CN110702218A - Laser beam pointing measurement device and method - Google Patents

Laser beam pointing measurement device and method Download PDF

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CN110702218A
CN110702218A CN201910933390.0A CN201910933390A CN110702218A CN 110702218 A CN110702218 A CN 110702218A CN 201910933390 A CN201910933390 A CN 201910933390A CN 110702218 A CN110702218 A CN 110702218A
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incident
calculating
light
axis
angle
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CN110702218B (en
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展月英
熊建
张春晖
熊蛟
石紫元
孙扬
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Technology and Engineering Center for Space Utilization of CAS
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Technology and Engineering Center for Space Utilization of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter

Abstract

The invention relates to a laser beam pointing measurement device and method, and relates to the field of laser beam pointing measurement. The device includes: a beam reduction mirror group M4, a first beam splitter M1, a second beam splitter M2, a rear reflector M3 and a camera system M5; the main optical axis of the beam reduction lens group, the center of the first beam splitter M1 and the center of the second beam splitter M2 are on the same straight line; the device is used for detecting and displaying the light spots of the incident laser, and calculating the light beam direction according to the coordinate information of the continuous light spots, so that the angle drift and the flat drift can be calculated simultaneously. Meanwhile, a reflector is not used, so that errors caused by inaccurate adjustment of the reflector are avoided; and a focusing lens is not used, so that errors caused by the fact that the optical axes are not aligned and the camera placement position cannot be accurately positioned at the focal point are avoided.

Description

Laser beam pointing measurement device and method
Technical Field
The invention relates to the field of laser beam pointing measurement, in particular to a laser beam pointing measurement device and method.
Background
In the existing device for measuring the light beam pointing angle information, a measured light beam is generally incident near the center of a detection plane of an image acquisition unit after passing through an f-theta field lens and a light intensity regulator, and the detection plane of the image acquisition unit is positioned on a back focal plane of the f-theta field lens, so that a laser spot emitted by a measured laser is obtained. And then the upper computer calculates the angle information of the pointing stability of the laser beam according to the image information acquired by the image acquisition unit. The two-dimensional translation stage is used to adjust the camera position so that the camera center is aligned with the field lens optical axis. The direction of an incident beam comprises information of four dimensions such as up/down translation, left/right translation, incidence angle, rotation angle and the like, and only angle drift can be measured in the scheme of the prior art, and flat drift cannot be measured.
Disclosure of Invention
The invention aims to solve the technical problem of providing a laser beam pointing measurement device and method aiming at the defects of a device for measuring beam pointing angle information in the prior art.
The technical scheme for solving the technical problems is as follows:
a laser beam pointing measurement apparatus, comprising: the device comprises a beam shrinking mirror group, a first beam splitter, a second beam splitter, a retro-reflector and a camera system; the main optical axis of the beam reducing mirror group, the center of the first beam splitter and the center of the second beam splitter are on the same straight line;
the beam reducing mirror group is used for reducing the beam diameter of incident laser;
the first beam splitter is used for splitting incident laser into two beams according to a first preset beam splitting ratio, wherein one beam is transmitted to the camera system, and the other beam is transmitted to the second beam splitter;
the second beam splitter is used for splitting the incident laser into two beams according to a second preset beam splitting ratio, wherein one beam is transmitted into the backward reflector;
the backward reflecting mirror is used for reflecting an incident light beam and then transmitting the incident light beam into the camera system, the reflecting direction is parallel to the incident direction and opposite to the incident direction, the distance between the incident direction light beam and the backward reflecting mirror is l4, the distance between the reflecting direction light beam and the backward reflecting mirror is l5, and l4 is l 5;
the camera system is used for detecting and displaying a light spot of the incident laser; and the system is also used for calculating the beam pointing direction according to the coordinate information of the continuous light spots.
The invention has the beneficial effects that: the device which combines the beam reducing mirror group, the first beam splitter, the second beam splitter, the retro-reflector and the camera system is used for detecting and displaying the light spots of the incident laser, calculating the light beam direction according to the coordinate information of continuous light spots, and simultaneously calculating the angle drift and the level drift. Meanwhile, a reflector is not used, so that errors caused by inaccurate adjustment of the reflector are avoided; the device has the advantages that a focusing lens is not used, errors caused by the fact that optical axes are not aligned and the camera placing position cannot be accurately located at a focus point are avoided, the construction difficulty of the measuring system is reduced, fewer optical elements are used, the difficulty in achieving the light beam pointing to the measuring system and the measuring errors are greatly reduced, measurement of four-dimensional information can be achieved only by one detector, an image acquisition card does not need to be added, the light beam pointing to the measuring system is directly connected with a computer, and the measuring cost is reduced.
On the basis of the technical scheme, the invention can be further improved as follows.
Further, the camera system is specifically configured to receive continuous light spots, where the light spots include a first light spot and a second light spot, and acquire an x-coordinate of the first light spot1And ordinate y1The abscissa x of the second light spot2And ordinate y2(ii) a And also particularly for when the incident beam only has an angle of incidence, according to x2And y2Calculating an incident angle; also specifically for when the incident beam only has a rotation angle, according to x2And y2Calculating a rotation angle;
and also specifically for when there is only translation of the incident beam in the Y direction, according to Y2Calculating the translation amount of the Y axis;
it is also particularly useful when there is only a translation of the incident beam in the X direction, according to X2Calculating the translation amount of an X axis;
and also particularly when said angle of incidence and said angle of rotation are both non-zero, andwhen the X axis and the Y axis are translated, according to X1、y1、x2And y2Calculating the translation amount and calculating the rotation angle according to x1、y1、x2And y2Calculating a rotation angle according to x1、y1、x2And y2And calculating the translation amount.
The beneficial effect of adopting the further scheme is that: acquiring an abscissa x of the first spot by means of a camera system1And ordinate y1The abscissa x of the second light spot2And ordinate y2(ii) a And dividing the drift state of the incident beam according to the drift condition of the incident beam, and calculating the angle drift amount and the translation amount by means of the specific coordinate information of the light spot.
Further, the camera system is particularly useful for calculating the angle of incidence phi according to the following formula when the incident beam only has an angle of incidence,
Figure BDA0002220950060000031
wherein l1 is the distance between the beam reducing mirror group and the first beam splitter; l2 is the distance between the first beam splitter and the second beam splitter; l6 is the distance of the retroreflector from the first beam splitter; l3 is the distance of the retroreflector from the second beam splitter; l7 is the distance of the first beam splitter from the plane of the camera system;
or, when there is only a rotation angle of the incident light beam, the rotation angle alpha is calculated according to the following formula,
Figure BDA0002220950060000032
the beneficial effect of adopting the further scheme is that: according to the abscissa x of the second light spot2And ordinate y2In combination with the geometric relationship,the rotation angle is calculated through a formula when the incident beam only has the incident angle, the incident beam only has the formula when the rotation angle to calculate the incident angle, so that the angle drift of the incident beam is obtained, the construction difficulty of the measuring device is reduced after optimization, the angle drift information of the incident beam can be obtained through simple formula calculation, the whole light beam pointing measurement process is simple and easy to operate, and meanwhile, the stability is stronger due to the simple structure.
Further, the camera system is specifically configured to, when there is only translation of the incident beam in the Y direction, calculate the Y-axis translation amount ay according to the following formula,
ΔY=|y2|;
or, when there is only translation of the incident beam in the X-axis direction, the X-axis translation amount ax is calculated according to the following formula,
ΔX=|x2|。
the beneficial effect of adopting the further scheme is that: according to the abscissa x of the second light spot2And ordinate y2When the translation takes place for the actual light beam, the removal orbit of facula, through the formula calculation facula X, Y axle translation volume to obtain the translation volume at X, Y axle of incident beam, through optimizing back measuring device structure degree of difficulty and reducing, the simple formula of rethread is calculated and just can be obtained incident beam's flat information of floating, makes the directional measuring process of whole light beam simple easy operation, and simple structure makes stability stronger simultaneously.
Further, the camera system is specifically configured to calculate the incident angle Φ according to the following formula when the incident angle and the rotation angle are both non-zero and the X-axis and the Y-axis are translated:
Figure BDA0002220950060000041
wherein r is2Calculating the radius of the track circle where the second light spot is located according to the following formula:
Figure BDA0002220950060000042
wherein λ is a constant, and a difference Δ r between radii of a track circle where the first light spot is located and a track circle where the second light spot is located, and λ and Δ r are calculated according to the following formulas respectively:
Figure BDA0002220950060000043
Figure BDA0002220950060000044
alternatively, the rotation angle alpha is calculated according to the following formula,
Figure BDA0002220950060000045
or, calculating the X-axis translation amount Δ X according to the following formula:
ΔX=|x4|,
wherein x is4The center of a track circle O of the second light spot4X is calculated according to the following formula4
Figure BDA0002220950060000051
Or, calculating the Y-axis translation amount Δ Y according to the following formula:
ΔY=|y4|,
wherein y is4The center of a track circle O of the second light spot4Y is calculated according to the following formula4
Figure BDA0002220950060000052
The beneficial effect of adopting the further scheme is that: according to the qualitative analysis of the scheme, when the angle drift and the plane drift exist simultaneously, the x coordinate of the second light spot is determined2And ordinate y2The abscissa x of the first spot1And ordinate y1Making auxiliary symmetrical points according to geometric relationshipThe device combines an actual formula to obtain the incident angle, the rotation angle and the translation amount of an incident beam at an X, Y axis, and only one camera is used by optimizing a measuring device, so that the number of detectors is reduced, the error caused by focusing is reduced, the cost is also reduced, and when the floating condition of the incident beam is complex, namely the angle drift and the drift exist simultaneously, the scheme does not need to repeatedly detect the light spots for many times, the angle drift and the drift of the incident beam can be calculated once when the accurate coordinate information of the first light spot and the accurate coordinate information of the second light spot are obtained, the measuring difficulty is reduced, and the measuring workload is reduced.
Another technical solution of the present invention for solving the above technical problems is as follows:
a method of laser beam pointing measurement, comprising the steps of:
s1, arranging the main optical axis of the beam reducing mirror group, the center of the first beam splitter and the center of the second beam splitter on the same straight line;
s2, the beam reducing mirror group reduces the beam diameter of the incident laser;
s3, the first beam splitter splits the incident laser into two beams according to a first preset beam splitting ratio, wherein one beam is transmitted to the camera system, and the other beam is transmitted to the second beam splitter;
s4, the camera system displays light spots projected on the camera system by the light beams according to the light beams transmitted by the first beam splitter, and detects continuous light spot coordinate information;
s5, the second beam splitter divides the incident laser into two beams according to a second preset beam splitting ratio, wherein one beam is transmitted to the backward reflector;
s6, reflecting the incident light beam by the retroreflector and then transmitting the reflected light beam into the camera system, wherein the reflecting direction is parallel to the incident direction and opposite to the incident direction, the distance between the incident direction light beam and the retroreflector is l4, the distance between the reflecting direction light beam and the retroreflector is l5, and l4 is l 5;
s7, the camera system displays the light spot of the light beam transmitted by the backward reflector and detects the coordinate information of the light spot of the light beam;
and S8, calculating the light beam pointing information according to the coordinate information.
The invention has the beneficial effects that: the device which combines the beam reducing mirror group, the first beam splitter, the second beam splitter, the retro-reflector and the camera system is used for detecting and displaying the light spots of the incident laser, calculating the light beam direction according to the coordinate information of continuous light spots, and simultaneously calculating the angle drift and the level drift. Meanwhile, a reflector is not used, so that errors caused by inaccurate adjustment of the reflector are avoided; the device has the advantages that a focusing lens is not used, errors caused by the fact that optical axes are not aligned and the camera placing position cannot be accurately located at a focus point are avoided, the construction difficulty of the measuring system is reduced, fewer optical elements are used, the difficulty in achieving the light beam pointing to the measuring system and the measuring errors are greatly reduced, measurement of four-dimensional information can be achieved only by one detector, an image acquisition card does not need to be added, the light beam pointing to the measuring system is directly connected with a computer, and the measuring cost is reduced.
On the basis of the technical scheme, the invention can be further improved as follows.
Further, the detecting the spot coordinate information of the light beam specifically includes: acquiring position information of a first light spot and a second light spot projected on the camera system; calculating the abscissa x of the first light spot according to the position information1And ordinate y1Calculating the abscissa x of the second light spot2And ordinate y2
The calculating of the beam pointing information according to the coordinate information specifically includes:
when the incident beam only has an incident angle, according to x2And y2Calculating an incident angle;
when the incident beam only has a rotation angle, according to x2And y2Calculating a rotation angle;
when the incident beam has only translation in the Y direction, according to Y2Calculating the translation amount of the Y axis;
when there is only translation of the incident beam in the X direction, according to X2Calculating the translation amount of an X axis;
when both the incident angle and the rotation angle are not zero, andwhen the X axis and the Y axis are translated, according to X1、y1、x2And y2Calculating the translation amount and calculating the rotation angle according to x1、y1、x2And y2Calculating a rotation angle according to x1、y1、x2And y2And calculating the translation amount.
The beneficial effect of adopting the further scheme is that: acquiring an abscissa x of the first spot by means of a camera system1And ordinate y1The abscissa x of the second light spot2And ordinate y2(ii) a And dividing the drift state of the incident beam according to the drift condition of the incident beam, and calculating the angle drift amount and the translation amount by means of the specific coordinate information of the light spot.
Further, when there is only an incident angle of the incident beam, the incident angle phi is calculated according to the following formula,
Figure BDA0002220950060000071
wherein l1 is the distance between the beam reducing mirror group and the first beam splitter; l2 is the distance between the first beam splitter and the second beam splitter; l6 is the distance of the retroreflector from the first beam splitter; l3 is the distance of the retroreflector from the second beam splitter; l7 is the distance of the first beam splitter from the plane of the camera system;
or, when there is only a rotation angle of the incident light beam, the rotation angle alpha is calculated according to the following formula,
Figure BDA0002220950060000072
the beneficial effect of adopting the further scheme is that: according to the abscissa x of the second light spot2And ordinate y2Combined with geometrical relationships, through the incident beam onlyThe formula when there is the incident angle calculates the rotation angle, and incident beam only formula when having the rotation angle calculates the incident angle to obtain incident beam's angle and float, through optimizing back measuring device structure degree of difficulty and reducing, the angle that rethread simple formula was calculated and just can be obtained incident beam floats information, makes the directional measuring process of whole light beam simple easy operation, and simple structure makes stability stronger simultaneously.
Further, when there is only translation of the incident beam in the Y direction, the Y-axis translation amount ay is calculated according to the following formula,
ΔY=|y2|;
or, when the incident light beam only has translation in the X-axis direction, the X-axis translation amount DeltaX is calculated according to the following formula,
ΔX=|x2|。
the beneficial effect of adopting the further scheme is that: according to the abscissa x of the second light spot2And ordinate y2When the translation takes place for the actual light beam, the removal orbit of facula, through the formula calculation facula X, Y axle translation volume to obtain the translation volume at X, Y axle of incident beam, through optimizing back measuring device structure degree of difficulty and reducing, the simple formula of rethread is calculated and just can be obtained incident beam's flat information of floating, makes the directional measuring process of whole light beam simple easy operation, and simple structure makes stability stronger simultaneously.
Further, when the incident angle and the rotation angle are not zero and the X-axis and the Y-axis are shifted, the incident angle Φ is calculated according to the following formula:
Figure BDA0002220950060000081
wherein r is2Calculating the radius of the track circle where the second light spot is located according to the following formula:
Figure BDA0002220950060000082
the lambda constant and the radius difference delta r between the track circle of the first light spot and the track circle of the second light spot are respectively calculated according to the following formula:
Figure BDA0002220950060000083
Figure BDA0002220950060000084
alternatively, the rotation angle alpha is calculated according to the following formula,
Figure BDA0002220950060000091
or, calculating the X-axis translation amount Δ X according to the following formula:
ΔX=|x4|,
wherein x is4The center of a track circle O of the second light spot4X is calculated according to the following formula4
Figure BDA0002220950060000092
Or, calculating the Y-axis translation amount Δ Y according to the following formula:
ΔY=|y4|,
wherein y is4The center of a track circle O of the second light spot4Y is calculated according to the following formula4
Figure BDA0002220950060000093
The beneficial effect of adopting the further scheme is that: according to the qualitative analysis of the scheme, when the angle drift and the plane drift exist simultaneously, the x coordinate of the second light spot is determined2And ordinate y2The abscissa x of the first spot1And ordinate y1Auxiliary symmetry points are made, according to geometric relationships, in combination with practical formulas, to obtain the incident angle, the rotation angle and the translation at the X, Y axis of the incident beamThe quantity, through optimizing back measuring device, only with a camera, reduced the quantity of detector, reduced because of the error that the focus brought, also the cost is reduced to when incident beam showy condition is complicated, when the angle floats and the peaceful drift exists simultaneously promptly, this scheme need not survey the facula repeatedly many times, just can once calculate the angle of incident beam and float when obtaining the coordinate information of accurate first facula and second facula, reduced the measuring degree of difficulty, alleviateed measurement work volume.
Advantages of additional aspects of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
FIG. 1 is a block diagram of a laser beam pointing measurement device according to an embodiment of the present invention;
FIG. 2 is a schematic flow chart of a laser beam pointing measurement method according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of an incident beam with an angular drift provided by an embodiment of the present invention;
FIG. 4 is a schematic diagram of the movement locus of the light spot when the incident light beam is angularly drifted according to the embodiment of the present invention;
FIG. 5 is a schematic diagram of beam motion of an incident beam with translation in the X-axis according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a light spot at the camera plane when the incident light beam is translated in the Y-axis according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of a spot at the camera plane when there is both a flat drift and an angular drift in an incident beam provided by an embodiment of the invention;
fig. 8 is a schematic diagram of spots of an incident light beam at different drifts according to an embodiment of the present invention.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth to illustrate, but are not to be construed to limit the scope of the invention.
As shown in fig. 1, a laser beam pointing measurement apparatus provided for an embodiment of the present invention includes: a beam reduction mirror group M4, a first beam splitter M1, a second beam splitter M2, a rear reflector M3 and a camera system M5; the main optical axis of the beam reduction lens group M4, the center of the first beam splitter M1 and the center of the second beam splitter M2 are on the same straight line;
the distance between the emergent surface of the beam reducing mirror group M4 and the center of the first beam splitter M1 is l 1; the center of the first beam splitter M1 and the center of the second beam splitter M2 are on the same straight line, and the distance between the centers is l 2; the distances between the exit surface of the retroreflector M3 and the center of the first beam splitter M1 are l6 respectively, and the distances between the exit surface of the retroreflector M3 and the center of the second beam splitter M2 are l 3; the sensor plane of the camera module is at a distance l7 from the center of the first beam splitter M1; wherein l1 ═ l3 ═ l6 ═ l 7;
a beam reduction mirror group M4 for reducing the beam diameter of the incident laser;
the beam-reducing mirror group M4 can comprise two beam-reducing mirrors; the beam reduction mirror M4 reduces the incident beam diameter, preferably to below 1 mm.
A first beam splitter M1 for splitting the incident laser light into two beams according to a first preset splitting ratio, wherein one beam propagates to the camera system M5 and the other beam propagates to the second beam splitter M2;
the first beam splitter M1 splits the incident laser into two beams according to a first preset beam splitting ratio, wherein one beam can be reflected by 90 degrees and enter the camera system M5, and the other beam continues to propagate to the second beam splitter M2 along the original direction;
the preset beam splitting ratio of the first beam splitter M1 is T: R, where T represents transmittance, R represents reflectance, T may range from 80 to 95, R may range from 5 to 20, and T + R may be 100; the T% of the incident beam is reflected to enter the camera system M5, and the R% of the incident beam continuously propagates to the second beam splitter M2 along the original direction;
a second beam splitter M2 for splitting the incident laser light into two beams according to a second preset splitting ratio, wherein one beam propagates into the retro-reflector M3;
the second beam splitter M2 splits the incident laser light into two beams according to a second preset splitting ratio, wherein one beam can be reflected at 90 degrees and enter the retroreflector M3, and the other beam continues to propagate along the original direction;
the preset beam splitting ratio of the second beam splitter M2 is T: R, T represents transmittance, R represents reflectance, the value range of T may be similar to that of R, and T + R is 100; the T% of the incident beam is reflected to enter a backward reflector M3, and the R% of the incident beam continuously propagates along the original direction;
a backward reflector M3, configured to reflect an incident light beam and propagate the reflected light beam into the camera system M5, where the reflection direction is parallel to the incident direction and opposite to the incident direction, the distance between the light beam in the incident direction and the backward reflector M3 is l4, the distance between the light beam in the reflection direction and the backward reflector M3 is l5, and l4 is l 5;
a camera system M5 for detecting and displaying a spot of the incident laser light; and the system is also used for calculating the beam pointing direction according to the coordinate information of the continuous light spots.
The camera system M5 may include a camera and a computer system, and the camera may adopt a CMOS camera or a CCD camera; the camera detects the incident light spot and acquires light spot information, and the computer system calculates the coordinates of the light spot on the sensor plane of the camera according to the light spot information and calculates the incident angle, the rotation angle and the translation amount of the incident light beam on the X, Y axis according to the calculated coordinates of the light spot and the position distance information of each component.
The device which combines the beam reduction mirror group M4, the first beam splitter M1, the second beam splitter M2, the backward reflecting mirror M3 and the camera system M5 is used for detecting and displaying the light spots of the incident laser, and the light beam pointing direction is calculated according to the coordinate information of continuous light spots, so that the angle drift and the plane drift can be calculated simultaneously. Meanwhile, a reflector is not used, so that errors caused by inaccurate adjustment of the reflector are avoided; the device has the advantages that a focusing lens is not used, errors caused by the fact that optical axes are not aligned and the camera placing position cannot be accurately located at a focus point are avoided, the construction difficulty of the measuring system is reduced, fewer optical elements are used, the difficulty in achieving the light beam pointing to the measuring system and the measuring errors are greatly reduced, measurement of four-dimensional information can be achieved only by one detector, an image acquisition card does not need to be added, the light beam pointing to the measuring system is directly connected with a computer, and the measuring cost is reduced.
Preferably, in any of the above embodimentsThe camera system M5 is specifically configured to receive successive light spots, including a first light spot C1 and a second light spot C2, and acquire an abscissa x of the first light spot C11And ordinate y1Abscissa x of the second spot C22And ordinate y2(ii) a And also particularly for when the incident beam only has an angle of incidence, according to x2And y2Calculating an incident angle; also specifically for when the incident beam only has a rotation angle, according to x2And y2Calculating a rotation angle;
and also specifically for when there is only translation of the incident beam in the Y direction, according to Y2Calculating the translation amount of the Y axis;
it is also particularly useful when there is only a translation of the incident beam in the X direction, according to X2Calculating the translation amount of an X axis;
and also particularly for when the angle of incidence and the angle of rotation are both non-zero and the X-axis and the Y-axis are translated, according to X1、y1、x2And y2Calculating the translation amount and calculating the rotation angle according to x1、y1、x2And y2Calculating a rotation angle according to x1、y1、x2And y2And calculating the translation amount.
The abscissa x of the first spot C1 is acquired by the camera system M51And ordinate y1Abscissa x of the second spot C22And ordinate y2(ii) a And dividing the drift state of the incident beam according to the drift condition of the incident beam, and calculating the angle drift amount and the translation amount by means of the specific coordinate information of the light spot.
Preferably, in any of the embodiments described above, as shown in FIG. 3
The camera system M5 is particularly useful for calculating the angle of incidence phi according to the following formula when the incident beam only has an angle of incidence,
Figure BDA0002220950060000131
wherein l1 is the distance between the beam shrinking mirror set M4 and the first beam splitter M1; l2 is the distance between the first beam splitter M1 and the second beam splitter M2; l3 is the distance of the retroreflector M3 from the first beam splitter M1; l6 is the distance of the retroreflector M3 from the second beam splitter M2; l7 is the distance of the first beam splitter M1 from the plane of the camera system M5;
or, when there is only a rotation angle of the incident light beam, the rotation angle alpha is calculated according to the following formula,
Figure BDA0002220950060000132
S’1is S1Is equivalent point of, i.e. from S1The light rays emitted from the light source are equivalent to direct S 'after passing through M1, M2 and M3'1Sent out to the camera CA. Wherein, S 'is derivable from geometric knowledge'1O4Has a length of l1+l2+l3+l6+l7Triangular S'1C2O4The vertex angle of (C) is the incident angle, l8 is the radius of the locus circle of the first spot C2, and the formula is obtained:
Figure BDA0002220950060000133
the first light spot C1 and the second light spot C2 on the camera rotate in opposite directions, but the rotation angles of the first light spot C1 and the second light spot C2 are the same, a coordinate system is established by taking the center of the camera as an origin, and the coordinate of C1 is (x)1,y1) And the coordinate of C2 is (x)2,y2). When no translation occurs, the coordinates of the center of the track circle are at the origin, and the radiuses of the two track circles are respectively set as r1And r2According to the above-mentioned geometric relationship, it can be obtained,
Figure BDA0002220950060000141
Figure BDA0002220950060000142
under the condition of a certain incident angle, incident rays can have infinite paths to enter a plane, the rays form a conical surface, all incident points on the incident surface form a circle, and any incident ray can be represented by two angles, namely an incident angle phi and a rotating angle alpha; although the angle between the incident light rays and the plane is not changed, the incident direction is changed, which causes the C1 and C2 on the camera to be on the circle with the radius of l9 and l8, and the circle is called a trajectory circle, as shown in fig. 4.
According to the abscissa x of the second light spot C22And ordinate y2The angle of rotation is calculated through the formula when incident beam only has the incident angle to combine the geometric relation, and the formula when incident beam only has the angle of rotation calculates the incident angle to obtain the angle of incident beam and float, through optimizing back measuring device structure degree of difficulty and reducing, the angle that rethread simple formula was calculated and just can be obtained incident beam floats information, makes the directional measuring process of whole light beam simple easy to operate, and simple structure makes stability stronger simultaneously.
Preferably, in any of the above embodiments, the camera system M5 is specifically configured to calculate the Y-axis translation Δ Y according to the following formula when there is only translation of the incident light beam in the Y direction, as shown in fig. 6
ΔY=|y2|;
Or, when the incident light beam has only a translation in the X-axis direction, the X-axis translation amount Δ X is calculated according to the following formula, as shown in fig. 5
ΔX=|x2|。
When the incident beam has only translation in the X-axis direction, the spots formed by the two rays are coincident, i.e. the first spot C1 is coincident with the second spot C2, but not at the center O of the camera plane3Where the radius of the circle of trajectories of the first spot C1 and the second spot C2 is zero, the centers of the circles coincide, but the center of the circle is not at the center of the camera. Then it is very easyAnd judging that the incident ray is translated relative to the reference ray at the moment and the incident angle is not changed. The distance from the center of the track circle to the center of the camera screen, which is the first light spot C1 or the second light spot C2, is equal to the translation distance of the incident light ray relative to the reference light ray, and the calculation formula is obtained:
ΔX=|x2|,
or
ΔX=|x1|;
When there is only translation of the incident beam in the Y direction, the first and second spots C1 and C2 move away from each other in a direction parallel to the Y axis by the same distance, and the X coordinates of the first and second spots C1 and C2 remain unchanged. The centers of the two light spots are also moved along the Y axis in the same distance. The translation distance in the Y-axis direction is the absolute value of the ordinate of the first spot C1 or the second spot C2, and the calculation formula is obtained:
ΔY=|y2|,
or
ΔY=|y1|。
According to the abscissa x of the second light spot C12And ordinate y2When the translation takes place for the actual light beam, the removal orbit of facula, through the formula calculation facula X, Y axle translation volume to obtain the translation volume at X, Y axle of incident beam, through optimizing back measuring device structure degree of difficulty and reducing, the simple formula of rethread is calculated and just can be obtained incident beam's flat information of floating, makes the directional measuring process of whole light beam simple easy operation, and simple structure makes stability stronger simultaneously.
Preferably, in any of the embodiments described above, as shown in FIG. 7
The camera system M5 is specifically configured to calculate the angle of incidence phi when both the angle of incidence and the angle of rotation are non-zero and the X and Y axes are translated according to the following formula:
Figure BDA0002220950060000151
wherein r is2Is the radius, root, of the circle of locus on which the second spot C2 is locatedCalculated according to the following formula:
Figure BDA0002220950060000152
wherein λ is a constant, and the difference Δ r between the radii of the track circle of the first light spot C1 and the track circle of the second light spot C2 is calculated according to the following formula:
Figure BDA0002220950060000161
alternatively, the rotation angle alpha is calculated according to the following formula,
or, calculating the X-axis translation amount Δ X according to the following formula:
ΔX=|x4|,
wherein x is4Is the center Q of the track circle of the second light spot C24X is calculated according to the following formula4
Figure BDA0002220950060000164
Or, calculating the Y-axis translation amount Δ Y according to the following formula:
ΔY=|y4|,
wherein y is4Is the center Q of the track circle of the second light spot C24Y is calculated according to the following formula4
Figure BDA0002220950060000165
When the incident angle and the rotation angle are not zero and the X axis and the Y axis are translated, the X axis is used as the symmetric point C2 'of the second light spot C2, and the analysis can obtain that the circle center of the track circle where the C2' is located is overlapped with the circle center of the track circle where the first light spot C1 is located, and the difference between the radiuses of the two circles is not changed along with the translation and only has a relation with the incident angle. As shown in figure 7 of the drawings,
the coordinate of C2' is (x)2,-y2). The difference between the radii of the two circles is,
Figure BDA0002220950060000166
after the radius difference Δ r is obtained, the radius of the trajectory circle needs to be further solved, and the radius of the trajectory circle needs to be solved in another triangle which is not on the plane of the camera, refer to fig. 3, because the distance C between C2 and C12C1=C2C4-C1C4Δ r, independent of translation. The radii of the track circles of C2 and C1 are r2And r1Center of circle is O3', the coordinates of the center of the circle are (x)3,y3) Then, from geometric knowledge, one can then:
Figure BDA0002220950060000171
obtaining an incidence angle calculation formula:
Figure BDA0002220950060000172
and obtaining a rotation angle calculation formula according to the coordinates of C2' and the coordinates of the circle center:
Figure BDA0002220950060000173
according to the formula, the center O of the track circle of the second light spot C2 is calculated4Abscissa x of4And ordinate y4
Figure BDA0002220950060000174
Figure BDA0002220950060000175
The coordinate value of the center of the track circle where C2 is located is the translation amount of the light beam along the X axis and the Y axis, and the calculation formula is obtained:
ΔX=|x4|,
ΔY=|y4|。
similarly according to O3', the coordinates are (x)3,y3) And calculating the translation amount.
As shown in fig. 8, fig. 8(a) shows a spot pattern when the laser beam is perpendicularly incident on the first beam splitter M1; FIG. 8(b) a speckle pattern when the laser beam is at zero angle of incidence φ and rotation α; FIG. 8(c) is a speckle pattern of a laser beam at an incident angle φ and a rotational angle α, wherein the arrows indicate the direction of spot movement; FIG. 8(d) is a spot diagram with a laser beam translated at an incident angle φ, a rotation angle α, and an X-axis, wherein the arrows indicate the direction of spot movement; FIG. 8(d) is a spot diagram of a laser beam at an incident angle φ, a rotational angle α, with translation in the X-axis and translation in the Y-axis, where the arrows indicate the direction of spot movement;
when the angle drift and the plane drift exist simultaneously, the X-axis coordinate of the second light spot C2 is used2And ordinate y2Abscissa x of the first spot C11And ordinate y1The auxiliary symmetrical points are made, according to the geometric relation and by combining with an actual formula, the incident angle, the rotation angle and the translation amount of an incident beam at an X, Y axis are obtained, the measuring device is optimized, only one camera is used, the number of detectors is reduced, errors caused by focusing are reduced, the cost is also reduced, and when the floating condition of the incident beam is complex, namely the angle drift and the drift exist simultaneously, the light spots do not need to be repeatedly detected for many times, the angle drift and the drift of the incident beam can be calculated once when the accurate coordinate information of the first light spot C1 and the accurate coordinate information of the second light spot C2 are obtained, the measuring difficulty is reduced, and the measuring workload is reduced.
In one embodiment, a method of laser beam pointing measurement is provided, as shown in fig. 2, the method comprising:
s1, arranging the main optical axis of the beam reducing mirror group M4, the center of the first beam splitter M1 and the center of the second beam splitter M2 on the same straight line;
the distance between the exit surface of the beam reducing mirror set M4 and the center of the first beam splitter M1 is l1(ii) a The center of the first beam splitter M1 and the center of the second beam splitter M2 are on the same straight line and have a distance l2(ii) a The distances between the exit surface of the retroreflector M3 and the center of the first beam splitter M1 are l6 respectively, and the distances between the exit surface of the retroreflector M3 and the center of the second beam splitter M2 are l 3; the sensor plane of the camera module is at a distance l from the center of the first beam splitter M17(ii) a Wherein l1=l3=l6=l7
S2, the beam reducing mirror group M4 reduces the beam diameter of the incident laser;
the beam-reducing mirror group M4 can comprise two beam-reducing mirrors; the beam reduction mirror M4 reduces the incident beam diameter, preferably to below 1 mm.
S3, the first beam splitter M1 splits the incident laser light into two beams according to a first preset splitting ratio, wherein one beam propagates to the camera system M5, and the other beam propagates to the second beam splitter M2;
the first beam splitter M1 splits the incident laser into two beams according to a first preset beam splitting ratio, wherein one beam can be reflected by 90 degrees and enter the camera system M5, and the other beam continues to propagate to the second beam splitter M2 along the original direction;
the preset beam splitting ratio of the first beam splitter M1 is T: R, where T represents transmittance, R represents reflectance, T may range from 80 to 95, R may range from 5 to 20, and T + R may be 100; the T% of the incident beam is reflected to enter the camera system M5, and the R% of the incident beam continuously propagates to the second beam splitter M2 along the original direction;
s4, the camera system M5 displays the light spot projected on the camera system M5 by the light beam transmitted by the first beam splitter M1, and detects the coordinate information of the continuous light spot;
s5, the second beam splitter M2 splits the incident laser into two beams according to a second preset beam splitting ratio, wherein one beam propagates into the retroreflector M3;
the second beam splitter M2 splits the incident laser light into two beams according to a second preset splitting ratio, wherein one beam can be reflected at 90 degrees and enter the retroreflector M3, and the other beam continues to propagate along the original direction;
the preset beam splitting ratio of the second beam splitter M2 is T: R, T represents transmittance, R represents reflectance, the value range of T may be similar to that of R, and T + R is 100; the T% of the incident beam is reflected to enter a backward reflector M3, and the R% of the incident beam continuously propagates along the original direction;
s6, the retroreflector M3 reflects the incident light beam and transmits the reflected light beam to the camera system M5, the reflection direction is parallel to the incidence direction and opposite to the incidence direction, the distance between the light beam in the incidence direction and the retroreflector M3 is l4, the distance between the light beam in the reflection direction and the retroreflector M3 is l5, and l4 is l 5;
s7, the camera system M5 displays the light spot of the light beam transmitted to the rear reflector M3 and detects the coordinate information of the light spot of the light beam;
and S8, calculating beam pointing information from the coordinate information.
The camera system M5 may include a camera and a computer system, and the camera may adopt a CMOS camera or a CCD camera; the camera detects the incident light spot and acquires light spot information, and the computer system calculates the coordinates of the light spot on the sensor plane of the camera according to the light spot information and calculates the incident angle, the rotation angle and the translation amount of the incident light beam on the X, Y axis according to the calculated coordinates of the light spot and the position distance information of each component.
The device which combines the beam reduction mirror group M4, the first beam splitter M1, the second beam splitter M2, the backward reflecting mirror M3 and the camera system M5 is used for detecting and displaying the light spots of the incident laser, and the light beam pointing direction is calculated according to the coordinate information of continuous light spots, so that the angle drift and the plane drift can be calculated simultaneously. Meanwhile, a reflector is not used, so that errors caused by inaccurate adjustment of the reflector are avoided; the device has the advantages that a focusing lens is not used, errors caused by the fact that optical axes are not aligned and the camera placing position cannot be accurately located at a focus point are avoided, the construction difficulty of the measuring system is reduced, fewer optical elements are used, the difficulty in achieving the light beam pointing to the measuring system and the measuring errors are greatly reduced, measurement of four-dimensional information can be achieved only by one detector, an image acquisition card does not need to be added, the light beam pointing to the measuring system is directly connected with a computer, and the measuring cost is reduced.
Preferably, in any of the above embodiments, the spot coordinate information of the probe beam specifically includes: acquiring position information of the first and second light spots C1 and C2 projected on the camera system M5; calculating the abscissa x of the first spot C1 from the position information1And ordinate y1The abscissa x of the second spot C2 is calculated2And ordinate y2
The calculating of the beam pointing information from the coordinate information specifically includes:
when the incident beam only has an incident angle, according to x2And y2Calculating an incident angle;
when the incident beam only has a rotation angle, according to x2And y2Calculating a rotation angle;
when the incident beam has only translation in the Y direction, according to Y2Calculating the translation amount of the Y axis;
when there is only translation of the incident beam in the X direction, according to X2Calculating the translation amount of an X axis;
when the incident angle and the rotation angle are not zero and the X-axis and the Y-axis are translated, according to X1、y1、x2And y2Calculating the translation amount and calculating the rotation angle according to x1、y1、x2And y2Calculating a rotation angle according to x1、y1、x2And y2And calculating the translation amount.
The abscissa x of the first spot C1 is acquired by the camera system M51And ordinate y1Abscissa x of the second spot C22And ordinate y2(ii) a And dividing the drift state of the incident beam according to the drift condition of the incident beam, and calculating the angle drift amount and the translation amount by means of the specific coordinate information of the light spot.
Preferably, in any of the above embodiments, when the incident beam is at only an incident angle, the incident angle is calculated according to the following formula,
Figure BDA0002220950060000211
wherein l1 is the distance between the beam shrinking mirror set M4 and the first beam splitter M1; l2 is the distance between the first beam splitter M1 and the second beam splitter M2; l6 is the distance of the retroreflector M3 from the first beam splitter M1; l3 is the distance of the retroreflector M3 from the second beam splitter M2; l7 is the distance of the first beam splitter M1 from the plane of the camera system M5;
or, when there is only a rotation angle of the incident light beam, the rotation angle alpha is calculated according to the following formula,
the first light spot C1 and the second light spot C2 on the camera rotate in opposite directions, but the rotation angles of the first light spot C1 and the second light spot C2 are the same, a coordinate system is established by taking the center of the camera as an origin, and the coordinate of C1 is (x)1,y1) And the coordinate of C2 is (x)2,y2). When no translation occurs, the coordinates of the center of the track circle are at the origin, and the radiuses of the two track circles are respectively set as r1And r2The geometric relationship can be obtained according to the prior art,
Figure BDA0002220950060000214
according to the abscissa x of the second light spot C22And ordinate y2Combining with geometric relationship, the rotation angle is calculated by a formula when the incident beam only has the incident angle, the incident angle is calculated by a formula when the incident beam only has the rotation angle, so as to obtain the angle drift of the incident beam, the construction difficulty of the measuring device is reduced after optimization, and the angle drift can be calculated by a simple formulaThe angle drift information of the incident beam is obtained, so that the whole beam pointing measurement process is simple and easy to operate, and meanwhile, the stability is stronger due to the simple structure.
Preferably, in any of the embodiments described above, when there is only translation of the incident beam in the Y direction, the Y-axis translation amount ay is calculated according to the following formula,
ΔY=|y2|;
or, when there is only translation of the incident beam in the X-axis direction, the X-axis translation amount ax is calculated according to the following formula,
ΔX=|x2|。
when the incident beam has only translation in the X-axis direction, the spots formed by the two rays are coincident, i.e. the first spot C1 is coincident with the second spot C2, but not at the center O of the camera plane3Where the radius of the circle of trajectories of the first spot C1 and the second spot C2 is zero, the centers of the circles coincide, but the center of the circle is not at the center of the camera. It is easy to judge that the incident ray is shifted with respect to the reference ray without the incident angle change. The distance from the center of the first light spot C1 or the second light spot C2, i.e. the track circle, to the center of the camera frame is equal to the translation distance of the incident light ray relative to the reference light ray, and the calculation formula is obtained:
ΔX=|x2|,
or
ΔX=|x1|;
When there is only translation of the incident beam in the Y direction, the first and second spots C1 and C2 move away from each other in a direction parallel to the Y axis by the same distance, and the X coordinates of the first and second spots C1 and C2 remain unchanged. The centers of the two light spots are also moved along the Y axis in the same distance. The translation distance in the Y-axis direction is the absolute value of the ordinate of the first spot C1 or the second spot C2, and the calculation formula is obtained:
ΔY=|y2|,
or
ΔY=|y1|。
According to the abscissa x of the second light spot C22And ordinate y2When the translation takes place for the actual light beam, the removal orbit of facula, through the formula calculation facula X, Y axle translation volume to obtain the translation volume at X, Y axle of incident beam, through optimizing back measuring device structure degree of difficulty and reducing, the simple formula of rethread is calculated and just can be obtained incident beam's flat information of floating, makes the directional measuring process of whole light beam simple easy operation, and simple structure makes stability stronger simultaneously.
Preferably, in any of the above embodiments, when both the angle of incidence and the angle of rotation are non-zero and the X-axis and the Y-axis are translated, the angle of incidence φ is calculated according to the following formula:
Figure BDA0002220950060000231
wherein r is2The radius of the track circle where the second light spot C2 is located is calculated according to the following formula:
Figure BDA0002220950060000232
the lambda constant and the radius difference deltar between the track circle of the first light spot C1 and the track circle of the second light spot C2 are calculated according to the following formula:
Figure BDA0002220950060000233
Figure BDA0002220950060000234
alternatively, the rotation angle alpha is calculated according to the following formula,
Figure BDA0002220950060000235
or, calculating the X-axis translation amount Δ X according to the following formula:
ΔX=|x4|,
wherein x is4Is the center O of the track circle of the second light spot C24X is calculated according to the following formula4
Figure BDA0002220950060000236
Or, calculating the Y-axis translation amount Δ Y according to the following formula:
ΔY=|y4|,
wherein y is4Is the center O of the track circle of the second light spot C24Y is calculated according to the following formula4
Figure BDA0002220950060000237
When the incident angle and the rotation angle are not zero and the X axis and the Y axis are translated, the X axis is used as the symmetric point C2 'of the second light spot C2, and the analysis can obtain that the circle center of the track circle where the C2' is located is overlapped with the circle center of the track circle where the first light spot C1 is located, and the difference between the radiuses of the two circles is not changed along with the translation and only has a relation with the incident angle. As shown in figure 7 of the drawings,
the coordinate of C2' is (x)2,-y2). The difference between the radii of the two circles is 1,
Figure BDA0002220950060000241
after the radius difference Δ r is obtained, the radius of the trajectory circle needs to be further solved, and the radius of the trajectory circle needs to be solved in another triangle which is not on the plane of the camera, refer to fig. 3, because the distance C between C2 and C12C1=C2C4-C1C4Δ r, independent of translation. The radii of the track circles of C2 and C1 are r2And r1Center of circle is O3', the coordinates of the center of the circle are (x)3,y3) Then, from geometric knowledge, one can then:
Figure BDA0002220950060000242
obtaining an incidence angle calculation formula:
Figure BDA0002220950060000243
and obtaining a rotation angle calculation formula according to the coordinates of C2' and the coordinates of the circle center:
Figure BDA0002220950060000244
according to the formula, the center O of the track circle of the second light spot C2 is calculated4Abscissa x of4And ordinate y4
Figure BDA0002220950060000245
Figure BDA0002220950060000246
The coordinate value of the center of the track circle where C2 is located is the translation amount of the light beam along the X axis and the Y axis, and the calculation formula is obtained:
ΔX=|x4|,
ΔY=|y4|。
similarly according to O3', the coordinates are (x)3,y3) And calculating the translation amount.
According to the qualitative analysis of the scheme, when the angle drift and the drift exist simultaneously, the abscissa x of the second light spot C2 is determined2And ordinate y2Abscissa x of the first spot C11And ordinate y1Making auxiliary symmetrical points, according to the geometric relation and combining with the practical formula to obtain the incident angle, the rotation angle and the translation amount of the incident beam at the X, Y axis, through optimizing the rear measuring device, only using one camera, reducing the number of detectors, reducing the error caused by the focus, reducing the cost, and when the floating condition of the incident beam is complex, namely when the angle drift and the drift exist simultaneously, the scheme does not need to repeatedly detect the light spot for many times, and the accurate measurement is carried outThe angle drift and the drift of the incident light beam can be calculated at one time by determining the coordinate information of the first light spot C1 and the second light spot C2, so that the measurement difficulty is reduced, and the measurement workload is reduced.
The reader should understand that in the description of this specification, reference to the description of the terms "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
In the several embodiments provided in the present application, it should be understood that the disclosed apparatus and method may be implemented in other ways. For example, the above-described method embodiments are merely illustrative, and for example, the division of steps into only one logical functional division may be implemented in practice in another way, for example, multiple steps may be combined or integrated into another step, or some features may be omitted, or not implemented.
The above method, if implemented in the form of software functional units and sold or used as a stand-alone product, may be stored in a computer readable storage medium. Based on such understanding, the technical solution of the present invention essentially or partially contributes to the prior art, or all or part of the technical solution can be embodied in the form of a software product stored in a storage medium and including instructions for causing a computer device (which may be a personal computer, a server, or a network device) to execute all or part of the steps of the method according to the embodiments of the present invention. And the aforementioned storage medium includes: various media capable of storing program codes, such as a usb disk, a removable hard disk, a Read-only memory (ROM), a Random Access Memory (RAM), a magnetic disk, or an optical disk.
While the invention has been described with reference to specific embodiments, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. A laser beam pointing measurement device, comprising: the device comprises a beam shrinking mirror group, a first beam splitter, a second beam splitter, a retro-reflector and a camera system; the main optical axis of the beam reducing mirror group, the center of the first beam splitter and the center of the second beam splitter are on the same straight line;
the beam reducing mirror group is used for reducing the beam diameter of incident laser;
the first beam splitter is used for splitting incident laser into two beams according to a first preset beam splitting ratio, wherein one beam is transmitted to the camera system, and the other beam is transmitted to the second beam splitter;
the second beam splitter is used for splitting the incident laser into two beams according to a second preset beam splitting ratio, wherein one beam is transmitted into the backward reflector;
the backward reflecting mirror is used for reflecting an incident light beam and then transmitting the incident light beam into the camera system, the reflecting direction is parallel to the incident direction and opposite to the incident direction, the distance between the incident direction light beam and the backward reflecting mirror is l4, the distance between the reflecting direction light beam and the backward reflecting mirror is l5, and l4 is l 5;
the camera system is used for detecting and displaying a light spot of the incident laser; and the system is also used for calculating the beam pointing direction according to the coordinate information of the continuous light spots.
2. A laser beam pointing device as claimed in claim 1The device is characterized in that the camera system is specifically configured to receive successive light spots, the light spots including a first light spot and a second light spot, and to acquire an x-coordinate of the first light spot1And ordinate y1The abscissa x of the second light spot2And ordinate y2(ii) a And also particularly for when the incident beam only has an angle of incidence, according to x2And y2Calculating an incident angle; also specifically for when the incident beam only has a rotation angle, according to x2And y2Calculating a rotation angle;
and also specifically for when there is only translation of the incident beam in the Y direction, according to Y2Calculating the translation amount of the Y axis;
it is also particularly useful when there is only a translation of the incident beam in the X direction, according to X2Calculating the translation amount of an X axis;
and also in particular for when said angle of incidence and said angle of rotation are both non-zero and when the X-axis and the Y-axis are translated, according to X1、y1、x2And y2Calculating the translation amount and calculating the rotation angle according to x1、y1、x2And y2Calculating a rotation angle according to x1、y1、x2And y2And calculating the translation amount.
3. The laser beam pointing measurement device of claim 2, wherein the camera system is specifically configured to calculate the angle of incidence φ according to the following formula when the incident beam has only angle of incidence,
wherein l1 is the distance between the beam reducing mirror group and the first beam splitter; l2 is the distance between the first beam splitter and the second beam splitter; l6 is the distance of the retroreflector from the first beam splitter; l3 is the distance of the retroreflector from the second beam splitter; l7 is the distance of the first beam splitter from the plane of the camera system;
or, when there is only a rotation angle of the incident light beam, the rotation angle alpha is calculated according to the following formula,
Figure FDA0002220950050000022
4. the laser beam pointing measurement device according to any of claims 2, wherein the camera system is specifically configured to calculate the Y-axis translation amount Δ Y according to the following formula when there is only translation in the Y-direction of the incident beam,
ΔY=|y2|;
or, when there is only translation of the incident beam in the X-axis direction, the X-axis translation amount ax is calculated according to the following formula,
ΔX=|x2|。
5. the laser beam pointing measurement device of claim 2, wherein the camera system is specifically configured to calculate the angle of incidence φ according to the following equation when the angle of incidence and the angle of rotation are both non-zero and the X-axis and the Y-axis are translated:
Figure FDA0002220950050000023
wherein r is2Calculating the radius of the track circle where the second light spot is located according to the following formula:
Figure FDA0002220950050000031
wherein λ is a constant, and a difference Δ r between radii of a track circle where the first light spot is located and a track circle where the second light spot is located, and λ and Δ r are calculated according to the following formulas respectively:
Figure FDA0002220950050000032
Figure FDA0002220950050000033
alternatively, the rotation angle alpha is calculated according to the following formula,
Figure FDA0002220950050000034
or, calculating the X-axis translation amount Δ X according to the following formula:
ΔX=|x4|,
wherein x is4Is the center O of the track circle of the second light spot4X is calculated according to the following formula4
Or, calculating the Y-axis translation amount Δ Y according to the following formula:
ΔY=|y4|,
wherein y is4Is the center O of the track circle of the second light spot4Y is calculated according to the following formula4
Figure FDA0002220950050000036
6. A method for measuring the direction of laser beam is characterized by that,
s1, arranging the main optical axis of the beam reducing mirror group, the center of the first beam splitter and the center of the second beam splitter on the same straight line;
s2, the beam reducing mirror group reduces the beam diameter of the incident laser;
s3, the first beam splitter splits the incident laser into two beams according to a first preset beam splitting ratio, wherein one beam is transmitted to the camera system, and the other beam is transmitted to the second beam splitter;
s4, the camera system displays light spots projected on the camera system by the light beams according to the light beams transmitted by the first beam splitter, and detects continuous light spot coordinate information;
s5, the second beam splitter divides the incident laser into two beams according to a second preset beam splitting ratio, wherein one beam is transmitted to the backward reflector;
s6, reflecting the incident light beam by the retroreflector and then transmitting the reflected light beam into the camera system, wherein the reflecting direction is parallel to the incident direction and opposite to the incident direction, the distance between the incident direction light beam and the retroreflector is l4, the distance between the reflecting direction light beam and the retroreflector is l5, and l4 is l 5;
s7, the camera system displays the light spot of the light beam transmitted by the backward reflector and detects the coordinate information of the light spot of the light beam;
and S8, calculating the light beam pointing information according to the coordinate information.
7. The method of claim 6, wherein the laser beam pointing measurement is performed by a laser beam pointing measurement device,
the detecting of the spot coordinate information of the light beam specifically includes: acquiring position information of a first light spot and a second light spot projected on the camera system; calculating the abscissa x of the first light spot according to the position information1And ordinate y1Calculating the abscissa x of the second light spot2And ordinate y2
The calculating of the beam pointing information according to the coordinate information specifically includes:
when the incident beam only has an incident angle, according to x2And y2Calculating an incident angle;
when the incident beam only has a rotation angle, according to x2And y2Calculating a rotation angle;
when the incident beam has only translation in the Y direction, according to Y2Calculating the translation amount of the Y axis;
when there is only translation of the incident beam in the X direction, according to X2Calculating the translation amount of an X axis;
when the incident angle and the rotation angle are not zero and the X-axis and the Y-axis are translated, according to X1、y1、x2And y2Calculating the translation amount and calculating the rotation angle according to x1、y1、x2And y2Calculating a rotation angle according to x1、y1、x2And y2And calculating the translation amount.
8. The method of claim 6, wherein the laser beam pointing measurement is performed by a laser beam pointing measurement device,
when only the incident angle exists in the incident light beam, the incident angle phi is calculated according to the following formula,
Figure FDA0002220950050000041
wherein l1 is the distance between the beam reducing mirror group and the first beam splitter; l2 is the distance between the first beam splitter and the second beam splitter; l6 is the distance of the retroreflector from the first beam splitter; l3 is the distance of the retroreflector from the second beam splitter; l7 is the distance of the first beam splitter from the plane of the camera system;
or, when there is only a rotation angle of the incident light beam, the rotation angle alpha is calculated according to the following formula,
Figure FDA0002220950050000051
9. the method of claim 7, wherein when there is only translation of the incident beam in the Y direction, the Y-axis translation Δ Y is calculated according to the following formula,
ΔY=|y2|;
or, when the incident light beam only has translation in the X-axis direction, the X-axis translation amount DeltaX is calculated according to the following formula,
ΔX=|x2|。
10. the method of claim 7, wherein when the incident angle and the rotation angle are not zero and the X-axis and the Y-axis are shifted, the incident angle φ is calculated according to the following formula:
Figure FDA0002220950050000052
wherein r is2Calculating the radius of the track circle where the second light spot is located according to the following formula:
Figure FDA0002220950050000053
the lambda constant and the radius difference delta r between the track circle of the first light spot and the track circle of the second light spot are respectively calculated according to the following formula:
Figure FDA0002220950050000054
Figure FDA0002220950050000055
alternatively, the rotation angle alpha is calculated according to the following formula,
or, calculating the X-axis translation amount Δ X according to the following formula:
ΔX=|x4|,
wherein x is4Is the center O of the track circle of the second light spot4X is calculated according to the following formula4
Figure FDA0002220950050000062
Or, calculating the Y-axis translation amount Δ Y according to the following formula:
ΔY=|y4|,
wherein y is4Is the center O of the track circle of the second light spot4Y is calculated according to the following formula4
Figure FDA0002220950050000063
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