation principle of an embodiment;
FIG. 3 is a schematic diagram illustrating a structure of a device for adjusting perpendicularity of a double telecentric lens according to an embodiment of the invention;
FIG. 4 is a schematic diagram of a self-calibration light path of a dual telecentric lens verticality adjustment apparatus according to an embodiment of the invention;
FIG. 5 is a schematic diagram of a dual telecentric lens verticality adjustment apparatus according to an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of a dual telecentric lens verticality adjustment apparatus according to another embodiment of the present invention;
FIG. 7 is a schematic diagram of a self-calibrating light path of a dual telecentric lens verticality adjustment apparatus according to another embodiment of the invention;
FIG. 8 is a schematic view illustrating an optical path of an adjustment carrier platform according to an embodiment of the invention;
fig. 9 is a schematic diagram of an optical path of an adjusted double telecentric lens according to an embodiment of the invention.
Detailed Description
The term "equal" or "identical" as used herein refers to equal or identical in consideration of reasonable errors, and not to equal or identical in absolute terms. The illumination angle, reflection angle or refraction angle of the light rays determined by the invention need to consider that the light rays have certain loss and certain reasonable errors in the medium, and are not angles in absolute sense. The invention will be described in further detail below with reference to the drawings by means of specific embodiments.
Fig. 1 is a schematic view of the optical characteristics of a double telecentric lens, in which, of the light rays incident into the double telecentric lens, the light rays that are parallel to the optical axis are incident, if and only if the propagation direction of the light rays that are parallel to the optical axis is unchanged, i.e., are incident parallel to the optical axis and exit parallel to the optical axis.
Fig. 2 is a schematic diagram of the principle of optical auto-collimation, when light passes through a reticle located at the focal plane of an objective lens, parallel light is formed through the objective lens. The parallel light is reflected by a reflector perpendicular to the optical axis, and then passes through the objective lens to form a reticle marking image on the focal plane to coincide with the marking. When the mirror is tilted by a small angle alpha, the reflected beam is tilted by an angle 2 alpha. Thus, it is possible to determine whether the lens is perpendicular or parallel to a certain plane in this way.
The embodiment of the invention provides a device for adjusting perpendicularity of a double telecentric lens, which comprises a parallel light source 1, a first spectroscope 2, a fourth spectroscope 7, a first reflecting mirror component 3, a second reflecting mirror component 8, and a second spectroscope 6, a third spectroscope 4, an objective lens 5 and a camera 9 which are sequentially arranged along a main axis light path 200, as shown in fig. 3 and 4. The parallel light source 1 is used to generate parallel light, and may be a single light source or a light source assembly composed of a light source and a lens. The principal axis light path 200 is a light path that is located on the central axis of the objective lens 5 and propagates along the axial direction, and the second beam splitter 6, the third beam splitter 4, the objective lens 5 and the camera 9 are all coaxially arranged along the principal axis light path 200, where the objective lens 5 can collect light, and the camera 9 is located on the focal point of the objective lens 5, so as to capture the collected light spots.
The first beam splitter 2, the second beam splitter 6 and the fourth beam splitter 7 are sequentially arranged along an incident light path 100 of the parallel light source 1, the incident light path 100 is a light path formed by linear propagation of parallel light emitted by the parallel light source 1, and the parallel light beams sequentially penetrate through the first beam splitter 2, the second beam splitter 6 and the fourth beam splitter 7 without refraction. Wherein the incident light path 100 is perpendicular to the principal axis light path 200.
The first beam splitter 2, the second beam splitter 6, the third beam splitter 4 and the fourth beam splitter 7 may have a light splitting surface, and after the light irradiates the beam splitter, a part of the light directly passes through the beam splitter, and another part of the light is reflected on the light splitting surface to form a light splitting light path.
The first mirror assembly 3 is located on the beam splitting optical path of the first beam splitter 2, the parallel light source 1 emits parallel light to the first beam splitter 2, the first beam splitter 2 splits and reflects a part of light to the first mirror assembly 3, the first mirror assembly 3 reflects the light split and reflected by the first beam splitter 2 to the third beam splitter 4, the third beam splitter 4 reflects the light split and reflected by the first mirror assembly 2 to the objective lens 5 along the direction parallel to the main axis optical path 200, and this whole optical path forms a first calibration optical path, so as to form a first light spot on the imaging of the camera 9. Wherein, the beam splitting angle of the first spectroscope 2, the reflection angle of the first reflecting mirror component 3 and the beam splitting angle of the third spectroscope 4 need to satisfy through reasonable configuration: finally, the light beam split-reflected by the third beam splitter 4 is directed to the objective lens 5 along the direction parallel to the main axis light path 200, and under this condition, the beam splitting angle of the first beam splitter 2, the reflection angle of the first reflecting mirror assembly 3, and the beam splitting angle of the third beam splitter 4 can be set as needed.
The second mirror assembly 8 is located on the beam splitting optical path of the fourth beam splitter 7, the parallel light emitted by the parallel light source 1 directly passes through the second beam splitter 6 and irradiates to the fourth beam splitter 7, the fourth beam splitter 7 irradiates a part of light beam to the second mirror assembly 8, the second mirror assembly 8 reflects the light beam reflected by the beam splitter 7 to the fourth beam splitter 7, the fourth beam splitter 7 is used for reflecting the light beam reflected by the second mirror assembly 8 to the second beam splitter 6, the second beam splitter is used for reflecting the light beam reflected by the fourth beam splitter 7 and transmitting through the third beam splitter 4, and the light beam transmitted through the third beam splitter 4 irradiates to the objective lens 5 along the direction parallel to the spindle optical path 200. This entire optical path forms a second calibration optical path, which forms a second spot on the image of the camera 9. Wherein, the beam splitting angle of the second beam splitter 6, the reflection angle of the second reflecting mirror component 8 and the beam splitting angle of the fourth beam splitter 7 need to satisfy through reasonable configuration: the light finally split-reflected by the second beam splitter 6 is directed to the objective lens 5 in a direction parallel to the principal axis optical path 200, under which conditions the splitting angle of the second beam splitter 6, the reflecting angle of the second mirror assembly 8 and the fourth beam splitter 7 can be set as desired.
As can be seen from the optical auto-collimation principle, when the light rays of the first optical path and the second optical path finally emitted to the objective lens 5 are parallel to the main axis optical path 200, the first light spot and the second light spot on the camera 9 are necessarily coincident. Based on this, the perpendicularity of the double telecentric lens can be determined.
In one embodiment, the first beam splitter 2, the second beam splitter 6, the third beam splitter 4 and the fourth beam splitter 7 are all cubic beam splitters with an angle of 45 degrees, that is, when the incident angle of the light on the beam splitting surface is 45 degrees, the light entering the beam splitter is perpendicular to the light exiting the beam splitter. In order to enhance the transmission of light, an antireflection film may be coated on the right-angle surface of each spectroscope. The bonding surface of the first spectroscope 2 and the second spectroscope 6 is plated with a semi-transparent semi-reflective film, and the bonding surface of the third spectroscope 4 and the fourth spectroscope 7 is plated with a semi-transparent semi-reflective film or a PBS film. The light beams entering the first beam splitter 2, the second beam splitter 6, the third beam splitter 4 and the fourth beam splitter 7 are perpendicular to the surfaces of the first beam splitter 2, the second beam splitter 6, the third beam splitter 4 and the fourth beam splitter 7, and the included angles between the light splitting surfaces of the first beam splitter 2, the second beam splitter 6, the third beam splitter 4 and the fourth beam splitter 7 and the corresponding incident light beams are 45 degrees.
In one embodiment, the first mirror assembly 3 is a pentaprism, a right angle prism, or a planar mirror. When the prism is a pentaprism, light rays are emitted from one vertical plane and emitted from the other vertical plane, so that the light rays can deflect 90 degrees to be emitted. When the prism is a right-angle prism, light rays are emitted from one vertical plane and the other vertical plane, reflected on the inclined plane and deflected by 90 degrees. In the case of a planar mirror, the planar mirror may be at an angle of 45 degrees to the light directed thereto, or may deflect the light 90 degrees to exit.
In one embodiment, the second mirror assembly 8 is a corner cube or a planar mirror. When the light beam is a pyramid prism, the light beam is reflected twice on the pyramid surface and finally is emitted parallel to the incident direction. When the plane mirror is a plane mirror, the plane mirror can be perpendicular to the incident light, so that the reflected light is emitted parallel to the incident direction.
In one embodiment, as shown in fig. 3, the parallel light source 1 includes a point laser 101 and an attenuation sheet 102 sequentially disposed along an incident light path 100. The point laser 101 emits laser light, the laser light forms parallel light beams, and the attenuation sheet 102 is used for attenuating the illumination intensity of the laser light and protecting the lens on the subsequent light path. The attenuation sheet 102 is used for attenuating the laser, and a low-power point laser can be selected to reduce the illumination intensity of the point laser emitted by the attenuation sheet, so that the use of the attenuation sheet 102 can be omitted, which is a conventional technical means for those skilled in the art, and is not described herein.
In one embodiment, as shown in fig. 5, the parallel light source 1 includes a point light source 103, a cross reticle 105, and a collimator objective 104 sequentially disposed along an incident light path 100, the cross reticle 105 being disposed proximate to the point light source 103 and located at a focal point of the collimator objective 104. The point light sources 103 emit light in a radial manner, and the light collimated by the collimator objective 104 forms parallel light. Since the parallel light source belongs to the common light source in the field, the person skilled in the art can choose other structures of parallel light sources according to actual needs.
The embodiment of the invention also provides a device for adjusting the perpendicularity of the double telecentric lens, which comprises a parallel light source 1, a first spectroscope 2, a first reflecting mirror component 3, a reflecting surface, a second spectroscope 6, a third spectroscope 4, an objective lens 5 and a camera 9 which are sequentially arranged along the light path of the main shaft, as shown in fig. 6 and 7. The parallel light source 1 is used to generate parallel light, and may be a single light source or a light source assembly composed of a light source and a lens. The main shaft light path is a light path which is located on the central axis of the objective lens 5 and propagates along the axial direction, the reflecting surface, the second spectroscope 6, the third spectroscope 4, the objective lens 5 and the camera 9 are coaxially arranged along the main shaft light path 200, the objective lens 5 can collect light, and the camera 9 is located on the focus of the objective lens 5, so that light spots formed by collection are shot.
The first beam splitter 2 and the second beam splitter 6 are sequentially arranged along an incident light path of the parallel light source 1, the incident light path is a light path formed by linear propagation of parallel light emitted by the parallel light source 1, and the parallel light sequentially penetrates through the first beam splitter 2 and the second beam splitter 6 without refraction. Wherein, the incident light path is perpendicular to the main shaft light path.
The first mirror assembly 3 is located on the beam splitting optical path of the first beam splitter 2, the parallel light source 1 emits parallel light to the first beam splitter 2, the first beam splitter 2 splits and reflects a part of light to the first mirror assembly 3, the first mirror assembly 3 reflects the light split and reflected by the first beam splitter 2 to the third beam splitter 4, the third beam splitter 4 reflects the light reflected by the first mirror assembly 2 to the objective lens 5 along the direction parallel to the main axis optical path, the whole optical path forms a first calibration optical path, and a first light spot is formed on the imaging of the camera 9. Wherein, the beam splitting angle of the first spectroscope 2, the reflection angle of the first reflecting mirror component 3 and the beam splitting angle of the third spectroscope 4 need to satisfy through reasonable configuration: finally, the light beam split-reflected by the third beam splitter 4 is directed to the objective lens 5 along the direction parallel to the main axis light path 200, and under this condition, the beam splitting angle of the first beam splitter 2, the reflection angle of the first reflecting mirror assembly 3, and the beam splitting angle of the third beam splitter 4 can be set as needed.
The reflecting surface is located on the beam splitting optical path of the second beam splitter 6, the parallel light emitted by the parallel light source 1 directly passes through the first beam splitter 2 and irradiates the second beam splitter 6, a part of light passes through the second beam splitter 6, another part of light is split and reflected by the first beam splitter 2, the reflecting surface is used for reflecting the light split and reflected by the second beam splitter 6 to the second beam splitter 6, and the light reflected by the reflecting surface sequentially passes through the second beam splitter 6 and the third beam splitter 4 along the direction parallel to the main axis optical path and irradiates the objective lens 5. This entire optical path forms a second calibration optical path, which forms a second spot on the image of the camera 9. Wherein, the light splitting angle of the second beam splitter 6 and the reflection angle of the reflection surface need to satisfy through reasonable configuration: the light finally reflected by the reflecting surface is directed to the objective lens 5 in a direction parallel to the optical path of the principal axis, and under this condition, the splitting angle of the second beam splitter 6 and the reflecting angle of the reflecting surface can be set as needed.
As can be seen from the optical auto-collimation principle, when the light rays of the first optical path and the second optical path finally emitted to the objective lens 5 are parallel to the main axis optical path, the first light spot and the second light spot on the imaging of the camera 9 are necessarily coincident. Based on this, the perpendicularity of the double telecentric lens can be determined.
In one embodiment, the first beam splitter 2, the second beam splitter 6 and the third beam splitter 4 are all cubic beam splitters with an angle of 45 degrees, that is, when the incident angle of the light on the beam splitting surface is 45 degrees, the light incident into the beam splitter is perpendicular to the light exiting the beam splitter. In order to enhance the transmission of light, an antireflection film may be coated on the right-angle surface of each spectroscope. The bonding surface of the first spectroscope 2 and the second spectroscope 6 is plated with a semi-transparent semi-reflective film, and the bonding surface of the third spectroscope 4 is plated with a semi-transparent semi-reflective film or a PBS film. The light beams entering the first beam splitter 2, the second beam splitter 6 and the third beam splitter 4 should be perpendicular to the surfaces of the first beam splitter 2, the second beam splitter 6 and the third beam splitter 4, and the included angles between the light splitting surfaces of the first beam splitter 2, the second beam splitter 6 and the third beam splitter 4 and the corresponding incident light beams are 45 degrees.
Further, as shown in fig. 6 and 7, one of the surfaces of the second beam splitter 6 is coated with a reflective film on the side of the beam splitter path. The light cannot be emitted due to the coating with the reflective film, and the spectroscopic light is reflected by the reflective film, thereby penetrating the second spectroscope 6, the reflective film forming the reflective surface.
In another embodiment, the reflecting surface is a mirror independent of the second beam splitter 6, which may be in particular a planar mirror, a corner cube or other mirror.
In one embodiment, the first mirror assembly 3 is a pentaprism, a right angle prism, or a planar mirror. When the prism is a pentaprism, light rays are emitted from one vertical plane and emitted from the other vertical plane, so that the light rays can deflect 90 degrees to be emitted. When the prism is a right-angle prism, light rays are emitted from one vertical plane and the other vertical plane, reflected on the inclined plane and deflected by 90 degrees. In the case of a planar mirror, the planar mirror may be at an angle of 45 degrees to the light directed thereto, or may deflect the light 90 degrees to exit.
In one embodiment, as shown in fig. 3, the parallel light source 1 includes a point laser 101 and an attenuation sheet 102 sequentially disposed along an incident light path 100. The point laser 101 emits laser light, the laser light forms parallel light beams, and the attenuation sheet 102 is used for attenuating the illumination intensity of the laser light and protecting the lens on the subsequent light path. The attenuation sheet 102 is used for attenuating the laser, and a low-power point laser can be selected to reduce the illumination intensity of the point laser emitted by the attenuation sheet, so that the use of the attenuation sheet 102 can be omitted, which is a conventional technical means for those skilled in the art, and is not described herein.
In one embodiment, as shown in fig. 5, the parallel light source 1 includes a point light source 103, a cross reticle 105, and a collimator objective 104 sequentially disposed along an incident light path 100, the cross reticle 105 being disposed proximate to the point light source 103 and located at a focal point of the collimator objective 104. The point light sources 103 emit light in a radial manner, and the light collimated by the collimator objective 104 forms parallel light. Since the parallel light source belongs to the common light source in the field, the person skilled in the art can choose other structures of parallel light sources according to actual needs.
The embodiment of the invention also provides a method for adjusting the perpendicularity of the double telecentric lens, which comprises the following steps:
(1) The adjustment device of the perpendicularity of the double telecentric lens in any embodiment is used, so that the parallel light source emits parallel light to the first spectroscope, at this time, imaging in the camera is observed, when two misaligned light spots exist in the imaging, the whole adjustment device is not adjusted in place, and the adjustment device needs to be adjusted, and the adjustment object is any one or more of the parallel light source 1, the first spectroscope 2, the fourth spectroscope 7, the first reflecting mirror assembly 3, the second reflecting mirror assembly 8, the second spectroscope 6, the third spectroscope 4, the objective lens 5 and the camera 9, specifically, the angle, the distance and the like are adjusted. In the adjustment process, imaging in the camera 9 is continuously observed until two light spots in the imaging coincide, and self-calibration of the adjustment device is completed. The self-calibration is performed on the adjusting device, so that the influence of air disturbance can be reduced, and the accuracy of subsequent adjustment is improved.
(2) After the self-calibration of the adjustment device is completed, as shown in fig. 8, the loading platform 10 is disposed on the incident light path of the adjustment device after the self-calibration is completed, so that the parallel light transmitted through the adjustment device is irradiated onto the loading platform 10. The object carrying platform 10 reflects the transmitted light to the second beam splitter 6, and the second beam splitter 6 reflects the light reflected by the object carrying platform 10 to the objective lens 5. Observing the imaging in the camera, when two misaligned light spots exist in the imaging, indicating that the carrying platform 10 is not perpendicular to the incident light path, adjusting the angle of the carrying platform 10 at the moment, and continuously observing the imaging in the camera until the two light spots in the imaging are overlapped, thereby completing the calibration of the carrying platform. At this time, the loading platform 10 is perpendicular to the incident light path.
(3) After the adjustment of the carrying platform 10 is completed, as shown in fig. 9, the double telecentric lens 11 is disposed between the adjustment device and the carrying platform 10 after the calibration of the carrying platform is completed, so that the parallel light sequentially passes through the adjustment device and the double telecentric lens 11 and irradiates onto the carrying platform 10. The object carrying platform 10 transmits the reflected light to the second beam splitter 6 through the double telecentric lens 11, and the second beam splitter 6 reflects the light reflected by the object carrying platform 10 to the objective lens 5. Observing the imaging in the camera, when two misaligned light spots exist in the imaging, the optical axis of the double telecentric lens 11 is not perpendicular to the carrying platform 10, adjusting the angle of the double telecentric lens 11 and/or the distance between the double telecentric lens and the carrying platform 10, continuously observing the camera until the two light spots in the imaging are coincident, and completing the adjustment of the perpendicularity of the double telecentric lens 11, wherein the optical axis of the double telecentric lens 11 is perpendicular to the carrying platform 10.
The foregoing is a further detailed description of the invention in connection with specific embodiments, and it is not intended that the invention be limited to such description. It will be apparent to those skilled in the art that several simple deductions or substitutions can be made without departing from the spirit of the invention.
Claims (5)
1. The utility model provides an adjusting device of two telecentric lens straightness that hangs down which characterized in that:
the device comprises a parallel light source, a first spectroscope, a fourth spectroscope, a first reflecting mirror component, a second spectroscope, a third spectroscope, an objective lens and a camera, wherein the second spectroscope, the third spectroscope, the objective lens and the camera are sequentially arranged along a main shaft light path, and the camera is positioned on a focus of the objective lens; the first spectroscope, the second spectroscope and the fourth spectroscope are sequentially arranged along an incident light path of the parallel light source, and the incident light path is perpendicular to the main shaft light path; the first reflecting mirror component is positioned on a light splitting path of the first spectroscope, the first reflecting mirror component is used for reflecting the light rays split and reflected by the first spectroscope to the third spectroscope, and the third spectroscope is used for reflecting the light rays reflected by the first reflecting mirror component to the objective lens along the direction parallel to the light path of the main shaft; the second reflecting mirror component is positioned on a light splitting path of the fourth spectroscope, the second reflecting mirror component is used for reflecting the light rays split and reflected by the fourth spectroscope to the fourth spectroscope, the fourth spectroscope is used for reflecting the light rays reflected by the second reflecting mirror component to the second spectroscope, the second spectroscope is used for reflecting the light rays reflected by the fourth spectroscope to pass through the third spectroscope and irradiate the objective lens along the direction parallel to the light path of the main shaft, the first spectroscope, the second spectroscope, the third spectroscope and the fourth spectroscope are all cube light splitting prisms, and the first reflecting mirror component is a pentaprism, a right angle prism or a plane reflecting mirror; (1) Using a double telecentric lens perpendicularity adjusting device, enabling a parallel light source to emit parallel light to a first spectroscope, observing imaging in a camera, adjusting the adjusting device until two light spots in imaging coincide when two misaligned light spots exist in imaging, and completing self calibration of the adjusting device;
(2) Arranging the object carrying platform on an incident light path of the adjusting device with self calibration completed, enabling the parallel light transmitted through the adjusting device to irradiate the object carrying platform, observing imaging in a camera, and adjusting the object carrying platform until two light spots in the imaging coincide when two light spots which are not coincident exist in the imaging, so as to complete calibration of the object carrying platform;
(3) And setting the double telecentric lens between the adjusting device which completes the calibration of the carrying platform and the carrying platform, enabling parallel light to sequentially penetrate through the adjusting device and the double telecentric lens and irradiate the carrying platform, observing imaging in the camera, and adjusting the double telecentric lens when two misaligned light spots exist in the imaging until the two light spots in the imaging are overlapped, thus completing the adjustment of the perpendicularity of the double telecentric lens.
2. The adjustment device of claim 1, wherein:
the second reflecting mirror component is a pyramid prism or a plane reflecting mirror.
3. The adjustment device of claim 1, wherein:
the parallel light source comprises a point light source, a cross reticle and a collimating objective lens, wherein the point light source, the cross reticle and the collimating objective lens are sequentially arranged along an incident light path, and the cross reticle is placed close to the point light source and is positioned on a focus of the collimating objective lens.
4. The adjustment device of claim 1, wherein:
the parallel light source comprises a point laser and an attenuation sheet which are arranged in sequence along an incident light path.
5. The utility model provides an adjusting device of two telecentric lens straightness that hangs down which characterized in that:
the device comprises a parallel light source, a first spectroscope, a first reflecting mirror component, a reflecting surface, a second spectroscope, a third spectroscope, an objective lens and a camera which are sequentially arranged along a main shaft light path, wherein the camera is positioned on a focus of the objective lens; the first spectroscope and the second spectroscope are sequentially arranged along an incident light path of the parallel light source, and the incident light path is perpendicular to the main shaft light path; the first reflecting mirror component is positioned on a light splitting path of the first spectroscope, the first reflecting mirror component is used for reflecting the light rays split and reflected by the first spectroscope to the third spectroscope, and the third spectroscope is used for reflecting the light rays reflected by the first reflecting mirror component to the objective lens along the direction parallel to the light path of the main shaft; the reflection surface is positioned on a beam splitting optical path of the second beam splitter and is used for reflecting the light rays split by the second beam splitter to the second beam splitter, the light rays reflected by the reflection surface sequentially penetrate through the second beam splitter and the third beam splitter along the direction parallel to the main shaft optical path and are emitted to the objective lens, the first beam splitter, the second beam splitter and the third beam splitter are all cube beam splitting prisms, the side surface of the second beam splitter positioned on the beam splitting optical path is plated with a reflection film, and the reflection film is the reflection surface; or the reflecting surface is a plane reflecting mirror; or the reflecting surface is a pyramid prism;
(1) Using a double telecentric lens perpendicularity adjusting device, enabling a parallel light source to emit parallel light to a first spectroscope, observing imaging in a camera, adjusting the adjusting device until two light spots in imaging coincide when two misaligned light spots exist in imaging, and completing self calibration of the adjusting device;
(2) Arranging the object carrying platform on an incident light path of the adjusting device with self calibration completed, enabling the parallel light transmitted through the adjusting device to irradiate the object carrying platform, observing imaging in a camera, and adjusting the object carrying platform until two light spots in the imaging coincide when two light spots which are not coincident exist in the imaging, so as to complete calibration of the object carrying platform;
(3) And setting the double telecentric lens between the adjusting device which completes the calibration of the carrying platform and the carrying platform, enabling parallel light to sequentially penetrate through the adjusting device and the double telecentric lens and irradiate the carrying platform, observing imaging in the camera, and adjusting the double telecentric lens when two misaligned light spots exist in the imaging until the two light spots in the imaging are overlapped, thus completing the adjustment of the perpendicularity of the double telecentric lens.
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| CN110440720A (en) * | 2019-08-14 | 2019-11-12 | 中国科学院长春光学精密机械与物理研究所 | A kind of device for detecting parallelism of chip and substrate |
| CN110702218B (en) * | 2019-09-29 | 2021-07-20 | 中国科学院空间应用工程与技术中心 | Laser beam pointing measurement device and method |
| CN114373386A (en) * | 2021-12-07 | 2022-04-19 | 苏州华星光电技术有限公司 | Attitude adjusting device and control method thereof |
| CN114326138B (en) * | 2022-01-05 | 2023-06-13 | 中国工程物理研究院激光聚变研究中心 | Optical axis adjustment method for high-precision rotary table |
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