CN101806723B - Double-beam multi-functional z scanning optical non-linear measuring device and method - Google Patents
Double-beam multi-functional z scanning optical non-linear measuring device and method Download PDFInfo
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- CN101806723B CN101806723B CN2010101390251A CN201010139025A CN101806723B CN 101806723 B CN101806723 B CN 101806723B CN 2010101390251 A CN2010101390251 A CN 2010101390251A CN 201010139025 A CN201010139025 A CN 201010139025A CN 101806723 B CN101806723 B CN 101806723B
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Abstract
The invention discloses a double-beam multi-functional z scanning optical non-linear measuring device and a double-beam multi-functional z scanning optical non-linear measuring device method. The device uses two light sources and can conveniently switch the light sources; an adjustable attenuation slice is adopted, so laser power is continuously adjustable from 0 and 100 percent; an acoustic optical modulator and a signal generator are adopted, so the pulse width and pulse period of emergent laser are adjustable; and transmission open hole and transmission closed hole data of a sample can be measured and reflecting open hole and transmission open hole data of the sample can also be measured. The device and the method not only can measure nonlinear absorption coefficient and nonlinear refractive index of a transparent sample, but also can measure nonlinear refractive index of a nontransparent sample; and a cold light source serving as an illumination light source is added into the device, a CCD camera is used for observing surface appearance of the sample and an optical filter is used for filtering the effect of the laser, so the measuring accuracy and correctness of the nonlinear absorption coefficient and nonlinear refractive index of the transparent sample and a partially transparent sample are enhanced.
Description
Technical field
The present invention relates to nonlinear optics, particularly a kind of double-beam multi-functional z scanning optical non-linear measuring device and method, this installs practical, and data processing is simple, and it is convenient to observe.
Background technology
In recent years, people attempt to develop the full optical device with superperformance, and to satisfy pressing for of all optical communication and optical information processing, corresponding nonlinear optical material has obtained significant progress.At present, the method of measuring the material nonlinearity coefficient mainly contains degeneration four-wave mixing method, double wave coupled method, elliptic polarization method, beam aberration method and optical kerr effect method (referring to prior art [1] Yang Hailin, Niu Yanxiong, Shen Xueju etc. laser z scanning technique progress and application [J] thereof. Ordnance Engineering College's journal, 2007,19 (5): 50-54), this several method is because of the experimental provision complexity, measure that sensitivity is low maybe can't judge shortcomings such as nonlinear factor is positive and negative, can not reach desirable measurement effect.
Z scanning (z-scan) method experimental provision that 20th century grew up is simple, measure highly sensitive, and can intuitive judgment optical nonlinearity coefficient still be less than 0 greater than 0, the method that becomes at present the most frequently used measurement material nonlinearity is (referring to prior art [2] M.Sheik-Bahae, A.A.Said, T.Wei, et al.Sensitive measurement of opticalnonlinearities using a single beam[J] .IEEE J.Quantum Electron, 1990,26:760-769).But the method can only be measured the non-linear nature of transparent sample; Owing to be difficult to judge whether the material surface pattern variation has taken place, this has caused confirming material non-linearly derives from the own structural change of material that intrinsic effect that laser causes or laser cause; And, when the material nonlinearity character under the needs research Different Light, need light modulation road again, very inconvenient; What is more important owing to the reflected light information of having ignored from sample, make that conventional transmission-type z-scan method data when measurement for opaque sample or translucent sample are inaccurate, even the nonlinear refraction that draws is opposite with reality with non-linear absorption coefficient.
Summary of the invention
The object of the present invention is to provide a kind of double-beam multi-functional z scanning optical non-linear measuring device and method, this device wants to measure easily the nonlinear refractive index and the non-linear absorption coefficient of material under two kinds of light sources; Not only can measure the non-linear absorption coefficient and the nonlinear refractive index of transparent sample, and nonlinear refractive index that can the measurement for opaque sample; Condition that can change effect laser makes it easy to study the non-linear nature of material under the different lasing conditions; Can observe the surface topography situation of change of measured point.
Technical solution of the present invention is as follows:
A kind of twin-beam multi-functional z scanning optical non-linear measuring device, characteristics are that its formation comprises the output laser wavelength lambda
1First laser instrument and output laser wavelength lambda
2Second laser instrument, on the primary optical axis that the main optical path of exporting along the laser of described first laser instrument constitutes is first sound-optic modulator successively, laser beam splitter, first transmissibility of adjustable attenuation piece, first aperture diaphragm, beam expanding lens, first Amici prism, second Amici prism, object lens, testing sample, the 3rd Amici prism, second aperture diaphragm and the 4th photodetector, the placement at 45 of described laser beam splitter and primary optical axis, the laser of described second laser instrument output incides described laser beam splitter through second sound-optic modulator, advances along main optical path after this laser beam splitter reflection; Described first sound-optic modulator links to each other with signal generator with second sound-optic modulator; Reflected light outbound course at described first Amici prism is provided with first photodetector, at another light input direction of this first Amici prism cold light source is arranged, and is optical filter and CCD camera successively at the reflected light outbound course of described second Amici prism; Described object lens are positioned on the object lens control desk that moves along the primary optical axis direction; Described testing sample places on the sample universal stage, and this sample universal stage is positioned on the sample control desk that moves along the primary optical axis direction; The reflected light direction at 45 at described testing sample and primary optical axis is second transmissibility of adjustable attenuation piece, first condenser lens and second photodetector successively; Reflected light direction at described the 3rd Amici prism has the 3rd transmissibility of adjustable attenuation piece, second condenser lens and the 3rd photodetector successively; Described first photodetector, second photodetector, the 3rd photodetector, the 4th photodetector link to each other with data acquisition unit; Described object lens control desk, sample control desk, sample universal stage and data acquisition unit all link to each other with computing machine.
Also has first valve between described first laser instrument and the first sound-optic modulator, this first valve places on first valve positioner, between described second laser instrument and second sound-optic modulator second valve is arranged, this second valve places on second valve positioner; Described first valve positioner links to each other with described computing machine with second valve positioner.
Described laser beam splitter is to wavelength X
1Laser-transmitting rate more than 95%, reflectivity below 5%, and to laser wavelength lambda
2Laser reflectivity more than 95%, the spectroscope of transmissivity below 5%.
The laser beam that described first laser instrument and second laser instrument send is a Gaussian beam.
Utilize above-mentioned twin-beam multi-functional z scanning optical non-linear measuring device to carry out the measuring method of sample non-linear absorption coefficient and nonlinear refractive index, it is characterized in that comprising the following steps:
One, measures wavelength X
1Laser action under the nonlinear data of testing sample:
1. according to measuring needs, select laser wavelength lambda
1Laser make light source, the wavelength X that described computer control first laser instrument sends
1Laser as light source, regulate wavelength X by first transmissibility of adjustable attenuation piece and signal generator
1The laser power of laser, or laser pulse cycle, pulse width; The movement velocity and the first laser instrument synchronous working of sample frequency, sampling number and sample control desk by the described data acquisition unit of computer installation;
2. measure transmission perforate and transmission closed pore data:
Described testing sample is placed on the described sample universal stage, and the measurement face of adjusting testing sample is perpendicular to described primary optical axis, i.e. z axle, and the focus place of described object lens is z=0, the initial position of described testing sample is-10z
0, definition z
0=kw
0 2/ 2 is laser diffraction length, k=2 π/λ wherein, and λ is a laser wavelength of incidence,
Be the laser beam waist radius, NA is the numerical aperture of object lens, and described computing machine starts described sample control desk and data acquisition unit simultaneously, and testing sample is along the primary optical axis positive movement, and through the focus of object lens, range of movement is 20z
0Described the 3rd photodetector and the 4th photodetector are converted to voltage signal with the light intensity signal of surveying, data acquisition unit is gathered the voltage signal of the 3rd photodetector and the output of the 4th photodetector simultaneously and is sent into described computing machine (24), be respectively transmission perforate data and transmission closed pore data, with the magnitude of voltage that collects is ordinate, z is a horizontal ordinate, is recorded as transmission perforate curve V
TO(z
n)
λ, t, η, pWith transmission closed pore curve V
TC(z
n)
λ, t, η, P, S, wherein: n=1.2.3. ..., N, λ are the wavelength of incident laser, t is the laser pulse cycle, η is a laser pulse width, and P is the laser power that first photodetector characterizes, and S is the linear transmittance of second aperture diaphragm to Gaussian beam, λ, t, η, P, S obtains according to experiment condition, z
nBe the horizontal ordinate of each sampled point, z
1～z
NCoordinate figure be-10z
0～10z
0, the abscissa value at focus place is z
n=0, N is a sampling number;
3. by analyzing spot surface topography on the described CCD camera looks testing sample; The surface topography of the testing sample analyzing spot that arrives according to the observation judges whether the surface topography of this analyzing spot changes, if surface topography does not change, then this point data is reliable, and computing machine is preserved this point data; If variation has taken place surface topography, then this point data is unreliable, and computing machine is left out this point data;
4. measure reflection perforate and transmission perforate data:
Start described sample universal stage, drive described testing sample rotation, make testing sample and primary optical axis angle at 45, the position of adjusting testing sample is positioned at-10z
0, described computing machine starts described object lens control desk and data acquisition unit simultaneously, and described object lens move along z axle negative direction, and range of movement is 20z
0Be equivalent to the focus that described testing sample crosses described object lens from negative z beam warp and arrive positive z axle, data acquisition unit is gathered the voltage signal of second photodetector and the output of the 3rd photodetector simultaneously and is sent into described computing machine, be respectively reflection perforate data and transmission perforate data, record reflection perforate curve is V
RO(z
n)
λ, t, η, P, n=1,2 ... N, the transmission perforate curve of record is 2. identical in the step with the;
5. with the sample universal stage towards with the 4. 45 ° of the reverse direction rotations in the step, make testing sample vertical, by described CCD camera looks testing sample surface topography with primary optical axis;
The surface topography of the testing sample analyzing spot that 6. arrives according to the observation judges whether the surface topography of this analyzing spot changes, if surface topography does not change, then this point data is reliable, and computing machine is preserved this point data; If variation has taken place surface topography, then this point data is unreliable, and computing machine is left out this point data;
7. regulate first transmissibility of adjustable attenuation piece, change the power of incident laser, or conditioning signal generator, change the recurrence interval and the pulse width of incident laser, above-mentioned 2. repeat, 3., 4., 5., 6. step, measure the optical nonlinearity data of testing sample under the different lasing conditions, to obtain the transmission perforate curve V of testing sample under different laser powers, different laser pulse width and the different laser pulse period effects
TO(z
n)
λ, t, η, p, transmission closed pore curve V
TC(z
n)
λ, t, η, P, SWith reflecting the perforate curve is V
RO(z
n)
λ, t, η, P, n=1.2.3. wherein ..., N;
Two, measure wavelength X
2Laser action under the nonlinear data of material:
8. as needing to measure wavelength X
2Laser action under material nonlinearity character, select wavelength X
2Laser as light source, close first laser instrument, open second laser instrument, above-mentioned the 2. repeat, 3., 4., 5., 6., 7. step, obtain wavelength X
2Laser action under the optical nonlinearity data of testing sample;
Three, the data that record are handled:
9. to transmission perforate curve V
TO(z
n)
λ, t, η, p, n=1,2,3 ..., N makes normalized, with the ordinate value of ordinate values all in the above-mentioned curve divided by the z1 place, obtains the normalization perforate transmittance curve T of sample
O(z
n)
λ, t, η, P, n=1,2,3 ..., N makes that ordinate value is that the horizontal ordinate of extreme value place correspondence is z
n=0 is focus, and curve presents trough or crest at the focus place, is being 1 away from focus place normalization transmitance;
Equally to reflection perforate curve V
RO(z
n)
λ, t, η, PDeal with, obtain the normalization perforate reflectance curve R of sample
O(z
n)
λ, t, η, P, make that ordinate value is that the horizontal ordinate of extreme value place correspondence is z
n=0 is focus, and curve presents trough or crest at the focus place, is being 1 away from focus place normalization transmitance;
Equally to transmission closed pore curve V
TC(z
n)
λ, t, η, P, SDeal with, obtain the normalization closed pore transmitance of sample, again with it divided by normalization perforate transmitance, obtain the relative transmittance curve T of normalization
C/O(z
n)
λ, t, η, P, S, the existing crest of this curve has trough again, and the horizontal ordinate that makes curve crest and trough centre position is z
n=0 is focus, and curve presents the shape of similar sin function or cos function near focus, is being 1 away from focus place normalization transmitance;
10. described computing machine (24) utilization software Origin, the curve with following formula and above-mentioned normalization perforate transmittance curve, normalization perforate reflectance curve, the relative transmitance of normalization obtains non-linear absorption coefficient and nonlinear refractive index.
By normalization perforate transmittance curve, get focus z
n=0 place perforate transmitance value T
O(0), the substitution following formula calculates the non-linear absorption coefficient β of testing sample (22):
β＝2.83[1-T
O(0)]/I
0L
eff
In the formula, L
Eff=[1-exp (α
0L)]/α
0Be the net thickness of sample, α
0Be linear absorption coefficient, can check in that L is the actual (real) thickness of sample;
Be laser beam waist place optical power density, the P definition is identical with the front;
By the relative transmittance curve T of normalization
C/O(z
n)
λ, t, η, P, S, get the relative transmitance value at crest, trough place, calculate the nonlinear refractive index n of testing sample (22) according to following formula
2:
In the formula, Δ T
PV=T
P-T
V, T
P, T
VBe respectively the crest and the trough transmitance value of the relative transmittance curve of normalization; S=1-exp (2r
a 2/ ω
a 2) be the linear transmittance of second aperture diaphragm (29) to Gaussian beam, r
a, ω
aBe respectively the second aperture diaphragm radius and beam cross section radius;
Calculate nonlinear refractive index n by the perforate reflectance curve
2, nonlinear refractive index n
2Determine by following formula:
In the formula: r ' is normalized nonlinear reflection coefficient: r '=1-R
O(0), R wherein
O(0) for getting focus z
nPerforate reflectance value in=0 place is by perforate reflectance curve R
O(z
n)
λ, t, η, PDetermine;
n
0For the linear refractive index of material, known;
Technique effect of the present invention:
Adopt two light sources among the present invention, toggle lights easily, the non-linear absorption coefficient and the nonlinear refractive index of material under the research Different Light.
Adopt adjustable attenuator to make that laser power from 0 to 100% is adjustable continuously;
Adopt acousto-optic modulator and signal generator to make the pulse width of shoot laser and recurrence interval adjustable, pulse width can be regulated arbitrarily from 10ns to the continuous light;
But the transmission perforate of measuring samples and transmission closed pore data, but the reflection perforate of measuring samples and transmission perforate data again;
Reflection perforate measure portion, nonlinear refractive index that can the measurement for opaque sample;
Added cold light source in the device as lighting source, the illumination sample surfaces utilizes CCD observation sample surface topography, uses the influence of optical filter elimination laser simultaneously.
Description of drawings
Fig. 1 is the light channel structure figure of the twin-beam multi-functional z scanning optical non-linear measuring device realized of the present invention.
Fig. 2 is the measurement process flow diagram of the twin-beam multi-functional z scanning optical non-linear measuring device realized of the present invention.
Embodiment
The present invention will be further described below in conjunction with embodiment and accompanying drawing, but should not limit protection scope of the present invention with this:
See also Fig. 1 earlier, Fig. 1 is the light channel structure figure of the embodiment of twin-beam multi-functional z scanning optical non-linear measuring device that realizes of the present invention, as seen from the figure, twin-beam multi-functional z scanning optical non-linear measuring device of the present invention, formation comprises the output laser wavelength lambda
1First laser instrument 1 and output laser wavelength lambda
2Second laser instrument 5, along being first valve 32, first sound-optic modulator 3, laser beam splitter 6, first transmissibility of adjustable attenuation piece 7, first aperture diaphragm 8, beam expanding lens 9, first Amici prism 10, second Amici prism 13, object lens 17, testing sample 22, the 3rd Amici prism 25, second aperture diaphragm 29 and the 4th photodetector 30 successively on the main optical path of the laser of described first laser instrument 1 output, described laser beam splitter 6 and the placement at 45 of described main optical path; The laser of described second laser instrument 5 outputs incides described laser beam splitter 6 through second valve 34, second sound-optic modulator 4; Described first valve 32 places on first valve positioner 33, described first valve positioner, 33 controls, first valve 32 is vertically placed or horizontal positioned, block the laser that first laser instrument 1 sends when vertically placing, do not keep off the laser that first laser instrument 1 sends during horizontal positioned; Described second valve 34 places on second valve positioner 35, described second valve positioner, 35 controls, second valve 34 is vertically placed or horizontal positioned, block the laser that second laser instrument 5 sends when vertically placing, do not keep off the laser that second laser instrument 5 sends during horizontal positioned; Described first sound-optic modulator 3 links to each other with signal generator 2 with second sound-optic modulator 4; Reflected light outbound course at described first Amici prism 10 is provided with first photodetector 11, at another light input direction of this first Amici prism 10 cold light source 12 is arranged; Reflected light outbound course at described second Amici prism 13 is optical filter 14 and CCD camera 15 successively; Described object lens 17 are positioned on the object lens control desk 16 that moves along the primary optical axis direction; Described testing sample 22 places on the sample universal stage 23, and this sample universal stage 23 is positioned on the sample control desk 21 that moves along the primary optical axis direction; The reflected light direction at 45 at described testing sample 22 and primary optical axis is second transmissibility of adjustable attenuation piece 20, first condenser lens 19 and second photodetector 18 successively; Reflected light direction at described the 3rd Amici prism 25 has the 3rd transmissibility of adjustable attenuation piece 26, second condenser lens 27 and the 3rd photodetector 28 successively; Described first photodetector 11, second photodetector 18, the 3rd photodetector 28, the 4th photodetector 30 link to each other with data acquisition unit 31, and described first valve positioner 33, second valve positioner, 34 object lens control desks 16, sample control desk 21, sample universal stage 23 all link to each other with computing machine 24 with data acquisition unit 31.
Described laser beam splitter 6 is to wavelength X
1Laser-transmitting rate more than 95%, reflectivity below 5%, and to laser wavelength lambda
2Laser reflectivity more than 95%, the spectroscope of transmissivity below 5%.
In the present embodiment, it is the laser instrument of 632.8nm that first laser instrument 1 is selected optical maser wavelength for use, and it is the laser instrument of 405nm that second laser instrument 5 is selected optical maser wavelength for use.
With reference to Fig. 1, twin-beam multi-functional z of the present invention-scanning (z-scan) optical non-linear measuring device is divided into two parts, and first is based on the non-linear detection system of laser, and second portion is based on the CCD observing system of cold light source.The non-linear detection system of first is made up of two parts again: 1. transmission perforate and transmission closed pore probe portion; 2. reflect perforate and transmission perforate probe portion.
1. transmission perforate and transmission closed pore probe portion: mainly by first laser instrument 1, second laser instrument 5, first valve 32, first valve positioner 33, first valve 34, second valve 35, first sound-optic modulator 3, second sound-optic modulator 4, signal generator 2, laser beam splitter 6, first transmissibility of adjustable attenuation piece 7, the 3rd transmissibility of adjustable attenuation piece 26, first aperture diaphragm 8, second aperture diaphragm 29, object lens 17, sample control desk 21, the 3rd Amici prism 25, second condenser lens 27, the 3rd photodetector 28 and transmission the 4th photodetector 30 are formed.This part utilizes first sound-optic modulator 3, second sound-optic modulator 4 and signal generator 2, incident laser is adjusted to pulse width and variable pulsed light of recurrence interval, utilize first transmissibility of adjustable attenuation piece 7, make incident laser power adjustable, laser focuses on sample 22 by object lens 17, in the motion of z axle, emergent light is divided into two-beam by the 3rd Amici prism 25: transmitted beam light and reflecting bundle light by sample control desk 21 control samples 22.Transmitted beam light arrives the 4th photodetector 30 through second aperture diaphragm, 29 backs, this is a transmission closed pore probe portion, described reflecting bundle light arrives the 3rd photodetector 28 through the 3rd transmissibility of adjustable attenuation piece 26, second condenser lens 27, and this is a transmission perforate probe portion.
2. reflect perforate and transmission perforate probe portion: mainly by first LASER Light Source 1, second LASER Light Source 5, first valve 32, first valve positioner 33, first valve 34, second valve 35, first sound-optic modulator 3, second sound-optic modulator 4, signal generator 2, laser beam splitter 6, first transmissibility of adjustable attenuation piece 7, second transmissibility of adjustable attenuation piece 20, the 3rd transmissibility of adjustable attenuation piece 26, first aperture diaphragm 8, object lens 17, object lens control desk 16, sample universal stage 23, second Amici prism 25, first condenser lens 19, second condenser lens 27, second photodetector 18 and the 3rd photodetector 28 are formed.This part utilizes first sound-optic modulator 3, second sound-optic modulator 4, signal generator 2 and first transmissibility of adjustable attenuation piece 7 to make pulse width, recurrence interval and the adjustable power of incident laser equally.Utilize sample universal stage 23 that sample 22 is turned over 45 °, laser focuses on sample 22 by object lens 17, is moved at the z axle by object lens control desk 16 control object lens 17.By the reflected light of sample 22 reflections, behind second transmissibility of adjustable attenuation piece 20 and first condenser lens 19, to survey by second photodetector 18, this is reflection perforate probe portion; Through the transmitted light of sample 22, to be surveyed by the 3rd photodetector 28 by 25 reflections of the 3rd Amici prism, the 3rd transmissibility of adjustable attenuation piece 26 and second condenser lens, 27 backs, this is a transmission perforate probe portion.
CCD observing system: mainly form by cold light source 12, first Amici prism 10, second Amici prism 13, optical filter 14 and CCD camera 15.Illumination light is sent by cold light source 12 in this part, go into main optical path through first Amici prism 10 is laggard, focus on sample 22 surfaces through object lens 17, sample 22 surfaces are returned the illumination light reflection of observing along former road, this light that returns through described object lens 17,13 reflections of second Amici prism after optical filter 14 arrives CCD cameras 15, the influence of optical filter 14 elimination laser.When testing sample 22 surface arrives the focal plane of object lens 17, on CCD camera 15, can occur clearly as.The transmitance that sample 22 produces under laser action or the sudden change of reflectivity, this sudden change may be that the variation of material internal band structure causes, also might be that the material structure variation causes, adopt observing system so that analyze the source of determining non-linear generation.
The concrete operations step of embodiment is as follows:
The nonlinear data of testing sample under the laser action of measurement wavelength 632.8nm:
1. select LASER Light Source as required, as to select wavelength be that the laser of 632.8nm is as light source, computing machine 24 controls first valve positioner 33, make first valve, 32 horizontal positioned, control second valve positioner 35, second valve 34 is vertically placed, and the laser of the wavelength 632.8nm that first laser instrument 1 sends is as light source, and the laser of the wavelength 405nm that second laser instrument 5 sends is blocked; Regulate first transmissibility of adjustable attenuation piece (7) and signal generator (5), obtain required laser power and laser pulse;
2. measure transmission perforate and transmission closed pore data:
Testing sample 22 is placed on the described sample universal stage 23 perpendicular to primary optical axis.Testing sample 22 is positioned at-10z
0Near, computing machine 24 starts described sample control desk 21 and data acquisition unit 31 simultaneously, and testing sample 22 is along z axle (primary optical axis) positive movement, and through the focus of object lens 17, range of movement is 20z
0Photodetector is converted to voltage signal with light intensity signal, data acquisition unit 31 is gathered the voltage signal of the 3rd photodetector 28 and 30 outputs of the 4th photodetector simultaneously and is sent into described computing machine 24, be respectively transmission perforate data and transmission closed pore data, with the magnitude of voltage that collects is ordinate, z is a horizontal ordinate, is recorded as V
TO(z
n)
λ, t, η, p, n=1,2 ... 2500 and V
TC(z
n)
λ, t, η, P, S, n=1,2 ... 2500, wherein, λ is the wavelength of incident laser, t is the laser pulse cycle, and η is a laser pulse width, and P is object lens 17 testing sample 22 laser powers before afterwards, and S is the linear transmittance of 29 pairs of Gaussian beams of second aperture diaphragm, λ, t, η, P, S obtains according to experiment condition, z
nBe the horizontal ordinate of each sampled point, z
1～z
2500Coordinate figure be-10z
0～10z
0, the abscissa value at focus place is z
n=0, sampling number is 2500 points.The data acquisition unit sample frequency is set, sampling number is respectively 62.5HZ, 2500 points, the movement velocity that the sample control desk is set is 75um/s.
3. observe analyzing spot surface topography on the testing sample 22 by described CCD camera 15; The surface topography of testing sample 22 analyzing spots that arrive according to the observation judges whether the surface topography of this analyzing spot changes, if surface topography does not change, preserves this point data; If variation has taken place surface topography, do not preserve this point data;
4. measure reflection perforate and transmission perforate data:
Start described sample universal stage 23, drive described testing sample 22 rotations, make testing sample 22 and primary optical axis angle at 45, adjust testing sample 22 and be positioned at-10z
0Near, computing machine 24 starts described object lens control desk 16 and data acquisition unit 31 simultaneously, and object lens are along the negative movement of z axle, and range of movement is 20z
0The focus that makes testing sample 22 cross described object lens 17 from negative z beam warp arrives positive z axle, data acquisition unit 31 is gathered the voltage signal of second photodetector 18 and 28 outputs of the 3rd photodetector simultaneously and is sent into described computing machine 24, be respectively reflection perforate data and transmission perforate data, reflection perforate data are recorded as V
RO(z
n)
λ, t, η, P, n=1,2 ... 2500, each parameter with 2. in the definition identical, transmission perforate data recording also with 2. in identical; Identical in respectively being arranged at 2.;
5. with sample universal stage 23 towards with the 4. 45 ° of the reverse direction rotations in the step, make testing sample 22 vertical, by CCD camera 15 observation testing samples 22 surface topographies with primary optical axis;
The surface topography of testing sample 22 analyzing spots that 6. arrive according to the observation judges whether the surface topography of this analyzing spot changes, if surface topography does not change, then preserves this point data; If variation has taken place surface topography, then do not preserve this point data;
7. regulate first transmissibility of adjustable attenuation piece 7, change the power of incident laser, or conditioning signal generator 2, change the recurrence interval and the pulse width of incident laser, above-mentioned 2. repeat, 3., 4., 5., 6. step, measure the optical nonlinearity data of testing sample under the different lasing conditions, to obtain the non-linear absorption coefficient and the nonlinear refractive index of testing sample 22 under different laser powers, different laser pulse width and the different laser pulse period effects;
Two, the nonlinear data of material under the laser action of measurement wavelength 405nm:
8. as the material nonlinearity character under the laser action that needs research wavelength 405nm, computing machine 24 controls second valve positioner 35, make second valve, 34 horizontal positioned, control first valve positioner 33, first valve 32 is vertically placed, the laser of the wavelength 405nm that second laser instrument 5 sends is as light source, the laser of the wavelength 632.8nm that first laser instrument 1 sends is blocked, above-mentioned the 2. repeat, 3., 4., 5., 6., 7. step, obtain the optical nonlinearity data of testing sample 22 under the different lasing conditions;
Three, the data that record are handled:
9. to transmission perforate data V
TO(z
n)
λ, t, η, p, n=1,2 ... 2500 make normalized, with ordinate values all in the above-mentioned curve divided by z
1The ordinate value at place obtains the normalization perforate transmittance curve T of sample
O(z
n)
λ, t, η, P, n=1,2 ... 2500, make that ordinate value is that the horizontal ordinate of extreme value place correspondence is z
n=0 is focus, and curve presents trough or crest at the focus place, is being 1 away from focus place normalization transmitance.
To reflection perforate data V
RO(z
n)
λ, t, η, P, n=1,2 ... 2500 do same the processing, obtain the normalization perforate reflectance curve R of sample
O(z
n)
λ, t, η, P, n=1,2 ... 2500, make that ordinate value is that the horizontal ordinate of extreme value place correspondence is z
n=0 is focus, is being 1 away from focus place normalization transmitance.
To transmission closed pore data V
TC(z
n)
λ, t, η, P, S, n=1,2 ... 2500 do same the processing, obtain the normalization closed pore transmitance of sample, again with it divided by normalization perforate transmitance, obtain the relative transmittance curve T of normalization
C/O(z
n)
λ, t, η, P, S, n=1,2 ... 2500, the existing crest of this curve has trough again, and the horizontal ordinate that makes curve crest and trough centre position is z
n=0 is focus, and curve presents the shape of similar sin function or cos function near focus, is being 1 away from focus place normalization transmitance
10. described computing machine (24) utilization software Origin, the curve with following formula and above-mentioned normalization perforate transmittance curve, normalization perforate reflectance curve, the relative transmitance of normalization obtains non-linear absorption coefficient and nonlinear refractive index.
By normalization perforate transmittance curve, get focus z
n=0 place perforate transmitance value T
O(0), substitution following formula (referring to prior art [1], [2]) can calculate the non-linear absorption coefficient β of testing sample (22):
β＝2.83[1-T
O(0)]/I
0L
eff (1)
In the formula, L
Eff=[1-exp (α
0L)]/α
0Be the net thickness of sample, α
0Be linear absorption coefficient, can check in that L is the actual (real) thickness of sample;
Be laser beam waist place optical power density, the P definition is identical with the front; β is a non-linear absorption coefficient.
By the relative transmittance curve of normalization, get the relative transmitance value at crest, trough place, can calculate the nonlinear refractive index n of testing sample (22) according to following formula (referring to prior art [1], [2])
2:
In the formula, Δ T
PV=T
P-T
V, T
P, T
VBe respectively the crest and the trough transmitance value of the relative transmittance curve of normalization; S=1-exp (2r
a 2/ ω
a 2) be the linear transmittance of second aperture diaphragm (29) to Gaussian beam, r
a, ω
aBe respectively the second aperture diaphragm radius and beam cross section radius; Other parameters are identical with the front definition.
Existing normalization perforate reflectance curve, and following formula is (referring to prior art [3] M.Martinelli, S.Bian, J.R.Leite, and R.J.Horowicz.Sensitivity-enhanced reflection Z-scan by oblique incidence of a polarizedbeam[J] .Appl.Phys.Lett.1998,72 (12), 1427-1429):
In the formula, θ is the angle of incident laser and sample surfaces, and θ is 45 ° of fixed values among the present invention, therefore, hereinafter omits the mark of this symbol, R
O(z
n, θ), r ' (θ) is designated as R respectively
O(z
n), r '; R ' is the normalized nonlinear reflection coefficient, hereinafter will define.Get focus z
n=0 place perforate reflectance value R
O(0), the substitution following formula can calculate the normalized nonlinear reflection coefficient r ' of testing sample (22):
r′＝1-R
O(0) (4)
R ' is defined as
R is the total reflectance of material, among the present invention
Its one-level expands into
r
0Be the linear reflective coefficient,
N is total refractive index, n=n
0+ Δ n (I), n
0Be the linear refractive index of material, be known quantity, Δ n is non-linear partial Δ n (I)=n
2I, I are the optical power density at diverse location place on the z axle, with z
nIt is relevant,
Other parameters are identical with the front definition.Abbreviation (5) formula gets:
According to known quantity with tried to achieve r ', the substitution following formula can be tried to achieve nonlinear refractive index n
2
Claims (5)
1. a twin-beam multi-functional z scanning optical non-linear measuring device is characterised in that its formation comprises the output laser wavelength lambda
1First laser instrument (1) and output laser wavelength lambda
2Second laser instrument (5), on the primary optical axis that the main optical path of exporting along the laser of described first laser instrument (1) constitutes is first sound-optic modulator (3) successively, laser beam splitter (6), first transmissibility of adjustable attenuation piece (7), first aperture diaphragm (8), beam expanding lens (9), first Amici prism (10), second Amici prism (13), object lens (17), testing sample (22), the 3rd Amici prism (25), second aperture diaphragm (29) and the 4th photodetector (30), described laser beam splitter (6) and primary optical axis placement at 45, the laser of described second laser instrument (5) output incides described laser beam splitter (6) through second sound-optic modulator (4); Described first sound-optic modulator (3) links to each other with signal generator (2) with second sound-optic modulator (4); Reflected light outbound course at described first Amici prism (10) is provided with first photodetector (11), another light input direction at this first Amici prism (10) has cold light source (12), is optical filter (14) and CCD camera (15) successively at the reflected light outbound course of described second Amici prism (13); Described object lens (17) are positioned on the object lens control desk (16) that moves along the primary optical axis direction; Described testing sample (22) places on the sample universal stage (23), and this sample universal stage (23) is positioned on the sample control desk (21) that moves along the primary optical axis direction; The reflected light direction at 45 at described testing sample (22) and primary optical axis is second transmissibility of adjustable attenuation piece (20), first condenser lens (19) and second photodetector (18) successively; Reflected light direction at described the 3rd Amici prism (25) has the 3rd transmissibility of adjustable attenuation piece (26), second condenser lens (27) and the 3rd photodetector (28) successively; Described first photodetector (11), second photodetector (18), the 3rd photodetector (28), the 4th photodetector (30) link to each other with data acquisition unit (31); Described object lens control desk (16), sample control desk (21), sample universal stage (23) and data acquisition unit (31) all link to each other with computing machine (24).
2. twin-beam multi-functional z scanning optical non-linear measuring device according to claim 1, it is characterized in that: also have first valve (32) between described first laser instrument (1) and the first sound-optic modulator (3), this first valve (32) places on first valve positioner (33), has second valve (34), this second valve (34) to place on second valve positioner (35) between described second laser instrument (5) and second sound-optic modulator (4); Described first valve positioner (33) links to each other with described computing machine (24) with second valve positioner (35).
3. twin-beam multi-functional z scanning optical non-linear measuring device according to claim 1 is characterized in that, described laser beam splitter (6) is to wavelength X
1Laser-transmitting rate more than 95%, reflectivity below 5%, and to laser wavelength lambda
2Laser reflectivity more than 95%, the spectroscope of transmissivity below 5%.
4. twin-beam multi-functional z scanning optical non-linear measuring device according to claim 1 is characterized in that, the laser beam that described first laser instrument (1) and second laser instrument (5) send is a Gaussian beam.
5. utilize the described twin-beam multi-functional z scanning optical non-linear measuring device of claim 1 to carry out the measuring method of sample non-linear absorption coefficient and nonlinear refractive index, it is characterized in that comprising the following steps:
One, measures wavelength X
1Laser action under the nonlinear data of testing sample:
1. according to measuring needs, select laser wavelength lambda
1, the wavelength X that described computing machine (24) control first laser instrument (1) sends
1Laser as light source, regulate first transmissibility of adjustable attenuation piece (7) and signal generator (2), promptly regulate laser power, or laser pulse cycle, pulse width; The movement velocity and first laser instrument (1) synchronous working of sample frequency, sampling number and the sample control desk (21) of described data acquisition unit (31) are set by computing machine (24);
2. measure transmission perforate and transmission closed pore data:
Described testing sample (22) is placed on the described sample universal stage (23), the measurement face of adjusting testing sample (22) is perpendicular to described primary optical axis, be the z axle, the focus place of described object lens (17) is z=0, and the initial position of described testing sample (22) is-10z
0, definition z
0=kw
0 2/ 2 is laser diffraction length, k=2 π/λ wherein, and λ is a laser wavelength of incidence,
Be the laser beam waist radius, NA is the numerical aperture of object lens (17), and described computing machine (24) starts described sample control desk (21) and data acquisition unit (31) simultaneously, and testing sample (22) is along the primary optical axis positive movement, through the focus of object lens (17), range of movement is 20z
0Described the 3rd photodetector (28) and the 4th photodetector (30) are converted to voltage signal with the light intensity signal of surveying, data acquisition unit (31) is gathered the voltage signal of the 3rd photodetector (28) and the 4th photodetector (30) output simultaneously and is sent into described computing machine (24), be respectively transmission perforate data and transmission closed pore data, with the magnitude of voltage that collects is ordinate, z is a horizontal ordinate, is recorded as transmission perforate curve V
TO(z
n)
λ, t, η, pWith transmission closed pore curve V
TC(z
n)
λ, t, η, P, S, wherein: n=1.2.3......., N, λ is the wavelength of incident laser, and t is the laser pulse cycle, and η is a laser pulse width, P is the laser power that first photodetector (11) characterizes, S is the linear transmittance of second aperture diaphragm (29) to Gaussian beam, λ, t, η, P, S obtains according to experiment condition, z
nBe the horizontal ordinate of each sampled point, z
1～z
NCoordinate figure be-10z
0～10z
0, the abscissa value at focus place is z
n=0, N is a sampling number;
3. observe testing sample (22) by described CCD camera (15) and go up the analyzing spot surface topography; The surface topography of the testing sample that arrives according to the observation (22) analyzing spot judges whether the surface topography of this analyzing spot changes, if surface topography does not change, then this point data is reliable, and computing machine (24) is preserved this point data; If variation has taken place surface topography, then this point data is unreliable, and computing machine (24) is left out this point data;
4. measure reflection perforate and transmission perforate data:
Start described sample universal stage (23), drive described testing sample (22) rotation, described testing sample (22) and primary optical axis angle at 45, the position of adjusting testing sample (22) is positioned at-10z
0, described computing machine (24) starts described object lens control desk (16) and data acquisition unit (31) simultaneously, and described object lens (17) move along z axle negative direction, and range of movement is 20z
0Be equivalent to the focus that described testing sample (22) crosses described object lens (17) from negative z beam warp and arrive positive z axle, data acquisition unit (31) is gathered the voltage signal of second photodetector (18) and the 3rd photodetector (28) output simultaneously and is sent into described computing machine (24), be respectively reflection perforate data and transmission perforate data, record reflection perforate curve is V
RO(z
n)
λ, t, η, P, n=1,2...N, transmission perforate curve record is 2. identical in the step with the;
5. with sample universal stage (23) towards with the 4. 45 ° of the reverse direction rotations in the step, make testing sample (22) vertical, by described CCD camera (15) observation testing sample (22) surface topography with primary optical axis;
The surface topography of the testing sample that 6. arrives according to the observation (22) analyzing spot judges whether the surface topography of this analyzing spot changes, if surface topography does not change, then this point data is reliable, and computing machine (24) is preserved this point data; If variation has taken place surface topography, then this point data is unreliable, and computing machine (24) is left out this point data;
7. regulate first transmissibility of adjustable attenuation piece (7), change the power of incident laser, or conditioning signal generator (2), change the recurrence interval and the pulse width of incident laser, above-mentioned 2. repeat, 3., 4., 5., 6. step, measure the optical nonlinearity data of testing sample under the different lasing conditions, to obtain the transmission perforate curve V of testing sample (22) under different laser powers, different laser pulse width and the different laser pulse period effects
TO(z
n)
λ, t, η, p, transmission closed pore curve V
TC(z
n)
λ, t, η, P, SWith reflecting the perforate curve is V
RO(z
n)
λ, t, η, P, n=1,2...N;
Two, measure wavelength X
2Laser action under the nonlinear data of material:
8. measure wavelength X
2Laser action under material nonlinearity character, select wavelength X
2Laser as light source, close first laser instrument (1), open second laser instrument (5), above-mentioned the 2. repeat, 3., 4., 5., 6., 7. step, obtain wavelength X
2Laser action under the optical nonlinearity data of testing sample (22);
Three, the data that record are handled:
9. to transmission perforate curve V
TO(z
n)
λ, t, η, p, n=1,2,3 ..., N makes normalized, with ordinate values all in the above-mentioned curve divided by z
1The ordinate value at place obtains the normalization perforate transmittance curve T of sample
O(z
n)
λ, t, η, P, n=1,2,3 ..., N makes that ordinate value is that the horizontal ordinate of extreme value place correspondence is z
n=0 is focus, and curve presents trough or crest at the focus place, is being 1 away from focus place normalization transmitance;
Equally to reflection perforate curve V
RO(z
n)
λ, t, η, PDeal with, obtain the normalization perforate reflectance curve R of sample
O(z
n)
λ, t, η, P, make that ordinate value is that the horizontal ordinate of extreme value place correspondence is z
n=0 is focus, and curve presents trough or crest at the focus place, is being 1 away from focus place normalization transmitance;
Equally to transmission closed pore curve V
TC(z
n)
λ, t, η, P, S, n=1,2...N deals with, and obtains the normalization closed pore transmitance of sample, again with it divided by normalization perforate transmitance, obtain the relative transmittance curve T of normalization
C/O(z
n)
λ, t, η, P, S, the existing crest of this curve has trough again, and the horizontal ordinate that makes curve crest and trough centre position is z
n=0 is focus, and curve presents the shape of similar sin function or cos function near focus, is being 1 away from focus place normalization transmitance;
10. described computing machine (24) utilization software Origin, the curve with following formula and above-mentioned normalization perforate transmittance curve, normalization perforate reflectance curve, the relative transmitance of normalization obtains non-linear absorption coefficient and nonlinear refractive index.
By normalization perforate transmittance curve, get focus z
n=0 place perforate transmitance value T
O(0), the substitution following formula calculates the non-linear absorption coefficient β of testing sample (22):
β＝2.83[1-T
O(0)]/I
0L
eff (1)
In the formula, L
Eff=[1-exp (α
0L)]/α
0Be the net thickness of sample, α
0Be linear absorption coefficient, can check in that L is the actual (real) thickness of sample;
Be laser beam waist place optical power density, the P definition is identical with the front;
By the relative transmittance curve T of normalization
C/O(z
n)
λ, t, η, P, S, get the relative transmitance value at crest, trough place, calculate the nonlinear refractive index n of testing sample (22) according to following formula
2:
In the formula, Δ T
PV=T
P-P
V, T
P, T
VBe respectively the crest and the trough transmitance value of the relative transmittance curve of normalization; S=1-exp (2r
a 2/ ω
a 2) be the linear transmittance of second aperture diaphragm (29) to Gaussian beam, r
a, ω
aBe respectively the second aperture diaphragm radius and beam cross section radius;
Calculate nonlinear refractive index n by the perforate reflectance curve
2, nonlinear refractive index n
2Determine by following formula:
In the formula: r ' is normalized nonlinear reflection coefficient: r '=1-R
O(0), R wherein
O(0) for getting focus z
nPerforate reflectance value in=0 place is by perforate reflectance curve R
O(z
n)
λ, t, η, PDetermine;
n
0For the linear refractive index of material, known;
Be laser beam waist place optical power density.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201251545Y (en) * | 2008-07-25 | 2009-06-03 | 中国科学院上海光学精密机械研究所 | Phase-change film microzone spectrum measuring device |
| CN201307088Y (en) * | 2008-12-10 | 2009-09-09 | 天津港东科技发展股份有限公司 | Optical nonlinear admeasuring apparatus |
| CN101608999A (en) * | 2009-07-15 | 2009-12-23 | 中国科学院上海光学精密机械研究所 | The single-beam dual-mode parameter adjustable Z scanning device of Real Time Observation and measuring method |
-
2010
- 2010-04-02 CN CN2010101390251A patent/CN101806723B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201251545Y (en) * | 2008-07-25 | 2009-06-03 | 中国科学院上海光学精密机械研究所 | Phase-change film microzone spectrum measuring device |
| CN201307088Y (en) * | 2008-12-10 | 2009-09-09 | 天津港东科技发展股份有限公司 | Optical nonlinear admeasuring apparatus |
| CN101608999A (en) * | 2009-07-15 | 2009-12-23 | 中国科学院上海光学精密机械研究所 | The single-beam dual-mode parameter adjustable Z scanning device of Real Time Observation and measuring method |
Non-Patent Citations (3)
| Title |
|---|
| MANSOOR SHEIK-BAHAE et al.Sensitive Measurement of Optical Nonlinearities Using a Single Beam.《IEEE JOURNAL OF QUANTUM ELECTRONICS》.1990,第26卷(第4期),760-769. * |
| 杨恢东等.激光Z扫描测量技术.《激光技术》.2000,第24卷(第4期),195-202. * |
| 杨海林等.激光Z扫描技术研究进展及其应用.《军械工程学院学报》.2007,第19卷(第5期),50-54. * |
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