CN204855372U - Heavy -calibre uniaxial crystal refracting index homogeneity measuring device - Google Patents

Heavy -calibre uniaxial crystal refracting index homogeneity measuring device Download PDF

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Publication number
CN204855372U
CN204855372U CN201520499420.9U CN201520499420U CN204855372U CN 204855372 U CN204855372 U CN 204855372U CN 201520499420 U CN201520499420 U CN 201520499420U CN 204855372 U CN204855372 U CN 204855372U
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uniaxial crystal
heavy caliber
light
semi
polarizer
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CN201520499420.9U
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Inventor
段亚轩
陈永权
赵怀学
李坤
田留德
赵建科
薛勋
刘尚阔
潘亮
聂申
昌明
张洁
胡丹丹
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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Abstract

The utility model provides a heavy -calibre uniaxial crystal refracting index homogeneity measuring device, collimating mirror, the polarizer and semitransparent mirror set gradually in the light path of the emergent light place of laser instrument, semitransparent mirror will incide to reflect to semitransparent mirror's light and form reverberation and transmitted light respectively with passing through, the convergent mirror setting is in the light path of reverberation place and assemble the reverberation to the total mark ball power meter in, contract and restraint system's objective, contract and restraint system's eyepiece and the graceful wavefront sensor of xia ke - hart and set gradually in the light path of transmitted light place, the heavy -calibre uniaxial crystal that awaits measuring is arranged in between the polarizer and the semitransparent mirror, the computer links to each other with total mark ball power meter, the graceful wavefront sensor of xia ke - hart and the heavy -calibre uniaxial crystal that awaits measuring respectively. The utility model discloses can realize heavy -calibre uniaxial crystal refracting index homogeneity and measure, not limited and the influence of external environment air current and vibration by the wavelength to fine assurance measurement accuracy.

Description

Heavy caliber uniaxial crystal index of refraction homogeneity measurement mechanism
Technical field
The utility model belongs to optical field, relates to a kind of crystal refractive index uniformity measurement apparatus, particularly relates to one and realizes heavy caliber uniaxial crystal index of refraction homogeneity measurement mechanism based on Shack-Hartmann wavefront sensor.
Background technology
Along with the construction of China's God Light III host apparatus, heavy caliber uniaxial crystal as frequency translation components, finally exports energy to system and plays vital impact in inertial confinement fusion system.Especially large-aperture KDP crystal, it is the critical material of frequency doubling device and electrooptical switching in high power laser, and its quality of materials and element crudy all largely affect the realization of the final index of device.Induct stress and temperature variation of the photoelastic effect that the fault of construction of crystal in growth course or internal stress cause, crystal self gravitation, plane of crystal deformation, assembling all likely causes the refractive index spatial skewness of crystal.Refractive index inhomogeneity will cause the space distribution existence phase mismatch in various degree of light beam, thus cause the conversion efficiency of frequency tripling system to decline.
Current measurement uniaxial crystal index of refraction homogeneity method mainly adopts orthogonal polarization interferometry to measure (OPI) method, its principle of work is that the outgoing laser beam of large-caliber laser interferometer becomes linearly polarized light through polaroid, adjustment polarization direction allows the polarization state of laser beam be parallel to o axle and the e axle of uniaxial crystal respectively, obtain two width interferograms, obtained the index distribution unevenness of uniaxial crystal by the difference of this two width interferogram.The method shortcoming is: the aperture interferometer 1) relying on external import, and it is expensive, measures cost high; 2) interferometer output center wavelength is fixed, and the uniaxial crystal index of refraction homogeneity that cannot realize under real work wave band is measured; 3) interferometer Output of laser polarization state is fixed, and can not realize the switching of orthogonal polarisation state; 4) measure and need place polaroid at the test port place of Output of laser, the extinction ratio of polarization state have impact on the contrast of interference fringe greatly; 5) error that the tilt variation that the method cannot deduct the introducing of interferometer phase-shifter is introduced the measurement of uniaxial crystal index of refraction homogeneity; 6) the method is subject to the impact of ambient windstream disturbance and vibration.
Utility model content
In order to solve Problems existing in background technology, the utility model proposes a kind of heavy caliber uniaxial crystal index of refraction homogeneity measurement mechanism, this device, by heavy caliber uniaxial crystal to be measured two-dimensional scan, realizes heavy caliber uniaxial crystal index of refraction homogeneity and measures; The method is kinetic measurement, does not limit by wavelength, and the impact of external environment air-flow and vibration, and well ensures measuring accuracy.
The technical solution that the utility model adopts is as follows:
The utility model provides a kind of heavy caliber uniaxial crystal index of refraction homogeneity measurement mechanism, and its special character is: described heavy caliber uniaxial crystal index of refraction homogeneity measurement mechanism comprises laser instrument, collimating mirror, the polarizer, heavy caliber uniaxial crystal to be measured, semi-transparent semi-reflecting lens, convergent mirror, Integrating Sphere Laser Power, contracting beam system object lens, contracting beam system eyepiece, Shack-Hartmann wavefront sensor and computing machine; Described collimating mirror, the polarizer and semi-transparent semi-reflecting lens are successively set in the emergent light place light path of laser instrument; The light being incident to semi-transparent semi-reflecting lens carries out reflecting and transmission form reflected light and transmitted light respectively by described semi-transparent semi-reflecting lens; Described convergent mirror to be arranged in the light path of reflected light place and to assemble reflected light in Integrating Sphere Laser Power; Described contracting beam system object lens, contracting beam system eyepiece and Shack-Hartmann wavefront sensor are successively set in the light path of transmitted light place; Heavy caliber uniaxial crystal to be measured is placed between the polarizer and semi-transparent semi-reflecting lens; Described computing machine is connected with Integrating Sphere Laser Power, Shack-Hartmann wavefront sensor and heavy caliber uniaxial crystal to be measured respectively.
Above-mentioned heavy caliber uniaxial crystal index of refraction homogeneity measurement mechanism also comprises two-dimentional scanning mechanism, and described heavy caliber uniaxial crystal to be measured is fixed on two-dimentional scanning mechanism; Described computing machine is connected with two-dimentional scanning mechanism and drives heavy caliber uniaxial crystal to be measured to realize two dimensional motion by two-dimentional scanning mechanism.
Above-mentioned heavy caliber uniaxial crystal index of refraction homogeneity measurement mechanism also comprises the driver for driving the polarizer to rotate; Described computing machine is connected with driver and is rotated by the driver drives polarizer.
The utility model has the advantages that:
The utility model provides a kind of heavy caliber uniaxial crystal index of refraction homogeneity measurement mechanism, utilizes the polarizer to realize the selection of o light and e light, and effectively eliminates the impact of environmental background parasitic light; Utilize convergent mirror and Integrating Sphere Laser Power, guarantee the inner o light of the inclined linearly polarized light polarization direction of the polarizer 3 and uniaxial crystal or e light direction identical; Kinetic measurement before utilizing Shack-Hartmann wavefront sensor to realize system background wavefront, o light wave and before e light wave, the distribution of uniaxial crystal index of refraction homogeneity is obtained again according to computing formula, it is not by wavetilt, external environment flow perturbation and the impact of vibration on measurement result; Two-dimentional scanning mechanism is utilized to realize measuring heavy caliber uniaxial crystal index of refraction homogeneity Two dimensional Distribution to be measured; The utility model can select laser instrument according to actual uniaxial crystal operation wavelength, and do not limit by classic method wavelength, service band is wide, and this measurement mechanism structure is simple, stability is high, reproducible, and measurement result degree of confidence is high.
Accompanying drawing explanation
Fig. 1 is the light channel structure schematic diagram of heavy caliber uniaxial crystal index of refraction homogeneity measurement mechanism provided by the utility model;
Wherein:
1-laser instrument; 2-collimating mirror; The 3-polarizer; 4-heavy caliber uniaxial crystal to be measured; 5-semi-transparent semi-reflecting lens; 6-convergent mirror; 7-Integrating Sphere Laser Power; 8-contracting beam system object lens; 9-contracting beam system eyepiece; 10-Shack-Hartmann wavefront sensor; 11-computing machine;
Embodiment
As shown in Figure 1, the utility model provides a kind of heavy caliber uniaxial crystal index of refraction homogeneity measurement mechanism, and this device is made up of laser instrument 1, collimating mirror 2, the polarizer 3, heavy caliber uniaxial crystal 4 to be measured, semi-transparent semi-reflecting lens 5, convergent mirror 6, Integrating Sphere Laser Power 7, contracting beam system object lens 8, contracting beam system eyepiece 9, Shack-Hartmann wavefront sensor 10 and computing machine 11.Collimating mirror, the polarizer and semi-transparent semi-reflecting lens are successively set in the emergent light place light path of laser instrument; The light being incident to semi-transparent semi-reflecting lens carries out reflecting and transmission form reflected light and transmitted light respectively by semi-transparent semi-reflecting lens; Convergent mirror to be arranged in the light path of reflected light place and to assemble reflected light in Integrating Sphere Laser Power; Contracting beam system object lens, contracting beam system eyepiece and Shack-Hartmann wavefront sensor are successively set in the light path of transmitted light place; Heavy caliber uniaxial crystal to be measured is placed between the polarizer and semi-transparent semi-reflecting lens; Computing machine is connected with Integrating Sphere Laser Power, Shack-Hartmann wavefront sensor and heavy caliber uniaxial crystal to be measured respectively.
In Fig. 1, laser instrument 1 wavelength can use wavelength customization according to actual uniaxial crystal; The polarizer 3 can electronic rotation, and being risen by the circularly polarized light that laser instrument 1 exports is linearly polarized light partially; Heavy caliber uniaxial crystal 4 to be measured is fixed on two-dimentional scanning mechanism, by its two dimensional motion of computing machine 11 control realization.Convergent mirror 6 and Integrating Sphere Laser Power 7 form surveillance, ensure that the linearly polarized light polarization direction through the polarizer 3 is inclined is identical with the inner o light of uniaxial crystal or e light direction.
The utility model concrete steps are: 1. system background wavefront measurement; 2. o light wave pre-test; 3. e light wave pre-test; 4. heavy caliber uniaxial crystal index of refraction homogeneity distribution to be measured calculates.Specific works process is as follows:
1) system background wavefront measurement
The single-mode tail fiber of laser instrument 1 exports the circularly polarized light dispersed, collimation circularly polarized light is exported through collimating mirror 2, inclined by the polarizer 3 is again linearly polarized light, through the reflection of semi-transparent semi-reflecting lens 5 part, part transmission, reflected light focuses in the integrating sphere of supervision Integrating Sphere Laser Power 7 through convergent mirror 6, and measured value is I monitortransmitted light is through contracting beam system object lens 8 and contracting beam system eyepiece 9 contracting bundle, contracting bundle hot spot is received by Shack-Hartmann wavefront sensor 10, regulate orientation and the pitching of Shack-Hartmann wavefront sensor 10, and measure wavefront in real time, the x in wavefront measurement zernike aberration coefficients, when y direction inclined aberration coefficient is less than 0.01 wavelength, think that Shack-Hartmann wavefront sensor attitude adjusted is good, and this wavefront measurements is saved as system background wavefront Φ c(x, y);
2) o light wave pre-test
Heavy caliber uniaxial crystal 4 to be measured is inserted in optical path, and is fixed on two-dimensional scanner.The single-mode tail fiber of laser instrument 1 exports the circularly polarized light dispersed, collimation circularly polarized light is exported through collimating mirror 2, inclined by the polarizer 3 is again linearly polarized light, through heavy caliber uniaxial crystal 4 to be measured transmission, again by the reflection of semi-transparent semi-reflecting lens 5 part, a part of transmission, reflected light focuses in the integrating sphere of supervision Integrating Sphere Laser Power 7 through convergent mirror 6, computing machine 11 controls the polarizer 3 and rotates, as power measurement values I monitortime maximum, namely ensure that the polarization direction of linearly polarized light is identical with heavy caliber uniaxial crystal 4 to be measured inner o light direction.Transmitted light contracts through contracting beam system object lens 8 and eyepiece 9 and restraints, and contracting bundle hot spot is received by Shack-Hartmann wavefront sensor 10.By the zero setting of the x in Shack-Hartmann wavefront sensor wavefront measurements, y direction inclination zernike aberration coefficients, be Φ before obtaining the o light wave of deduction inclined aberration o(x, y), is deducted system background wavefront Φ c(x, y), obtains changing value Φ before o light wave oc(x, y).
3) e light wave pre-test
Guarantee that O light wave pre-test light path is motionless, utilize computing machine 11 to control the polarizer 3 90-degree rotation, and in its fine position, when monitoring the power measurement values I of Integrating Sphere Laser Power 7 monitortime maximum, namely ensure that the polarization direction of linearly polarized light is identical with heavy caliber uniaxial crystal 4 to be measured inner e light direction.By the zero setting of the x in Shack-Hartmann wavefront sensor wavefront measurements, y direction inclination zernike aberration coefficients, be Φ before obtaining the e light wave of deduction inclined aberration e(x, y), is deducted system background wavefront Φ c(x, y), obtains changing value Φ before e light wave ec(x, y).
4) heavy caliber uniaxial crystal index of refraction homogeneity distribution to be measured calculates
Changing value Φ before o light wave oc(x, y) reflects crystal pro cessing error and o optical index heterogeneity, that is:
Φ o c ( x , y ) = Φ o ( x , y ) - Φ c ( x , y ) ≈ ( n ‾ o - 1 ) · δ d - - - ( 1 )
In formula, for heavy caliber uniaxial crystal o optical index nominal value to be measured, δ d is heavy caliber uniaxial crystal change value of thickness to be measured.
Before e light wave, changing value is:
Φ e c ( x , y ) = Φ e ( x , y ) - Φ c ( x , y ) ≈ ( n ‾ e - 1 ) · δ d + δn e ( x , y ) · d ‾ - - - ( 2 )
In formula, for heavy caliber uniaxial crystal e optical index nominal value to be measured; δ n efor heavy caliber uniaxial crystal e optical index changing value to be measured; for heavy caliber uniaxial crystal thickness nominal value to be measured.
Before e light wave, o light wave pre-test results change value ΔΦ (x, y) is relatively:
Δ Φ ( x , y ) = Φ e c ( x , y ) - Φ o c ( x , y ) = ( n ‾ e - n ‾ 0 ) · δ d + δn e ( x , y ) · d ‾ - - - ( 3 )
(1), (3) formula simultaneous can obtain heavy caliber uniaxial crystal index of refraction homogeneity to be measured and is:
δn e ( x , y ) = ( Φ e c ( x , y ) - Φ o c ( x , y ) ) - ( n ‾ e - n ‾ 0 n ‾ 0 - 1 ) · Φ o c ( x , y ) d ‾ - - - ( 4 )
Computing machine 11 controls two-dimensional scanner and makes tested heavy caliber single shaft crystalline substance 4 by fixed step size along two-dimensional direction translation, makes its whole clear aperture of measuring beam relative scanning, thus obtains the unified index of refraction homogeneity distribution of uniaxial crystal.

Claims (3)

1. a heavy caliber uniaxial crystal index of refraction homogeneity measurement mechanism, is characterized in that: described heavy caliber uniaxial crystal index of refraction homogeneity measurement mechanism comprises laser instrument, collimating mirror, the polarizer, heavy caliber uniaxial crystal to be measured, semi-transparent semi-reflecting lens, convergent mirror, Integrating Sphere Laser Power, contracting beam system object lens, contracting beam system eyepiece, Shack-Hartmann wavefront sensor and computing machine; Described collimating mirror, the polarizer and semi-transparent semi-reflecting lens are successively set in the emergent light place light path of laser instrument; The light being incident to semi-transparent semi-reflecting lens carries out reflecting and transmission form reflected light and transmitted light respectively by described semi-transparent semi-reflecting lens; Described convergent mirror to be arranged in the light path of reflected light place and to assemble reflected light in Integrating Sphere Laser Power; Described contracting beam system object lens, contracting beam system eyepiece and Shack-Hartmann wavefront sensor are successively set in the light path of transmitted light place; Heavy caliber uniaxial crystal to be measured is placed between the polarizer and semi-transparent semi-reflecting lens; Described computing machine is connected with Integrating Sphere Laser Power, Shack-Hartmann wavefront sensor and heavy caliber uniaxial crystal to be measured respectively.
2. heavy caliber uniaxial crystal index of refraction homogeneity measurement mechanism according to claim 1, it is characterized in that: described heavy caliber uniaxial crystal index of refraction homogeneity measurement mechanism also comprises two-dimentional scanning mechanism, and described heavy caliber uniaxial crystal to be measured is fixed on two-dimentional scanning mechanism; Described computing machine is connected with two-dimentional scanning mechanism and drives heavy caliber uniaxial crystal to be measured to realize two dimensional motion by two-dimentional scanning mechanism.
3. heavy caliber uniaxial crystal index of refraction homogeneity measurement mechanism according to claim 1 and 2, is characterized in that: described heavy caliber uniaxial crystal index of refraction homogeneity measurement mechanism also comprises the driver for driving the polarizer to rotate; Described computing machine is connected with driver and is rotated by the driver drives polarizer.
CN201520499420.9U 2015-07-10 2015-07-10 Heavy -calibre uniaxial crystal refracting index homogeneity measuring device Withdrawn - After Issue CN204855372U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105158209A (en) * 2015-07-10 2015-12-16 中国科学院西安光学精密机械研究所 Large aperture uniaxial crystal refractive index uniformity measurement apparatus and method thereof
CN109029245A (en) * 2018-07-20 2018-12-18 中国科学院上海光学精密机械研究所 Transmission wavefront detects interferometer
CN112525071A (en) * 2020-11-27 2021-03-19 南京理工大学 Method for inhibiting non-uniformity influence of optical material in large-aperture interferometer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105158209A (en) * 2015-07-10 2015-12-16 中国科学院西安光学精密机械研究所 Large aperture uniaxial crystal refractive index uniformity measurement apparatus and method thereof
CN105158209B (en) * 2015-07-10 2017-10-31 中国科学院西安光学精密机械研究所 Heavy caliber uniaxial crystal index of refraction homogeneity measurement apparatus and method
CN109029245A (en) * 2018-07-20 2018-12-18 中国科学院上海光学精密机械研究所 Transmission wavefront detects interferometer
CN109029245B (en) * 2018-07-20 2020-10-16 中国科学院上海光学精密机械研究所 Transmission wavefront detection interferometer
CN112525071A (en) * 2020-11-27 2021-03-19 南京理工大学 Method for inhibiting non-uniformity influence of optical material in large-aperture interferometer

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