CN203964879U - Based on LCD space light modulator aspheric surface calculation holographic interference checking device - Google Patents
Based on LCD space light modulator aspheric surface calculation holographic interference checking device Download PDFInfo
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- CN203964879U CN203964879U CN201420441536.2U CN201420441536U CN203964879U CN 203964879 U CN203964879 U CN 203964879U CN 201420441536 U CN201420441536 U CN 201420441536U CN 203964879 U CN203964879 U CN 203964879U
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Abstract
Based on LCD space light modulator aspheric surface calculation holographic interference checking device, relate to a kind of calculation holographic interference checking device.It comprises digital phase-shifting technique interferometer (1), standard flat reference mirror (2), diaphragm (3), spectroscope (4), beam-expanding collimation mirror (5), zero compensation lens (6), polaroid (8) and LCD space light modulator (9).This device can solve that the optical holography sheet process-cycle is long, processing cost is high and the problem of very flexible; And can overcome simple employing digital phase-shifting technique interferometer and can only measure the aspheric problem of shallow degree.The utility model combines digital phase-shifting technique interferometer with LCD space light modulator, introduce again zero compensation mirror, by double light path principle of interference, realizes aspheric calculation holographic interferometry.The real-time that LCD space light modulator loads hologram can meet aspheric online detection.The utility model is applicable to the calculation holographic of small scale non-spherical reflector and interferes detection.
Description
Technical field
The present invention relates to a kind of calculation holographic interference checking device.
Background technology
The good optical characteristics such as aspherical optical element can be eliminated various aberrations owing to having, and reduces optical energy loss, the image of acquisition high-quality, are widely applied in the fields such as astronomy, Aeronautics and Astronautics, military affairs, industry, medical treatment.A large amount of uses of aspheric mirror impel the process requirements of aspherical optical element rapidly to increase, but the level of aspheric surface detection technique is but the key factor that is restricting aspheric mirror widespread use, therefore the research of aspheric surface detection technique has become the hot issue of contemporary optics fields of measurement.In aspheric surface detection technique, calculate at present holographic interferometry and become with high, the highly sensitive advantage of its measuring accuracy the main path that aspheric surface detects.
2006, Changchun optical precision optical machinery and physical study place infrared with laser engineering on the article " aperture aspherical computed hologram detection system " delivered proposed to write hologram in curved surface substrate, generation standard non-spherical wavefront is carried out the method for non-spherical measuring, has reduced the making precision of computed hologram and compensating glass; The people such as A.G.Poleshchuk in 2009 on OPTICS EXPRESS, publish an article " Combined computer-generated hologram for testing steep aspheric surfaces " propose utilize combined computed hologram to carry out aspheric surface detection, produce test wavefront by phase hologram, amplitude hologram produces reference wavefront, this combination holograms has reduced the wavefront distortion of substrate, has improved measuring accuracy.But the above-mentioned method of mentioning all need to be made specific optical holography sheet for tested aspheric surface size detecting when aspheric surface, process-cycle that need to be longer and higher processing cost, and cannot realize the online detection of aspherical mirror machining process.
Patent of invention " real-time partial zero compensation optics zero-bit aspheric surface face type detection method " (patent No.: CN102374851 A) and utility model " with the calculation holographic aspheric surface interference measuring instrument of liquid crystal display device " (patent No.: CN 2679645 Y) have all proposed the carrier as computed hologram with liquid crystal device, by combining with zero compensation mirror, non-spherical wavefront is carried out to zero compensation to expand the dynamic range of non-spherical measuring.The problem of its existence is: in pick-up unit, optical element is more, not only loses luminous energy larger, and has increased the difficulty of adjustment light path; Transmission-type liquid crystal device diffraction efficiency and resolution are lower; And above-mentioned optical path needs self-developing interferogram process software to carry out analysis to measure result.
Summary of the invention
The utility model is that the optical holography sheet process-cycle is long, processing cost is high and cannot realize the problem of the online detection of aspherical mirror machining process in order to solve; The simple digital phase-shifting technique interferometer that adopts can only be measured the aspheric problem of shallow degree; And optical element is more in existing aspheric surface pick-up unit, light path adjustment difficulty, optical energy attenuation is large, analyzes the problems such as interferogram difficulty, proposes a kind of based on LCD space light modulator aspheric surface calculation holographic interference checking device.
Based on LCD space light modulator aspheric surface calculation holographic interference checking device, it comprises digital phase-shifting technique interferometer 1, standard flat reference mirror 2, diaphragm 3, spectroscope 4, beam-expanding collimation mirror 5, zero compensation lens 6, aspheric mirror to be checked 7, polaroid 8, LCD space light modulator 9 and computing machine 10.
The laser that digital phase-shifting technique interferometer 1 sends is after 2 transmissions of standard flat reference mirror and diaphragm 3 limit bundles, be incident to spectroscope 4, be beamed into transmitted light and reflected light through described spectroscope 4, described transmitted light expands after focusing on zero compensation lens 6 and is incident to aspheric mirror 7 to be checked through beam-expanding collimation mirror 5, and reflect to form test light through aspheric mirror 7 to be checked, described test light, through zero compensation lens 6 and beam-expanding collimation mirror 5, is back to spectroscope 4;
Described reflected light is incident to LCD space light modulator 9 through polaroid 8, obtains reference light through LCD space light modulator 9 modulation; Described reference light is back to spectroscope 4 through polaroid 8.Described test light and reference light interfere, and form interference light, and described interference light, through diaphragm 3 and standard flat reference mirror 2, is back to the imaging system of digital phase-shifting technique interferometer 1;
Described computing machine 10 mono-road output terminal is connected with the input end of LCD space light modulator 9, the other two road input and output sides of described computing machine 10 are connected with output and the input end of digital phase-shifting technique interferometer 1, complete the control task to LCD space light modulator 9 and digital phase-shifting technique interferometer 1.
The beneficial effects of the utility model:
1, digital phase-shifting technique interferometer is combined with LCD space light modulator, overcome simple employing digital phase-shifting technique interferometer and can only measure the aspheric problem of shallow degree;
2, adopt reflective pure phase position LCD space light modulator, its pixel dimension is little, resolution is high, diffraction efficiency is high, and the carrier with this device as record and demonstration calculation holographic, can show the wave aberration relevant to tested aspheric surface in real time;
3, utilize zero compensation lens subsidiary, can reduce to greatest extent the space-bandwidth product of computed hologram, contribute to solve LCD space light modulator restriction to tested aspheric mirror curvature due to less work aperture and limited spatial resolution;
4, light source, standard flat reference mirror and the imaging system of directly utilizing digital phase-shifting technique interferometer, reduced optical system for testing optical element quantity, simplifies the structure, and reduced and debug error.Directly utilize the powerful interferogram process software of digital phase-shifting technique interferometer, without buying or self-developing interferogram analysis software, reduced the difficulty that measurement result is analyzed, improved measuring accuracy.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model;
Fig. 2 is the test arm light path schematic diagram of ZEMAX trace;
Embodiment
Embodiment one, in conjunction with Fig. 1, this embodiment is described, based on LCD space light modulator aspheric surface calculation holographic interference checking device, it comprises digital phase-shifting technique interferometer 1, standard flat reference mirror 2, diaphragm 3, spectroscope 4, beam-expanding collimation mirror 5, zero compensation lens 6, aspheric mirror to be checked 7, polaroid 8, LCD space light modulator 9 and computing machine 10;
The laser that described digital phase-shifting technique interferometer 1 sends is after 2 transmissions of standard flat reference mirror and diaphragm 3 limit bundles, be incident to spectroscope 4, be beamed into transmitted light and reflected light through described spectroscope 4, described transmitted light expands after focusing on zero compensation lens 6 and is incident to aspheric mirror 7 to be checked through beam-expanding collimation mirror 5, and reflect to form test light through aspheric mirror 7 to be checked, described test light, through zero compensation lens 6 and beam-expanding collimation mirror 5, is back to spectroscope 4;
Described reflected light is incident to LCD space light modulator 9 through polaroid 8, obtains reference light through LCD space light modulator 9 modulation; Described reference light is back to spectroscope 4 through polaroid 8.Described test light and reference light interfere, and form interference light, and described interference light, through diaphragm 3 and standard flat reference mirror 2, is back to the imaging system of digital phase-shifting technique interferometer 1.
The difference based on LCD space light modulator aspheric surface calculation holographic interference checking device described in embodiment two, this embodiment and embodiment one is, it also comprises computing machine 10, described computing machine 10 mono-road output terminal is connected with the input end of LCD space light modulator 9, the other two road input and output sides of described computing machine 10 are connected with output and the input end of digital phase-shifting technique interferometer 1, complete the control task to LCD space light modulator 9 and digital phase-shifting technique interferometer 1.
The difference based on LCD space light modulator aspheric surface calculation holographic interference checking device described in embodiment three, this embodiment and embodiment one is, standard flat reference mirror 2 departs from the vertical direction 2 of optical path optical axis spends to 3 degree, avoids its reflected light and interference light again to interfere.
The difference based on LCD space light modulator aspheric surface calculation holographic interference checking device described in embodiment four, this embodiment and embodiment one is, LCD space light modulator 9 is the reflective pure phase of electrical addressing position LCD space light modulator.
The difference based on LCD space light modulator aspheric surface calculation holographic interference checking device described in embodiment five, this embodiment and embodiment one is, beam-expanding collimation mirror 5, zero compensation lens 6 and aspheric mirror to be checked 7 want adjustment to coaxial.
The difference based on LCD space light modulator aspheric surface calculation holographic interference checking device described in embodiment six, this embodiment and embodiment one is, the rear focus of zero compensation lens 6 overlaps with the center of curvature of aspheric mirror 7 to be checked.
Principle of work: standard flat reference mirror 2 is adjusted to the angles of spending to 3 degree with respect to the vertical direction inclination 2 of optical path optical axis, the reference light interference that test light that optical system for testing reflects is not reflected with standard flat reference mirror 2, but the light modulated interference of reflecting with LCD space light modulator 9.The rear focus of zero compensation lens 6 overlaps with the center of curvature of aspheric mirror 7 to be checked.Standard flat ripple is divided into two-way by spectroscope 4, and wherein a road light incides aspheric surface 7 to be checked through beam-expanding collimation mirror 5 and zero compensation lens 6, and reflects as test waves; Another Lu Guangjing spectroscope 4 and polaroid 8 incide LCD space light modulator 9, through ovennodulation as with reference to light.Be loaded into the computed hologram in LCD space light modulator 9, calculated by computing machine 10, its principle is: test arm is carried out to ray tracing and ask for wave aberration expression formula and the Zernike coefficient at spectroscope place, obtain wave aberration mathematical model, then obtain the hologram of wave aberration by a kind of calculating holographic coding.Test light and reference light produce interferogram in spectroscope 4 places stack and turn back in the imaging system in digital phase-shifting technique interferometer 1, and are shown by computing machine 10.The interference pattern that the reference light that test light and LCD space light modulator 9 are modulated produces at spectroscope 4 places, interferogram carries aspheric surface face type control information, and the interferogram analysis software of application interferometer can directly obtain aspheric type error.
Claims (6)
1. based on LCD space light modulator aspheric surface calculation holographic interference checking device, it is characterized in that: it comprises digital phase-shifting technique interferometer (1), standard flat reference mirror (2), diaphragm (3), spectroscope (4), beam-expanding collimation mirror (5), zero compensation lens (6), polaroid (8) and LCD space light modulator (9);
The laser that digital phase-shifting technique interferometer (1) sends is after described standard flat reference mirror (2) transmission and diaphragm (3) contracting bundle, be incident to spectroscope (4), be beamed into transmitted light and reflected light through described spectroscope (4), described transmitted light through beam-expanding collimation mirror (5) expand with zero compensation lens (6) focus on after be incident to aspheric mirror to be checked (7), and reflect to form test light through aspheric mirror to be checked (7), described test light, through zero compensation lens (6) and beam-expanding collimation mirror (5), is back to spectroscope (4);
Described reflected light is incident to LCD space light modulator (9) through described polaroid (8), obtains reference light through LCD space light modulator (9) modulation; Described reference light is back to spectroscope (4) through polaroid (8); Described test light and reference light interfere, and form interference light, and described interference light, through diaphragm (3) and standard flat reference mirror (2), is back to the imaging system of digital phase-shifting technique interferometer (1).
2. according to claim 1 based on LCD space light modulator aspheric surface calculation holographic interference checking device, it is characterized in that it also comprises computing machine (10), the output terminal of described computing machine (10) is connected with the input end of LCD space light modulator (9), the other two road input and output sides of described computing machine (10) are connected with output and the input end of digital phase-shifting technique interferometer (1), complete the control task to LCD space light modulator (9) and digital phase-shifting technique interferometer (1).
3. according to claim 1 based on LCD space light modulator aspheric surface calculation holographic interference checking device, it is characterized in that the vertical direction 2 that standard flat reference mirror (2) departs from optical path optical axis spends to 3 degree, avoid its reflected light and interference light again to interfere.
4. according to claim 1 based on LCD space light modulator aspheric surface calculation holographic interference checking device, it is characterized in that LCD space light modulator (9) is the reflective pure phase of electrical addressing position LCD space light modulator.
5. according to claim 1 based on LCD space light modulator aspheric surface calculation holographic interference checking device, it is characterized in that beam-expanding collimation mirror (5), zero compensation lens (6) and aspheric mirror to be checked (7) want adjustment to coaxial.
6. according to claim 1 based on LCD space light modulator aspheric surface calculation holographic interference checking device, it is characterized in that the rear focus of zero compensation lens (6) and the vertex curvature center superposition of aspheric mirror to be checked (7).
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106289107A (en) * | 2016-09-29 | 2017-01-04 | 西安交通大学 | A kind of LC SLM error compensating method and aspheric surface face type detection method thereof |
| CN106598084A (en) * | 2016-12-10 | 2017-04-26 | 中国科学院长春光学精密机械与物理研究所 | Method and device for assembling detected aspheric lens based on zero compensation system |
| CN106950035A (en) * | 2017-02-23 | 2017-07-14 | 西安交通大学 | The device and method of liquid crystal grating interferometry phase modulation of spatial light modulators characteristic |
| CN109708591A (en) * | 2019-03-13 | 2019-05-03 | 茂莱（南京）仪器有限公司 | A kind of detection device of aspherical optical element |
| CN110017767A (en) * | 2019-04-30 | 2019-07-16 | 长春理工大学 | Spatial Phase-shifting Method dynamic interferometer and its application based on LCD space light modulator |
| CN113008148A (en) * | 2021-02-05 | 2021-06-22 | 中国人民解放军国防科技大学 | Variable compensation interference detection system and method for large-gradient phase type strong light element |
| CN113624157A (en) * | 2021-07-26 | 2021-11-09 | 北京理工大学 | Large-deviation aspheric surface double-light-path detection system based on local aberration compensation |
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2014
- 2014-08-06 CN CN201420441536.2U patent/CN203964879U/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106289107A (en) * | 2016-09-29 | 2017-01-04 | 西安交通大学 | A kind of LC SLM error compensating method and aspheric surface face type detection method thereof |
| CN106598084A (en) * | 2016-12-10 | 2017-04-26 | 中国科学院长春光学精密机械与物理研究所 | Method and device for assembling detected aspheric lens based on zero compensation system |
| CN106598084B (en) * | 2016-12-10 | 2019-11-22 | 中国科学院长春光学精密机械与物理研究所 | The assembly method and device of tested aspherical mirror based on zero compensation system |
| CN106950035A (en) * | 2017-02-23 | 2017-07-14 | 西安交通大学 | The device and method of liquid crystal grating interferometry phase modulation of spatial light modulators characteristic |
| CN109708591A (en) * | 2019-03-13 | 2019-05-03 | 茂莱（南京）仪器有限公司 | A kind of detection device of aspherical optical element |
| CN110017767A (en) * | 2019-04-30 | 2019-07-16 | 长春理工大学 | Spatial Phase-shifting Method dynamic interferometer and its application based on LCD space light modulator |
| CN110017767B (en) * | 2019-04-30 | 2021-03-19 | 长春理工大学 | Space phase-shifting dynamic interferometer based on liquid crystal spatial light modulator and application thereof |
| CN113008148A (en) * | 2021-02-05 | 2021-06-22 | 中国人民解放军国防科技大学 | Variable compensation interference detection system and method for large-gradient phase type strong light element |
| CN113008148B (en) * | 2021-02-05 | 2022-06-21 | 中国人民解放军国防科技大学 | Variable compensation interference detection system and method for large-gradient phase type strong light element |
| CN113624157A (en) * | 2021-07-26 | 2021-11-09 | 北京理工大学 | Large-deviation aspheric surface double-light-path detection system based on local aberration compensation |
| CN113624157B (en) * | 2021-07-26 | 2022-08-19 | 北京理工大学 | Large-deviation aspheric surface double-light-path detection system based on local aberration compensation |
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