CN103033488B - Z scanning optical nonlinear measurement device and method capable of observing and monitoring in real time - Google Patents
Z scanning optical nonlinear measurement device and method capable of observing and monitoring in real time Download PDFInfo
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- CN103033488B CN103033488B CN201210540625.8A CN201210540625A CN103033488B CN 103033488 B CN103033488 B CN 103033488B CN 201210540625 A CN201210540625 A CN 201210540625A CN 103033488 B CN103033488 B CN 103033488B
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Abstract
The invention relates to a z scanning optical nonlinear measurement device and method capable of observing and monitoring in real time. The device mainly comprises a light source modulating and monitoring part, a data collecting part and a luminance observing part. The device adopts two light sources, so that the light sources can be switched conveniently, the pulse width and the pulse period of an emitted laser can be controlled through a signal generator, and the power is adjustable; the data of a transmission open hole and a transmission closed hole of a measured sample can be measured; and the data of a reflection open hole can be measured. According to the invention, the device and the method are suitable for not only the measurement of the nonlinear absorption coefficient and the nonlinear refractive index of a transparent material, but also the nonlinear measurement of an opaque material. A micro-objective, a lighting source and a CCD (Charge Coupled Device) camera are added for a sample moving platform in the device, so that the surface feature of the sample can be observed in real time, and the impact on the measurement data caused by the change of the feather of the sample can be avoided. While an oscilloscope is added to monitor the wave form and the power of the acting laser in real time, and the precision and the accuracy of the nonlinear measurement of material are improved.
Description
Technical field
The present invention relates to nonlinear optics, particularly one can Real Time Observation monitoring z scanning optical non-linear measuring device and method.
Background technology
In recent years, the application such as all-optical switch and optical inductor makes researchist with keen interest for the research of the material with comparatively large very fast nonlinear characteristic, and research mainly comprises the nonlinear refractive index of material and non-linear absorption coefficient etc.Along with the develop rapidly of nonlinear optical material, need sensitiveer nonlinear measurement method, the method that nonlinear factor main is at present measured comprises degeneration four-wave mixing method, two-wave mixing method, Ellipsometric, beam aberration method and optical kerr effect method etc., these measuring method measuring equipments are complicated, cost is higher, precision and efficiency are all not fully up to expectations, cannot reach desirable measurement effect.
The z scanning technique that 20th century grew up is (see M.Sheik-Bahae, IEEE J.Quantum Electronics26,760-769 (1990)) with its easy apparatus design and higher measuring accuracy, become the method for measurement material nonlinearity the most frequently used at present.Tradition z scanning is only applicable to the nonlinear measurement of transparent material; Lack recording geometry in experimentation cannot observe sample surface morphology and whether change simultaneously, and then cause the nonlinearities change curve cannot determining material to derive from intrinsic effect that laser causes or the change that laser causes this body structure of material to occur; Simultaneously the design limitation on monochromatic light road is for the research of different wave length material nonlinearity characteristic; What is more important have ignored sample reflection optical information, and when making traditional transmission z scan method process translucent or opaque sample, data is inaccurate.
Summary of the invention
Content of the present invention is to provide one can Real Time Observation monitoring z scanning optical non-linear measuring device and method, and this device wants to measure easily nonlinear refractive index and the non-linear absorption coefficient of material under two kinds of light sources; Not only can measure nonlinear refractive index and the non-linear absorption coefficient of transparent material, all right measurement for opaque, the nonlinear refractive index of trnaslucent materials and non-linear absorption coefficient; The parameter of effect laser can be changed, so that the nonlinear characteristic of material under studying different lasing condition; Can the modification of surface morphology situation of Real Time Observation measured point and the waveform power change of effect laser in experiment.
Technical solution of the present invention is as follows:
One Real Time Observation can monitor z scanning optical non-linear measuring device, and feature is that its formation comprises Output of laser wavelength X
1the first laser instrument and Output of laser wavelength X
2second laser, the primary optical axis formed along the main optical path of the Laser output of the first described laser instrument is the first spectroscope, the first laser beam splitter, beam expanding lens, the second spectroscope, the first object lens, the first Amici prism, the second laser beam splitter, testing sample, the second Amici prism, aperture diaphragm, the first photodetector successively, the first described laser beam splitter and primary optical axis at 45 °, the wavelength that described second laser exports is λ
2laser incide the first described laser beam splitter through the 3rd spectroscope; The first described signal generator is connected with the first laser instrument; Described secondary signal generator is connected with second laser; The first described spectroscope and primary optical axis at 45 °; At described first spectroscopical reflected light outbound course, the 5th spectroscope, the first condenser lens, the 5th photodetector are set; The 5th described spectroscope and optical axis at 45 °; At the described the 5th spectroscopical reflected light outbound course, the second condenser lens, the 6th photodetector are set; The 3rd described spectroscope and optical axis at 45 °; At the described the 3rd spectroscopical reflected light outbound course, the 4th spectroscope, the 3rd condenser lens, the 7th photodetector are set; The 4th described spectroscope and optical axis at 45 °; At the described the 4th spectroscopical reflected light outbound course, the 4th condenser lens, the 8th photodetector are set; The second described spectroscope and primary optical axis at 45 °; At described second spectroscopical reflected light outbound course, the 5th condenser lens, the 4th photodetector are set; At the reflected light outbound course of the first described Amici prism, the 6th condenser lens, the 3rd photodetector are set; The second described laser beam splitter and primary optical axis at 45 °; At the reflected light outbound course of the second described laser beam splitter, the second object lens, the 6th spectroscope, optical filter, CCD camera are set; The 6th described spectroscope and optical axis at 45 °; At the described the 6th spectroscopical reflected light outbound course, lighting source is set; The first described Amici prism, the 6th condenser lens, the 3rd photodetector, the second laser beam splitter, testing sample, lighting source, the 6th spectroscope, the second object lens, optical filter, CCD camera are placed on sample motor movement platform; At the reflected light outbound course of the second described Amici prism, the 7th condenser lens, the second photodetector are set; The first described photodetector, the second photodetector, the 3rd photodetector, the 4th photodetector, CCD camera, sample motor movement platform, oscillograph are connected with computing machine; The 5th described photodetector, the 6th photodetector, the 7th photodetector, the 8th photodetector, is connected with oscillograph.
The first described spectroscope, the second spectroscope, the 3rd spectroscope are to wavelength X
1, λ
2laser-transmitting rate 95%, the spectroscope of reflectivity 5%; The 4th described spectroscope, the 5th spectroscope are to wavelength X
1, λ
2laser-transmitting rate 50%, the spectroscope of reflectivity 50%; The 6th described spectroscope is to lighting source transmissivity 50%, the spectroscope of reflectivity 50%; The first described Amici prism is to wavelength X
1, λ
2laser-transmitting rate 80%, the Amici prism of reflectivity 20%; The second described Amici prism is to wavelength X
1, λ
2laser-transmitting rate 50%, the Amici prism of reflectivity 50%; The first described laser beam splitter is to wavelength X
1laser-transmitting rate more than 95%, reflectivity less than 5%, and to wavelength X
2laser reflectivity more than 95%, the spectroscope of transmissivity less than 5%; The second described laser beam splitter is to wavelength X
1, λ
2laser-transmitting rate more than 95%, reflectivity less than 5%, and to lighting source reflectivity more than 95%, the spectroscope of transmissivity less than 5%; Described optical filter is to wavelength X
1, λ
2laser-transmitting rate less than 1%, reflectivity more than 99%, and the reflectivity less than 1% to lighting source, the optical filter of transmissivity more than 99%.The first described object lens are object lens of NA=0.1; The second described object lens are microcobjectives of NA=0.4.
The laser beam that the first described laser instrument and second laser send is Gaussian beam.
Utilize and above-mentionedly can carry out the measuring method of non-linear absorption coefficient and nonlinear refractive index by Real Time Observation monitoring z scanning optical non-linear measuring device, its feature is to comprise the following steps:
One, wavelength X is measured
1laser action under the nonlinear data of testing sample:
1. according to measurement needs, laser wavelength lambda is selected
1, the first described signal generator controls the first laser instrument and sends wavelength X
1laser as light source, regulate the first signal generator, namely regulate laser power, or the laser pulse cycle, pulse width; By movement velocity and first photodetector of the sample motor movement platform described in computer installation, the second photodetector, the 3rd photodetector, the sample frequency of the 4th photodetector, sampling number and the first Laser synchronisation work;
2. measure transmission perforate, transmission closed pore and reflect hole data;
Be placed on by described testing sample on described sample motor movement platform, the measuring surface of adjustment testing sample is perpendicular to described primary optical axis, i.e. z-axis, and the focus place of the first described object lens is z=0, and the initial position of described testing sample is-10z
0, definition
for laser diffraction length, wherein k=2 π/λ, λ are laser wavelength of incidence,
for laser beam waist radius, NA is the numerical aperture of the first object lens, described computing machine starts described sample motor movement platform and the first photodetector simultaneously, second photodetector, 3rd photodetector, the 4th photodetector, testing sample is along primary optical axis positive movement, through the focus of the first object lens, range of movement 20z
0the first described photodetector, the second photodetector, the 3rd photodetector, 4th photodetector is by the computing machine described in the light intensity signal of detection feeding, and the output intensity signal wherein gathering the 4th photodetector is the power monitoring data P of incident laser; Gather the first photodetector, the second photodetector, the output intensity signal of the 3rd photodetector is respectively transmission closed pore data, transmission perforate data and reflect hole data, with the light intensity value collected for ordinate, z is horizontal ordinate, is recorded as transmission closed pore curve I
tC(z
n)
λ, t, η, P, S, transmission perforate curve I
tO(z
n)
λ, t, η, P, and reflection perforate curve I
rO(z
n)
λ, t, η, P, wherein n=1.2.3 ..., N, λ is the wavelength of incident laser, and t is the laser pulse cycle, and η is laser pulse width, P is the laser power that the 4th photodetector (38) characterizes, S is the linear transmittance of aperture diaphragm to Gaussian beam, λ, t, η, P, S experimentally condition obtain, z
nfor the horizontal ordinate of each sampled point, z
1~ z
ncoordinate figure be-10z
0~+10z
0, the abscissa value at focus place is z
n=0, N is sampling number;
3. by analyzing spot surface topography on testing sample in described CCD camera Real Time Observation experimentation, the surface topography of the testing sample analyzing spot arrived according to the observation, judge whether the surface of this analyzing spot changes, if surface topography there occurs change, then this point data is unreliable, and this point data left out by computing machine;
4. by the 5th described photodetector, the pulse laser waveform launched by the first laser instrument and power signal are inputed to oscillograph by the 6th photodetector respectively, the pulse laser quality of being launched by the first laser instrument is observed according to the signal that oscillograph presents, judge whether meet experiment condition, whether waveform power is stablized if modulating through described first signal generator the pulse laser that the first laser instrument launches.If waveform or power and setting are not inconsistent, then to scan experimental data unreliable for z;
5. the first signal generator is regulated, change the power of incident laser and recurrence interval and pulse width, repeat above-mentioned 2. 3. 4. step, measure the optical nonlinearity data of testing sample under different lasing condition, to obtain different laser power, the transmission closed pore curve I of testing sample under different laser pulse width and different laser pulse period effects
tC(z
n)
λ, t, η, P, S, transmission perforate curve I
tO(z
n)
λ, t, η, P, and reflection perforate curve I
rO(z
n)
λ, t, η, P, n=1.2.3 ..., N;
Two, wavelength X is measured
2laser action under the nonlinear data of material:
6. wavelength X is measured
2laser action under the non-linear nature of material, select wavelength X
2laser as light source, close the first laser instrument (1), open second laser, repeat above-mentioned 2. 3. step;
7. by the 7th described photodetector, the pulse laser waveform launched by second laser and power signal are inputed to oscillograph by the 8th photodetector respectively, the pulse laser quality of being launched by second laser is observed according to the signal that oscillograph presents, judge whether the pulse laser launched through described secondary signal generator modulation second laser meets experiment condition, and whether waveform power is stablized.If waveform or power and setting are not inconsistent, then to scan experimental data unreliable for z;
8. secondary signal generator is regulated, change the power of incident laser and recurrence interval and pulse width, repeat above-mentioned 6. 7. step, measure the optical nonlinearity data of testing sample under different lasing condition, to obtain different laser power, the transmission closed pore curve I of testing sample under different laser pulse width and different laser pulse period effects
tC(z
n)
λ, t, η, P, S, transmission perforate curve I
tO(z
n)
λ, t, η, P, and reflection perforate curve I
rO(z
n)
λ, t, η, P, n=1.2.3 ..., N;
Three, the data recorded are processed:
9. to reflection perforate curve I
rO(z
n)
λ, t, η, P, n=1.2.3 ..., N, the peak light intensity obtained with power Monitoring Data P
wherein
subtract each other with reflection perforate curve number value, obtain efficient intensity I
eff (z
n), wherein I
eff(z
n)=I
0(z
n)-I
rO(z
n)
λ, t, η, P;
To transmission perforate curve I
tO(z
n)
λ, t, η, Pn=1.2.3......, N makes normalized, by the ordinate value in above-mentioned curve divided by z
1the ordinate value at place, obtains the normalization perforate transmittance graph T of sample
o(z
n)
λ, t, η, Pn=1.2.3......, N, making ordinate be horizontal ordinate corresponding to extreme value place is z
n=0 i.e. focus, curve presents trough or crest at focus place, is being 1 away from focus place normalized transmittance;
Equally to reflection perforate curve I
rO(z
n)
λ, t, η, P, transmission closed pore curve I
tC(z
n)
λ, t, η, P, S, deal with, obtain normalization perforate reflectance curve R
o(z
n)
λ, t, η, Pn=1.2.3......, N, and normalization closed pore transmittance graph T
c(z
n)
λ, t, η, P, S, then by T
c(z
n)
λ, t, η, P, Sdivided by T
o(z
n)
λ, t, η, P, obtain normalization Relative Transmission rate curve T
c/O(z
n)
λ, t, η, P, S;
10. by normalization perforate transmittance graph, focus z is got
n=0 place's perforate transmittance values T
o(0), the non-linear absorption coefficient β that following formula calculates testing sample (9) is substituted into:
β＝2.83[1-T
O(0)]/I
eff(0)L
eff(1)
In above formula, L
eff=[1-exp (-α
0l)]/α
0for the net thickness of sample, α
0for sample linear absorption coefficient, can check in, L is sample actual (real) thickness;
By normalization Relative Transmission rate curve T
c/O(z
n)
λ, t, η, P, S, get crest, trough place relative transmittance value, calculate the nonlinear refractive index n of testing sample (9) according to following formula
2:
In above formula, Δ T
pV=T
p-T
v, T
p, T
vbe respectively crest and the trough transmittance values of normalization Relative Transmission rate curve;
for aperture diaphragm (11) is to the linear transmissivity of Gaussian beam, r
a, ω
abe respectively aperture diaphragm radius and beam cross section radius.
Technique effect of the present invention:
Adopt two light sources in the present invention, light source easy switching, nonlinear refractive index and the non-linear absorption coefficient of material under Different Light can be studied.
Adopt signal generator make shoot laser pulse power, pulse width and the recurrence interval adjustable, pulse power can from 0 to 100% continuously adjustabe, and pulse width can regulate arbitrarily from 10ns to continuous light;
Transmission perforate and the transmission closed pore data of sample can be measured simultaneously, and sample reflect hole data, can measure transparent, the nonlinear factor of translucent or opaque material, data processing is simple.
Sample motor movement platform adds micro imaging system, utilizes CCD Real Time Observation sample surface morphology in experimentation, and optical filter elimination effect laser is for the impact of imaging.
Effect laser is by photodetector and oscillograph Real-Time Monitoring pulse power, and waveform, improves precision and the accuracy of material nonlinearity measurement.
Accompanying drawing explanation
Fig. 1 is that the present invention can the light channel structure figure of Real Time Observation monitoring z scanning optical non-linear measuring device.
Fig. 2 is that the present invention can the normalization perforate transmittance graph experimental data of Real Time Observation monitoring z scanning optical non-linear measuring device and theoretical fitting value and z scanning position graph of a relation.
Fig. 3 is that the present invention can the normalization perforate reflectance curve experimental data of Real Time Observation monitoring z scanning optical non-linear measuring device and theoretical fitting value and z scanning position graph of a relation.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the present invention will be further described, but should not limit the scope of the invention with this
First refer to Fig. 1, Fig. 1 is that the present invention realizes can the light channel structure figure of a Real Time Observation monitoring z scanning optical non-linear measuring device embodiment, as seen from the figure, the present invention Real Time Observation can monitor z scanning optical non-linear measuring device, forms and comprises Output of laser wavelength X
1the first laser instrument 1 and Output of laser wavelength X
2second laser 13, the primary optical axis formed along the main optical path of the Laser output of the first described laser instrument 1 is the first spectroscope 2, first laser beam splitter 3, beam expanding lens 4, second spectroscope 5, first object lens 6, first Amici prism 7, second laser beam splitter 8, testing sample 9, second Amici prism 10, aperture diaphragm 11, first photodetector 12 successively, the first described laser beam splitter 3 is at 45 ° with primary optical axis, and the wavelength that described second laser 13 exports is λ
2laser incide the first described laser beam splitter 3 through the 3rd spectroscope 14; The first described signal generator 25 is connected with the first laser instrument 1; Described secondary signal generator 26 is connected with second laser 13; The first described spectroscope 2 is at 45 ° with primary optical axis; At the reflected light outbound course of the first described spectroscope 2, the 5th spectroscope 20, first condenser lens 21, the 5th photodetector 22 are set; The 5th described spectroscope 20 is at 45 ° with optical axis; At the reflected light outbound course of the 5th described spectroscope 20, the second condenser lens 23, the 6th photodetector 24 are set; The 3rd described spectroscope 14 is at 45 ° with optical axis; At the reflected light outbound course of the 3rd described spectroscope 14, the 4th spectroscope 15, the 3rd condenser lens 16, the 7th photodetector 17 are set; The 4th described spectroscope 15 is at 45 ° with optical axis; At the reflected light outbound course of the 4th described spectroscope 15, the 4th condenser lens 18, the 8th photodetector 19 are set; The second described spectroscope 5 is at 45 ° with primary optical axis; At the reflected light outbound course of the second described spectroscope 5, the 5th condenser lens 37, the 4th photodetector 38 are set; At the reflected light outbound course of the first described Amici prism 7, the 6th condenser lens 27, the 3rd photodetector 28 are set; The second described laser beam splitter 8 is at 45 ° with primary optical axis; At the reflected light outbound course of the second described laser beam splitter 8, the second object lens 33, the 6th spectroscope 32, optical filter 34, CCD camera 35 are set; The 6th described spectroscope 32 is at 45 ° with optical axis; At the reflected light outbound course of the 6th described spectroscope 32, lighting source 31 is set; The first described Amici prism 7, the 6th condenser lens 27, the 3rd photodetector 28, second laser beam splitter 8, testing sample 9, lighting source 31, the 6th spectroscope 32, second object lens 33, optical filter 34, CCD camera 35 are placed on sample motor movement platform 36; At the reflected light outbound course of the second described Amici prism 10, the 7th condenser lens 29, second photodetector 30 is set; The first described photodetector 12, second photodetector the 30, three photodetector the 28, four photodetector 38, CCD camera 35, sample motor movement platform 36, oscillograph 39 are connected with computing machine 40; The 5th described photodetector the 22, six photodetector the 24, seven photodetector the 17, eight photodetector 19, is connected with oscillograph 39.
The first described spectroscope 2, second spectroscope 5, the 3rd spectroscope 14 are to wavelength X
1, λ
2laser-transmitting rate 95%, the spectroscope of reflectivity 5%; The 4th described spectroscope 15, the 5th spectroscope 20 are to wavelength X
1, λ
2laser-transmitting rate 50%, the spectroscope of reflectivity 50%; The 6th described spectroscope 32 is to lighting source transmissivity 50%, the spectroscope of reflectivity 50%; The first described Amici prism 7 is to wavelength X
1, λ
2laser-transmitting rate 80%, the Amici prism of reflectivity 20%; The second described Amici prism 10 is to wavelength X
1, λ
2laser-transmitting rate 50%, the Amici prism of reflectivity 50%; The first described laser beam splitter 3 is to wavelength X
1laser-transmitting rate more than 95%, reflectivity less than 5%, and to wavelength X
1laser reflectivity more than 95%, the spectroscope of transmissivity less than 5%; The second described laser beam splitter 8 is to wavelength X
1, λ
2laser-transmitting rate more than 95%, reflectivity less than 5%, and to lighting source reflectivity more than 95%, the spectroscope of transmissivity less than 5%; Described optical filter 34 is to wavelength X
1, λ
2laser-transmitting rate less than 1%, reflectivity more than 99%, and the reflectivity less than 1% to lighting source, the optical filter of transmissivity more than 99%.The first described object lens 6 are object lens of NA=0.1; The second described object lens 33 are microcobjectives of NA=0.4.
In the present embodiment, the first laser instrument 1 selects optical maser wavelength to be the semiconductor laser of 632.8nm, and second laser 13 selects optical maser wavelength to be the semiconductor laser of 405nm.
With reference to Fig. 1, the present invention can be divided into three parts by Real Time Observation monitoring z scanning optical non-linear measuring device, Part I is the non-linear detection system based on laser, and Part II is the CCD observing system based on lighting source, and Part III is based on oscillographic effect laser monitoring system.The non-linear detection system of Part I is made up of two parts: 1. transmission perforate and transmission closed pore probe portion; 2. perforate probe portion is reflected.
1. transmission perforate and transmission closed pore probe portion: form primarily of the first laser instrument 1, second laser 13, first signal generator 25, secondary signal generator 26, first laser beam splitter 3, beam expanding lens 4, first object lens 6, testing sample 9, sample motor movement platform 36, second Amici prism 10, condenser lens 29, aperture diaphragm 11, first photodetector 12, second photodetector 30.This part utilizes the first signal generator 25, secondary signal generator 26, incident laser is adjusted to pulse power, pulse width and recurrence interval variable pulsed light, laser focuses on testing sample 9 by the first object lens 6, control testing sample 9 by sample motor movement platform 36 to move in z-axis, emergent light is divided into two-beam through the second Amici prism 10: transmitted beam light and reflecting bundle light.Transmitted beam light arrives the first photodetector 12 after aperture diaphragm 11, and this is transmission closed pore probe portion, and described reflecting bundle light line focus lens 29 arrive the second photodetector 30, and this is transmission perforate probe portion.
2. perforate probe portion is reflected: form primarily of the first laser instrument 1, second laser 13, first signal generator 25, secondary signal generator 26, first laser beam splitter 3, beam expanding lens 4, first object lens 6, testing sample 9, sample motor movement platform 36, first Amici prism 7, condenser lens 27, the 3rd photodetector 28.This part utilizes the first signal generator 25, secondary signal generator 26 equally, makes incident laser pulse power, pulse width and the recurrence interval adjustable.Laser focuses on testing sample 9 by the first object lens 6, control testing sample 9 by sample motor movement platform 36 to move in z-axis, the reflected light reflected by testing sample 9, after the first Amici prism 7 reflects, line focus lens 27 arrive the 3rd photodetector 28, and this is reflection perforate probe portion.
CCD observing system: primarily of the second laser beam splitter 8, lighting source 31, 6th spectroscope 32, second object lens 33, optical filter 34, CCD camera 35 forms, in this part, illumination light is sent by lighting source 31, through the 6th spectroscope 32, after second object lens 33 focus on, reflect into into main optical path by the second laser beam splitter 8, arrive testing sample 9 surface, the reflection of the illumination light of observation returns along former road by testing sample 9 surface, this returns light microscopic and reflects through described second laser beam splitter 8, second object lens 33, be transmitted through the 6th spectroscope 32, optical filter 34 arrives CCD camera 35, the impact of optical filtering 34 elimination laser, when testing sample 9 surface arrives the focal plane of the second object lens 33, CCD camera 35 can go out clearly as.The change of the transmissivity that testing sample 9 produces under laser action or reflectivity, this change both can derive from the material nonlinearity intrinsic effect that laser causes, the change that also this body structure of material can be caused to occur from laser, this observing system is so that the nonlinear generation source of Accurate Analysis.
Laser monitoring system: primarily of the first spectroscope 2, the 5th spectroscope 20, condenser lens 21, the 5th photodetector 22; Condenser lens 23, the 6th photodetector 24, the 3rd spectroscope 14, the 4th spectroscope 15, condenser lens 16, the 7th photodetector 17, condenser lens 18, the 8th photodetector 19, second spectroscope 5, condenser lens 37, the 4th photodetector 38, oscillograph 39, computing machine 40 form, the incident laser small part that first laser instrument 1 sends, after the first spectroscope 2 reflects, is divided into two-beam by the 5th spectroscope 20: transmitted beam light and reflecting bundle light.Transmitted beam light arrives the 5th photodetector 22 after focusing objective len 21, after on oscillograph 39, present pulse waveform, this is the first laser instrument 1 incident laser waveform probe portion, described reflecting bundle light line focus lens 23 arrive the 6th photodetector 24, after present on oscillograph 39 pulse power change, this is the first laser instrument 1 incident laser power probe portion; The incident laser small part that second laser 13 sends, after the 3rd spectroscope 14 reflects, is divided into two-beam by the 4th spectroscope 15: transmitted beam light and reflecting bundle light.Transmitted beam light arrives the 7th photodetector 17 after focusing objective len 16, after on oscillograph 39, present pulse waveform, this is second laser 13 incident laser waveform probe portion, described reflecting bundle light line focus lens 18 arrive the 8th photodetector 19, after present on oscillograph 39 pulse power change, this is second laser 13 incident laser power probe portion; The incident laser small part that first laser instrument 1, second laser 13 send is after the second spectroscope 5 reflects, and the lens of line focus simultaneously 37 arrive the 4th photodetector 38, and machine 40 processes as calculated, and this is incident laser power noise monitoring part.The change of the transmissivity that testing sample 9 produces under laser action or reflectivity, this change both can derive from the material nonlinearity intrinsic effect that laser causes, also can from laser instrument own power, the change that pulse instability causes, this monitoring system is so that the nonlinear generation source of Accurate Analysis.
The concrete operation step of embodiment is as follows:
The nonlinear data of testing sample under the laser action of measurement wavelength 632.8nm:
1. according to measurement needs, select optical maser wavelength 632.8nm, described signal generator 25 controls the first laser instrument 1 and sends the laser of wavelength 632.8nm as light source, and conditioning signal generator 25, namely regulates laser power, or the laser pulse cycle, pulse width; Movement velocity and first photodetector 12 of described sample motor movement platform 36 are set by computing machine 40, second photodetector 30, the sample frequency of the 3rd photodetector the 28, four photodetector 38, sampling number and the first laser instrument 1 synchronous working;
2. measure transmission perforate, transmission closed pore and reflect hole data;
Described testing sample 9 is placed on described sample motor movement platform 36, the measuring surface of adjustment testing sample 9 is perpendicular to described primary optical axis, i.e. z-axis, and the focus place of the first described object lens 6 is z=0, the initial position of described testing sample 9 is-10z0, definition
for laser diffraction length, wherein k=2 π/λ, λ are laser wavelength of incidence,
for laser beam waist radius, NA is the numerical aperture of the first object lens 6, described computing machine 40 starts described sample motor movement platform 36 simultaneously, first photodetector 12, second photodetector 30, 3rd photodetector 28 and the 4th photodetector 38, testing sample 9 is along primary optical axis positive movement, through the focus of the first object lens 6, range of movement 20z0, the first described photodetector 12, second photodetector 30, 3rd photodetector 28, 4th photodetector 38 is by the computing machine 40 described in the light intensity signal of detection feeding, the output intensity signal wherein gathering the 4th photodetector 38 is the power monitoring data P of incident laser, the output intensity signal gathering the first photodetector 12, second photodetector the 30, three photodetector 28 is respectively transmission closed pore data, transmission perforate data and reflect hole data, with the light intensity value collected for ordinate, z is horizontal ordinate, is recorded as transmission closed pore curve I
tC(z
n)
λ, t, η, P, S, transmission perforate curve I
tO(z
n)
λ, t, η, P, and reflection perforate curve I
rO(z
n)
λ, t, η, P, wherein n=1.2.3 ..., 2000, λ is the wavelength of incident laser, and t is the laser pulse cycle, η is laser pulse width, and P is the laser power that the 4th photodetector 38 characterizes, and S is the linear transmittance of aperture diaphragm 11 pairs of Gaussian beams, λ, t, η, P, S experimentally condition obtain, z
nfor the horizontal ordinate of each sampled point, z
1~ z
ncoordinate figure be-10z
0~+10z
0, the abscissa value at focus place is z
n=0, N is sampling number, arranging sample motor movement platform speed is 10um/s.
3. by analyzing spot surface topography on testing sample 9 in described CCD camera 35 Real Time Observation experimentation, the surface topography of testing sample 9 analyzing spot arrived according to the observation, judge whether the surface of this analyzing spot changes, if surface topography there occurs change, then this point data is unreliable, and this point data left out by computing machine 40;
4. by the 5th described photodetector 22, the pulse laser waveform launched by the first laser instrument 1 and power signal are inputed to oscillograph 39 by the 6th photodetector 24 respectively, the pulse laser quality of being launched by the first laser instrument 1 is observed according to the signal that oscillograph 39 presents, judge whether meet experiment condition, whether waveform power is stablized if modulating through described first signal generator 25 pulse laser that first laser instrument 1 launches.If waveform or power and setting are not inconsistent, then to scan experimental data unreliable for z;
5. the first signal generator 25 is regulated, change the power of incident laser and recurrence interval and pulse width, repeat above-mentioned 2. 3. 4. step, measure the optical nonlinearity data of testing sample 9 under different lasing condition, to obtain different laser power, the transmission closed pore curve I of testing sample 9 under different laser pulse width and different laser pulse period effects
tC(z
n)
λ, t, η, P, S, transmission perforate curve I
tO(z
n)
λ, t, η, P, and reflection perforate curve I
rO(z
n)
λ, t, η, P, n=1.2.3 ..., 2000;
Two, the nonlinear data of material under the laser action of wavelength 405nm is measured:
6. measure the non-linear nature of material under the laser action of wavelength 405nm, select the laser of wavelength 405nm as light source, close the first laser instrument 1, open second laser 13, repeat above-mentioned 2. 3. step;
7. by the 7th described photodetector 17, the pulse laser waveform launched by second laser 13 and power signal are inputed to oscillograph 39 by the 8th photodetector 19 respectively, the pulse laser quality of being launched by second laser 13 is observed according to the signal that oscillograph 39 presents, judge whether meet experiment condition, whether waveform power is stablized if modulating through described secondary signal generator 26 pulse laser that second laser 13 launches.If waveform or power and setting are not inconsistent, then to scan experimental data unreliable for z;
8. secondary signal generator 26 is regulated, change the power of incident laser and recurrence interval and pulse width, repeat above-mentioned 6. 7. step, measure the optical nonlinearity data of testing sample 9 under different lasing condition, to obtain different laser power, the transmission closed pore curve I of testing sample 9 under different laser pulse width and different laser pulse period effects
tC(z
n)
λ, t, η, P, S, transmission perforate curve I
tO(z
n)
λ, t, η, P, and reflection perforate curve I
rO(z
n)
λ, t, η, P, n=1.2.3 ..., 2000;
Three, the data recorded are processed:
9. to reflection perforate curve I
rO(z
n)
λ, t, η, P, n=1.2.3 ..., 2000, the peak light intensity obtained with power Monitoring Data P
wherein
subtract each other with reflection perforate curve number value, obtain efficient intensity I
eff(z
n), wherein I
eff(z
n)=I
0(z
n)-I
rO(z
n)
λ, t, η, P;
To transmission perforate curve I
tO(z
n)
λ, t, η, Pn=1.2.3......, 2000 make normalized, by the ordinate value in above-mentioned curve divided by z
1the ordinate value at place, obtains the normalization perforate transmittance graph T of sample
o(z
n)
λ, t, η, Pn=1.2.3......, 2000, making ordinate be horizontal ordinate corresponding to extreme value place is z
n=0 i.e. focus, curve presents trough or crest at focus place, is being 1 away from focus place normalized transmittance;
Equally to reflection perforate curve I
rO(z
n)
λ, t, η, P, transmission closed pore curve I
tC(z
n)
λ, t, η, P, S, deal with, obtain normalization perforate reflectance curve R
o(z
n)
λ, t, η, Pn=1.2.3......, 2000, and normalization closed pore transmittance graph T
c(z
n)
λ, t, η, P, S, then by T
c(z
n)
λ, t, η, P, Sdivided by T
o(z
n)
λ, t, η, P, obtain normalization Relative Transmission rate curve T
c/O(z
n)
λ, t, η, P, S;
10. by normalization perforate transmittance graph, focus z is got
n=0 place's perforate transmittance values T
o(0), the non-linear absorption coefficient β that following formula calculates testing sample (9) is substituted into:
β＝2.83[1-T
O(0)]/I
eff(0)L
eff(1)
In above formula, L
eff=[1-exp (-α
0l)]/α
0for the net thickness of sample, α
0for sample linear absorption coefficient, can check in, L is sample actual (real) thickness;
By normalization Relative Transmission rate curve T
c/O(z
n)
λ, t, η, P, S, get crest, trough place relative transmittance value, calculate the nonlinear refractive index n of testing sample 9 according to following formula
2:
In above formula, Δ T
pV=T
p-T
v, T
p, T
vbe respectively crest and the trough transmittance values of normalization Relative Transmission rate curve;
for the linear transmissivity of aperture diaphragm 11 pairs of Gaussian beams, r
a, ω
abe respectively aperture diaphragm radius and beam cross section radius.
Claims (4)
1. Real Time Observation can monitor a z scanning optical non-linear measuring device, be characterised in that its formation comprises Output of laser wavelength X
1the first laser instrument (1) and Output of laser wavelength X
2second laser (13), the primary optical axis formed along the main optical path of the Laser output of described the first laser instrument (1) is the first spectroscope (2) successively, first laser beam splitter (3), beam expanding lens (4), second spectroscope (5), first object lens (6), first Amici prism (7), second laser beam splitter (8), testing sample (9), second Amici prism (10), aperture diaphragm (11), first photodetector (12), described the first laser beam splitter (3) is at 45 ° with primary optical axis, the wavelength that described second laser (13) exports is λ
2laser incide described the first laser beam splitter (3) through the 3rd spectroscope (14), first signal generator (25) is connected with the first laser instrument (1), secondary signal generator (26) is connected with second laser (13), described the first spectroscope (2) is at 45 ° with primary optical axis, at the reflected light outbound course of described the first spectroscope (2), the 5th spectroscope (20), the first condenser lens (21), the 5th photodetector (22) are set, the 5th described spectroscope (20) is at 45 ° with optical axis, at the reflected light outbound course of the 5th described spectroscope (20), the second condenser lens (23), the 6th photodetector (24) are set, the 3rd described spectroscope (14) is at 45 ° with optical axis, at the reflected light outbound course of the 3rd described spectroscope (14), the 4th spectroscope (15), the 3rd condenser lens (16), the 7th photodetector (17) are set, the 4th described spectroscope (15) is at 45 ° with optical axis, at the reflected light outbound course of the 4th described spectroscope (15), the 4th condenser lens (18), the 8th photodetector (19) are set, described the second spectroscope (5) is at 45 ° with primary optical axis, at the reflected light outbound course of described the second spectroscope (5), the 5th condenser lens (37), the 4th photodetector (38) are set, at the reflected light outbound course of described the first Amici prism (7), the 6th condenser lens (27), the 3rd photodetector (28) are set, described the second laser beam splitter (8) is at 45 ° with primary optical axis, at the reflected light outbound course of described the second laser beam splitter (8), the second object lens (33), the 6th spectroscope (32), optical filter (34), CCD camera (35) are set, the 6th described spectroscope (32) is at 45 ° with optical axis, at the reflected light outbound course of the 6th described spectroscope (32), lighting source (31) is set, described the first Amici prism (7), the 6th condenser lens (27), the 3rd photodetector (28), the second laser beam splitter (8), testing sample (9), lighting source (31), the 6th spectroscope (32), the second object lens (33), optical filter (34), CCD camera (35) are placed on sample motor movement platform (36), at the reflected light outbound course of described the second Amici prism (10), the 7th condenser lens (29), the second photodetector (30) are set, described the first photodetector (12), second photodetector (30), 3rd photodetector (28), 4th photodetector (38), CCD camera (35), sample motor movement platform (36), oscillograph (39) are connected with computing machine (40), the 5th described photodetector (22), the 6th photodetector (24), the 7th photodetector (17), the 8th photodetector (19), is connected with oscillograph (39).
2. according to claim 1 can Real Time Observation monitoring z scanning optical non-linear measuring device, it is characterized in that described the first spectroscope (2), the second spectroscope (5), the 3rd spectroscope (14) be to wavelength X
1, λ
2laser-transmitting rate 95%, the spectroscope of reflectivity 5%; The 4th described spectroscope (15), the 5th spectroscope (20) are to wavelength X
1, λ
2laser-transmitting rate 50%, the spectroscope of reflectivity 50%; The 6th described spectroscope (32) is to lighting source transmissivity 50%, the spectroscope of reflectivity 50%; Described the first Amici prism (7) is to wavelength X
1, λ
2laser-transmitting rate 80%, the Amici prism of reflectivity 20%; Described the second Amici prism (10) is to wavelength X
1, λ
2laser-transmitting rate 50%, the Amici prism of reflectivity 50%; Described the first laser beam splitter (3) is to wavelength X
1laser-transmitting rate more than 95%, reflectivity less than 5%, and to wavelength X
2laser reflectivity more than 95%, the spectroscope of transmissivity less than 5%; Described the second laser beam splitter (8) is to wavelength X
1, λ
2laser-transmitting rate more than 95%, reflectivity less than 5%, and to lighting source reflectivity more than 95%, the spectroscope of transmissivity less than 5%; Described optical filter (34) is to wavelength X
1, λ
2laser-transmitting rate less than 1%, reflectivity more than 99%, and the reflectivity less than 1% to lighting source, the optical filter of transmissivity more than 99%, described the first object lens (6) are the object lens of NA=0.1; Described the second object lens (33) are the microcobjectives of NA=0.4.
3. according to claim 1 can Real Time Observation monitoring z scanning optical non-linear measuring device, it is characterized in that the laser beam that described the first laser instrument (1) and second laser (13) send is Gaussian beam.
4. utilize and can carry out the measuring method of non-linear absorption coefficient and nonlinear refractive index by Real Time Observation monitoring z scanning optical non-linear measuring device described in claim 1, it is characterized in that the method comprises the following steps:
One, wavelength X is measured
1laser action under the nonlinear data of testing sample:
1. according to measurement needs, laser wavelength lambda is selected
1, described signal generator (25) controls the first laser instrument (1) and sends wavelength X
1laser as light source, conditioning signal generator (25), namely regulates laser power, or the laser pulse cycle, pulse width; Movement velocity and first photodetector (12) of described sample motor movement platform (36) are set by computing machine (40), second photodetector (30), 3rd photodetector (28), the sample frequency of the 4th photodetector (38), sampling number and the first laser instrument (1) synchronous working;
2. measure transmission perforate, transmission closed pore and reflect hole data;
Described testing sample (9) is placed on described sample motor movement platform (36), the measuring surface of adjustment testing sample (9) is perpendicular to described primary optical axis, i.e. z-axis, the focus place of described the first object lens (6) is z=0, and the initial position of described testing sample (9) is-10z
0, definition
for laser diffraction length, wherein k=2 π/λ, λ are laser wavelength of incidence,
for laser beam waist radius, NA is the numerical aperture of the first object lens (6), described computing machine (40) starts described sample motor movement platform (36) and the first photodetector (12) simultaneously, second photodetector (30), 3rd photodetector (28), 4th photodetector (38), testing sample (9) is along primary optical axis positive movement, through the focus of the first object lens (6), range of movement 20z
0described the first photodetector (12), second photodetector (30), 3rd photodetector (28), 4th photodetector (38) is by the computing machine (40) described in the light intensity signal of detection feeding, and the output intensity signal wherein gathering the 4th photodetector (38) is the power monitoring data P of incident laser; Gather the first photodetector (12), second photodetector (30), the output intensity signal of the 3rd photodetector (28) is respectively transmission closed pore data, transmission perforate data and reflect hole data, with the light intensity value collected for ordinate, z is horizontal ordinate, is recorded as transmission closed pore curve I
tC(z
n)
λ, t, η, P, S, transmission perforate curve I
tO(z
n)
λ, t, η, P, and reflection perforate curve I
rO(z
n)
λ, t, η, P, wherein n=1.2.3 ..., N, λ is the wavelength of incident laser, and t is the laser pulse cycle, and η is laser pulse width, P is the power monitoring data of the incident laser that the 4th photodetector (38) characterizes, S be aperture diaphragm (11) to the linear transmittance of Gaussian beam, λ, t, η, P, S experimentally condition obtain, z
nfor the horizontal ordinate of each sampled point, z
1~ z
ncoordinate figure be-10z
0~+10z
0, the abscissa value at focus place is z
n=0, N is sampling number;
3. by the upper analyzing spot surface topography of testing sample (9) in described CCD camera (35) Real Time Observation experimentation, the surface topography of testing sample (9) analyzing spot arrived according to the observation, judge whether the surface of this analyzing spot changes, if surface topography there occurs change, then this point data is unreliable, and this point data left out by computing machine (40);
4. by the 5th described photodetector (22), the pulse laser waveform launched by the first laser instrument (1) and power signal are inputed to oscillograph (39) by the 6th photodetector (24) respectively, the pulse laser quality of being launched by the first laser instrument (1) is observed according to the signal that oscillograph (39) presents, judge whether meet experiment condition, whether waveform power is stablized if modulating through described first signal generator (25) pulse laser that the first laser instrument (1) launches; If waveform or power and setting are not inconsistent, then to scan experimental data unreliable for z;
5. the first signal generator (25) is regulated, change the power of incident laser and recurrence interval and pulse width, repeat above-mentioned 2. 3. 4. step, measure the optical nonlinearity data of testing sample (9) under different lasing condition, to obtain different laser power, the transmission closed pore curve I of testing sample (9) under different laser pulse width and different laser pulse period effects
tC(z
n)
λ, t, η, P, S, transmission perforate curve I
tO(z
n)
λ, t, η, P, and reflection perforate curve I
rO(z
n)
λ, t, η, P, n=1.2.3 ..., N;
Two, wavelength X is measured
2laser action under the nonlinear data of material:
6. wavelength X is measured
2laser action under the non-linear nature of material, select wavelength X
2laser as light source, close the first laser instrument (1), open second laser (13), repeat above-mentioned 2. 3. step;
7. by the 7th described photodetector (17), the pulse laser waveform launched by second laser (13) and power signal are inputed to oscillograph (39) by the 8th photodetector (19) respectively, the pulse laser quality of being launched by second laser (13) is observed according to the signal that oscillograph (39) presents, judge whether the pulse laser launched through described secondary signal generator (26) modulation second laser (13) meets experiment condition, and whether waveform power is stablized; If waveform or power and setting are not inconsistent, then to scan experimental data unreliable for z;
8. secondary signal generator (26) is regulated, change the power of incident laser and recurrence interval and pulse width, repeat above-mentioned 6. 7. step, measure the optical nonlinearity data of testing sample (9) under different lasing condition, to obtain different laser power, the transmission closed pore curve I of testing sample (9) under different laser pulse width and different laser pulse period effects
tC(z
n)
λ, t, η, P, S, transmission perforate curve I
tO(z
n)
λ, t, η, P, and reflection perforate curve I
rO(z
n)
λ, t, η, P, n=1.2.3 ..., N;
Three, the data recorded are processed:
9. to reflection perforate curve I
rO(z
n)
λ, t, η, P, n=1.2.3 ..., N, the peak light intensity obtained with power Monitoring Data P
wherein
subtract each other with reflection perforate curve number value, obtain efficient intensity I
eff(z
n), wherein I
eff(z
n)=I
0(z
n)-I
rO(z
n)
λ, t, η, P;
To transmission perforate curve I
tO(z
n)
λ, t, η, Pn=1.2.3......, N makes normalized, by the ordinate value in above-mentioned curve divided by z
1the ordinate value at place, obtains the normalization perforate transmittance graph T of sample
o(z
n)
λ, t, η, Pn=1.2.3......, N, making ordinate be horizontal ordinate corresponding to extreme value place is z
n=0 i.e. focus, curve presents trough or crest at focus place, is being 1 away from focus place normalized transmittance;
Equally to reflection perforate curve I
rO(z
n)
λ, t, η, P, transmission closed pore curve I
tC(z
n)
λ, t, η, P, S, deal with, obtain normalization perforate reflectance curve R
o(z
n)
λ, t, η, Pn=1.2.3......, N, and normalization closed pore transmittance graph T
c(z
n)
λ, t, η, P, S, then by T
c(z
n)
λ, t, η, P, Sdivided by T
o(z
n)
λ, t, η, P, obtain normalization Relative Transmission rate curve T
c/O(z
n)
λ, t, η, P, S;
10. by normalization perforate transmittance graph, focus z is got
n=0 place's perforate transmittance values T
o(0), the non-linear absorption coefficient β that following formula calculates testing sample (9) is substituted into:
β＝2.83[1-T
O(0)]/I
eff(0)L
eff(1)
In above formula, L
eff=[1-exp (-α
0l)]/α
0for the net thickness of sample, α
0for sample linear absorption coefficient, can check in, L is sample actual (real) thickness;
By normalization Relative Transmission rate curve T
c/O(z
n)
λ, t, η, P, S, get crest, trough place relative transmittance value, calculate the nonlinear refractive index n of testing sample (9) according to following formula
2:
In above formula, Δ T
pV=T
p-T
v, T
p, T
vbe respectively crest and the trough transmittance values of normalization Relative Transmission rate curve;
for aperture diaphragm (11) is to the linear transmissivity of Gaussian beam, r
a, ω
abe respectively aperture diaphragm radius and beam cross section radius.
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| CN111024676B (en) * | 2020-01-10 | 2022-03-04 | 河南工程学院 | Nonlinear Z-scan measurement method and device |
| CN111220573B (en) * | 2020-02-28 | 2022-11-18 | 江苏大学 | Nonlinear optical absorption cross section measuring method |
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| CN114486739B (en) * | 2022-01-25 | 2024-06-11 | 山东大学 | Z-scan measuring device and measuring method for measuring nonlinear optical coefficient |
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Effective date of registration: 20210125 Address after: 210046 No.19 Hengfei Road, Nanjing Economic and Technological Development Zone, Jiangsu Province Patentee after: NANJING INSTITUTE OF ADVANCED LASER TECHNOLOGY Address before: 201800 Shanghai Jiading 800-211 Post Box Patentee before: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences |
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