CN106598084A - Method and device for assembling detected aspheric lens based on zero compensation system - Google Patents
Method and device for assembling detected aspheric lens based on zero compensation system Download PDFInfo
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- CN106598084A CN106598084A CN201611137465.7A CN201611137465A CN106598084A CN 106598084 A CN106598084 A CN 106598084A CN 201611137465 A CN201611137465 A CN 201611137465A CN 106598084 A CN106598084 A CN 106598084A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70591—Testing optical components
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- Automation & Control Theory (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
The invention proposes a method and a related device for assembling a detected aspheric lens based on a zero compensation system. The optical parameters of a zero compensation system are measured accurately, and calculation of the ideal Z-direction position of a detected lens is re-optimized through optical design software. The aspheric optical axis is assembled to coincide with the rotating shaft of a turntable according to the change rules of the tilt term and the coma term in the surface shape detection results when the detected aspheric lens is at the 0-degree and 180-degree positions. Through the method, the X/Y/Z translation position and pitch/yaw posture of the detected aspheric lens can be located precisely, accurate coincidence of the aspheric wave optical axis of the zero compensation system, the optical axis of the detected aspheric lens and the rotating shaft of the turntable is realized, and the detection precision of de-focus, spherical aberration, high-order coma and other surface shape error of the detected aspheric lens is improved.
Description
Technical field
The present invention relates to optical interferometry technical field, more particularly to a kind of tested aspheric based on zero compensation system
The assembly method and relevant apparatus of face mirror.
Background technology
The face shape error of the optical elements such as plane, sphere, aspheric surface in modern lithographic technologies requirement lithographic objective system
Root-mean-square reaches sub- nanometer scale.The optical manufacturing and detection technique in current forward position can easily support coquille and plane
Mirror realizes sub- nanometer scale surface figure accuracy.However, the high-precision surface shape processing of tested aspherical mirror and detection technique still compare
It is difficult complicated, different detection methods and detection means are generally adopted for different tested aspherical mirrors, and null compensator testing
It is the technology for realizing that the high precision test of tested aspherical mirror face shape error is the most frequently used.Tested aspheric is detected using null compensator testing
During the mirror surface-shaped error of face, tested aspherical mirror translates position relative to the X/Y/Z of zero compensation system and pitching/beat attitude must
Accurately must determine, to realize zero compensation system aspherical wavefront optical axis and tested aspherical mirror optical axis coincidence, otherwise tested aspheric
The measurement error of the face shapes such as the out of focus of face mirror, spherical aberration, high-order coma is larger.When using the tested aspherical mirror of circumgyration Accurate Calibration
During asymmetrical surface of revolution shape error, in addition it is also necessary to adjust tested aspherical mirror optical axis and turntable rotating shaft overlaps, otherwise tested aspheric surface
The measurement error of the face such as high-order coma of mirror shape is larger.
When detecting tested aspherical mirror face shape error using null compensator testing, tested aspherical mirror is debug process and can be divided
For：Z-direction location positioning, X/Y are adjusted to location positioning, pitching/beat pose adjustment, tested aspherical mirror optical axis and turntable rotating shaft
Overlap.In prior art, generally determined by optical design software using the optical design parameters of zero compensation system tested non-
The Z-direction position of coquille, the method have ignored zero compensation system optics manufacturing and positioning errors to tested aspherical mirror
The impact of preferable Z-direction position, thus the method cannot the tested aspherical mirror of accurate measurement out of focus and the face shape error such as spherical aberration.X
With Y-direction location positioning and pitching/beat pose adjustment generally according to tested aspherical mirror shape interfere testing result inclination and
Coma item is adjusted.When aspherical mirror face shape error tested using circumgyration Accurate Calibration, need tested aspherical mirror
Optical axis is accurately adjusted with turntable rotating shaft and is overlapped, and traditional method typically replaces aspheric surface using tested aspherical mirror outer rim central shaft
Optical axis, rotates tested aspherical mirror by precise rotating platform, measures tested aspherical mirror outer rim jerk value using inductance instrument, by adjusting
The relative position (X/Y is translated and pitching/beat attitude) of whole tested aspherical mirror and turntable until inductance instrument jerk value minimum with
Realize that aspheric surface optical axis is overlapped with turntable rotating shaft.However, the method have ignored tested aspherical mirror outer rim cylindricity mismachining tolerance
And the deviation of outer rim central shaft and aspheric surface optical axis, above-mentioned error source will affect the face shapes such as the high-order coma of tested aspherical mirror
Measuring accuracy.
The content of the invention
In view of this, embodiments provide a kind of assembling side of the tested aspherical mirror based on zero compensation system
Method and relevant apparatus, can improve null compensator testing and detect smart by the location positioning of microscopy during tested aspherical mirror face shape error
Degree, and zero compensation system aspherical wavefront optical axis, tested aspherical mirror optical axis and turntable rotating shaft debug precision.
In a first aspect, the present invention provides a kind of assembly method of the tested aspherical mirror based on zero compensation system, including：
The actual measurement parameter of all optical elements of measurement zero compensation system, wherein the actual measurement parameter includes surface curvature half
Airspace d0 between footpath R, center thickness d and optical material refractive index n, and all optical elements；
In optical design model according to actual measurement parameter input zero compensation system；
The airspace of tested aspherical mirror and the zero compensation system terrestrial surveyed using laser mirror surface position finder be according to
According to, by five dimension adjust platforms tested aspherical mirror is adjusted to preferable Z-direction position；
Tested aspherical mirror optical axis is turned with the precision when demarcating tested aspherical mirror face shape error using precise rotating platform
The turntable rotating shaft adjustment of platform overlaps；
The X/Y of tested aspherical mirror is adjusted according to the coma item and inclination item of tested aspherical mirror shape testing result
Translation location positioning and pitching/beat attitude；
When tested aspherical mirror X/Y/Z translation positions and pitching/beat attitude be in preferable test position, adjust institute
Zero compensation system aspherical wavefront optical axis, the tested aspherical mirror optical axis and the turntable rotating shaft are stated to inregister, with reality
Apply the tested aspherical mirror face shape error of circumgyration Accurate Calibration.
Alternatively, by the tested aspherical mirror light during the tested aspherical mirror face shape error of utilization precise rotating platform demarcation
Axle is overlapped with the turntable rotating shaft adjustment of the precise rotating platform, including：
The tested aspherical mirror optical axis is equivalent to straight with the aspheric surface best fit sphere centre of sphere through aspheric vertex of surface
Line；
The adjustment of the best fit ball centre of sphere is overlapped with turntable rotating shaft；
The adjustment of aspheric vertex of surface is overlapped with the turntable rotating shaft；
Iteration is realizing the tested aspherical mirror optical axis and the turntable rotating shaft inregister.
Alternatively, the coma item according to tested aspherical mirror shape testing result and inclination item are adjusted tested non-
The X/Y translation location positioning of coquille and pitching/beat attitude, including：
Tested aspherical mirror is made in dry by the X/Y translations and pitching/beat attitude that adjust the tested aspherical mirror
Interferogram inclination striped is adjusted to zero striped by the confocal detection position of interferometer and zero compensation system；
The face shape error of tested aspherical mirror is detected using interferometer, wherein, when the inclination item in testing result it is larger, then
Pitching/the beat of tested aspherical mirror is adjusted so that the inclination item in testing result reduces；
The X/Y translations for adjusting the tested aspherical mirror reduce the coma item in the testing result, and then cause institute
The inclination item increase in testing result is stated, then the pitching/beat attitude of tested aspherical mirror is adjusted to reduce inclination item；
Set-up procedure is so that aspheric surface interferes inclination item and coma Xiang Jun in testing result to level off to zero repeatedly, to complete
The X/Y translation positions of tested aspherical mirror and pitching/beat pose adjustment, realize zero compensation system aspherical wavefront optical axis and quilt
Inspection aspherical mirror optical axis inregister.
Alternatively, when the utilization precise rotating platform demarcates tested aspherical mirror face shape error by tested aspherical mirror optical axis with
The turntable rotating shaft adjustment of the precise rotating platform overlaps, including：
When tested aspherical mirror is in initial 0 ° of position, the inclination item of the aspheric surface result of chrono-interferometer detection
Tx1 and Ty1, is then rotated tested aspherical mirror to 180 ° of positions using turntable 5, records the aspheric of the tested aspherical mirror
Inclination the item Tx2 and Ty2 of face testing result, adjusts platform using five dimensions and adjusts tested aspherical mirror bowing relative to precise rotating platform
Face upward/beat makes the inclination item of Aspherical-surface testing result be respectively (Tx1+Tx2)/2 and (Ty1+Ty2)/2；
The above-mentioned adjustment process of repetition so that Aspherical-surface testing when tested aspherical mirror 3 is rotated between 0 ° and 180 ° of positions
As a result inclination item does not change, then the centre of sphere of aspheric surface best fit sphere is overlapped with turntable rotating shaft；
When tested aspherical mirror is in initial 0 ° of position, coma the item Cx1 and Cy1 of Aspherical-surface testing result are recorded；
Tested aspherical mirror is rotated the coma item that Aspherical-surface testing result is recorded to 180 ° of positions using precise rotating platform
Cx2 and Cy2；
The tested aspherical mirror of platform adjustment is adjusted using five dimensions makes Aspherical-surface testing relative to the X/Y directions translation of precise rotating platform
As a result coma item is respectively (Cx1+Cx2)/2 and (Cy1+Cy2)/2；
When repetition is adjusted so that tested aspherical mirror 3 is rotated between 0 ° and 180 ° of positions, Aspherical-surface testing result is intelligent
Difference item does not change, then aspheric vertex of surface is overlapped with turntable rotating shaft；
The aspheric surface best fit ball centre of sphere deviates turntable rotating shaft, needs iteration until tested aspherical mirror is at 0 ° and 180 °
When rotating between position, the inclination item and coma Xiang Jun of Aspherical-surface testing result do not change, then tested aspherical mirror optical axis
With turntable rotating shaft inregister.
Second aspect, a kind of assembling device of the tested aspherical mirror based on zero compensation system of the present invention, including：
Measuring unit, for measuring the actual measurement parameter of all optical elements of zero compensation system, wherein the actual measurement parameter
Including surface curvature radius R, the airspace between center thickness d and optical material refractive index n, and all optical elements
d0；
Input block, in the optical design model according to actual measurement parameter input zero compensation system；
First adjustment unit, for tested aspherical mirror and the zero compensation system bottom surveyed using laser mirror surface position finder
The airspace in face is foundation, adjusts platform by five dimensions and tested aspherical mirror is adjusted to preferable Z-direction position；
Second adjustment unit, by tested aspherical mirror during for demarcating tested aspherical mirror face shape error using precise rotating platform
Optical axis is overlapped with the turntable rotating shaft adjustment of the precise rotating platform；
3rd adjustment unit, for being adjusted according to the coma item of tested aspherical mirror shape testing result and inclination item
The X/Y translation location positioning of tested aspherical mirror and pitching/beat attitude；
4th adjustment unit, is in reason for the X/Y/Z translation positions when tested aspherical mirror and pitching/beat attitude
Think test position, adjust the zero compensation system aspherical wavefront optical axis, the tested aspherical mirror optical axis and the turntable and turn
Axle to inregister, to implement the tested aspherical mirror face shape error of circumgyration Accurate Calibration.
Alternatively, sharp second adjustment unit is additionally operable to：
The tested aspherical mirror optical axis is equivalent to straight with the aspheric surface best fit sphere centre of sphere through aspheric vertex of surface
Line；
The adjustment of the best fit ball centre of sphere is overlapped with turntable rotating shaft；
The adjustment of aspheric vertex of surface is overlapped with the turntable rotating shaft；
Iteration is realizing the tested aspherical mirror optical axis and the turntable rotating shaft inregister.
Alternatively, the 3rd adjustment unit is additionally operable to：
Tested aspherical mirror is made in dry by the X/Y translations and pitching/beat attitude that adjust the tested aspherical mirror
Interferogram inclination striped is adjusted to zero striped by the confocal detection position of interferometer and zero compensation system；
The face shape error of tested aspherical mirror is detected using interferometer, wherein, when the inclination item in testing result it is larger, then
Pitching/the beat of tested aspherical mirror is adjusted so that the inclination item in testing result reduces；
The X/Y translations for adjusting the tested aspherical mirror reduce the coma item in the testing result, and then cause institute
The inclination item increase in testing result is stated, then the pitching/beat attitude of tested aspherical mirror is adjusted to reduce inclination item；
Set-up procedure is so that aspheric surface interferes inclination item and coma Xiang Jun in testing result to level off to zero repeatedly, to complete
The X/Y translation positions of tested aspherical mirror and pitching/beat pose adjustment, realize zero compensation system aspherical wavefront optical axis and quilt
Inspection aspherical mirror optical axis inregister.
Alternatively, second adjustment unit is additionally operable to：
When tested aspherical mirror is in initial 0 ° of position, the inclination item of the aspheric surface result of chrono-interferometer detection
Tx1 and Ty1, is then rotated tested aspherical mirror to 180 ° of positions using turntable 5, records the aspheric of the tested aspherical mirror
Inclination the item Tx2 and Ty2 of face testing result, adjusts platform using five dimensions and adjusts tested aspherical mirror bowing relative to precise rotating platform
Face upward/beat makes the inclination item of Aspherical-surface testing result be respectively (Tx1+Tx2)/2 and (Ty1+Ty2)/2；
The above-mentioned adjustment process of repetition so that Aspherical-surface testing when tested aspherical mirror 3 is rotated between 0 ° and 180 ° of positions
As a result inclination item does not change, then the centre of sphere of aspheric surface best fit sphere is overlapped with turntable rotating shaft；
When tested aspherical mirror is in initial 0 ° of position, coma the item Cx1 and Cy1 of Aspherical-surface testing result are recorded；
Tested aspherical mirror is rotated the coma item that Aspherical-surface testing result is recorded to 180 ° of positions using precise rotating platform
Cx2 and Cy2；
The tested aspherical mirror of platform adjustment is adjusted using five dimensions makes Aspherical-surface testing relative to the X/Y directions translation of precise rotating platform
As a result coma item is respectively (Cx1+Cx2)/2 and (Cy1+Cy2)/2；
When repetition is adjusted so that tested aspherical mirror 3 is rotated between 0 ° and 180 ° of positions, Aspherical-surface testing result is intelligent
Difference item does not change, then aspheric vertex of surface is overlapped with turntable rotating shaft；
The aspheric surface best fit ball centre of sphere deviates turntable rotating shaft, needs iteration until tested aspherical mirror is at 0 ° and 180 °
When rotating between position, the inclination item and coma Xiang Jun of Aspherical-surface testing result do not change, then tested aspherical mirror optical axis
With turntable rotating shaft inregister.
The third aspect, a kind of null compensator testing of the invention detect the detection means of tested aspherical mirror face shape error, including：
Interferometer, zero compensation system, the one or five dimension adjustment platform, precise rotating platform, the two or five dimension adjustment platform, the two or the five dimension adjustment platform
Horizontally disposed, the precise rotating platform is arranged on the two or the five dimension adjustment platform, and the one or the five dimension adjustment platform is arranged on described
On precise rotating platform, tested aspherical mirror is set and is placed on the one or the five dimension adjustment platform, the interferometer is by the zero-bit
Compensation system irradiates the tested aspherical mirror.
Alternatively, the interferometer is conllinear with the zero compensation system centre.
As can be seen from the above technical solutions, the embodiment of the present invention has advantages below：
The assembly method and relevant apparatus of the tested aspherical mirror based on zero compensation system proposed by the present invention, wherein,
By accurate measurement zero compensation system optics parameter, calculated by the preferable Z-direction of microscopy using optical design software re-optimization
Position；Debug with tested aspherical mirror inclines item and coma item in 0 ° and 180 ° of positions Changing Pattern in surface testing result
Aspheric surface optical axis is overlapped with turntable rotating shaft.The method can be accurately positioned the X/Y/Z translations position and pitching of tested aspherical mirror/
Beat attitude, and zero compensation system aspherical wavefront optical axis, tested aspherical mirror optical axis and turntable rotating shaft inregister are realized, from
And improve the accuracy of detection of the face shape errors such as the out of focus of tested aspherical mirror, spherical aberration, high-order coma.
Description of the drawings
Fig. 1 is a kind of assembly method of the tested aspherical mirror based on zero compensation system provided in the embodiment of the present invention
Flow chart；
Fig. 2 is a kind of assembling device of the tested aspherical mirror based on zero compensation system provided in the embodiment of the present invention
Structured flowchart；
Fig. 3 is the detection that a kind of null compensator testing provided in the embodiment of the present invention detects tested aspherical mirror face shape error
The structural representation of device.
Specific embodiment
In order that those skilled in the art more fully understand the present invention program, below in conjunction with the embodiment of the present invention
Accompanying drawing, is clearly and completely described to the technical scheme in the embodiment of the present invention, it is clear that described embodiment is only
The embodiment of a part of the invention, rather than the embodiment of whole.Based on the embodiment in the present invention, ordinary skill people
The every other embodiment obtained under the premise of creative work is not made by member, should all belong to the model of present invention protection
Enclose.
Term " first ", " second ", " the 3rd " " in description and claims of this specification and above-mentioned accompanying drawing
Four " it is etc. for distinguishing similar object, without for describing specific order or precedence.It should be appreciated that so using
Data can exchange in the appropriate case, so as to the embodiments described herein can with except here illustrate or describe in
Order beyond appearance is implemented.Additionally, term " comprising " and " having " and their any deformation, it is intended that cover non-exclusive
Include, for example, process, method, system, product or the equipment for containing series of steps or unit is not necessarily limited to clearly arrange
Those steps for going out or unit, but may include clearly not list or for these processes, method, product or equipment are solid
Other steps having or unit.
With reference to shown in Fig. 1, the present invention provides a kind of assembly method of the tested aspherical mirror based on zero compensation system, bag
Include：
The actual measurement parameter of S101, all optical elements of measurement zero compensation system, wherein the actual measurement parameter includes surface
Airspace d between radius of curvature R, center thickness d and optical material refractive index n, and all optical elements0；
In S102, the optical design model according to actual measurement parameter input zero compensation system；
The airspace of S103, the tested aspherical mirror surveyed using laser mirror surface position finder and zero compensation system terrestrial
Be foundation, platform is adjusted by five dimensions and tested aspherical mirror is adjusted to preferable Z-direction position；
S104, when demarcating tested aspherical mirror face shape error using precise rotating platform by tested aspherical mirror optical axis and the essence
The turntable rotating shaft adjustment of close turntable overlaps；
S105, the coma item according to tested aspherical mirror shape testing result and inclination item are adjusted tested aspherical mirror
X/Y translation location positioning and pitching/beat attitude；
S106, when tested aspherical mirror X/Y/Z translation position and pitching/beat attitude be in preferable test position,
The zero compensation system aspherical wavefront optical axis, the tested aspherical mirror optical axis and the turntable rotating shaft are adjusted to accurate weight
Close, to implement the tested aspherical mirror face shape error of circumgyration Accurate Calibration.
Alternatively, by the tested aspherical mirror light during the tested aspherical mirror face shape error of utilization precise rotating platform demarcation
Axle is overlapped with the turntable rotating shaft adjustment of the precise rotating platform, including：
The tested aspherical mirror optical axis is equivalent to straight with the aspheric surface best fit sphere centre of sphere through aspheric vertex of surface
Line；
The adjustment of the best fit ball centre of sphere is overlapped with turntable rotating shaft；
The adjustment of aspheric vertex of surface is overlapped with the turntable rotating shaft；
Iteration is realizing the tested aspherical mirror optical axis and the turntable rotating shaft inregister.
Alternatively, the coma item according to tested aspherical mirror shape testing result and inclination item are adjusted tested non-
The X/Y translation location positioning of coquille and pitching/beat attitude, including：
Tested aspherical mirror is made in dry by the X/Y translations and pitching/beat attitude that adjust the tested aspherical mirror
Interferogram inclination striped is adjusted to zero striped by the confocal detection position of interferometer and zero compensation system；
The face shape error of tested aspherical mirror is detected using interferometer, wherein, when the inclination item in testing result it is larger, then
Pitching/the beat of tested aspherical mirror is adjusted so that the inclination item in testing result reduces；
The X/Y translations for adjusting the tested aspherical mirror reduce the coma item in the testing result, so that described
Inclination item increase in testing result, then the pitching/beat attitude of tested aspherical mirror is adjusted to reduce inclination item；
Set-up procedure is so that aspheric surface interferes inclination item and coma Xiang Jun in testing result to level off to zero repeatedly, to complete
X/Y translations position and pitching/beat attitude of tested aspherical mirror is adjusted, realize zero compensation system aspherical wavefront optical axis with it is tested
Aspherical mirror optical axis inregister.
Alternatively, when the utilization precise rotating platform demarcates tested aspherical mirror face shape error by tested aspherical mirror optical axis with
The turntable rotating shaft adjustment of the precise rotating platform overlaps, including：
When tested aspherical mirror is in initial 0 ° of position, the inclination item of the aspheric surface result of chrono-interferometer detection
Tx1And Ty1, then tested aspherical mirror is rotated to 180 ° of positions using turntable 5, records the aspheric of the tested aspherical mirror
The inclination item Tx of face testing result2And Ty2, using five dimensions adjust platforms adjust tested aspherical mirror relative to precise rotating platform pitching/
Beat makes the inclination item of Aspherical-surface testing result be respectively (Tx1+Tx2)/2 and (Ty1+Ty2)/2；
The above-mentioned adjustment process of repetition so that Aspherical-surface testing when tested aspherical mirror 3 is rotated between 0 ° and 180 ° of positions
As a result inclination item does not change, then the centre of sphere of aspheric surface best fit sphere is overlapped with turntable rotating shaft；
When tested aspherical mirror is in initial 0 ° of position, the coma item Cx of Aspherical-surface testing result is recorded1And Cy1；
Tested aspherical mirror is rotated the coma item that Aspherical-surface testing result is recorded to 180 ° of positions using precise rotating platform
Cx2And Cy2；
The tested aspherical mirror of platform adjustment is adjusted using five dimensions makes Aspherical-surface testing relative to the X/Y directions translation of precise rotating platform
As a result coma item is respectively (Cx1+Cx2)/2 and (Cy1+Cy2)/2；
When repetition is adjusted so that tested aspherical mirror 3 is rotated between 0 ° and 180 ° of positions, Aspherical-surface testing result is intelligent
Difference item does not change, then aspheric vertex of surface is overlapped with turntable rotating shaft；
The aspheric surface best fit ball centre of sphere deviates turntable rotating shaft, needs iteration until tested aspherical mirror is at 0 ° and 180 °
When rotating between position, the inclination item and coma Xiang Jun of Aspherical-surface testing result do not change, then tested aspherical mirror optical axis
With turntable rotating shaft inregister.
Specifically, the present invention provides a kind of another kind of the assembly method of the tested aspherical mirror based on zero compensation system
Embodiment, comprises the following steps：
S1, before zero compensation system 2 is integrated, the surface curvature of all optical elements of accurate measurement zero compensation system
Radius R, center thickness d and optical material refractive index n；After zero compensation system 2 is integrated, measured using optical non-contact
Airspace d between method (e.g., laser mirror surface position finder) all optical elements of accurate measurement zero compensation system0。
By above-mentioned actual measurement parameter (R, d, n, d0) be input in the optical design model of zero compensation system, using optical design software again
Optimization obtains the preferable Z-direction position of tested aspherical mirror 3.The tested aspherical mirror 3 and zero surveyed using laser mirror surface position finder
Position 2 last one side airspace of compensation system is foundation, adjusts platform 6 by the two or five dimension and tested aspherical mirror 3 is adjusted famous dictum
Think Z-direction position.
S2, when tested 3 face shape error of aspherical mirror is demarcated using precise rotating platform 5 (circumgyration), need tested aspheric
Catoptric light axle is accurately adjusted with precise rotating platform rotating shaft and is overlapped.Tested aspherical mirror optical axis is equivalent to through aspheric vertex of surface and aspheric
The adjustment of the best fit ball centre of sphere is overlapped by the straight line of the face best fit sphere centre of sphere first with precise rotating platform rotating shaft, then will be non-
The adjustment of sphere summit is overlapped with precise rotating platform rotating shaft, and the above-mentioned adjustment process of last iteration is capable of achieving tested aspherical mirror light
Axle and precise rotating platform rotating shaft inregister.
S2 step concrete methods of realizing is as follows：
S01, when tested aspherical mirror 3 is in initial 0 ° of position, the aspheric surface result of the detection of chrono-interferometer 1
Incline item Tx1And Ty1, then tested aspherical mirror 3 is rotated to 180 ° of positions using precise rotating platform 5, record now aspheric surface inspection
Survey the inclination item Tx of result2And Ty2, platform 4 is adjusted using the one or five dimension adjust the bowing relative to precise rotating platform 5 of tested aspherical mirror 3
Face upward/beat make Aspherical-surface testing result inclination item be respectively (Tx1+Tx2)/2 and (Ty1+Ty2)/2.Repetition is above-mentioned to be adjusted
Journey so that when tested aspherical mirror 3 is rotated between 0 ° and 180 ° of positions, the inclination item of Aspherical-surface testing result do not occur to become
Change, now the centre of sphere of aspheric surface best fit sphere is overlapped with precise rotating platform rotating shaft.
S02, when tested aspherical mirror 3 be in initial 0 ° of position when, record Aspherical-surface testing result coma item Cx1With
Cy1, then tested aspherical mirror 3 is rotated to 180 ° of positions using precise rotating platform 5, record now Aspherical-surface testing result it is intelligent
Difference item Cx2And Cy2, platform 4 is adjusted using the one or five dimension adjust X/Y direction translation of the tested aspherical mirror 3 relative to precise rotating platform 5
The coma item of Aspherical-surface testing result is made to be respectively (Cx1+Cx2)/2 and (Cy1+Cy2)/2.The above-mentioned adjustment process of repetition so that quilt
When inspection aspherical mirror 3 is rotated between 0 ° and 180 ° of positions, the coma item of Aspherical-surface testing result does not change, now aspheric
Vertex of surface is overlapped with precise rotating platform rotating shaft.
After S03, implementation steps S02, the aspheric surface best fit ball centre of sphere will be offset slightly from precise rotating platform rotating shaft, therefore need
Iteration above-mentioned steps S01 and step S02, when tested aspherical mirror 3 is rotated between 0 ° and 180 ° of positions, aspheric surface
The inclination item and coma Xiang Jun of testing result does not change, and now tested aspherical mirror optical axis is accurately weighed with precise rotating platform rotating shaft
Close.
S3, the X/Y translation location positioning of tested aspherical mirror 3 and pitching/beat pose adjustment are generally according to tested aspheric
The coma item and inclination item of face mirror surface-shaped testing result is adjusted.
First, using the two or five dimension adjust platform 6 adjust tested aspherical mirror 3 X/Y translation and pitching/beat attitude make by
Inspection aspherical mirror 3 is in the confocal detection position of interferometer 1 and zero compensation system 2, and interferogram inclination striped is adjusted to
Zero striped；
Secondly, detect the face shape error of tested aspherical mirror using interferometer 1, if the inclination item in testing result compared with
Greatly, then pitching/the beat for adjusting tested aspherical mirror 3 using the two or five dimension adjustment platform 6 makes the inclination item in testing result try one's best
It is little；
Again, the X/Y translations for adjusting tested aspherical mirror 3 using the two or five dimension adjustment platform 6 make the coma in testing result
Item is as far as possible little, and now the inclination item in testing result will increase, therefore the pitching/beat that need to adjust tested aspherical mirror 3 again is most
Amount reduces inclination item；
Finally, the above-mentioned set-up procedure of Reusability makes inclination item and coma Xiang Jun in Aspherical-surface testing result level off to
Zero, now the X/Y of tested aspherical mirror 3 translates position and pitching/beat pose adjustment is finished, that is, realize zero compensation system
Aspherical wavefront optical axis and tested aspherical mirror optical axis inregister.
S4, debug after position and the attitude of tested aspherical mirror 3 according to the method for above three step (S1 to S3), it is tested
The X/Y/Z translation positions of aspherical mirror 3 and pitching/beat attitude are in preferable test position, and zero compensation system is non-
Spherical wave optical axis, tested aspherical mirror optical axis and precise rotating platform rotating shaft inregister, it is possible to implement circumgyration Accurate Calibration quilt
Inspection aspherical mirror face shape error.
With reference to shown in Fig. 2, a kind of assembling device of the tested aspherical mirror based on zero compensation system of the present invention, including：
Measuring unit 201, for measuring the actual measurement parameter of all optical elements of zero compensation system, wherein the actual measurement ginseng
Number includes surface curvature radius R, the airspace between center thickness d and optical material refractive index n, and all optical elements
d0；
Input block 202, in the optical design model according to actual measurement parameter input zero compensation system；
First adjustment unit 203, for the tested aspherical mirror and the zero compensation system that are surveyed using laser mirror surface position finder
The airspace of system bottom surface is foundation, adjusts platform by five dimensions and tested aspherical mirror is adjusted to preferable Z-direction position；
Second adjustment unit 204, by tested aspheric during for demarcating tested aspherical mirror face shape error using precise rotating platform
Catoptric light axle is overlapped with the turntable rotating shaft adjustment of the precise rotating platform；
3rd adjustment unit 205, for carrying out according to the coma item of tested aspherical mirror shape testing result and inclination item
Adjust the X/Y translation location positioning and pitching/beat attitude of tested aspherical mirror；
4th adjustment unit 206, locates for the X/Y/Z translation positions when tested aspherical mirror and pitching/beat attitude
In preferable test position, the zero compensation system aspherical wavefront optical axis, the tested aspherical mirror optical axis and described turn are adjusted
Platform rotating shaft to inregister, to implement the tested aspherical mirror face shape error of circumgyration Accurate Calibration.
Alternatively, sharp second adjustment unit 204 is additionally operable to：
The tested aspherical mirror optical axis is equivalent to straight with the aspheric surface best fit sphere centre of sphere through aspheric vertex of surface
Line；
The adjustment of the best fit ball centre of sphere is overlapped with turntable rotating shaft；
The adjustment of aspheric vertex of surface is overlapped with the turntable rotating shaft；
Iteration is realizing the tested aspherical mirror optical axis and the turntable rotating shaft inregister.
Alternatively, the 3rd adjustment unit 205 is additionally operable to：
Tested aspherical mirror is made in dry by the X/Y translations and pitching/beat attitude that adjust the tested aspherical mirror
Interferogram inclination striped is adjusted to zero striped by the confocal detection position of interferometer and zero compensation system；
The face shape error of tested aspherical mirror is detected using interferometer, wherein, when the inclination item in testing result it is larger, then
Pitching/the beat of tested aspherical mirror is adjusted so that the inclination item in testing result reduces；
The X/Y translations for adjusting the tested aspherical mirror reduce the coma item in the testing result, so that described
Inclination item increase in testing result, then the pitching/beat attitude of tested aspherical mirror is adjusted to reduce inclination item；
Set-up procedure is so that aspheric surface interferes inclination item and coma Xiang Jun in testing result to level off to zero repeatedly, to complete
X/Y translations position and pitching/beat attitude of tested aspherical mirror is adjusted, realize zero compensation system aspherical wavefront optical axis with it is tested
Aspherical mirror optical axis inregister.
Alternatively, second adjustment unit 204 is additionally operable to：
When tested aspherical mirror is in initial 0 ° of position, the inclination item of the aspheric surface result of chrono-interferometer detection
Tx1And Ty1, then tested aspherical mirror is rotated to 180 ° of positions using turntable 5, records the aspheric of the tested aspherical mirror
The inclination item Tx of face testing result2And Ty2, using five dimensions adjust platforms adjust tested aspherical mirror relative to precise rotating platform pitching/
Beat makes the inclination item of Aspherical-surface testing result be respectively (Tx1+Tx2)/2 and (Ty1+Ty2)/2；
The above-mentioned adjustment process of repetition so that Aspherical-surface testing when tested aspherical mirror 3 is rotated between 0 ° and 180 ° of positions
As a result inclination item does not change, then the centre of sphere of aspheric surface best fit sphere is overlapped with turntable rotating shaft；
When tested aspherical mirror is in initial 0 ° of position, the coma item Cx of Aspherical-surface testing result is recorded1And Cy1；
Tested aspherical mirror is rotated the coma item that Aspherical-surface testing result is recorded to 180 ° of positions using precise rotating platform
Cx2And Cy2；
The tested aspherical mirror of platform adjustment is adjusted using five dimensions makes Aspherical-surface testing relative to the X/Y directions translation of precise rotating platform
As a result coma item is respectively (Cx1+Cx2)/2 and (Cy1+Cy2)/2；
When repetition is adjusted so that tested aspherical mirror 3 is rotated between 0 ° and 180 ° of positions, Aspherical-surface testing result is intelligent
Difference item does not change, then aspheric vertex of surface is overlapped with turntable rotating shaft；
The aspheric surface best fit ball centre of sphere deviates turntable rotating shaft, needs iteration until tested aspherical mirror is at 0 ° and 180 °
When rotating between position, the inclination item and coma Xiang Jun of Aspherical-surface testing result do not change, then tested aspherical mirror optical axis
With turntable rotating shaft inregister.
With reference to shown in Fig. 3, a kind of null compensator testing of the invention detects the detection means of tested aspherical mirror face shape error, bag
Include：Interferometer 1, the dimension adjustment platform 4 of zero compensation system the 2, the 1st, the dimension adjustment platform 6 of precise rotating platform the 5, the 2nd 5, the described 2nd 5
Dimension adjustment platform 6 is horizontally disposed with, and the precise rotating platform 5 is arranged on the two or the five dimension adjustment platform 6, the one or the five dimension adjustment platform
4 are arranged on the precise rotating platform 5, tested aspherical mirror 3 is set and is placed on the one or the five dimension adjustment platform 4, the interference
Instrument 1 irradiates the tested aspherical mirror 3 by the zero compensation system 2.
Alternatively, the interferometer 1 is conllinear with 2 center of zero compensation system.
Null compensator testing provided in an embodiment of the present invention detects that the detection means of tested aspherical mirror face shape error is used to hold
The assembly method of the previously described tested aspherical mirror based on zero compensation system of row, is not repeated herein.
Null compensator testing proposed by the present invention detects the detection means of tested aspherical mirror face shape error, by accurate measurement
Zero compensation system optics parameter, is calculated by the preferable Z-direction position of microscopy using optical design software re-optimization；With tested non-
Coquille incline in surface testing result in 0 ° and 180 ° of positions the Changing Pattern of item and coma item debug aspheric surface optical axis with
Turntable rotating shaft overlaps.The method can be accurately positioned the X/Y/Z translation positions of tested aspherical mirror and pitching/beat attitude, and
Zero compensation system aspherical wavefront optical axis, tested aspherical mirror optical axis and turntable rotating shaft inregister are realized, it is tested so as to improve
The accuracy of detection of the face shape errors such as the out of focus of aspherical mirror, spherical aberration, high-order coma.
Those skilled in the art can be understood that, for convenience and simplicity of description, the system of foregoing description,
The specific work process of device and unit, may be referred to the corresponding process in preceding method embodiment, will not be described here.
In several embodiments provided herein, it should be understood that disclosed system, apparatus and method can be with
Realize by another way.For example, device embodiment described above is only schematic, for example, the unit
Divide, only a kind of division of logic function can have other dividing mode, such as multiple units or component when actually realizing
Can with reference to or be desirably integrated into another system, or some features can be ignored, or not perform.It is another, it is shown or
The coupling each other for discussing or direct-coupling or communication connection can be the indirect couplings by some interfaces, device or unit
Close or communicate to connect, can be electrical, mechanical or other forms.
The unit as separating component explanation can be or may not be it is physically separate, it is aobvious as unit
The part for showing can be or may not be physical location, you can local to be located at one, or can also be distributed to multiple
On NE.Some or all of unit therein can be selected according to the actual needs to realize the mesh of this embodiment scheme
's.
In addition, each functional unit in each embodiment of the invention can be integrated in a processing unit, it is also possible to
It is that unit is individually physically present, it is also possible to which two or more units are integrated in a unit.Above-mentioned integrated list
Unit both can be realized in the form of hardware, it would however also be possible to employ the form of SFU software functional unit is realized.
One of ordinary skill in the art will appreciate that all or part of step in the various methods of above-described embodiment is can
Instruct related hardware to complete with by program, the program can be stored in a computer-readable recording medium, storage
Medium can include：Read only memory (ROM, Read Only Memory), random access memory (RAM, Random
Access Memory), disk or CD etc..
Assembly method and phase to a kind of tested aspherical mirror based on zero compensation system provided by the present invention above
Close device to be described in detail, for one of ordinary skill in the art, according to the thought of the embodiment of the present invention, concrete real
Apply and will change in mode and range of application, in sum, this specification content should not be construed as the limit to the present invention
System.
Claims (10)
1. a kind of assembly method of the tested aspherical mirror based on zero compensation system, it is characterised in that include：
The actual measurement parameter of the measurement all optical elements of zero compensation system, wherein the actual measurement parameter include surface curvature radius R,
Airspace d between center thickness d and optical material refractive index n, and all optical elements0；
In optical design model according to actual measurement parameter input zero compensation system；
The tested aspherical mirror and the airspace of zero compensation system terrestrial surveyed using laser mirror surface position finder is foundation, is led to
Cross five dimension adjustment platforms tested aspherical mirror to be adjusted to preferable Z-direction position；
By tested aspherical mirror optical axis and the precise rotating platform when demarcating tested aspherical mirror face shape error using precise rotating platform
Turntable rotating shaft adjustment overlaps；
The X/Y translations of tested aspherical mirror are adjusted according to the coma item and inclination item of tested aspherical mirror shape testing result
Location positioning and pitching/beat attitude；
When tested aspherical mirror X/Y/Z translation positions and pitching/beat attitude be in preferable test position, adjustment described zero
Position compensation system aspherical wavefront optical axis, the tested aspherical mirror optical axis and the turntable rotating shaft to inregister, to implement rotation
The tested aspherical mirror face shape error of robin Accurate Calibration.
2. method according to claim 1, it is characterised in that the utilization precise rotating platform demarcates tested aspherical mirror shape
The tested aspherical mirror optical axis is overlapped with the turntable rotating shaft adjustment of the precise rotating platform during error, including：
The tested aspherical mirror optical axis is equivalent to the straight line through aspheric vertex of surface with the aspheric surface best fit sphere centre of sphere；
The adjustment of the best fit ball centre of sphere is overlapped with turntable rotating shaft；
The adjustment of aspheric vertex of surface is overlapped with the turntable rotating shaft；
Iteration is realizing the tested aspherical mirror optical axis and the turntable rotating shaft inregister.
3. method according to claim 1, it is characterised in that described according to the intelligent of tested aspherical mirror shape testing result
Difference item and inclination item are adjusted the X/Y translation location positioning and pitching/beat attitude of tested aspherical mirror, including：
Tested aspherical mirror is made to be in interferometer by the X/Y translations and pitching/beat attitude that adjust the tested aspherical mirror
With the confocal detection position of zero compensation system, interferogram inclination striped is adjusted to into zero striped；
The face shape error of tested aspherical mirror is detected using interferometer, wherein, when the inclination item in testing result is larger, then adjust
Pitching/the beat of tested aspherical mirror is so that the inclination item in testing result reduces；
The X/Y translations for adjusting the tested aspherical mirror reduce the coma item in the testing result, and then cause the inspection
The inclination item increase surveyed in result, then the pitching/beat attitude of tested aspherical mirror is adjusted to reduce inclination item；
Set-up procedure is so that aspheric surface interferes inclination item and coma Xiang Jun in testing result to level off to zero, tested to complete repeatedly
The X/Y translation positions of aspherical mirror and pitching/beat pose adjustment, realize that zero compensation system aspherical wavefront optical axis is non-with tested
Coquille optical axis inregister.
4. method according to claim 1, it is characterised in that the utilization precise rotating platform demarcates tested aspherical mirror shape
Tested aspherical mirror optical axis is overlapped with the turntable rotating shaft adjustment of the precise rotating platform during error, including：
When tested aspherical mirror is in initial 0 ° of position, the inclination item Tx of the aspheric surface result of chrono-interferometer detection1With
Ty1, then tested aspherical mirror is rotated to 180 ° of positions using turntable 5, records the aspheric surface inspection of the tested aspherical mirror
Survey the inclination item Tx of result2And Ty2, platform is adjusted using five dimensions adjust pitching/beat of the tested aspherical mirror relative to precise rotating platform
The inclination item of Aspherical-surface testing result is made to be respectively (Tx1+Tx2)/2 and (Ty1+Ty2)/2；
The above-mentioned adjustment process of repetition so that Aspherical-surface testing result when tested aspherical mirror 3 is rotated between 0 ° and 180 ° of positions
Inclination item do not change, then the centre of sphere of aspheric surface best fit sphere is overlapped with turntable rotating shaft；
When tested aspherical mirror is in initial 0 ° of position, the coma item Cx of Aspherical-surface testing result is recorded1And Cy1；
Tested aspherical mirror is rotated the coma item Cx that Aspherical-surface testing result is recorded to 180 ° of positions using precise rotating platform2With
Cy2；
The tested aspherical mirror of platform adjustment is adjusted using five dimensions makes Aspherical-surface testing result relative to the X/Y directions translation of precise rotating platform
Coma item be respectively (Cx1+Cx2)/2 and (Cy1+Cy2)/2；
The coma item of Aspherical-surface testing result when repetition is adjusted so that tested aspherical mirror 3 is rotated between 0 ° and 180 ° of positions
Do not change, then aspheric vertex of surface is overlapped with turntable rotating shaft；
The aspheric surface best fit ball centre of sphere deviates turntable rotating shaft, needs iteration until tested aspherical mirror is 0 ° and 180 ° of positions
Between when rotating, the inclination item and coma Xiang Jun of Aspherical-surface testing result do not change, then tested aspherical mirror optical axis with turn
Platform rotating shaft inregister.
5. a kind of assembling device of the tested aspherical mirror based on zero compensation system, it is characterised in that include：
Measuring unit, for measuring the actual measurement parameter of all optical elements of zero compensation system, wherein the actual measurement parameter includes
Surface curvature radius R, the airspace d between center thickness d and optical material refractive index n, and all optical elements0；
Input block, in the optical design model according to actual measurement parameter input zero compensation system；
First adjustment unit, for tested aspherical mirror and the zero compensation system terrestrial surveyed using laser mirror surface position finder
Airspace is foundation, adjusts platform by five dimensions and tested aspherical mirror is adjusted to preferable Z-direction position；
Second adjustment unit, by tested aspherical mirror optical axis during for demarcating tested aspherical mirror face shape error using precise rotating platform
Turntable rotating shaft adjustment with the precise rotating platform overlaps；
3rd adjustment unit, it is tested for being adjusted according to the coma item of tested aspherical mirror shape testing result and inclination item
The X/Y translation location positioning of aspherical mirror and pitching/beat attitude；
4th adjustment unit, is in preferable inspection for the X/Y/Z translation positions when tested aspherical mirror and pitching/beat attitude
Location is put, and adjusts the zero compensation system aspherical wavefront optical axis, the tested aspherical mirror optical axis and the turntable rotating shaft extremely
Inregister, to implement the tested aspherical mirror face shape error of circumgyration Accurate Calibration.
6. device according to claim 5, it is characterised in that sharp second adjustment unit is additionally operable to：
The tested aspherical mirror optical axis is equivalent to the straight line through aspheric vertex of surface with the aspheric surface best fit sphere centre of sphere；
The adjustment of the best fit ball centre of sphere is overlapped with turntable rotating shaft；
The adjustment of aspheric vertex of surface is overlapped with the turntable rotating shaft；
Iteration is realizing the tested aspherical mirror optical axis and the turntable rotating shaft inregister.
7. device according to claim 5, it is characterised in that the 3rd adjustment unit is additionally operable to：
Tested aspherical mirror is made to be in interferometer by the X/Y translations and pitching/beat attitude that adjust the tested aspherical mirror
With the confocal detection position of zero compensation system, interferogram inclination striped is adjusted to into zero striped；
The face shape error of tested aspherical mirror is detected using interferometer, wherein, when the inclination item in testing result is larger, then adjust
Pitching/the beat of tested aspherical mirror is so that the inclination item in testing result reduces；
The X/Y translations for adjusting the tested aspherical mirror reduce the coma item in the testing result, and then cause the inspection
The inclination item increase surveyed in result, then the pitching/beat attitude of tested aspherical mirror is adjusted to reduce inclination item；
Set-up procedure is so that aspheric surface interferes inclination item and coma Xiang Jun in testing result to level off to zero, tested to complete repeatedly
The X/Y translation positions of aspherical mirror and pitching/beat pose adjustment, realize that zero compensation system aspherical wavefront optical axis is non-with tested
Coquille optical axis inregister.
8. device according to claim 5, it is characterised in that second adjustment unit is additionally operable to：
When tested aspherical mirror is in initial 0 ° of position, the inclination item Tx of the aspheric surface result of chrono-interferometer detection1With
Ty1, then tested aspherical mirror is rotated to 180 ° of positions using turntable 5, records the aspheric surface inspection of the tested aspherical mirror
Survey the inclination item Tx of result2And Ty2, platform is adjusted using five dimensions adjust pitching/beat of the tested aspherical mirror relative to precise rotating platform
The inclination item of Aspherical-surface testing result is made to be respectively (Tx1+Tx2)/2 and (Ty1+Ty2)/2；
The above-mentioned adjustment process of repetition so that Aspherical-surface testing result when tested aspherical mirror 3 is rotated between 0 ° and 180 ° of positions
Inclination item do not change, then the centre of sphere of aspheric surface best fit sphere is overlapped with turntable rotating shaft；
When tested aspherical mirror is in initial 0 ° of position, the coma item Cx of Aspherical-surface testing result is recorded1And Cy1；
Tested aspherical mirror is rotated the coma item Cx that Aspherical-surface testing result is recorded to 180 ° of positions using precise rotating platform2With
Cy2；
The tested aspherical mirror of platform adjustment is adjusted using five dimensions makes Aspherical-surface testing result relative to the X/Y directions translation of precise rotating platform
Coma item be respectively (Cx1+Cx2)/2 and (Cy1+Cy2)/2；
The coma item of Aspherical-surface testing result when repetition is adjusted so that tested aspherical mirror 3 is rotated between 0 ° and 180 ° of positions
Do not change, then aspheric vertex of surface is overlapped with turntable rotating shaft；
The aspheric surface best fit ball centre of sphere deviates turntable rotating shaft, needs iteration until tested aspherical mirror is 0 ° and 180 ° of positions
Between when rotating, the inclination item and coma Xiang Jun of Aspherical-surface testing result do not change, then tested aspherical mirror optical axis with turn
Platform rotating shaft inregister.
9. a kind of null compensator testing detects the detection means of tested aspherical mirror face shape error, it is characterised in that include：Interfere
Instrument, zero compensation system, the one or five dimension adjustment platform, precise rotating platform, the two or five dimension adjustment platform, the two or the five dimension adjustment platform level
Arrange, the precise rotating platform is arranged on the two or the five dimension adjustment platform, the one or the five dimension adjustment platform is arranged on the precision
On turntable, tested aspherical mirror is set and is placed on the one or the five dimension adjustment platform, the interferometer passes through the zero compensation
Tested aspherical mirror described in system irradiation.
10. device according to claim 9, it is characterised in that the interferometer is with the zero compensation system centre altogether
Line.
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