CN202101764U - Mach-Zehnder point diffraction interferometer - Google Patents
Mach-Zehnder point diffraction interferometer Download PDFInfo
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- CN202101764U CN202101764U CN2011202065093U CN201120206509U CN202101764U CN 202101764 U CN202101764 U CN 202101764U CN 2011202065093 U CN2011202065093 U CN 2011202065093U CN 201120206509 U CN201120206509 U CN 201120206509U CN 202101764 U CN202101764 U CN 202101764U
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Abstract
Disclosed is a Mach-Zehnder point diffraction interferometer. A first spectroscope of the Mach-Zehnder point diffraction interferometer is used for dividing a laser beam to be detected from an optical matching system into a transmission light beam and a reflection light beam, the transmission light beam successively passes through a first Fourier lens, a pinhole filter, a first reflector and a second Fourier lens to form an expanded light beam, and the reflection light beam successively passes through a third Fourier lens, a second reflector and a fourth Fourier lens to form a shrunk light beam. A second spectroscope of the Mach-Zehnder point diffraction interferometer is located at a gathered position of the expanded light beam and the shrunk light beam, the expanded light beam reflected by the second spectroscope is utilized as reference light, and the shrunk light beam passing through the second spectroscope is utilized as signal light. A CCD (charge coupled device) detector is used for recording spatial carrier frequency interference fringes in real time at a mutually overlapped region of the signal light and the reference light, and transmits recorded interference fringe data into a computer control system. The computer control system is used for processing received interference fringe data in real time, and realizes rebuilding of complex amplitude distribution of laser to be detected.
Description
Technical field
The utility model belongs to the optical detective technology field, particularly a kind of Mach-Zehnder point-diffraction interferometer.
Background technology
In recent years, the application of laser technology more and more widely.Beam quality is an extremely crucial parameter estimating laser instrument; It has been generally acknowledged that it can be from estimating the transport property of laser instrument institute output beam in essence, so aspect such as its design to the theoretical analysis of laser instrument and laser instrument, manufacturing, detection, practical application all has meaning of crucial importance.
Existing beam quality parameter general description be the static performance index of laser system output laser, do not consider the dynamic perfromance of output laser.For high-average power laser (like capacitance laser, all solid state laser); Under the combined action of factors such as thermal effect, self-applying mould field; The near field distribution of light beam and far-field distribution generally are asymmetric, and its beam quality also has time dependent characteristic.In order to estimate the beam quality of laser more accurately, the astigmatism characteristic of considered laser and characteristic over time promptly will adopt the beam quality evaluating that contains time factor.Therefore, do a comparatively reasonable and complete evaluation, just require to realize the beam quality of real-time detection laser laser beam; Wherein the most directly method is exactly the Wave-front phase and amplitude (or intensity) distribution of real-time detection laser output beam, promptly detects the complex amplitude field distribution information of output laser in real time.
In order to realize the comprehensive evaluation to laser beam quality, the laser work person has been developed various laser beam quality detection techniques.Comparatively commonly used has: Hartmann wave front sensor, M
2Beam quality analyser, self-reference are interfered Wave-front Measuring Technique etc.Wherein, that Hartmann wave front sensor is demarcated is convenient, simple in structure, can realize the detection of wavefront real-time and dynamic, but its measuring accuracy receives the restriction of its spatial resolution, and it only is suitable for the evaluation of single-mode laser.M
2The ultimate principle of beam quality analyser is based on the method that international standard IS011146 describes; Through the light distribution second order distance on the Laser Measurement output beam diverse location repeatedly; Confirm waist radius through the method for curve fitting testing laser beamwidth radius then, try to achieve the M of testing laser at last
2The factor; Though this method precision is higher, be to use one of method more widely, its needs repeatedly to measure, and is therefore consuming time longer, and only is applicable to the continuous laser beam detection.
Doing technology as the self-reference of wavefront measurement is the important means that laser beam quality detects, and its accuracy of detection can reach one of percentage wavelength magnitude.Self-reference wherein comparatively commonly used interferes the wavefront sensing instrument to have: radial-shear interferometer (Radial Shearing Interferometry; RSI)) and Mach-Zehnder diffracted beam interferometer (Mach-Zehnder Diffracted Beam Interferometer, M-Z/DBI).2008; Elena L ó pez Lago has proposed the mathematical iterations algorithm based on radial-shear interferometer reconstruction testing laser COMPLEX AMPLITUDE at document " Amplitude and phase reconstruction by radial shearing interferometry; Appl.Opt; 47 (3): 372-376 (2008) ", obtains higher precision; Elena L ó pez Lago has reported based on the interferometer single measurement of Mach-Zehnder diffracted beam again in document " Single-shot amplitude and phase reconstruction by diffracted-beam interferometry.J.Opt.A:Pure Appl.Opt.11 (2009) " and has proposed to rebuild thus the iterative numerical approach of testing laser complex amplitude.But above two kinds of methods all are that the single measurement data are carried out more sampling; Just can obtain the true distribution of testing laser complex amplitude then through the method for numerical value iteration repeatedly; Though can realize single measurement; But operand is big, has limited the application in fields such as its on-line measurement and transient state detection in real time.
Summary of the invention
The purpose of the utility model is to overcome the deficiency of prior art, and a kind of improved Mach-Zehnder point-diffraction interferometer is provided, and to improve the detection speed of laser beam quality, satisfies the requirement of on-line measurement and transient state detection in real time.
The technical scheme of the utility model is: existing Mach-Zehnder point-diffraction interferometer is improved; A pinhole filter is set in its reference arm; Make it to produce desirable reference light; And between flashlight and reference, introduce space carrier frequency, make the said Mach-Zehnder point-diffraction interferometer of the utility model need not special reference light, only just can rebuild the COMPLEX AMPLITUDE of testing laser rapidly and accurately according to single width space carrier frequency interference fringe and without any need for iterative process.
The said Mach-Zehnder point-diffraction interferometer of the utility model; Comprise optical match system, first spectroscope, second spectroscope, first catoptron, second catoptron, first fourier lense, second fourier lense, the 3rd fourier lense, the 4th fourier lense, pinhole filter, ccd detector and computer system; First spectroscope is used for the testing laser light beam from the optical match system is divided into transmitted light beam and folded light beam; First fourier transform lens is positioned on the light path of first spectroscope generation transmitted light beam; Pinhole filter is positioned at the place, focal plane of first fourier transform lens; First catoptron is positioned on the light path of pinhole filter; Second fourier lense is positioned at first catoptron and produces on the catoptrical light path, and said transmitted light beam forms through first fourier transform lens, the pinhole filter that is positioned at place, the first fourier transform lens focal plane, first catoptron, second fourier lense successively and expands light beams;
The 3rd fourier lense is positioned on the light path of first spectroscope generation folded light beam; Second catoptron is positioned on the light path of the 3rd fourier lense; The 4th fourier lense is positioned at second catoptron and produces on the catoptrical light path, and said folded light beam forms through the 3rd fourier lense, second catoptron, the 4th fourier lense successively dwindles light beam; Second spectroscope is positioned at said expansion light beams and the said intersection that dwindles light beam; Said expansion light beams is reflected; Make the said light beam transmission of dwindling; Expansion light beams through second spectroscope reflection is a reference light, is flashlight through the light beam that dwindles of the second spectroscope transmission, and said reference light and flashlight are overlapped and interfere formation space carrier frequency interference fringe; Ccd detector is used for the real time record flashlight and reference light interferes formed space carrier frequency interference fringe in overlapped zone, it is said that and with the record number of interference fringes give computer system; Computer system is used for handling in real time the space carrier frequency interference fringe data that receive, and realizes the reconstruction of testing laser COMPLEX AMPLITUDE.
The said Mach-Zehnder point-diffraction interferometer of the utility model, the pinhole aperture of pinhole filter are Airy disk diameter magnitude.
The said Mach-Zehnder point-diffraction interferometer of the utility model, its first spectroscope and second spectroscope are beam split flat board or Amici prism.
The said Mach-Zehnder point-diffraction interferometer of the utility model, its first catoptron and second catoptron are single wavelength deielectric-coating catoptron.
The said Mach-Zehnder point-diffraction interferometer of the utility model, its first fourier lense, second fourier lense, the 3rd fourier lense and the 4th fourier lense are the anaberration fourier transform lens.Wherein, first fourier lense and second fourier lense are positive fourier lense, and the 3rd fourier lense and the 4th fourier lense are positive fourier lense or negative fourier lense.
The dried appearance of the said Mach-Zehnder point diffraction of the utility model, its enlargement factor M=(f
2/ f
1)
2, in the formula, f
1Be the focal length of first fourier lense, f
2It is the focal length of second fourier lense.
The dried appearance of the said Mach-Zehnder point diffraction of the utility model, its enlargement factor M is at least 8.
Use the said Mach-Zehnder point-diffraction interferometer of the utility model to realize that the method that the laser complex amplitude is rebuild has two kinds:
First kind of laser complex amplitude method for reconstructing may further comprise the steps:
(1) optical device through the said Mach-Zehnder point-diffraction interferometer of the utility model makes testing laser form flashlight and reference light, and makes said flashlight and overlapped the interfering of reference light form the space carrier frequency interference fringe;
(2) the space carrier frequency interference fringe that interferes formation of ccd detector real time record flashlight and the reference light through the said Mach-Zehnder point-diffraction interferometer of the utility model, it is said that and give computer system with the number of interference fringes of record,
(3) through the computer system of the said Mach-Zehnder point-diffraction interferometer of the utility model the testing laser COMPLEX AMPLITUDE is handled and rebuild to space carrier frequency interference fringe data, step is following:
1. the interference fringe that receives is done pre-service, said pre-service comprises the denoising of interference fringe, the live part and the space continuation of intercepting interference fringe;
2. pretreated interference fringe is obtained the spectrum distribution of interference fringe as Fourier transform, in frequency domain, make spectral filtering then, leach one-level spectrum component and zero level spectrum component respectively;
3. the one-level spectrum component that 2. step is obtained moves to the spectral null position and makes Fourier inversion, and (x is y) with testing laser Wave-front phase φ to obtain interference fringe degree of modulation function b
S(x, y);
4. the zero level spectrum component that 2. step is obtained as Fourier inversion obtain interference fringe background light intensity a (x, y);
5. (x, (x y) tries to achieve the maximal value g of interference fringe to the interference fringe background light intensity a that y) 4. obtains with step to the interference fringe degree of modulation function b that 3. comprehensive step obtains
Max(x is y) with minimum value g
Min(x, y):
g
max(x，y)＝a(x，y)+b(x，y)，g
min(x，y)＝a(x，y)-b(x，y)，
When satisfy a (x, y) >=b (x, in the time of y), the distribution of amplitudes of testing laser is confirmed by following formula:
6. the testing laser Wave-front phase φ that 3. comprehensive step obtains
S(x, the testing laser distribution of amplitudes u that y) 5. obtains with step
S(x y), then obtains the COMPLEX AMPLITUDE of testing laser:
Second kind of laser complex amplitude method for reconstructing may further comprise the steps:
(1) optical device through the said Mach-Zehnder point-diffraction interferometer of the utility model makes testing laser form flashlight and reference light, and makes said flashlight and overlapped the interfering of reference light form the space carrier frequency interference fringe;
(2) the space carrier frequency interference fringe that interferes formation of ccd detector real time record flashlight and the reference light through the said Mach-Zehnder point-diffraction interferometer of the utility model, it is said that and give computer system with the number of interference fringes of record,
(3) through the computer system of the said Mach-Zehnder point-diffraction interferometer of the utility model the testing laser COMPLEX AMPLITUDE is handled and rebuild to space carrier frequency interference fringe data, step is following:
1. the interference fringe that receives is done pre-service, said pre-service comprises the denoising of interference fringe, the live part and the space continuation of intercepting interference fringe;
2. pretreated interference fringe is obtained the spectrum distribution of interference fringe as Fourier transform, in frequency domain, make spectral filtering then, leach the one-level spectrum component;
3. the one-level spectrum component that 2. step is obtained moves to the spectral null position and makes Fourier inversion, obtains interference fringe complex amplitude degree of modulation function
In the formula, u
S(x y) is the testing laser distribution of amplitudes, φ
S(x y) is the testing laser Wave-front phase, and M is the enlargement factor of the said Mach-Zehnder point-diffraction interferometer of the utility model, as M during in certain span
Be approximately constant u
R(0,0), owing to only consider the relative value of laser amplitude (or intensity) in the practical application, so the COMPLEX AMPLITUDE of testing laser can be confirmed by following formula:
E
S(x，y)∝u
R(0，0)·u
s(x，y)exp[iφ
S(x，y)]。
In the said method, the enlargement factor M of the dried appearance of said Mach-Zehnder point diffraction is at least 8.
The utility model compared with prior art has following characteristics and useful technique effect:
1, because Mach-Zehnder point-diffraction interferometer that the utility model provided once was provided with a pinhole filter in the reference arm of moral structure at Mach; Can produce desirable reference light; Therefore the interference fringe of flashlight and reference light formation is rebuild the true Wave-front phase information that the phase information that obtains is testing laser; Use the said point-diffraction interferometer of the utility model to carry out numerous and diverse iterative process that the laser complex amplitude is rebuild does not need traditional self-reference interferometer such, improved the accuracy of detection and the speed of Wave-front phase.
2, the Mach-Zehnder point-diffraction interferometer that the utility model provided; Because the telescopic system that its first fourier transform lens and second fourier transform lens are formed plays amplification to reference light; Thereby adopt the bigger pinhole filter in aperture can obtain comparatively desirable reference plane wave equally; Compare with traditional point-diffraction interferometer, can improve the utilization factor of light.
But 3, the said Mach-Zehnder point-diffraction interferometer of the utility model real-time reconstruction testing laser COMPLEX AMPLITUDE; Be applicable to various laser instruments the static state and the detection of dynamic of lasing COMPLEX AMPLITUDE, and to beam quality the relatively poor online detection of multi-mode laser complex amplitude also can be arrived and obtained result preferably.
Description of drawings
Fig. 1 is the structural representation of the said Mach-Zehnder point-diffraction interferometer of the utility model.
Among the figure, 1-optical match system, 2-first spectroscope, 3-first fourier lense; The 4-pinhole filter, 5-first catoptron, 6-second fourier transform lens; 7-the 3rd fourier lense, 8-second catoptron, 9-the 4th fourier lense; 10-second spectroscope, 11-CCD detector, 12-computer system.
Embodiment
Through specific embodiment the utility model is done further explain below in conjunction with accompanying drawing, but it only is used to explain some concrete embodiments of the utility model, and should not be construed as any qualification the utility model protection domain.
Embodiment 1
In the present embodiment; The structure of Mach-Zehnder point-diffraction interferometer is as shown in Figure 1; Comprise optical match system 1, first spectroscope 2, second spectroscope 10, first catoptron 5, second catoptron 8, first fourier lense 3, second fourier lense 6, the 3rd fourier lense 7, the 4th fourier lense 9, pinhole filter 4, ccd detector 11 and computer system 12.
It is 4 times telescopic system that said optical match system 1 adopts enlargement factor; It is that single wavelength beam split of 5: 5 is dull and stereotyped that said first spectroscope 2 and second spectroscope 10 all adopt the ratio of transmissivity and reflectivity; Said first catoptron 5 and second catoptron 8 are single wavelength deielectric-coating high reflection mirror; Said first fourier lense 3, second fourier lense 6, the 3rd fourier lense 7 and the 4th fourier lense 9 are the positive fourier transform lens of anaberration, and their focal length is respectively f
1=100mm, f
2=200mm, f
3=200mm and f
4=100mm; The aperture of pinhole filter 4 is 25 microns; It is the area array CCD detector of MVC-II1M, 1024 * 1280 pixels that ccd detector 11 adopts model; Computer system 12 is the PC computing machine.
First spectroscope 2 is used for the testing laser light beam from optical match system 1 is divided into transmitted light beam and folded light beam; First fourier transform lens 3 is positioned at first spectroscope 2 and produces on the light path of transmitted light beam; Pinhole filter 4 is positioned at the place, focal plane of first fourier transform lens; First catoptron 5 is positioned on the light path of pinhole filter 4; Second fourier lense 6 is positioned at first catoptron 5 and produces on the catoptrical light path, and said transmitted light beam forms and expands light beams through first fourier transform lens 3, the pinhole filter 4 that is positioned at place, the first fourier transform lens focal plane, first catoptron 5, second fourier lense 6 successively; The 3rd fourier lense 7 is positioned at first spectroscope 2 and produces on the light path of folded light beam; Second catoptron 8 is positioned on the light path of the 3rd fourier lense 7; The 4th fourier lense 9 is positioned at second catoptron 8 and produces on the catoptrical light path, and said folded light beam forms and dwindles light beam through the 3rd fourier lense 7, second catoptron 8, the 4th fourier lense 9 successively; Second spectroscope 10 is positioned at said expansion light beams and the said intersection that dwindles light beam; Said expansion light beams is reflected; The said light beam that dwindles is seen through, and the expansion light beams of warp second spectroscope 10 reflections is light as a reference, dwindles light beam as flashlight through what second spectroscope 10 saw through; Ccd detector 11 is used for the real time record flashlight and reference light interferes formed space carrier frequency interference fringe in overlapped zone, it is said that and with the record number of interference fringes give computer control system; Computer system 12 is used for handling in real time the interference fringe data that receive, and realizes the reconstruction of testing laser COMPLEX AMPLITUDE.
The said Mach-Zehnder point-diffraction interferometer of present embodiment is applicable to first kind of laser complex amplitude method for reconstructing.
In the present embodiment; The structure of Mach-Zehnder point-diffraction interferometer is as shown in Figure 1; Comprise optical match system 1, first spectroscope 2, second spectroscope 10, first catoptron 5, second catoptron 8, first fourier lense 3, second fourier lense 6, the 3rd fourier lense 7, the 4th fourier lense 9, pinhole filter 4, ccd detector 11 and computer system 12.
It is 5 times telescopic system that said optical match system 1 adopts enlargement factor; It is 92: 8 the dull and stereotyped mirror of broadband beam split that first spectroscope 2 and second spectroscope 10 all adopt the ratio of transmissivity and reflectivity, and first catoptron 5 and second catoptron 8 are single wavelength deielectric-coating high reflection mirror; First fourier lense 3, second fourier lense 6, the 3rd fourier lense 7 and the 4th fourier lense 9 are the positive fourier transform lens of anaberration, and their focal length is respectively f
1=100mm, f
2=300mm, f
3=300mm and f
4=100mm, so the enlargement factor M=9 of the dried appearance of Mach-Zehnder point diffraction in the present embodiment; The aperture of pinhole filter 4 is 25 microns; It is the area array CCD detector of MVC-II1M, 1024 * 1280 pixels that ccd detector 11 adopts model, and computer system 12 is the PC computing machine.
Installation site, assembling mode and the function of each optical device, ccd detector 11 and computer system 12 are identical with embodiment 1.
The said Mach-Zehnder point-diffraction interferometer of present embodiment is applicable to second kind of laser complex amplitude method for reconstructing.
Claims (9)
1. Mach-Zehnder point-diffraction interferometer; Comprise optical match system (1), first spectroscope (2), second spectroscope (10), first catoptron (5), second catoptron (8), be characterised in that also to comprise pinhole filter (4), first fourier lense (3), second fourier lense (6), the 3rd fourier lense (7), the 4th fourier lense (9), ccd detector (11) and computer system (12);
First spectroscope (2) is used for the testing laser light beam from optical match system (1) is divided into transmitted light beam and folded light beam;
First fourier transform lens (3) is positioned on the light path of first spectroscope (2) generation transmitted light beam; Pinhole filter (4) is positioned at the place, focal plane of first fourier transform lens; First catoptron (5) is positioned on the light path of pinhole filter (4); Second fourier lense (6) is positioned at first catoptron (5) and produces on the catoptrical light path; Said transmitted light beam is successively through first fourier transform lens (3); Be positioned at the pinhole filter (4) at place, the first fourier transform lens focal plane; First catoptron (5); Second fourier lense (6) forms and expands light beams
The 3rd fourier lense (7) is positioned on the light path of first spectroscope (2) generation folded light beam; Second catoptron (8) is positioned on the light path of the 3rd fourier lense (7); The 4th fourier lense (9) is positioned at second catoptron (8) and produces on the catoptrical light path; Said folded light beam forms through the 3rd fourier lense (7), second catoptron (8), the 4th fourier lense (9) successively dwindles light beam
Second spectroscope (10) is positioned at said expansion light beams and the said intersection that dwindles light beam; Said expansion light beams is reflected; Make the said light beam transmission of dwindling, the expansion light beams that reflects through second spectroscope (10) is a reference light, and the light beam that dwindles of warp second spectroscope (10) transmission is a flashlight;
Ccd detector (11) is used for the real time record flashlight and reference light interferes formed space carrier frequency interference fringe in overlapped zone, it is said that and with the record number of interference fringes give computer system (12);
Computer system (12) is used for handling in real time the space carrier frequency interference fringe data that receive, and realizes the reconstruction of testing laser COMPLEX AMPLITUDE.
2. Mach-Zehnder point-diffraction interferometer according to claim 1, the pinhole aperture that it is characterized in that said pinhole filter (4) are Airy disk diameter magnitude.
3. Mach-Zehnder point-diffraction interferometer according to claim 1 and 2 is characterized in that said first spectroscope (2) and second spectroscope (10) are beam split flat board or Amici prism.
4. Mach-Zehnder point-diffraction interferometer according to claim 1 and 2 is characterized in that described first catoptron (5) and second catoptron (8) are single wavelength deielectric-coating catoptron.
5. Mach-Zehnder point-diffraction interferometer according to claim 3 is characterized in that described first catoptron (5) and second catoptron (8) are single wavelength deielectric-coating catoptron.
6. Mach-Zehnder point-diffraction interferometer according to claim 1 and 2 is characterized in that described first fourier lense (3), second fourier lense (6), the 3rd fourier lense (7) and the 4th fourier lense (9) are the anaberration fourier transform lens.
7. Mach-Zehnder point-diffraction interferometer according to claim 6; It is characterized in that first fourier lense (3) and second fourier lense (6) are positive fourier lense, the 3rd fourier lense (7) and the 4th fourier lense (9) are positive fourier lense or negative fourier lense.
8. Mach-Zehnder point-diffraction interferometer according to claim 1 and 2 is characterized in that the enlargement factor M=(f of this point-diffraction interferometer
1/ f
1)
2, in the formula, f
1Be the focal length of first fourier lense (3), f
2It is the focal length of second fourier lense (6).
9. Mach-Zehnder point-diffraction interferometer according to claim 8 is characterized in that the enlargement factor M of this point-diffraction interferometer is at least 8.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102230827A (en) * | 2011-06-18 | 2011-11-02 | 四川大学 | Mach-Zehnder point diffraction interferometer and method for reconstructing laser complex amplitudes |
| CN105784129A (en) * | 2016-04-15 | 2016-07-20 | 中国科学院光电研究院 | Low-frequency heterodyne ineterferometer used for laser wavefront detection |
| CN106338258A (en) * | 2015-12-21 | 2017-01-18 | 中国科学院长春光学精密机械与物理研究所 | Device and method for pinhole alignment of point diffraction interferometer |
| CN108663823A (en) * | 2018-05-23 | 2018-10-16 | 南京理工大学 | Position regulation device, method and the application of quartzy end cap in optical fiber laser QBH |
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2011
- 2011-06-18 CN CN2011202065093U patent/CN202101764U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102230827A (en) * | 2011-06-18 | 2011-11-02 | 四川大学 | Mach-Zehnder point diffraction interferometer and method for reconstructing laser complex amplitudes |
| CN102230827B (en) * | 2011-06-18 | 2012-11-28 | 四川大学 | Mach-Zehnder point diffraction interferometer and method for reconstructing laser complex amplitudes |
| CN106338258A (en) * | 2015-12-21 | 2017-01-18 | 中国科学院长春光学精密机械与物理研究所 | Device and method for pinhole alignment of point diffraction interferometer |
| CN106338258B (en) * | 2015-12-21 | 2019-06-28 | 中国科学院长春光学精密机械与物理研究所 | A kind of device and method for the alignment of point-diffraction interferometer pin hole |
| CN105784129A (en) * | 2016-04-15 | 2016-07-20 | 中国科学院光电研究院 | Low-frequency heterodyne ineterferometer used for laser wavefront detection |
| CN108663823A (en) * | 2018-05-23 | 2018-10-16 | 南京理工大学 | Position regulation device, method and the application of quartzy end cap in optical fiber laser QBH |
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