CN203298878U - Fringe contrast and carrier frequency adjustable loop point diffraction interference wavefront sensor - Google Patents
Fringe contrast and carrier frequency adjustable loop point diffraction interference wavefront sensor Download PDFInfo
- Publication number
- CN203298878U CN203298878U CN2013202609956U CN201320260995U CN203298878U CN 203298878 U CN203298878 U CN 203298878U CN 2013202609956 U CN2013202609956 U CN 2013202609956U CN 201320260995 U CN201320260995 U CN 201320260995U CN 203298878 U CN203298878 U CN 203298878U
- Authority
- CN
- China
- Prior art keywords
- light
- beam splitter
- polarizing beam
- carrier frequency
- wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The utility model relates to a fringe contrast and carrier frequency adjustable loop point diffraction interference wavefront sensor. The sensor comprises a polarizer, a polarizing beam splitter, first and second Fourier lenses, first and second reflectors, an analyzer, a CCD sensor and a computer. The sensor further comprises a polarizing PDI mask with a pinhole, wherein the polarizing PDI mask is added at the confocal plane of first and second Fourier lenses. A to-be-measured line polarizing beam is split into two beams by the polarizing beam splitter. One beam passes through the pinhole and carries out pinhole diffraction to be used as a reference light. The other beam directly passes through a non pinhole area on the polarizing PDI mask to be used as a test light. By adjusting the rotation angle of the analyzer and the tilt angle of the polarizing beam splitter, an interference fringe with the highest contrast and appropriate carrier frequency is acquired, thus the to-be-measured wavefront phase can be quickly and accurately reconstructed. According to the utility model, the sensor uses a common light path structure, does not need a specific reference light, and has the characteristics of strong system stability, adjustable fringe contrast and carrier frequency, high measurement precision and large measurement dynamic range.
Description
Technical field
The utility model relates to the Primary Component in the fields such as a kind of adaptive optics, Wavefront detecting, optical element detection, refers in particular to the adjustable loop point diffraction-interference wave front sensing device of a kind of fringe contrast and carrier frequency.
Background technology
Wavefront sensor is the important devices that is used for surveying the Wave-front phase of incident beam in ADAPTIVE OPTICS SYSTEMS.Wavefront sensor can be divided into three major types according to the relation between measuring-signal and corrugated: the first kind is to restore Wave-front phase, such as Hartmann wave front sensor, shearing interferometer etc. by measuring wavefront slope; Equations of The Second Kind is to restore Wave-front phase, for example curvature Wavefront sensor by measuring wavefront curvature; The 3rd class is directly to restore Wave-front phase, and Typical Representative is point-diffraction interferometer.
In all Wavefront sensors, the Hartmann wave front sensor application is the most general.Its ultimate principle is: adopt microlens array to cut apart incident beam, by the center-of-mass coordinate of each image patch and the difference of reference wavefront center-of-mass coordinate on measurement lens arra focal plane, solve wavefront slope.Also can use the pyramid of a plurality of faceted pebbles to carry out beam splitting to incident beam, and then measure Wave-front phase (US Patent No. 4399356).The Wavefront sensor of this two kinds of minutes wavefront, sub-aperture number determines the spatial sampling rate, in order to improve measuring accuracy, thereby needs to increase sub-aperture number.Yet the increase of sub-aperture number purpose will propose higher requirement to the resolution of photoelectric detector.
Compare with Hartmann wave front sensor, the corresponding sub-aperture of each pixel in the interferogram that the interference wave front sensor collects, so both can reduce the requirement to the ccd sensor high spatial resolution, can also effectively improve the spatial resolution (Proc.SPIE of wavefront measurements, 2004,5553:112-126).
The reference light wave of interference wave front sensor derive from light wave to be measured and do not need to introduce in addition be called self-reference interference wave front sensor.According to the difference of reference light wave acquisition pattern, the interference wave front sensor generally is divided into three kinds, i.e. lateral shearing interference Wavefront sensor, radial shear interference Wavefront sensor and point diffraction-interference wave front sensing device.Wherein, the different multiframe lateral shear interferograms of shearing displacement on two mutually perpendicular directions of lateral shearing interference Technology Need, and the validity of wave front restoration algorithm is required high (Appl.Opt.1974,13 (3): 623-629).The radial shear interference technology is by enlarging on bore incident light wave and dwindling, and further produce radial shear interference, although the problem that does not exist lateral shearing interference to run on principle, but this technology needs complicated wavefront reconstruction algorithm (for example Ze Nike fitting process or process of iteration) by poor Wave-front phase to be measured (Opt.Lett.2011,36 (18): 3693-3695) of reconstructing of shearing phase equally.This is for the Wave-front phase of some high spatial frequencies, and reconstruction precision horizontal and the radial shear interference technology all has larger limitation (Appl.Opt.1964,3 (7): 853-857).The point diffraction-interference wave front sensing device utilizes the pin hole diffraction to form the reference light wave that is similar to ideal plane ripple or spherical wave, the test light wave that has comprised distorted wavefront information to be measured with another bundle produces interference, just can directly rebuild Wave-front phase to be measured by analyzing interference fringe, and need not the wavefront reconstruction step in the shear interference technology.Simultaneously, the realize Wavefront detecting of point diffraction-interference wave front sensing device in the occasions such as light intensity flicker, this irregular entrance pupil shape of central obscuration has sizable advantage (Opt.Express, 2007,15 (21): 13745-13756).
In most cases, the point diffraction-interference wave front sensing device adopts Mach-Zehnder type or Tymann-Green type interference structure (Opt.Commun.2010,283 (14): 2782-2786; CHINESE OPTICS LETTERS, 2011,9 (12): 120002-120004), so just, can easily use the PZT phase shifter to introduce phase shift between two light beams, perhaps by inclined mirror, introduce spatial carrier, thereby utilize phase shift algorithm or fourier transform method to solve (Appl.Opt.1974,13 (11): 2693-2703; J.Opt.Soc.Am.1982,72 (1): 156-160).But the disadvantage of this Fei Gong road optical texture is that measurement result will inevitably be subject to the impact of air turbulence and ambient environment vibrations.
In order to make the point diffraction-interference wave front sensing device have larger stability, unique solution adopts common light path optical texture exactly, yet the major defect of light channel structure is the phase measurement difficulty altogether.Reason has two aspects: 1), because reference light wave and test light wave almost keep identical geometric-optical axis, usually comprise few interference fringe in the interferogram of generation, thereby can not adopt fourier transform method to extract distorted wavefront information; 2) be difficult to introduce phase shift between the light path coherent light waves altogether at two bundles, although existing document proposes some structure of the point-diffraction interference based on phase shift technology (Opt.Lett.1984,9 (2): 59-61 at present; Appl.Opt.1996,35 (10): 1633-1642; Opt.Lett.1994,19 (12): 916-918), yet the common issue with that they exist is: PDI (Point-diffraction interferometer) mask plate is made complexity, is realized that difficulty is large; Certain structures also needs to introduce accurate light-dividing device (Opt.Lett.1996,21 (19): 1526-1528); Most technology are the time phase-shifting method, can not be applied to real-time wavefront measurement.
1964, M.V.R.K.Murty proposes a kind of loop radial-shear interferometer (Cyclic radial shearing interferometry, CRSI) at document " A compact radial shearing interferometer based on the law of refraction; Appl.Opt.1964; 3 (7): 853-858 ".Sichuan University Feng state English etc. on this basis, are combined PDI with CRSI, propose a kind of annular common-path point-diffraction interferometer (application for a patent for invention number: 201010577125.2) based on the space phase modulation.In this optical texture, light beam to be measured is through spectroscope transmission and reflection, enter Fourier transform lens along identical light path with opposite direction respectively, and is focused on respectively on pin hole and test window on place, focal plane two mesh filter; Then form reference light wave and test light wave after Fourier transform lens; Introduce the linear carrier frequency in space by regulating the spectroscope angle of inclination, thereby produce the space carrier frequency interference fringe, and just can directly reconstruct Wave-front phase to be measured after being processed by fourier transform method.In a single day this optical texture is established, the parameter of two main optical device that wherein relate to, it is the spacing of pin hole and test window in the light splitting ratio (ratio of transmissivity and reflectivity) of beam splitter and two mesh filter, to immobilize, this situation is very disadvantageous for point-diffraction interference technology and carrier frequency interference fringe wavefront reconstruction technology.The light intensity of the reference light wave that dissimilar and big or small distorted wavefront forms after by the pin hole diffraction has a great difference, yet the light intensity of the test light wave that produces under fixedly light splitting ratio condition is constant, cause thus interference fringe contrast and incident distorted wavefront to be measured that direct relation is arranged, different distorted wavefronts causes different fringe contrasts; When fringe contrast is low, can not adopts an effective measure and improve, thereby will greatly affect the front measuring accuracy of interference wave.In addition, because the two mesh filter spacing is fixed, the test light wave only allows to focus on test window internal zone dividing territory under the effect of inclination beam splitter, increased the light path adjustment difficulty, limited the variation range of carrier frequency, thereby further restricted the raising of measuring dynamic range and measuring accuracy.
Summary of the invention
The purpose of this utility model just in order to solve the existing phase measurement difficulty of existing path point diffraction-interference wave front sensing device altogether, the deficiency such as PDI mask plate manufacture difficulty is high, the wavefront measurement real-time is poor and contrast is non-adjustable, the adjustable loop point diffraction-interference wave front sensing device of a kind of fringe contrast and carrier frequency is proposed.This Wavefront sensor is total to light path orhtogonal linear polarizaiton reference light wave and test light wave by the annular common-path structure generation that is comprised of polarizing beam splitter mirror, fourier lense, polarization PDI mask plate, catoptron; Regulate the angle of interference fringe contrast, inclination polarizing beam splitter mirror by the rotation polarizer and introduce the linear carrier frequency in space between reference light and test light; Make that new Wavefront sensor can realize that stability is strong, self-reference is interfered, interference fringe contrast and carrier frequency is adjustable and only need single frames space carrier frequency interference fringe just can quick and precisely rebuild Wave-front phase information to be measured; Simultaneously, optical system is set up and is adjusted simply, measures real-time good, applicable to various Wave-front phase Static and dynamic high precision, detects, and especially when being applied to closed loop adaptive optical system, can make system realize the closed-loop corrected of fast and stable.
For realizing above-mentioned purpose of the present utility model, the utility model is realized by the following technical solutions.The loop point diffraction-interference wave front sensing device that the utility model fringe contrast and carrier frequency are adjustable, comprise the polarizer, polarizing beam splitter mirror, the first fourier lense and the second fourier lense, the first catoptron and the second catoptron, analyzer, ccd sensor, computing machine; The place, confocal plane that also is included in the first fourier lense and the second fourier lense adds the polarization PDI mask plate that the polaroid that contains pin hole in the Yi Ge center forms, the direction of vibration quadrature of its direction of vibration and polarizing beam splitter mirror transmitted light beam; The first fourier lense, polarization PDI mask plate, the second fourier lense and ccd sensor form the 4f system; Before analyzer was placed in ccd sensor, after its direction of vibration and polarizing beam splitter mirror reflection and transmission, the direction of vibration of light beam was all at 45 °.Describe according to light path, the testing laser light beam obtains linearly polarized light after the polarizer, then be divided into two bundle orhtogonal linear polarizaiton light through polarizing beam splitter mirror, wherein transmitted light beam forms the approximate ideal spherical wave through the second fourier lense and the second catoptron and at the lens focal plane place by the pin hole generation aperture diffraction on polarization PDI mask plate, spherical wave forms the approximate ideal plane wave through the first mirror reflects and the first fourier lense collimation, then by the whole transmissions of polarizing beam splitter mirror as reference light; And through the polarizing beam splitter mirror folded light beam through the first fourier lense and the first catoptron and after the lens focal plane place is almost undampedly directly by non-pin hole zone on polarization PDI mask plate, entered the second fourier lense by the second mirror reflects and form parallel beam, and all by polarizing beam splitter mirror, reflected as test light; Reference light and test light meet at the ccd sensor target surface and produce interferes; Angular adjustment interference fringe contrast by the rotation polarizer; Introduce the linear carrier frequency in space by the angle of inclination of regulating polarizing beam splitter mirror between test light and reference light; Thereby form the space carrier frequency interference fringe that contrast is the highest, carrier frequency is suitable, received and input computing machine by ccd sensor, adopt fourier transform method to solve and obtain being wound around phase place, further adopt phase-unwrapping algorithm to obtain Wave-front phase to be measured.
In technique scheme, described the first fourier lense and the second fourier lense are positive lens, and focal length equates, thereby the test light that arrives ccd sensor equates with the reference light aperture, have improved better the efficiency of light energy utilization.
In technique scheme, the pinhole aperture size on described polarization PDI mask plate has two values to select: when this utility model was applied to the wavefront detection, the pinhole aperture size was 0.5 times of Airy disk diameter; When this utility model was applied to closed loop adaptive optical system, pinhole aperture was not more than 1.5 times of Airy disk diameters, equally also can effectively improve the efficiency of light energy utilization.
The utility model compared with prior art has following characteristics and useful technique effect:
1, with Wavefront detecting in commonly used to Hartmann wave front sensor compare, the utility model adopts interferometric method to rebuild Wave-front phase, in interferogram, each pixel can be regarded a sub-aperture as, has promoted Wavefront detecting precision and spatial resolution.
2, the utility model adopts annular common-path structural design, simple in structure and easy adjustment, with non-light path type interference wave front sensor altogether, compares, and has very strong Chinese People's Anti-Japanese Military and Political College's gas and disturbs and the ambient vibration ability, and stability is better, the scope of application is wider.
3, the utility model, by regulating the angle of inclination of polarizing beam splitter mirror, is introduced the linear carrier frequency in space between test light and reference light, obtains the space carrier frequency interference fringe, utilizes fourier transform method real-time reconstruction Wave-front phase information to be measured; Simultaneously, measurement data is directly reacted Wave-front phase information to be measured, does not need the wavefront reconstruction process in similar slope Wavefront sensor (as Hartmann wave front sensor, lateral shearing interferometer) and radial-shear interferometer; Therefore the utility model is more suitable for the fields such as various Wave-front phase Static and dynamic high precision detection.
4, the utility model changes the ratio of the light intensity between two light beams after the polarizing beam splitter mirror light splitting by the rotation polarizer, thereby realize the adjustable continuously of fringe contrast, all can obtain the interference fringe of high-contrast for different distorted wavefront phase places, this improves measuring accuracy for the point-diffraction interference technology and has very important significance; Therefore, with existing point-diffraction interference technology, compare, the utility model all has higher measuring accuracy for any Wave-front phase to be measured.
5, the utility model is realized the adjustable continuously of carrier frequency by the angle of inclination that changes polarizing beam splitter mirror, and range of adjustment is very large, therefore can obtain good balance between measuring accuracy, measurement dynamic range and ccd sensor spatial resolution three.
6, the utility model due to fringe contrast and carrier frequency adjustable continuously, thereby when being applied to closed loop adaptive optical system, especially in the closed-loop corrected incipient stage, ADAPTIVE OPTICS SYSTEMS is realized closed-loop corrected fast.
Description of drawings
Fig. 1 is the adjustable loop point diffraction-interference wave front sensing device structural representation of fringe contrast and carrier frequency;
Fig. 2 is polarization PDI mask plate structure schematic diagram described in the utility model;
In figure, the 1. polarizer, 2. polarizing beam splitter mirror, 3. the first fourier lense, 4. the first catoptron, 5. polarization PDI mask plate, 6. the second catoptron, 7. the second fourier lense, 8. analyzer, 9.CCD sensor, 10. computing machine, 11. pin holes.
Embodiment
The loop point diffraction-interference wave front sensing device that the utility model fringe contrast and carrier frequency are adjustable, as shown in Figure 1, comprise the polarizer 1, polarizing beam splitter mirror 2, the first fourier lense 3 and the second fourier lense 7, the first catoptron 4 and the second catoptron 6, analyzer 8, ccd sensor 9, computing machine 10; The place, confocal plane that also is included in the first fourier lense 3 and the second fourier lense 7 adds the polarization PDI mask plate 5 that the polaroid that contains pin hole 11 in the Yi Ge center forms, as shown in Figure 2, the direction of vibration quadrature of its direction of vibration and polarizing beam splitter mirror 2 transmitted light beams; The first fourier lense 3, polarization PDI mask plate 5, the second fourier lense 7 and ccd sensor 9 form the 4f system; Before analyzer 8 was placed in ccd sensor 9, the direction of vibration of its direction of vibration and polarizing beam splitter mirror 2 reflections and transmitted light beam was all at 45 °.
Describe according to light path, the testing laser light beam obtains linearly polarized light after the polarizer 1, then be divided into two bundle orhtogonal linear polarizaiton light through polarizing beam splitter mirror 2, wherein transmitted light beam is through the second fourier lense 7 and the second catoptron 6 and by the pin hole 11 on polarization PDI mask plate 5, the aperture diffraction occur at the lens focal plane place and form the approximate ideal spherical waves, spherical wave is through the first catoptron 4 reflection and the first fourier lense 3 collimation formation approximate ideal plane waves, then by the whole transmissions of polarizing beam splitter mirror 2 as reference light; And through polarizing beam splitter mirror 2 folded light beams through the first fourier lense 3 and the first catoptron 4 and after the lens focal plane place is almost undampedly directly by non-pin hole zone on polarization PDI mask plate 5, entered the second fourier lense 7 by the second catoptron 6 reflections and form parallel beam, and all by polarizing beam splitter mirror 2, reflected as test light; Reference light and test light obtain two-beam through analyzer 8 and correspond respectively to the polarized component of analyzer direction of vibration, and interfere; Can obtain the interference fringe of high-contrast by the angle of the rotation polarizer 1; Can introduce the linear carrier frequency in space by the angle of inclination of regulating polarizing beam splitter mirror 2 between test beams and reference beam; Forming finally contrast is the highest, carrier frequency is suitable space carrier frequency interference fringe is received and inputs computing machine 10 by ccd sensor 9 and process.
Suppose that light beam Complex Amplitude to be measured is
The space carrier frequency fringe intensity that receives of ccd sensor 9 described in the utility model distributes and can be expressed as:
Wherein, f
oxAnd f
oyThe space carrier frequency that represents respectively x, y direction; A (x, y) and b (x, y) are background and modulate intensity, are expressed as respectively:
a(x，y)＝I
r(x，y)+I
t(x，y) (2)
Wherein, I
r(x, y) and I
t(x, y) represents respectively to incide reference light on described ccd sensor 9 and the light distribution of test light, both directly affects the contrast of interference fringe.The anglec of rotation of supposing the polarizer 1 is θ (θ ∈ (0, pi/2)), for a certain Wave-front phase to be measured
The luminous energy transmitance that pin hole 11 produces after little diffraction by aperture is η, and the light intensity of reference light and test light equals respectively:
I
r＝ηA
2cos
2θ (4)
I
t＝A
2sin
2θ (5)
Easy in order to represent, omitted volume coordinate (x, y) here.
So the expression formula of described interference fringe contrast K is suc as formula shown in (6):
In order to obtain the highest fringe contrast, i.e. K=1, the pass that according to following formula, can draw between the polarizer anglec of rotation and pin hole luminous energy transmitance is:
Therefore, for any one Wave-front phase to be measured
Pin hole luminous energy transmitance η value is just determined; Can regulate fringe contrast K by the anglec of rotation θ that changes the polarizer 1, when θ met formula (7), it is the highest that fringe contrast reaches, i.e. K=1.
Interference fringe described in the utility model is the space carrier frequency interference fringe, utilizes fourier transform method to rebuild Wave-front phase to be measured from interference fringe and comprises following four steps:
1. the interference fringe that collects being carried out effective range determines to process with the space continuation;
2. the interference fringe after the continuation of space is carried out Fourier transform, frequency domain filtering and moves to the zero-frequency position carrying out inverse Fourier transform and obtaining being wound around PHASE DISTRIBUTION:
In order to carry out Fourier analysis, formula (1) is rewritten as:
g(x，y)＝a(x，y)+c(x，y)exp{i2π(f
oxx+f
oyy)}+c
*(x，y)exp{-i2π(f
oxx+f
oyy)} (8)
Wherein, " * " represents conjugation,
Fourier transform is carried out on formula (8) equal sign both sides to be obtained:
G(u，v)＝A(u，v)+C(u-f
ox，v-f
oy)+C
*(u+f
ox，v+f
oy) (10)
Wherein, G (u, v), A (u, v), C (u-f
ox, v-f
oy) and C
*(u+f
ox, v+f
oy) be respectively Fourier transform corresponding every in (8) formula;
3. select a suitable wave filter, with the fundamental frequency part C (u-f in frequency domain
ox, v-f
oy) extract, and move to the zero-frequency position, and obtain C (u, v), then it is carried out inverse Fourier transform and obtain:
Therefore, the winding PHASE DISTRIBUTION of Wave-front phase to be measured is:
Wherein, Re[c (x, y)], Im[c (x, y)] respectively expression get real part and imaginary-part operation.
4. the result of calculation of formula (12)
Be positioned at [π, π] scope, further utilize the to be measured Wave-front phase of phase unwrapping after algorithm can obtain unwrapping to distribute
Claims (4)
1. the adjustable loop point diffraction-interference wave front sensing device of a fringe contrast and carrier frequency, comprise the polarizer, polarizing beam splitter mirror, the first and second fourier lenses, the first and second catoptrons, analyzer, ccd sensor, computing machine; Characterized by further comprising and add the polarization PDI mask plate that the polaroid that contains pin hole in the Yi Ge center forms at the place, confocal plane of the first and second fourier lenses; Described the first fourier lense, polarization PDI mask plate, the second fourier lense and ccd sensor form the 4f system; Before described analyzer was placed in ccd sensor, the direction of vibration of its direction of vibration and polarizing beam splitter mirror reflection and transmitted light beam was all at 45 °; Describe according to light path, the testing laser light beam obtains linearly polarized light through the polarizer, then be divided into two bundle orhtogonal linear polarizaiton light through polarizing beam splitter mirror, wherein transmitted light beam forms the approximate ideal spherical wave through the second fourier lense and the second catoptron and at the lens focal plane place by the pin hole generation aperture diffraction on polarization PDI mask plate, then form the approximate ideal plane wave after the first catoptron and the first fourier lense, then by the whole transmissions of polarizing beam splitter mirror as reference light; And through the polarizing beam splitter mirror folded light beam through the first fourier lense and the first catoptron and after the lens focal plane place is almost undampedly directly by non-pin hole zone on polarization PDI mask plate, entered the second fourier lense by the second mirror reflects and form parallel beam, and all by polarizing beam splitter mirror, reflected as test light; Reference light and test light interfere and form interference fringe after analyzer.
2. Wavefront sensor according to claim 1, is characterized in that, described polarization PDI mask plate Shi Yige contains at center the polaroid of pin hole, the direction of vibration quadrature of its direction of vibration and described polarizing beam splitter mirror transmitted light beam.
3. Wavefront sensor according to claim 1, is characterized in that, the pinhole aperture size on described polarization PDI mask plate has two values to select: when this Wavefront sensor was applied to wavefront and detects, the pinhole aperture size was 0.5 times of Airy disk diameter; When this Wavefront sensor was applied to closed loop adaptive optical system, pinhole aperture was not more than 1.5 times of Airy disk diameters.
4. Wavefront sensor according to claim 1, is characterized in that, described the first fourier lense and the second fourier lense are positive fourier lense, and both focal length equates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013202609956U CN203298878U (en) | 2013-05-03 | 2013-05-03 | Fringe contrast and carrier frequency adjustable loop point diffraction interference wavefront sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013202609956U CN203298878U (en) | 2013-05-03 | 2013-05-03 | Fringe contrast and carrier frequency adjustable loop point diffraction interference wavefront sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203298878U true CN203298878U (en) | 2013-11-20 |
Family
ID=49574883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013202609956U Expired - Fee Related CN203298878U (en) | 2013-05-03 | 2013-05-03 | Fringe contrast and carrier frequency adjustable loop point diffraction interference wavefront sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203298878U (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105371752A (en) * | 2015-11-19 | 2016-03-02 | 中国计量学院 | Fringe contrast-adjustable polarization type Miller interferometric device and measuring method |
| CN105466668A (en) * | 2015-12-24 | 2016-04-06 | 中国科学院上海光学精密机械研究所 | Wave aberration measurement instrument of point diffraction interference and detection method of wave aberration of optical system |
| CN105891066A (en) * | 2016-04-11 | 2016-08-24 | 中国计量学院 | Particle size detecting device and method |
| CN106370396A (en) * | 2015-07-24 | 2017-02-01 | 深圳市安普盛科技有限公司 | Method and device for detecting light source |
| CN107024338A (en) * | 2016-02-01 | 2017-08-08 | 南京理工大学 | Use the common light path point diffraction simultaneous phase-shifting interference testing device of prismatic decomposition |
| CN108106727A (en) * | 2014-02-05 | 2018-06-01 | 浜松光子学株式会社 | The manufacturing method of optical splitter and optical splitter |
| CN109059802A (en) * | 2018-08-03 | 2018-12-21 | 南京理工大学 | Based on Tip Tilt mirror dynamic angle interferometric modulator system error calibrating method |
| CN111386449A (en) * | 2019-03-22 | 2020-07-07 | 合刃科技（深圳）有限公司 | Stress analysis system for curved surface material inspection |
| CN116608792A (en) * | 2023-06-06 | 2023-08-18 | 广东普洛宇飞生物科技有限公司 | Wavefront interferometry system and method |
-
2013
- 2013-05-03 CN CN2013202609956U patent/CN203298878U/en not_active Expired - Fee Related
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108106727A (en) * | 2014-02-05 | 2018-06-01 | 浜松光子学株式会社 | The manufacturing method of optical splitter and optical splitter |
| CN106370396A (en) * | 2015-07-24 | 2017-02-01 | 深圳市安普盛科技有限公司 | Method and device for detecting light source |
| CN106370396B (en) * | 2015-07-24 | 2019-02-15 | 深圳市安普盛科技有限公司 | A kind of light source detection method and detection device |
| CN105371752B (en) * | 2015-11-19 | 2017-12-08 | 中国计量学院 | The adjustable polarization-type Miller interference device of fringe contrast and measuring method |
| CN105371752A (en) * | 2015-11-19 | 2016-03-02 | 中国计量学院 | Fringe contrast-adjustable polarization type Miller interferometric device and measuring method |
| CN105466668A (en) * | 2015-12-24 | 2016-04-06 | 中国科学院上海光学精密机械研究所 | Wave aberration measurement instrument of point diffraction interference and detection method of wave aberration of optical system |
| CN107024338A (en) * | 2016-02-01 | 2017-08-08 | 南京理工大学 | Use the common light path point diffraction simultaneous phase-shifting interference testing device of prismatic decomposition |
| CN107024338B (en) * | 2016-02-01 | 2020-04-21 | 南京理工大学 | Common-path point diffraction synchronous phase-shifting interference testing device using prism light splitting |
| CN105891066A (en) * | 2016-04-11 | 2016-08-24 | 中国计量学院 | Particle size detecting device and method |
| CN109059802A (en) * | 2018-08-03 | 2018-12-21 | 南京理工大学 | Based on Tip Tilt mirror dynamic angle interferometric modulator system error calibrating method |
| CN109059802B (en) * | 2018-08-03 | 2019-08-13 | 南京理工大学 | Based on Tip Tilt mirror dynamic angle interferometric modulator system error calibrating method |
| CN111386449A (en) * | 2019-03-22 | 2020-07-07 | 合刃科技（深圳）有限公司 | Stress analysis system for curved surface material inspection |
| CN111386449B (en) * | 2019-03-22 | 2022-03-25 | 合刃科技（深圳）有限公司 | Stress analysis system for curved surface material inspection |
| CN116608792A (en) * | 2023-06-06 | 2023-08-18 | 广东普洛宇飞生物科技有限公司 | Wavefront interferometry system and method |
| CN116608792B (en) * | 2023-06-06 | 2023-11-28 | 芜湖达辉生物科技有限公司 | Wavefront interferometry system and method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203298878U (en) | Fringe contrast and carrier frequency adjustable loop point diffraction interference wavefront sensor | |
| CN103245423B (en) | Light path polarized point diffraction movable phase interfere Wavefront sensor altogether | |
| US8786864B2 (en) | Circular common-path point diffraction interference wavefront sensor | |
| CN203365108U (en) | Common-path interference measurement device for generated optical aberration of liquid-crystal spatial light modulator | |
| CN106767391B (en) | The sensitivity enhancement device and method of four wavefront lateral shearing interference Wavefront sensors | |
| CN101788263B (en) | Coaxial Fizeau synchronous phase shifting interferometer capable of adjusting extended light illumination | |
| CN104713494B (en) | The dual wavelength tuning interference testing device and method of Fourier transformation phase shift calibration | |
| CN110017767A (en) | Spatial Phase-shifting Method dynamic interferometer and its application based on LCD space light modulator | |
| CN108061639A (en) | Large dynamic range and high precision phase difference method wavefront measuring instrument combined with adaptive optics technology | |
| CN101762331B (en) | Common-path radial shearing interferometer based on four-step spatial phase shift | |
| CN110017794B (en) | Dynamic phase deformation interference measurement device and method | |
| CN110057543B (en) | Wave surface measuring device based on coaxial interference | |
| CN104006759A (en) | Composite detection method for large-diameter non-spherical reflector with large deviation in polishing process | |
| CN201885805U (en) | Annular common-path point diffraction-interference wave front sensing device- | |
| CN102680117B (en) | Common-path radial cutting liquid crystal phase shift interference wave-front sensor | |
| CN102426058A (en) | Static interference imaging polarizer and method for acquiring polarization information of target | |
| CN103528539A (en) | Nonzero-digit interference system based on point source array | |
| CN103983366B (en) | Oblique incidence reflection-type point diffractive plate and its interferometric method | |
| CN114322848B (en) | Spherical wavefront curvature radius measuring device and measuring method | |
| CN105784129A (en) | Low-frequency heterodyne ineterferometer used for laser wavefront detection | |
| CN102865810A (en) | Orthogonal double-grating based detecting device for synchronous phase shift common-light path interference and detecting method therefor | |
| CN104819780B (en) | Non- optical path loop radial shear polarization phase-shifting interferometer altogether | |
| Morris et al. | Noise reduction in dynamic interferometry measurements | |
| CN103278105B (en) | The detection method of axicon surface shape and cone angle | |
| CN105674875A (en) | Full visual field low frequency heterodyne point diffraction interferometer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131120 Termination date: 20140503 |