CN110702218B - Laser beam pointing measurement device and method - Google Patents

Laser beam pointing measurement device and method Download PDF

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CN110702218B
CN110702218B CN201910933390.0A CN201910933390A CN110702218B CN 110702218 B CN110702218 B CN 110702218B CN 201910933390 A CN201910933390 A CN 201910933390A CN 110702218 B CN110702218 B CN 110702218B
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axis
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展月英
熊建
张春晖
熊蛟
石紫元
孙扬
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Technology and Engineering Center for Space Utilization of CAS
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    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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Abstract

The invention relates to a laser beam pointing measurement device and method, and relates to the field of laser beam pointing measurement. The device includes: a beam reduction mirror group M4, a first beam splitter M1, a second beam splitter M2, a rear reflector M3 and a camera system M5; the main optical axis of the beam reduction lens group, the center of the first beam splitter M1 and the center of the second beam splitter M2 are on the same straight line; the device is used for detecting and displaying the light spots of the incident laser, and calculating the light beam direction according to the coordinate information of the continuous light spots, so that the angle drift and the flat drift can be calculated simultaneously. Meanwhile, a reflector is not used, so that errors caused by inaccurate adjustment of the reflector are avoided; and a focusing lens is not used, so that errors caused by the fact that the optical axes are not aligned and the camera placement position cannot be accurately positioned at the focal point are avoided.

Description

Laser beam pointing measurement device and method
Technical Field
The invention relates to the field of laser beam pointing measurement, in particular to a laser beam pointing measurement device and method.
Background
A device for measuring information of a pointing angle of a light beam is proposed in patent 201710934170.0 "a device for measuring stability of pointing of a light beam of a laser". The detected light beam is incident near the center of the detection plane of the image acquisition unit 3 after passing through the f-theta field lens 1 and the light intensity regulator 2, and the detection plane of the image acquisition unit 3 is positioned on the back focal plane of the f-theta field lens 1, so that the laser spot emitted by the detected laser is obtained. And then the upper computer calculates the angle information of the pointing stability of the laser beam according to the image information acquired by the image acquisition unit 3. The two-dimensional translation stage 5 is used to adjust the camera position so that the camera center is aligned with the optical axis of the field lens 1. The direction of an incident beam comprises information of four dimensions such as up/down translation, left/right translation, an incident angle, a rotating angle and the like, and the patent scheme can only measure angle drift and cannot measure flat drift.
Disclosure of Invention
The invention aims to solve the technical problem of providing a laser beam pointing measurement device and method aiming at the defects of a device for measuring beam pointing angle information in the prior art.
The technical scheme for solving the technical problems is as follows:
a laser beam pointing measurement apparatus, comprising: the device comprises a beam shrinking mirror group, a first beam splitter, a second beam splitter, a retro-reflector and a camera system; the main optical axis of the beam reducing mirror group, the center of the first beam splitter and the center of the second beam splitter are on the same straight line;
the beam reducing mirror group is used for reducing the beam diameter of incident laser;
the first beam splitter is used for splitting incident laser into two beams according to a first preset beam splitting ratio, wherein one beam is transmitted to the camera system, and the other beam is transmitted to the second beam splitter;
the second beam splitter is used for splitting the incident laser into two beams according to a second preset beam splitting ratio, wherein one beam is transmitted into the backward reflector;
the backward reflecting mirror is used for reflecting an incident light beam and then transmitting the incident light beam into the camera system, the reflecting direction is parallel to the incident direction and opposite to the incident direction, the distance between the incident direction light beam and the backward reflecting mirror is l3, the distance between the reflecting direction light beam and the backward reflecting mirror is l6, and l3 is l 6;
the camera system is used for detecting and displaying a light spot of the incident laser; and the system is also used for calculating the beam pointing direction according to the coordinate information of the continuous light spots.
The invention has the beneficial effects that: the device which combines the beam reducing mirror group, the first beam splitter, the second beam splitter, the retro-reflector and the camera system is used for detecting and displaying the light spots of the incident laser, calculating the light beam direction according to the coordinate information of continuous light spots, and simultaneously calculating the angle drift and the level drift. Meanwhile, a reflector is not used, so that errors caused by inaccurate adjustment of the reflector are avoided; the device has the advantages that a focusing lens is not used, errors caused by the fact that optical axes are not aligned and the camera placing position cannot be accurately located at a focus point are avoided, the construction difficulty of the measuring system is reduced, fewer optical elements are used, the difficulty in achieving the light beam pointing to the measuring system and the measuring errors are greatly reduced, measurement of four-dimensional information can be achieved only by one detector, an image acquisition card does not need to be added, the light beam pointing to the measuring system is directly connected with a computer, and the measuring cost is reduced.
On the basis of the technical scheme, the invention can be further improved as follows.
Further, the camera system is specifically configured to receive continuous light spots, where the light spots include a first light spot and a second light spot, and acquire an x-coordinate of the first light spot1And ordinate y1The abscissa x of the second light spot2And ordinate y2(ii) a And also particularly for when the incident beam only has an angle of incidence, according to x2And y2Calculating an incident angle; also specifically for when the incident beam only has a rotation angle, according to x2And y2Calculating a rotation angle;
and also specifically for when there is only translation of the incident beam in the Y direction, according to Y2Calculating the translation amount of the Y axis;
it is also particularly useful when there is only a translation of the incident beam in the X direction, according to X2Calculating the translation amount of an X axis;
and also in particular for when said angle of incidence and said angle of rotation are both non-zero and when the X-axis and the Y-axis are translated, according to X1、y1、x2And y2Calculating the translation amount and calculating the rotation angle according to x1、y1、x2And y2Calculating a rotation angle according to x1、y1、x2And y2And calculating the translation amount.
The beneficial effect of adopting the further scheme is that: acquiring an abscissa x of the first spot by means of a camera system1And ordinate y1The abscissa x of the second light spot2And ordinate y2(ii) a And dividing the drift state of the incident beam according to the drift condition of the incident beam, and calculating the angle drift amount and the translation amount by means of the specific coordinate information of the light spotAnd the flat drift is calculated, so that the light beam pointing information can be more comprehensively acquired.
Further, the camera system is particularly useful for calculating the angle of incidence phi according to the following formula when the incident beam only has an angle of incidence,
Figure GDA0003087264240000031
wherein l1 is the distance between the beam reducing mirror group and the first beam splitter; l2 is the distance between the first beam splitter and the second beam splitter; l6 is the distance of the retroreflector from the first beam splitter; l3 is the distance of the retroreflector from the second beam splitter; l7 is the distance of the first beam splitter from the plane of the camera system;
or, when there is only a rotation angle of the incident light beam, the rotation angle alpha is calculated according to the following formula,
Figure GDA0003087264240000032
the beneficial effect of adopting the further scheme is that: according to the abscissa x of the second light spot2And ordinate y2The angle of rotation is calculated through the formula when incident beam only has the incident angle to combine the geometric relation, and the formula when incident beam only has the angle of rotation calculates the incident angle to obtain the angle of incident beam and float, through optimizing back measuring device structure degree of difficulty and reducing, the angle that rethread simple formula was calculated and just can be obtained incident beam floats information, makes the directional measuring process of whole light beam simple easy to operate, and simple structure makes stability stronger simultaneously.
Further, the camera system is specifically configured to, when there is only translation of the incident beam in the Y direction, calculate the Y-axis translation amount ay according to the following formula,
ΔY＝|y2|；
or, when there is only translation of the incident beam in the X-axis direction, the X-axis translation amount ax is calculated according to the following formula,
ΔX＝|x2|。
the beneficial effect of adopting the further scheme is that: according to the abscissa x of the second light spot2And ordinate y2When the translation takes place for the actual light beam, the removal orbit of facula, through the formula calculation facula X, Y axle translation volume to obtain the translation volume at X, Y axle of incident beam, through optimizing back measuring device structure degree of difficulty and reducing, the simple formula of rethread is calculated and just can be obtained incident beam's flat information of floating, makes the directional measuring process of whole light beam simple easy operation, and simple structure makes stability stronger simultaneously.
Further, the camera system is specifically configured to calculate the incident angle Φ according to the following formula when the incident angle and the rotation angle are both non-zero and the X-axis and the Y-axis are translated:
Figure GDA0003087264240000041
wherein r is2Calculating the radius of the track circle where the second light spot is located according to the following formula:
Figure GDA0003087264240000042
wherein λ is a constant, and a difference Δ r between radii of a track circle where the first light spot is located and a track circle where the second light spot is located, and λ and Δ r are calculated according to the following formulas respectively:
Figure GDA0003087264240000043
Figure GDA0003087264240000051
alternatively, the rotation angle alpha is calculated according to the following formula,
Figure GDA0003087264240000052
or, calculating the X-axis translation amount Δ X according to the following formula:
ΔX＝|x4|,
wherein x is4The center of a track circle O of the second light spot4X is calculated according to the following formula4：
Figure GDA0003087264240000053
Or, calculating the Y-axis translation amount Δ Y according to the following formula:
ΔY＝|y4|，
wherein y is4The center of a track circle O of the second light spot4Y is calculated according to the following formula4：
Figure GDA0003087264240000054
The beneficial effect of adopting the further scheme is that: according to the qualitative analysis of the scheme, when the angle drift and the plane drift exist simultaneously, the x coordinate of the second light spot is determined2And ordinate y2The abscissa x of the first spot1And ordinate y1Make supplementary symmetry point, according to the geometric relation, combine actual formula to obtain incident angle, rotation angle and the translation volume at X, Y axle of incident beam, through optimizing back measuring device, only use a camera, the quantity of detector has been reduced, the error that brings because of the focus has been reduced, the cost is also reduced, and when incident beam floats the condition complicacy, promptly when angle drifts and drift and exists simultaneously, this scheme need not survey the facula repeatedly many times, just can once calculate the angle drift and the drift of incident beam obtaining the coordinate information of accurate first facula and second facula, the degree of difficulty of measuring has been reduced, the measurement work load has been alleviateed.
Another technical solution of the present invention for solving the above technical problems is as follows:
a method of laser beam pointing measurement, comprising the steps of:
s1, arranging the main optical axis of the beam reducing mirror group, the center of the first beam splitter and the center of the second beam splitter on the same straight line;
s2, the beam reducing mirror group reduces the beam diameter of the incident laser;
s3, the first beam splitter splits the incident laser into two beams according to a first preset beam splitting ratio, wherein one beam is transmitted to the camera system, and the other beam is transmitted to the second beam splitter;
s4, the camera system displays light spots projected on the camera system by the light beams according to the light beams transmitted by the first beam splitter, and detects continuous light spot coordinate information;
s5, the second beam splitter divides the incident laser into two beams according to a second preset beam splitting ratio, wherein one beam is transmitted to the backward reflector;
s6, reflecting the incident light beam by the retroreflector and then transmitting the reflected light beam into the camera system, wherein the reflecting direction is parallel to the incident direction and opposite to the incident direction, the distance between the incident direction light beam and the retroreflector is l3, the distance between the reflecting direction light beam and the retroreflector is l6, and l3 is l 6;
s7, the camera system displays the light spot of the light beam transmitted by the backward reflector and detects the coordinate information of the light spot of the light beam;
and S8, calculating the light beam pointing information according to the coordinate information.
The invention has the beneficial effects that: the device which combines the beam reducing mirror group, the first beam splitter, the second beam splitter, the retro-reflector and the camera system is used for detecting and displaying the light spots of the incident laser, calculating the light beam direction according to the coordinate information of continuous light spots, and simultaneously calculating the angle drift and the level drift. Meanwhile, a reflector is not used, so that errors caused by inaccurate adjustment of the reflector are avoided; the device has the advantages that a focusing lens is not used, errors caused by the fact that optical axes are not aligned and the camera placing position cannot be accurately located at a focus point are avoided, the construction difficulty of the measuring system is reduced, fewer optical elements are used, the difficulty in achieving the light beam pointing to the measuring system and the measuring errors are greatly reduced, measurement of four-dimensional information can be achieved only by one detector, an image acquisition card does not need to be added, the light beam pointing to the measuring system is directly connected with a computer, and the measuring cost is reduced.
On the basis of the technical scheme, the invention can be further improved as follows.
Further, the detecting the spot coordinate information of the light beam specifically includes: acquiring position information of a first light spot and a second light spot projected on the camera system; calculating the abscissa x of the first light spot according to the position information1And ordinate y1Calculating the abscissa x of the second light spot2And ordinate y2；
The calculating of the beam pointing information according to the coordinate information specifically includes:
when the incident beam only has an incident angle, according to x2And y2Calculating an incident angle;
when the incident beam only has a rotation angle, according to x2And y2Calculating a rotation angle;
when the incident beam has only translation in the Y direction, according to Y2Calculating the translation amount of the Y axis;
when there is only translation of the incident beam in the X direction, according to X2Calculating the translation amount of an X axis;
when the incident angle and the rotation angle are not zero and the X-axis and the Y-axis are translated, according to X1、y1、x2And y2Calculating the translation amount and calculating the rotation angle according to x1、y1、x2And y2Calculating a rotation angle according to x1、y1、x2And y2And calculating the translation amount.
The beneficial effect of adopting the further scheme is that: acquiring an abscissa x of the first spot by means of a camera system1And ordinate y1The abscissa x of the second light spot2And ordinate y2(ii) a And dividing the possible drift state of the incident light beam according to the drift condition of the incident light beamThe angle drift amount and the translation amount are calculated by means of the specific coordinate information of the light spots, compared with the method for calculating the angle drift according to the light intensity in the prior art, the method of the scheme can calculate the angle drift and the plane drift through the light spot coordinate information, and can acquire the light beam pointing information more comprehensively.
Further, when there is only an incident angle of the incident beam, the incident angle phi is calculated according to the following formula,
Figure GDA0003087264240000071
wherein l1 is the distance between the beam reducing mirror group and the first beam splitter; l2 is the distance between the first beam splitter and the second beam splitter; l6 is the distance of the retroreflector from the first beam splitter; l3 is the distance of the retroreflector from the second beam splitter; l7 is the distance of the first beam splitter from the plane of the camera system;
or, when there is only a rotation angle of the incident light beam, the rotation angle alpha is calculated according to the following formula,
Figure GDA0003087264240000081
the beneficial effect of adopting the further scheme is that: according to the abscissa x of the second light spot2And ordinate y2The angle of rotation is calculated through the formula when incident beam only has the incident angle to combine the geometric relation, and the formula when incident beam only has the angle of rotation calculates the incident angle to obtain the angle of incident beam and float, through optimizing back measuring device structure degree of difficulty and reducing, the angle that rethread simple formula was calculated and just can be obtained incident beam floats information, makes the directional measuring process of whole light beam simple easy to operate, and simple structure makes stability stronger simultaneously.
Further, when there is only translation of the incident beam in the Y direction, the Y-axis translation amount ay is calculated according to the following formula,
ΔY＝|y2|；
or, when the incident light beam only has translation in the X-axis direction, the X-axis translation amount DeltaX is calculated according to the following formula,
ΔX＝|x2|。
the beneficial effect of adopting the further scheme is that: according to the abscissa x of the second light spot2And ordinate y2When the translation takes place for the actual light beam, the removal orbit of facula, through the formula calculation facula X, Y axle translation volume to obtain the translation volume at X, Y axle of incident beam, through optimizing back measuring device structure degree of difficulty and reducing, the simple formula of rethread is calculated and just can be obtained incident beam's flat information of floating, makes the directional measuring process of whole light beam simple easy operation, and simple structure makes stability stronger simultaneously.
Further, when the incident angle and the rotation angle are not zero and the X-axis and the Y-axis are shifted, the incident angle Φ is calculated according to the following formula:
Figure GDA0003087264240000082
wherein r is2Calculating the radius of the track circle where the second light spot is located according to the following formula:
Figure GDA0003087264240000091
the lambda constant and the radius difference delta r between the track circle of the first light spot and the track circle of the second light spot are respectively calculated according to the following formula:
Figure GDA0003087264240000092
Figure GDA0003087264240000093
alternatively, the rotation angle alpha is calculated according to the following formula,
Figure GDA0003087264240000094
or, calculating the X-axis translation amount Δ X according to the following formula:
ΔX＝|x4|,
wherein x is4The center of a track circle O of the second light spot4X is calculated according to the following formula4：
Figure GDA0003087264240000095
Or, calculating the Y-axis translation amount Δ Y according to the following formula:
ΔY＝|y4|，
wherein y is4The center of a track circle O of the second light spot4Y is calculated according to the following formula4：
Figure GDA0003087264240000096
The beneficial effect of adopting the further scheme is that: according to the qualitative analysis of the scheme, when the angle drift and the plane drift exist simultaneously, the x coordinate of the second light spot is determined2And ordinate y2The abscissa x of the first spot1And ordinate y1Make supplementary symmetry point, according to the geometric relation, combine actual formula to obtain incident angle, rotation angle and the translation volume at X, Y axle of incident beam, through optimizing back measuring device, only use a camera, the quantity of detector has been reduced, error because of bringing to the focus has been reduced, the cost is also reduced, and when incident beam floats the condition complicacy, promptly when angle floats and floats to exist simultaneously, this scheme need not survey the facula repeatedly many times, just can once calculate the angle of incident beam and float obtaining the coordinate information of accurate first facula and second facula, the degree of difficulty of measuring has been reduced, alleviate the degree of measurement, the translation volume of incident beam, through the measuring device of the back of optimizing, need only use a camera, the quantity of detector, reduce the error because of bringing to the focus, and the cost is also reduced, and when the incident beam floats the condition is complicated, promptly when the angle floats and float to exist simultaneously, this scheme does not need repeatedly survey the facula many times, just can once calculate the angle of incident beam and float obtaining the coordinate information of accurate first facula and second facula, the degree of measuring degree of difficulty of has been reduced, the measuring device is suitable for measuring device, can be used for measuring device, the measuring device, can be used for measuring device, and is suitable for measuring deviceThe measurement effort is taken.
Advantages of additional aspects of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
FIG. 1 is a block diagram of a laser beam pointing measurement device according to an embodiment of the present invention;
FIG. 2 is a schematic flow chart of a laser beam pointing measurement method according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of an incident beam with an angular drift provided by an embodiment of the present invention;
FIG. 4 is a schematic diagram of the movement locus of the light spot when the incident light beam is angularly drifted according to the embodiment of the present invention;
FIG. 5 is a schematic diagram of beam motion of an incident beam with translation in the X-axis according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a light spot at the camera plane when the incident light beam is translated in the Y-axis according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of a spot at the camera plane when there is both a flat drift and an angular drift in an incident beam provided by an embodiment of the invention;
fig. 8 is a schematic diagram of spots of an incident light beam at different drifts according to an embodiment of the present invention.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth to illustrate, but are not to be construed to limit the scope of the invention.
As shown in fig. 1, a laser beam pointing measurement apparatus provided for an embodiment of the present invention includes: a beam reduction mirror group M4, a first beam splitter M1, a second beam splitter M2, a rear reflector M3 and a camera system M5; the main optical axis of the beam reduction lens group M4, the center of the first beam splitter M1 and the center of the second beam splitter M2 are on the same straight line;
the distance between the emergent surface of the beam reducing mirror group M4 and the center of the first beam splitter M1 is l 1; the center of the first beam splitter M1 and the center of the second beam splitter M2 are on the same straight line, and the distance between the centers is l 2; the distances between the exit surface of the retroreflector M3 and the center of the first beam splitter M1 are l6 respectively, and the distances between the exit surface of the retroreflector M3 and the center of the second beam splitter M2 are l 3; the sensor plane of the camera module is at a distance l7 from the center of the first beam splitter M1; wherein l1 ═ l3 ═ l6 ═ l 7;
a beam reduction mirror group M4 for reducing the beam diameter of the incident laser;
the beam-reducing mirror group M4 can comprise two beam-reducing mirrors; the beam reduction mirror M4 reduces the incident beam diameter, preferably to below 1 mm.
A first beam splitter M1 for splitting the incident laser light into two beams according to a first preset splitting ratio, wherein one beam propagates to the camera system M5 and the other beam propagates to the second beam splitter M2;
the first beam splitter M1 splits the incident laser into two beams according to a first preset beam splitting ratio, wherein one beam can be reflected by 90 degrees and enter the camera system M5, and the other beam continues to propagate to the second beam splitter M2 along the original direction;
the preset beam splitting ratio of the first beam splitter M1 is T: R, where T represents transmittance, R represents reflectance, T may range from 80 to 95, R may range from 5 to 20, and T + R may be 100; the T% of the incident beam is reflected to enter the camera system M5, and the R% of the incident beam continuously propagates to the second beam splitter M2 along the original direction;
a second beam splitter M2 for splitting the incident laser light into two beams according to a second preset splitting ratio, wherein one beam propagates into the retro-reflector M3;
the second beam splitter M2 splits the incident laser light into two beams according to a second preset splitting ratio, wherein one beam can be reflected at 90 degrees and enter the retroreflector M3, and the other beam continues to propagate along the original direction;
the preset beam splitting ratio of the second beam splitter M2 is T: R, T represents transmittance, R represents reflectance, the value range of T may be similar to that of R, and T + R is 100; the T% of the incident beam is reflected to enter a backward reflector M3, and the R% of the incident beam continuously propagates along the original direction;
a backward reflector M3, configured to reflect an incident light beam and propagate the reflected light beam into the camera system M5, where the reflection direction is parallel to the incident direction and opposite to the incident direction, the distance between the light beam in the incident direction and the backward reflector M3 is l3, the distance between the light beam in the reflection direction and the backward reflector M3 is l6, and l3 is l 6;
a camera system M5 for detecting and displaying a spot of the incident laser light; and the system is also used for calculating the beam pointing direction according to the coordinate information of the continuous light spots.
The camera system M5 may include a camera and a computer system, and the camera may adopt a CMOS camera or a CCD camera; the camera detects the incident light spot and acquires light spot information, and the computer system calculates the coordinates of the light spot on the sensor plane of the camera according to the light spot information and calculates the incident angle, the rotation angle and the translation amount of the incident light beam on the X, Y axis according to the calculated coordinates of the light spot and the position distance information of each component.
The device which combines the beam reduction mirror group M4, the first beam splitter M1, the second beam splitter M2, the backward reflecting mirror M3 and the camera system M5 is used for detecting and displaying the light spots of the incident laser, and the light beam pointing direction is calculated according to the coordinate information of continuous light spots, so that the angle drift and the plane drift can be calculated simultaneously. Meanwhile, a reflector is not used, so that errors caused by inaccurate adjustment of the reflector are avoided; the device has the advantages that a focusing lens is not used, errors caused by the fact that optical axes are not aligned and the camera placing position cannot be accurately located at a focus point are avoided, the construction difficulty of the measuring system is reduced, fewer optical elements are used, the difficulty in achieving the light beam pointing to the measuring system and the measuring errors are greatly reduced, measurement of four-dimensional information can be achieved only by one detector, an image acquisition card does not need to be added, the light beam pointing to the measuring system is directly connected with a computer, and the measuring cost is reduced.
Preferably, in any of the above embodiments, the camera system M5 is specifically configured to receive successive spots, the spots including the first spot C1 and the second spot C2, and acquire the abscissa x of the first spot C11And ordinate y1Abscissa x of the second spot C22And ordinate y2(ii) a And also particularly for when the incident beam only has an angle of incidence, according to x2And y2Calculating an incident angle; also specifically for when the incident beam only has a rotation angle, according to x2And y2Calculating a rotation angle;
and also specifically for when there is only translation of the incident beam in the Y direction, according to Y2Calculating the translation amount of the Y axis;
it is also particularly useful when there is only a translation of the incident beam in the X direction, according to X2Calculating the translation amount of an X axis;
and also particularly for when the angle of incidence and the angle of rotation are both non-zero and the X-axis and the Y-axis are translated, according to X1、y1、x2And y2Calculating the translation amount and calculating the rotation angle according to x1、y1、x2And y2Calculating a rotation angle according to x1、y1、x2And y2And calculating the translation amount.
The abscissa x of the first spot C1 is acquired by the camera system M51And ordinate y1Abscissa x of the second spot C22And ordinate y2(ii) a And dividing the drift state of the incident beam according to the drift condition of the incident beam, and calculating the angle drift amount and the translation amount by means of the specific coordinate information of the light spot.
Preferably, in any of the embodiments described above, as shown in FIG. 3
The camera system M5 is particularly useful for calculating the angle of incidence phi according to the following formula when the incident beam only has an angle of incidence,
Figure GDA0003087264240000131
wherein l1 is the distance between the beam shrinking mirror set M4 and the first beam splitter M1; l2 is the distance between the first beam splitter M1 and the second beam splitter M2; l3 is the distance of the retroreflector M3 from the first beam splitter M1; l6 is the distance of the retroreflector M3 from the second beam splitter M2; l7 is the distance of the first beam splitter M1 from the plane of the camera system M5;
or, when there is only a rotation angle of the incident light beam, the rotation angle alpha is calculated according to the following formula,
Figure GDA0003087264240000132
S′1is S1Is equivalent point of, i.e. from S1The light rays emitted from the light source pass through M1, M2 and M3 and are equivalent to direct S1' issue to camera CA. Wherein, from geometric knowledge, S1′O4Has a length of l1+l2+l3+l6+l7Triangle S1′C2O4The vertex angle of (C) is the incident angle, l8 is the radius of the locus circle of the first spot C2, and the formula is obtained:
Figure GDA0003087264240000141
Figure GDA0003087264240000142
the first light spot C1 and the second light spot C2 on the camera rotate in opposite directions, but the rotation angles of the first light spot C1 and the second light spot C2 are the same, a coordinate system is established by taking the center of the camera as an origin, and the coordinate of C1 is (x)1,y1) And the coordinate of C2 is (x)2,y2). When no translation occurs, the coordinates of the center of the track circle are at the origin, and the radiuses of the two track circles are respectively set as r1And r2According to the above-mentioned geometric relationship, it can be obtained,
Figure GDA0003087264240000143
Figure GDA0003087264240000144
under the condition of a certain incident angle, incident rays can have infinite paths to enter a plane, the rays form a conical surface, all incident points on the incident surface form a circle, and any incident ray can be represented by two angles, namely an incident angle phi and a rotating angle alpha; although the angle between the incident light rays and the plane is not changed, the incident direction is changed, which causes the C1 and C2 on the camera to be on the circle with the radius of l9 and l8, and the circle is called a trajectory circle, as shown in fig. 4.
According to the abscissa x of the second light spot C22And ordinate y2The angle of rotation is calculated through the formula when incident beam only has the incident angle to combine the geometric relation, and the formula when incident beam only has the angle of rotation calculates the incident angle to obtain the angle of incident beam and float, through optimizing back measuring device structure degree of difficulty and reducing, the angle that rethread simple formula was calculated and just can be obtained incident beam floats information, makes the directional measuring process of whole light beam simple easy to operate, and simple structure makes stability stronger simultaneously.
Preferably, in any of the above embodiments, the camera system M5 is specifically configured to calculate the Y-axis translation Δ Y according to the following formula when there is only translation of the incident light beam in the Y direction, as shown in fig. 6
ΔY＝|y2|；
Or, when the incident light beam has only a translation in the X-axis direction, the X-axis translation amount Δ X is calculated according to the following formula, as shown in fig. 5
ΔX＝|x2|。
When the incident beam has only translation in the X-axis direction, the spots formed by the two rays are coincident, i.e. the first spot C1 is coincident with the second spot C2, but not at the center O of the camera plane3Where the radius of the circle of trajectories of the first spot C1 and the second spot C2 is zero, the centers of the circles coincide, but the center of the circle is not at the center of the camera. It is easy to judge that the incident ray is shifted with respect to the reference ray without the incident angle change. The distance from the center of the track circle to the center of the camera screen, which is the first light spot C1 or the second light spot C2, is equal to the translation distance of the incident light ray relative to the reference light ray, and the calculation formula is obtained:
ΔX＝|x2|，
or
ΔX＝|x1|；
When there is only translation of the incident beam in the Y direction, the first and second spots C1 and C2 move away from each other in a direction parallel to the Y axis by the same distance, and the X coordinates of the first and second spots C1 and C2 remain unchanged. The centers of the two light spots are also moved along the Y axis in the same distance. The translation distance in the Y-axis direction is the absolute value of the ordinate of the first spot C1 or the second spot C2, and the calculation formula is obtained:
ΔY＝|y2|，
or
ΔY＝|y1|。
According to the abscissa x of the second light spot C12And ordinate y2When the translation takes place for the actual light beam, the removal orbit of facula, through the formula calculation facula X, Y axle translation volume to obtain the translation volume at X, Y axle of incident beam, through optimizing back measuring device structure degree of difficulty and reducing, the simple formula of rethread is calculated and just can be obtained incident beam's flat information of floating, makes the directional measuring process of whole light beam simple easy operation, and simple structure makes stability stronger simultaneously.
Preferably, in any of the embodiments described above, as shown in FIG. 7
The camera system M5 is specifically configured to calculate the angle of incidence phi when both the angle of incidence and the angle of rotation are non-zero and the X and Y axes are translated according to the following formula:
Figure GDA0003087264240000161
wherein r is2The radius of the track circle where the second light spot C2 is located is calculated according to the following formula:
Figure GDA0003087264240000162
wherein λ is a constant, and the difference Δ r between the radii of the track circle of the first light spot C1 and the track circle of the second light spot C2 is calculated according to the following formula:
Figure GDA0003087264240000163
Figure GDA0003087264240000164
alternatively, the rotation angle alpha is calculated according to the following formula,
Figure GDA0003087264240000165
or, calculating the X-axis translation amount Δ X according to the following formula:
ΔX＝|x4|,
wherein x is4Is the center Q of the track circle of the second light spot C24X is calculated according to the following formula4：
Figure GDA0003087264240000166
Or, calculating the Y-axis translation amount Δ Y according to the following formula:
ΔY＝|y4|，
wherein y is4Is the center Q of the track circle of the second light spot C24Y is calculated according to the following formula4：
Figure GDA0003087264240000171
When the incident angle and the rotation angle are not zero and the X axis and the Y axis are translated, the X axis is used as the symmetric point C2 'of the second light spot C2, and the analysis can obtain that the circle center of the track circle where the C2' is located is overlapped with the circle center of the track circle where the first light spot C1 is located, and the difference between the radiuses of the two circles is not changed along with the translation and only has a relation with the incident angle. As shown in figure 7 of the drawings,
the coordinate of C2' is (x)2,-y2). The difference between the radii of the two circles is,
Figure GDA0003087264240000172
after the radius difference Δ r is obtained, the radius of the trajectory circle needs to be further solved, and the radius of the trajectory circle needs to be solved in another triangle which is not on the plane of the camera, refer to fig. 3, because the distance C between C2 and C12C1＝C2C4-C1C4Δ r, independent of translation. The radii of the track circles of C2 and C1 are r2And r1Center of circle is O3', the coordinates of the center of the circle are (x)3,y3) Then, from geometric knowledge, one can then:
Figure GDA0003087264240000173
obtaining an incidence angle calculation formula:
Figure GDA0003087264240000174
and obtaining a rotation angle calculation formula according to the coordinates of C2' and the coordinates of the circle center:
Figure GDA0003087264240000175
according to the formula, the center O of the track circle of the second light spot C2 is calculated4Abscissa x of4And ordinate y4：
Figure GDA0003087264240000176
Figure GDA0003087264240000181
The coordinate value of the center of the track circle where C2 is located is the translation amount of the light beam along the X axis and the Y axis, and the calculation formula is obtained:
ΔX＝|x4|,
ΔY＝|y4|。
similarly according to O3', the coordinates are (x)3,y3) And calculating the translation amount.
As shown in fig. 8, fig. 8(a) shows a spot pattern when the laser beam is perpendicularly incident on the first beam splitter M1; FIG. 8(b) a speckle pattern when the laser beam is at zero angle of incidence φ and rotation α; FIG. 8(c) is a speckle pattern of a laser beam at an incident angle φ and a rotational angle α, wherein the arrows indicate the direction of spot movement; FIG. 8(d) is a spot diagram with a laser beam translated at an incident angle φ, a rotation angle α, and an X-axis, wherein the arrows indicate the direction of spot movement; FIG. 8(d) is a spot diagram of a laser beam at an incident angle φ, a rotational angle α, with translation in the X-axis and translation in the Y-axis, where the arrows indicate the direction of spot movement;
when the angle drift and the plane drift exist simultaneously, the X-axis coordinate of the second light spot C2 is used2And ordinate y2Abscissa x of the first spot C11And ordinate y1The auxiliary symmetrical points are made, according to the geometric relation and by combining with an actual formula, the incident angle, the rotation angle and the translation amount of an incident beam at an X, Y axis are obtained, the measuring device is optimized, only one camera is used, the number of detectors is reduced, errors caused by focusing are reduced, the cost is also reduced, and when the floating condition of the incident beam is complex, namely the angle drift and the drift exist simultaneously, the light spots do not need to be repeatedly detected for many times, the angle drift and the drift of the incident beam can be calculated once when the accurate coordinate information of the first light spot C1 and the accurate coordinate information of the second light spot C2 are obtained, the measuring difficulty is reduced, and the measuring workload is reduced.
In one embodiment, a method of laser beam pointing measurement is provided, as shown in fig. 2, the method comprising:
s1, arranging the main optical axis of the beam reducing mirror group M4, the center of the first beam splitter M1 and the center of the second beam splitter M2 on the same straight line;
the distance between the exit surface of the beam reducing mirror set M4 and the center of the first beam splitter M1 is l1(ii) a The center of the first beam splitter M1 and the center of the second beam splitter M2 are on the same straight line and have a distance l2(ii) a The distances between the exit surface of the retroreflector M3 and the center of the first beam splitter M1 are l6 respectively, and the distances between the exit surface of the retroreflector M3 and the center of the second beam splitter M2 are l 3; the sensor plane of the camera module is at a distance l from the center of the first beam splitter M17(ii) a Wherein l1＝l3＝l6＝l7；
S2, the beam reducing mirror group M4 reduces the beam diameter of the incident laser;
the beam-reducing mirror group M4 can comprise two beam-reducing mirrors; the beam reduction mirror M4 reduces the incident beam diameter, preferably to below 1 mm.
S3, the first beam splitter M1 splits the incident laser light into two beams according to a first preset splitting ratio, wherein one beam propagates to the camera system M5, and the other beam propagates to the second beam splitter M2;
the first beam splitter M1 splits the incident laser into two beams according to a first preset beam splitting ratio, wherein one beam can be reflected by 90 degrees and enter the camera system M5, and the other beam continues to propagate to the second beam splitter M2 along the original direction;
the preset beam splitting ratio of the first beam splitter M1 is T: R, where T represents transmittance, R represents reflectance, T may range from 80 to 95, R may range from 5 to 20, and T + R may be 100; the T% of the incident beam is reflected to enter the camera system M5, and the R% of the incident beam continuously propagates to the second beam splitter M2 along the original direction;
s4, the camera system M5 displays the light spot projected on the camera system M5 by the light beam transmitted by the first beam splitter M1, and detects the coordinate information of the continuous light spot;
s5, the second beam splitter M2 splits the incident laser into two beams according to a second preset beam splitting ratio, wherein one beam propagates into the retroreflector M3;
the second beam splitter M2 splits the incident laser light into two beams according to a second preset splitting ratio, wherein one beam can be reflected at 90 degrees and enter the retroreflector M3, and the other beam continues to propagate along the original direction;
the preset beam splitting ratio of the second beam splitter M2 is T: R, T represents transmittance, R represents reflectance, the value range of T may be similar to that of R, and T + R is 100; the T% of the incident beam is reflected to enter a backward reflector M3, and the R% of the incident beam continuously propagates along the original direction;
s6, the retroreflector M3 reflects the incident light beam and transmits the reflected light beam to the camera system M5, the reflection direction is parallel to the incidence direction and opposite to the incidence direction, the distance between the light beam in the incidence direction and the retroreflector M3 is l3, the distance between the light beam in the reflection direction and the retroreflector M3 is l6, and l3 is l 6;
s7, the camera system M5 displays the light spot of the light beam transmitted to the rear reflector M3 and detects the coordinate information of the light spot of the light beam;
and S8, calculating beam pointing information from the coordinate information.
The camera system M5 may include a camera and a computer system, and the camera may adopt a CMOS camera or a CCD camera; the camera detects the incident light spot and acquires light spot information, and the computer system calculates the coordinates of the light spot on the sensor plane of the camera according to the light spot information and calculates the incident angle, the rotation angle and the translation amount of the incident light beam on the X, Y axis according to the calculated coordinates of the light spot and the position distance information of each component.
The device which combines the beam reduction mirror group M4, the first beam splitter M1, the second beam splitter M2, the backward reflecting mirror M3 and the camera system M5 is used for detecting and displaying the light spots of the incident laser, and the light beam pointing direction is calculated according to the coordinate information of continuous light spots, so that the angle drift and the plane drift can be calculated simultaneously. Meanwhile, a reflector is not used, so that errors caused by inaccurate adjustment of the reflector are avoided; the device has the advantages that a focusing lens is not used, errors caused by the fact that optical axes are not aligned and the camera placing position cannot be accurately located at a focus point are avoided, the construction difficulty of the measuring system is reduced, fewer optical elements are used, the difficulty in achieving the light beam pointing to the measuring system and the measuring errors are greatly reduced, measurement of four-dimensional information can be achieved only by one detector, an image acquisition card does not need to be added, the light beam pointing to the measuring system is directly connected with a computer, and the measuring cost is reduced.
Preferably, in any of the above embodiments, the spot coordinate information of the probe beam specifically includes: acquiring position information of the first and second light spots C1 and C2 projected on the camera system M5; calculating the abscissa x of the first spot C1 from the position information1And ordinate y1The abscissa x of the second spot C2 is calculated2And ordinate y2；
The calculating of the beam pointing information from the coordinate information specifically includes:
when the incident beam only has an incident angle, according to x2And y2Calculating an incident angle;
when the incident beam only has a rotation angle, according to x2And y2Calculating a rotation angle;
when the incident beam has only translation in the Y direction, according to Y2Calculating the translation amount of the Y axis;
when there is only translation of the incident beam in the X direction, according to X2Calculating the translation amount of an X axis;
when the incident angle and the rotation angle are not zero and the X-axis and the Y-axis are translated, according to X1、y1、x2And y2Calculating the translation amount and calculating the rotation angle according to x1、y1、x2And y2Calculating a rotation angle according to x1、y1、x2And y2And calculating the translation amount.
The abscissa x of the first spot C1 is acquired by the camera system M51And ordinate y1Abscissa x of the second spot C22And ordinate y2(ii) a And dividing the drift state of the incident beam according to the drift condition of the incident beam, and calculating the angle drift amount and the translation amount by means of the specific coordinate information of the light spot.
Preferably, in any of the above embodiments, when the incident beam is at only an incident angle, the incident angle is calculated according to the following formula,
Figure GDA0003087264240000211
wherein l1 is the distance between the beam shrinking mirror set M4 and the first beam splitter M1; l2 is the distance between the first beam splitter M1 and the second beam splitter M2; l6 is the distance of the retroreflector M3 from the first beam splitter M1; l3 is the distance of the retroreflector M3 from the second beam splitter M2; l7 is the distance of the first beam splitter M1 from the plane of the camera system M5;
or, when there is only a rotation angle of the incident light beam, the rotation angle alpha is calculated according to the following formula,
Figure GDA0003087264240000212
the first light spot C1 and the second light spot C2 on the camera rotate in opposite directions, but the rotation angles of the first light spot C1 and the second light spot C2 are the same, a coordinate system is established by taking the center of the camera as an origin, and the coordinate of C1 is (x)1,y1) And the coordinate of C2 is (x)2,y2). When no translation occurs, the coordinates of the center of the track circle are at the origin, and the radiuses of the two track circles are respectively set as r1And r2The geometric relationship can be obtained according to the prior art,
Figure GDA0003087264240000221
Figure GDA0003087264240000222
according to the abscissa x of the second light spot C22And ordinate y2Combining with geometric relation, calculating rotation angle by formula when incident beam only has incidence angle, calculating incidence angle by formula when incident beam only has rotation angle to obtain angle drift of incident beam, and measuring after optimizationThe device structure degree of difficulty reduces, and the angle of rethread simple formula calculation just can obtain incident beam floats the information for whole light beam directional measurement process is simple easily to be operated, and simple structure makes stability stronger simultaneously.
Preferably, in any of the embodiments described above, when there is only translation of the incident beam in the Y direction, the Y-axis translation amount ay is calculated according to the following formula,
ΔY＝|y2|；
or, when there is only translation of the incident beam in the X-axis direction, the X-axis translation amount ax is calculated according to the following formula,
ΔX＝|x2|。
when the incident beam has only translation in the X-axis direction, the spots formed by the two rays are coincident, i.e. the first spot C1 is coincident with the second spot C2, but not at the center O of the camera plane3Where the radius of the circle of trajectories of the first spot C1 and the second spot C2 is zero, the centers of the circles coincide, but the center of the circle is not at the center of the camera. It is easy to judge that the incident ray is shifted with respect to the reference ray without the incident angle change. The distance from the center of the first light spot C1 or the second light spot C2, i.e. the track circle, to the center of the camera frame is equal to the translation distance of the incident light ray relative to the reference light ray, and the calculation formula is obtained:
ΔX＝|x2|，
or
ΔX＝|x1|；
When there is only translation of the incident beam in the Y direction, the first and second spots C1 and C2 move away from each other in a direction parallel to the Y axis by the same distance, and the X coordinates of the first and second spots C1 and C2 remain unchanged. The centers of the two light spots are also moved along the Y axis in the same distance. The translation distance in the Y-axis direction is the absolute value of the ordinate of the first spot C1 or the second spot C2, and the calculation formula is obtained:
ΔY＝|y2|，
or
ΔY＝|y1|。
According to the abscissa x of the second light spot C22And ordinate y2When the translation takes place for the actual light beam, the removal orbit of facula, through the formula calculation facula X, Y axle translation volume to obtain the translation volume at X, Y axle of incident beam, through optimizing back measuring device structure degree of difficulty and reducing, the simple formula of rethread is calculated and just can be obtained incident beam's flat information of floating, makes the directional measuring process of whole light beam simple easy operation, and simple structure makes stability stronger simultaneously.
Preferably, in any of the above embodiments, when both the angle of incidence and the angle of rotation are non-zero and the X-axis and the Y-axis are translated, the angle of incidence φ is calculated according to the following formula:
Figure GDA0003087264240000231
wherein r is2The radius of the track circle where the second light spot C2 is located is calculated according to the following formula:
Figure GDA0003087264240000232
the lambda constant and the radius difference deltar between the track circle of the first light spot C1 and the track circle of the second light spot C2 are calculated according to the following formula:
Figure GDA0003087264240000233
Figure GDA0003087264240000234
alternatively, the rotation angle alpha is calculated according to the following formula,
Figure GDA0003087264240000241
or, calculating the X-axis translation amount Δ X according to the following formula:
ΔX＝|x4|,
wherein x is4Is the center O of the track circle of the second light spot C24X is calculated according to the following formula4：
Figure GDA0003087264240000242
Or, calculating the Y-axis translation amount Δ Y according to the following formula:
ΔY＝|y4|，
wherein y is4Is the center O of the track circle of the second light spot C24Y is calculated according to the following formula4：
Figure GDA0003087264240000243
When the incident angle and the rotation angle are not zero and the X axis and the Y axis are translated, the X axis is used as the symmetric point C2 'of the second light spot C2, and the analysis can obtain that the circle center of the track circle where the C2' is located is overlapped with the circle center of the track circle where the first light spot C1 is located, and the difference between the radiuses of the two circles is not changed along with the translation and only has a relation with the incident angle. As shown in figure 7 of the drawings,
the coordinate of C2' is (x)2,-y2). The difference between the radii of the two circles is 1,
Figure GDA0003087264240000244
after the radius difference Δ r is obtained, the radius of the trajectory circle needs to be further solved, and the radius of the trajectory circle needs to be solved in another triangle which is not on the plane of the camera, refer to fig. 3, because the distance C between C2 and C12C1＝C2C4-C1C4Δ r, independent of translation. The radii of the track circles of C2 and C1 are r2And r1Center of circle is O3', the coordinates of the center of the circle are (x)3,y3) Then, from geometric knowledge, one can then:
Figure GDA0003087264240000251
obtaining an incidence angle calculation formula:
Figure GDA0003087264240000252
and obtaining a rotation angle calculation formula according to the coordinates of C2' and the coordinates of the circle center:
Figure GDA0003087264240000253
according to the formula, the center O of the track circle of the second light spot C2 is calculated4Abscissa x of4And ordinate y4：
Figure GDA0003087264240000254
Figure GDA0003087264240000255
The coordinate value of the center of the track circle where C2 is located is the translation amount of the light beam along the X axis and the Y axis, and the calculation formula is obtained:
ΔX＝|x4|,
ΔY＝|y4|。
similarly according to O3', the coordinates are (x)3,y3) And calculating the translation amount.
According to the qualitative analysis of the scheme, when the angle drift and the drift exist simultaneously, the abscissa x of the second light spot C2 is determined2And ordinate y2Abscissa x of the first spot C11And ordinate y1Making auxiliary symmetrical points, combining actual formula according to geometric relationship to obtainGet incident angle, rotation angle and the translation volume at X, Y axle of incident beam, through optimizing back measuring device, only use a camera, reduced the quantity of detector, reduced the error that brings because of the focus, also the cost is reduced to when incident beam floats the condition complicacy, when angle drifts and exists simultaneously, this scheme need not survey the facula many times repeatedly, just can once calculate the angle drift and the drift of incident beam obtaining the accurate coordinate information of first facula C1 and second facula C2, reduced the measuring degree of difficulty, alleviateed measurement work load.
The reader should understand that in the description of this specification, reference to the description of the terms "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
In the several embodiments provided in the present application, it should be understood that the disclosed apparatus and method may be implemented in other ways. For example, the above-described method embodiments are merely illustrative, and for example, the division of steps into only one logical functional division may be implemented in practice in another way, for example, multiple steps may be combined or integrated into another step, or some features may be omitted, or not implemented.
The above method, if implemented in the form of software functional units and sold or used as a stand-alone product, may be stored in a computer readable storage medium. Based on such understanding, the technical solution of the present invention essentially or partially contributes to the prior art, or all or part of the technical solution can be embodied in the form of a software product stored in a storage medium and including instructions for causing a computer device (which may be a personal computer, a server, or a network device) to execute all or part of the steps of the method according to the embodiments of the present invention. And the aforementioned storage medium includes: various media capable of storing program codes, such as a usb disk, a removable hard disk, a Read-only memory (ROM), a Random Access Memory (RAM), a magnetic disk, or an optical disk.
While the invention has been described with reference to specific embodiments, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (8)

1. A laser beam pointing measurement device, comprising: the device comprises a beam shrinking mirror group, a first beam splitter, a second beam splitter, a retro-reflector and a camera system; the main optical axis of the beam reducing mirror group, the center of the first beam splitter and the center of the second beam splitter are on the same straight line;
the beam reducing mirror group is used for reducing the beam diameter of incident laser;
the first beam splitter is used for splitting incident laser into two beams according to a first preset beam splitting ratio, wherein one beam is transmitted to the camera system, and the other beam is transmitted to the second beam splitter;
the second beam splitter is used for splitting the incident laser into two beams according to a second preset beam splitting ratio, wherein one beam is transmitted into the backward reflector;
the backward reflecting mirror is used for reflecting an incident light beam and then transmitting the incident light beam into the camera system, the reflecting direction is parallel to the incident direction and opposite to the incident direction, the distance between the incident direction light beam and the backward reflecting mirror is l3, the distance between the reflecting direction light beam and the backward reflecting mirror is l6, and l3= l 6;
the camera system is used for detecting and displaying a light spot of the incident laser; the system is also used for calculating the light beam direction according to the coordinate information of the continuous light spots;
the camera system is specifically configured to receive continuous light spots, the light spots include a first light spot and a second light spot, and an abscissa of the first light spot is obtained
Figure DEST_PATH_IMAGE002
And ordinate
Figure DEST_PATH_IMAGE004
The abscissa of the second light spot
Figure DEST_PATH_IMAGE006
And ordinate
Figure DEST_PATH_IMAGE008
；
The camera system is also particularly useful in accordance with when the incident light beam only has an angle of incidence
Figure DEST_PATH_IMAGE006A
And
Figure DEST_PATH_IMAGE008A
calculating an incident angle; and also particularly when the incident beam presents only a rotation angle, according to
Figure DEST_PATH_IMAGE006AA
And
Figure DEST_PATH_IMAGE008AA
calculating a rotation angle;
and also particularly for when there is only a translation of the incident beam in the Y direction, according to
Figure DEST_PATH_IMAGE008AAA
Calculating Y-axis planeMoving amount;
and also particularly for when there is only a translation of the incident beam in the X direction, according to
Figure DEST_PATH_IMAGE006AAA
Calculating the translation amount of an X axis;
and also in particular when said angle of incidence and said angle of rotation are both non-zero and when the X-axis and the Y-axis are translated, according to
Figure DEST_PATH_IMAGE002A
、
Figure DEST_PATH_IMAGE004A
、
Figure DEST_PATH_IMAGE006AAAA
And
Figure DEST_PATH_IMAGE008AAAA
calculating the translation amount to calculate the rotation angle based on
Figure DEST_PATH_IMAGE002AA
、
Figure DEST_PATH_IMAGE004AA
、
Figure DEST_PATH_IMAGE006AAAAA
And
Figure DEST_PATH_IMAGE008AAAAA
calculating a rotation angle based on
Figure DEST_PATH_IMAGE002AAA
、
Figure DEST_PATH_IMAGE004AAA
、
Figure DEST_PATH_IMAGE006AAAAAA
And
Figure DEST_PATH_IMAGE008AAAAAA
and calculating the translation amount.
2. The laser beam pointing measurement device of claim 1, wherein the camera system is specifically configured to calculate the incident angle according to the following formula when there is only incident angle of the incident beam
Figure DEST_PATH_IMAGE010
，
Figure DEST_PATH_IMAGE012
，
Wherein l1 is the distance between the beam reducing mirror group and the first beam splitter; l2 is the distance between the first beam splitter and the second beam splitter; l6 is the distance of the retroreflector from the first beam splitter; l3 is the distance of the retroreflector from the second beam splitter; l7 is the distance of the first beam splitter from the plane of the camera system;
or, when there is only a rotation angle of the incident light beam, the rotation angle is calculated according to the following formula
Figure DEST_PATH_IMAGE014
，
Figure DEST_PATH_IMAGE016
。
3. The laser beam pointing measurement device of claim 1, wherein the camera system is specifically configured to calculate the amount of Y-axis translation when there is only translation of the incident beam in the Y-direction according to the following formula
Figure DEST_PATH_IMAGE018
，
Figure DEST_PATH_IMAGE020
；
Or, when the incident beam only has translation in the X-axis direction, the X-axis translation amount is calculated according to the following formula
Figure DEST_PATH_IMAGE022
，
Figure DEST_PATH_IMAGE024
。
4. The laser beam pointing measurement device according to claim 2, wherein the camera system is specifically configured to calculate the angle of incidence according to the following formula when the angle of incidence and the angle of rotation are both non-zero and the X-axis and the Y-axis are translated
Figure DEST_PATH_IMAGE026
：
Figure DEST_PATH_IMAGE028
，
Wherein,
Figure DEST_PATH_IMAGE030
calculating the radius of the track circle where the second light spot is located according to the following formula:
Figure DEST_PATH_IMAGE032
，
wherein,
Figure DEST_PATH_IMAGE034
is constant, and the difference between the radius of the track circle of the first light spot and the radius of the track circle of the second light spot
Figure DEST_PATH_IMAGE036
，
Figure DEST_PATH_IMAGE034A
And
Figure DEST_PATH_IMAGE036A
respectively calculated according to the following formula:
Figure DEST_PATH_IMAGE039
，
Figure DEST_PATH_IMAGE041
；
or, the rotation angle is calculated according to the following formula
Figure DEST_PATH_IMAGE043
,
Figure DEST_PATH_IMAGE045
；
Or, calculating the X-axis translation amount according to the following formula
Figure DEST_PATH_IMAGE047
：
Figure DEST_PATH_IMAGE049
,
Wherein,
Figure DEST_PATH_IMAGE051
is the center of the track circle of the second light spot
Figure DEST_PATH_IMAGE053
The abscissa of (a) is calculated according to the following formula
Figure DEST_PATH_IMAGE051A
：
Figure DEST_PATH_IMAGE055
；
Or, calculating the Y-axis translation amount according to the following formula
Figure DEST_PATH_IMAGE057
：
Figure DEST_PATH_IMAGE059
，
Wherein
Figure DEST_PATH_IMAGE061
Is the center of the track circle of the second light spot
Figure DEST_PATH_IMAGE053A
Is calculated according to the following formula
Figure DEST_PATH_IMAGE061A
：
Figure DEST_PATH_IMAGE064
。
5. A method for measuring the direction of laser beam is characterized by that,
s1, arranging the main optical axis of the beam reducing mirror group, the center of the first beam splitter and the center of the second beam splitter on the same straight line;
s2, the beam reducing mirror group reduces the beam diameter of the incident laser;
s3, the first beam splitter splits the incident laser into two beams according to a first preset beam splitting ratio, wherein one beam is transmitted to the camera system, and the other beam is transmitted to the second beam splitter;
s4, the camera system displays light spots projected on the camera system by the light beams according to the light beams transmitted by the first beam splitter, and detects continuous light spot coordinate information;
s5, the second beam splitter divides the incident laser into two beams according to a second preset beam splitting ratio, wherein one beam is transmitted to the backward reflector;
s6, reflecting the incident light beam by the retroreflector and then transmitting the reflected light beam into the camera system, wherein the reflection direction is parallel to the incident direction and opposite to the incident direction, the distance between the incident direction light beam and the retroreflector is l3, the distance between the reflection direction light beam and the retroreflector is l6, and l3= l 6;
s7, the camera system displays the light spot of the light beam transmitted by the backward reflector and detects the coordinate information of the light spot of the light beam;
s8, calculating the light beam pointing information according to the coordinate information;
wherein the detecting the spot coordinate information of the light beam specifically includes: acquiring position information of a first light spot and a second light spot projected on the camera system; calculating the abscissa of the first light spot according to the position information
Figure DEST_PATH_IMAGE065
And ordinate
Figure DEST_PATH_IMAGE066
Calculating the abscissa of the second light spot
Figure DEST_PATH_IMAGE067
And ordinate
Figure DEST_PATH_IMAGE068
；
The calculating of the beam pointing information according to the coordinate information specifically includes:
when the incident beam only has an incident angle, according to
Figure DEST_PATH_IMAGE006AAAAAAA
And
Figure DEST_PATH_IMAGE008AAAAAAA
calculating an incident angle;
when the incident beam has only a rotation angle, according to
Figure DEST_PATH_IMAGE006AAAAAAAA
And
Figure DEST_PATH_IMAGE008AAAAAAAA
calculating a rotation angle;
when the incident beam has only a translation in the Y direction, according to
Figure DEST_PATH_IMAGE008AAAAAAAAA
Calculating the translation amount of the Y axis;
when the incident beam has only a translation in the X direction, according to
Figure DEST_PATH_IMAGE006AAAAAAAAA
Calculating the translation amount of an X axis;
when the incident angle and the rotation angle are not zero and the X-axis and the Y-axis are translated, according to
Figure DEST_PATH_IMAGE002AAAA
、
Figure DEST_PATH_IMAGE004AAAA
、
Figure DEST_PATH_IMAGE006AAAAAAAAAA
And
Figure DEST_PATH_IMAGE008AAAAAAAAAA
calculating the translation amount to calculate the rotation angle based on
Figure DEST_PATH_IMAGE002AAAAA
、
Figure DEST_PATH_IMAGE004AAAAA
、
Figure DEST_PATH_IMAGE006AAAAAAAAAAA
And
Figure DEST_PATH_IMAGE008AAAAAAAAAAA
calculating a rotation angle based on
Figure DEST_PATH_IMAGE002AAAAAA
、
Figure DEST_PATH_IMAGE004AAAAAA
、
Figure DEST_PATH_IMAGE006AAAAAAAAAAAA
And
Figure DEST_PATH_IMAGE008AAAAAAAAAAAA
and calculating the translation amount.
6. The method of claim 5, wherein the laser beam pointing measurement is performed by a laser beam pointing measurement device,
when only incident angle exists in incident light beam, the incident angle is calculated according to the following formula
Figure DEST_PATH_IMAGE010A
，
Figure DEST_PATH_IMAGE069
，
Wherein l1 is the distance between the beam reducing mirror group and the first beam splitter; l2 is the distance between the first beam splitter and the second beam splitter; l6 is the distance of the retroreflector from the first beam splitter; l3 is the distance of the retroreflector from the second beam splitter; l7 is the distance of the first beam splitter from the plane of the camera system;
or, when there is only a rotation angle of the incident light beam, the rotation angle is calculated according to the following formula
Figure DEST_PATH_IMAGE014A
，
Figure DEST_PATH_IMAGE071
。
7. The method of claim 5, wherein when there is only translation of the incident beam in the Y direction, the amount of Y-axis translation is calculated according to the following formula
Figure DEST_PATH_IMAGE018A
，
Figure DEST_PATH_IMAGE020A
；
Or, when the incident light beam only has translation in the X-axis direction, calculating the X-axis translation amount according to the following formula
Figure DEST_PATH_IMAGE022A
，
Figure DEST_PATH_IMAGE024A
。
8. The method of claim 6, wherein when the incident angle and the rotation angle are not zero and the X-axis and the Y-axis are shifted, the incident angle is calculated according to the following formula
Figure DEST_PATH_IMAGE026A
：
Figure DEST_PATH_IMAGE028A
，
Wherein,
Figure DEST_PATH_IMAGE030A
calculating the radius of the track circle where the second light spot is located according to the following formula:
Figure DEST_PATH_IMAGE032A
，
Figure DEST_PATH_IMAGE034AA
constant, and difference between the radius of the track circle of the first light spot and the radius of the track circle of the second light spot
Figure DEST_PATH_IMAGE078
，
Figure DEST_PATH_IMAGE034AAA
And
Figure DEST_PATH_IMAGE036AA
respectively calculated according to the following formula:
Figure DEST_PATH_IMAGE039A
，
Figure DEST_PATH_IMAGE041A
；
or, the rotation angle is calculated according to the following formula
Figure DEST_PATH_IMAGE043A
,
Figure DEST_PATH_IMAGE045A
；
Or, calculating the X-axis translation amount according to the following formula
Figure DEST_PATH_IMAGE047A
：
Figure DEST_PATH_IMAGE049A
,
Wherein,
Figure DEST_PATH_IMAGE051AA
is the center of the track circle of the second light spot
Figure DEST_PATH_IMAGE053AA
The abscissa of (a) is calculated according to the following formula
Figure DEST_PATH_IMAGE051AAA
：
Figure DEST_PATH_IMAGE055A
；
Or, calculating the Y-axis translation amount according to the following formula
Figure DEST_PATH_IMAGE057A
：
Figure DEST_PATH_IMAGE088
，
Wherein
Figure DEST_PATH_IMAGE061AA
Is the center of the track circle of the second light spot
Figure DEST_PATH_IMAGE053AAA
Is calculated according to the following formula
Figure DEST_PATH_IMAGE061AAA
：
Figure DEST_PATH_IMAGE064A
。
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