CN110017767B - Space phase-shifting dynamic interferometer based on liquid crystal spatial light modulator and application thereof - Google Patents
Space phase-shifting dynamic interferometer based on liquid crystal spatial light modulator and application thereof Download PDFInfo
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- CN110017767B CN110017767B CN201910357784.6A CN201910357784A CN110017767B CN 110017767 B CN110017767 B CN 110017767B CN 201910357784 A CN201910357784 A CN 201910357784A CN 110017767 B CN110017767 B CN 110017767B
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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Abstract
The invention belongs to the technical field of optics, and particularly relates to a liquid crystal spatial light modulator-based spatial phase-shifting dynamic interferometer and application thereof; the interferometer includes: the invention relates to a high-precision measurement device, in particular to a high-precision measurement device, which comprises a He-Ne laser, a first pinhole filter, a first collimation beam expanding system, a lambda/2 wave plate, a polarization beam splitter prism, a first lambda/4 wave plate, a second collimation beam expanding system, a second pinhole filter, a polaroid, a liquid crystal spatial light modulator, a second lambda/4 wave plate, a standard spherical lens, a measured mirror, an analyzer, an imaging system, a third pinhole filter and a light detector.
Description
Technical Field
The invention belongs to the technical field of optical measurement, and particularly relates to a liquid crystal spatial light modulator-based spatial phase-shifting dynamic interferometer.
Background
The dynamic interferometer can obtain four interferograms with 90-degree phase difference at one time at a certain moment, high-precision measurement is realized, meanwhile, the dynamic interferometer has strong anti-vibration capability, the influence of air flow and environmental vibration on measurement can be eliminated in such a way, and the dynamic interferometer can be applied to field test and inspection of an optical system or optical inspection of various complex environments.
The phase shift is an important link in a dynamic interferometer system, the phase shift is to obtain fringe patterns generated by different phases, and a surface pattern image of a measured surface is obtained through the data relationship among a plurality of fringe patterns. The time phase shift interference technology needs to obtain four phase-shifted images at different moments, is particularly sensitive to environmental vibration and air disturbance, needs to work strictly on an anti-vibration optical platform, is not suitable for optical inspection in a complex environment, and directly influences measurement accuracy. In order to solve the problem, a spatial phase shift method is usually adopted, wherein polarization phase shift is realized through a certain light path design, and a plurality of interferograms are easily obtained by photographing once, so that the method can be used for snapshot-type dynamic measurement of a large-caliber long-focus mirror surface, and the influence of vibration and air turbulence disturbance on the measurement is reduced.
Polarization phase shifting currently has three main schemes:
the existing scheme I is as follows: the united states patent with application publication number 6,304,330,2001, as shown in fig. 1, the front-end interferometer is a traditional tayman green interferometer, the laser emitted from a single longitudinal mode laser is divided into two beams of light by a beam expanding and polarization splitting prism, one beam of light is reflected to a measured mirror as measuring light, the other beam of light is transmitted to a reference mirror as reference light, the light reflected back by the measured mirror and the reference mirror is combined at the polarization splitting prism to be two beams of linearly polarized light with mutually perpendicular polarization directions, the linearly polarized light reaches a holographic element after passing through 1/4 wave plates and spatial filtering, and is finally detected by a high-resolution camera. Linearly polarized light with mutually perpendicular polarization directions passes through an 1/4 wave plate and then is changed into circularly polarized light with opposite rotation directions, and after passing through a polarizing plate, the interference phase difference of the two beams of light is changed along with the change of the polarization directions of the polarizing plate, so that phase diagrams with different phase shifts are generated. If the polarizers are respectively arranged at 0 degrees, 45 degrees, 90 degrees and 135 degrees, the interference phase can be obtained by utilizing a four-step phase shift method.
In order to obtain four interferograms by one-time detection and realize dynamic measurement, in the first conventional scheme, a holographic element is used for dividing two circularly polarized lights of a combined beam into four beams in four directions, the relative phase relationship is not changed, four polarizing plates in different polarization directions are respectively arranged in front of a detector, and a pixel behind each polarizing plate records a phase-shifted interferogram.
The disadvantages of this solution are: 1. because the holographic element is adopted for beam splitting, the whole frame of the detector is divided into four parts, so that the resolution of an interference pattern is reduced by 2 times, and the detection resolution of the large-aperture mirror surface is too low. 2. The four-step phase-shifting processing of the interferograms requires strict position correspondence of spatial sampling points, and because four interferograms have different patterns, the images are difficult to register and low in precision, and measurement errors are caused by the fact that the spatial sampling positions do not correspond easily.
The existing scheme is as follows: there is a "Pixel Phase-Mask Dynamic Interferometer", see Proc. SPIE, 2004, v5531: 304-. As shown in fig. 2, similar to the first prior art, the front-end interferometer system and the phase shift principle are the same, and in order to solve the problems of low resolution and difficult registration of interferograms, the second prior art is improved by using a micro-polarization phase shift array to implement phase shift, and the principle is similar to a bayer filter in a color camera. The size of each element on the micro-polarization phase-shifting array is consistent with that of the detector pixel, and the micro-polarization phase-shifting array is correspondingly coupled and installed one by one. Each pixel of the micro-polarization phase shift array is a micro-polarizer, the polarization directions of the micro-polarization phase shift array are respectively 0 degrees, 45 degrees, 90 degrees and 135 degrees according to the position relations of A, B, C and D, and the micro-polarization phase shift array circulates sequentially and can generate phase shifts of 0 degrees, 90 degrees, 180 degrees and 270 degrees respectively. Thus, the same interpolation cycle processing of the color camera is adopted, three pixels around each pixel and the color camera can detect a group of four-step phase shift to obtain the phase, as shown in fig. 3, four phase shift interferograms with resolution not reduced can be obtained after the processing, and the resolution of the calculated phase map is hardly reduced.
The scheme has the defects that 1, the micro-polarization phase-shifting array has a complex structure and is difficult to manufacture. 2. The micro-polarization phase shift array needs to be aligned and coupled with the detector pixel in strict size and position, the precision requirement is high, and the installation and adjustment difficulty is high.
The existing scheme is three: a chinese patent application with application publication No. CN108387172A discloses a scheme entitled "dynamic interferometer for polarization and phase shift based on optical field detector", which is the same as the front-end interferometer system and phase shift principle of the first and second existing schemes, as shown in fig. 4, and in order to solve the problems of high manufacturing cost and large coupling difficulty, the third existing scheme improves the optical field detector to realize phase shift. The interference pattern is recorded by a micro-lens type light field detector, according to the light field imaging principle, each micro-lens in a micro-lens array is regarded as a macro-pixel and forms a conjugate relation with one point on the interference pattern at the position of a rotating diffusion sheet, and the photosensitive pixel of each area array detector under one micro-lens records light rays passing through the sub-aperture of the corresponding imaging lens, so that the interference intensity of a certain step of phase shifting is recorded, and the sub-aperture interference intensities of polarizing sheets in different directions on the pupil are respectively recorded, thereby obtaining each step of phase shifting of the point on the interference pattern; and then, solving the phase difference between the point measuring light and the reference light by utilizing a multi-step phase-shifting interference algorithm so as to obtain the fluctuation of the corresponding surface type.
The disadvantages of this solution are: 1. the microlens array size limitations may result in low spatial resolution of the calculated wavefront profile, resulting in reduced measurement accuracy. 2. The millimeter-scale microlens array still has the problem of high processing cost.
More importantly, the three schemes are difficult to detect the aspheric surface and the free-form surface element, and the aspheric surface is mainly detected by two methods at present, namely by means of a specially designed aspheric surface compensator, and the other method is a Computer Generated Hologram (CGH). The three schemes all need to add a compensator or a CGH dry plate in front of the measured mirror to be used as a compensating mirror to detect the aspheric surface, the design difficulty of the compensating mirror is high, the requirements on the processing and calibration of the compensating mirror, the installation and adjustment of a detection system and the like are very high, and the installation and adjustment and the manufacturing errors which are difficult to remove exist in the measurement. The compensation mirror corresponding to the aspheric surface with different parameters needs to be specially designed, and the method has no universality. For irregular and non-rotationally symmetric optical free-form surfaces, the compensation cannot be performed through a traditional zero compensator at all, a special CGH (computer generated holography) method is required, but the computer generated holography method also has technical bottlenecks in the detection application of the free-form surfaces: (1) the CGH corresponding to the tested free-form surface one to one needs to be designed, so that the detection universality is greatly reduced, and the processing cost of CGH elements is high, so that the detection cost is correspondingly improved; (2) when the surface shape gradient of the detected surface changes too much, the CGH lines can be very densely scribed, the processing difficulty and errors are directly increased, and the measurement precision is reduced.
However, both the zero compensator and the CGH have the problems of high processing cost, poor universality, difficult detection and adjustment, and the like, so that the measurement range and the measurement accuracy are limited.
Disclosure of Invention
In order to solve the problem of the dynamic interferometry of the aspheric surface and the free-form surface, the invention provides a liquid crystal spatial light modulator-based spatial phase-shifting dynamic interferometer, which utilizes the spatial phase modulation characteristic of the liquid crystal spatial light modulator, namely SLM (Selective laser melting), to carry out spatial phase-shifting interferometry, overcomes the defects caused by the use of a micro-polarization phase-shifting array, solves the problem of surface shape detection of the aspheric surface element and the free-form surface element in the prior art, lays a theoretical foundation for the research of novel dynamic interferometers, and has the advantages of high spatial resolution, low manufacturing cost and easy realization of installation and adjustment.
The purpose of the invention is realized by the following technical scheme:
a liquid crystal spatial light modulator-based spatial phase-shifting dynamic interferometer, comprising: the device comprises a He-Ne laser 1, a first pinhole filter 2, a first collimation and beam expansion system 3, a lambda/2 wave plate 4, a polarization beam splitting prism 5, a first lambda/4 wave plate 6, a second collimation and beam expansion system 7, a second pinhole filter 8, a polaroid 9, a liquid crystal spatial light modulator 10, a second lambda/4 wave plate 11, a standard spherical lens 12, a measured lens 13, an analyzer 14, an imaging system 15, a third pinhole filter 16 and a light detector 17; wherein:
gaussian-based membrane light beams emitted by a He-Ne laser 1 sequentially pass through a microscope objective of a first collimation beam expanding system 3, a first pinhole filter 2 and a telescope objective of the first collimation beam expanding system 3 to be changed into uniform linearly polarized light, the linearly polarized light is changed in azimuth angle after passing through a lambda/2 wave plate 4 and then is divided into two beams of light with mutually vertical polarization directions through a polarization splitting prism 5, one beam of light is used as reference light, the other beam of light is used as measuring light, the reference light and the measuring light respectively pass through a first lambda/4 wave plate 6 and a second lambda/4 wave plate 11 with optical axis directions of 45 degrees and then are changed into circularly polarized light with opposite rotation directions, the reference light emitted by the first lambda/4 wave plate 6 sequentially passes through a microscope objective of a second collimation beam expanding system 7, a second pinhole filter 8, a telescope objective of the second collimation beam expanding system 7 and a polarizer 9 and then is incident to a liquid crystal spatial light modulator 10, the liquid crystal spatial light modulator 10 performs phase modulation on incident reference light, and the modulated light returns to the original path and is transmitted to the analyzer 14 through the polarization beam splitter prism 5; the measuring light emitted by the second lambda/4 wave plate 11 sequentially passes through the standard spherical lens 12 and the measured mirror 13, and the measuring light returns to the original path after being reflected by the measured mirror 13 and is reflected to the analyzer 14 through the polarization beam splitter prism 5; the analyzer 14 is disposed at an angle of 45 degrees, so that the p-wave transmitted by the reference light interferes with the s-wave component reflected by the measurement light, and the interfered light sequentially passes through the imaging system 15 and the third pinhole filter 16 and then enters the photodetector 17 to be observed.
The first collimation beam expanding system 3 and the second collimation beam expanding system 7 do not change the polarization state of the light beams.
The first collimating beam system 3 includes a microscope objective and a telescope objective.
The second collimation and beam expansion system 7 comprises a microscope objective and a telescope objective.
The invention has the beneficial effects that:
the liquid crystal spatial light modulator-based spatial phase-shifting dynamic interferometer provided by the invention realizes dynamic measurement of aspheric surface and free-form surface types, solves the problems of high design difficulty of a compensating mirror, very high requirements on processing and calibration of the compensating mirror, installation and adjustment of a detection system and the like, difficult removal of installation and adjustment and manufacturing errors in measurement, low detection universality and flexibility of aspheric surface and free-form surface elements and the problem that CGH dry plates in a computer generated holography method need to be in one-to-one correspondence with the measured free-form surfaces; the SLM is used for replacing the micro-polarization phase-shifting array to realize spatial phase modulation, the real-time dynamic display function is achieved, the energy consumption is low, the control is easy, the speed is high, high-precision measurement is easy to realize, and the defects caused by the use of the micro-polarization phase-shifting array are overcome.
Drawings
FIG. 1 is a diagram of an interferometer according to a first prior art of the present invention;
FIG. 2 is a diagram of a structure of an interferometer in a second prior art according to the background of the invention;
FIG. 3 is a schematic diagram of an interpolation loop coding scheme provided in the background of the invention;
FIG. 4 is a schematic diagram of a third prior art interferometer according to the background of the present invention;
FIG. 5 is a schematic structural diagram of a spatial phase-shifting dynamic interferometer based on a liquid crystal spatial light modulator provided by the present invention;
FIG. 6 is a schematic diagram of the distribution of phase shift units provided by the present invention.
Wherein: the device comprises a 1He-Ne laser, a 2 first pinhole filter, a 3 first collimation and beam expansion system, a 4 lambda/2 wave plate, a 5 polarization beam splitting prism, a 6 first lambda/4 wave plate, a 7 second collimation and beam expansion system, an 8 second pinhole filter, a 9 polaroid, a 10 liquid crystal spatial light modulator, an 11 second lambda/4 wave plate, a 12 standard spherical lens, a 13 measured lens, a 14 analyzer, a 15 imaging system, a 16 third pinhole filter and a 17 optical detector.
Detailed Description
The invention provides a liquid crystal spatial light modulator-based spatial phase-shifting dynamic interferometer, as shown in fig. 5, comprising: the device comprises a He-Ne laser 1, a first pinhole filter 2, a first collimation and beam expansion system 3, a lambda/2 wave plate 4, a polarization beam splitting prism 5, a first lambda/4 wave plate 6, a second collimation and beam expansion system 7, a second pinhole filter 8, a polaroid 9, a liquid crystal spatial light modulator 10, a second lambda/4 wave plate 11, a standard spherical lens 12, a measured lens 13, an analyzer 14, an imaging system 15, a third pinhole filter 16 and a light detector 17; wherein:
the Gaussian-based membrane light beam emitted by the He-Ne laser 1 passes through a microscope objective of a first collimation beam-expanding system 3, a first pinhole filter 2 and a telescope objective of the first collimation beam-expanding system 3 in sequence to be changed into uniform linearly polarized light, the linearly polarized light is changed in azimuth angle after passing through a lambda/2 wave plate 4 and then is divided into two beams of light with mutually vertical polarization directions through a polarization beam splitter 5, one beam of light is used as reference light, the other beam of light is used as measuring light, the reference light and the measuring light respectively pass through a first lambda/4 wave plate 6 and a second lambda/4 wave plate 11 with optical axis directions of 45 degrees and then are changed into circularly polarized light with opposite rotation directions, the circularly polarized light emitted by the first lambda/4 wave plate 6, namely the reference light, passes through a microscope objective of a second collimation beam-expanding system 7, a second pinhole filter 8, a telescope objective and a polaroid 9 of the second collimation beam-expanding system 7, the linearly polarized light which is changed into the linearly polarized light matched with the liquid crystal spatial light modulator 10 by the polarizing plate 9 is incident to the liquid crystal spatial light modulator 10, the liquid crystal spatial light modulator 10 performs phase modulation on the incident linearly polarized light, namely reference light, the modulated light is returned, and the light is changed into circularly polarized light again to be incident to the polarization beam splitter prism 5 after passing through the first lambda/4 wave plate 6 in the process of returning, and is transmitted to the analyzer 14 through the polarization beam splitter prism 5; the circularly polarized light emitted by the second lambda/4 wave plate 11, namely the measuring light, sequentially passes through the standard spherical lens 12 and the measured mirror 13, the rotation direction of the measuring light after being reflected by the measured mirror 13 is opposite to the rotation direction of the measuring light during incidence, and the measuring light returns in the original path and is reflected to the analyzer 14 through the polarization beam splitter prism 5; the analyzer 14 is disposed at an angle of 45 degrees, so that the p-wave transmitted by the reference light interferes with the s-wave component reflected by the measured light, and the interfered light is incident to the photodetector 17 to be observed after passing through the imaging system 15 and the third pinhole filter 16 in sequence.
The first collimation beam expanding system 3 and the second collimation beam expanding system 7 do not change the polarization state of the light beams.
The first collimating beam system 3 includes a microscope objective and a telescope objective.
The second collimation and beam expansion system 7 comprises a microscope objective and a telescope objective.
The liquid crystal spatial light modulator 10 is called SLM for short, and the light detector 17 is called CCD for short.
A lambda/2 wave plate 4 is arranged, and the polarization component of incident light can be changed by rotating the lambda/2 wave plate 4, so that the relative intensity of two mutually perpendicular components of the incident light can be controlled. Thus, for the measured surfaces with different reflectivities, the light intensity of the reference beam and the light intensity of the measuring beam after passing through the analyzer can be adjusted to be equal, so as to obtain the best fringe contrast without replacing the reference surface; the polarizing plate 9 is used for converting circularly polarized light, namely reference light, emitted by the first lambda/4 wave plate 6 into linearly polarized light matched with the eigen state of the liquid crystal spatial light modulator 10.
In addition, a second collimation and beam expanding system 7 and a second pinhole filter 8 are arranged in front of the liquid crystal spatial light modulator 10, so that the diffraction effect of the liquid crystal spatial light modulator 10 can be inhibited. Since the pixel size of the liquid crystal spatial light modulator 10 is very close to the measurement wavelength, the liquid crystal spatial light modulator 10 is equivalent to a two-dimensional grating, and diffraction is generated, and the diffraction orders other than 0 order may affect the measurement result, so we need to suppress the self-diffraction of the liquid crystal spatial light modulator 10. A beam expanding system and a pinhole filter are arranged in front of the liquid crystal spatial light modulator 10, light of other diffraction orders except 0 order is filtered, and only 0 order light is left to pass through the beam splitter.
In the present invention, since the two light beams have different polarization directions, the two light beams are linearly polarized by using the analyzer 14 and then interfere with each other. Different from the interferometer structure of the existing scheme, the scheme realizes phase shifting by using the SLM, and the size of each phase shifting unit on the SLM is consistent with the size of a detector pixel and is in one-to-one corresponding coupling installation.
The phase shift unit on the SLM is a rectangular array formed by arranging a plurality of independent tiny liquid crystal individuals, and each phase shift unit generates phase shifts of 0 degrees, 90 degrees, 180 degrees and 270 degrees according to the position relations of A, B, C and D. The phase modulation of the SLM is controlled by a computer input to the corresponding gray scale pattern. For aspheric and free-form surface measurement, the initial phase is added on the basis of the phase shift, i.e. delta is generated respectively1、Δδ2+90°、Δδ3+180°、Δδ4A phase shift of +270 deg.. Delta delta1、Δδ2、Δδ3、Δδ4Respectively is the theoretical phase value of the aspheric surface or the free-form surface to be measured at the corresponding space position.
In this way, the same interpolation cycle processing of the color camera is adopted, and a group of four phase-shift graphs can be detected to obtain the phase by three pixels around each pixel and the pixel per se, as shown in fig. 3, so that four phase-shift interferograms with non-reduced resolution can be obtained after the processing, the resolution is not reduced by the calculated phase graphs, and meanwhile, the registration is not required.
The distribution pattern of the phase shift unit provided by the invention is shown in FIG. 6.
The scheme of the invention is applied to the measurement of the aspheric surface and the free-form surface, realizes the dynamic interference of the aspheric surface and the free-form surface, solves the problems of low detection universality and flexibility of the aspheric surface and the free-form surface in the prior art, realizes the spatial phase modulation by using the SLM (Selective laser modulation) instead of a micro-polarization phase shift array, has the function of real-time dynamic display, and has the advantages of low energy consumption, easy control, high speed and easy realization of high-precision measurement.
In addition, the scheme calibrates all optical elements in the whole instrument through a standard plane mirror, generates system wave aberration due to manufacturing errors, and generates a phase diagram which is equal to the system wave aberration in size and opposite in direction by utilizing the SLM, so that the system wave aberration is eliminated, and the manufacturing difficulty of the optical elements is reduced.
Claims (3)
1. The space phase-shifting dynamic interferometer based on the liquid crystal spatial light modulator is characterized by comprising: the device comprises a He-Ne laser (1), a first pinhole filter (2), a first collimation beam expanding system (3), a lambda/2 wave plate (4), a polarization beam splitting prism (5), a first lambda/4 wave plate (6), a second collimation beam expanding system (7), a second pinhole filter (8), a polaroid (9), a liquid crystal spatial light modulator (10), a second lambda/4 wave plate (11), a standard spherical lens (12), a measured mirror (13), an analyzer (14), an imaging system (15), a third pinhole filter (16) and an optical detector (17); wherein:
gaussian base membrane light beams emitted by a He-Ne laser (1) sequentially pass through a microscope objective of a first collimation beam expanding system (3), a first pinhole filter (2) and a telescope objective of the first collimation beam expanding system (3) to be changed into uniform linearly polarized light, the linearly polarized light is changed in rear angle through a lambda/2 wave plate (4), then is divided into two beams of light with mutually vertical polarization directions through a polarization beam splitter prism (5), one beam of light is used as reference light, the other beam of light is used as measuring light, the reference light and the measuring light respectively pass through a first lambda/4 wave plate (6) and a second lambda/4 wave plate (11) with 45-degree optical axis directions and then are changed into circularly polarized light with opposite rotation directions, and the reference light emitted by the first lambda/4 wave plate (6) sequentially passes through a microscope objective of a second collimation beam expanding system (7), a second pinhole filter (8), A telescope objective lens and a polaroid (9) of the second collimation and beam expansion system (7) are incident to a liquid crystal spatial light modulator (10), the liquid crystal spatial light modulator (10) performs phase modulation on incident reference light, and a modulated light original path returns and is transmitted to an analyzer (14) through a polarization beam splitter prism (5); the measuring light emitted by the second lambda/4 wave plate (11) sequentially passes through the standard spherical lens (12) and the measured mirror (13), is reflected by the measured mirror (13), returns to the original path, and is reflected to the analyzer (14) by the polarization beam splitter prism (5); the analyzer (14) is arranged at an angle of 45 degrees, so that p waves transmitted by reference light interfere with s-wave components reflected by measuring light, and the interfered light enters the optical detector (17) to be observed after sequentially passing through the imaging system (15) and the third pinhole filter (16).
2. The spatial phase-shifting dynamic interferometer based on the liquid crystal spatial light modulator as claimed in claim 1, wherein the liquid crystal spatial light modulator generates an ideal reference wave surface of an aspheric surface or a free-form surface to be measured, and simultaneously realizes spatial phase shifting and one-time exposure to acquire four interferograms with a phase difference of 90 °.
3. The use of the spatial phase-shifting interferometer based on an LC spatial light modulator according to claim 1, wherein the spatial phase-shifting interferometer based on an LC spatial light modulator is used for aspheric surface and free-form surface profile measurement.
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