CN102128597A - Device for detecting surface shape deviation of lens - Google Patents
Device for detecting surface shape deviation of lens Download PDFInfo
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- CN102128597A CN102128597A CN 201010550799 CN201010550799A CN102128597A CN 102128597 A CN102128597 A CN 102128597A CN 201010550799 CN201010550799 CN 201010550799 CN 201010550799 A CN201010550799 A CN 201010550799A CN 102128597 A CN102128597 A CN 102128597A
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Abstract
The invention relates to a device for detecting the surface shape deviation of a lens, which relates to a small spheric interferometer. The device comprises an optical splitter with a connecting surface plated with a subtransparent and semi-reflective film, and is characterized by comprising a positioned and fixed beam expanding and reforming device arranged above the positioned and fixed optical splitter, a positioned and fixed detection light source arranged above the beam expanding and reforming device, a positioned and fixed optical sample plate arranged at the right of the optical splitter, an observation receiving screen arranged at the left of the optical splitter and a to-be-detected lens right arranged under the optical splitter. A central axis of a beam of the beam expanding and reforming device intersects with an optical axis of the optical sample plate on the connecting surface of the optical splitter, and the observation receiving screen is perpendicular to the optical axis of the optical sample plate. The device for detecting the surface shape deviation of the lens has the advantages that: (1) traditional optical sample plates with various kinds of radius curvatures in an optical workshop are used for replacing expensive normal lenses to produce interferential reference wavefront, and (2) long guide rails are not used in order to miniaturize the device.
Description
Technical field
The present invention relates to small-sized sphericity interferometer, be specially adapted to the sphericity interferometer of online nondestructive test spheric glass radius-of-curvature deviation, astigmatism deviation, partial deviations.
Background technology
Tested optical surface claims surface form deviation with respect to the deviation on reference optical surface, and surface form deviation comprises three: radius deviation, astigmatism deviation, partial deviations.
Optical element surface form deviation after the check polishing adopts testplate or interferometer usually, and the method for inspection all is according to the interference of light principle.At the surface form deviation of optical workshop check optical element, method commonly used has interference pattern method and shadowing method.The interference pattern method can be divided into contact method (being template method) and noncontact method (being interferometer mode).The testplate commonly used of the online detection of optics processing enterprise is at present observed interference ring to machining lens contact pressurization, because directly contact pressurization, surface smoothness to eyeglass damages, make not at all easy surface figure accuracy that reached in the process of high-precision optical eyeglass, checkout procedure has been destroyed any surface finish again, and testplate is in use because of the wearing and tearing meeting brings the error that is difficult for discovering to measurement result, causes to do over again repeatedly even scrap, greatly reduce production efficiency, increased production cost.
Laser measuring technology belongs to non-contact measuring technology, compare with contact measurement method, interferometry has higher sensitivity and accuracy, higher efficient, can the damage measurement surface, be not subject to advantages such as measurand surface state influence, enlarged measurement range, in the numerous areas of precision, ultraprecise in-process measurement and observing and controlling in real time, all obtain to use widely.Safe graceful type interferometry and the interferometry of Fei Suo type be present two kinds the most classical, use also interfere measurement technique very widely.
At present in the laboratory, all kinds interferometer both domestic and external can realize the accurate measurement to plane and spherical optics part face shape, cost an arm and a leg but can reach higher measuring accuracy instrument; At present Tai Man-Green's type, striking rope type sphericity interferometer, measuring principle all is to coincide by the centre of sphere of regulating eyeglass to be measured and the standard ball ground roll beam convergence center that has standard lens to penetrate, by the interpretation method of interference fringe, quantitative Treatment is analyzed the surface form deviation of tested eyeglass.It detects as shown in Figure 1, between centers is shared the same light every distributed points light source, beam splitter, finite conjugate can be realized semi-transparent semi-reflecting standard lens, lens to be measured apart from object lens, rear surface successively from left to right in the space, pointolite forms a branch of directional light through finite conjugate behind object lens, move in the rear surface of standard lens (reference field), partial reflection is a reference beam; The tested surface of part transmission and process lens to be measured is emitted as the detection light beam.Detect the light beam autocollimation and return, overlap with reference beam, form equal thick interference fringe, two light beams enters viewing area after reflecting through beam splitter.Can realize detection by analyzing the interference fringe situation to the capable deviation of face of the tested surface of lens to be measured.Measurement range is subjected to the restriction in the relevant aperture of standard lens like this, needs the standard lens of plurality of specifications, and needs the guide rail of certain-length to realize moving of lens to be measured, and the centre of sphere of reference field is overlapped with the centre of sphere of tested surface.Present sphericity interferometer can only be measured the partial deviations of tested sphere face shape, and interferogram can not reflect the deviation of the relative nominal value of radius-of-curvature, so have the spare system that is used for measuring tested sphere curvature radius specially on actual instrumentation.
Therefore, optics processing enterprise very the exigence rig-site utilization, particularly to the miniaturization of the online detection in the process, cheap face shape detection system, realize radius-of-curvature deviation, astigmatism deviation, the partial deviations of online quick nondestructive check spheric glass, enhance productivity.
Patent of invention 200310122011.9 modified Michelson interferometers disclose a kind of optical splitter, this optical splitter is the Amici prism that is connect and formed by two identical equilateral right-angle prisms, and be coated with the semi-transparent semi-reflecting film of one deck on bonding surface, it can realize the lens and the reflection of light beam.It is used for the mensuration of wavelength, and the surface form deviation that is not applied to lens detects.
Lens to be measured be in its geometric position, position to be measured need do x, y, the three direction translations of z shaft space and sphere thereof towards, the rotation of optical axis relative angle is regulated could satisfy accurately and is detected, Chinese patent 97231037.1 three-dimensional working platforms disclose a kind of x, y, z axis adjustment device, but can not make rotation and beat.
Summary of the invention
The object of the invention is to overcome above-mentioned defective, and a kind of lens face shape error measuring means are provided.
The present invention program is: device comprises that bonding surface is coated with the optical splitter of semi-transparent semi-reflecting film, it is characterized in that: the detection light source of the positioning and fixing directly over the expansion bundle apparatus for shaping of the positioning and fixing that is provided with directly over the optical splitter of positioning and fixing, the expansion bundle apparatus for shaping, the testplate of the positioning and fixing of optical splitter front-right, the observation receiving screen of optical splitter front-left, the lens to be measured under the optical splitter are formed, the central axis of the light beam of expansion bundle apparatus for shaping and the optical axis intersection of testplate are observed the optical axis of receiving screen perpendicular to testplate on the bonding surface of optical splitter.
The invention has the advantages that:
1, the testplate with existing various different curvature radius in the optical workshop replaces expensive standard lens to produce the reference wavefront of interfering.
2,, make instrument miniaturization without long guideway.
Description of drawings
Fig. 1 is a prior art Fizeau interference schematic diagram.
Fig. 2 is a structural representation of the present invention.
Fig. 3 is two and connects and the body synoptic diagram with shape isoceles triangle prism.
Fig. 4 is two and connects and the body synoptic diagram with the shape rectangular parallelepiped.
1. detection light source among the figure 2. expand bundle apparatus for shaping, 3. optical splitter, 4. testplate, the reference field of 4a. testplate, lens 5. to be measured, 5a. to be measured of lens to be measured, 6. observation receiving screen, 7. mirror disk carriage, 8. the universal joint seat of honour, 9. universal joint is following, 10. screw rod, 11. universal bars, 12. three-dimensional working platforms
Embodiment
Apparatus of the present invention comprise that bonding surface is coated with the optical splitter 3 of semi-transparent semi-reflecting film, it is characterized in that: the expansion bundle apparatus for shaping 2 of the positioning and fixing that is provided with directly over the optical splitter 3 of positioning and fixing, the detection light source 1 of the positioning and fixing directly over the expansion bundle apparatus for shaping 2, the testplate 4 of the positioning and fixing of optical splitter 3 front-rights, the observation receiving screen 6 of optical splitter 3 front-lefts, lens to be measured 5 under the optical splitter 3 are formed, the central axis of the light beam of expansion bundle apparatus for shaping 2 and the optical axis intersection of testplate 4 are observed the optical axis of receiving screen 6 perpendicular to testplate 4 on the bonding surface of optical splitter 3.
Each effective transmission plane of optical splitter is coated with anti-reflection film.
Then use protruding testplate 4 when detecting protruding lens 5 to be measured, then use recessed testplate 4 when detecting recessed detection lens 5.
The light pencil that penetrates from detection light source 1 incides the expansion bundle apparatus for shaping 2 that is used to enlarge this laser beam diameter, by these expansions bundle apparatus for shaping 2 expansions restraint be adapted to detect the beam diameter of bore till, this light beam can be parallel beam or divergent beams.The semi-transparent semi-reflecting surface of inciding optical splitter 3 when light beam is divided into two light beams, and a light beams returns along former road after reflection along the reference field 4a of protruding testplate 4 of optical axis directions X directive or recessed testplate 4, forms reference wavefront.Another light beams returns along former road after reflection along to be measured 5a of optical axis Y opposite direction protruding lens to be measured of directive or recessed lens to be measured, forms test wavefront.Reference wavefront and test wavefront form interference after Amici prism converges, 6 places can observe interference fringe at the observation receiving screen.
Several protruding lens 5 to be measured are installed on the evagination spheroid of mirror disk carriage 7 or several recessed lens 5 to be measured are installed in the bowl bodies of mirror disk carriage 7 on the concave spherical surface, and mirror disk carriage 7 bottoms are circular cone cavity axle sleeve; Other is provided with five and ties up the worktable of flatting turn, Working table structure is to fix a universal bar 11 on three-dimensional working platform 12 end faces, universal bar 11 tops be one greater than hemispheric billiard table, billiard table top is sheathed with the universal joint seat of honour 8, the universal joint seat of honour 8 lower central are hemispherical cavity groove, other is provided with following 9 in the universal joint of two symmetries, following 9 fit upper back of two universal joints is billiard table shape cavity, billiard table shape cavity bottom is a circular hole, following 9 in the universal joint seat of honour 8 and universal joint with universal bar 11 billiard table fits parcel wherein after, four screw rods 10 pass behind the through hole of following 9 in universal joint in the stubborn threaded hole that is combined in the universal joint seat of honour 8 enforcement and locate; Mirror disk carriage 7 lower cone cavitys are linked on the circular cone cylindrical of the universal joint seat of honour 8 top correspondences.
Above-mentioned three-dimensional working platform 12 is the prior art of China Patent No. 97231037.1, because seat is combined into transition fit with the cover of universal bar 11 about the universal joint, the damping force effect is arranged between the two, so can implement to locate damping rotation and beat in adjustment process intermediate mirror disc holder 7, five tie up the worktable of flatting turn can do five dimension adjustings.
One on the mirror disk carriage 7 lens 5 to be measured are tieed up the worktable of flatting turn by five regulate the central axes that makes its optical axis and expansion restraint the light beam of apparatus for shaping 2, and central axial direction move up and down make two light beams light path about equally, on observation receiving screen 6, can observe interference fringe, and reference wavefront and test wavefront overlap very on a large scale in front and back, therefore can observe interference fringe clearly in very big depth range.Observation receiving screen 6 can move forward and backward along the optical axis center line direction of testplate 4, so that obtain suitable interference pattern, interference pattern is carried out the surface form deviation that analytical calculation just can obtain to be measured 5a of lens to be measured.
Can also be by the piezoelectric ceramics phase shifter be housed on testplate 4, driving testplate 4 makes it produce the change in optical path length of part wavelength magnitude, the interference pattern that interference field is changed, by processing, eliminate the steady noise in the interference field and the inconsistency of planar array detector automatically to interference pattern.
Claims (3)
1. lens face shape error measuring means, comprise that bonding surface is coated with the optical splitter of semi-transparent semi-reflecting film (3), it is characterized in that: the expansion bundle apparatus for shaping (2) of the positioning and fixing that is provided with directly over the optical splitter of positioning and fixing (3), the detection light source (1) of the positioning and fixing directly over the expansion bundle apparatus for shaping (2), the testplate (4) of the positioning and fixing of optical splitter (3) front-right, the observation receiving screen (6) of optical splitter (3) front-left, lens to be measured (5) under the optical splitter (3) are formed, the central axis of the light beam of expansion bundle apparatus for shaping (2) and the optical axis intersection of testplate (4) are observed the optical axis of receiving screen (6) perpendicular to testplate (4) on the bonding surface of optical splitter (3).
2. a kind of lens face shape error measuring means according to claim 1 is characterized in that: each effective transmission plane of optical splitter is coated with anti-reflection film.
3. a kind of lens face shape error measuring means according to claim 1 and 2, it is characterized in that: several protruding lens to be measured (5) are installed on the evagination spheroid of mirror disk carriage (7) or several recessed lens to be measured (5) are installed in the bowl bodies of mirror disk carriage (7) on the concave spherical surface, and mirror disk carriage (7) bottom is a circular cone cavity axle sleeve; Other is provided with five and ties up the worktable of flatting turn, Working table structure is to fix a universal bar (11) on three-dimensional working platform (12) end face, universal bar (11) top be one greater than hemispheric billiard table, billiard table top is sheathed with the universal joint seat of honour (8), the universal joint seat of honour (8) lower central is hemispherical cavity groove, other is provided with following of the universal joint (9) of two symmetries, following (9) fit upper back of two universal joints is billiard table shape cavity, billiard table shape cavity bottom is a circular hole, the universal joint seat of honour (8) and universal joint following (9) with universal bar (11) billiard table fit parcel wherein after, four screw rods (10) pass behind the through hole of universal joint following (9) in the stubborn threaded hole that is combined in the universal joint seat of honour (8) enforcement and locate; Mirror disk carriage (7) lower cone cavity is linked on the circular cone cylindrical of top, the universal joint seat of honour (8) correspondence.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010550799 CN102128597A (en) | 2010-11-19 | 2010-11-19 | Device for detecting surface shape deviation of lens |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201010550799 CN102128597A (en) | 2010-11-19 | 2010-11-19 | Device for detecting surface shape deviation of lens |
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| CN102128597A true CN102128597A (en) | 2011-07-20 |
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| CN 201010550799 Pending CN102128597A (en) | 2010-11-19 | 2010-11-19 | Device for detecting surface shape deviation of lens |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104949819A (en) * | 2015-06-30 | 2015-09-30 | 福建师范大学 | Surface deviation detection device and method based on polarization interference |
| CN106352850A (en) * | 2016-08-05 | 2017-01-25 | 歌尔股份有限公司 | Sample levelness testing device and sample levelness testing method |
| CN113189782A (en) * | 2020-01-14 | 2021-07-30 | 华为技术有限公司 | Light splitting flat plate, light splitting device, light splitting lens, camera and electronic equipment |
| CN113639664A (en) * | 2021-08-12 | 2021-11-12 | 江苏科技大学 | Method for measuring curvature radius of optical lens and detecting lens defect step by step |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030011784A1 (en) * | 2001-07-12 | 2003-01-16 | De Groot Peter J. | Measurement of complex surface shapes using a spherical wavefront |
| CN1584533A (en) * | 2004-06-02 | 2005-02-23 | 中国科学院上海光学精密机械研究所 | Optical fiber connector end face geometric parameter measuring instrument |
| CN101013027A (en) * | 2007-01-31 | 2007-08-08 | 中国人民解放军国防科学技术大学 | High-frequency error detecting apparatus and method for heavy caliber heavy relative aperture aspherical mirror |
| CN201867177U (en) * | 2010-11-19 | 2011-06-15 | 福建师范大学 | Device for detecting surface deviation of lens |
-
2010
- 2010-11-19 CN CN 201010550799 patent/CN102128597A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030011784A1 (en) * | 2001-07-12 | 2003-01-16 | De Groot Peter J. | Measurement of complex surface shapes using a spherical wavefront |
| CN1584533A (en) * | 2004-06-02 | 2005-02-23 | 中国科学院上海光学精密机械研究所 | Optical fiber connector end face geometric parameter measuring instrument |
| CN101013027A (en) * | 2007-01-31 | 2007-08-08 | 中国人民解放军国防科学技术大学 | High-frequency error detecting apparatus and method for heavy caliber heavy relative aperture aspherical mirror |
| CN201867177U (en) * | 2010-11-19 | 2011-06-15 | 福建师范大学 | Device for detecting surface deviation of lens |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104949819A (en) * | 2015-06-30 | 2015-09-30 | 福建师范大学 | Surface deviation detection device and method based on polarization interference |
| CN106352850A (en) * | 2016-08-05 | 2017-01-25 | 歌尔股份有限公司 | Sample levelness testing device and sample levelness testing method |
| CN106352850B (en) * | 2016-08-05 | 2019-12-13 | 歌尔股份有限公司 | sample levelness testing device and method |
| CN113189782A (en) * | 2020-01-14 | 2021-07-30 | 华为技术有限公司 | Light splitting flat plate, light splitting device, light splitting lens, camera and electronic equipment |
| CN113639664A (en) * | 2021-08-12 | 2021-11-12 | 江苏科技大学 | Method for measuring curvature radius of optical lens and detecting lens defect step by step |
| CN113639664B (en) * | 2021-08-12 | 2022-03-29 | 江苏科技大学 | Method for measuring curvature radius of optical lens and detecting lens defect step by step |
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Application publication date: 20110720 |