CN104374763A - Adjustable reheating double pulse laser-induced breakdown spectroscopy device - Google Patents
Adjustable reheating double pulse laser-induced breakdown spectroscopy device Download PDFInfo
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Abstract
The invention discloses an adjustable reheating double pulse laser-induced breakdown spectroscopy device. The device comprises a first laser device, a second laser device, a time delay generator and a sample table, wherein an optical path raising system is arranged in the optical path of the first laser device and used for raising the optical path of the first laser device so that first laser can be focused onto the surface of a sample from a position right above the sample table to generate plasmas; the time delay generator is used for controlling the trigger timing of the first laser device and the second laser device; a frequency doubler is arranged in the optical path of the second laser device, and second laser penetrating through the frequency doubler is used for reheating the plasmas. The device further comprises a signal acquiring and processing system which is capable of displaying the distribution information of elements on the surface of the sample according to the characteristic spectral lines emitted by plasma cooling and the space information of the first laser striking the sample. The adjustable reheating double pulse laser-induced breakdown spectroscopy device realizes a double pulse laser-induced breakdown spectroscopy reheating working mode and creates conditions for strengthening the element content detection signals of fragile samples (such as biological samples).
Description
Technical field
The present invention relates to laser spectrum tech field, particularly one is adjustable heats double-pulse laser induced breakdown spectral device again.
Background technology
LIBS is the abbreviation of Laser-Induced Breakdown Spectroscopy (laser induced breakdown spectrograph), the plasma ablation that this technology utilizes pulse laser to produce material in excited sample (being generally solid), and obtain by spectrometer the spectrum that Plasma-Atomic launches that is excited, identify the element constituent in sample with this, and then the identification of material, classification, qualitative and quantitative test can be carried out.This technology, without the need to carrying out pre-service to sample, can realize long-range, micro-damage fast and detect sample element (especially metallic element), can be used for the detection of solid, gas, fluid sample.The application of Laser-induced Breakdown Spectroscopy is also very extensive, as heavy metal analysis and explosive detection etc. in biomedicine, archaeology, environmental monitoring, water.
Compared with single-pulse laser induced breakdown spectroscopy, double-pulse laser induced breakdown spectrum can strengthen signal greatly.Patented claim as publication number CN 102854172 A provides a kind of method of double-pulse laser induced breakdown spectrograph system and spectral analysis thereof, and described spectrometer system comprises pulsed laser, completely reflecting mirror, condenser lens, sample stage, ellipsoidal surface mirror, the light collecting system of optical radiation, spectrometer, computing machine, high-voltage pulse power source; Described pulsed laser in order to produce laser, laser after completely reflecting mirror by condenser lens focussing force on the sample being positioned at sample stage; The optical radiation that sample produces after pulsed laser and high-voltage pulse power source discharge process is by entering spectrometer through light collecting system again after the reflection of ellipsoidal surface mirror; Described computing machine is connected with spectrometer with pulsed laser, high-voltage pulse power source, in order to responsible communication and total activation commander.
Heating is a kind of vertical operation mode of double-pulse laser induced breakdown spectrum again, refers to again heat with the second bundle laser the effect reaching and strengthen signal to the plasma of the first bundle laser excitation.Heating work Method compare is suitable for the enhancing of more fragile sample signal again, as plant leaf blade, animal tissue etc.But, then heat that LIBS system fading margin parameter is many, difficulty is large, regulates complicated, domesticly at present there is no Patents.
Summary of the invention
For realizing realizing Laser-induced Breakdown Spectroscopy heating work mode again on same device, the invention discloses and a kind of adjustablely heat double-pulse laser induced breakdown spectral device again, overcome the problem that this working method regulates difficulty, can regulate running parameter quickly and accurately, improve the repeatability of detection, optimum signal-noise ratio can be obtained under different running parameters.
Concrete technical scheme of the present invention is as follows:
One is adjustable heats double-pulse laser induced breakdown spectral device again, comprises the first laser instrument, second laser, delay time generator and sample stage; The light path of described first laser instrument is furnished with light path to climb system, this light path climbs system for raising the light path of the first laser, makes the first laser focus on sample surfaces by directly over sample stage, produces plasma; Described delay time generator is for controlling the activation schedule of the first laser instrument and second laser; The light path of described second laser is furnished with a times frequency generator, and the second laser through times frequency generator is used for heating described plasma again; Also comprise signal acquisition and processing system, cool the spatial information of characteristic spectral line and the first laser impact sample sent according to plasma, display element is in the distributed intelligence of sample surfaces.
Wherein, the first described laser instrument and the light path of second laser are equipped with energy attenuator and the laser energy real-time monitoring system for real-time detection record laser energy; The first described laser through the outgoing of laser energy real-time monitoring system laggard enter light path to climb system; The second described laser focuses to plasma after the outgoing of laser energy real-time monitoring system.
When applying Laser-induced Breakdown Spectroscopy and detecting, sample properties to be detected is different, and the laser energy needed for it is also different.For realizing the detection of sample as fragile in plant leaf blade, animal tissue etc. or reducing laser to the damage of sample, usually need to decay to the energy of laser.But, by regulating laser diode voltage, decay is carried out to energy and laser energy can be caused unstable, and then affect testing result.The present invention adopts energy attenuator to decay to laser energy, and its attenuation range is 1% ~ 99%.Laser energy real-time detecting system is mainly used in the energy of real-time detection record laser, for judging whether the fluctuation of energy of lasers occurs exception, and carries out subsequent data analysis.When follow-up carry out data analysis time, can according to energy variation, the line strength obtained is compensated.Wherein, described signal acquisition and processing system comprises: optical fiber collection system, cools for collecting plasma the characteristic spectral line sent; Beam splitting system, for carrying out light splitting to characteristic spectral line; Detector, for being converted to electric signal by the light signal of beam splitting system; Sample surface imaging system, for monitoring the first laser impact sample position, obtains the spatial information of sampled point; Computing machine, according to the spatial information of described electric signal and sampled point, display element is in the distributed intelligence of sample surfaces.
First laser instrument sends pulse laser, through optical system, impact is on sample, when energy density forms plasma higher than during the threshold value excited, the laser article on plasma that second laser produces heats again, and plasma cooling sends the characteristic spectral line of different wave length, collect via optical fiber collection system, through beam splitting system, detected by detector, and Graphics Processing on computers.
Preferably, described beam splitting system is echelle spectrometer.
Echelle spectrometer is the spectrometer using echelle grating as dispersion element, disposablely can obtain full modal data without the need to raster scanning, can avoid conventional spectrograph hyperchannel head and the tail section Bonding Problem.Echelle spectrometer inner inorganic tool part, stability is higher, and resolution can reach 0.08nm, can meet spectral line light splitting requirement.
Wherein, described sample surface imaging system comprises: for the LED light source for illuminating from positive dirction illuminated sample, is positioned at the beam splitter on LED light source for illuminating optical axis, CCD camera and imaging lens, for gathering the sample surfaces image information of beam splitter reflection.
Preferably, described light path system of climbing is made up of the first catoptron, the second catoptron and the 3rd catoptron, and described second catoptron is positioned at directly over the first catoptron, and the 3rd catoptron is positioned at directly over sample stage; The first described catoptron, the second catoptron and the 3rd catoptron are Nd:YAG double-frequency laser catoptron.
The light path system of climbing is mainly used in lifting light path, and will in the horizontal direction laser conversion for vertically to propagate.The application light path system of climbing effectively can be avoided raising laser positions and cause the laser factors of instability.Laser impacts sample surfaces directly over sample, is conducive to effectively exciting of plasma, ensures that plasma uniformity is symmetrical.
Preferably, described delay time generator controls the first laser instrument and second laser adjusts Q triggered time and xenon lamp to open the triggered time, and the first laser instrument and second laser adjust the triggered time of Q signal 150 ± 20 μ s after xenon lamp signal triggers.This sequential the energy stability that at utmost can ensure Double-impulse solid laser is set.
Preferably, the focusing lens in the light path of described first laser instrument and second laser are arranged on the Lens mounting carrier that is slidably matched along optical axis, for regulating the distance of sample and lens, thus control impact to the laser parameter on sample.
The distance of lens and sample is the important parameter of Laser-induced Breakdown Spectroscopy, directly affects the laser parameter of laser at object to be excited.As a rule, the distance of lens and sample should be less than the focal length of lens.When lens and sample distance reduce, the diameter of impact point will increase, and radiancy and flux-time all can reduce.Therefore, lens being arranged on the Lens mounting carrier that is slidably matched along optical axis can according to the distance of sample properties and actual demand fine adjustment lens and sample.
Preferably, described sample stage comprises the electric displacement platform with four-degree-of-freedom, the objective table being movably arranged on the lifter plate on electric displacement platform and being slidably fitted on electric displacement platform; Described lifter plate is provided with transparent constraint window, impacts sample after laser light constraint window; The below of described lifter plate is provided with restraining plate, and this restraining plate is placed in directly over sample, and restraining plate is distributed with constraint chamber, this constraint chamber is for retraining the plasma of sample excitation.
Sample stage is by space constraint enhanced line intensity, and energy plasma laterally and longitudinally retrains, and regulates constraint space size adjustment line strength according to different sample requirement, and it is 2-10 times that line strength strengthens scope.Constraint window is mainly used in plasma and longitudinally retrains, and has good transmissivity to the characteristic spectral line of incident laser and plasma generation.The transverse direction that restraining plate is mainly used in plasma retrains, and makes characteristic spectral line carry out constraint propagation, improves spectral line collection efficiency and line strength.
Preferably, described lifter plate is provided with printing opacity mouth, and this printing opacity mouth place is coated with light-passing board, the constraint window described in described printing opacity mouth and light-passing board form.
Wherein, light-passing board is poly (methyl methacrylate) plate, the selection of material is N-BK7, thickness is 1-5mm, for ensureing that laser effectively excites the effective collection with characteristic spectral line, the transmitance of light-passing board to optical maser wavelength and characteristic spectral line should be greater than 90%, simultaneously, for preventing laser from causing damage to poly (methyl methacrylate) plate, its energy threshold should be greater than 10J/cm
2.Line enhancement effect suffers restraints the impact of window from sample distance.Because properties of samples is different with the element spectral line intensity that will detect, constraint window of the present invention can move in the vertical direction, regulates line strength as required.
Restraining plate is the aluminium sheet of chromium plating, and thickness is 1 ~ 3mm.In the constraint chamber of aluminium sheet, carry out chromium plating, make inner chamber have higher reflectivity, make characteristic spectral line constraint propagation, improve spectral line collection efficiency.
The beneficial effect that the present invention has is:
(1) achieve double-pulse laser induced breakdown spectrum heating work pattern again, provide condition for fragile sample (as biological specimen) detection of content of element signal strengthens.
(2) achieve the Real-Time Monitoring to laser energy, be conducive to the repeatability improving detection technique.
(3) according to different samples, distance and the laser energy of lens and object can be regulated, obtain best signal to noise ratio (S/N ratio).
(4) there is adjustable parameter many, regulate simply, accurately and fast.
(5) sample stage is by space constraint enhanced line intensity, can laterally and longitudinally retrain by plasma, improve spectral line collection efficiency and line strength, can avoid exciting particle again to cover sample surfaces, and smooth sample surfaces (special in out-of-flatness samples such as fresh blades), make sample remain unchanged to the distance of condenser lens thus improve detection repeatability.
Accompanying drawing explanation
Fig. 1 is the adjustable index path heating double-pulse laser induced breakdown spectral device again;
Fig. 2 is the structural drawing of sample stage;
Fig. 3 is the vertical view of sample stage in Fig. 2;
Fig. 4 is the schematic diagram that on sample stage, sample is impacted.
Embodiment
As shown in Figure 1, one is adjustable heats double-pulse laser induced breakdown spectral device again, comprises the first laser instrument 1, second laser 2, times frequency generator 3, delay time generator 4, energy attenuator 5, laser energy real-time monitoring system 6, light path is climbed system 7, detector 8, beam splitting system 9, sample stage 11, first condenser lens 12, second condenser lens 10, optical fiber collection system 13, sample surface imaging system 14.
First laser instrument 1 sends pulse laser, through optical system, impact is on sample, when energy density forms plasma higher than during the threshold value excited, the laser article on plasma that second laser 2 produces heats again, and plasma cooling sends the characteristic spectral line of different wave length, collect via optical fiber collection system 13, through beam splitting system 9, detected by detector 8, and on computing machine 15 Graphics Processing.
Light path system 7 of climbing is made up of the first catoptron 72, second catoptron 71 and the 3rd catoptron 73, and 1 inch of fundamental frequency Nd:YAG laser mirror selected by the first catoptron 72, second catoptron 71 and the 3rd catoptron 73, and the reflectivity at 1064nm place is more than 98%.
Optical fiber collection system 13 is made up of light collector and optical fiber.Sample surface imaging system 14 comprises CCD camera 144, imaging lens 143, second beam splitter 142, LED light source for illuminating 141.
Variable energy attenuator 5 has multiple implementation, (1) 1/2 wave plate and beam splitter, and (2), by regulating the angle of beam sampling mirror, (3) utilize neutral density filter plate to decay to energy.
Sample stage 11 is combined by 3 single-degree-of-freedom pulse electric displacement platforms and electric rotary table and realizes.
As shown in Figure 2, Figure 3 and Figure 4, sample stage 11 comprises gear rack elevating bar 901, gear slider 902, right angle card extender 903, plasma confinement window 904, cylindrical guide 905, plasma confinement plate 906, V-type slide block 907, combined electrical moving stage 909, pull bar 910, constraint chamber 911.Combined electrical moving stage 909 adopts four-degree-of-freedom (x, y, z, w) combined electrical moving stage, comprises three single-degree-of-freedoms (x, y and z) pulse electric displacement platform and rotary freedom (w) electric rotary table.Gear rack elevating bar 901 is vertically arranged in combined electrical moving stage 909, and gear slider 902 engages with gear rack elevating bar 901, can be lower mobile in the vertical direction.Right angle card extender 903 is secured by bolts on gear slider 902, and plane is provided with the printing opacity mouth of rectangle, and printing opacity mouth edge is provided with support level, is provided with light-passing board in printing opacity mouth, forms plasma confinement window 904.Cylindrical guide 905 is fixed on combined electrical moving stage 909, and plasma confinement plate 906 can slide up and down along cylindrical guide 905.Cylindrical guide 905 and gear rack elevating bar 901 all by bolt-connection in combined electrical moving stage 909.Combined electrical moving stage 909 has V-type groove, and V-type slide block 907 can horizontally slip along V-type groove under pull bar 910 acts on, and pull bar 910 is by being screwed in V-type slide block 907.Sample 908 is placed on V-type slide block 907 (being equivalent to objective table), laser impacts downwards from top, by plasma confinement window 904, and through plasma confinement plate 906, impact is to sample surfaces, activated plasma, cooling sends characteristic spectral line and is collected by optical fiber collection system 13.
The material of plasma confinement window 904 is N-BK7, and thickness is 1-5mm, and transmitance is greater than 90%, and energy threshold is greater than 10J/cm
2.Plasma confinement window 904 is mainly used in plasma and longitudinally retrains, and has good transmissivity to the characteristic spectral line of incident laser and plasma generation.N-BK7 is a kind of common optical glass, can through the light of 350nm-2000nm wave band, and the transmissivity of its laser is greater than 90%, and energy threshold is greater than 10J/cm
2.Therefore plasma confinement window 904 the selection of material is N-BK7, and thickness is 1-5m.Plasma confinement window 904 vertically can move under gear slider 902 acts on.Line enhancement effect suffers restraints the impact of window from sample distance.Because properties of samples is different with the element spectral line intensity that will detect, plasma confinement window 904 of the present invention can move in the vertical direction, regulates line strength as required.
In the present embodiment, the material of plasma confinement plate 906 is the aluminium sheet of chromium plating, and thickness is 1mm, and be evenly distributed with conical constraint chamber 911 in the middle of it, upper conical surface diameter and lower conical surface diameter are 2mm and 3mm respectively.With combined electrical moving stage 909, the spacing in constraint chamber 911 should plan that displacement is consistent.The transverse direction that plasma confinement plate 906 is mainly used in plasma retrains, and makes characteristic spectral line carry out constraint propagation, improves spectral line collection efficiency and line strength, and it is 2-10 times that line strength strengthens scope.In the constraint chamber 911 of aluminium sheet, carry out chromium plating, make inner chamber have higher reflectivity, make characteristic spectral line constraint propagation, improve spectral line collection efficiency.Constraint chamber adopts conical structure, and due to the structure that it is up-small and down-big, the structure compared with column type better can obtain plasma and retrain.In addition, when plasma is from taper shape constraint chamber injection, because its space constraint strengthens, its electron density and movement velocity all can be enhanced, therefore advantageously in the enhancing of spectral line signal.With combined electrical moving stage 909, the spacing in the constraint chamber of plasma confinement plate 906 of the present invention plans that displacement is consistent, can be applicable to the working method of Laser-induced Breakdown Spectroscopy Surface scan.Using plasma restraining plate 906 of the present invention covers sample surfaces, is conducive to smooth sample surfaces and improves repeatability, avoid exciting other region to be measured of particle contamination.When testing sample is the surface irregularity samples such as fresh blade, its region to be measured and lens distance there are differences, and then affect the laser parameter that laser arrives sample.The detection stability of Laser-induced Breakdown Spectroscopy and the laser parameter in region to be detected closely bound up, therefore smooth sample surfaces be conducive to fixed laser parameter improve detect repeatability.In addition, the up-small and down-big conical structure of plasma confinement plate 906 is conducive to farthest avoiding exciting particle contamination by a upper surveyed area, ensures that institute's detected object is the element in region to be detected.
V-type slide block 907 can move along V-type groove under pull bar 910 acts on, and adopts this V-type sliding block guide track structure, avoids raising the troublesome operation such as plasma confinement window mouth and plasma restraining plate.Connection between plasma confinement plate 906 and cylindrical guide 905 is stressed joint, and plasma confinement plate 906 can not freely glide under gravity.
It is corresponding with the position of top laser that control combination electric displacement platform 909 makes the pyramid type of plasma confinement plate 906 retrain chamber 911, and the work step-length arranging combined electrical moving stage 909 is conical constraint chamber neighbor distance or multiple.Beam of laser B is through light path system, and line focus lens are propagated downwards from top, through plasma confinement window 904, and through conical constraint chamber impact sample.Its laser transmittance of plasma confinement window 904 is greater than 90%, and energy threshold is greater than 10J/cm
2.Second bundle laser A vertically focuses on impact on the plasma inspired by condenser lens, enhanced line signal.Plasma cooling sends characteristic spectral line C and is collected by the optical fiber collection system 13 of top.The number of times of required impact can be selected in each position according to actual requirement, moved carry out multiple positions spectra collection after completing a position by combined electrical moving stage 909.When without plasma confinement window 904 and plasma confinement plate 906, the plasma inspired is free excited state; After limiting the plasma excited, the density of plasma increases, and plasma temperature raises, and enhances line strength of excited atom.
Beam splitting system 9 is echelle spectrometer.
Delay time generator 4 controls the gate duration that the first laser instrument 1 and second laser 2 adjust the Q triggered time, xenon lamp opens triggered time and ICCD detector 8.Delay time generator 4 arranges the first laser instrument 1 and second laser 2 adjusts the triggered time of Q signal 150 ± 20 μ s after xenon lamp signal triggers.Detector gate switch on-time is 1 μ s after second laser 2 Q-switch triggers.
Laser energy Real-Time Monitoring feedback system 6 is made up of thermoelectric pulse probe the 61, first beam splitter 62, USB connecting line and computing machine 15.The laser of monitoring separates the laser energy of 30% by 3:7 beam splitter, and being popped one's head in by thermoelectric pulse receives, and is connected to computing machine by USB connecting line, special software shows the energy of recording laser in real time, for subsequent data analysis.
First condenser lens 12 and the second condenser lens 10 are installed on to be had in the Lens mounting carrier of degree of freedom along optical axis direction, for regulating the distance of sample and lens, thus controls impact to the laser parameter on sample.N-BK7 selected by first condenser lens 12 and the second condenser lens 10.
When the present invention works, control delay time generator 4 sequential control first laser instrument 1 and second laser 2 modulating signal and adjust Q signal triggered time and detector 8 gate duration.First laser instrument 1 and second laser 2 adjust the triggering of Q signal 150 ± 20 μ s after xenon lamp signal triggers, and detector gate switch on-time is 1 μ s after second laser 2 Q-switch triggers.First laser (1064nm) is decayed through energy attenuator 5 pairs of laser energies, successively through the first catoptron 72 and the second catoptron 71, and the light path of improving laser; Regulate the reflector mount of the second catoptron 71 to make laser be positioned at above sample, change light path through the 3rd catoptron 73, propagate downwards.Laser focuses on sample surfaces via the first condenser lens 12, and when laser energy density is higher than the threshold value excited, sample produces plasma.Second laser is decayed through energy attenuator 5, and by doubly frequency generator 3, laser frequency becomes 532nm.Sample stage 11 is regulated highly to make the second laser (532nm) light-emitting window higher than plasma confinement plate 906 surface 1 ± 0.5mm.Whether sample stage 11 characteristic can select rotary freedom per sample.Second laser (532nm) focuses on through the second condenser lens 10, focuses on the plasma that ejects, enhanced line signal.Spectral line is collected by optical fiber collection system 13, via beam splitting system 9 (echelle spectrometer) light splitting, be converted into electric signal by detector 8, be connected in computing machine 15 by USB, carry out data statistics and analysis at computing machine 15, determine the content of certain material in sample.
Claims (10)
1. adjustablely heat a double-pulse laser induced breakdown spectral device again, it is characterized in that, comprise the first laser instrument, second laser, delay time generator and sample stage;
The light path of described first laser instrument is furnished with light path to climb system, this light path climbs system for raising the light path of the first laser, makes the first laser focus on sample surfaces by directly over sample stage, produces plasma;
Described delay time generator is for controlling the activation schedule of the first laser instrument and second laser;
The light path of described second laser is furnished with a times frequency generator, and the second laser through times frequency generator is used for heating described plasma again;
Also comprise signal acquisition and processing system, cool the spatial information of characteristic spectral line and the first laser impact sample sent according to plasma, display element is in the distributed intelligence of sample surfaces.
2. adjustablely as claimed in claim 1 heat double-pulse laser induced breakdown spectral device again, it is characterized in that, the first described laser instrument and the light path of second laser are equipped with energy attenuator and the laser energy real-time monitoring system for real-time detection record laser energy;
The laser of the first described laser instrument through the outgoing of laser energy real-time monitoring system laggard enter light path to climb system;
The laser of described second laser focuses to plasma after the outgoing of laser energy real-time monitoring system.
3. adjustablely as claimed in claim 1 heat double-pulse laser induced breakdown spectral device again, it is characterized in that, described signal acquisition and processing system comprises:
Optical fiber collection system, cools for collecting plasma the characteristic spectral line sent;
Beam splitting system, for carrying out light splitting to characteristic spectral line;
Detector, for being converted to electric signal by the light signal of beam splitting system;
Sample surface imaging system, for monitoring the first laser impact sample position, obtains the spatial information of sampled point;
Computing machine, according to the spatial information of described electric signal and sampled point, display element is in the distributed intelligence of sample surfaces.
4. adjustablely as claimed in claim 3 heat double-pulse laser induced breakdown spectral device again, it is characterized in that, described beam splitting system is echelle spectrometer.
5. adjustablely as claimed in claim 4 heat double-pulse laser induced breakdown spectral device again, it is characterized in that, described sample surface imaging system comprises:
For the LED light source for illuminating from positive dirction illuminated sample,
Be positioned at the beam splitter on LED light source for illuminating optical axis,
CCD camera and imaging lens, for gathering the sample surfaces image information of beam splitter reflection.
6. adjustablely as claimed in claim 1 heat double-pulse laser induced breakdown spectral device again, it is characterized in that, described light path system of climbing is made up of the first catoptron, the second catoptron and the 3rd catoptron, described second catoptron is positioned at directly over the first catoptron, and the 3rd catoptron is positioned at directly over sample stage;
The first described catoptron, the second catoptron and the 3rd catoptron are Nd:YAG double-frequency laser catoptron.
7. adjustablely as claimed in claim 6 heat double-pulse laser induced breakdown spectral device again, it is characterized in that, described delay time generator controls the first laser instrument and second laser adjusts Q triggered time and xenon lamp to open the triggered time, and the first laser instrument and second laser adjust the triggered time of Q signal 150 ± 20 μ s after xenon lamp signal triggers.
8. adjustablely as claimed in claim 1 heat double-pulse laser induced breakdown spectral device again, it is characterized in that, the focusing lens in the light path of described first laser instrument and second laser are arranged on the Lens mounting carrier that is slidably matched along optical axis.
9. adjustablely as claimed in claim 1 heat double-pulse laser induced breakdown spectral device again, it is characterized in that, described sample stage comprises the electric displacement platform with four-degree-of-freedom, the objective table being movably arranged on the lifter plate on electric displacement platform and being slidably fitted on electric displacement platform;
Described lifter plate is provided with transparent constraint window, impacts sample after laser light constraint window;
The below of described lifter plate is provided with restraining plate, and this restraining plate is placed in directly over sample, and restraining plate is distributed with constraint chamber, this constraint chamber is for retraining the plasma of sample excitation.
10. adjustablely as claimed in claim 9 heat double-pulse laser induced breakdown spectral device again, it is characterized in that, described lifter plate is provided with printing opacity mouth, and this printing opacity mouth place is coated with light-passing board, the constraint window described in described printing opacity mouth and light-passing board form.
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| CN105259161A (en) * | 2015-11-06 | 2016-01-20 | 西北师范大学 | Intelligently controlled laser plasma measurement device and method |
| CN105486676A (en) * | 2015-12-25 | 2016-04-13 | 中国科学院合肥物质科学研究院 | Microwave-assisted laser-induced breakdown spectrum device |
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| CN112730255A (en) * | 2021-01-21 | 2021-04-30 | 湖南镭目科技有限公司 | Laser-induced breakdown spectroscopy detection system |
| CN112730255B (en) * | 2021-01-21 | 2024-02-20 | 中南大学 | Laser-induced breakdown spectroscopy detecting system |
| CN115389487A (en) * | 2022-08-08 | 2022-11-25 | 苏州星帆华镭光电科技有限公司 | Method for detecting components and concentration thereof in object |
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