CN106950035A - The device and method of liquid crystal grating interferometry phase modulation of spatial light modulators characteristic - Google Patents
The device and method of liquid crystal grating interferometry phase modulation of spatial light modulators characteristic Download PDFInfo
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- CN106950035A CN106950035A CN201710100607.0A CN201710100607A CN106950035A CN 106950035 A CN106950035 A CN 106950035A CN 201710100607 A CN201710100607 A CN 201710100607A CN 106950035 A CN106950035 A CN 106950035A
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Abstract
The invention discloses a kind of device and method of liquid crystal grating interferometry phase modulation of spatial light modulators characteristic, this method is simple to operate, with good robustness.The gray-scale map for being loaded into spatial light modulator is made up of three parts, and half screen is binary diffraction grating gray-scale map, second half screen be divided into above and below two parts, wherein load zero gray level as the region of reference, and measured zone is incremented to 255 from zero gray level.As gray value increases, a view picture malposition fringes figure is generated by the reflected beams and+1 order diffraction interference of light that grating is produced of phase-modulation, SLM amount of phase modulation size is calculated by measuring the rate of travel between the cycle of same width interference fringe and malposition fringes, influence of the striped shake to measurement caused by ambient vibration or air turbulence is eliminated, measurement accuracy is improved.This method does not need complicated Optical devices, and with excellent mechanical stability, reaction is quick to be more easy to implementation.
Description
【Technical field】
The invention belongs to technical field of photoelectricity test, it is related to LCD space light modulator (LC-SLM) Phase Modulation Properties
Measurement, more particularly to a kind of method of liquid crystal grating interferometry phase modulation of spatial light modulators characteristic.
【Background technology】
The advantages of based on LC-SLM spatial resolutions height, PLC technology, light weight, obtain extensively should in various fields
With.The linearisation of high accuracy and phase modulation depth scope that many applications are controlled Wave-front phase proposes requirement, and this is just needed
The performance of accurate evaluation spatial light modulator is wanted, or even corrects the phase response parameter of factory pre-sets.
The method of research LC-SLM Phase Modulation Properties is many at present, and traditional detection method is broadly divided into two classes：Interference
Method and diffraction approach.Wherein interferometric method phase measurement rely on bar graph displacement, and dual-beam will be advanced before interference compared with
Long path, the environmental factor such as mechanical oscillation, air turbulence can all cause the change of their optical path differences, cause the bar graph of collection
It is unstable.And diffraction approach is transmitted for vibration and air turbulence with higher robustness based on intensity, but with regard to phase calculation
From the point of view of angle, intensity image is characterized with the cosine value of effective phase difference so that the calculating process of phase estimation is more complicated.
Conventional interference method is incident polarized light vertical incidence spatial light modulator, will be entered using light-splitting device in the optical path
Penetrate light and emergent light is spatially separated from, can so cause the loss of light intensity, influence the accuracy of measurement.And Beijing University of Technology
Strong et al. the research in Panezai and university of Chinese Academy of Sciences Shandong has shown that the result that the incident situation of low-angle and vertical incidence are obtained does not have
There is too big difference.So during measurement SLM Phase Modulation Properties vertical incidence can be replaced with low-angle oblique incidence.
【The content of the invention】
The present invention proposes a kind of device and method of liquid crystal grating interferometry phase modulation of spatial light modulators characteristic.
Experiment is simple, and required instrument cost is low, it is not necessary to complicated Optical devices, overcomes interferometric method incident light and emergent light space point
The problem of from diffraction approach phase estimation complexity, and with good robustness and mechanical stability.
The present invention uses following technical scheme：
The method of liquid crystal grating interferometry phase modulation of spatial light modulators characteristic, it is rapid to eliminate ambient vibration or air
Striped shakes the influence to measurement caused by stream, comprises the following steps：
(1) the combination gray-scale map of design space optical modulator, wherein, the gray-scale map loaded in spatial light modulator is divided into
The vertical diffraction grating of three parts, wherein half screen loading binary, second half screen be divided into above and below two parts, load uniform
Gray level, two parts are respectively measured zone and reference zone up and down, wherein, reference zone loads zero gray level, measurement zone
Domain is gradually increased to 255 from zero gray level；
(2) light beam is gathered：By the laser beam sent from laser through expand, filter, collimate be collimated light beam after, through inclined
The device that shakes obtains linearly polarized light of the direction of vibration parallel to liquid crystal molecule, and polarised light incides spatial light modulator, adopted by CCD camera
Collection：By+1 grade of light of liquid crystal grating diffraction, the outgoing beam by phase-modulation, and without the emergent light by phase-modulation
Beam interferes the interference fringe image of generation；
(3) amount of phase modulation of spatial light modulator is calculated
Calculate the amount of phase modulation of measured zone on malposition fringes figure using relative move of stripe method according to below equation
δ：
The π (Δ/Λ) of δ=2
Wherein, Δ and Λ are respectively striped rate of travel and fringe period width.
Fringe period width Λ computational methods are：Because interference fringe is along horizontal distribution, worn as vertical scan line
Each striped is crossed, scan line and the center line of M striped meet at P respectively0,P1, PMPoint, then fringe spacing vector is V=
(PM-PM-1, P2-P1, P1-P0), fringe period width Λ is：
The computational methods of striped rate of travel Δ are：When two groups of left and right interference fringe produces the relative movement of vertical direction
When, move of stripe direction is judged, two vertical scan lines are each passed through static striped and moving striation, and in every interference fringe
The intersection point of heart line is respectively P0,P1, PMAnd S0,S1,···SM, then stripe displacement vector is T=(P0-S0,P1-
S1,···PM-SM), move of stripe amount Δ is：
The vertical diffraction grating of loading binary in step (1), the gray level for diffraction grating is selected, by one of which bar
Line is set to zero gray level, and remaining fringe gray level level is set to 128.
In step (2), expanded, be filtered using pin hole using microcobjective, collimated using collimation lens,
Wherein, pin hole is simultaneously positioned at the focal position of microcobjective and the focal position of collimation lens.
A kind of device of liquid crystal grating interferometry phase modulation of spatial light modulators characteristic, the laser set gradually,
Microcobjective, pin hole, collimation lens, polarizer, reflective spatial light modulator, CCD camera；The laser, microcobjective,
Pin hole, collimation lens, polarizer are coaxially disposed, and reflective spatial light modulator and laser beam shape are at a certain angle, wherein, pin
Hole is simultaneously positioned at the focal position of microcobjective and the focal position of collimation lens.
The laser uses wavelength for 532nm green laser.
Compared with prior art, the present invention at least has the advantages that：The present invention is except can accurately measure LC-SLM
Phase Modulation Properties, while using the method for SLM self-generating liquid crystal gratings, conventional interference method incident light and outgoing can be overcome
Light is spatially separating and the deficiency such as diffraction approach phase estimation complexity.Compared with other method, this method can eliminate ambient vibration
Or striped caused by air turbulence shakes the influence to measurement accuracy, it is not necessary to complicated Optical devices, with excellent machinery
Stability, reaction is quick and tests easy to operate.
【Brief description of the drawings】
Fig. 1 is the oblique diffraction schematic diagram for being mapped to grating generation of light beam low-angle.
Fig. 2 is liquid crystal grating interferometry phase modulation of spatial light modulators specialty systemizations schematic device.
Fig. 3 is to load gray-scale map integrated mode and simulation result, wherein, figure (a) is integrated mode, and figure (b) is to emulate to tie
Really.
Fig. 4 is the post processing of image process schematic of interference fringe.
Fig. 5 is the calculating schematic diagram of SLM amount of phase modulation.
【Embodiment】
The purpose of the present invention is on the basis of accurately measurement LC-SLM Phase Modulation Properties, to utilize SLM self-generating liquid
The method of brilliant grating, overcomes conventional interference method incident light and emergent light to be spatially separating and the deficiency such as diffraction approach phase estimation complexity.
Specifically, the present invention provides a kind of method of self-generating liquid crystal grating interferometry LC-SLM Phase Modulation Properties, with it
He compares method, and this method can eliminate influence of the striped shake to measurement caused by ambient vibration or air turbulence, and not
The Optical devices of complexity are needed, with excellent mechanical stability, reaction is quick to be more easy to implement.
To achieve the above object, the present invention uses following technical scheme：
A kind of method of liquid crystal grating interferometry phase modulation of spatial light modulators characteristic, comprises the following steps：
(1) selection measurement LC-SLM Phase Modulation Properties region, according to SLM parameter designing, its picture of coding generation correspondence
The combination gray-scale map of element.The gray-scale map loaded on SLM is divided into three parts, the wherein vertical diffraction light of half screen loading binary
Grid, the gray level for diffraction grating is selected, and one of which striped is set into zero gray level (i.e. black), remaining striped ash
Degree level is set to 128 (i.e. grey).Second half screen of SLM be divided into above and below two parts, wherein, top half is measured zone, under
Half portion is divided into reference zone, and two parts load uniform gray level up and down, and reference zone loads zero gray level, measured zone from
Zero gray level is gradually increased to 255.
(2) measuring system device is built；
Refer to shown in Fig. 2, a kind of device of liquid crystal grating interferometry phase modulation of spatial light modulators characteristic, including
The laser 1 that sets gradually, microcobjective 2, pin hole 3, collimation lens 4, polarizer 5, reflective spatial light modulator (LC-
SLM) 6, CCD camera 7.The laser 1, microcobjective 2, pin hole 3, collimation lens 4, polarizer 5 are coaxially disposed, reflective sky
Between optical modulator 6 and laser beam shape it is at a certain angle.
Laser 1 is fixed on platform, and microcobjective 2 is placed in after laser 2, and the pin hole 3 strobed is placed in micro-
At the focal position of object lens 2, collimation lens 4 is placed in after pin hole 3, and pin hole 3 is in the focal position of collimation lens 4, polarization simultaneously
Device 5 is placed in after collimation lens 4, and laser beam is by obtaining collimated light beam after collimation lens 4, light beam low-angle oblique incidence LC-SLM6,
CCD camera gathers the interference fringe of outgoing beam.Computer is connected with reflective LC-SLM, CCD camera respectively by data wire.
Above-mentioned laser uses wavelength for 532nm green laser.
A kind of measurement apparatus of liquid crystal grating interferometry phase modulation of spatial light modulators characteristic, is entered using said apparatus
Row test, operating procedure is as follows：
Experimental system is built, inciding microcobjective from the laser beam of laser emitting is expanded, and is filtered by pin hole
Collimation lens is incided after ripple, through collimated into polarizer is incided after collimated light beam, direction of vibration is obtained parallel to liquid crystal
The linearly polarized light of molecule, polarised light incides LC-SLM, and then light beam is reflexed in CCD camera.Gathered by CCD camera：By
+ 1 grade of light (i.e. from+1 grade of light of left half of screen exit) of liquid crystal grating diffraction, by the outgoing beam of phase-modulation (from survey
Measure the light beam that region is projected), and without the outgoing beam by phase-modulation (i.e. from the outgoing beam of reference zone outgoing)
Interfere the interference fringe image of generation.(diffraction formula of oblique incidence is d (sin φ-sin θ)=m λ, wherein, d is diffraction
Screen periods, θ is the angle of diffraction, and Ф is incidence angle, and m=0, ± 1, ± 2 ... m, are diffraction light level, and R1 and R2 represent directional light
Beam).
(3) calculating of LC-SLM amount of phase modulation；
Gray-scale map on SLM described in load step 1 ,+1 grade of light of liquid crystal optical grating diffraction is gathered, by phase by CCD camera
The outgoing beam of position modulation, and the interference fringe image produced without the outgoing beam interference by phase-modulation.With survey
Measure region loading gray value to be incremented by, dislocation movement will occur for striped, and the corresponding striped of reference zone is held essentially constant.Use
The amount of phase modulation of measured zone is calculated on a view picture malposition fringes figure with respect to move of stripe method.
Post processing of image first is carried out to the interference fringe collected, LC-SLM amount of phase modulation δ can utilize interference fringe
Rate of travel obtain, be above-mentioned relative move of stripe method, computing formula is as follows；
The π (Δ/Λ) of δ=2
Striped rate of travel and fringe period width in formula are respectively Δ and Λ, and the acquisition of the two parameters can lead to
The calculating of the spacing method of average is crossed to realize.
Refer to shown in Fig. 5, because interference fringe is along horizontal distribution, make vertical scan line through each striped, scanning
The center line of line and M striped meets at P respectively0,P1, PMPoint, then fringe spacing vector is V=(PM-PM-1,
P2-P1, P1-P0), fringe period width Λ is：
When two groups of left and right interference fringe produces the relative movement of vertical direction, move of stripe direction is judged, two vertical
Scan line is each passed through static striped and moving striation, and the intersection point with every interference fringe center line is respectively P0,P1,
PMAnd S0,S1,···SM, then stripe displacement vector is T=(P0-S0,P1-S1,···PM-SM), move of stripe amount Δ is：
Compared with prior art, the present invention has prominent substantive distinguishing features and significant advantage as follows：The present invention except
LC-SLM Phase Modulation Properties can be accurately measured, while using the method for SLM self-generating liquid crystal gratings, conventional dry can be overcome
Relate to method incident light and emergent light is spatially separating and the deficiency such as diffraction approach phase estimation complexity.Compared with other method, this new side
Method can eliminate influence of the striped shake to measurement accuracy caused by ambient vibration or air turbulence, it is not necessary to complicated optics dress
Put, with excellent mechanical stability, reaction is quick and tests easy to operate.
The implementation to technical solution of the present invention is described in further detail below in conjunction with the accompanying drawings, a kind of liquid crystal grating interference
The method of measurement space optical modulator Phase Modulation Properties, it is realized by following steps：
(1) selection measurement LC-SLM Phase Modulation Properties region, according to SLM parameter designing, its picture of coding generation correspondence
The combination gray-scale map of element, as shown in Figure 4.The gray-scale map loaded on SLM is divided into three parts, and wherein half screen loading binary is hung down
Straight diffraction grating, the gray level for diffraction grating is selected, and one of which striped is set into zero gray level, by remaining bar
Line gray level is set to 128.Second half screen of SLM be divided into above and below two parts, load uniform gray level, be used as the area of reference
Domain loads zero gray level, and measured zone is gradually increased to 255 from zero gray level.
It is that LC-SLM in step (1) is spatial light modulator to be measured in this example, model RLE-CH04, as
Element is 1024 × 768, and Pixel Dimensions are 9 μm.
Liquid crystal binary diffraction screen periods P in this example is 8 pixels, then the space periodic of diffraction grating is 72 μm.
This example of gray level in to(for) diffraction grating is selected, and is proved by related experiment, and the contrast of interference pattern can be with
The change of diffraction grating fringe gray level value and change because there is the non-constant flicker of instantaneous phase modulation voltage in liquid crystal device
Phenomenon, when the phase difference of fringe-adjusted in grating is π, interference fringe picture will always produce maximum-contrast, so will wherein one
Group striped is set to zero gray level, and remaining fringe gray level level is set into 128.
The lower right-most portion of reference zone corresponding diagram 1 described in this example, and the upper left of measured zone corresponding diagram 1.
(2) measuring system device is built, as shown in Fig. 2 a kind of liquid crystal grating interferometry spatial light modulator phase is adjusted
The system and device of characteristic processed, including laser, microcobjective, pin hole, collimation lens, polarizer, reflective LC-SLM, CCD phase
Machine.Characterized in that, the laser is fixed on platform, microcobjective is placed in after laser, and the pin hole strobed is put
At objective focus positions, and the focal position of collimation lens is in simultaneously, laser beam after collimation lens by obtaining directional light
Beam, light beam low-angle oblique incidence LC-SLM, CCD camera gathers the interference fringe of outgoing beam.Computer is distinguished by data wire
It is connected with reflective LC-SLM, CCD camera.
The laser used in this example uses wavelength, and for 532nm green laser, (visible ray of other wavelength is same
The present apparatus is applicable, simply different to the phase modulation depth of the visible ray of different wave length with a LC-SLM).
The device of other in this example is conventional easy optics.
A kind of measurement apparatus of liquid crystal grating interferometry phase modulation of spatial light modulators characteristic, is entered using said apparatus
Row is tested, and concrete operation step is：
Experimental system is built, inciding microcobjective from the laser beam of laser emitting is expanded, and is filtered by pin hole
Collimation lens is incided after ripple, through collimated into polarizer is incided after collimated light beam, direction of vibration is obtained parallel to liquid crystal
The linearly polarized light of molecule, polarised light incides LC-SLM, and then light beam is reflexed in CCD camera.According to the diffraction of oblique incidence formula
Formula d (sin φ-sin θ)=m λ and space geometry relation, find out the interference position of 0 grade of light and+1 grade of light, and placement CCD camera is adopted
Collect+1 grade of light by liquid crystal grating diffraction, the outgoing beam by phase-modulation, and without the emergent light by phase-modulation
The interference fringe image that beam interferometer is produced.
(3) calculating of LC-SLM amount of phase modulation；
Gray-scale map as shown in Figure 1 is loaded on SLM, measuring system device as shown in Figure 2 is built, is adopted by CCD camera
Collect+1 grade of light of liquid crystal optical grating diffraction, the outgoing beam by phase-modulation, and without the outgoing beam by phase-modulation
Interfere the interference fringe image produced.As measured zone loading gray value is incremented by, striped will occur dislocation and move, and reference area
The corresponding striped in domain keeps constant.The phase of measured zone is calculated on a view picture malposition fringes figure using relative move of stripe method
Modulation voltage.
As shown in figure 3, first carrying out post processing of image to the interference fringe collected, LC-SLM amount of phase modulation can be utilized
The rate of travel of interference fringe is obtained, and is above-mentioned relative move of stripe method, computing formula is as follows；
The π (Δ/Λ) (1) of δ=2
Striped rate of travel and fringe period width in formula are respectively Δ and Λ, and the acquisition of the two parameters can lead to
The calculating of the spacing method of average is crossed to realize.Because interference fringe is along horizontal distribution, makees vertical scan line through each striped, sweep
The center line for retouching line and M striped meets at P respectively0,P1, PMPoint, then fringe spacing vector is V=(PM-
PM-1, P2-P1, P1-P0), fringe period width Λ is：
When two groups of left and right interference fringe produces the relative movement of vertical direction, move of stripe direction is judged, two vertical
Scan line is each passed through static striped and moving striation, and the intersection point with every interference fringe center line is respectively P0,P1,
PMAnd S0,S1,···SM, then stripe displacement vector is T=(P0-S0,P1-S1,···PM-SM), move of stripe amount Δ is：
Above-mentioned post processing of image include mean filter, obtain its horizontal gradient figure, then carry out binaryzation, open operation and
Bone is extracted.Non-elaborated part of the present invention is known in the art mature technology.
Compared with prior art, the present invention has prominent substantive distinguishing features and significant advantage as follows：
1st, the present invention utilizes the side of SLM self-generating liquid crystal gratings except can accurately measure LC-SLM Phase Modulation Properties
Method, can overcome conventional interference method incident light and emergent light to be spatially separating and the deficiency such as diffraction approach phase estimation complexity；
2nd, the present invention can eliminate influence of the striped shake to measurement accuracy caused by ambient vibration or air turbulence；
3rd, the Optical devices that the present invention need not be complicated, it is not necessary to accurate alignment, with excellent mechanical stability, reaction
It is quick and test easy to operate；
4th, the present invention can relatively easily collect interference fringe.
Claims (7)
1. the method for liquid crystal grating interferometry phase modulation of spatial light modulators characteristic, to eliminate ambient vibration or air turbulence
Caused striped shakes the influence to measurement, it is characterised in that：Comprise the following steps：
(1) the combination gray-scale map of design space optical modulator, wherein, the gray-scale map loaded in spatial light modulator is divided into three
Point, the wherein vertical diffraction grating of half screen loading binary, second half screen be divided into above and below two parts, load uniform ash
Spend level, two parts are respectively measured zone and reference zone up and down, wherein, reference zone loads zero gray level, measured zone from
Zero gray level is gradually increased to 255；
(2) light beam is gathered：By the laser beam sent from laser through expand, filter, collimate be collimated light beam after, through polarizer
Linearly polarized light of the direction of vibration parallel to long axis of liquid crystal molecule is obtained, polarised light incides spatial light modulator, adopted by CCD camera
Collection：By+1 grade of light of liquid crystal grating diffraction, respectively with the outgoing beam by phase-modulation, and without by phase-modulation
Outgoing beam interferes the interference fringe image of generation；
(3) amount of phase modulation of spatial light modulator is calculated
Calculate the amount of phase modulation δ of measured zone on malposition fringes figure using relative move of stripe method according to below equation：
The π (Δ/Λ) of δ=2
Wherein, Δ and Λ are respectively striped rate of travel and fringe period width.
2. the method for liquid crystal grating interferometry phase modulation of spatial light modulators characteristic according to claim 1, it is special
Levy and be：Fringe period width Λ computational methods are：Because interference fringe is along horizontal distribution, passed through as vertical scan line
Each striped, scan line and the center line of M striped meet at P respectively0,P1... PMPoint, then fringe spacing vector is V=(PM-
PM-1... P2-P1, P1-P0), fringe period width Λ is：
3. the method for liquid crystal grating interferometry phase modulation of spatial light modulators characteristic according to claim 1, it is special
Levy and be：The computational methods of striped rate of travel Δ are：When two groups of left and right interference fringe produces the relative movement of vertical direction
When, move of stripe direction is judged, two vertical scan lines are each passed through static striped and moving striation, and in every interference fringe
The intersection point of heart line is respectively P0,P1... PMAnd S0,S1,…SM, then stripe displacement vector is T=(P0-S0,P1-S1,…PM-SM),
Move of stripe amount Δ is：
4. liquid crystal grating interferometry phase modulation of spatial light modulators characteristic according to any one of claim 1 to 3
Method, it is characterised in that：The vertical diffraction grating of loading binary in step (1), the gray level for diffraction grating is selected, will
One of which striped is set to zero gray level, and remaining fringe gray level level is set to 128.
5. liquid crystal grating interferometry phase modulation of spatial light modulators characteristic according to any one of claim 1 to 3
Method, it is characterised in that：In step (2), expanded, be filtered using pin hole using microcobjective, it is saturating using collimation
Mirror is collimated, wherein, pin hole is simultaneously positioned at the focal position of microcobjective (2) and the focal position of collimation lens (4).
6. a kind of a kind of liquid crystal grating interferometry spatial light modulator phase based on any one of claim 1 to 5
The device of the Phase Modulation Properties of the method for modulating characteristic, it is characterised in that：The laser (1) that sets gradually, microcobjective
(2), pin hole (3), collimation lens (4), polarizer (5), reflective spatial light modulator (6), CCD camera (7)；The laser
(1), microcobjective (2), pin hole (3), collimation lens (4), polarizer (5) are coaxially disposed, reflective spatial light modulator (6) with
Laser beam shape is at a certain angle, wherein, pin hole is simultaneously positioned at the focal position of microcobjective (2) and Jiao of collimation lens (4)
Point position.
7. the device of liquid crystal grating interferometry phase modulation of spatial light modulators characteristic according to claim 6, it is special
Levy and be：The laser uses wavelength for 532nm green laser.
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| CN107941470A (en) * | 2017-11-17 | 2018-04-20 | 西安交通大学 | A kind of device and method of measurement space optical modulator Phase Modulation Properties |
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| CN114323569A (en) * | 2020-09-28 | 2022-04-12 | 武汉邮电科学研究院有限公司 | Device and method for measuring and calibrating phase characteristics of liquid crystal spatial light modulator |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04116710A (en) * | 1990-09-06 | 1992-04-17 | Seiko Instr Inc | Optical pattern recognition device |
| JP3451100B2 (en) * | 1992-01-31 | 2003-09-29 | シチズン時計株式会社 | Holographic TV device |
| CN101556386A (en) * | 2009-05-15 | 2009-10-14 | 哈尔滨理工大学 | Interference type double-imaging measurement device for multi-parameters of liquid crystal spatial light modulator |
| CN101630074A (en) * | 2009-08-18 | 2010-01-20 | 哈尔滨工业大学 | Circular feedback control wave front correction method based on liquid crystal space optical modulator |
| CN201417203Y (en) * | 2009-05-15 | 2010-03-03 | 哈尔滨理工大学 | Multi-parameter interference bi-imaging measurement device of liquid crystal spatial light modulator |
| CN102109414A (en) * | 2010-12-15 | 2011-06-29 | 深圳大学 | Method and device for calibrating phase modulation of spatial light modulators by utilizing heterodyne interference |
| CN103105236A (en) * | 2013-01-18 | 2013-05-15 | 电子科技大学 | Method used for liquid crystal optical phase modulator phase detection |
| CN203964879U (en) * | 2014-08-06 | 2014-11-26 | 哈尔滨理工大学 | Based on LCD space light modulator aspheric surface calculation holographic interference checking device |
| CN104655291A (en) * | 2015-03-16 | 2015-05-27 | 中国科学院光电技术研究所 | Method for realizing programmable multi-wave lateral shearing interferometer |
| CN204854623U (en) * | 2015-08-28 | 2015-12-09 | 哈尔滨理工大学 | Utilize liquid crystal spatial light modulator's aspheric surface interference detection device |
| CN205620639U (en) * | 2016-04-28 | 2016-10-05 | 长春理工大学 | Device based on transmission -type liquid crystal spatial light modulator wavefront correction |
-
2017
- 2017-02-23 CN CN201710100607.0A patent/CN106950035B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04116710A (en) * | 1990-09-06 | 1992-04-17 | Seiko Instr Inc | Optical pattern recognition device |
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