CN203365108U - Common-path interference measurement device for generated optical aberration of liquid-crystal spatial light modulator - Google Patents

Common-path interference measurement device for generated optical aberration of liquid-crystal spatial light modulator Download PDF

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Publication number
CN203365108U
CN203365108U CN 201320400928 CN201320400928U CN203365108U CN 203365108 U CN203365108 U CN 203365108U CN 201320400928 CN201320400928 CN 201320400928 CN 201320400928 U CN201320400928 U CN 201320400928U CN 203365108 U CN203365108 U CN 203365108U
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light modulator
lcd space
light
liquid
space light
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白福忠
王晓强
宋小燕
张铁英
苗悦
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Inner Mongolia University of Technology
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Inner Mongolia University of Technology
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Abstract

The utility model relates to a common-path interference measurement device for generated optical aberration of a liquid-crystal spatial light modulator. The device includes a laser, a beam expander, a polarizer, a beam-splitter prism, a liquid-crystal spatial light modulator, a quarter wave plate, a polarization analyzer, an imaging lens, a CCD detector and a computer. The liquid-crystal spatial light modulator divides a beam of incident-ray polarization laser into a beam of orthogonal linear polarization test light and a beam of orthogonal linear polarization reference light, which are equal in energy. A polarization direction of the test light is parallel to a crystal-liquid optical axis of the liquid-crystal spatial light modulator and the test light includes information of the generated optical aberration of the liquid-crystal spatial light modulator. The reference light is not affected by a drive signal. The test light and the reference light pass through the beam-splitter prism, the quarter wave plate and the polarization analyzer along the same optical path and then interferences are generated. The rotary polarization analyzer acquires a four-frame phase-shifting interference figure and the optical-aberration information is restored accurately through a phase-shifting algorithm. The common-path interference measurement device for the generated optical aberration of the liquid-crystal spatial light modulator adopts a common-path self-interference structure and the device has the characteristics of being great in stability, low in cost, simple in structure and high in measurement efficiency.

Description

A kind of LCD space light modulator generates the common path interference measurement mechanism of aberration
Technical field
The utility model relates to the photoelectricity test technical field, refers in particular to the common path interference measurement mechanism that a kind of LCD space light modulator generates aberration.
Background technology
Along with the fast development of liquid crystal display and very large scale integration technology and enriching of liquid crystal material, LCD space light modulator receives publicity day by day in the application of the aspects such as wavefront correction, atmosphere imaging, optically filtering and beam shaping.LCD space light modulator can change phase place, amplitude (or intensity), polarization state and even the wavelength of spatial light under the driving of electricity or light signal is controlled, or incoherent light is to the conversion of coherent light etc.; For the LCD space light modulator based on the phase-modulation principle, the advantage such as low-power consumption, miniaturization, cost are low owing to having, machinery-free inertia, high spatial resolution, phase-shift unit are able to programme has epochmaking using value in Atmosphere Turbulence Simulator, wave-front corrector, liquid crystal phase shifter, beam deflector, liquid crystal lens and microlens array, diffraction optical element and computer hologram.
Because there is structural difference in LCD space light modulator, and the impact of the factors such as inhomogeneous and phase place commissure of Phase Modulation Properties between pixel, the aberration of its actual generation is not necessarily identical with the aberration that theory loads, thereby need in actual use LCD space light modulator generation aberration is carried out to Measurement accuracy, to estimate the capability of fitting of LCD space light modulator to given aberration.Be used for measuring the method that LCD space light modulator generates aberration and generally use double beam interferometry, typical measuring technique has following two classes:
1) " the spatial light modulator phase calibration that space is inhomogeneous " (Phase calibration of spatially nonuniform spatial light modulators that X.D.Xun etc. delivered in 2004, Appl.Opt.2004,43 (35): 6400-6406) and J.O.
Figure BSA0000092168770000011
deng " characteristic and application of pure phase position reflective liquid crystal spatial light modulator " delivered in 2006 (Characterization and applications of a pure phase reflective liquid crystal spatial light modulator, Proc.SPIE, 2006,6254:62540N) utilize the Twyman-Green interference instrument to generate aberration to LCD space light modulator and measured.The two-beam interfered in this device does not experience same light path, and ambient vibration and air stream disturbance meeting cause the interference fringe shake, therefore very high to the measurement environment stability requirement, also will be subject to the impact of Fei Gong road error simultaneously.
2) use business-like digital corrugated phase-shifting interferometer (as, Vecco interferometer and Zygo interferometer) LCD space light modulator generated to aberration measured (Acta Physica Sinica, 2008,57 (2): 897-903; Appl.Opt.1997,36 (7): 1517-1524; Acta Optica, 2005,25 (12): 1682-1686; Opt.Express, 2005,13 (4): 1059-1065).Although commercialization numeral corrugated phase-shifting interferometer measuring accuracy is high, its high price has limited the generally application of the method, especially, for common R&D institution laboratory, has more very large economic pressures; Simultaneously, the software pattern that the business-like instrument of this class provides is fixed, and is unfavorable for that the scientific research personnel carries out data and processes and analyze.
The utility model content
The utility model generates the aberration measurement device to problems such as the measurement environment stability requirement are high, expensive for solving existing LCD space light modulator, proposes the common path interference measurement mechanism that a kind of LCD space light modulator generates aberration.
A kind of LCD space light modulator generates the common path interference measurement mechanism of aberration, and it comprises laser instrument, beam expanding lens, the polarizer, Amici prism, LCD space light modulator, quarter-wave plate, analyzer, imaging len, ccd detector and computing machine, the laser beam incident of laser emitting, to beam expanding lens, is incident to the polarizer after the beam expanding lens beam-expanding collimation, after polarizer polarization, is incident to Amici prism, and is incident to the light input end of LCD space light modulator after the Amici prism reflection, the liquid crystal optic axis direction angle at 45 ° of the light transmission shaft of the described polarizer and LCD space light modulator, the linearly polarized light that incides described LCD space light modulator forms two bundle orhtogonal linear polarizaiton light after described LCD space light modulator reflection, and keep equal energy, wherein the perpendicular light of the liquid crystal optic axis direction of a branch of polarization direction and described LCD space light modulator is not affected and will be as reference light, and the light that another bundle polarization direction parallels with the liquid crystal optic axis direction of described LCD space light modulator will be modulated by LCD space light modulator, modulation voltage is relevant with the driving signal, to be used as test light, test light is incident to quarter-wave plate along identical light path with reference light after the Amici prism transmission, the liquid crystal optic axis direction angle at 45 ° of the light transmission shaft of described quarter-wave plate and LCD space light modulator, test light and reference light after the quarter-wave plate transmission become circularly polarized light by linearly polarized light, and after analyzer, interfere together, rotate successively analyzer and produce 0 °, 45 °, 90 ° and 135 ° of angles, correspondingly obtain the phase-shift interference that four frame phase differential are 90 °, the phase-shift interference produced images in ccd detector and inputs to computing machine through imaging len to be processed, the signal output part of described ccd detector is connected with the signal input part of computing machine, the control signal input end of described LCD space light modulator is connected with the control signal output terminal of computing machine.
The utility model compared with prior art has following characteristics and useful technique effect:
1, the utility model adopts common path interference structural design and phase shift algorithm to realize that LCD space light modulator generates the measurement of aberration, all elements of composition system are the working standard optical device, with traditional measurement method, compare, have very strong Chinese People's Anti-Japanese Military and Political College gas and disturb and the ambient vibration ability, good stability, cost are low, applied widely.
2, the utility model is simple in structure, and system debug is easy.
3, the utility model belongs to the self-reference interference, does not need to introduce in addition reference light.
4, do not comprise the LCD space light modulator system aberration in the utility model measurement result, as reflection substrate face type error, the also not impact of Shou Feigong road error, therefore can measure the absolute aberration that LCD space light modulator generates easily.
5, the utility model can guarantee high measuring accuracy, has improved again measurement efficiency.
The accompanying drawing explanation
Fig. 1 generates the light path interference device structural representation of aberration for measuring the reflection type liquid crystal spatial light modulator;
Fig. 2 generates the light path interference device structural representation of aberration for measuring the transmission-type LCD space light modulator;
Fig. 3 is the phase-shift interference that the four frame phase differential that collected by ccd detector in the utility model actual measurement are 90 °;
Fig. 4 is the three-dimensional distribution map that the LCD space light modulator that obtains in the utility model actual measurement generates aberration;
In figure, 1. laser instrument, 2. beam expanding lens, the 3. polarizer, 4. Amici prism, 5. LCD space light modulator, 6. quarter-wave plate, 7. analyzer, 8. imaging len, 9.CCD detector, 10. computing machine.
Embodiment
In conjunction with Fig. 1, this embodiment is described, a kind of LCD space light modulator generates the common path interference measurement mechanism of aberration, and it comprises laser instrument 1, beam expanding lens 2, the polarizer 3, Amici prism 4, LCD space light modulator 5, quarter-wave plate 6, analyzer 7, imaging len 8, ccd detector 9 and computing machine 10, laser instrument 1 emitting laser bundle is incident to beam expanding lens 2, after beam expanding lens 2 beam-expanding collimations, is incident to the polarizer 3, after the polarizer 3 polarizations, is incident to Amici prism 4, and is incident to the light input end of LCD space light modulator 5 after Amici prism 4 reflections, the liquid crystal optic axis of the light transmission shaft of the described polarizer 3 and LCD space light modulator 5 angle at 45 °, the linearly polarized light that incides described LCD space light modulator 5 forms two bundle orhtogonal linear polarizaiton light after described LCD space light modulator 5 reflections, and keep equal energy, wherein the perpendicular light of the liquid crystal optic axis direction of a branch of polarization direction and described LCD space light modulator 5 is not affected and will be as reference light, and the light that another bundle polarization direction parallels with the liquid crystal optic axis direction of described LCD space light modulator 5 will be modulated by LCD space light modulator 5, modulation voltage is relevant with the driving signal, to be used as test light, described test light is incident to quarter-wave plate 6 along identical light path with reference light after Amici prism 4 transmissions, the liquid crystal optic axis direction angle at 45 ° of the light transmission shaft of described quarter-wave plate 6 and LCD space light modulator 5, test light and reference light after quarter-wave plate 6 transmissions become circularly polarized light by linearly polarized light, and after analyzer 7, interfere together, rotate successively analyzer 7 and produce 0 °, 45 °, 90 ° and 135 ° of angles, correspondingly obtain the phase-shift interference that four frame phase differential are 90 °, the phase-shift interference produced images in ccd detector 9 and inputs to computing machine 10 through imaging len 8 to be processed, the signal output part of described ccd detector 9 is connected with the signal input part of computing machine 10, the control signal input end of described LCD space light modulator 5 is connected with the control signal output terminal of computing machine 10.
Computing machine 10 produces a certain aberration as driving signal loading in LCD space light modulator 5, supposes to be meaned by the actual φ for aberration (x, y) generated of LCD space light modulator 5; The intensity distributions of the four frame phase-shift interferences that got by ccd detector 9 described in the utility model by rotation analyzer 7 is expressed as respectively:
I 1 ( x , y ) = a ( x , y ) + b ( x , y ) cos [ φ ( x , y ) ] I 2 ( x , y ) = a ( x , y ) - b ( x , y ) sin [ φ ( x , y ) ] I 3 ( x , y ) = a ( x , y ) - b ( x , y ) cos [ φ ( x , y ) ] I 1 ( x , y ) = a ( x , y ) + b ( x , y ) sin [ φ ( x , y ) ] - - - ( 1 )
Wherein, I k(x, y) means the intensity of phase-shift interference, k=1, and 2,3,4, a (x, y) and b (x, y) mean respectively interferogram background and modulate intensity; Utilize four step phase shift algorithms shown in formula (2) to calculate the winding PHASE DISTRIBUTION:
φ w = ( x , y ) = arctan [ I 4 ( x , y ) - I 2 ( x , y ) I 1 ( x , y ) - I 3 ( x , y ) ] - - - ( 2 )
The result of calculation φ of formula (2) w(x, y) is positioned at [π, π] scope, further utilizes the to be measured Wave-front phase distribution phi (x, y) of phase unwrapping after algorithm can obtain unwrapping.
Embodiment two: this embodiment is described in conjunction with Fig. 2, this embodiment is to have omitted Amici prism 4 with the difference that the described LCD space light modulator of embodiment one generates the common path interference measurement mechanism of aberration, for measuring the transmission-type LCD space light modulator, generates aberration.
Implementation example
In this example, measuring object is U.S. BNS company 256 * 256 pixel reflects formula LCD space light modulator; Laser instrument 1 equals the He-Ne laser instrument of 632.8nm for wavelength, and Amici prism 4 is 5: 5 common unpolarized Amici prisms, the area array CCD detector that ccd detector 9 is quick logical MTV-1501CB, 768 * 576 pixels.
Connect each element according to light path as shown in Figure 1, the laser beam of He-Ne laser emitting incides the polarizer 3 after beam-expanding collimation, forms a branch of linearly polarized light, then is incident to LCD space light modulator 5 after Amici prism 4 reflections, the liquid crystal optic axis direction angle at 45 ° of the light transmission shaft of the polarizer 3 and LCD space light modulator 5, the linearly polarized light incided on LCD space light modulator 5 forms two bundle orhtogonal linear polarizaiton light after LCD space light modulator 5 reflections, and keep equal energy, wherein the perpendicular light of the liquid crystal optic axis direction of a branch of polarization direction and LCD space light modulator 5 is not affected and will be as reference light, and the light that another bundle polarization direction parallels with the liquid crystal optic axis direction of LCD space light modulator 5 will be modulated by LCD space light modulator 5, modulation voltage is relevant with the driving signal, to be used as test light, computing machine 10 produces an out of focus PHASE DISTRIBUTION, as driving signal loading on LCD space light modulator 5, by the actual aberration information generated of LCD space light modulator 5, will all be included in test light, test light is incident to quarter-wave plate 6 along identical light path with reference light after Amici prism 4 transmissions, the liquid crystal optic axis direction angle at 45 ° of the light transmission shaft of quarter-wave plate 6 and LCD space light modulator 5, test light and reference light after quarter-wave plate 6 become circularly polarized light by linearly polarized light, and after analyzer 7, interfere together, rotate successively analyzer 7 and produce 0 °, 45 °, 90 ° and 135 ° of angles, obtain the phase-shift interference that four frame phase shifts are respectively 0 °, 90 °, 180 ° and 270 °, the phase-shift interference produced images in ccd detector 9 through imaging len 8, and inputs to computing machine 10 and processed.
Figure 3 shows that the phase-shift interference that the four frame phase differential that collected by ccd detector 9 in actual measurement are 90 °; Utilize formula (2) phase-shift interference is processed and used phase unwrapping after algorithm, obtain the three-dimensional distribution map of the actual generation of LCD space light modulator aberration, as shown in Figure 4.

Claims (3)

1. a LCD space light modulator generates the common path interference measurement mechanism of aberration, and it comprises laser instrument (1), beam expanding lens (2), the polarizer (3), Amici prism (4), LCD space light modulator (5), quarter-wave plate (6), analyzer (7), imaging len (8), ccd detector (9) and computing machine (10); Laser instrument (1) emitting laser bundle is incident to beam expanding lens (2), be incident to the polarizer (3) after beam expanding lens (2) beam-expanding collimation, be incident to Amici prism (4) after the polarizer (3) polarization, described Amici prism (4) will be incident to the light input end of LCD space light modulator (5) after the linearly polarized light reflection; Described LCD space light modulator (5) reflects incident ray polarized light and forms two bundle orhtogonal linear polarizaiton light, wherein the perpendicular light of the liquid crystal optic axis direction of a branch of polarization direction and described LCD space light modulator (5) is not affected and will be as reference light, and the light that another bundle polarization direction parallels with the liquid crystal optic axis direction of described LCD space light modulator (5) will be modulated by LCD space light modulator (5), modulation voltage is relevant with the driving signal, will be used as test light; Described test light is incident to quarter-wave plate (6) along identical light path with reference light after Amici prism (4) transmission, all become circularly polarized light after quarter-wave plate (6) transmission, and after analyzer (7), interfere together, rotate successively analyzer (7) and produce 0 °, 45 °, 90 ° and 135 ° of angles, the corresponding four frame phase differential that obtain are 90 ° of phase-shift interferences; The phase-shift interference produced images in ccd detector (9) and inputs computing machine (10) and processed through imaging len (8); The signal output part of described ccd detector (9) is connected with the signal input part of computing machine (10); The control signal input end of described LCD space light modulator (5) is connected with the control signal output terminal of computing machine (10).
2. a kind of LCD space light modulator according to claim 1 generates the common path interference measurement mechanism of aberration, it is characterized in that the liquid crystal optic axis direction angle at 45 ° of the light transmission shaft of the described polarizer (3) and LCD space light modulator (5).
3. a kind of LCD space light modulator according to claim 1 generates the common path interference measurement mechanism of aberration, it is characterized in that the liquid crystal optic axis direction angle at 45 ° of the light transmission shaft of described quarter-wave plate (6) and LCD space light modulator (5).
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