CN1584533A - Optical fibre connector face geometrical parameter measuring instruments - Google Patents
Optical fibre connector face geometrical parameter measuring instruments Download PDFInfo
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- CN1584533A CN1584533A CN 200410024872 CN200410024872A CN1584533A CN 1584533 A CN1584533 A CN 1584533A CN 200410024872 CN200410024872 CN 200410024872 CN 200410024872 A CN200410024872 A CN 200410024872A CN 1584533 A CN1584533 A CN 1584533A
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Abstract
A measurer applying Twyman-Green interferometer structure is featured as having light source, setting collimation extender system, beam-splitter, light chopper and plane reflector bound on piezoelectric ceramics in sequence on th same optical axis; setting optical fibre connector at one end of beam splitter and lens as well as detector on another end, connecting detector to computer through A/D converter and connecting computer to the piezoelectric ceramics through driving circuit.
Description
Technical field
The present invention is relevant with the joints of optical fibre, relates to the end face geometric parameter measurement instrument of the joints of optical fibre and is used for the measuring method of end surface of optical fiber connector geometric parameter.
Background technology
The joints of optical fibre are one of base components most widely used in optical communication, Fibre Optical Sensor and other fiber optic applications field.The end face geometric parameter of the joints of optical fibre determines it to insert technical features such as loss, return loss, repeatability and interchangeability.Therefore, grind in production, finished product detection and the assembling use at the joints of optical fibre, very necessary to the detection of its end face geometric parameter.The end surface of optical fiber connector geometric parameter mainly contains radius-of-curvature, sphere summit offset, optical fiber height and end slope angle, as shown in Figure 1.Optical fiber 1 is fixed in the contact pin body 2 by epoxy resin layer 3 bondings, and the end face of the joints of optical fibre is made of the end face of optical fiber and the end face of contact pin body.4,6,7 radius-of-curvature, sphere summit offset and the end slope angles that are respectively end surface of optical fiber connector.5a and 5b are the optical fiber height, and wherein 5a represents the optical fiber depression, and the optical fiber height is a negative value; 5b represents that optical fiber is outstanding, the optical fiber height be on the occasion of.
At present, the detection of end surface of optical fiber connector is typically used the magnifier Direct observation, this can only understand the surface appearance such as smooth finish, cut of end face roughly; Perhaps use interference microscope, infer the surface configuration and the radius-of-curvature of end face according to interference fringe, its precision is low, and error is big, and can't provide key technical index such as sphere summit offset, optical fiber height and end slope angle.Utilize the optical wave-front interfere measurement technique to obtain the end surface of optical fiber connector pattern,, can obtain all end face geometric parameters of the joints of optical fibre by analyzing topographic data.
Technology [1] (Lin Min formerly, Huang Jianjun, the Li Jing town, " end surface of optical fiber connector interference testing system ", laser magazine, 21 (1), 2000,33-34) adopt the Michelson microinterferometer in conjunction with 4 step step-by-step movement phase modulation techniques, obtain the three-dimensional appearance data of tested optical fiber connector ends, according to two-dimensional section figure, three-dimensional appearance figure and interference fringe picture, obtain the end face geometric parameter.The structure of this test macro as shown in Figure 2.The monochromatic light that light source 1 sends is divided into two bundles by colimated light system 2 beam-expanding collimations through spectroscope 3.A branch of light shines on the end face of the joints of optical fibre 5 after by microcobjective 4, and its reflected light is gathered into picture by microcobjective 4.Another Shu Guang shines on the plane mirror 7 after by microcobjective 6, and its reflected light is gathered into picture as with reference to signal by microcobjective 6, produces with the end face picture of the joints of optical fibre 5 and interferes.Interference pattern, is gathered by computing machine 11 behind analog to digital converter 10 on CCD9 through zoom system, pancreatic system 8 amplification imagings again.Plane mirror 7 is bonded on the piezoelectric ceramics 13, and computing machine 11 comes drive pressure electroceramics 13 flexible by control Driver Circuit 12, thereby plane mirror 7 is moved, and realizes the phase shift of reference light.The duplicate measurements precision of this test macro is: radius-of-curvature relative error≤1%, sphere summit offset≤2 μ m does not provide the measuring accuracy at optical fiber height and end slope angle.
Formerly technology [1] is though realized the measurement of end surface of optical fiber connector geometric parameter, and the defective that this technology exists has weakened its measuring accuracy.This shows following two aspects:
(1) in the end surface of optical fiber connector geometric parameter, the calculating at sphere summit offset, optical fiber height and end slope angle all must be with the prerequisite that is defined as of fiber optic hub position.This technology is only determined the position of fiber optic hub by the three-dimensional appearance data of tested optical fiber connector ends, this is insecure.Desirable end surface of optical fiber connector is a smooth and continuous sphere that is made of fiber end face and contact pin body end face, promptly is that the optical fiber height is 0, so grind in the production run at the joints of optical fibre, makes every effort to make the difference in height minimum of fiber end face and contact pin body end face.Therefore, usually end face is adopted integral grinding, fiber end face and contact pin body end face are formed seamlessly transit.Because the step-like sudden change of both few formation, only be difficult to distinguish the relative position of optical fiber and contact pin body from the three-dimensional appearance data of end face, just be difficult to accurately determine the position of fiber optic hub, thereby cannot say for sure to demonstrate,prove the measuring accuracy at sphere summit offset, optical fiber height and end slope angle.
(2) this technology adopts Newton ring to measure the radius-of-curvature of end face, and this just must be by artificial interpretation Newton ring fringe order, and precision is not high, and needs manual intervention, is not suitable for the automatic measurement of instrumentation.
Summary of the invention
Purpose of the present invention is exactly in order to overcome the deficiency in the above-mentioned technology formerly, a kind of end surface of optical fiber connector geometric parameter measurement instrument to be provided, and this instrument should have the characteristics of measuring high precision and robotization.
Technical solution of the present invention is as follows:
A kind of end surface of optical fiber connector geometric parameter measurement instrument, it adopts the Twyman-Green interferometer structure, it is characterized in that comprising light source, along being equipped with collimating and beam expanding system successively with optical axis ground on the light emitted bundle working direction of this light source, beam splitter, dimmer and the reference planes catoptron that is bonded on the piezoelectric ceramics, on the center of passing beam splitter and direction perpendicular to the light emitted light beam, one end of beam splitter is equipped with the tested optical fiber connector, one optical system is between this beam splitter and the joints of optical fibre, the other end of beam splitter is equipped with lens and photodetector, this photodetector is connected to computing machine through analog to digital converter, and this computing machine links to each other with described piezoelectric ceramics through driving circuit.
Described light source is the single longitudinal mode laser of frequency stabilization, can be semiconductor laser or solid state laser or gas laser.
Described beam-expanding collimation system is the structure beam-expanding collimation system of looking in the distance, or optical fiber-lens arrangement beam-expanding collimation system, or prism-lens arrangement beam-expanding collimation system.
Described beam splitter is that the inclined-plane is coated with spectro-film, and the right angle face is coated with the Amici prism of full-trans-parent film, or simultaneously is coated with spectro-film, and another side is coated with the parallel flat of full-trans-parent film.
Described optical system is the incident collimated light can be contracted by certain multiple to restraint thin collimated light, and the optical system of certain imaging amplifying power is arranged, as the structural system of looking in the distance.
Described photodetector is the two-dimensional array charge-coupled image sensor, or the complementary metal oxide semiconductor (CMOS) detector.
Described driving circuit is the action of drive pressure electroceramics to make the plane mirror motion, reference beam is carried out the circuit of phase modulation (PM).The phase modulation (PM) form of described phase-modulation circuit can be step-by-step movement phase modulation (PM), LINEAR CONTINUOUS phase modulation (PM) or sinusoidal phase modulation form.
Described dimmer is photoswitch or optical chopper.
The step of this apparatus measures end surface of optical fiber connector geometric parameter is as follows:
1. computing machine output control signal makes the dimmer in the reference path light tight, does not produce reference light, obtains the end surface of optical fiber connector picture by photodetector, sends into computing machine after the analog to digital converter analog to digital conversion;
2. computing machine output control signal makes the dimmer printing opacity in the reference path, produce reference light, tested optical fiber connector ends reflected probe light beam and reference beam produce interferes, and adopt 4 to advance phase modulation technique step by step, on photodetector, obtain 4 width of cloth interference images, after the analog to digital converter analog to digital conversion, send into computing machine;
3. 4 width of cloth interference image phase extraction are obtained wrapped phase figure, adopt quality guiding phase-unwrapping algorithm to launch wrapped phase figure based on new quality figure, and the three-dimensional appearance z of acquisition end surface of optical fiber connector (x, y);
4. according to the three-dimensional appearance data of the end surface of optical fiber connector of gained, utilize the least square fitting algorithm, try to achieve sphere centre coordinate and radius-of-curvature;
5. end surface of optical fiber connector is looked like to carry out the Hough conversion, determine the center of optical fiber;
6. by the sphere center position o of contact pin body
cCenter o with optical fiber
1o
2(or o
1o
2') obtain sphere summit offset Δ;
7. (Δ/R) obtains the end slope angle α of the joints of optical fibre by the computing formula α=arcsin at end slope angle;
8. obtain optical fiber height value H.
Above-mentioned work is also finished automatically by computer control entirely.
Advantage of the present invention:
1, measuring accuracy obtains bigger raising.
(1) phase unwrapping technology decisive role in the high-acruracy survey of end surface of optical fiber connector pattern.Under low noise conditions, the branch of the general Goldstein of employing etc. blocks algorithm (R.M.Goldstein, H.A.Zebker, C.L Werner Satellite radar interferometry:two-dimensional phase unwrapping[J] .Radio Science, 1988,23 (4): 713-720) can correctly launch wrapped phase, but under moderate or strong noise situation, because the intrinsic defective of this algorithm can cause the mistake of phase unwrapping.And the quality guiding phase unwrapping new method based on new quality figure that the present invention proposes, launch the phase place of the higher some correspondence of quality earlier, launch wrapped phase figure successively by the quality height, can avoid error transfer, even inevitable phase unwrapping error occurs, also can be limited in minimum regional area, when strong noise, still can launch wrapped phase accurately.This just phase developing method robustness has preferably guaranteed the high-acruracy survey of end surface of optical fiber connector pattern.
(2) formerly technology [1] is difficult to the accurately position of definite fiber optic hub, the present invention is provided with a dimmer in the interferometer reference path, when making dimmer light tight, obtain the end surface of optical fiber connector picture, utilize Hough conversion circle detection algorithm can accurately determine the center of optical fiber, the bearing accuracy of fiber optic hub has improved the measuring accuracy at sphere summit offset, optical fiber height and end slope angle in 0.2 pixel wide scope.
(3) formerly technology [1] is measured the radius-of-curvature of end faces with limited several interference rings, and precision is not high, and the present invention chooses the coordinate datas of hundreds of and even thousands of points and participates in least square fittings and calculate on contact pin body sphere, and the measuring accuracy of radius-of-curvature is higher.
The experimental measurements of specific embodiment shows, the end surface of optical fiber connector geometric parameter measurement instrument of being developed according to the present invention, relative measurement error≤0.05% of radius-of-curvature, sphere summit offset≤0.06 μ m.This shows that the measuring accuracy of radius-of-curvature and sphere summit offset is respectively formerly in the technology [1] 20 times and 33 times of corresponding index.
2, measure robotization.
When formerly technology [1] is measured radius-of-curvature with Newton ring, need fringe order by artificial interpretation Newton ring.And each measuring process of the present invention is all finished by computing machine, does not need manual intervention.After the present invention realizes instrumentation, need not the user, use easy and simple to handle the measuring process analysis and distinguishing.
Below in conjunction with embodiment and accompanying drawing the present invention is elaborated.
Description of drawings
Fig. 1 is an end surface of optical fiber connector geometric parameter synoptic diagram.
Fig. 2 is the structural representation of technology [1] end surface of optical fiber connector interference testing system formerly
Fig. 3 is an end surface of optical fiber connector geometric parameter measurement instrument structural representation of the present invention.
Fig. 4 is the measurement process flow diagram of end surface of optical fiber connector geometric parameter measurement instrument of the present invention.
Fig. 5 is the structural representation of another embodiment of end surface of optical fiber connector geometric parameter measurement instrument of the present invention.
Embodiment
See also Fig. 3 earlier, Fig. 3 is an end surface of optical fiber connector geometric parameter measurement instrument structural representation of the present invention.As seen from the figure, end surface of optical fiber connector geometric parameter measurement instrument of the present invention adopts the Twyman-Green interferometer structure, comprise light source 1, along being equipped with collimating and beam expanding system 2 successively with optical axis ground on the emission light beam working direction of light source 1, beam splitter 3, dimmer 13 is bonded in the reference planes catoptron 6 on the piezoelectric ceramics 12.On the center of passing beam splitter 3 and the direction perpendicular to light source 1 emission light beam, an end of beam splitter 3 is equipped with tested optical fiber connector 5 and optical system 4, and the other end is equipped with lens 7 and photodetector 8.Piezoelectric ceramics 12 links to each other with computing machine 10 through driving circuit 11, and photodetector 8 is connected to computing machine 10 through analog to digital converter 9.
Above said light source 1 refer to the single longitudinal mode laser of frequency stabilization, can be semiconductor laser, solid state laser or gas laser.
Said beam-expanding collimation system 2 refers to the optical component that can form the collimation directional light, can be the structure beam-expanding collimation system of looking in the distance, or optical fiber-lens arrangement beam-expanding collimation system, or prism-lens arrangement beam-expanding collimation system.
Said optical system 4 refers to the incident collimated light to be contracted by certain multiple restraints thin collimated light, and the optical system of certain imaging amplifying power is arranged, as the structural system of looking in the distance.
Said photodetector 8 is the two-dimensional detectors that light signal can be converted to electric signal, as the two-dimensional array charge-coupled device (CCD), or complementary metal oxide semiconductor (CMOS) (CMOS) detector.
Said driving circuit 11 refers to and can 12 actions of drive pressure electroceramics make plane mirror 6 motions, can carry out the circuit of the phase modulation (PM) of a definite form to interference signal.These phase modulation (PM) forms can be the phase modulation (PM) forms that step-by-step movement phase modulation (PM), LINEAR CONTINUOUS phase modulation (PM) or sinusoidal phase modulation etc. can realize accurate difference interference metering.
Said dimmer 13 refer to can make a branch of light by or the device that is blocked, as photoswitch or optical chopper etc.
As shown in Figure 3, the laser that light source 1 sends forms collimated light beam by beam-expanding collimation system 2, is divided into two bundles through beam splitter 3.One reflecting bundle light, promptly detecting light beam is through shining after the optical system 4 on the end face of the joints of optical fibre 5, and its end face reflection light is collected the end face of the formation joints of optical fibre 5 as light beam through optical system 4 again.When dimmer 13 printing opacities, another transmitted beam illumination of beam splitter 3 is mapped on the plane mirror 6, and its reflected light is interfered as the light beam generation through beam splitter 3 reflections and the end face of the joints of optical fibre 5 that see through through beam splitter 3 as the reference light beam.On photodetector 8, send into computing machine 10 and carry out Digital Image Processing through behind the analog to digital converter 9 by its output signal through lens 7 amplification imagings for interference pattern.Phase-modulator is made of piezoelectric ceramics 12 and driving circuit 11 thereof.Plane mirror 6 is bonded on the piezoelectric ceramics 12, computing machine 10 comes 12 actions of drive pressure electroceramics by control Driver Circuit 11, thereby plane mirror 6 was uniformly-spaced moved for 4 steps on optical axis direction, each stepping makes reference light phase shift pi/2, realize the phase modulation (PM) of interference signal, computing machine 10 is gathered corresponding 4 width of cloth interference images.When dimmer 13 was light tight, another Shu Guang of beam splitter 3 was blocked, and can't produce reference light, and what received on the photodetector 8 this moment is the end face picture of the joints of optical fibre, and what computing machine 10 obtained is the digital picture of corresponding end surface of optical fiber connector picture.
End surface of optical fiber connector geometric parameter measurement instrument of the present invention is provided with a dimmer 13 in the interferometer reference path, when making dimmer 13 light tight, do not produce reference light, thereby obtains the end surface of optical fiber connector picture, accurately determines the position of fiber optic hub thus; When making dimmer 13 printing opacities, produce reference light, utilize 4 to advance the three-dimensional appearance data that phase modulation technique obtains end surface of optical fiber connector step by step.By position and the three-dimensional appearance data of end surface of optical fiber connector, the end face geometric parameter of measuring optical fiber connector accurately that obtains fiber optic hub accurately.
The concrete measuring process of this measuring instrument is:
1. when computing machine 10 output control signals make dimmer 13 in the interferometer reference path light tight, do not produce reference light, photodetector 8 obtains the end surface of optical fiber connector pictures, sends into computing machine 10 after analog to digital converter 9 analog to digital conversion.
2. when computing machine 10 output control signals make dimmer 13 printing opacities in the interferometer reference path, produce reference light, the detecting light beam of tested optical fiber connector 5 end face reflections and reference beam produce interferes, adopt 4 to advance phase modulation technique step by step, on photodetector 8, obtain 4 width of cloth interference images, after analog to digital converter 9 analog to digital conversion, send into computing machine 10.
3. 4 width of cloth interference images of step 2 acquisition are
I
i(t)=I
0(x, y) 1+ γ (x, y) cos[ (x, y)+α
i], i=1, I in 2,3,4 (1) formulas
0(x y) is the background light intensity, and (x y) is fringe contrast to γ, and (x y) is the phase place of end face each point correspondence to be measured, α to
iBe the phase-shift phase of reference light, be followed successively by 0, pi/2, π, 3 pi/2s.Light distribution I according to four width of cloth interferograms
i, the phase place of each point correspondence can be tried to achieve by following formula on the end face,
Because the restriction of arctan function, (x, y) [π, π) (x, y), (x, y) corresponding relation between is Nei wrapped phase φ Dui Ying principal value interval for it and actual phase to be actually according to the resulting phase place of following formula
(x, y)=2k (x, y) π+φ (x, y), (3) wherein k (x y) is the integer an of the unknown.Must be by phase unwrapping, promptly determine k (x, y), by wrapped phase figure φ (x, y) rebuild actual phase figure (x, y).
The present invention adopts a kind of quality guiding phase unwrapping new method based on new quality figure that wrapped phase figure is carried out phase unwrapping.Quality figure is that the wrapped phase of the some correspondence that quality is higher has higher fiduciary level in order to a two-dimensional array of measurement wrapped phase figure phase data quality height, and phase unwrapping is difficult for makeing mistakes; And the lower corresponding noise of point of quality or owe sampled point, the fiduciary level of wrapped phase is lower, causes the phase unwrapping mistake easily.New quality figure proposed by the invention can directly be obtained by the wrapped phase diagram data, and (m, n) Dui Ying mass value is defined as pixel among the quality figure
Wherein l is so that (m n) is the length of the square window at center, Δ
I, j xAnd Δ
I, j yBe the wrapped phase partial derivative, both can be calculated by following formula
With the point that quality is the highest among the quality figure is starting point, and relatively this and the phase value of 8 middle every bits around it are if phase differential between the two is greater than π, by the phase place of these consecutive point is deducted 2 π, even (x y)=-1 launches the phase place of these consecutive point to k; If between the two phase differential is less than-π, by the phase place of these consecutive point is added 2 π, even (x y)=1 launches the phase place of these consecutive point to k; If the phase differential absolute value is less than π, can make k that (x y)=0 launches the phase place of these consecutive point between the two.Behind adjacent 8 phase unwrappings, they are put into a formation Q, and just sort by its corresponding quality.Get quality is the highest in the formation point as seed points, launch 8 points that are adjacent as previously mentioned, and they are put into formation Q and by the quality height to queue reordering, get quality is the highest in the formation point then as new seed points, launch its 8 adjacent points.So repeatedly, be that sky is finished whole phase unwrapping process until formation Q.This new phase developing method launches the phase place of the higher some correspondence of quality earlier, launches wrapped phase figure successively by the quality height, can be lower quality, and also be that the lower point of fiduciary level is placed on last expansion, avoided error transfer.Even inevitable phase unwrapping error occurs, also can be limited in minimum regional area.Therefore the robustness of this phase developing method is good, still can launch wrapped phase figure accurately under the strong noise condition.
Wrapped phase figure φ (x, y) behind phase unwrapping, obtain actual phase figure (x, y), according to formula
(x, y), wherein λ is the wavelength of light source can to obtain the three-dimensional appearance z of tested optical fiber connector ends.
4. according to the three-dimensional appearance data of the end surface of optical fiber connector of gained, on contact pin body sphere, choose some points, with contact pin body centre of sphere o
cCoordinate x
c, y
cAnd z
cRadius of curvature R is asked parameter as generation, and the coordinate data x of every bit correspondence, y and z substitution sphere formula adopt the least square fitting algorithm computation to go out contact pin body centre of sphere o
cCoordinate and radius of curvature R.When utilizing the least square fitting algorithm, the coordinate data that generally can choose hundreds of points on contact pin body sphere participates in The Fitting Calculation, the measuring accuracy height of sphere centre coordinate and radius-of-curvature.
5. because the contact pin body is different with the reflectivity of optical fiber, the optical fiber edge contour is clear in the end surface of optical fiber connector picture that step 1 obtains, utilize Hough conversion circle detection algorithm (the Yuen S Y in the computer vision algorithms make, Ma C H.An investigation of the nature ofparameterization for the Hough transform[J] .Pattern Recognition, 1997,30 (6): 1009-1040) accurately try to achieve the center of optical fiber.
The Hough conversion be seek a kind of from the zone boundary (spatial domain) with the corresponding parameters that most of frontier points are satisfied this regional border is described to the conversion of parameter space.Hidden situation that the border that cause some interruption take place owing to noise or a target by another target for the zone boundary, most other computer vision algorithms make lost efficacy, and the Hough conversion still can realize identification reliably and detect.
Investigate and definite circumference at the plane of delineation (XOY plane).Make { (x
i, y
i) | i=1,2 ..., n} is the set that desire is determined the point on the circumference in the image, and (x, y) in the set a bit, it the parameter coordinate system (a, b, r) in equation be:
(a-x)
2+(b-y)
2＝r
2 (8)
Obviously this equation is the three-dimensional conical surface, and is corresponding with it for the conical surface of the three-dimensional of determining arbitrarily in the image that parameter space is a bit all arranged.Set { (x for any point on the circumference
i, y
i), these three-dimensional conical surfaces constitute conical surfaces bunch.If the point in the set is on same circumference, then these circular cones bunch intersect on the parameter space certain a bit (a
0, b
0, r
0), this point lucky central coordinate of circle and radius of a circle corresponding to the plane of delineation.
Parameter space (a, b, r) in, r be made as increase progressively variable, each step iteration is fixing r earlier all, perpendicular to r (a b) asks on the plane corresponding to the center of circle and is (x
i, y
i) the circumference each point, and with the point on the track (a, b's array A r) add up on the respective point in that a three-dimensional of plane map adds up therewith.When all (x, after y) point transformation was finished, (r) value of each element was carried out statistical for a, b, and the array element that higher value is arranged is corresponding to circle or circular arc, and (a, b r) can be used as round fitting parameter to its parameter to the array A that adds up.There is the array element of smaller value then to give up.
When the present invention utilizes Hough conversion circle detection algorithm to ask the center of optical fiber, the incremental steps of radius of circle parameter is 0.2 pixel, resulting central coordinate of circle can accurately be positioned in the 0.2 pixel wide scope, therefore the bearing accuracy of fiber optic hub is 0.2 pixel wide, has guaranteed the high measurement accuracy at sphere summit offset, optical fiber height and end slope angle.
6. by the sphere center position o of contact pin body
cCenter o with optical fiber
1o
2(or o
1o
2') obtain sphere summit offset Δ, shown among Fig. 16;
7. by the computing formula at end slope angle
(Δ/R) (9) obtains the end slope angle α of the joints of optical fibre to α=arcsin;
8. by the fibre core end points o of the center position of optical fiber
2(or o
2') the Z coordinate figure and this put on the corresponding least square fitting sphere and put o
1Z coordinate figure poor, obtain optical fiber height value H.
Above-mentioned steps is all finished automatically by computing machine, and its process flow diagram as shown in Figure 4.
Another specific embodiment structure of end surface of optical fiber connector geometric parameter measurement instrument of the present invention as shown in Figure 5.It is the He-Ne laser instrument of 632.8nm that light source 1 adopts wavelength.Lens 2a, 2b constitute the structure beam-expanding collimation system of looking in the distance.Beam splitter 3 is laser beam splitter prisms of making at the 632.8nm wavelength, and splitting ratio is 1: 1.Lens 4a, 4b constitute the structural type optical system 4 of looking in the distance, and both focal distance ratios are 3.Become thinner collimated light behind a branch of smooth scioptics 4a, the 4b from beam splitter 3, it is radiated on the end face of testing fiber connector 5.This end face reflection light is collected through 4a, 4b again, the end face picture of the joints of optical fibre 5 that form between beam splitter 3 and lens 7.Dimmer 13 is the light tight plate washer of rotation that a small machine drives, and it has the reference path of being in neutralization to be in the outer two states of reference path.When making light tight plate washer 13 be in outside the reference path, another bundle light direct irradiation of beam splitter 3 is that plane mirror 6 is bonded on the piezoelectric ceramics 12 on the plane mirror 6 of λ/20 in flatness.The reflected light of plane mirror 6 is interfered with the end face picture generation of the joints of optical fibre 5 as reference light.Interference pattern is on 752 * 582 the area array CCD 8 in pixel through lens 7 amplification imagings, and its output signal is gathered by computing machine 10 through behind analog to digital converter 9.Computing machine 10 control Driver Circuit 11 produce driving DC voltage, its ripple voltage＜5mV; This driving voltage control piezoelectric ceramics 12 drives step-length such as plane mirrors 6 and moves, realize reference light etc. the phase shift of step-length step-by-step movement.Stepping is 4 times continuously, and computing machine 10 is gathered corresponding four width of cloth interference signals.When making light tight plate washer 13 be in the reference path, another Shu Guang of beam splitter 3 is blocked, and can't produce reference light, and what received on the photodetector 8 this moment is the end surface of optical fiber connector picture, and what computing machine 10 was gathered is the end surface of optical fiber connector picture.
This measuring instrument is when utilizing least square fitting algorithm computation sphere centre coordinate and radius-of-curvature, and the coordinate data of choosing 3600 points on contact pin body sphere participates in The Fitting Calculation.
Adopt this end surface of optical fiber connector geometric parameter measurement instrument, use the special measurement software of writing according to the present invention, can finish the measurement of all end surface of optical fiber connector geometric parameters quickly and easily.One joints of optical fibre are measured 20 times on this end surface of optical fiber connector geometric parameter measurement instrument, the measurement result of end surface of optical fiber connector geometric parameter is: radius-of-curvature is 12.847mm, sphere summit offset is 30.20 μ m, and the end slope angle is 0.135 °, and the optical fiber height is-67.2nm.
The end surface of optical fiber connector geometric parameter measurement instrument of being developed according to the present invention reaches following index:
1) measurement range of end surface of optical fiber connector radius-of-curvature be 3mm～+ ∞, the duplicate measurements precision is less than 0.05%;
2) measurement range of joints of optical fibre sphere summit offset is 0～150 μ m, and the duplicate measurements precision is less than 0.06 μ m;
3) end surface of optical fiber connector incline measurement scope is 0～12 °, and the duplicate measurements precision is less than 0.0004 °;
4) end surface of optical fiber connector optical fiber height measurement range is-300～300nm, and the duplicate measurements precision is less than 5.5nm.
Claims (10)
1, a kind of end surface of optical fiber connector geometric parameter measurement instrument, it adopts the Twyman-Green interferometer structure, it is characterized in that comprising light source (1), along being equipped with collimating and beam expanding system (2) successively with optical axis ground on the light emitted bundle working direction of this light source (1), beam splitter (3), dimmer (13) and be bonded in reference planes catoptron (6) on the piezoelectric ceramics (12), on the center of passing beam splitter (3) and direction perpendicular to light source (1) emission light beam, one end of beam splitter (3) is equipped with tested optical fiber connector (5), one optical system (4) is between the beam splitter (3) and the joints of optical fibre (5), the other end of beam splitter (3) is equipped with lens (7) and photodetector (8), this photodetector (8) is connected to computing machine (10) through analog to digital converter (9), and this computing machine (10) links to each other with described piezoelectric ceramics (12) through driving circuit (11).
2, end surface of optical fiber connector geometric parameter measurement instrument according to claim 1 is characterized in that described light source (1) is the single longitudinal mode laser of frequency stabilization, can be semiconductor laser or solid state laser or gas laser.
3, end surface of optical fiber connector geometric parameter measurement instrument according to claim 2, it is characterized in that described beam-expanding collimation system (2) is the structure beam-expanding collimation system of looking in the distance, or optical fiber-lens arrangement beam-expanding collimation system, or prism-lens arrangement beam-expanding collimation system.
4, end surface of optical fiber connector geometric parameter measurement instrument according to claim 3, it is characterized in that described beam splitter (3) is that the inclined-plane is coated with spectro-film, the right angle face is coated with the Amici prism of full-trans-parent film, or simultaneously is coated with spectro-film, and another side is coated with the parallel flat of full-trans-parent film.
5, end surface of optical fiber connector geometric parameter measurement instrument according to claim 4, it is characterized in that described optical system (4) is the incident collimated light can be contracted by certain multiple to restraint thin collimated light, and the optical system of certain imaging amplifying power as the structural system of looking in the distance arranged.
6, end surface of optical fiber connector geometric parameter measurement instrument according to claim 5 is characterized in that described photodetector (8) is the two-dimensional array charge-coupled image sensor, or the complementary metal oxide semiconductor (CMOS) detector.
7, end surface of optical fiber connector geometric parameter measurement instrument according to claim 6 is characterized in that described driving circuit (11) is drive pressure electroceramics (12) action to make plane mirror (6) motion, carries out the circuit of phase modulation (PM) to reference beam.
8, end surface of optical fiber connector geometric parameter measurement instrument according to claim 7, the phase modulation (PM) form that it is characterized in that described phase-modulation circuit can be step-by-step movement phase modulation (PM), LINEAR CONTINUOUS phase modulation (PM) or sinusoidal phase modulation form.
9, according to claim 1 or 2 or 3 or 4 or 5 or 6 or 7 or 8 described end surface of optical fiber connector geometric parameter measurement instrument, it is characterized in that described dimmer (13) is photoswitch or optical chopper.
10, end surface of optical fiber connector geometric parameter measurement instrument according to claim 1 is characterized in that the step of this apparatus measures end surface of optical fiber connector geometric parameter is as follows:
1. computing machine (10) output control signal makes the dimmer (13) in the reference path light tight, does not produce reference light, and photodetector (8) obtains the end surface of optical fiber connector picture, sends into computing machine (10) after analog to digital converter (9) analog to digital conversion;
2. computing machine (10) output control signal makes dimmer (13) printing opacity in the reference path, produce reference light, the detecting light beam of tested optical fiber connector (5) end face reflection and reference beam produce interferes, and adopt 4 to advance phase modulation technique step by step, go up acquisition 4 width of cloth interference images at photodetector (8), after analog to digital converter (9) analog to digital conversion, send into computing machine (10);
3. computing machine (10) obtains wrapped phase figure to 4 width of cloth interference image phase extraction, adopts the quality guiding phase-unwrapping algorithm based on new quality figure to launch wrapped phase figure, and the three-dimensional appearance z of acquisition end surface of optical fiber connector (x, y);
4. according to the three-dimensional appearance data of the end surface of optical fiber connector of gained, utilize the least square fitting algorithm, try to achieve sphere centre coordinate and radius-of-curvature;
5. end surface of optical fiber connector is looked like to carry out the Hough conversion, determine the center of optical fiber;
6. obtain sphere summit offset Δ;
7. (Δ/R) obtains the end slope angle α of the joints of optical fibre by the computing formula α=arcsin at end slope angle;
8. obtain optical fiber height value H.
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| CN 200410024872 CN1277109C (en) | 2004-06-02 | 2004-06-02 | Optical fibre connector face geometrical parameter measuring instruments |
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| CN 200410024872 CN1277109C (en) | 2004-06-02 | 2004-06-02 | Optical fibre connector face geometrical parameter measuring instruments |
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| CN1277109C CN1277109C (en) | 2006-09-27 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100451535C (en) * | 2006-12-19 | 2009-01-14 | 中国科学院上海光学精密机械研究所 | Phase-shift interference image information processing system and processing method thereof |
| CN102128597A (en) * | 2010-11-19 | 2011-07-20 | 福建师范大学 | Device for detecting surface shape deviation of lens |
| CN102128596A (en) * | 2010-11-19 | 2011-07-20 | 福建师范大学 | Lens surface shape error detecting device and method thereof |
| CN110017791A (en) * | 2019-04-03 | 2019-07-16 | 中国科学院西安光学精密机械研究所 | End surface of optical fiber connector parameter measuring apparatus and measurement method |
| CN110455218A (en) * | 2019-09-18 | 2019-11-15 | 广州计量检测技术研究院 | Fiber end face interference correction standard specimen and calibration method |
| CN111174717A (en) * | 2020-01-10 | 2020-05-19 | 长飞光纤光缆股份有限公司 | Optical fiber geometric parameter testing system and method |
Families Citing this family (1)
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| CN105157625A (en) * | 2015-05-29 | 2015-12-16 | 北京航空航天大学 | Fiber end face microscopic interferometry system based on zoom imaging lens |
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- 2004-06-02 CN CN 200410024872 patent/CN1277109C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100451535C (en) * | 2006-12-19 | 2009-01-14 | 中国科学院上海光学精密机械研究所 | Phase-shift interference image information processing system and processing method thereof |
| CN102128597A (en) * | 2010-11-19 | 2011-07-20 | 福建师范大学 | Device for detecting surface shape deviation of lens |
| CN102128596A (en) * | 2010-11-19 | 2011-07-20 | 福建师范大学 | Lens surface shape error detecting device and method thereof |
| CN102128596B (en) * | 2010-11-19 | 2012-09-26 | 福建师范大学 | Lens surface shape error detecting device and method thereof |
| CN110017791A (en) * | 2019-04-03 | 2019-07-16 | 中国科学院西安光学精密机械研究所 | End surface of optical fiber connector parameter measuring apparatus and measurement method |
| CN110455218A (en) * | 2019-09-18 | 2019-11-15 | 广州计量检测技术研究院 | Fiber end face interference correction standard specimen and calibration method |
| CN111174717A (en) * | 2020-01-10 | 2020-05-19 | 长飞光纤光缆股份有限公司 | Optical fiber geometric parameter testing system and method |
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