CN101013027A - High-frequency error detecting apparatus and method for heavy caliber heavy relative aperture aspherical mirror - Google Patents
High-frequency error detecting apparatus and method for heavy caliber heavy relative aperture aspherical mirror Download PDFInfo
- Publication number
- CN101013027A CN101013027A CN 200710034359 CN200710034359A CN101013027A CN 101013027 A CN101013027 A CN 101013027A CN 200710034359 CN200710034359 CN 200710034359 CN 200710034359 A CN200710034359 A CN 200710034359A CN 101013027 A CN101013027 A CN 101013027A
- Authority
- CN
- China
- Prior art keywords
- platform
- aspheric mirror
- interferometer
- beat
- tested
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a high-frequency error detection device and method in the large caliber large relative aperture non-spherical mirror, the device including the five-axis movement adjustment platform with the interferometer focusing platform, the side swing reflecting mirror side swing platform located in front of the interferometer focusing platform, and the measured non-spherical mirror 3D movement adjustment platform located below the side swing reflection mirror side swing platform, and the multiple points supporting machine with the laser wave surface interferometer, the side swing reflection mirrors, and the measured non-spherical mirror installed on the corresponding platforms, and the main control computer with built-in detection data-processing algorithm program connecting with the laser wave surface interferometer. The device uses the main control computer to process the detection data-processing algorithm, which can combine the detected multiple part regions error surface maps into error surface map with medium or high frequency in full caliber, including the initial pose determining method, the overlapping regional data extraction algorithm and the regional data stitching algorithm. The invention is a high-frequency error detection device and method with low-cost, high-precision, high-efficiency in the large caliber large relative aperture non-spherical mirror.
Description
Technical field
Optical testing technology of the present invention field relates generally to a kind of pick-up unit and method at the medium-high frequency face shape error that turns round symmetrical heavy caliber object lens of large relative aperture aspheric mirror.
Background technology
For light gathering power and the peak light intensity that increases system, thereby shorten lens barrel reduction cost simultaneously, a prominent feature of the contour technical optics equipment of astronomical telescope of new generation is the heavy caliber object lens of large relative aperture.People are from the function of time curve prediction of development process, 21 century the relative aperture of large-scale autocollimator primary mirror will roughly be distributed between 1: 1.5～1: 1.For heavy caliber object lens of large relative aperture aspheric mirror, except its low frequency face shape error can influence the resolution of imaging system, reduce outside the peak strength, the medium-high frequency error can cause picture element to worsen equally.Therefore heavy caliber object lens of large relative aperture aspheric mirror also the centering high frequency error strict demand has been proposed, for example NASA (NASA) is root mean square (RMS) 34nm to unified the going up less than the disturbance in the yardstick in 5 cycles of JWST secondary mirror requirement, disturbance in the yardstick in unified last 5～30 cycles is RMS 12nm, and the above interior disturbance of yardstick of unified last 30 cycles is RMS4nm.
Face shape error wavefront interferometer commonly used at polishing stage aspheric mirror detects.For heavy caliber object lens of large relative aperture aspheric mirror, because aspherical degree is big, for example the aspherical degree of bore 500mm, 1: 1.6 paraboloidal mirror of relative aperture is about 29.8 μ m, head and shoulders above the vertical survey scope of wavefront interferometer, cause the interference fringe that forms too close and can't resolve.Adopt compensator the test sphere wavefront transform of interferometer can be become the non-spherical wavefront of mating with tested aspheric mirror, thereby realize interfering the purpose that detects, but existing, compensator itself makes, detects and debug problem, and cross measure resolution depends on the pixel of the used CCD of interferometer and the optical transfer function of interferometer, is difficult to accurately detect medium-high frequency face shape error information usually.
Liu and Lawrence etc. are at " Subaperture testing of aspheres with annularZones ", Y.M.Liu, G.N.Lawrence, and C.L.Koliopoulo, AppliedOptics, 27 (21): 4504-4513, propose in 1988 to adopt the method for endless belt sub-aperture stitching to measure heavy caliber and turn round symmetrical aspheric mirror, need not compensator and increased the vertical survey scope.Hou Xi etc. propose to utilize the part compensator to carry out the endless belt sub-aperture stitching in the embodiment of Chinese patent application number " 200510116819.5 " " a kind of deep aspherical mirror detection system with big bore " and measure, and can solve the many problems of the sub-aperture of the required endless belt of heavy caliber deep aspherical mirror number.Above method can only increase the vertical survey scope, and cross measure resolution still depends on the pixel of the used CCD of interferometer and the optical transfer function of interferometer.
Chen Wei etc. are in Chinese patent application number " 200510086657.5 " " aperture aspherical optical elements medium-high frequency difference detection method ", two-dimensional power spectrum density by the calculating optical element, ask for encircled power, to determine corresponding frequencies scope energy loss, it is a kind of data processing and evaluation method of medium-high frequency error, and does not relate to the detection method of control information itself.
U.S. QED company is at " An automated subaperture stitching interferometerworkstation for spherical and aspherical surfaces ", P.E.Murphy, andG.W.Forbes, Proc.SPIE, Vol.5188,296-307,2003 and United States Patent (USP) " US6956657B2 " in the sub-aperture stitching method of a kind of aspherical mirror shape error-detecting is proposed, tested aspheric mirror is divided into some more small-bore sub-apertures, the measurement range in sub-aperture can cover unified, and has overlapping between each sub-aperture slightly; Adjust tested aspheric mirror or interferometer by 6 motion platforms, the antithetical phrase aperture is carried out zero-bit and is interfered detection, adopt stitching algorithm to obtain unified testing result then, algorithm has mainly compensated inclination, the defocus error between interferometer image deformation error, reference wave surface error and the sub-aperture.Algorithm does not need iteration, by hardware accuracy guarantee reliability.This method is mainly used in the following aspheric mirror of 200mm bore and detects, and for heavy caliber object lens of large relative aperture aspheric mirror, increase because the stroke of platform is adjusted in motion, and accuracy requirement is constant; And load increases, and light path has also extended, and must adopt new light path and structural design.
Summary of the invention
The objective of the invention is to: the technical matters at prior art exists proposes a kind of low cost, high precision, high efficiency heavy caliber object lens of large relative aperture aspheric mirror medium-high frequency error detecting apparatus and method.
To achieve these goals, the heavy caliber object lens of large relative aperture aspheric mirror medium-high frequency error detecting apparatus that the present invention proposes, it comprises by the interferometer focusing platform, be positioned at the beat catoptron beat platform in interferometer focusing platform the place ahead, the 5-axis movement adjustment platform that platform constitutes is adjusted in the tested aspheric mirror three-dimensional motion that is positioned at beat catoptron beat platform below, and be installed in laser wavefront interferometer on the corresponding platform, the beat catoptron, the multi-point support mechanism of tested aspheric mirror, and the interior dress that is connected with the laser wavefront interferometer detects the main control computer of data processing algorithm program.Described 5-axis movement is adjusted the interference zero-bit detection that platform is used for a plurality of subregions on the tested aspheric mirror, main control computer is spliced into the error surface shape figure that comprises the medium-high frequency section on unified according to the error surface shape figure that detects several subregions that data processing algorithm obtains detection, comprise that initial pose determines method, overlapping region data extract algorithm and area data stitching algorithm.
Described interferometer focusing platform comprises angle steel welding base and focusing motion Z shaft assembly, focusing motion Z shaft assembly can be made up of AC servo motor, spring coupling, ball-screw and rolling guide-rail pairs and interferometer installing plate, and kinematic accuracy reaches submillimeter level.
Described beat mirror beat platform comprises channel-section steel welding portal frame and beat motion B shaft assembly, and beat motion assembly can be made up of stepper motor, spring coupling, Worm and worm-wheel gearing and catoptron installation frame, and kinematic accuracy reaches 1 ' magnitude.
Described tested aspheric mirror three-dimensional motion adjusts that platform comprises that platform, Y-axis motion adjustment platform are adjusted in the X-axis motion axial XY of vertical light plane in and around the rotating C axle of optical axis turntable, platform is adjusted in the X-axis motion and Y-axis motion adjustment platform all can be made up of AC servo motor, spring coupling, ball-screw and rolling guide-rail pairs, and kinematic accuracy requires to reach submillimeter level; C axle turntable can be made up of AC servo motor and harmonic gear reducer, and rotary precision reaches 1 ' magnitude.
Heavy caliber object lens of large relative aperture aspheric mirror medium-high frequency error detecting apparatus of the present invention, six motion platforms that detect the following aspheric mirror of 200mm bore with QED company are different, its principal feature is only to need the 5-axis movement adjustment in the testing process, realize easily, and kinematic accuracy is less demanding, thereby cost is low.In order to guarantee the reliability of testing result, supporting with it detection data processing algorithm must iteration optimization, and convergence range wants big.
Adopt the heavy caliber object lens of large relative aperture aspheric mirror medium-high frequency error detection method of described apparatus of the present invention as follows:
The first step: adjust tested aspheric mirror and multi-point support mechanism thereof the position on tested aspheric mirror three-dimensional motion adjustment platform, make the minute surface axis overlap substantially with turret axis;
Second step: according to the position of reflection light point on the CCD of interferometer of tested aspheric mirror, regulate the pitching and the beat of tested aspheric mirror, make tested aspheric mirror return to circle and reflection light point is motionless substantially by multi-point support mechanism;
The 3rd step: by the deflection angle of beat catoptron beat platform adjustment beat catoptron, adjust the position that platform is adjusted tested aspheric mirror, make that the tested subregion on the tested minute surface is positioned at the minute surface center by tested aspheric mirror three-dimensional motion;
The 4th step: with the face shape of the tested aspheric mirror of laser corrugated interferometer measurement central area, five shaft positions are write down in the data deposit;
The 5th step: according to the subregion splitting scheme, adjust the deflection angle of beat catoptron by beat catoptron beat platform, adjust position angle and the position that platform is adjusted tested aspheric mirror by tested aspheric mirror three-dimensional motion, adjust the position of interferometer by the interferometer focusing platform, make interferometer aim on the tested aspheric mirror from the shaft portion zone, measurement is write down five shaft positions from the face shape in axle zone and with the measurement data deposit;
The 6th the step: repeat the 5th the step finish up to all subregion measurements, the measurement data that five shaft positions write down and the laser wavefront interferometer detects is input to main control computer to be handled with the detection data processing algorithm, the error surface shape figure of several subregions that detection is obtained is spliced into the error surface shape figure that comprises the medium-high frequency section on unified, described detection data processing algorithm comprises that initial pose determines method, overlapping region data extract algorithm and area data stitching algorithm.
Described initial pose is determined the position of method according to 5-axis movement in the testing process, calculates the initial pose of the tested relatively aspheric mirror of interferometer automatically.
Described overlapping region data extract algorithm to the containment relationship between the subpoint of desirable face, is determined the overlapped data between any two tested subregions according to data point automatically, does not need to carry out pre-service to detecting data.
Described area data stitching algorithm passes through iteration optimization, the grid scale error of six degree of freedom position and attitude error, best-fit radius of a ball error and interferometer imaging in the compensation testing process, make inconsistency minimum between all overlapped data, all data points and desirable face shape optimum matching simultaneously, thereby do not need accurate priori, described 5-axis movement is adjusted the precision of rectilinear motion of platform at submillimeter level, and rotary precision gets final product in 1 ' magnitude.
Compared with prior art, the invention has the advantages that:
1, heavy caliber object lens of large relative aperture aspheric mirror medium-high frequency error detecting apparatus of the present invention and method are adjusted the interference zero-bit detection that platform carries out a plurality of subregions by 5-axis movement, obtain face shape error on unified by detecting the data processing algorithm splicing, increase the vertical survey scope when improving lateral resolution, thereby can obtain the medium-high frequency error of heavy caliber object lens of large relative aperture aspheric mirror;
2,5-axis movement adjustment platform structure of the present invention is simple, and precision of rectilinear motion is at submillimeter level, and rotary precision gets final product in 1 ' magnitude, thereby has reduced cost;
3, detection data processing algorithm of the present invention can calculate the initial pose of the tested relatively aspheric mirror of interferometer automatically, automatically determine the overlapped data between any two tested subregions, compensated the grid scale error of the six degree of freedom position and attitude error in the testing process, best-fit radius of a ball error and interferometer imaging, thereby do not need to carry out pre-service to detecting data, do not need accurate priori, just can obtain high-precision medium-high frequency error-detecting result expeditiously.
Below in conjunction with accompanying drawing the present invention is described in further details.
Description of drawings
Fig. 1 is a heavy caliber object lens of large relative aperture aspheric mirror medium-high frequency error detecting apparatus synoptic diagram of the present invention.
Fig. 2 is the unified tested subregion division synoptic diagram of.
Fig. 3 is the interferogram that is positioned at tested aspheric mirror central area.
Fig. 4 is the interferogram that is positioned at tested aspheric mirror fringe region.
Fig. 5 is a pick-up unit kinematic configurations synoptic diagram.
Fig. 6 is an overlapping region data extract algorithm synoptic diagram.
Fig. 7 detects the data processing algorithm process flow diagram.
Embodiment
As shown in Figure 1, heavy caliber object lens of large relative aperture aspheric mirror medium-high frequency error detecting apparatus of the present invention has First Five-Year Plan axle motion to adjust platform 1, comprises interferometer focusing platform 11, is positioned at the beat catoptron beat platform 12 in interferometer focusing platform the place ahead, platform 13 is adjusted in the tested aspheric mirror three-dimensional motion that is positioned at beat catoptron beat platform below; Adjust the multi-point support mechanism 4 that installs laser wavefront interferometer 2, beat catoptron 3, tested aspheric mirror respectively on the platform 13 in interferometer focusing platform 11, beat catoptron beat platform 12, tested aspheric mirror three-dimensional motion, the main control computer 5 that interior dress detects the data processing algorithm program is connected 2 with the laser wavefront interferometer.
Wherein interferometer focusing platform 11 comprises angle steel welding base 111 and focusing motion Z shaft assembly 112, focusing motion Z shaft assembly 112 is made up of AC servo motor, spring coupling, ball-screw and rolling guide-rail pairs and interferometer installing plate, and kinematic accuracy reaches submillimeter level.
Beat mirror beat platform 12 comprises channel-section steel welding portal frame 121 and beat motion B shaft assembly 122, and beat motion assembly 122 is made up of stepper motor, spring coupling, Worm and worm-wheel gearing and catoptron installation frame, and kinematic accuracy reaches 1 ' magnitude.
Tested aspheric mirror three-dimensional motion adjusts that platform 13 comprises that platform 131, Y-axis motion adjustment platform 132 are adjusted in the X-axis motion axial XY of vertical light plane in and around the rotating C axle of optical axis turntable 133, platform 131 is adjusted in the X-axis motion and the Y-axis motion is adjusted platform 132 by AC servo motor, spring coupling, ball-screw and rolling guide-rail pairs composition, and kinematic accuracy reaches submillimeter level; C axle turntable 133 is made up of AC servo motor and harmonic gear reducer, and rotary precision reaches 1 ' magnitude.
The laser wavefront interferometer adopts Feisuo (Fizeau) type sphericity interferometer, and test beams is transformed to spherical wave by the transmission ball.The beat catoptron is the plane mirror of surface coating, and surface figure accuracy is PV (Peak-Valley) λ/20, and λ is the used optical maser wavelength of interferometer.Multi-point support mechanism designs according to the physical dimension and the material behavior of tested aspheric mirror, in " advanced Optical manufacture technology " (Yang Li chief editor, Science Press, 2001) detailed argumentation is arranged.In order to reduce the influence of ambient vibration to detecting, suggestion is placed on whole detection device on the air supporting vibration-isolating platform.
The error surface shape figure of several subregions that detection data processing algorithm of the present invention obtains detection is spliced into the error surface shape figure that comprises the medium-high frequency section on unified, comprises that initial pose determines method, overlapping region data extract algorithm and area data stitching algorithm.Initial pose is determined the position of method according to 5-axis movement in the testing process, calculates the initial pose of the tested relatively aspheric mirror of interferometer automatically; Data extract algorithm in overlapping region to the containment relationship between the subpoint of desirable face, is determined the overlapped data between any two tested subregions according to data point automatically; The area data stitching algorithm passes through iteration optimization, the grid scale error of six degree of freedom position and attitude error, best-fit radius of a ball error and interferometer imaging in the compensation testing process, make inconsistency minimum between all overlapped data, all data points and desirable face shape optimum matching simultaneously.
Principle of work of the present invention: see Fig. 2, at first heavy caliber object lens of large relative aperture aspheric mirror is divided into the several portions zone, have overlappingly between the adjacent part zone mutually, All Ranges can cover the unified of tested aspheric mirror; See Fig. 1, tested aspheric mirror and multi-point support mechanism 4 thereof are installed on the three-dimensional motion adjustment platform 13; The spherical wave test beams that interferometer 2 sends is behind beat catoptron 3 beats, become vertical direction by horizontal direction, incide on the subregion of tested aspheric mirror, because the aspherical degree of tested aspheric mirror subregion is little, the test beams reflection is after beat catoptron 3 beats, become horizontal light beam and return interferometer 2, meet to form with the reference beam of interferometer 2 and interfere, thereby the zero-bit that realizes tested aspheric mirror subregion is interfered and detected; Adjust five shaft positions of 5-axis movement platform 1, finish the zero-bit of other subregions on the tested aspheric mirror is interfered detection; Measurement data input computing machine 5 with five shaft positions in the testing process and interferometer 2, utilize and detect the initial pose that data processing algorithm calculates the tested relatively aspheric mirror of interferometer in the testing process of each several part zone automatically, automatically determine the overlapped data between any two tested subregions, pass through iteration optimization at last, six degree of freedom position and attitude error in the compensation testing process, the grid scale error of best-fit radius of a ball error and interferometer imaging, thus realize that error surface shape figure with several subregions is spliced into the error surface shape figure that comprises the medium-high frequency section on unified.
Detection step of the present invention following (referring to Fig. 1):
The first step: adjust tested aspheric mirror and multi-point support mechanism 4 thereof the position on C axle turntable 133, make the minute surface axis overlap substantially with turret axis;
Second step: according to the position of reflection light point on the CCD of interferometer 2 of tested aspheric mirror, regulate the pitching and the beat of tested aspheric mirror, make tested aspheric mirror return to circle and reflection light point is motionless substantially by multi-point support mechanism;
The 3rd step: the deflection angle of adjusting beat catoptron 3 by beat motion B shaft assembly 122, adjust X-axis, the Y-axis position that platform 132 is adjusted tested aspheric mirror by X-axis motion adjustment platform 131 and Y-axis motion, make that the tested subregion on the tested minute surface is positioned at the minute surface center;
The 4th step: measure the face shape of tested aspheric mirror central area, five shaft positions are write down in the data deposit, and the interferogram of central area as shown in Figure 3;
The 5th step: according to the subregion splitting scheme, adjust the deflection angle of beat catoptron 3 by beat motion B shaft assembly 122, adjust the position angle of tested aspheric mirror by C axle turntable 133, adjust the X-axis of platform 131 and the tested aspheric mirror of Y-axis motion adjustment platform 132 adjustment by the X-axis motion, the Y-axis position, adjust the Z shaft position of interferometer 2 by focusing motion Z shaft assembly 112, make interferometer 2 aim on the tested aspheric mirror from the shaft portion zone, measurement is deposited from the face shape in axle zone and with measurement data, write down five shaft positions, the interferogram that is positioned at fringe region as shown in Figure 4;
The 6th step: repeating for the 5th step finishes up to all subregion measurement, five shaft positions records and interferometer measurement data is input in the detection data processing algorithm handles.
Detection data processing algorithm flow process of the present invention is as shown in Figure 7:
The first step: the input data, determine parameters such as the initial pose and the best-fit radius of a ball.The kinematic configurations of heavy caliber object lens of large relative aperture aspheric mirror medium-high frequency error detecting apparatus as shown in Figure 5, interferometer 2 links to each other with pedestal (being static relative to the earth) with focusing motion Z shaft assembly by beat motion B shaft assembly, tested aspheric mirror and multi-point support mechanism 4 thereof adjust platform by C axle turntable, Y-axis motion and link to each other with pedestal with X-axis motion adjustment platform, are serial mechanisms to tested aspheric mirror and multi-point support mechanism 4 thereof again from interferometer 2 to pedestal.At distance test beam focus 0 is r
TsTest sphere wave crest point place set up the { C of detection coordinates system
i, be connected r with interferometer 2
TsVertex curvature radius for the transmission ball of interferometer 2; On the summit of tested aspheric mirror, set up model coordinate systems { C
M, be connected r with tested aspheric mirror
OcVertex curvature radius for tested aspheric mirror.The displacement size of supposing X-axis in the testing process, Y-axis, Z axle, B axle and C axle is respectively x, y, z, β and γ, according to robot kinematics's theory, and model coordinate systems { C
MRelative detection coordinates { the C of system
iPose be transformed to
In the formula
The best-fit ball is meant the test beams spherical wave with tested subregion optimum matching, the best-fit radius of a ball is determined according to being regardless of area division scheme, because the convergence range of detection data processing algorithm of the present invention is big, the initial value of the best-fit radius of a ball also can be taken as the radius-of-curvature of tested subregion central point.
Second step: overlapping region data extract.The measurement data of supposing interferometer (2) on i the subregion is { w
J, i=(u
J, i, v
J, i, φ
J, i), j=1 ..., N
i, φ wherein
J, iBe pixel coordinates (u
J, i, v
J, i) on phase differential, N
iIt is the sampling number on i the subregion.According to the test geometric relationship of sphericity interferometer, measurement data points is at { the C of detection coordinates system
iUnder coordinate obtain by following formula
R in the formula
iBe the best-fit radius of a ball, α
i=τ
i/ r
Ts, its initial value is determined by the inside light path parameter of interferometer (2), also can obtain τ by demarcating
iBe the scale factor between the lateral coordinates on lateral coordinates on the image planes and the CCD image planes.r
iAnd a
iNumerical value can not know accurately that usually its uncertainty compensates by the area data stitching algorithm.
Pose { the g that utilizes the first step to determine
i, the best-fit radius of a ball { r
iAnd scale factor { α
iAfter, measurement data points is transformed to model coordinate systems { C
MUnder coordinate can represent with following formula
At model coordinate systems { C
MUnder all measurement data points in k subregion and i the subregion are all projected on the ideal surfaced of tested aspheric mirror, produce homolographic projection point set { x
J, kAnd { x
J, i.Claim the f of the point in k the subregion
kw
Jo, kDrop in the overlay region, if its subpoint x
Jo, kProjection on the XY plane is positioned at projection point set { x
J, iIn the convex closure of projection on the XY plane.Figure 6 shows that the overlapping region data extract algorithm under the two-dimensional case, because projection p
Jo, kBe positioned at line segment
In, some f
iw
Jo, iIt is an overlapping point.
After having extracted the overlapping region data, calculate the root-mean-square value σ of the deviation of the distance of its corresponding measurement data points to the ideal surfaced
o, calculate the root-mean-square value σ of the distance of all measurement data points to the ideal surfaced simultaneously, wherein σ and σ
oBe about pose { g
i, the best-fit radius of a ball { r
iAnd scale factor { α
iNonlinear function.
The 3rd step: calculating target function value.Objective function is the linear combination of binocular target
μ wherein
1And μ
2Weight coefficient for positive satisfies μ
1+ μ
2=1.
The 4th step: judge whether convergence.The condition of convergence is target function value F＜ε
1Or the target function value of adjacent twice iteration is poor | F
n-F
N-1|＜ε
2, ε
1And ε
2It is constant given in advance.If satisfy the condition of convergence, then algorithm finishes; Otherwise continue next step.
The 5th step: the area data splicing, calculate parameters such as new pose, the best-fit radius of a ball and scale factor.Objective function is carried out linearization process, it is expressed as linear function about pose parameter, the best-fit radius of a ball and scale factor, thereby the objective function minimization problem turns to the linear least-squares problem, finds the solution system of linear equations and obtains new pose, the best-fit radius of a ball and scale factor.Algorithm jumped to for second step (can with reference to " Iterative algorithm for subaperture stitchmg test withspherical interferometers " J.OSA.A.23 (5): 1219-1226 such as chen, 2006).
The present invention needs explanation what time following when specific implementation:
(referring to Fig. 1) can be adjusted according to the bore and the relative aperture of tested aspheric mirror in the mutual alignment that angle steel welding base 111, channel-section steel welding portal frame 121 and tested aspheric mirror three-dimensional motion are adjusted between platform 13 threes when 1, installing.
2, the heavy caliber object lens of large relative aperture aspheric mirror medium-high frequency error-detecting tested subregion number that may relate to is more, data volume is too big, in order to solve the problem of the iterative computation time sharp increase that causes thus, the splicing strategy of thick-smart combination is taked in suggestion in detecting data processing algorithm.Promptly carry out the low resolution double sampling to detecting data earlier, the optimized parameter (pose, the best-fit radius of a ball and scale factor) that obtains after the applying detection data processing algorithm processing high-resolution data is re-used as initial parameter and is input in the detection data processing algorithm, original high resolution detection data splicing is arrived together, only need this moment 2～3 iteration to get final product, thereby reduce computing time.Suggestion adopts piecemeal QR decomposition method to find the solution system of linear equations in the area data stitching algorithm in addition, to avoid low memory problem.
Claims (8)
1, a kind of heavy caliber object lens of large relative aperture aspheric mirror medium-high frequency error detecting apparatus, it is characterized in that: comprise by the interferometer focusing platform, be positioned at the beat catoptron beat platform in interferometer focusing platform the place ahead, the 5-axis movement adjustment platform that platform constitutes is adjusted in the tested aspheric mirror three-dimensional motion that is positioned at beat catoptron beat platform below, and be installed in laser wavefront interferometer on the corresponding platform, the beat catoptron, the multi-point support mechanism of tested aspheric mirror, and the interior dress that is connected with the laser wavefront interferometer detects the main control computer of data processing algorithm program.
2, heavy caliber object lens of large relative aperture aspheric mirror medium-high frequency error detecting apparatus according to claim 1, it is characterized in that: described interferometer focusing platform comprises angle steel welding base and focusing motion Z shaft assembly, and focusing motion Z shaft assembly is made up of AC servo motor, spring coupling, ball-screw and rolling guide-rail pairs and interferometer installing plate.
3, heavy caliber object lens of large relative aperture aspheric mirror medium-high frequency error detecting apparatus according to claim 1, it is characterized in that: described beat mirror beat platform comprises channel-section steel welding portal frame and beat motion B shaft assembly, and beat motion B shaft assembly is made up of stepper motor, spring coupling, Worm and worm-wheel gearing and catoptron installation frame.
4, according to claim 1 or 2 or 3 described heavy caliber object lens of large relative aperture aspheric mirror medium-high frequency error detecting apparatus, it is characterized in that: described tested aspheric mirror three-dimensional motion is adjusted platform and is comprised that platform is adjusted in the X-axis motion axial XY of vertical light plane in, platform is adjusted in the Y-axis motion and around the rotating C axle of optical axis turntable, platform is adjusted in the X-axis motion and the Y-axis motion is adjusted platform by AC servo motor, spring coupling, ball-screw and rolling guide-rail pairs composition; C axle turntable is made up of AC servo motor and harmonic gear reducer.
5, a kind of heavy caliber object lens of large relative aperture aspheric mirror medium-high frequency error detection method of the described device of claim 1 that adopts is as follows:
The first step: adjust tested aspheric mirror and multi-point support mechanism thereof the position on tested aspheric mirror three-dimensional motion adjustment platform, make the minute surface axis overlap substantially with turret axis;
Second step: according to the position of reflection light point on the CCD of interferometer of tested aspheric mirror, regulate the pitching and the beat of tested aspheric mirror, make tested aspheric mirror return to circle and reflection light point is motionless substantially by multi-point support mechanism;
The 3rd step: by the deflection angle of beat catoptron beat platform adjustment beat catoptron, adjust the position that platform is adjusted tested aspheric mirror, make that the tested subregion on the tested minute surface is positioned at the minute surface center by tested aspheric mirror three-dimensional motion;
The 4th step: with the face shape of the tested aspheric mirror of laser corrugated interferometer measurement central area, five shaft positions are write down in the data deposit;
The 5th step: according to the subregion splitting scheme, adjust the deflection angle of beat catoptron by beat catoptron beat platform, adjust position angle and the position that platform is adjusted tested aspheric mirror by tested aspheric mirror three-dimensional motion, adjust the position of interferometer by the interferometer focusing platform, make interferometer aim on the tested aspheric mirror from the shaft portion zone, measurement is write down five shaft positions from the face shape in axle zone and with the measurement data deposit;
The 6th the step: repeat the 5th the step finish up to all subregion measurements, the measurement data that five shaft positions write down and the laser wavefront interferometer detects is input to main control computer to be handled with the detection data processing algorithm, the error surface shape figure of several subregions that detection is obtained is spliced into the error surface shape figure that comprises the medium-high frequency section on unified, described detection data processing algorithm comprises that initial pose determines method, overlapping region data extract algorithm and area data stitching algorithm.
6, heavy caliber object lens of large relative aperture aspheric mirror medium-high frequency error detection method according to claim 5, it is characterized in that: described initial pose is determined the position of method according to 5-axis movement in the testing process, calculates the initial pose of the tested relatively aspheric mirror of interferometer automatically.
7, heavy caliber object lens of large relative aperture aspheric mirror medium-high frequency error detection method according to claim 5, it is characterized in that: described overlapping region data extract algorithm to the containment relationship between the subpoint of desirable face, is determined the overlapped data between any two tested subregions according to data point automatically.
8, heavy caliber object lens of large relative aperture aspheric mirror medium-high frequency error detection method according to claim 5, it is characterized in that: described area data stitching algorithm passes through iteration optimization, the grid scale error of six degree of freedom position and attitude error, best-fit radius of a ball error and interferometer imaging in the compensation testing process, make inconsistency minimum between all overlapped data, all data points and desirable face shape optimum matching simultaneously.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100343590A CN100462673C (en) | 2007-01-31 | 2007-01-31 | High-frequency error detecting apparatus and method for heavy caliber heavy relative aperture aspherical mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100343590A CN100462673C (en) | 2007-01-31 | 2007-01-31 | High-frequency error detecting apparatus and method for heavy caliber heavy relative aperture aspherical mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101013027A true CN101013027A (en) | 2007-08-08 |
| CN100462673C CN100462673C (en) | 2009-02-18 |
Family
ID=38700692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007100343590A Expired - Fee Related CN100462673C (en) | 2007-01-31 | 2007-01-31 | High-frequency error detecting apparatus and method for heavy caliber heavy relative aperture aspherical mirror |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100462673C (en) |
Cited By (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101900537A (en) * | 2010-08-05 | 2010-12-01 | 中国人民解放军国防科学技术大学 | Detection method and device of three-dimensional sphericity error of global spherical surface of optical sphere part |
| CN101666628B (en) * | 2009-09-22 | 2010-12-01 | 哈尔滨工业大学 | Measuring apparatus with two spliced shafts for large-caliber convex aspheric surface |
| CN101949691A (en) * | 2010-09-07 | 2011-01-19 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting nonzero digit compensation light-degree optical aspheric surface profile |
| CN101650157B (en) * | 2009-09-18 | 2011-04-20 | 中国科学院长春光学精密机械与物理研究所 | Detecting method and detecting device of surface-shape error of double curved surface convex reflecting mirror |
| CN102128596A (en) * | 2010-11-19 | 2011-07-20 | 福建师范大学 | Lens surface shape error detecting device and method thereof |
| CN102128597A (en) * | 2010-11-19 | 2011-07-20 | 福建师范大学 | Device for detecting surface shape deviation of lens |
| CN102519388A (en) * | 2011-10-28 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting surface figures of large-aperture off-axis convex aspheric mirror |
| CN102607408A (en) * | 2012-03-28 | 2012-07-25 | 中国科学院光电技术研究所 | Method for correcting distortion of imaging system for interferometer |
| CN102735187A (en) * | 2012-07-05 | 2012-10-17 | 北京理工大学 | Searching method for annular sub-aperture boundary splicing |
| CN102788562A (en) * | 2012-08-24 | 2012-11-21 | 中国科学院光电技术研究所 | Device for detecting sub-aperture splicing surface shape with movement coordinate feedback |
| CN102848287A (en) * | 2012-09-14 | 2013-01-02 | 中国人民解放军国防科学技术大学 | Combination machining method for removing high-frequency errors in optical elements |
| CN103557802A (en) * | 2013-11-18 | 2014-02-05 | 沈阳黎明航空发动机(集团)有限责任公司 | Method for measuring diameter and coordinate position of spatial curved surface micro-hole in non-contact mode |
| CN104697465A (en) * | 2015-03-31 | 2015-06-10 | 中国人民解放军国防科学技术大学 | Aberration-free absolute inspection method of ellipsoidal surface |
| CN105043296A (en) * | 2015-08-31 | 2015-11-11 | 成都精密光学工程研究中心 | Optical element surface profile in-situ detection device and detection method thereof |
| CN105627945A (en) * | 2015-12-21 | 2016-06-01 | 中国科学院长春光学精密机械与物理研究所 | Device and method of measuring deviation between center of aspheric element and center of outer circle |
| CN105627946A (en) * | 2015-12-21 | 2016-06-01 | 中国科学院长春光学精密机械与物理研究所 | Device and method of quickly adjusting aspheric space position |
| CN105675263A (en) * | 2016-01-18 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | Positioning error calibrator in planar sub-aperture splicing system and calibration and compensation method of calibrator |
| CN105698709A (en) * | 2016-03-24 | 2016-06-22 | 洛阳亨基智能数控装备科技有限公司 | Measurement method for curvature radius of tapered roller |
| CN105865374A (en) * | 2016-03-24 | 2016-08-17 | 洛阳亨基智能数控装备科技有限公司 | Method for measuring curvature radius of cylindrical roller |
| CN106124171A (en) * | 2016-06-16 | 2016-11-16 | 中国科学院上海光学精密机械研究所 | Three-dimensional platform for the detection of optical elements of large caliber optical property |
| CN106247967A (en) * | 2016-08-18 | 2016-12-21 | 京东方科技集团股份有限公司 | The measurement apparatus of a kind of substrate warp amount and method |
| CN108036738A (en) * | 2017-12-18 | 2018-05-15 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of method that spherical mirror surface type detection is carried out using horizontal interferometer |
| CN108205184A (en) * | 2017-12-28 | 2018-06-26 | 中国科学院西安光学精密机械研究所 | A kind of integrated pendulum mirror Method of Adjustment |
| CN108844720A (en) * | 2018-07-03 | 2018-11-20 | 长春理工大学 | A kind of optical system multi-angle image quality detection device and method |
| CN109099859A (en) * | 2018-09-26 | 2018-12-28 | 中国科学院上海光学精密机械研究所 | Optical elements of large caliber surface defect apparatus for measuring three-dimensional profile and method |
| CN109341587A (en) * | 2018-11-28 | 2019-02-15 | 中国科学院光电技术研究所 | Splicing measuring device and method |
| CN109955148A (en) * | 2019-03-18 | 2019-07-02 | 中国工程物理研究院激光聚变研究中心 | For aspherical optical element intermediate frequency ripple error in level detecting apparatus and method |
| CN109990730A (en) * | 2019-03-26 | 2019-07-09 | 合肥永升机械有限公司 | A kind of the automatically scanning detection device and method of large-scale engineering machinery structural member |
| CN110109230A (en) * | 2019-05-24 | 2019-08-09 | 西安交通大学 | A kind of intelligent splicing assembly method of aspheric noodles complex curved surface part |
| CN110455246A (en) * | 2019-08-27 | 2019-11-15 | 浙江大学 | A kind of surface shape measurement device and method for conformal optical element |
| CN110487208A (en) * | 2019-08-24 | 2019-11-22 | 西安应用光学研究所 | One kind is for large scale optical window part surface shape and the open detection device of parallel error and detection method |
| CN110722343A (en) * | 2019-10-23 | 2020-01-24 | 浙江大学 | Hydraulic pressure end cap pressure equipment machine with visual detection function |
| CN110966954A (en) * | 2019-10-31 | 2020-04-07 | 中国科学院长春光学精密机械与物理研究所 | Large-caliber optical element surface shape splicing detection method and device |
| CN111283512A (en) * | 2020-03-19 | 2020-06-16 | 中国工程物理研究院激光聚变研究中心 | Double-station machining detection equipment and method |
| CN111442909A (en) * | 2020-05-20 | 2020-07-24 | 北京理工大学 | Phase-shifting interference transmission wavefront measuring device and method for large-caliber workbench |
| CN111537198A (en) * | 2020-04-09 | 2020-08-14 | 中国科学院长春光学精密机械与物理研究所 | Star sensor lens interference detection system |
| CN111595235A (en) * | 2020-04-10 | 2020-08-28 | 大连理工大学 | Six-degree-of-freedom visual pose relative error measuring device and measuring method |
| CN114762935A (en) * | 2021-01-14 | 2022-07-19 | 全研科技有限公司 | Angle-adjustable precision sliding table structure |
| CN116586640A (en) * | 2023-07-14 | 2023-08-15 | 中国科学院长春光学精密机械与物理研究所 | Spherical test board, manufacturing method thereof and calibration method of transfer function of interferometer |
| CN116699864A (en) * | 2023-07-31 | 2023-09-05 | 中国科学院长春光学精密机械与物理研究所 | Reference-free adjustment method, device, equipment and medium for space-based large optical system |
| CN117451324A (en) * | 2023-12-22 | 2024-01-26 | 中国科学院合肥物质科学研究院 | Secondary concave curved surface detection light path system for large relative caliber and design method |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1137732A (en) * | 1997-07-19 | 1999-02-12 | Fuji Xerox Co Ltd | Method and apparatus for measuring shape |
| CN1258073C (en) * | 2002-12-03 | 2006-05-31 | 中国科学院长春光学精密机械与物理研究所 | Vertical heavy caliber aspherical mirror tester |
| JP2004279075A (en) * | 2003-03-13 | 2004-10-07 | Minolta Co Ltd | Lens eccentricity measuring method and measuring device |
| CA2424023C (en) * | 2003-03-28 | 2008-10-14 | Institut National D'optique | Method and system for characterizing aspheric surfaces of optical elements |
| CN100400225C (en) * | 2003-08-22 | 2008-07-09 | 中国人民解放军国防科学技术大学 | Non-spherical optical component composite machining and testing machine tools |
| US20060268282A1 (en) * | 2005-05-25 | 2006-11-30 | Evans Christopher J | Adaptive nulls for testing off-axis segments of aspherics |
-
2007
- 2007-01-31 CN CNB2007100343590A patent/CN100462673C/en not_active Expired - Fee Related
Cited By (68)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101650157B (en) * | 2009-09-18 | 2011-04-20 | 中国科学院长春光学精密机械与物理研究所 | Detecting method and detecting device of surface-shape error of double curved surface convex reflecting mirror |
| CN101666628B (en) * | 2009-09-22 | 2010-12-01 | 哈尔滨工业大学 | Measuring apparatus with two spliced shafts for large-caliber convex aspheric surface |
| CN101900537B (en) * | 2010-08-05 | 2012-06-27 | 中国人民解放军国防科学技术大学 | Detection method and device of three-dimensional sphericity error of global spherical surface of optical sphere part |
| CN101900537A (en) * | 2010-08-05 | 2010-12-01 | 中国人民解放军国防科学技术大学 | Detection method and device of three-dimensional sphericity error of global spherical surface of optical sphere part |
| CN101949691A (en) * | 2010-09-07 | 2011-01-19 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting nonzero digit compensation light-degree optical aspheric surface profile |
| CN102128596A (en) * | 2010-11-19 | 2011-07-20 | 福建师范大学 | Lens surface shape error detecting device and method thereof |
| CN102128597A (en) * | 2010-11-19 | 2011-07-20 | 福建师范大学 | Device for detecting surface shape deviation of lens |
| CN102128596B (en) * | 2010-11-19 | 2012-09-26 | 福建师范大学 | Lens surface shape error detecting device and method thereof |
| CN102519388B (en) * | 2011-10-28 | 2013-11-27 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting surface figures of large-aperture off-axis convex aspheric mirror |
| CN102519388A (en) * | 2011-10-28 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting surface figures of large-aperture off-axis convex aspheric mirror |
| CN102607408B (en) * | 2012-03-28 | 2014-10-08 | 中国科学院光电技术研究所 | Method for correcting distortion of imaging system for interferometer |
| CN102607408A (en) * | 2012-03-28 | 2012-07-25 | 中国科学院光电技术研究所 | Method for correcting distortion of imaging system for interferometer |
| CN102735187B (en) * | 2012-07-05 | 2017-05-03 | 北京理工大学 | Searching method for annular sub-aperture boundary splicing |
| CN102735187A (en) * | 2012-07-05 | 2012-10-17 | 北京理工大学 | Searching method for annular sub-aperture boundary splicing |
| CN102788562B (en) * | 2012-08-24 | 2014-12-24 | 中国科学院光电技术研究所 | Device for detecting sub-aperture splicing surface shape with movement coordinate feedback |
| CN102788562A (en) * | 2012-08-24 | 2012-11-21 | 中国科学院光电技术研究所 | Device for detecting sub-aperture splicing surface shape with movement coordinate feedback |
| CN102848287A (en) * | 2012-09-14 | 2013-01-02 | 中国人民解放军国防科学技术大学 | Combination machining method for removing high-frequency errors in optical elements |
| CN102848287B (en) * | 2012-09-14 | 2014-09-17 | 中国人民解放军国防科学技术大学 | Combination machining method for removing high-frequency errors in optical elements |
| CN103557802A (en) * | 2013-11-18 | 2014-02-05 | 沈阳黎明航空发动机(集团)有限责任公司 | Method for measuring diameter and coordinate position of spatial curved surface micro-hole in non-contact mode |
| CN103557802B (en) * | 2013-11-18 | 2015-10-07 | 沈阳黎明航空发动机(集团)有限责任公司 | A kind of method of non-cpntact measurement space curved surface micro hole diameter and coordinate position |
| CN104697465A (en) * | 2015-03-31 | 2015-06-10 | 中国人民解放军国防科学技术大学 | Aberration-free absolute inspection method of ellipsoidal surface |
| CN104697465B (en) * | 2015-03-31 | 2017-05-31 | 中国人民解放军国防科学技术大学 | The absolute method of inspection of aberrationless of ellipsoid |
| CN105043296A (en) * | 2015-08-31 | 2015-11-11 | 成都精密光学工程研究中心 | Optical element surface profile in-situ detection device and detection method thereof |
| CN105627945A (en) * | 2015-12-21 | 2016-06-01 | 中国科学院长春光学精密机械与物理研究所 | Device and method of measuring deviation between center of aspheric element and center of outer circle |
| CN105627946B (en) * | 2015-12-21 | 2018-09-21 | 中国科学院长春光学精密机械与物理研究所 | The fast adjustment method of aspherical space position |
| CN105627946A (en) * | 2015-12-21 | 2016-06-01 | 中国科学院长春光学精密机械与物理研究所 | Device and method of quickly adjusting aspheric space position |
| CN105627945B (en) * | 2015-12-21 | 2017-12-26 | 中国科学院长春光学精密机械与物理研究所 | Non-spherical element center and the measurement apparatus and measuring method of cylindrical center shift amount |
| CN105675263A (en) * | 2016-01-18 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | Positioning error calibrator in planar sub-aperture splicing system and calibration and compensation method of calibrator |
| CN105675263B (en) * | 2016-01-18 | 2018-03-20 | 中国科学院上海光学精密机械研究所 | The caliberating device of position error and its demarcation and compensation method in plane sub-aperture stitching system |
| CN105698709A (en) * | 2016-03-24 | 2016-06-22 | 洛阳亨基智能数控装备科技有限公司 | Measurement method for curvature radius of tapered roller |
| CN105865374A (en) * | 2016-03-24 | 2016-08-17 | 洛阳亨基智能数控装备科技有限公司 | Method for measuring curvature radius of cylindrical roller |
| CN105865374B (en) * | 2016-03-24 | 2018-05-11 | 洛阳亨基智能数控装备科技有限公司 | A kind of measuring method of cylindrical roller radius of curvature |
| CN105698709B (en) * | 2016-03-24 | 2018-02-09 | 洛阳亨基智能数控装备科技有限公司 | A kind of measuring method of taper roller radius of curvature |
| CN106124171B (en) * | 2016-06-16 | 2018-05-08 | 中国科学院上海光学精密机械研究所 | Three-dimensional platform for the detection of optical elements of large caliber optical property |
| CN106124171A (en) * | 2016-06-16 | 2016-11-16 | 中国科学院上海光学精密机械研究所 | Three-dimensional platform for the detection of optical elements of large caliber optical property |
| US10393511B2 (en) | 2016-08-18 | 2019-08-27 | Boe Technology Group Co., Ltd. | Measuring device and method for substrate warping amount |
| CN106247967A (en) * | 2016-08-18 | 2016-12-21 | 京东方科技集团股份有限公司 | The measurement apparatus of a kind of substrate warp amount and method |
| CN108036738A (en) * | 2017-12-18 | 2018-05-15 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of method that spherical mirror surface type detection is carried out using horizontal interferometer |
| CN108205184A (en) * | 2017-12-28 | 2018-06-26 | 中国科学院西安光学精密机械研究所 | A kind of integrated pendulum mirror Method of Adjustment |
| CN108844720A (en) * | 2018-07-03 | 2018-11-20 | 长春理工大学 | A kind of optical system multi-angle image quality detection device and method |
| CN108844720B (en) * | 2018-07-03 | 2020-08-04 | 长春理工大学 | Multi-angle image quality detection device and method for optical system |
| CN109099859A (en) * | 2018-09-26 | 2018-12-28 | 中国科学院上海光学精密机械研究所 | Optical elements of large caliber surface defect apparatus for measuring three-dimensional profile and method |
| US11365964B2 (en) | 2018-11-28 | 2022-06-21 | The Institute Of Optics And Electronics, The Chinese Academy Of Sciences | Stitching-measurement device and stitching-measurement method |
| WO2020107508A1 (en) * | 2018-11-28 | 2020-06-04 | 中国科学院光电技术研究所 | Spliced measurement device and method |
| CN109341587A (en) * | 2018-11-28 | 2019-02-15 | 中国科学院光电技术研究所 | Splicing measuring device and method |
| CN109955148B (en) * | 2019-03-18 | 2023-09-22 | 中国工程物理研究院激光聚变研究中心 | In-situ detection device and method for medium-frequency ripple error of aspheric optical element |
| CN109955148A (en) * | 2019-03-18 | 2019-07-02 | 中国工程物理研究院激光聚变研究中心 | For aspherical optical element intermediate frequency ripple error in level detecting apparatus and method |
| CN109990730A (en) * | 2019-03-26 | 2019-07-09 | 合肥永升机械有限公司 | A kind of the automatically scanning detection device and method of large-scale engineering machinery structural member |
| CN110109230A (en) * | 2019-05-24 | 2019-08-09 | 西安交通大学 | A kind of intelligent splicing assembly method of aspheric noodles complex curved surface part |
| CN110487208A (en) * | 2019-08-24 | 2019-11-22 | 西安应用光学研究所 | One kind is for large scale optical window part surface shape and the open detection device of parallel error and detection method |
| CN110487208B (en) * | 2019-08-24 | 2020-12-08 | 西安应用光学研究所 | Open type detection device and detection method for surface shape and parallel difference of large-size optical window part |
| CN110455246A (en) * | 2019-08-27 | 2019-11-15 | 浙江大学 | A kind of surface shape measurement device and method for conformal optical element |
| CN110455246B (en) * | 2019-08-27 | 2020-11-03 | 浙江大学 | Surface shape measuring device and method for conformal optical element |
| CN110722343A (en) * | 2019-10-23 | 2020-01-24 | 浙江大学 | Hydraulic pressure end cap pressure equipment machine with visual detection function |
| CN110966954A (en) * | 2019-10-31 | 2020-04-07 | 中国科学院长春光学精密机械与物理研究所 | Large-caliber optical element surface shape splicing detection method and device |
| CN111283512A (en) * | 2020-03-19 | 2020-06-16 | 中国工程物理研究院激光聚变研究中心 | Double-station machining detection equipment and method |
| CN111537198B (en) * | 2020-04-09 | 2021-04-23 | 中国科学院长春光学精密机械与物理研究所 | Star sensor lens interference detection system |
| CN111537198A (en) * | 2020-04-09 | 2020-08-14 | 中国科学院长春光学精密机械与物理研究所 | Star sensor lens interference detection system |
| CN111595235A (en) * | 2020-04-10 | 2020-08-28 | 大连理工大学 | Six-degree-of-freedom visual pose relative error measuring device and measuring method |
| CN111595235B (en) * | 2020-04-10 | 2021-08-10 | 大连理工大学 | Six-degree-of-freedom visual pose relative error measuring device and measuring method |
| CN111442909A (en) * | 2020-05-20 | 2020-07-24 | 北京理工大学 | Phase-shifting interference transmission wavefront measuring device and method for large-caliber workbench |
| CN114762935A (en) * | 2021-01-14 | 2022-07-19 | 全研科技有限公司 | Angle-adjustable precision sliding table structure |
| CN116586640A (en) * | 2023-07-14 | 2023-08-15 | 中国科学院长春光学精密机械与物理研究所 | Spherical test board, manufacturing method thereof and calibration method of transfer function of interferometer |
| CN116586640B (en) * | 2023-07-14 | 2023-09-22 | 中国科学院长春光学精密机械与物理研究所 | Spherical test board, manufacturing method thereof and calibration method of transfer function of interferometer |
| CN116699864A (en) * | 2023-07-31 | 2023-09-05 | 中国科学院长春光学精密机械与物理研究所 | Reference-free adjustment method, device, equipment and medium for space-based large optical system |
| CN116699864B (en) * | 2023-07-31 | 2023-10-20 | 中国科学院长春光学精密机械与物理研究所 | Reference-free adjustment method, device, equipment and medium for space-based large optical system |
| CN117451324A (en) * | 2023-12-22 | 2024-01-26 | 中国科学院合肥物质科学研究院 | Secondary concave curved surface detection light path system for large relative caliber and design method |
| CN117451324B (en) * | 2023-12-22 | 2024-02-27 | 中国科学院合肥物质科学研究院 | Secondary concave curved surface detection light path system for large relative caliber and design method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100462673C (en) | 2009-02-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100462673C (en) | High-frequency error detecting apparatus and method for heavy caliber heavy relative aperture aspherical mirror | |
| CN101251435B (en) | Workstation for splicing son aperture of macrotype optical mirror plane | |
| CN102661719B (en) | Near-null compensator, surface shape measuring instrument and measuring method for matching measurement of sub-apertures of aspheric surfaces | |
| CN101240999B (en) | Large-sized optical flat interferometry device and method | |
| CN102095385B (en) | Novel spherical absolute measurement system and method thereof | |
| CN100507488C (en) | Method and device for aspherical mirror diffraction image | |
| US5416586A (en) | Method of testing aspherical optical surfaces with an interferometer | |
| CN102997863B (en) | Direct detection system for surface-shape errors in full-aperture optical aspheric surfaces | |
| CN101241000B (en) | High steepness convex quadric aspherical aberration-free point sub-aperture stitching measurement method | |
| CN103335610B (en) | The detection system of large-caliber convex high order aspheric surface | |
| CN103575233B (en) | Method for detecting large-caliber large-relative-aperture parabolic reflector surface shape error | |
| WO2021203707A1 (en) | Automatic surface shape measurement apparatus and method using laser interferometry | |
| CN106918301B (en) | Plane surface shape sub-aperture stitching interferometer measuring device and measurement method | |
| CN101666628B (en) | Measuring apparatus with two spliced shafts for large-caliber convex aspheric surface | |
| CN101949691A (en) | Method for detecting nonzero digit compensation light-degree optical aspheric surface profile | |
| CN103134660B (en) | Method acquiring telescope primary and secondary mirror alignment error based on astigmatism decomposition | |
| US20050225774A1 (en) | Method for measuring and manufacturing an optical element and optical apparatus | |
| CN112504177B (en) | Multifunctional vertical zero-position overlapping scanning interference measuring device | |
| CN105318847A (en) | Aspheric non-zero digit circular subaperture stitching method based on system modeling | |
| CN106225715A (en) | A kind of pentaprism scanning detection method for non-spherical reflector | |
| CN102717305A (en) | In-situ measurement method for optical free-form surface | |
| CN114252023B (en) | Computer-aided adjusting device and method for aspheric surface calculation holographic detection | |
| CN110966954A (en) | Large-caliber optical element surface shape splicing detection method and device | |
| CN109002567B (en) | Computer-aided debugging method based on actual optical system debugging detection optical path | |
| CN108267094B (en) | Non-cylindrical surface interference splicing measurement system and method based on rotary CGH |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090218 Termination date: 20180131 |