CN106338258A - Device and method for pinhole alignment of point diffraction interferometer - Google Patents
Device and method for pinhole alignment of point diffraction interferometer Download PDFInfo
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- CN106338258A CN106338258A CN201510962486.1A CN201510962486A CN106338258A CN 106338258 A CN106338258 A CN 106338258A CN 201510962486 A CN201510962486 A CN 201510962486A CN 106338258 A CN106338258 A CN 106338258A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
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Abstract
The invention provides a device for pinhole alignment of a point diffraction interferometer. The device comprises a first laser device, laser beam expanders, a first beam splitting prism, a half-wave plate, a second beam splitting prism, a quarter-wave plate, a focusing mirror, a pinhole plate, a three-dimensional adjusting mechanism, a second laser device, a second laser power meter, a first laser power meter, a rear group of lenses for imaging, a CMOS camera and a computer. The invention further provides a method for pinhole alignment of the point diffraction interferometer. The method comprises the steps of rapid coarse alignment and precise alignment, the coarse alignment process is intuitive, convenient and rapid, the precise alignment process can achieve0.1 mu m precision alignment by just two rounds of scanning, and the method has the advantages of short time consumption and high precision.
Description
[technical field]
The invention belongs to technical field of optical precise adjustment and in particular to a kind of for point-diffraction interferometer pin hole be aligned device and
Method.
[background technology]
In order to improve resolution and the critical dimension of light projection photoetching objective lens, optical system wavefront aberration increasingly trends towards reaching diffraction pole
Limit.Extreme ultraviolet is engraved in the extreme ultraviolet waveband work that wavelength is 13～14nm it is desirable to the wave aberration of optical system is less than 1nmrms,
And euvl projection objective even more has extremely harsh wave aberration to require, the surface form deviation for single mirror mirror needs to reach
0.25nmrms, proposes unprecedented requirement to optical manufacturing and detection, i.e. the processing of euvl projection objective optical element
The accuracy of detection needing optical surface testing equipment reaches deep Subnano-class.
Point-diffraction interferometer (point diffraction interferometer, pdi) utilizes the ball of the near ideal of pin hole diffraction generation
Face ripple, as with reference to corrugated, eliminates the impact of the plane of reference in conventional dry interferometer, it is possible to achieve high accuracy of detection, therefore,
Point-diffraction interferometer can apply to the detection of optical element in extreme ultraviolet lithography projection objective and system wave aberration.
Existing utilization point-diffraction interferometer detects the technology of projection objective wave aberration and in particular to a kind of detection optical system ripple picture
The phase shift point-diffraction interferometer of difference, including object plane pinhole plate, transmission grating, practise physiognomy pinhole plate and spot detector.By object plane
Pin hole diffraction on pinhole plate produces preferable spherical wave, through transmission grating, diffraction occurs, and a point amplitude becomes multi-level diffraction light, multistage
Diffraction light converges on pinhole plate after examining system, forms the misaligned multiple hot spots of spatial distribution, so that 0 grade is spread out
Penetrate light and produce ideal spherical face ripple as reference light ,+1 grade of (or -1 grade) diffraction through a pin hole practising physiognomy on pinhole plate through diffraction
As test light after a window on pinhole plate of practising physiognomy, the diffraction light of other levels time is hidden light by part opaque on pinhole plate
Gear, test light and reference light form interference fringe on spot detector.
The existing technology using point-diffraction interferometer detection optical component surface shape is and in particular to a kind of point of detecting element face type spreads out
Rhizoma Belamcandae interferometer, including convergence illuminator, pinhole plate and spot detector.The near ideal spherical wave being produced by pin hole diffraction
It is divided into two parts, after a part reflects through tested optical element as test light, carry the face shape information of tested optical element,
Traveled on spot detector by relay optical system after pinhole plate reflection again；Another part is directly repeated as reference light
Optical system travels on spot detector.The two-way interference of light obtains interferogram, in addition suitable phase shift technology, to collect
Interferogram just can obtain the face shape information of tested sphere after processing.
More than, either still detect optical component surface shape using the wave aberration that point-diffraction interferometer detects projection objective, be directed to
To the fine registration converging light wave and pin hole, and the imbalance of the axially and radially position of pin hole all will reduce diffracted light intensity, and increase
The spherical wave wave surface error that pin hole diffraction produces, and then affect the accuracy of detection of point-diffraction interferometer.
At present, the interferometer area of computer aided alignment methods based on real time fourier processing and the point diffraction based on fringe contrast
Interferometer technique of alignment is all only applicable to be aligned during detecting system wave aberration, because point-diffraction interferometer is in detecting system wave aberration
Different with structure during detecting element surface form deviation, this technique of alignment is not all suitable for the pin hole be aligned during shape of detecting element face.And show
Have realizes accurately being aligned and long term monitoring by pinhole plate scanning and three energy-probes, needs pinhole plate sweep mechanism to have
The sweep limitss of millimeter magnitude and the scanning resolution of hundred nano-scale, its development cost is higher, and scanning step number is many simultaneously, and time-consuming.
[content of the invention]
For the fine registration that solves the problems, such as point-diffraction interferometer pin hole, time-consuming and high cost, and the present invention provides one kind to be used for
The apparatus and method of point-diffraction interferometer pin hole be aligned.
The technical solution adopted in the present invention is as follows:
A kind of for point-diffraction interferometer pin hole be aligned device, including first laser device, laser beam expanding lens, the first Amici prism,
/ 2nd wave plates, the second Amici prism, quarter-wave plate, focus lamp, pinhole plate, three-dimension adjusting mechanism, second laser
Device, second laser energy meter, first laser energy meter, imaging rear group of camera lens, cmos camera and computer；
Described first laser device sends linearly polarized laser, through laser beam expanding lens beam-expanding collimation, then after the first Amici prism,
There is transmission in a part of laser, in another part laser-bounce to the target surface of first laser energy meter；
Occur transmission laser after 1/2nd wave plates and the second Amici prism, all through and incide quarter-wave plate,
Converge on pinhole plate through focus lamp；
Pinhole plate is placed on three-dimension adjusting mechanism and is driven by described three-dimension adjusting mechanism and moves, through the laser one of pinhole plate
Received by second laser energy meter after dividing diffraction, another part reflexes to condenser lenss, through quarter-wave plate, the second light splitting rib
Mirror and imaging are with, after rear group of camera lens, converging on cmos camera；
Described second laser is arranged at the back side of pinhole plate, is used for sending high power laser light, and the back lighting institute from pinhole plate
State pinhole plate, to assist pin hole to carry out coarse alignment.
Specifically, the transmitting laser beam of described second laser is millimeter magnitude, and power is 100mw.
Specifically, laser is changed into circularly polarized light, and the circularly polarized light that will reflect back into by line polarized light by described quarter-wave plate
It is changed into line polarized light, the direction of vibration phase of the described direction of vibration changing the line polarized light obtaining again and initial line polarized light again
Ratio ratates 90 degrees.
A kind of method for point-diffraction interferometer pin hole be aligned, comprises the following steps:
S1.1, open second laser transmitting laser beam, after laser beam direct lighting pinhole plate through over-focusing mirror, four/
One wave plate, the second Amici prism and imaging reach cmos camera with rear group of camera lens, observe and record in cmos camera
The position p1 of the first luminous point arriving；
S1.2, open first laser device transmitting laser beam, laser beam sequentially pass through laser beam expanding lens, the first Amici prism,
Converge on pinhole plate after 1/2nd wave plates, the second Amici prism, quarter-wave plate and focus lamp, the light of pinhole plate reflection
Bundle passes through condenser lenss, converges on cmos camera after quarter-wave plate, the second Amici prism and imaging after group camera lens,
The position of second luminous point seen is observed on cmos camera, is adjusted between pinhole plate and focus lamp by three-dimension adjusting mechanism
Distance makes the hot spot of described second luminous point minimum, and the position recording described second luminous point is p2；
S1.3, driven by three-dimension adjusting mechanism pinhole plate two dimensional surface mobile so that the first light of being located on cmos camera
Point and the second light spot position overlap.
Further, methods described is further comprising the steps of:
S2.1, closing second laser, second laser energy meter is placed in the back side of pinhole plate with the work(of detecting pinhole diffraction light
Rate；
S2.2, the sweep limitss setting three-dimension adjusting mechanism and resolution；
A step is scanned in described sweep limitss in s2.3, control 3-D scanning mechanism；
The measured value of second laser energy meter and first laser energy meter and its ratio when s2.4, record often scan a step；
S2.5, judge whether the scanning of 3-D scanning mechanism completes, if it is not complete, repeating s2.3-s2.4, if completed,
Continue ensuing s2.6；
S2.6, the measured value according to second laser energy meter and first laser energy meter and its ratio, find and move pinhole plate
Move to ratio scan position when maximum；
S2.7, reset three-dimension adjusting mechanism and reduce sweep limitss and the scanning resolution of described three-dimension adjusting mechanism；
S2.8, repeat step s2.3-s2.6.
Further, methods described is further comprising the steps of:
S3.1, remove imaging with rear group of camera lens so that pinhole plate reflection laser pass sequentially through focus lamp, quarter-wave plate with
And second after Amici prism, shine directly on cmos camera；
S3.2, computer real-time detection and record luminous point on cmos camera gray level first laser energy meter measured value,
Adjust the movement of three-dimension adjusting mechanism by both measured value ratio.
Preferably, the sweep limitss of the three-dimension adjusting mechanism setting in step s2.2 are 1 μm as 10 μm of 10 μ m, resolution,
Scanning is always counted as 100.
Preferably, the sweep limitss of the three-dimension adjusting mechanism setting in step s2.7 are 0.1 μm, sweep as 1 μm of 1 μ m, resolution
Retouch and always count as 100.
Compared with prior art, the beneficial effects of the present invention is:
The pin hole be aligned of the present invention includes quick coarse alignment and two processes of fine registration, in coarse alignment stage, by focus lamp with
Second laser is illuminated the convergence luminous point after pin hole and first laser device line focus mirror by the imaging system that imaging is constituted with rear group of camera lens
It is imaged on respectively on cmos camera, using three-dimensional fine-tuning whole institutional adjustment pin hole Board position, it is possible to achieve quick coarse alignment, whole
Individual process is intuitively convenient；In the fine registration stage, carry out flat scanning using three-dimension adjusting mechanism, and real time record often walks scanning
When the second laser energy meter and measured value of first laser energy meter and its ratio, to find optimum position, only need two wheel scans
Can be achieved with 0.1 μm of fine registration, it is high that whole process takes short precision.
[brief description]
Fig. 1 is the structural representation being used for point-diffraction interferometer pin hole alignment device in the embodiment of the present invention 1；
Fig. 2 is the flow chart realizing pin hole fine registration in the embodiment of the present invention 3.
Wherein, 1- first laser device；2- laser beam expanding lens；3- first Amici prism；4- 1/2nd wave plate；5- the second light splitting rib
Mirror；6- quarter-wave plate；7- focus lamp；8- pinhole plate；9- three-dimension adjusting mechanism；10- second laser；11- second laser
Energy meter；12- first laser energy meter；13- is imaged with rear group of camera lens；14-cmos camera；15- computer.
[specific embodiment]
In order that the objects, technical solutions and advantages of the present invention become more apparent, below in conjunction with drawings and Examples, to this
Bright it is further elaborated.It should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not used to
Limit the present invention.
As long as additionally, involved technical characteristic in each embodiment of invention described below does not constitute punching each other
Dash forward and just can be mutually combined.
Embodiment 1
As shown in figure 1, being the structural representation for point-diffraction interferometer pin hole alignment device in embodiment 1.This device includes
First laser device 1, laser beam expanding lens 2, the first Amici prism 3,1/2nd wave plates 4, the second Amici prism 5, four/
One wave plate 6, focus lamp 7, pinhole plate 8, three-dimension adjusting mechanism 9, second laser 10, second laser energy meter 11, first
Laser power meter 12, imaging rear group of camera lens 13, cmos camera 14 and computer 15.
In the present embodiment, the operation principle for point-diffraction interferometer pin hole alignment device is specific as follows:
First laser device 1 is used for sending linearly polarized laser, and laser beam expanding lens 2 carry out beam-expanding collimation to linearly polarized laser, first point
The splitting ratio of light prism 3 makes most of laser transmission and small part laser-bounce is on the target surface of first laser energy meter 11；
/ 2nd wave plates 4 can change the polarization direction of laser, and the second Amici prism 5 is polarization splitting prism, it with two points
One of wave plate 4 allow by the polarization laser of 1/2nd wave plates 4 all by this second Amici prism 5；
Laser can be changed into circularly polarized light by line polarized light by quarter-wave plate 6, and the circularly polarized light that will reflect back into changes again
For line polarized light, but change direction of vibration rotation compared with the direction of vibration of initial line polarized light of the line polarized light obtaining again
90 degree；
Focus lamp 7 is used for for laser converging to pinhole plate 8, and pinhole plate 8 is provided with pin hole；
Three-dimension adjusting mechanism 9 is fixedly connected with pinhole plate 8, and for driving pinhole plate 8 mounted thereto to do in three dimensions
Accurate mobile；
Second laser 10 is used for sending high power laser light, and the back lighting pin hole from pinhole plate 8, and its illumination spot reaches milli
Rice magnitude, power is about 100mw, to assist pin hole to carry out coarse alignment；
After completing coarse alignment, remove second laser 10, and the diffraction light with second laser energy meter 11 detecting pinhole diffraction
By force, for the fine registration of pin hole；
First laser energy meter 12 is used for detecting the power swing situation that first laser device 1 sends laser, due to the first Amici prism
3 splitting ratio is fixed value, the fluctuation of the laser power fluctuation that therefore first laser energy meter 12 detects and first laser device 1
Unanimously；
Imaging constitutes imaging system and by pin-hole imaging on cmos camera 14 with rear group of camera lens 13 and focus lamp 7, cmos
Camera 14 is used for the alignment of quick coarse alignment and long term monitoring pin hole, and computer 15 is then used for recording first laser power
The power of meter 12 and first laser energy meter 11 detection is simultaneously processed to the data obtaining, to control three-dimension adjusting mechanism 9 to enter
Row motion.
Specifically, the laser being irradiated on first laser energy meter 12 is to be sent by first laser device 1, sequentially passes through laser beam expanding
The transmission of mirror 2, the reflection of the first Amici prism 3, the power swing only with first laser device 1 for the power value changes that it detects
Relevant；The laser being irradiated on second laser energy meter 11 is to be sent by first laser device 1, sequentially pass through laser beam expanding lens 2,
First Amici prism 3,1/2nd wave plates 4, the second Amici prism 5, quarter-wave plate 6, focus lamp 7 and pinhole plate
8 transmission, the power value changes that it detects are relevant with the power swing of first laser device 1 and the diffraction efficiency of pinhole plate 8,
Combined influence by the power swing of first laser device 1 and the alignment of pinhole plate 8.
Embodiment 2
A kind of the present embodiment method realizing pin hole micron dimension coarse alignment of offer:
S1.1, it is first turned on second laser 10, laser beam direct lighting by the pin hole on pinhole plate 8, now
Illumination spot is larger, can easily illuminate pin hole, and laser beam is through focus lamp 7, quarter-wave plate 6, the second light splitting
Prism 5 and imaging, with reaching cmos camera 14 after rear group of camera lens 13, observe first seeing on cmos camera 14
Luminous point o1, and record this luminous point o1 position be p1；
S1.2, open first laser device 1, the laser of transmitting pass sequentially through laser beam expanding lens 2, the first Amici prism 3, two/
One wave plate 4, the second Amici prism 5, quarter-wave plate 6 and focus lamp 7 post-concentration illuminate on pinhole plate 8, pinhole plate 8
The light beam of reflection passes sequentially through focus lamp 7, quarter-wave plate 6, the second Amici prism 5 and imaging with converging after rear group of camera lens 13
Gather on cmos camera 14, the second luminous point o2 that can see is observed on cmos camera 14, by three-dimension adjusting mechanism
9 transverse shifting, the distance between adjustment pinhole plate 8 and focus lamp 7, so that the hot spot of luminous point o2 is minimum, and record this
The position of luminous point o2 is p2；
S1.3, being moved in two dimensional surface by three-dimension adjusting mechanism 9, driving the planar movement of pinhole plate 8 so that being located at cmos
Two luminous point o1 and o2 on camera 14 overlap, and tentatively achieve first laser device 1 focus illumination on pin hole, according to poly-
The vertical axle enlargement ratio of the burnt mirror 7 and imaging imaging system with rear group of camera lens 13 composition, the alignment precision in the present embodiment is micron
Magnitude.
Embodiment 3
As shown in Fig. 2 the flow chart realizing pin hole fine registration providing for the present embodiment:
S2.1, closing second laser 10, second laser energy meter 11 are placed in after pinhole plate 8, and detecting pinhole spread out
Penetrate the power of light；
S2.2, set the sweep limitss of three-dimension adjusting mechanism 9 as 10 μm of 10 μ m, scanning resolution as 1 μm, scanning is total counts
For 100；
S2.3, three-dimension adjusting mechanism 9 is controlled to scan a step in the two dimensional surface of 10 μm of 10 μ m；
The measured value of second laser energy meter 11 and first laser energy meter 12 and its ratio when s2.4, record often scan a step；
S2.5, judge whether the scanning of three-dimension adjusting mechanism 9 completes, if it is not complete, repeat step 2.3-2.4, if complete
Become, continue following step 2.6, this setting procedure 2.3-2.4 needs to repeat 100 times；
S2.6, the measured value according to second laser energy meter 11 and first laser energy meter 12 and its ratio, find ratio
Scan position when big, and moved by the two dimensional surface of three-dimension adjusting mechanism 9, it is adjusted to this position；
S2.7, the sweep limitss resetting three-dimension adjusting mechanism 9 are 1 μm of 1 μ m, scanning resolution is 0.1 μm, and scanning is total
Count as 100；
S2.8, three-dimension adjusting mechanism 9 is controlled to scan a step in the two dimensional surface of 1 μm of 1 μ m；
S2.9, repeat step s2.4-s2.6, the fine registration of pin hole completes.
In the present embodiment, pin hole fine registration flow process is to complete under the control of computer 15, and computer 15 controls three-dimensional
Guiding mechanism 9 carries out the scanning in three dimensions, and records second laser energy meter 11 and first laser energy meter 12 detects
Performance number and its ratio, to describe the position relationship of performance number ratio and pin hole.Second laser energy meter 11 and first laser power
The power ratio of meter 11 reflects the diffraction efficiency of needle outlet, and this ratio is bigger, illustrates that the diffraction efficiency of pin hole is higher, pin hole right
Standard is also more accurate.
Embodiment 4
The present embodiment provides a kind of method of real-time monitoring pin hole alignment, comprises the following steps that shown:
S3.1, remove imaging with rear group of camera lens 13 so that pinhole plate 8 reflection laser pass sequentially through focus lamp 7, a quarter
After wave plate 6 and the second Amici prism 5, shine directly on cmos camera 14；
S3.2, computer 15 real-time detection simultaneously record the work(of the gray scale of luminous point and first laser energy meter 12 on cmos camera 14
Rate, can realize long-term real-time monitoring pin hole alignment by both measured value ratios.
Above content is to further describe it is impossible to assert the tool of the present invention with reference to specific embodiment is made for the present invention
Body is implemented to be confined to described above.For the those of ordinary skill of technical field of the present invention, without departing from the present invention
On the premise of design, some simple deduction or replace can also be made, all made within the spirit and principles in the present invention any
Modification, equivalent and improvement etc., should be included within the scope of the present invention.
Claims (8)
1. a kind of device for point-diffraction interferometer pin hole be aligned is it is characterised in that include first laser device (1), laser expands
Shu Jing (2), the first Amici prism (3), 1/2nd wave plates (4), the second Amici prism (5), quarter-wave plate (6),
Focus lamp (7), pinhole plate (8), three-dimension adjusting mechanism (9), second laser (10), second laser energy meter (11),
First laser energy meter (12), imaging rear group of camera lens (13), cmos camera (14) and computer (15)；
Described first laser device (1) sends linearly polarized laser, through laser beam expanding lens (2) beam-expanding collimation, then through first point
After light prism (3), there is transmission in a part of laser, in another part laser-bounce to the target surface of first laser energy meter (12)；
Occur transmission laser after 1/2nd wave plates (4) and the second Amici prism (5), all through and incide four
/ mono- wave plate (6), converges on pinhole plate (8) through focus lamp (7)；
Pinhole plate (8) is placed in three-dimension adjusting mechanism (9) and above and by described three-dimension adjusting mechanism (9) drives movement, Jing Guozhen
Received by second laser energy meter (11) after a part of diffraction of laser of orifice plate (8), another part reflexes to condenser lenss (7),
After group camera lens (13) after quarter-wave plate (6), the second Amici prism (5) and imaging, converge in cmos phase
On machine (14)；
Described second laser (10) is arranged at the back side of pinhole plate (8), is used for sending high power laser light, and from pinhole plate (8)
Pinhole plate (8) described in back lighting, to assist pin hole to carry out coarse alignment.
2. device according to claim 1 is it is characterised in that the transmitting laser beam of described second laser (10) is
Millimeter magnitude, power is 100mw.
3. device according to claim 1 it is characterised in that described quarter-wave plate (6) by laser by linear polarization
Light is changed into circularly polarized light, and the circularly polarized light that will reflect back into is changed into line polarized light again, described changes the line polarized light obtaining again
Direction of vibration ratate 90 degrees compared with the direction of vibration of initial line polarized light.
4. a kind of method for point-diffraction interferometer pin hole be aligned is it is characterised in that comprise the following steps:
S1.1, open second laser (10) transmitting laser beam, laser beam direct lighting pinhole plate (8) is by over-focusing
Mirror (7), quarter-wave plate (6), the second Amici prism (5) and imaging reach cmos camera with rear group of camera lens (13)
(14), observe and record the position p1 of the first luminous point seen on cmos camera (14)；
S1.2, open first laser device (1) transmitting laser beam, laser beam sequentially pass through laser beam expanding lens (2), first point
After light prism (3), 1/2nd wave plates (4), the second Amici prism (5), quarter-wave plate (6) and focus lamp (7)
Converge on pinhole plate (8), the light beam that pinhole plate (8) reflects pass through condenser lenss (7), through quarter-wave plate (6),
Second Amici prism (5) and imaging are converged on cmos camera (14) with after rear group of camera lens (13), observe cmos phase
The position of second luminous point seen on machine (14), adjusts pinhole plate (8) and focus lamp (7) by three-dimension adjusting mechanism (9)
The distance between make described second luminous point hot spot minimum, the position recording described second luminous point is p2；
S1.3, driven by three-dimension adjusting mechanism (9) pinhole plate (8) two dimensional surface mobile so that being located at cmos camera
(14) the first luminous point on and the second light spot position overlap.
5. method according to claim 4 is it is characterised in that methods described is further comprising the steps of:
S2.1, closing second laser (10), second laser energy meter (11) is placed in the back side of pinhole plate (8) to visit
The power of chaining pin diffraction by aperture light；
S2.2, the sweep limitss setting three-dimension adjusting mechanism (9) and resolution；
S2.3, control 3-D scanning mechanism (9) scan a step in described sweep limitss；
S2.4, record when often scanning a step measured value of second laser energy meter (11) and first laser energy meter (12) and
Its ratio；
S2.5, judge whether the scanning of 3-D scanning mechanism (9) completes, if it is not complete, repeating s2.3-s2.4, if complete
Become, continue ensuing s2.6；
S2.6, the measured value according to second laser energy meter (11) and first laser energy meter (12) and its ratio, find
And pinhole plate (8) is moved to ratio scan position when maximum；
S2.7, reset three-dimension adjusting mechanism (9) and reduce described three-dimension adjusting mechanism (9) sweep limitss and scanning point
Resolution；
S2.8, repeat step s2.3-s2.6.
6. method according to claim 4 is it is characterised in that methods described is further comprising the steps of:
S3.1, remove imaging with rear group of camera lens (13) so that the laser that pinhole plate (8) reflects pass sequentially through focus lamp (7),
After quarter-wave plate (6) and the second Amici prism (5), shine directly on cmos camera (14)；
S3.2, computer (15) real-time detection simultaneously record the gray level first laser energy meter that luminous point gone up by cmos camera (14)
(12) measured value, adjusts the movement of three-dimension adjusting mechanism (9) by both measured value ratio.
7. method according to claim 5 is it is characterised in that the three-dimension adjusting mechanism (9) that sets in step s2.2
Sweep limitss are 10 μm of 10 μ m, and resolution is 1 μm, and scanning is always counted as 100.
8. method according to claim 5 is it is characterised in that the three-dimension adjusting mechanism (9) that sets in step s2.7
Sweep limitss are 1 μm of 1 μ m, and resolution is 0.1 μm, and scanning is always counted as 100.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109182966A (en) * | 2018-10-10 | 2019-01-11 | 江苏集萃有机光电技术研究所有限公司 | Mask plate alignment system, method and device |
| CN109556531A (en) * | 2018-11-07 | 2019-04-02 | 西安交通大学 | A kind of point-diffraction interferometer optical path precision alignment system and method based on image information |
| CN110672216A (en) * | 2019-09-23 | 2020-01-10 | 南京理工大学 | Pinhole alignment device and method for reflective point diffraction interferometer |
| CN115200474A (en) * | 2022-07-14 | 2022-10-18 | 西安工业大学 | Device and method for positioning central axis of small hole diffraction light spot based on photosensitive detection array |
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