CN102183213B - Aspherical mirror detection method based on phase measurement deflection technology - Google Patents
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Abstract
A method for detecting aspherical mirror based on phase measurement deflection technique is characterized by that its detection system is formed from display screen, camera, electric control translation stage, semi-transparent semi-reflecting mirror and electronic computer. The optical center of the camera is arranged on the optical axis of the lens to be measured. The positive (remaining) chord stripe map is generated by a computer and displayed on a display screen. And projecting the fringe pattern on the display screen on the measured mirror, and shooting by a camera after reflecting the fringe pattern. In the measuring process, the measured mirror is fixed on the electric control translation table and can accurately move along the optical axis under the control of a computer. And analyzing and processing the stripe image shot in the moving process of the measured mirror to obtain phase distribution, and then calculating to obtain the relation between the normal distance of the aspheric surface and the normal angle, namely the normal of the aspheric surface is converged to describe the surface shape of the aspheric surface. Meanwhile, the normal assembly can be converted into a rectangular coordinate system for evaluation through geometric calculation. The invention has larger dynamic measurement range and provides a test means for the fine grinding and initial polishing stages of the aspheric surface reflector with larger wavefront change range in the processing process.
Description
Technical field
The present invention relates to a kind of optical detective technology, especially a kind of detection method to aspheric mirror belongs to the advanced optical length of schooling and makes and the detection technique field.
Background technology
So-called aspherical optical element, be meant face shape by the multinomial equation of higher degree determine, the radius optical element all inequality of each point on the face shape.Aspheric surface optical accessory can aberration correction, improve picture element, enlarge the visual field, and makes that optical system structure is simplified, weight saving.Along with optical precision processing and optoelectronic development, aspheric surface is applied in the various optical systems more and more widely.Therefore, along with aspheric surface application more and more widely, the aspheric high-acruracy survey of the dark type of aspheric measurement especially heavy caliber is become a present hot issue.Aspheric for a long time manufacturing and detection technique are that the detection of two hang-ups, especially aperture aspherical of its widespread use of restriction is all the more so always.As everyone knows, aperture aspherical is the key point of the whole aspherical mirror machining efficient of influence in the detection in correct grinding stage.Usually the interferometry technology that adopts at present, its precision is very high, can reach 1/tens wavelength.But it is very little that it measures dynamic range, when measuring aspheric surface, generally all need make auxiliary element, and also very responsive to the disturbance of the vibration of machinery and air simultaneously, the environment to use has very high requirement like this.Simultaneously, in the fine grinding process, because its surface is more coarse, face shape error is bigger, also is not suitable for detecting with conventional methods such as interferometries.Three-coordinates measuring machine is with gauge head tested surface to be carried out contact type measurement, and is therefore very bothersome, time-consuming, and precision influenced by gauge head, motion big especially, the bore of measurement also is restricted, and just can't use the minute surface greater than usable range.
Summary of the invention
Technology of the present invention is dealt with problems: the deficiency that overcomes prior art; A kind of aspheric mirror detection method based on phase measurement deviation art is provided; This method has bigger range of dynamic measurement, for non-spherical reflector correct grinding and the first polishing stage that the wavefront variation range is bigger in the process provides measuring means.
Technical solution of the present invention: a kind of aspheric mirror detection method based on phase measurement deviation art, its characteristics are: the detection system of employing is made up of display screen, the video camera of having demarcated, electronic control translation stage, semi-transparent semi-reflecting lens and robot calculator; The photocentre of video camera places on the optical axis of mirror to be measured; The display screen plane is perpendicular to the measured lens optical axis; And show that by computing machine generation sine or cosine bar graph after measured lens and semi-transparent semi-reflecting mirror reflection, received by video camera, promptly video camera is observed display screen through mirror to be measured; Photograph that images displayed is a stripe on the display screen; The stripe pattern taken of the video camera face shape information of just having carried measured lens like this can deform and is different from the standing striation figure that display screen shows, deflection depends on the face shape of measured lens; In measuring process, measured lens is fixed on the electronic control translation stage, and optical axis accurately moves in the control lower edge of computing machine, and the position of video camera, semi-transparent semi-reflecting lens and display screen all remains unchanged.Because in the measured lens moving process, camera position remains unchanged, so variation has taken place both relative positions, the imaging rate of video camera can change, and the zone on the observed display screen also can change; In different positions, the pixel cell of video camera can arrive the diverse location on the display screen, and note different stripe patterns from the reflection of the difference on the mirror to be measured; Use phase-shifting technique and phase unwrapping technology that the stripe pattern of record is handled the PHASE DISTRIBUTION that obtains each position, calculate the relation of aspheric surface normal distance and normal angle again, promptly aspheric normal is remitted and is described aspheric shape; Simultaneously can also be transformed into rectangular coordinate system through geometrical calculation, tested minute surface shape is estimated by the method congruence.
Said sine or cosine bar graph can be the standard sine or the cosine bar graphs of two vertical direction (like level, vertical direction), also can be annular standard sine or cosine bar graph.
Said stripe pattern carries out analyzing and processing, and to obtain PHASE DISTRIBUTION be through repeatedly (more than or equal to 3 times) phase shift, adopts phase-shifting technique to obtain blocking PHASE DISTRIBUTION, obtains continuous PHASE DISTRIBUTION through the phase unwrapping technology again.
The said relation that calculates aspheric surface normal distance and normal angle is according to reflection law, the position that distributes and to find original light, deviation light to overlap through continuous phase with tested minute surface normal, thus obtain normal distance and normal angle.
The described method congruence is transformed into adjacent 2 points that rectangular coordinate system is a close on the aspheric surface through geometrical calculation; Can be similar to regard as and be on the same section circular arc; Find the center and the diameter of this circular arc according to the normal distance and the relation of the method congruence, the rectangular coordinate that can calculate tested surface shape in conjunction with geometric relationship distributes.
The present invention's advantage compared with prior art is:
(1) the present invention has bigger measurement dynamic range, can be used for the correct grinding and the detection in polishing stage that the dark type aspheric surface of heavy caliber is made, compares with three-dimensional coordinate measuring instrument, can once accomplish measurement of full field, and more convenient and quicker saves time.
(2) the present invention does not have specific (special) requirements to environment, can in workshop condition, detect.
(3) the present invention is simple in structure, dirigibility is high, need not the special optical element, and cost is very cheap.
(4) detection method of the present invention can be used the aspheric method congruence; It is the normal distance and the relation of normal angle; Aspheric shape described; More know and explained the principle and the measuring process of institute's extracting method, also make computing formula and computation process more succinct, also can be transformed into rectangular coordinate system evaluation simultaneously.
(5) the structure pattern and the phase-shifting technique that are adopted among the present invention have quite high precision, and can suppress the influence to testing result of noise and surrounding environment effectively.
Description of drawings
Fig. 1 is aspheric normal remittance synoptic diagram;
Fig. 2 is a realization synoptic diagram of the present invention;
Light when Fig. 3 measures for the present invention changes synoptic diagram, and wherein Fig. 3 (a), Fig. 3 (b), Fig. 3 (c), Fig. 3 (d), Fig. 3 (e) represent respectively in the moving process of measured lens away from detection system, the light synoptic diagram during diverse location;
The striped of camera record changed synoptic diagram when Fig. 4 the present invention measured, and wherein Fig. 4 (a), Fig. 4 (b), Fig. 4 (c), Fig. 4 (d), Fig. 4 (e) represent respectively in the moving process of measured lens away from detection system, the striped synoptic diagram of the camera record during diverse location;
Fig. 5 measuring principle synoptic diagram of the present invention; Wherein: OM is the distance of video camera photocentre and display screen;
Fig. 6 recovers face shape schematic diagram by the aspheric surface normal.
Embodiment
As shown in Figure 1, in fact, any aspheric surface all has the method congruence, and its normal and optical axis meet at difference and constitute different angles, and be as shown in Figure 1.Aspheric surface not only can characterize with its rectangular coordinate system equation, also can characterize with the angle of vertical normal aberration and normal and optical axis.Explanation for ease, the present invention is called the normal distance with distance between the intersection point of aspheric surface summit and aspheric surface normal and optical axis, representes with p; The aspheric surface normal is called normal angle for the inclination angle of optical axis, representes with u.Obviously, aspheric surface except can characterizing with rectangular coordinate system, character that can also the usage congruence, promptly normal characterizes apart from the continuous function g:p=g (u) that concerns of p and normal angle u.
As shown in Figure 2, the detection system among the present invention is made up of display screen, video camera, electronic control translation stage, semi-transparent semi-reflecting lens and robot calculator.To show on the display screen that annular sine streak characteristic pattern is that example describes, when showing other form bar graphs, have similar measuring process below, this example does not comprise all the elements of this patent.
The first step, the building of detection system.At first video camera is demarcated and obtained its intrinsic parameter and outer parameter, i.e. the relation of two-dimensional image information and world's three dimensional space coordinate conversion.Camera marking method is a lot, like the two-step approach of Tsai and Roger proposition, the plane reference method that Zhang Zhengyou proposes etc.Photocentre O with video camera places on the optical axis of measured lens then, its optical axis and measured lens optical axis coincidence.Measured lens is fixed on the electronic control translation stage, can accurately moves by optical axis in the control lower edge of computing machine.Produce just (surplus) string bar graph of annular by computing machine, and be presented on the display screen.Bar graph on the display screen is projected on the measured lens, reflects the back and take by video camera.
Second step, stripe pattern collection and analysis.Keep the position of video camera, semi-transparent semi-reflecting lens and display screen all motionless, the computer control electronic control translation stage accurately moves measured lens on optical axis direction.In moving process, variation has taken place in the relative position of measured lens and video camera, so change has taken place the imaging rate of video camera, change has also taken place the zone on the observed display screen.In different positions, the pixel cell of video camera can arrive the diverse location on the display screen from the reflection of the difference on the mirror to be measured, like Fig. 3, and notes different stripe patterns, like Fig. 4.Using phase-shifting technique and phase unwrapping technology that the stripe pattern of record is handled the corresponding phase that obtains the diverse location place distributes.
The 3rd step, the computing method congruence.In the measuring process, the position of measured lens is respectively p
0p
1P
nHere light is regarded as from the video camera outgoing, through the measured lens reflection deviation is taken place and arrive display screen,, claim that reflection ray is a deviation light so claim that the video camera emergent ray is original light.From p
0To p
nMoving process in, light can be by the difference S on the mirror to be measured
0S
1S
nReflect, and intersect at difference with display screen.Because in the moving process, the cycle of ring-shaped stripe is constant, and the joining of deviation light and display screen is gradually away from optical axis, so the phase value that obtains at diverse location is different, its absolute value trend is dull increase.At each p place, position, use the striped phase-shifting technique respectively and block phase developing method, can obtain pairing out of phase value
When mirror to be measured is in a specific position p
kThe time, p=p just
k, the original light of pixel k correspondence is at mirror S to be measured
kPlace's reflection becoming deviation light and former road are returned.According to reflection law, this moment, mirror to be measured was at S
kThe normal of point overlaps with original light, deviation light, i.e. S
kO is exactly minute surface shape S to be measured
kThe normal at some place.
Geometric relationship from Fig. 5 can obtain, the p in the position
kThe place, the phase values phi that pixel k measures
kCan be expressed as:
Ф
k＝2п(tanu
k＊OM)/T(1)
In the formula, OM is the distance of video camera photocentre and display screen; T is the cycle that display screen shows annular sine streak; Ф
kBe called the canonical reference phase value.In the fringe phase information of diverse location pixel cell k record and the parameter of measuring system, just can calculate position p according to mirror to be measured
kLike this, just obtained minute surface face shape to be measured at S
kThe normal at some place is apart from p
kWith normal angle u
kRelation, determined the method congruence of minute surface face shape to be measured, the face shape of minute surface to be measured has also just been described.S
kIt is normal angle u that point is called
kMatch point.
Computing method are discussed below, and the position of mirror to be measured can be expressed as vectorial P:
P＝[p
0p
1……p
n] (2)
The phase value that pixel cell k obtains when mirror to be measured is in diverse location P can be expressed as vector
Through fitting of a polynomial, the relation of P and
can be represented with function F:
Obtain angle u by 1 formula
kCorresponding canonical reference phase values phi
kAnd the substitution following formula, just can obtain p
kThis representes that minute surface face shape to be measured is at S
kThe normal at some place is apart from p
k, normal angle is u
kHere normal is represented with discrete data apart from the relation of p and normal angle u, can the relation of normal angle and normal distance be used fitting of a polynomial, is expressed as continuous function G:
p＝G(u) (5)
Function G has been represented the method congruence of minute surface to be measured, has also described the face shape of mirror to be measured.
In the 3rd step, obtain tested minute surface shape rectangular coordinate by the aspheric surface normal and distribute.As shown in Figure 6, establishing S is minute surface shape to be measured, vectorial S ([S
0S
K-1S
kS
K]) be expressed as normal angle u ([u
0U
K-1u
kU
K]) match point, corresponding normal is apart from being p ([p
0P
K-1p
kP
K]).When angle u becomes in 0 the time value L of function G
0Be exactly the apex sphere radius-of-curvature of minute surface to be measured, that is:
Be without loss of generality, establish Q
kBe the adjacent normal S of minute surface shape to be measured
K-1Q
kAnd S
kQ
kIntersection point.Because p
kWith p
K-1Difference very little, normal S
K-1Q
kAnd S
kQ
kVery approaching, so some S
K-1And S
kCan regard as and be on the same circular arc, center of this circle is Q
kPoint, so equate to have following approximation relation according to radius:
Q
kS
k≈Q
kS
k-1 (7)
S sets up an office
kTo intersection point p
kDistance be L
k, i.e. S
kP
k=L
k, then following formula can be expressed as:
L
k+p
kQ
k≈L
k-1+p
k-1Q
k (8)
At Δ p
kP
K-1Q
kIn, can get according to the triangle sine:
Simultaneous 8 formulas, 9 formulas, L
kExpression can for:
The face figurate number strong point S that representes with the rectangular coordinate system form
k(y
k, x
k) be expressed as:
The rectangular coordinate that has so just obtained tested minute surface shape distributes.
The present invention does not set forth part in detail and belongs to techniques well known.
Claims (3)
1. aspheric mirror detection method based on phase measurement deviation art, it is characterized in that: the detection system of employing is made up of display screen, the video camera of having demarcated, electronic control translation stage, semi-transparent semi-reflecting lens and robot calculator; The photocentre of video camera places on the optical axis of mirror to be measured; The display screen plane is perpendicular to the measured lens optical axis; And show that by computing machine generation sine or cosine bar graph after measured lens and semi-transparent semi-reflecting mirror reflection, received by video camera, promptly video camera is observed display screen through mirror to be measured; Photograph that images displayed is a stripe on the display screen; The stripe pattern taken of the video camera face shape information of just having carried measured lens like this can deform and is different from the standing striation figure that display screen shows, deflection depends on the face shape of measured lens; In measuring process, measured lens is fixed on the electronic control translation stage, and optical axis accurately moves in the control lower edge of computing machine, and the position of video camera, semi-transparent semi-reflecting lens and display screen all remains unchanged; Because in the measured lens moving process, camera position remains unchanged, so variation has taken place both relative positions, the imaging rate of video camera can change, and the zone on the observed display screen also can change; In different positions, the pixel cell of video camera can arrive the diverse location on the display screen, and note different stripe patterns from the reflection of the difference on the mirror to be measured; Use phase-shifting technique and phase unwrapping technology that the stripe pattern of record is handled the PHASE DISTRIBUTION that obtains each position, calculate the relation of aspheric surface normal distance and normal angle again, promptly aspheric normal is remitted and is described aspheric shape; Simultaneously be transformed into rectangular coordinate system through geometrical calculation, tested minute surface shape is estimated by the method congruence;
The said relation that calculates aspheric surface normal distance and normal angle is according to reflection law, the position that distributes and to find original light, deviation light to overlap through continuous phase with tested minute surface normal, thus obtain aspheric surface normal distance and normal angle;
Describedly be transformed into rectangular coordinate system through geometrical calculation by the method congruence; Adjacent 2 points of close on the aspheric surface; Approximate regarding as is on the same section circular arc; Find the center and the diameter of this circular arc according to the aspheric surface normal distance and the relation of the method congruence, the rectangular coordinate that calculates tested surface shape in conjunction with geometric relationship distributes.
2. the aspheric mirror detection method based on phase measurement deviation art according to claim 1 is characterized in that: said sine or cosine bar graph are the standard sine or the cosine bar graphs of two vertical direction, or annular standard sine or cosine bar graph.
3. the aspheric mirror detection method based on phase measurement deviation art according to claim 1; It is characterized in that: said stripe pattern carries out analyzing and processing, and to obtain PHASE DISTRIBUTION be through repeatedly phase shift; Adopt phase-shifting technique to obtain blocking PHASE DISTRIBUTION, obtain continuous PHASE DISTRIBUTION through the phase unwrapping technology again.
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| CN102494634B (en) * | 2011-11-18 | 2014-07-09 | 中国科学院光电技术研究所 | Off-axis aspherical mirror detection method based on fringe reflection |
| CN102539123B (en) * | 2012-01-16 | 2014-10-29 | 中国科学院西安光学精密机械研究所 | High-precision centering processing method for large-caliber aspheric reflector |
| CN103075975B (en) * | 2012-12-26 | 2015-08-12 | 中国科学院上海光学精密机械研究所 | The surface testing method of high reflectance concave surface taper reflection |
| CN103727897B (en) * | 2014-01-21 | 2016-11-16 | 杭州先临三维科技股份有限公司 | Class minute surface Surface Test Method |
| CN104075667B (en) * | 2014-06-25 | 2016-09-21 | 中国科学院光电技术研究所 | Measurement system and method for extracting aspheric surface shape based on annular scanning slope |
| CN105806257B (en) * | 2016-03-12 | 2019-02-22 | 上海大学 | A kind of high reflection body surface light field deviation art measuring system and method |
| CN105937887B (en) * | 2016-04-21 | 2019-05-03 | 复旦大学 | Intersect the three dimension profile measurement method of grid stripes based on three-valued three color |
| CN106017863A (en) * | 2016-05-11 | 2016-10-12 | 上海应用技术学院 | Phase measurement deflection method for aspheric surface detection |
| CN106247967A (en) | 2016-08-18 | 2016-12-21 | 京东方科技集团股份有限公司 | The measurement apparatus of a kind of substrate warp amount and method |
| CN106197322B (en) * | 2016-09-20 | 2019-04-02 | 电子科技大学 | A kind of area-structure light three-dimension measuring system and its measurement method |
| CN106546192B (en) * | 2016-10-12 | 2019-08-06 | 上海大学 | A kind of high reflection Free-Form Surface and system |
| CN107271025B (en) * | 2017-06-20 | 2023-04-11 | 福州大学 | Device and method for synchronously measuring three-dimensional vibration of rotating shaft |
| CN108413894A (en) * | 2018-03-12 | 2018-08-17 | 四川大学 | A kind of phase measurement deviation art method of shearing dislocation absolute measurement |
| CN109916304B (en) * | 2019-04-01 | 2021-02-02 | 易思维（杭州）科技有限公司 | Mirror surface/mirror surface-like object three-dimensional measurement system calibration method |
| CN110260817B (en) * | 2019-06-27 | 2020-11-20 | 复旦大学 | Complex surface deflection measurement self-positioning method based on virtual mark points |
| CN110986829A (en) * | 2019-12-22 | 2020-04-10 | 复旦大学 | High-precision measurement method for large-curvature complex mirror surface by using compensation mirror |
| CN112504162B (en) * | 2020-12-04 | 2022-07-26 | 江苏鑫晨光热技术有限公司 | Heliostat surface shape rapid resolving system and method |
| CN114778550A (en) * | 2022-04-12 | 2022-07-22 | 上海盛相工业检测科技有限公司 | Object surface feature detection device and method compatible with photometric stereo method and phase deflection method |
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